阅读说明：本技术 带电粒子加速装置及其调整方法 (Charged particle acceleration device and adjustment method thereof ) 是由 衣笠邦彦 伊藤宽昌 竹内猛 金井芳治 于 2020-04-20 设计创作，主要内容包括：提供一种带电粒子加速装置及其调整方法,即使在反复实施控制设备的安装的情况下,也不需要反复进行对准调整。带电粒子加速装置(10A)具备：控制设备(15(15a、15b、15c)),供带电粒子通过的管道(11)贯穿,并且对带电粒子的射束轨道(12)进行控制；以及载台(20),由固定于基础件的架台(16)支承,并且使控制设备(15)沿着与射束轨道(12)交叉的方向可逆地移动。(Provided are a charged particle acceleration device and an adjustment method thereof, which do not need to repeatedly perform alignment adjustment even when control equipment is repeatedly installed. A charged particle acceleration device (10A) is provided with: a control device (15(15a, 15b, 15c)) through which a duct (11) through which the charged particles pass passes and which controls a beam trajectory (12) of the charged particles; and a stage (20) which is supported by a gantry (16) fixed to the base member and reversibly moves the control device (15) in a direction intersecting the beam path (12).)

1. A charged particle acceleration device is provided with:

a control device which is penetrated by a pipe through which charged particles pass and controls a beam trajectory of the charged particles; and

and a stage supported by a gantry fixed to a base and reversibly moving the control device in a direction intersecting the beam trajectory.

2. Charged particle accelerating apparatus according to claim 1,

the stage includes:

a fixing plate fixed to the stand; and

and a moving plate to which the control device is fixed and which relatively moves with respect to the fixed plate.

3. Charged particle accelerating apparatus according to claim 2,

the stage further includes a linear motion mechanism that moves the moving plate relative to the fixed plate by performing axial rotation.

4. Charged particle accelerating apparatus according to claim 2 or 3,

the stage further includes a regulating member for regulating movement of the moving plate relative to the fixed plate.

5. Charged particle accelerating apparatus according to any one of the claims 2 to 4,

the charged particle acceleration device includes a stage that is separate from the stage on which the control device is provided and that reversibly moves an adjustment device that operates in an adjustment stage in a direction intersecting the beam trajectory.

6. Charged particle accelerating apparatus according to any one of the claims 2 to 5,

at least one of the fixed plate and the movable plate may be divided into a part of a region other than a region occupied by the control device during a normal operation.

7. A method of adjusting a charged particle acceleration apparatus according to any one of claims 1 to 6, comprising:

a step of mounting a member, which is formed by integrating the duct, the control device, and the stage, on the mount, and performing alignment adjustment with respect to the beam trajectory;

moving the stage to retract the control device from the beam rail;

arranging a beam trajectory adjusting device for adjusting an incident condition of the charged particles;

a step of retracting the adjusting device from the beam trajectory; and

and a step of moving the stage to reset the control device to the beam orbit.

Technical Field

Embodiments of the present invention relate to a charged particle acceleration apparatus and a method of adjusting the same.

Background

In the accelerator, in order to control the beam trajectory of charged particles, a plurality of control devices such as a deflection electromagnet, a quadrupole electromagnet, and a screen monitor are disposed along the beam trajectory. Also, these control devices are required to be mounted with high accuracy with respect to the beam trajectory. Therefore, when these control devices are installed, alignment adjustment is performed for positioning with reference to a fixed point of the building. On the other hand, there is a device that is installed only at the time of adjustment and removed at the time of normal operation, like a transmission monitor used only for adjustment of an injector.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. 2007 & lt- & gt 149405

Disclosure of Invention

Problems to be solved by the invention

In this way, when the accelerator is constructed, it is necessary to repeatedly perform the precise alignment of the control device every time the adjustment stage is switched to the normal state, which takes a lot of time.

