阅读说明：本技术 Mems全解耦陀螺仪 (MEMS fully decoupled gyroscope ) 是由 吴国强 吴忠烨 陈文� 韩金钊 杨尚书 于 2021-08-26 设计创作，主要内容包括：本发明公开了一种MEMS全解耦陀螺仪。MEMES全解耦陀螺仪为音叉式陀螺结构,包含检测框、两个质量块、至少四个固定锚点、四组驱动电极、四组感应电极,一级弹性连接梁、二级弹性连接梁、三级弹性连接梁、解耦弹性连接梁和耦合弹性连接梁。该陀螺仪其驱动模态为两个质量块相对于检测框面内反向振荡运动,感应模态为整体结构面内旋转运动。该陀螺仪驱动模态和检测模态之间实现了全解耦。所提出的结构可有效抑制由加工误差所引起正交耦合误差和降低外界振动和冲击所引起的误差,从而提高MEMS陀螺仪的精度和性能。(The invention discloses an MEMS fully decoupled gyroscope. The MEMES full decoupling gyroscope is of a tuning fork type gyroscope structure and comprises a detection frame, two mass blocks, at least four fixed anchor points, four groups of driving electrodes, four groups of sensing electrodes, a primary elastic connecting beam, a secondary elastic connecting beam, a tertiary elastic connecting beam, a decoupling elastic connecting beam and a coupling elastic connecting beam. The gyroscope has a driving mode that two mass blocks perform reverse oscillation motion relative to the inside of a detection frame, and an induction mode that the two mass blocks perform internal rotation motion in an integral structure plane. The gyroscope drive mode and the gyroscope detection mode are completely decoupled. The structure can effectively restrain the orthogonal coupling error caused by the processing error and reduce the error caused by external vibration and impact, thereby improving the precision and the performance of the MEMS gyroscope.)

1. A MEMS fully decoupled gyroscope, comprising: the gyroscope is characterized in that the whole structure of the gyroscope consists of a detection module, a driving module and a connecting module;

the driving module comprises four driving frames, two mass blocks and four groups of driving electrodes;

the detection module comprises a detection frame and four groups of induction electrodes;

the connecting module comprises at least four fixed anchor points, a plurality of primary elastic connecting beams, a secondary elastic connecting beam, a tertiary elastic connecting beam, a decoupling elastic connecting beam and a coupling elastic connecting beam;

the projection structure of the whole structure of the gyroscope on a horizontal plane is designed symmetrically along the central axis in the direction X, Y:

the detection frame is positioned outside the gyroscope structure, and the rest structures except the induction electrode are positioned inside the detection frame;

the two mass blocks are positioned on the central axis in the X direction, and the mass blocks are positioned on two sides of the central axis in the Y direction;

two fixed anchor points A in the at least four fixed anchor points are positioned on the Y central axis, and the two fixed anchor points A are positioned between the two mass blocks; the rest of the at least four fixed anchor points B are positioned at the inner side of each mass block;

the detection frame in the integral structure of the gyroscope is connected with the two fixed anchor points A by a primary elastic connecting beam; the two mass blocks are connected through a coupling elastic connecting beam, and the outer side of each mass block is connected with the detection frame through a secondary elastic connecting beam;

the four driving frames are respectively positioned at the inner sides of the two mass blocks, the outer side end of each driving frame is connected with the mass blocks by adopting a plurality of decoupling elastic connecting beams, and the inner side end of each driving frame is connected with the fixed anchor point B by adopting a plurality of three-stage elastic connecting beams; the four groups of driving electrodes are respectively positioned at the inner side of each driving frame; the four groups of induction electrodes are positioned at four corners of the outer side of the detection frame.

2. The MEMS fully decoupled gyroscope of claim 1, wherein:

the driving modes of the gyroscope are as follows:

the two mass blocks, the driving frame, the secondary elastic connecting beam, the tertiary elastic connecting beam and the decoupling elastic connecting beam which are close to the mass blocks perform reverse oscillating motion relative to the detection frame in the X direction; alternatively, the first and second electrodes may be,

the detection mode of the gyroscope is as follows:

the detection frame, the mass block, the primary elastic connecting beam, the secondary elastic connecting beam and the coupling elastic connecting beam integrally do torsional pendulum motion along an X-Y plane;

when the MEMS gyroscope is in a driving mode or a detection mode, the capacitances of the driving electrode and the sensing electrode are not influenced with each other.

