阅读说明：本技术 固定装置、监测探头组件以及电子显微镜系统 (Fixing device, monitoring probe assembly and electron microscope system ) 是由 田贵宾 于 2021-08-25 设计创作，主要内容包括：本申请提供了一种固定装置、监测探头组件以及电子显微镜系统。所述固定装置包括：固定装置用于对电子显微镜的样品室的监测探头进行固定,其特征在于,固定装置包括：连接部,适于与样品室的外壁连接,且连接部的中部设置有观察窗,观察窗与连接部之间通过密封部真空密封；固定部,位于连接部的一侧,固定部用于将监测探头固定在与观察窗对应的位置,且固定部围绕监测探头设置,以阻挡样品室外的光线通过观察窗进入样品室。本申请通过设置连接部以及固定部,可以将监测探头固定在样品室外部,并且可以避免外界光线进入样品室内部,还可以使样品室具有良好的密闭性。(The application provides a fixing device, a monitoring probe assembly and an electron microscope system. The fixing device includes: fixing device is used for fixing the monitor probe of electron microscope's sample room, its characterized in that, fixing device includes: the connecting part is suitable for being connected with the outer wall of the sample chamber, an observation window is arranged in the middle of the connecting part, and the observation window and the connecting part are sealed in a vacuum mode through a sealing part; the fixing part is located on one side of the connecting part and used for fixing the monitoring probe at a position corresponding to the observation window, and the fixing part is arranged around the monitoring probe so as to prevent light outside the sample chamber from entering the sample chamber through the observation window. This application is through setting up connecting portion and fixed part, can fix monitor outside the sample room to inside can avoiding external light to get into the sample room, can also make the sample room have good seal.)

1. A fixture for holding a monitor probe of a sample chamber of an electron microscope, the fixture comprising:

the connecting part is suitable for being connected with the outer wall of the sample chamber, an observation window is arranged in the middle of the connecting part, and the observation window and the connecting part are in vacuum sealing through a sealing part;

the fixing part is located on one side of the connecting part and used for fixing the monitoring probe at a position corresponding to the observation window, and the fixing part surrounds the monitoring probe so as to prevent light outside the sample chamber from entering the sample chamber through the observation window.

2. The fixation device of claim 1, wherein the fixation portion comprises:

and the positioning part is fixedly connected with the connecting part and is used for positioning the monitoring probe at a position corresponding to the observation window.

3. The fixation device of claim 2, wherein the fixation portion further comprises:

the clamping part is detachably connected with the positioning part, and the clamping part and the positioning part act together to clamp and fix the monitoring probe.

4. The fixation device of claim 1, wherein the fixation portion further comprises:

and the fastening part is positioned on the circumferential direction of the fixing part and is used for fastening the monitoring probe to the observation position.

5. The fixture according to claim 1, wherein the connecting portion comprises:

the blind plate comprises an observation window accommodating hole, the observation window is accommodated in the observation window accommodating hole, and the blind plate is suitable for being connected with the outer wall of the sample chamber;

and two sides of the flat plate part are respectively connected with the blind plate and the fixed part.

6. The fixture according to claim 5, further comprising:

the buffer part is positioned between the observation window and the flat plate part, and the observation window is in buffer connection with the flat plate part through the buffer part.

7. A fixation device as claimed in claim 1,

the observation window is made of organic glass.

8. The fixture according to claim 1, further comprising:

a housing having an inner cavity that accommodates the connecting portion, the fixing portion, and the monitoring probe.

9. A monitoring probe assembly, comprising:

the fixture of any one of claims 1-8; and

the probe is monitored.

10. An electron microscope system comprising:

a sample chamber; and

the monitoring probe assembly of claim 9;

wherein the monitor probe assembly is secured to the exterior of the sample chamber.

Technical Field

The application relates to the field of electron microscopes, in particular to a fixing device, a monitoring probe assembly and an electron microscope system.