Embodiments of the present invention have been made in view of such circumstances, and an object thereof is to provide a charged particle acceleration apparatus and an adjustment method thereof that do not require repeated alignment adjustment even when control equipment is repeatedly attached.

Drawings

Fig. 1 (a) is a plan view of the charged particle acceleration device according to embodiment 1 in a normal state, where (B) is a partial sectional view of B-B, and (C) is a partial sectional view of C-C.

Fig. 2 (a) is a plan view of a stage of adjustment of the charged particle accelerating device according to embodiment 1, (B) is a partial sectional view of B-B, and (C) is a partial sectional view of C-C.

Fig. 3 is a partial plan view of the charged particle acceleration device according to embodiment 2.

Fig. 4 is a B-B cross-sectional view of the restricting member of the charged particle accelerating device shown in fig. 3.

Fig. 5 (a) is a plan view of the charged particle accelerating device according to embodiment 3 when installed, (B) is a plan view of an adjustment stage, and (C) is a plan view in a normal state.

Fig. 6 is a flowchart of a method of adjusting the charged particle acceleration device according to each embodiment.

Detailed Description

(embodiment 1)

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 (a) is a plan view of a charged particle acceleration device 10A according to embodiment 1 in a normal state, fig. 1 (B) is a partial sectional view thereof B-B, and fig. 1 (C) is a partial sectional view thereof C-C.

In this way, the charged particle acceleration device 10A (10) includes: a control device 15(15a, 15b, 15c) which penetrates the duct 11 through which the charged particles pass, and controls the beam trajectory 12 of the charged particles; and a stage 20 supported by a gantry 16 fixed to a base (not shown) and reversibly moving the control device 15 in a direction intersecting the beam path 12.

The charged particle acceleration device 10A (10) forms a beam trajectory 12 by connecting joint portions at both ends of the plurality of ducts 11 to each other. The opposing joint portions (flange plates) of the mutually adjacent pipes 11 are butted and fastened by screws or the like to connect the plurality of pipes 11, thereby forming a beam trajectory 12 of moving charged particles.

A plurality of control devices 15(15a, 15b, 15c) such as a deflection electromagnet, a quadrupole electromagnet, and a screen monitor are provided along the beam trajectory 12 to control the trajectory of the charged particles moving in the internal space of the duct 11. The control device 15 is not limited to these.

The gantry 16 is a structure for supporting the charged particle accelerator 10A (10) as a heavy object along the beam path 12, and is constructed on a concrete-cast base (not shown). In the drawings, the frame 16 is illustrated as an H-shaped steel having a longitudinal direction arranged horizontally, but the form thereof is not particularly limited, and may be arranged vertically or obliquely according to the installation position of the control device 15.

The stage 20 includes a fixed plate 22 fixed to the gantry 16, and a moving plate 21 fixed to the control device 15 and moving relative to the fixed plate 22. Further, the stage 20 includes a linear motion mechanism 23 that moves the moving plate 21 relative to the fixed plate 22 by the axial rotation.

The lower surface of the moving plate 21 slides in contact with the upper surface of the fixed plate 22. The moving plate 21 is restricted from moving in the direction along the beam trajectory 12, and is movable in a direction intersecting the beam trajectory 12 so as to have a stroke width to the extent that the control device 15 does not interfere with the beam trajectory 12. Although not shown, the moving plate 21 positioned on the upper surface of the fixed plate 22 can be fixed to the fixed plate 22 at this position by a fastening member or the like.

At the moving plate 21, control devices 15(15a, 15b, 15c) such as a deflection electromagnet, a quadrupole electromagnet, a screen monitor, and the like are provided so as to penetrate the center of the orbit through which the charged particles pass, together with the duct 11. Further, the moving plate 21 provided with these control devices 15 is positioned on the upper surface of the fixed plate 22 and fixed by a fastening member or the like. The control device 15, the duct 11, and the stage 20 are assembled at a place different from the installation place of the charged particle accelerator 10A (10), and are integrally assembled and then transported to the installation place.