3. MEMS fully decoupled gyroscope according to claim 1 or 2, characterized in that:

the number of the fixed anchor points is set to be four or six:

when the number of the fixed anchor points is four, two fixed anchor points A are positioned on the Y central axis, the other two anchor points B are positioned on the X axis, and meanwhile, the two anchor points B are positioned at the central positions of the inner sides of the two mass blocks;

when the number of the fixed anchor points is six, two fixed anchor points A are positioned on the Y central axis, and every two anchor points B in the other four fixed anchor points B are positioned on the inner side of the mass block and symmetrically distributed on the upper side and the lower side of the X-direction central axis.

4. The MEMS fully decoupled gyroscope of claim 3, wherein: the driving frame is a combined structure of a plurality of straight beams, and the structure of the driving frame can be adjusted according to the quantity and position changes of the fixed anchor points; the composite structure is in a half I shape, namely an E shape.

5. The MEMS fully decoupled gyroscope of claim 1, 2 or 4, wherein: the primary elastic connecting beam, the secondary elastic connecting beam, the tertiary elastic connecting beam, the decoupling elastic connecting beam and the coupling elastic connecting beam are any one or a plurality of combinations of straight beams, U-shaped beams, folding beams or crab-leg beams.

6. The MEMS fully decoupled gyroscope of claim 5, wherein: the inner side of the driving frame can be provided with a functional electrode, and the functional electrode is one or a combination of a driving detection electrode, a frequency tuning electrode and an orthogonal compensation electrode.

7. The MEMS fully decoupled gyroscope of claim 1 or 2 or 4 or 6, wherein: the driving detection electrode, the frequency tuning electrode and the orthogonal compensation electrode in the driving electrode, the induction electrode and the functional electrode respectively comprise a movable electrode plate and a fixed electrode plate; the movable electrode plate and the fixed electrode plate are both in a comb shape; the driving electrode and the driving detection electrode are comb-tooth-shaped electrodes with equal intervals, and the induction electrode, the frequency tuning electrode and the orthogonal compensation electrode are all comb-tooth-shaped electrodes with variable intervals.

8. The MEMS fully decoupled gyroscope of claim 7, wherein:

the induction electrodes positioned at the four corners of the detection frame output electrical signals in a differential mode: due to the symmetry of the MEMS gyroscope, two induction electrodes on one diagonal line of the detection frame adopt in-phase output, and two induction electrodes on the other diagonal line of the detection frame output in opposite phases, so that differential output can be realized.

9. The MEMS fully decoupled gyroscope of claim 1 or 2 or 4 or 6 or 8, wherein: the detection frame is a symmetrical polygon or a symmetrical shape of a combination of a polygon and an arc; the mass block is polygonal.

10. The MEMS fully decoupled gyroscope of claim 9, wherein:

when the detection frame is polygonal, the four groups of induction electrodes are positioned on four sides of the detection frame, and movable electrode plates in the induction electrodes are vertical to the corresponding sides of the detection frame;

when the detection frame is in a combined shape of a polygon and an arc, the four groups of induction electrodes are positioned at the arc position, and movable electrode plates in the induction electrodes are perpendicular to the tangent of the arc part of the detection frame.

Technical Field

The invention relates to the technical field of vibrating angular velocity sensors, in particular to an MEMS (micro-electromechanical systems) fully-decoupled gyroscope.

Background

The gyroscope is a sensing device for measuring the rotation angle or angular displacement of an object, is used for realizing the measurement and control of the attitude and the track of a motion carrier, and is a basic core device of an inertial system. Micro-electro-mechanical systems (MEMS) gyroscopes based on Micro-nano processing technology have the advantages of small volume, low power consumption, low cost, and capability of being integrated with circuits, and are widely applied to the fields of consumer electronics, medical electronics, automotive electronics, aerospace, military and the like. The MEMS gyroscope is widely commercialized and applied to a tuning fork structure gyroscope, the principle of the MEMS gyroscope is the Coriolis effect, when a rotation angular velocity is applied to the outside, a suspended movable microstructure of the MEMS gyroscope can be acted by Coriolis force under the action of oscillating motion, the movable structure can generate corresponding displacement under the action of Coriolis force, and the information of the angle and the angular velocity applied to the outside can be obtained by measuring a Coriolis force signal.