Background

Electron Microscope (EM) is an important Electron optical instrument, and can be applied to many fields. During the use of an electron microscope, the conditions inside the sample chamber need to be monitored by a monitoring probe. There are problems with locating the monitoring probe inside the sample chamber. For example, the heat generated by the monitor probe may interfere with the observation of the sample, the monitor probe may occupy the space inside the sample chamber, and the monitor probe may adsorb ambient air, resulting in a decrease in the vacuum pumping efficiency.

Disclosure of Invention

In view of the above, the present application provides a fixing device, a monitoring probe assembly and an electron microscope system. The fixing means may fix the monitor probe outside the sample chamber.

In a first aspect, the present application provides a fixing device for fixing a monitor probe of a sample chamber of an electron microscope, the fixing device comprising: the connecting part is suitable for being connected with the outer wall of the sample chamber, an observation window is arranged in the middle of the connecting part, and the observation window and the connecting part are in vacuum sealing through a sealing part; the fixing part is located on one side of the connecting part and used for fixing the monitoring probe at a position corresponding to the observation window, and the fixing part surrounds the monitoring probe so as to prevent light outside the sample chamber from entering the sample chamber through the observation window.

As an embodiment, the fixing part includes: and the positioning part is fixedly connected with the connecting part and is used for positioning the monitoring probe at a position corresponding to the observation window.

As an embodiment, the fixing part further includes: the clamping part is detachably connected with the positioning part, and the clamping part and the positioning part act together to clamp and fix the monitoring probe.

As an embodiment, the fixing part further includes: and the fastening part is positioned on the circumferential direction of the fixing part and is used for fastening the monitoring probe to the observation position.

As an embodiment, the connection part includes: the blind plate comprises an observation window accommodating hole, the observation window is accommodated in the observation window accommodating hole, and the blind plate is suitable for being connected with the outer wall of the sample chamber; and two sides of the flat plate part are respectively connected with the blind plate and the fixed part.

As an embodiment, the fixing device further comprises: the buffer part is positioned between the observation window and the flat plate part, and the observation window is in buffer connection with the flat plate part through the buffer part.

As one embodiment, the material of the observation window is organic glass.

As an embodiment, the fixing device further comprises: a housing having an inner cavity that accommodates the connecting portion, the fixing portion, and the monitoring probe.

In a second aspect, the present application provides a monitoring probe assembly comprising: the fixture of the first aspect, and a monitoring probe.

In a third aspect, the present application provides an electron microscope system comprising: a sample chamber, and the monitor probe assembly of the second aspect; wherein the monitor probe assembly is secured to the exterior of the sample chamber.

This application can fix monitor probe outside the sample room through setting up connecting portion and fixed part. And, this application is through setting up the fixed part around monitor probe, can avoid the outside light of sample room to get into inside the sample room, and then has avoided the outside light of sample room to produce harmful effects to the device in the electron microscope sample room. In addition, this application makes the sample room have good leakproofness through setting up the sealing, with the observation window vacuum seal of connecting portion.

Drawings

Fig. 1 is a fixing device according to an embodiment of the present disclosure.

Fig. 2 is another fixing device provided in the embodiment of the present application.

Fig. 3 is a front view of the fixture of fig. 2 assembled.

Fig. 4 is a cross-sectional view of the fastening device shown in fig. 3 taken along the direction a-a.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings of the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments.

An electron microscope is an electron optical instrument. The resolution of the image of the electron microscope can reach the nanometer level and is even better than 1.0 nanometer. Therefore, the electron microscope plays an important role in the fields of new materials, new energy, national defense, scientific research and the like.

The electron microscope includes various types, and the operation of the electron microscope is exemplified below by taking a scanning electron microscope as an example.

A scanning electron microscope scans line by line on the surface of a sample with a focused electron beam. The scanning electron microscope emits an electron beam that bombards the sample surface and generates secondary or backscattered electrons. The efficiency of secondary or backscattered electron generation by the sample surface is related to the sample surface topography or material. And then collecting the secondary electrons or back scattered electrons generated on the surface of the sample, and representing the position scanned by the electron beam on the surface of the sample and the quantity of the generated secondary electrons or back scattered electrons in the form of a two-dimensional image, thereby obtaining a secondary electron image or back scattered electron image of a scanning electron microscope.

