阅读说明：本技术 密封传输装置 (Sealed transmission device ) 是由 洪仁奕 黄祖纬 谢德宇 杨丽巧 陈志玮 俞俊豪 黄晖竣 于 2021-03-30 设计创作，主要内容包括：一种密封传输装置包含主体、承载模组以及驱动装置。主体具有容置空间以容纳待测物,主体具有开口。承载模组可设置于容置空间中,其包含盖部,对应于主体的开口而设置以密封容置空间；以及承载部,其由盖部延伸,并设置于容置空间中,用以承载待测物。驱动装置可连接该承载模组,并驱动承载模组的至少一部分移动离开容置空间,致使待测物移出容置空间以供进行检测。其中,当承载模组移动离开容置空间时,容置空间由密封状态改变为非密封状态。(A sealed transmission device comprises a main body, a bearing module and a driving device. The main body is provided with an accommodating space for accommodating an object to be measured and an opening. The bearing module can be arranged in the accommodating space and comprises a cover part which is arranged corresponding to the opening of the main body so as to seal the accommodating space; and the bearing part extends from the cover part, is arranged in the accommodating space and is used for bearing the object to be tested. The driving device can be connected with the bearing module and drives at least one part of the bearing module to move away from the accommodating space, so that the object to be detected moves out of the accommodating space for detection. When the bearing module moves away from the accommodating space, the accommodating space is changed from a sealing state to a non-sealing state.)

1. A sealed transfer device, comprising:

the device comprises a main body, a first clamping piece and a second clamping piece, wherein the main body is provided with an accommodating space for accommodating an object to be detected and is provided with an opening;

a carrying module set in the containing space, the carrying module set includes:

a cover disposed corresponding to the opening of the main body to seal the accommodating space; and

the bearing part extends from the cover part and is arranged in the accommodating space to bear the object to be tested; and

the driving device is connected with the bearing module to drive at least one part of the bearing module to move away from the accommodating space, so that the object to be detected moves out of the accommodating space;

when the bearing module moves away from the accommodating space, the accommodating space is changed from a sealing state to a non-sealing state.

2. The sealed conveying device of claim 1, wherein the driving device comprises an elastic element for pulling or pushing the carrying module away from the accommodating space.

3. The sealed transfer device of claim 2, wherein the resilient element comprises an extension spring or a pre-load spring.

4. The sealed conveying device of claim 2, further comprising a locking component for locking and fixing the carrying module in the accommodating space of the main body, wherein when the locking component is unlocked, the elastic element pulls or pushes the carrying module away from the accommodating space.

5. The sealed transport device of claim 1, wherein the drive device comprises:

the screw rod assembly is connected with the bearing module and locks and fixes the bearing module in the accommodating space; and

and the motor device is connected with the screw rod assembly and rotates the screw rod assembly to drive the bearing module to leave the accommodating space.

6. The sealed transfer device of claim 1, wherein the cover further comprises a sealing element to hermetically seal the receiving space from an external environment.

7. The sealed conveying device of claim 1, further comprising an air pressure control device disposed on the main body for controlling air pressure in the accommodating space.

8. The sealed transmission device according to claim 1, wherein the body further comprises a window made of a material that allows transmission of a visible light or an electron beam.

9. The sealed conveying device of claim 1, wherein the carrying part further comprises a displacement unit, and the displacement unit performs a horizontal movement or a vertical movement to change the position of the object to be tested.

10. The sealed transport device of claim 1, further comprising an electrical component for transmitting a control voltage or current between the body and the carrier module.

11. The sealed conveying device of claim 1, further comprising a temperature control element disposed on the carrier for controlling temperature.