With the continuous development of the MEMS tuning fork gyroscope, the performance requirement of the gyroscope is continuously improved, but compared with the optical gyroscope applied to the high precision field, the precision and stability of the MEMS tuning fork gyroscope still have gaps. In the mass manufacturing process of the MEMS gyroscope, the micro-machining process inevitably has machining errors and defects, which may cause the geometric shape, mass and rigidity of the micro-gyroscope structure to change, thereby changing the resonant frequency of the gyroscope. Meanwhile, the machining error can cause the orthogonal coupling effect between the driving mode and the detection mode, and the generated orthogonal coupling error is generally far larger than a Coriolis force signal, so that the precision and the stability of the MEMS gyroscope are seriously influenced. In addition, as the application range of the MEMS tuning fork gyroscope is wider and wider, the application environment is also worse and worse. The MEMS gyroscope is inevitably subjected to external environments such as impact, vibration, etc., thereby affecting the dynamic response and output of the gyroscope. Therefore, improving the robustness of the gyroscope structure under processing errors and environmental influences is one of the biggest challenges in developing a high performance MEMS gyroscope.

At present, a commonly used MEMS tuning fork gyroscope structure generally adopts a symmetrical double-mass block structure, the driving mode of the MEMS tuning fork gyroscope is that two mass blocks perform reverse oscillation motion under a resonance condition, the detection mode of the MEMS tuning fork gyroscope is that the two mass blocks respectively perform secondary resonance motion in the Coriolis force direction, and finally a Coriolis force signal is detected in a differential output mode. The gyroscope has the advantages that common-mode signals caused by external impact and vibration can be offset, and the precision and the stability of the gyroscope are improved. However, in most of the commercial MEMS tuning fork gyroscope structures at present, the two masses and their respective supporting springs or beam structures are combined to form a relatively independent resonator structure, and the two resonators are generally connected by using the springs or beam structures to realize weak mechanical coupling. When processing defects and errors exist, the geometric dimensions of the resonators are changed, the mass and the rigidity between the two resonators cannot be completely matched, the structures of the two resonators are in orthogonal coupling in different degrees, meanwhile, the two resonators are different in response to common-mode signals of external environment changes such as impact and vibration input, and signal errors still exist when signals are output in a differential output mode.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides an MEMS fully-decoupled gyroscope. The gyroscope is provided with an independent driving structure and a detection structure, and the driving mode and the detection mode of the gyroscope realize full decoupling. The proposed structure can effectively suppress the quadrature coupling error caused by the machining error and the error caused by the external vibration and impact, thereby improving the precision and performance of the MEMS gyroscope.

In order to achieve the purpose, the technical scheme of the invention is as follows:

the invention provides an MEMS fully decoupled gyroscope, which is characterized in that: the gyroscope is characterized in that the whole structure of the gyroscope consists of a detection module, a driving module and a connecting module;

the driving module comprises four driving frames, two mass blocks and four groups of driving electrodes;

the detection module comprises a detection frame and four groups of induction electrodes;

the connecting module comprises at least four fixed anchor points, a plurality of primary elastic connecting beams, a secondary elastic connecting beam, a tertiary elastic connecting beam, a decoupling elastic connecting beam and a coupling elastic connecting beam;

the projection structure of the whole structure of the gyroscope on a horizontal plane is designed symmetrically along the central axis in the direction X, Y:

the detection frame is positioned outside the gyroscope structure, and the rest structures except the induction electrode are positioned inside the detection frame;

the two mass blocks are positioned on the central axis in the X direction, and the mass blocks are positioned on two sides of the central axis in the Y direction;

two fixed anchor points A in the at least four fixed anchor points are positioned on the Y central axis, and the two fixed anchor points A are positioned between the two mass blocks; the rest of the at least four fixed anchor points B are positioned at the inner side of each mass block;