During the use of electron microscopy, it is necessary to monitor the conditions within the sample chamber. For example, before observing the sample, the sample needs to be moved directly under the objective lens of the electron microscope. Alternatively, a plurality of samples to be observed exist in the sample chamber, and when the observation samples are switched, the observed samples also need to be moved away, and the samples to be observed need to be moved to be directly below the objective lens. During the movement of the sample, accidents such as the sample colliding with a device (e.g., an objective lens) within the sample chamber may occur. Therefore, the position or the moving state of the sample can be monitored to avoid the above problems.

The condition inside the sample chamber may be monitored using a monitor probe (or called a monitor probe or a monitor sensor, etc.). The monitoring probe may include, for example, a visual monitoring probe such as a CCD probe or a CMOS probe, or may include other types of sensors. The CCD probe and CMOS probe have similar principle, both utilize silicon photodiode to perform optical and electrical conversion, and then convert the converted signals into digital signals through an analog-to-digital converter chip, and the digital signals are stored by a flash memory or a built-in hard disk card after being compressed. Therefore, the CCD probe or the CMOS probe can easily transmit data to the computer. In addition, the CCD probe can be made into an integral component together with a lens, a peripheral processing circuit and the like.

To monitor the conditions inside the sample chamber, a monitoring probe may be installed inside the sample chamber. However, this can present a number of problems. On the one hand, the monitoring probe generates a certain amount of heat, which may interfere with the observation of the sample. On the other hand, the monitoring probe occupies the space inside the sample chamber, which affects the moving range of the sample stage. In addition, when the electron microscope is in operation, the sample chamber is in a vacuum state (high vacuum or low vacuum state). Therefore, before the electron microscope is operated, the sample chamber needs to be evacuated. The contents of the sample chamber may adsorb ambient air, which may result in a reduced efficiency of the vacuum. Therefore, placing the monitoring probe within the sample chamber also reduces the efficiency of the evacuation.

To address the above issues, the present application provides a securing device. Fig. 1 is a fixing device according to an embodiment of the present disclosure. The fixing device includes a connecting portion 110 and a fixing portion 120.

The connection portion 110 is adapted to be connected to an outer wall of a sample chamber of an electron microscope. It will be appreciated that the connection portion 110 may be connected in direct contact with the outer wall of the sample chamber, or may be indirectly connected through other components. The connection portion 110 may also be used as a fixing substrate for other components of the fixing device. Other components of the fixture may be connected to the connection portion 110. When the fixing device needs to be disassembled, the connecting part 110 and the sample chamber only need to be disassembled.

The middle of the connection portion 110 may be provided with a viewing window 111. The monitoring probe can be monitored from the outside to the inside of the electron microscope sample chamber through the observation window 111. Taking the CCD probe fixed outside the sample chamber as an example, the light in the sample chamber can be transmitted to the CCD probe through the observation window 111, so that the CCD probe can obtain an image in the sample chamber.

The viewing window 111 may also separate the interior of the sample chamber from the exterior of the sample chamber, thereby maintaining isolation of the environment inside the sample chamber from the external environment, which may be beneficial in maintaining the environment inside the sample chamber, e.g., maintaining the temperature within the sample chamber, etc.

Optionally, the observation window 111 and the connection portion 110 are vacuum-sealed by a sealing portion (not shown in fig. 1). The sealing part can be used for keeping a vacuum sealing state in the sample chamber, so that the sample chamber has good tightness. The fixing portion 120 is connected to the connecting portion 110. The fixing portion 120 is used to fix the monitoring probe to a position corresponding to the observation window 111 (hereinafter simply referred to as a monitoring position). The fixing means of the fixing portion 120 to the monitor probe is not limited in the present application, and may be fixed by, for example, clamping.

Light outside the sample chamber will enter the interior of the sample chamber through the observation window 111 or the gap between the observation window 111 and the monitoring probe. External light entering the sample chamber can affect some components within the electron microscope sample chamber. For example, for a scanning electron microscope, visible light can interfere with a secondary electron detector, such as an E-T type secondary electron detector.