12. A sealed transfer device, comprising:

the device comprises a main body, a first clamping piece and a second clamping piece, wherein the main body is provided with an accommodating space for accommodating an object to be detected and is provided with an opening;

a carrying module set in the containing space, comprising:

a cover disposed corresponding to the opening of the main body to seal the accommodating space; and

The bearing part extends from the cover part, and the cover part is arranged in the accommodating space to bear the object to be tested; and

the driving device is connected with the bearing module to drive at least one part of the bearing module to move away from the accommodating space, so that the object to be detected moves out of the accommodating space;

when the bearing module moves away from the accommodating space, the object to be tested moves out of the accommodating space at the same time.

13. The sealed conveying device of claim 12, wherein the driving device comprises an elastic element for pulling or pushing the carrying module away from the accommodating space.

14. The sealed transfer device of claim 13, wherein the resilient element comprises an extension spring or a pre-load spring.

15. The sealed conveying device of claim 13, further comprising a locking component for locking and fixing the carrying module in the accommodating space of the main body, wherein when the locking component is unlocked, the elastic element pulls or pushes the carrying module away from the accommodating space.

16. The sealed transport device of claim 12, wherein the drive device comprises:

the screw rod assembly is connected with the bearing module and locks and fixes the bearing module in the accommodating space; and

and the motor device is connected with the screw rod assembly and rotates the screw rod assembly to drive the bearing module to leave the accommodating space.

17. The sealed transport device of claim 12, further comprising an electrical component for transmitting a control voltage or current between the body and the carrier module.

18. The sealed conveying device of claim 12, further comprising a temperature control element disposed on the carrier for controlling temperature.

Technical Field

The present invention relates to a sealed transmission device, and more particularly, to a sealed transmission device that can be opened in a vacuum environment.

Background

With the development of science and technology, electron microscopes have become widely used inspection tools, no matter in the semiconductor and microelectronic fields such as substrate structures, package structures, printed circuit boards, etc.; the material chemical field such as slurry component analysis, chemical mechanical polishing or ceramic structure analysis; or the fields of industrial manufacture and precision processing of various fiber or metal structure analysis, which are applicable to the electron microscope.

However, in some cases, the sample to be tested needs to be protected from exposure to the atmosphere to prevent damage or contamination of the sample due to oxidation, moisture, or other particle contamination. For example, in the material analysis research of lithium battery, the material "lithium" is included on the object to be tested, and the material will be rapidly oxidized once contacting the atmospheric environment, so a transmission device with good air-tight function and capable of being rapidly opened in the vacuum chamber of the electron microscope is required to provide the above object to be tested that needs to avoid being exposed to the atmospheric environment to enter the electron microscope for detection.

Disclosure of Invention

A sealed transfer device is provided, which can be opened in a vacuum environment and move a carrying module for carrying an object to be tested therein to expose the transported object to be tested.

The invention aims to provide a sealing transmission device, which comprises a main body, a bearing module and a driving device. The main body is provided with an accommodating space for accommodating an object to be measured and an opening. The bearing module can be arranged in the accommodating space and comprises a cover part which is arranged corresponding to the opening of the main body so as to seal the accommodating space; and the bearing part extends from the cover part and is arranged in the accommodating space for bearing the object to be tested. The driving device can be connected with the bearing module and drives at least one part of the bearing module to move away from the accommodating space, so that the object to be detected moves out of the accommodating space for detection. When the bearing module moves away from the accommodating space, the accommodating space is changed from a sealing state to a non-sealing state.

Preferably, the driving device may include an elastic element, which pulls or pushes the carrying module away from the accommodating space.

Preferably, the elastic element may comprise a tension spring or a pre-load spring.

Preferably, the sealed transmission device of the present invention further includes a locking assembly for locking and fixing the carrying module in the accommodating space of the main body, and when the locking assembly is unlocked, the elastic element can pull or push the carrying module to leave the accommodating space.

Preferably, the driving device may further comprise a screw assembly and a motor device. The screw rod component can be connected with the bearing module and locks and fixes the bearing module in the accommodating space. The motor device can be connected with the screw rod assembly, and the motor device rotates the screw rod assembly to drive the bearing module to leave the accommodating space.