the detection frame in the integral structure of the gyroscope is connected with the two fixed anchor points A by a primary elastic connecting beam; the two mass blocks are connected through a coupling elastic connecting beam, and the outer side of each mass block is connected with the detection frame through a secondary elastic connecting beam;

the four driving frames are respectively positioned at the inner sides of the two mass blocks, the outer side end of each driving frame is connected with the mass blocks by adopting a plurality of decoupling elastic connecting beams, and the inner side end of each driving frame is connected with the fixed anchor point B by adopting a plurality of three-stage elastic connecting beams; the four groups of driving electrodes are respectively positioned at the inner side of each driving frame; the four groups of induction electrodes are positioned at four corners of the outer side of the detection frame.

Preferably, the driving modes of the gyroscope are as follows:

the two mass blocks, the driving frame, the secondary elastic connecting beam, the tertiary elastic connecting beam and the decoupling elastic connecting beam which are close to the mass blocks perform reverse oscillating motion relative to the detection frame in the X direction; alternatively, the first and second electrodes may be,

the detection mode of the gyroscope is as follows:

the detection frame, the mass block, the primary elastic connecting beam, the secondary elastic connecting beam and the coupling elastic connecting beam integrally do torsional pendulum motion along an X-Y plane;

when the MEMS gyroscope is in a driving mode or a detection mode, the capacitances of the driving electrode and the sensing electrode are not influenced with each other.

Further, the number of the anchor points is set to four or six:

when the number of the fixed anchor points is four, two fixed anchor points A are positioned on the Y central axis, the other two anchor points B are positioned on the X axis, and meanwhile, the two anchor points B are positioned at the central positions of the inner sides of the two mass blocks;

when the number of the fixed anchor points is six, two fixed anchor points A are positioned on the Y central axis, and every two anchor points B in the other four fixed anchor points B are positioned on the inner side of the mass block and symmetrically distributed on the upper side and the lower side of the X-direction central axis.

Furthermore, the driving frame is a combined structure of a plurality of straight beams, and the structure of the driving frame can be adjusted according to the number and position changes of the fixed anchor points; the composite structure is in a half I shape, namely an E shape.

Furthermore, the primary elastic connecting beam, the secondary elastic connecting beam, the tertiary elastic connecting beam, the decoupling elastic connecting beam and the coupling elastic connecting beam are any one or a combination of a straight beam, a U-shaped beam, a folding beam or a crab-leg beam.

Further, a functional electrode can be disposed inside the driving frame, the functional electrode being one or more of a combination of a driving detection electrode, a frequency tuning electrode, and an orthogonal compensation electrode.

Furthermore, the driving detection electrode, the frequency tuning electrode and the orthogonal compensation electrode in the driving electrode, the induction electrode and the functional electrode all comprise a movable electrode plate and a fixed electrode plate; the movable electrode plate and the fixed electrode plate are both in a comb shape; the driving electrode and the driving detection electrode are comb-tooth-shaped electrodes with equal intervals, and the induction electrode, the frequency tuning electrode and the orthogonal compensation electrode are all comb-tooth-shaped electrodes with variable intervals.

Furthermore, the sensing electrodes positioned at the four corners of the detection frame output electrical signals by adopting a differential mode: due to the symmetry of the MEMS gyroscope, two induction electrodes on one diagonal line of the detection frame adopt in-phase output, and two induction electrodes on the other diagonal line of the detection frame output in opposite phases, so that differential output can be realized.

Furthermore, the detection frame is a symmetrical polygon or a symmetrical shape of a combination of a polygon and an arc; the mass block is polygonal.

Furthermore, when the detection frame is polygonal, the four groups of sensing electrodes are positioned on four sides of the detection frame, and movable electrode plates in the sensing electrodes are vertical to the corresponding sides of the detection frame;

when the detection frame is in a combined shape of a polygon and an arc, the four groups of induction electrodes are positioned at the arc position, and movable electrode plates in the induction electrodes are perpendicular to the tangent of the arc part of the detection frame.