In this case, the present application proposes to dispose the fixing portion 120 around the monitoring probe so as to block light outside the sample chamber from entering the sample chamber through the observation window 111. Taking a cylindrical monitoring probe as an example, the fixing portion 120 may be a hollow cylinder, and the inner diameter of the hollow cylinder matches with the outer diameter of the monitoring probe. When it is necessary to fix the monitoring probe, the monitoring probe may be fixed inside the fixing part 120. That is, the fixing portion 120 may enclose the monitoring probe, thereby blocking light outside the sample chamber from entering the sample chamber through the observation window 111.

The fixing device simple structure that this application provided. The connecting part and the fixing part are arranged, so that the monitoring probe can be fixed outside the sample chamber, and the problems of fixing the monitoring probe inside the sample chamber of the electron microscope are solved. And, through setting up the fixed part around monitor probe, can block that the outside light of sample room gets into the sample room through the observation window to the influence of external light to the components and parts in the sample room has been avoided. In addition, the sealing part is arranged, so that the observation window and the connecting part are sealed in a vacuum mode, and the vacuum state of the electron microscope during operation can be maintained.

As shown in fig. 1, the fixing portion 120 may include one or more of a positioning portion 121, a clamping portion 122, or a fastening portion 123.

The positioning part 121 may be fixedly connected with the connection part 110 such that a relative position of the positioning part 121 and the connection part 110 is determined. Therefore, when the monitoring probe is fixed, the monitoring probe can be quickly positioned at a desired position by the positioning portion 121.

The positioning portion 121 may be fixedly connected to the connecting portion 110 by a component such as a screw, or may be integrally formed with the connecting portion 110, which is not limited in this application.

The positioning portion 121 may be located, for example, in the circumferential direction of the monitoring channel 111, thereby positioning the monitoring probe at the monitoring position.

The present application does not limit the specific structure of the positioning portion 121, and may be provided according to the structure of the monitoring probe, for example. Taking the positioning portion 121 shown in fig. 1 as an example, the positioning portion 121 may have a semicircular structure. The inboard of semicircular structure can with the structure phase-match of columniform monitor probe to can be inboard with monitor probe embedding semicircular structure, and make monitor probe can not produce great aversion in location portion.

When the monitoring probe is installed, the monitoring probe can be directly positioned at the monitoring position through the positioning part 121 without repeatedly searching for a proper monitoring position, so that the time for installing the monitoring probe is saved, and the convenience degree for installing the monitoring probe is improved. After the installation of the monitoring probe is completed, the positioning portion 121 can also keep the monitoring probe at the monitoring position, so as to avoid the displacement of the probe.

The holding portion 122 is used to hold and fix the monitoring probe. The clamping portion 122 can act independently to clamp and fix the monitoring probe, and can also be matched with other components to clamp and fix the monitoring probe. One possible implementation manner is that the clamping portion 122 may cooperate with the positioning portion 121 to realize clamping fixation of the monitoring probe. This clamping and fixing manner allows the fixing portion 120 to have a relatively simple structure, and simultaneously realizes the positioning and fixing of the monitoring probe. Taking the clamping portion 122 shown in fig. 1 as an example, the clamping portion 122 may be a semicircle matching the semicircular positioning portion 121, and after the monitoring probe is mounted on the positioning portion 121, the clamping portion 122 may cooperate with the positioning portion 121 to clamp and fix the monitoring probe.

The clamping portion 122 can be detachably connected with the positioning portion 121, so that the monitoring probe can be conveniently disassembled and maintained. For example, the clamping portion 122 and the positioning portion 121 shown in fig. 1 are connected by screws, and when the monitoring probe is mounted, the monitoring probe is placed in the positioning portion 121, and the clamping portion 122 and the positioning portion 121 are fixed by screws; when the monitor probe is detached, the holding portion 122 and the positioning portion 121 can be separated by unscrewing the screw, so that the monitor probe can be detached from the fixing device.

The fastening portion 123 is used to fasten the monitoring probe at the observation position, thereby further preventing the monitoring probe from shaking or shifting. Continuing with fig. 1 as an example, the fastening portion 123 may be a jackscrew, for example, and after the clamping portion 122 clamps and fixes the monitoring probe, the monitoring probe may be further fastened by the jackscrew.