Preferably, the cover of the carrier module further comprises a sealing element to hermetically isolate the receiving space from the external environment.

Preferably, the sealed transmission device of the present invention may include an air pressure control device disposed on the main body to control the air pressure in the accommodating space.

Preferably, the body further comprises a window, and the material of the window can be a material allowing visible light or electron beam or X-ray to pass through.

Preferably, the supporting portion of the supporting module further includes a displacement unit capable of moving horizontally or vertically to change the position of the object to be measured.

Preferably, the sealed transmission device further comprises an electrical component for transmitting a control voltage or current between the main body and the bearing module.

Preferably, the sealed conveying device further comprises a temperature control element disposed on the carrying portion for controlling the temperature.

Another object of the present invention is to provide a sealed transfer device, which comprises: the device comprises a main body, a bearing module and a driving device. The main body is provided with an accommodating space for accommodating an object to be measured and an opening. The bearing module can be arranged in the accommodating space and comprises a cover part which is arranged corresponding to the opening of the main body so as to seal the accommodating space; and the bearing part extends from the cover part and is arranged in the accommodating space for bearing the object to be tested. The driving device can be connected with the bearing module and drives at least one part of the bearing module to move away from the accommodating space, so that the object to be detected moves out of the accommodating space for detection. When the bearing module moves away from the accommodating space, the object to be tested moves out of the accommodating space at the same time.

Compared with the prior art, the invention has the following advantages:

the sealing transmission device has good airtight function and can be quickly opened in a vacuum chamber of an electron microscope. Through the design, the device can be used for transmitting or placing objects to be detected which need to be prevented from being exposed to the atmospheric environment, and the samples are prevented from generating oxidation, dampness or other particle pollution and the like in the moving process to cause errors of detection results.

Drawings

The drawings are only for purposes of illustrating and explaining the present invention and are not to be construed as limiting the scope of the present invention. Wherein:

fig. 1 is an exploded view of a sealed transfer device according to an embodiment of the present invention.

Fig. 2 is a side view of a seal transferring apparatus in a sealing state according to an embodiment of the present invention.

Fig. 3 is a side view of a seal transferring apparatus in a non-sealing state according to an embodiment of the present invention.

Fig. 4 is a side view of a seal transferring apparatus in a sealing state according to another embodiment of the present invention.

Fig. 5 is a front view of the sealed transfer device of fig. 4.

Fig. 6 is a side view of a seal transferring apparatus according to another embodiment of the present invention in a non-sealing state.

Fig. 7 is a front view of the sealed transfer device of fig. 6.

Fig. 8 is a side view of a seal transferring apparatus in a sealing state according to still another embodiment of the present invention.

Fig. 9 is a side view of a seal transferring apparatus in a non-sealing state according to still another embodiment of the present invention.

Fig. 10 is a side view of a seal transferring apparatus in a sealing state according to another embodiment of the present invention.

Fig. 11 is a side view of a seal transferring apparatus according to another embodiment of the present invention in a non-sealing state.

Fig. 12 is a schematic view of a sealed transfer device according to yet another embodiment of the invention.

Fig. 13 is a side view of a sealed transfer device according to yet another embodiment of the invention.

The reference numbers illustrate:

10. a main body;

11. an accommodating space;

12. an opening;

20. an object to be tested;

30. a carrying module;

31. a cover portion;

32. a bearing part;

40. 70, a driving device;

41. an extension spring;

42. a pre-load spring;

50. 60, a locking assembly;

61. a fastener;

62. a drive member;

71. a screw assembly;

72. a motor device;

80. a pneumatic control device;

90. a window;

100. sealing the transmission device;

301. a conductive probe;

302. heating the wafer;

303. an insulating member.