At the installation site of the charged particle accelerator 10A (10), the stage 20 in which the control device 15 and the duct 11 are integrally assembled is coupled to the upper portion of the gantry 16 by a coupling member 28 capable of adjusting the height. As the coupling member 28, a widely used combination of a screw and a nut can be used, but any member can be suitably used as long as it can stably fix a high gravity object and adjust the height.

These control devices 15 are required to be mounted with high accuracy with respect to the beam rail 12. Therefore, when mounting the stage 20 provided with these control devices 15 on the gantry 16, alignment adjustment is performed in which the positioning is performed while adjusting the height of the coupling member 28 with reference to the fixed point of the building.

As shown in fig. 1 (C), the linear motion mechanism 23 includes a nut portion 27 fixed to the moving plate 21, a threaded rod 25 screwed into the nut portion 27 and having both ends rotatably supported by the fixed plate 22, and a rotation driving portion 26 for applying a rotational torque to the threaded rod 25.

With the linear motion mechanism 23 configured as described above, the integrated body of the control device 15, the duct 11, and the moving plate 21 can be retracted from the position to be positioned to the side of the beam trajectory 12, and can be returned to the original position to be positioned with good reproducibility.

In the figure, the housing space of the linear motion mechanism 23 is provided in a groove shape on the upper surface of the fixed plate 22, but may be a through hole having a thick portion penetrating therethrough in parallel with the main surface of the moving plate 21. The linear motion mechanism 23 is not an essential component, and the integrated body of the control device 15, the duct 11, and the moving plate 21 may be moved by another method, for example, by human power.

Fig. 2 (a) is a plan view of a tuning stage of the charged particle accelerating device 10A according to embodiment 1, fig. 2 (B) is a partial sectional view thereof B-B, and fig. 2 (C) is a partial sectional view thereof C-C. In the adjustment stage of the charged particle accelerating device 10A (10), the moving plate 21 of the stage 20 is moved to the side or in the moving direction by the linear movement mechanism 23 to such an extent that the control device 15 does not interfere with the beam rail 12.

Then, an adjusting device 17 such as an emittance measuring device is disposed on the beam trajectory 12 after the control device 15 is retracted. The adjusting device 17 is arranged at both ends thereof on the beam path 12 together with the adjusting pipes 18. As shown in fig. 2 (C), the adjusting device 17 is attached to the gantry 16 with high accuracy with respect to the beam rail 12 along with alignment adjustment via the support member 19 and the coupling member 28.

When the adjustment phase of the charged particle acceleration device 10A (10) is completed, the adjustment device 17 is removed from the gantry 16, and the control device 15 that has retreated is returned to the beam trajectory 12. The control device 15 does not need to perform alignment adjustment again in order to return to the original beam trajectory 12 position with high reproducibility.

(embodiment 2)

Next, embodiment 2 of the present invention will be described with reference to fig. 3 and 4. Fig. 3 is a partial plan view of the charged particle acceleration device 10B according to embodiment 2. Fig. 4 is a B-B sectional view of the restricting member 30 shown in fig. 3. In fig. 3 and 4, the same reference numerals are given to the components having the same configurations or functions as those in fig. 1 or 2, and redundant description is omitted.

In a charged particle acceleration device 10B according to embodiment 2, a stage 20 includes a regulating member 30 that regulates movement of a moving plate 21 relative to a fixed plate 22. As shown in fig. 4, the regulating member 30 includes an abutting portion 31 abutting against a part of the moving plate 21, and a fastening member 32 fixing the abutting portion 31 and the fixing plate 22. Further, the abutting portion 31 is provided with an adjustment margin 33 for finely adjusting the position of the abutting surface with the moving plate 21. The adjustment margin 33 may be provided on the fixed plate 22 side instead of the abutting portion 31 side. The position of the regulating member 30 may be not the main surface of the fixing plate 22 shown but an edge end side.