The present application does not limit the specific position of the fastening portion 123, and may be located on the circumference of the fixing portion 120, for example, at any position in the circumferential direction of the positioning portion 121 or the clamping portion 122.

The fixing device in the embodiment of the present application may include other structures besides the structure shown in fig. 1, and as shown in fig. 2 to 4, the connecting portion 110 may include a blind plate 113 and a flat plate portion 114 in addition to the viewing window 111 and the sealing portion 112. Additionally, the fixation device may further comprise one or more of the following components: a cushioning portion 130, a crimping portion 140, or a housing 150.

Optionally, the viewing window 111 may be transparent. For a visual monitoring probe, a transparent viewing window 111 allows light within the sample chamber to enter the monitoring probe through the viewing window 111. It is understood that transparent may mean that the viewing window 111 has a certain transmittance, for example, a transmittance of more than 70%.

The material of the observation window 111 is not limited in this application, for example, the material of the observation window 111 may be organic glass. Because the interior of the sample chamber is in a vacuum state and has air pressure difference with the exterior of the sample chamber, compared with common glass, organic glass can provide higher strength, and therefore the damage to the observation window 111 is avoided.

Optionally, the thickness d of the observation window 111 satisfies: d is more than or equal to 5 mm. Because the interior of the sample chamber is in a vacuum state and has air pressure difference with the exterior of the sample chamber, the thickness d of the observation window 111 is set to be larger than or equal to 5mm, so that the observation window 111 has certain strength, and the observation window 111 is not easy to damage.

The present application does not limit the specific position of the observation window 111 in the connecting portion. Alternatively, as shown in fig. 2, the connecting portion 110 may include a flat plate portion 114 and a blind plate 113. The blind 113 is used to connect to the outer wall of the sample chamber. The flat plate portion 114 is connected to the blind plate 113. The blind plate 113 includes a viewing window receiving hole in which the viewing window 111 can be received. The sealing part 112 may be located between the blind 113 and the viewing window 111. The sealing portion 112 may be a gasket as shown in fig. 2.

Alternatively, both sides of the flat plate portion 114 are connected to the blind plate 113 and the fixing portion 120, respectively. It will be appreciated that the connections described above may each be detachable connections. For different monitoring probes, a matched fixing part 120 can be arranged. By replacing the flat plate portion 114 connected to the fixing portion 120, the monitoring probe fixing device can be adapted to different monitoring probes. Different blind plates 113 may be configured for different sample chambers. By replacing the blind plate 113, the fixing device can be adapted to different sample chambers. This makes the fixing device have certain commonality, can adjust in a flexible way to different situations.

Optionally, a buffer portion 130 may be included between the flat plate portion 114 and the observation window 111. The buffer portion 130 may buffer the flat plate portion 114 and the observation window 111. Since the flat plate portion may be made of metal, the buffer portion 130 may prevent the flat plate portion 114 from scratching the observation window 111. The buffer 130 may be, for example, a buffer ring as shown in fig. 2.

The buffer 130 may have a sealing property so as to maintain the sealing property of the sample chamber.

Optionally, the fixture may include a punch block 140. The cable clamp 140 may be used to secure the cable of the monitoring probe so as to avoid the cable from wrapping around other components.

Optionally, the fixture may include a housing 150. The housing 150 has an inner cavity that accommodates the connection part 110, the fixing part 120, and the monitoring probe. In one aspect, the housing 150 may protect the monitoring probe from damage. On the other hand, the housing 150 may further prevent light outside the sample chamber from entering the sample chamber.

The housing 150 may be connected to the connection portion 110 by a stud 160 to facilitate the mounting and dismounting of the housing 150.

The application also provides a monitoring probe assembly. The monitoring probe assembly includes: a monitoring probe and any one of the above described fixtures.

The present application further provides an electron microscope system, the electron microscope system comprising: the monitoring probe component is fixed outside the sample chamber.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modifications, equivalents and the like that are within the spirit and principle of the present application should be included in the scope of the present application.