Detailed Description

The following detailed description of the various embodiments of the invention, taken in conjunction with the accompanying drawings, is provided by way of illustration. Aside from the detailed description, the invention is capable of general implementation in other embodiments and its several details are capable of modifications and equivalents in various alternative embodiments and may be included within the scope of the invention as defined by the appended claims. In the description of the specification, numerous specific details are set forth in order to provide a more thorough understanding of the invention; however, the present invention may be practiced without some or all of these specific details. In other instances, well-known steps or elements have not been described in detail so as not to unnecessarily obscure the present invention. The same or similar elements in the drawings will be denoted by the same or similar symbols. It is particularly noted that the drawings are merely schematic and do not represent actual sizes or quantities of elements, and that some of the details may not be fully drawn for clarity of the drawings.

Referring to fig. 1 to 3, a seal transporting apparatus 100 according to an embodiment of the present invention includes a main body 10, a carrying module 30, and a driving device 40. The main body 10 has a receiving space 11 for receiving an object 20 to be tested, and the main body 10 has an opening 12. The carrier module 30 is movably disposed in the accommodating space 11 and includes a cover 31 and a carrier 32. The cover 31 may be disposed corresponding to the opening 12 of the body 10 to seal the accommodating space 11. The supporting portion 32 extends from the cover 31 along a movable direction (relative to the main body 10), is movably disposed in the accommodating space 11, and supports the object 20. In one embodiment, a sealing element (not shown) may be further included on the cover 31, the carrying portion 32, or between the cover 31 and the carrying portion 32, for example, the sealing element may be an O-ring or a sealing ring, which can seal the carrying module 30 and the main body with each other by pressing or friction, so as to hermetically isolate the accommodating space 11 from the external environment.

When the carrying module 30 carrying the object 20 is accommodated in the accommodating space 11, the driving device 40 can be connected to the carrying module 30 to drive at least a portion of the carrying module 30 to leave the accommodating space 11, so that the object 20 is moved out of the accommodating space 11. When the carrier module 30 moves away from the accommodating space 11, the accommodating space 11 is changed from the sealed state to the unsealed state because the cover 31 sealing the opening 12 is separated from the main body 10. Here, the driving device 40 may drive the cover 31 of the bearing module 30, or both the cover 31 and the bearing 32 to leave the accommodating space 11 simultaneously, which will be described in detail later.

In practice, the main body 10, the carrying module 30 and the driving device 40 of the sealed conveying device of the present invention may be non-co-movable components. For example, in order to avoid exposing the object to the atmospheric environment, the object to be tested may be loaded on the carrying module 30 of the sealed transmission device in a glove box with different environmental conditions (e.g., different environmental conditions such as isolation from the atmosphere, filling of inert gas, control of low water vapor or low oxygen concentration), and the carrying module 30 and the main body 10 are sealed by pressing or rubbing, so that the accommodating space 11 in the sealed transmission device is hermetically isolated from the external environment. The sealed transport unit is then removed from the glove box and placed in the vacuum chamber of an electron microscope. Here, the driving device 40 may be disposed in the vacuum chamber in advance, and may be connected to the carrier module 30 of the sealed conveying device and drive at least a portion of the carrier module 30 to leave the accommodating space 11. By adopting the design, the sealed transmission device can transmit the object to be detected to the electron microscope for detection under the condition of avoiding exposing the object to the atmospheric environment.

Bearing the above, the driving device 40 is pre-disposed in the vacuum chamber of the electron microscope, so that the sealing transmission device is more lightweight and has cost advantage, and a plurality of sealing transmission devices can share one set of driving device according to requirements, when the glove box is far away from the electron microscope, a plurality of objects to be tested can be filled in the plurality of sealing transmission devices at one time, and the batch is moved and opened and observed in the vacuum chamber of the electron microscope one by one, so that the sealing transmission device is suitable for transnational or long-distance experiments.

In addition, in order to accelerate the conduction of charges accumulated by the irradiation of the electron beam on the object to be tested, the carrying module in contact with the object to be tested can be made of a conductive material, a conductive wire can be penetrated and arranged in the main body, or at least one part of the main body is designed to be the conductive material, so that the charges are conducted out of the sealed transmission device.