The invention has the following advantages and beneficial effects:

1. the MEMS gyroscope structure provided by the invention adopts a completely symmetrical double-mass-block tuning-fork type full decoupling structure, the complete decoupling is realized by a driving mode and a detection mode, and meanwhile, the MEMS gyroscope outputs signals in a differential output mode, so that the orthogonal coupling error caused by the processing error can be effectively reduced.

2. The two mass blocks of the MEMS gyroscope are connected with each other through the detection frame and the coupling elastic connecting beam structure, under the driving mode, the mechanical motion of the two mass blocks and the elastic connecting beam realizes high coupling, and the two mass blocks and the elastic connecting beam can realize the matching of mass and rigidity to the maximum extent. The structure can effectively reduce the deviation of the motion direction of the mass block in a driving mode caused by machining errors, and improves the precision and stability of the MEMS gyroscope.

3. The MEMS gyroscope provided by the invention has the advantages that the whole structure is only provided with one detection frame, the four groups of induction electrodes are positioned at four corners of the detection frame, and the detection modes of the gyroscope realize complete coupling. Compared with the traditional double-mass-block tuning fork gyroscope, when processing errors exist, the gyroscope provided by the invention has consistent response to common-mode signals input by external environment changes such as impact and vibration, the input common-mode signals can be offset in a differential signal output mode, and the stability and the robustness of the gyroscope are improved.

Drawings

FIG. 1: the three-dimensional structure schematic diagram of the MEMS fully decoupled gyroscope in the embodiment 1;

FIG. 2: the planar projection structure schematic diagram of the MEMS fully decoupled gyroscope in the embodiment 1;

FIG. 3: the MEMS fully decoupled gyroscope is driven to work in a modal diagram;

FIG. 4: detecting a working mode diagram of the MEMS fully-decoupled gyroscope;

FIG. 5: the planar projection structure schematic diagram of the MEMS fully decoupled gyroscope of embodiment 2;

FIG. 6: the planar projection structure schematic diagram of the MEMS fully decoupled gyroscope of embodiment 3;

FIG. 7: the planar projection structure schematic diagram of the MEMS fully decoupled gyroscope of embodiment 4;

FIG. 8: a schematic diagram of a local three-dimensional structure of the MEMS fully decoupled gyroscope of embodiment 4;

FIG. 9: the planar projection structure schematic diagram of the MEMS fully decoupled gyroscope of embodiment 5.

In the figure: 1. the device comprises a detection frame, 2 mass blocks, 3 fixed anchor points, 4 primary elastic connecting beams, 5 secondary elastic connecting beams, 6 coupling elastic connecting beams, 7 decoupling elastic connecting beams, 8 tertiary elastic connecting beams, 9 driving frames, 10 driving electrodes, 11 sensing electrodes and 12 functional electrodes.

Detailed Description

The technical solution of the present invention is further elaborated below with reference to the drawings and the specific embodiments.

Example 1

It should be noted that the drawings provided in the embodiments are only for illustrating the basic idea of the present invention in a schematic manner, and the drawings only show the components related to the present invention rather than the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation can be changed freely, and the layout of the components may be more complicated.

The three-dimensional structure schematic diagram of the MEMS gyroscope structure is shown in figure 1, the planar projection structure diagram of the gyroscope is shown in figure 2, and by combining the figures 1 and 2, the MEMS gyroscope structure is composed of a detection frame 1, a driving frame 7, a mass block 2, a fixed anchor point 3, a driving electrode 10, an induction electrode 11, a primary elastic connecting beam 4, a secondary elastic connecting beam 5, a decoupling elastic connecting beam 7, a tertiary elastic connecting beam 8 and a coupling elastic connecting beam 6, and the planar projection structure of the gyroscope is symmetrical along central axes in X and Y directions.