The regulating member 30 needs to be fixed to the fixed plate 22 in a state where the abutting portion 31 abuts against the moving plate 21 until the alignment adjustment is completed after the control device 15 and the stage 20 are mounted on the stage 16. By providing the restricting member 30 in this manner, when the control device 15 retracted in the adjustment stage is returned to the beam trajectory 12, the original position can be accurately returned only by bringing the moving plate 21 into contact with the restricting member 30.

(embodiment 3)

Next, embodiment 3 of the present invention will be described with reference to fig. 5. Fig. 5 (a) is a plan view of the charged particle acceleration device 10C according to embodiment 3 when installed, fig. 3 (B) is a plan view of an adjustment stage, and fig. 5 (C) is a plan view in a normal state. In fig. 5, the same reference numerals are given to the components having the same structures or functions as those in fig. 1 or 2, and redundant description thereof is omitted.

The charged-particle acceleration apparatus 10C according to embodiment 3 includes a stage 20b that is separate from the stage 20a on which the control device 15(15a, 15b, 15C) is provided and reversibly moves the adjustment device 17 that operates in the adjustment stage in a direction intersecting the beam trajectory 12. Thus, in the adjustment stage, the control device 15 and the adjustment device 17 can be alternately exchanged and positioned on the beam trajectory 12 without realignment adjustment. Further, after the adjustment stage is completed, the stage 20b provided with the adjustment device 17 can be detached as shown in fig. 5 (C).

Further, as shown in fig. 5 (C), in the charged particle accelerating devices 10(10A, 10B, 10C) according to the respective embodiments, a part of the regions of the fixed plate 22 and the moving plate 21 other than the region occupied by the control means 15(15a, 15B, 15C) during the normal operation can be divided.

The fixed plate 22 is provided with a pair of dividing boundaries 35a at symmetrical positions around the beam trajectory 12. The fixing plate 22 is divided into three parts by the pair of dividing boundaries 35a, and the three parts are integrated at least in the adjustment stage. Similarly, the moving plate 21 is also provided with a pair of divided boundaries 35b at symmetrical positions around the beam trajectory 12. The moving plate 21 is divided into three parts by the pair of divided boundaries 35b, and the three parts are integrated at least in the adjustment stage. With this configuration, after the adjustment stage is completed, unnecessary regions of the fixed plate 22 and the moving plate 21 can be removed, and a space around the charged particle accelerating device 10 can be secured.

A method for adjusting a charged particle acceleration apparatus according to each embodiment will be described based on a flowchart of fig. 6. (refer to FIGS. 1 to 2 as appropriate). First, as shown in fig. 1, a member in which duct 11, control device 15(15a, 15b, 15c), and stage 20 are integrated is attached to mount 16 (S11). Then, alignment adjustment with respect to the beam rail 12 is performed (S12).

Next, the process proceeds to a beam adjustment step, and as shown in fig. 2, the stage 20 is moved to retract the control device 15 from the beam rail 12 (S13). Then, the adjusting apparatus 17 is arranged on the beam trajectory 12 (S14). After the state is reached, the charged particles are emitted from an incident device (not shown), and the incident conditions of the charged particles are adjusted (S15).

When the adjustment of the incident condition of the charged particles is completed, the adjustment device 17 is retracted from the beam rail 12 (S16), and the stage 20 is moved to return the control device 15 to the beam rail 12 (S17). Then, the steps (S13) to (S17) are repeated until the beam adjustment step is completed (no, yes, and end in S18).

According to the charged particle acceleration device of at least one embodiment described above, by having the stage that reversibly moves the control device in the direction intersecting the beam trajectory, it is not necessary to repeat alignment adjustment even when the control device is repeatedly attached.

Several embodiments of the present invention have been described, but these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in other various forms, and various omissions, substitutions, changes, and combinations can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the inventions described in the claims and the equivalent scope thereof.