However, the present invention is not limited to the above, and the main body 10, the carrying module 30 and the driving device 40 of the seal transporting apparatus of the present invention may be components capable of moving together. For example, the main body 10, the carrying module 30 and the driving device 40 of the sealed transportation device can be loaded with the object under various environmental conditions (e.g. different environmental conditions such as isolation from the atmosphere, filling with inert gas, controlling low water vapor or low oxygen concentration) together, and then moved together to the vacuum chamber of the electron microscope, and then the driving device 40 drives the carrying module 30 to move away from the accommodating space 11. By adopting the design, the sealed transmission device can transmit the object to be detected to the electron microscope for detection under the condition of avoiding exposing the object to the atmospheric environment.

In this embodiment, in order to accelerate the conduction of charges accumulated by the irradiation of the electron beam on the object to be tested, the carrier module contacting with the object to be tested may be made of a conductive material, and a conductive wire may be penetratingly disposed in the main body, or at least a portion of the main body may be designed as a conductive material, so as to conduct the charges out of the sealed transmission device.

Referring to fig. 2 and fig. 3, they are side views of a seal transferring apparatus according to an embodiment of the present invention in a sealing state and an unsealing state, respectively. The driving device 40 may include an elastic element, and the carrying module 30 (including the cover 31 and the carrying portion 32) is pulled or pushed to leave the accommodating space 11. In one embodiment, as shown in fig. 2 and 3, the elastic element may include a tension spring 41, the tension spring 41 is connected to the cover 31 of the carrier module 30, when the tension spring 41 pulls the cover 31 of the carrier module 30, both the cover 31 and the carrier 32 move away from the accommodating space 11, so that the object 20 is moved out of the accommodating space 11.

According to an embodiment of the present invention, the seal transferring apparatus may further include a locking assembly 50 for locking and fixing the carrier module 30 in the accommodating space 11 of the main body 10, so as to maintain the seal transferring apparatus in a sealed state, as shown in fig. 2. In the embodiment, the lock catch assembly 50 may comprise an electronic lock or an electrically controlled lock, but not limited thereto, and may be replaced with other types of lock catch assemblies as required. When the locking assembly 50 is unlocked, the elastic element can pull or push the carrier module 30 to leave the accommodating space 11, so that the seal transferring apparatus changes from the sealing state to the non-sealing state, as shown in fig. 3, and the extension spring 41 can pull the carrier module 30 to leave the accommodating space 11.

According to another embodiment of the present invention, referring to fig. 4 to 7, the elastic element may include a pre-force spring 42, for example, which may be disposed in the accommodating space 11 and connected to the bearing module 30, in this embodiment, one end of the pre-force spring 42 may be connected to the bearing portion 32, the other end is fixed on the wall surface of the main body 10, and the deformation direction of the pre-force spring 42 is the same as the moving direction of the bearing portion 32. When the pre-stressed spring 42 pushes the carrier module 30 to leave the accommodating space 11, the object 20 is moved out of the accommodating space 11, as shown in fig. 4 and 6. According to another embodiment, the seal transferring apparatus may further include a locking assembly 60 including a locking member 61 and a driving member 62, wherein the locking member 61 locks and fixes the carrier module 30 in the accommodating space 11 of the main body 10, as shown in fig. 5. When the locking assembly 60 is unlocked, for example, the driving member 62 can rotate the fastener 61 to unscrew the fastener 61 from the carrier module, as shown in fig. 7, the pre-stressed spring 42 can push the carrier module 30 away from the accommodating space 11, so as to change the seal transferring device from the sealing state to the non-sealing state, as shown in fig. 6. It should be noted that the operation of the fastener and the driving member in the embodiment is only an exemplary illustration, and the driving member may rotate to unlock the fastener. On the other hand, the lock catch assembly can be replaced by other lock catch assemblies according to requirements.