All the other structures except the sensing electrode 11 are positioned inside the detection frame 1. The two mass blocks 2 are positioned on the central axis in the X direction and positioned on the left side and the right side of the central axis in the Y direction; the number of the fixed anchor points 3 can be four, wherein two fixed anchor points 3A are positioned on the Y central axis, and meanwhile, two fixed anchor points 3A are positioned between the left mass block 2 and the right mass block 2; the other two fixed anchor points 3B are positioned on the central axis X and are respectively positioned at the central positions of the left mass block 2 and the right mass block 2. The detection frame 1 is connected with two fixed anchor points 3A through two primary elastic connecting beams 4. The two mass blocks 3 are connected through a coupling elastic connecting beam 6, and the outer side of each mass block 2 is connected with the detection frame 1 through a plurality of secondary elastic connecting beams 5; the four driving frames 9 are respectively positioned in the centers of the two mass blocks 2, one end of the outer side of each driving frame 9 is connected with the mass block 2 through a decoupling elastic connecting beam 7, and the other end of each driving frame 9 is connected with the fixed anchor point 3B through a three-stage elastic connecting beam 8; four sets of driving electrodes 10 are respectively positioned on each driving frame 9, and four sets of sensing electrodes 11 are positioned at four corners of the outer side of the detection frame 1.

The primary elastic connecting beam 4, the secondary elastic connecting beam 5, the coupling elastic connecting beam 6, the decoupling elastic connecting beam 7 and the tertiary elastic connecting beam 8 are any one or a plurality of combinations of U-shaped beams, folding beams or crab-leg beams. The first-level elastic connecting beam 4 is of a straight beam structure, and the rest elastic connecting beams are of a folding beam combined structure. The driving frame 9 is a combined structure of a plurality of straight beams.

The driving electrode 10 and the sensing electrode 11 include a movable electrode plate and a fixed electrode plate. The driving electrodes 10 are comb-teeth electrodes with equal intervals, and the sensing electrodes 11 are comb-teeth electrodes with variable intervals.

When the same AC voltage V is applied to a pair of driving electrodes 10 which are closer to the elastic coupling beam 6 among the left and right driving electrodes 10₁Then, the same AC voltage V is applied to the other pair of driving electrodes 10, which is far from the coupling elastic connecting beam 6, of the left and right driving electrodes 10₂Time (V)₂And V₁180 degrees out of phase) while applying a dc bias on the mass 2, an actuating electrostatic force can be generated. Under the action of electrostatic force, the movable electrode plates in the left mass block 2, the decoupling elastic connecting beam 8, the driving frame 9 and the driving electrode 10 move along the X direction, and the right mass block moves along the X directionThe corresponding symmetrical structures have opposite motion directions, and the two mass blocks 2 have opposite oscillation motion modes in the plane relative to the detection frame 1. At this time, the MEMS gyroscope is in a driving operation mode, a finite element simulation diagram of the operation mode is shown in fig. 3 (a driving electrode is omitted), at this time, the two mass blocks 2 are coupled through the detection frame 1 and the coupling elastic connection beam 6, in the driving mode, the mechanical motion of the two mass blocks 2 realizes high coupling, and the two mass blocks 2 can realize matching of mass and rigidity to the maximum extent. The structure can effectively reduce the deviation of the motion direction of the mass block in a driving mode caused by machining errors, and improves the precision and stability of the MEMS gyroscope.

When the gyroscope is in a driving mode, an angular velocity in the Z direction is applied to the outside, and at this time, the two masses 2 respectively receive coriolis forces in the Y-axis direction and in opposite directions. Under the action of Coriolis force, the mass blocks 2 on the two sides move along the Y direction, and the moving directions of the left structure and the right structure are opposite. The Coriolis force is transmitted to the detection frame 1 through the secondary elastic connecting beam, the mass block 2 and the detection frame 1 generate in-plane up-and-down torsional pendulum motion under the action of moment, at the moment, the MEMS gyroscope is in a detection mode, and a mode finite element simulation diagram of the MEMS gyroscope is shown in figure 4. At the moment, the driving frame 9 is connected with the mass block 2 through the decoupling elastic connecting beam 7, the driving frame 9 and the driving electrode 10 are close to a static state relative to the mass block 2, the capacitance of the driving electrode and the capacitance of the sensing electrode are not affected with each other, full decoupling is achieved between a driving mode and a detection mode, orthogonal coupling between the driving mode and the detection mode can be effectively reduced, and output errors of the MEMS gyroscope are reduced.