According to another embodiment of the present invention, the driving device can have both driving and locking functions, please refer to fig. 8 to 9. In the present embodiment, the driving device 70 may include a screw assembly 71 and a motor device 72. The screw assembly 71 can be connected to the carrying module 30 and lock and fix the carrying module in the accommodating space 11. In the embodiment, the screw assembly 71 can connect the cover 31 and the motor device 72, and the screw assembly 71 is rotated by the motor device 72 to drive/pull the carrying module 30 to move away from the accommodating space 11.

In another embodiment of the present invention, the screw assembly 71 of the driving device 70 can be connected to the carrying portion 32 and the motor device 72, and the screw assembly 71 is rotated by the motor device 72 to drive/push the carrying module 30 to move away from the accommodating space, as shown in fig. 10 and 11.

It should be noted that, in the above embodiment, the driving device can drive both the cover portion and the carrying portion of the carrying module to leave the accommodating space at the same time, so that the object to be tested moves out. However, in another embodiment, as shown in fig. 10 and 11, the cover of the carrying module can be driven by a driving device to move away from the accommodating space to expose the opening 12 of the main body 10, and then the carrying module can be driven by another driving device to move away from the accommodating space, so that the object to be tested is moved out. The movement of the cover is not limited to that illustrated in the drawings, and the cover can be opened in different ways or in different directions as required.

Referring back to fig. 1, the sealed transmission device of the present invention may further include an air pressure control device 80 disposed on the main body 10 and controlling the air pressure in the accommodating space 11 (see fig. 2). It should be noted that, in the drawings of the present invention, only the air pressure control device 80 is illustrated in fig. 1 for convenience of description, however, the present invention is not limited thereto, and any of the embodiments included in the scope of the present invention can be easily replaced, modified, and equivalent changes and modifications by including the air pressure control device 80 as required. For example, the air pressure control device 80 may be an air release hole, an air release pipeline, an air supply pipe, an air release valve or an electrical valve, which can control the low air pressure environment or the vacuum environment in the accommodating space 11 (refer to fig. 2), and adjust or balance the air pressure in the accommodating space according to the environmental conditions required by the object to be measured.

Referring to fig. 1, in an embodiment, after the sealed transfer device 100 is sealed in the glove box, the accommodating space of the main body 10 is filled with the same gas composition and pressure as the controlled environment of the glove box. After the sealed transmission device 100 is moved to the electron microscope, in order to prevent the residual gas in the vacuum chamber of the electron microscope from affecting the object to be measured or prevent the gas in the main body 10 of the sealed transmission device 100 from entering the electron microscope rapidly to cause pollution or damage, the gas composition and the gas pressure of the vacuum chamber of the electron microscope and the accommodating space of the sealed transmission device 100 can be balanced or adjusted by the gas pressure control device 80. For example, after the sealed transportation device 100 is moved into the electron microscope, the electron microscope door is closed, the vacuum chamber of the electron microscope is evacuated, and then the gas in the accommodation space of the sealed transportation device 100 is exhausted through the vent pipe passing through the main body and the electron microscope. Through the above operations, when the accommodating space and the vacuum chamber of the electron microscope reach the same vacuum degree, there is no residual gas or pressure difference, and the carrying module 30 can be driven to leave the accommodating space, so that the sealed state of the sealed transferring device 100 is changed to the unsealed state. After the electron microscope observation is finished, the sealing and conveying device 100 can be closed by the driving device to return to the sealing state again, then the sealing and conveying device is placed back into the glove box, and after the reverse air pressure is balanced, the sealing and conveying device is changed from the sealing state to the non-sealing state by the driving device, so that other operations in the glove box can be carried out.

In order to change the gas composition, the gas pressure, the moisture content or the humidity in the accommodating space without exposing the object to the atmospheric environment, so as to facilitate the prolonged storage or the reaction, the specific gas, the moisture or the liquid is injected into the main body of the sealed transmission device through the gas release pipe, the gas supply pipe and the like of the gas pressure control device 80, and the pressure value is adjusted.

The air pressure control device is not limited to the air release pipe or the air supply pipe connected to the outside of the sealed transmission device, and in another embodiment, the air pressure control device may be a structural component (not shown) that adjusts the pressure by changing the volume of the accommodating space. For example, a piston space (with a movable wall) or an elastic body space (with an elastic membrane such as rubber or silica gel) which is communicated with the main body and can change the volume can be used, when other driving devices are used for pushing the wall of the piston space or the elastic membrane of the elastic body space, the air pressure of the accommodating space can be increased when the space is reduced, and the air pressure of the accommodating space can be decreased when the space is increased. According to another embodiment of the present invention, the main body 10 may further include a detection window 90 thereon, as shown in fig. 1. The material of the inspection window 90 may include a material that allows visible light or electron beam or X-ray to pass through, for example, the material of the inspection window 90 may be glass or an electron-permeable film, so that the inspection window can be directly used for optical microscopy or electron beam inspection or characteristic X-ray spectroscopy inspection. It should be noted that, in fig. 1, the position, shape and size of the detection window are only exemplary, and the invention is not limited thereto, and may be adjusted according to the use requirement.

According to another embodiment of the present invention, the supporting portion may further include a displacement unit (not shown), and when the supporting module moves away from the accommodating space, the displacement unit may move horizontally or vertically to change the position of the object to be detected, so as to provide more detection angles.

According to another embodiment of the present invention, the sealed transmission device of the present invention may further comprise an electrical component, wherein the electrical component may comprise a conductive probe 301, as shown in fig. 12, which may be connected to another charging/discharging device/battery and carrying portion 32 for transmitting a control voltage or current to an electrode or an actuator (not shown) in the main body for providing electrical stimulation (e.g., providing a specific required voltage or current for the object 20) or mechanical stretching to change the position direction of the object 20; or, the device can also be used for reading the reading value or the electric signal of the sensor in the main body so as to monitor the state of the accommodating space or measure the object to be measured.

According to another embodiment of the present invention, the sealed transmission device of the present invention may further include an electrical component, wherein the electrical component may include a temperature control element and a conductive probe 301, as shown in fig. 13, the temperature control element may be, for example, a heating chip 302 disposed in or on the carrying portion 32 (as shown in fig. 12), and the conductive probe 301 is connected to another charging/discharging device/battery and an electrode of the heating chip 302, and the heating chip 302 is driven to increase in temperature by energizing, so as to control the temperature, for example, to heat the object 20 or to provide a specific required temperature for the object 20. The temperature control device is not limited to heating the wafer, and may include any device capable of electrically controlling the temperature.

It should be noted that the present invention is not limited to the two embodiments, however, the electrical component may include a plurality of conductive probes 301, one of the conductive probes may be connected to another charging/discharging device/battery and the carrying portion 32, and the other conductive probe 301 may be connected to another charging/discharging device/battery and the electrode of the heating chip 302, that is, the plurality of conductive probes may be connected to different electrical components respectively. The electrical assembly may further include an insulating member 303 for separating the plurality of conductive probes 301 from each other without affecting the respective power-on functions. In addition, the arrangement of the components shown in the drawings is merely exemplary, and the sizes and relative positions of the components can be adjusted as required.

In summary, the sealing and transferring device of the present invention has a good airtight function, and can be opened quickly in the vacuum chamber of the electron microscope. Through the design, the device can be used for transmitting or placing objects to be detected which need to be prevented from being exposed to the atmospheric environment, and the samples are prevented from generating oxidation, dampness or other particle pollution and the like in the moving process to cause errors of detection results.

The above-mentioned embodiments are merely illustrative of the technical spirit and features of the present invention, and the object of the present invention is to enable those skilled in the art to understand the content of the present invention and to implement the same, and the scope of the present invention should not be limited by the above-mentioned embodiments, i.e. all equivalent changes and modifications made in the spirit of the present invention should be covered in the scope of the present invention.