When the MEMS gyroscope is in the detection mode, the displacement distance between the movable electrode plate and the fixed electrode plate in the detection electrodes 11 located at the four corners of the detection frame 1 changes, and the change of the capacitance of the sensing electrode is detected by the external circuit, and then the change is processed and output through signal conversion, so that the value of the angular velocity applied from the outside can be obtained. The detection frame 1 is in an octagonal structure, movable electrode plates in the four detection electrodes 11 are perpendicular to the edges of four corners of the detection frame 1, and the arrangement mode of the induction electrodes improves the sensitivity of the gyroscope. In addition, due to the symmetry of the structure, the electrical signal output can be performed in a differential mode, the four sensing electrodes 11 positioned at the four corners of the detection frame 1 are in-phase output, the two sensing electrodes 11 positioned on one diagonal line of the detection frame 1 are in-phase output, and the two sensing electrodes positioned on the other diagonal line are in anti-phase output, so that the differential output can be realized, and the effects of suppressing errors and enhancing output signals can be achieved.

Example 2

Based on the planar structure of the MEMS gyroscope in embodiment 1, the functional electrode 12 can be arranged inside the driving frame, and the planar structure thereof is as shown in fig. 5. The functional electrode is one or a plurality of combinations of a driving detection electrode, a frequency tuning electrode and an orthogonal compensation electrode, and at the moment, a closed-loop control circuit can be optimized through the functional electrode 12, so that the performance of the gyroscope is further improved. The driving detection electrode, the frequency tuning electrode and the orthogonal compensation electrode in the functional electrode comprise a movable electrode plate and a fixed electrode plate; the movable electrode plate and the fixed electrode plate are both in a comb shape; the drive detection electrode is an equidistant comb-tooth-shaped electrode, and the frequency tuning electrode and the orthogonal compensation electrode are both variable-pitch comb-tooth-shaped electrodes.

Example 3

Based on the planar structure of the MEMS gyroscope in embodiment 1, the positions and the number of the coupling elastic connection beams 7 can be flexibly arranged, and the structure thereof is as shown in fig. 6. In the MEMS gyroscope, two driving frames 9 and the mass block 2 can be connected by adopting different numbers of decoupling elastic connecting beams 7. Two driving frames 9 close to one side of the anchor point 3A are connected with the mass block 2 through one decoupling elastic connecting beam 7, and two driving frames 9 far away from one side of the anchor point 3A are connected with the mass block 2 through two decoupling elastic connecting beams 7. The asymmetric connection mode can further reduce the orthogonal coupling between the detection mode and the driving mode, and can further reduce the output error of the gyroscope.

Example 4

Based on the planar structure of the MEMS gyroscope in embodiment 1, the number of the fixed anchor points may be set to six, and the structures and the numbers of the driving frame 9 and the third-stage elastic connecting beam 8 may be adjusted accordingly, and the structures are as shown in fig. 7. At the moment, two fixed anchor points 3A in the six fixed anchor points 3 are located on the Y central axis, every two fixed anchor points 3B in the other four fixed anchor points are respectively located on the inner sides of the mass blocks 3, the two fixed anchor points 3B in each mass block 3 are located on the upper side and the lower side of the X central axis, and meanwhile, the fixed anchor points 3B are located between two driving frames 9 in one mass block 3. The driving frame 9 can be adjusted to be a straight beam combined I-shaped structure, a three-stage elastic connecting beam 8 is respectively arranged between each anchor point 3B and the driving frame 9, and the specific structural details are shown in fig. 8.

The structure can further reduce the orthogonal coupling between the detection mode and the driving mode, and can further reduce the output error of the gyroscope.

Example 5

Based on the planar structure of the MEMS gyroscope in embodiment 1, the detection frame 1 may be set to be a symmetrical shape combining a polygon and a circular arc, and the arrangement of the sensing electrodes 11 may be adjusted accordingly, and the structure thereof is as shown in fig. 9. At the moment, the four groups of induction electrodes are positioned at the arc position, and movable electrode plates in the induction electrodes are vertical to the tangent of the arc part of the detection frame. Compared with embodiment 1, the arrangement mode can improve the detection sensitivity of the gyroscope and further improve the performance of the MEMS gyroscope.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.