阅读说明：本技术 一种超轻梁的振幅测量装置 (Amplitude measuring device of ultralight beam ) 是由 付金煜 祝翱·吉马雷斯·达·科斯塔 梁志均 屈化民 于 2021-05-26 设计创作，主要内容包括：本发明公开了一种超轻梁的振幅测量装置,其特征在于,包括气体流量控制计(1)、可调导流装置(2)、气道壳(3)、可调扰流装置(5)、振幅测量仪(7)和底板(8)；其中气道壳(3)与底板(8)连接构成用于测量超轻梁振动幅度的气道,所述气道内安装有用于支撑超轻梁的前端超轻梁支架(41)、后端超轻梁支架(42),超轻梁支架(41)与后端超轻梁支架(42)之间的气道内壁上设有可调扰流装置(5)；气体流量控制计(1)一端用于与气源连接,另一端连通可调导流装置(2),用于为气道提供引起超轻梁振动的气流并控制流量大小；可调导流装置(2)与气道入口端连接；振幅测量仪(7)设置于气道外侧,用于测量超轻梁的振幅。(The invention discloses an amplitude measuring device of an ultralight beam, which is characterized by comprising a gas flow controller (1), an adjustable flow guide device (2), an air passage shell (3), an adjustable flow disturbing device (5), an amplitude measuring instrument (7) and a bottom plate (8); the air channel shell (3) is connected with the bottom plate (8) to form an air channel for measuring the vibration amplitude of the ultralight beam, a front-end ultralight beam support (41) and a rear-end ultralight beam support (42) for supporting the ultralight beam are installed in the air channel, and an adjustable turbulence device (5) is arranged on the inner wall of the air channel between the ultralight beam support (41) and the rear-end ultralight beam support (42); one end of the gas flow control meter (1) is used for being connected with a gas source, and the other end of the gas flow control meter is communicated with the adjustable flow guide device (2) and is used for providing gas flow which causes the ultra-light beam to vibrate for the gas passage and controlling the flow; the adjustable flow guide device (2) is connected with the inlet end of the air passage; and the amplitude measuring instrument (7) is arranged on the outer side of the air passage and used for measuring the amplitude of the ultralight beam.)

1. An amplitude measuring device of an ultralight beam is characterized by comprising a gas flow controller (1), an adjustable flow guide device (2), an air passage shell (3), an adjustable turbulence device (5), an amplitude measuring instrument (7) and a bottom plate (8); the air channel shell (3) is connected with the bottom plate (8) to form an air channel for measuring the vibration amplitude of the ultralight beam, a front-end ultralight beam support (41) and a rear-end ultralight beam support (42) for supporting the ultralight beam are installed in the air channel, and an adjustable turbulence device (5) is arranged on the inner wall of the air channel between the ultralight beam support (41) and the rear-end ultralight beam support (42); one end of the gas flow control meter (1) is used for being connected with a gas source, and the other end of the gas flow control meter is communicated with the adjustable flow guide device (2) and is used for providing gas flow which causes the ultra-light beam to vibrate for the gas passage and controlling the flow; the adjustable flow guide device (2) is connected with the inlet end of the air passage; and the amplitude measuring instrument (7) is arranged on the outer side of the air passage and used for measuring the amplitude of the ultra-light beam.

2. The amplitude measuring device of an ultra light beam according to claim 1, further comprising an opening-adjustable gas outlet structure (6) for adjusting gas discharge; the outlet end of the air passage is connected with the air outlet structure (6) with the adjustable opening degree.

3. The amplitude measuring device of the ultra light beam according to claim 2, wherein the opening adjustable air outlet structure (6) includes a baffle plate which is slidable with respect to the cross section of the air passage to achieve the opening adjustment.

4. The amplitude measuring device of the ultra-light beam as claimed in claim 2, wherein the gas outlet structure (6) with adjustable opening degree comprises a first baffle and a second baffle, wherein the first baffle and the second baffle are respectively provided with a plurality of through holes distributed at intervals, the first baffle is fixedly connected with the outlet end of the gas passage, and the second baffle can slide relative to the first baffle to realize the adjustment of the opening degree.

5. The amplitude measuring device of the ultra-light beam as claimed in any one of claims 1 to 4, wherein the adjustable turbulator (5) comprises a plurality of turbulators with different specifications, the turbulators are of a convex structure from the air channel wall to the ultra-light beam, and the heights of the protrusions of the turbulators with different specifications are different; the installation positions of the flow disturbing blocks are arranged on the wall of the air passage along the longitudinal direction of the air passage in a single-point or multi-point mode according to the measurement position requirement of the ultra-light beam.

6. The amplitude measuring device of the ultra-light beam as claimed in any one of claims 1 to 4, wherein the adjustable spoiler device (5) comprises a plurality of inserted spoiler blocks, the inserted spoiler blocks are inserted into the air passage from the outer side of the air passage to form a protruding structure facing the ultra-light beam, and the insertion depth of the inserted spoiler blocks is adjustable; the installation position of each inserted type flow disturbing block is that the inserted type flow disturbing blocks are arranged on the wall of the air channel in a single-point or multi-point mode according to the measurement position requirement of the ultra-light beam along the longitudinal direction of the air channel.

7. The amplitude measuring device of an ultralight beam as claimed in claim 1, wherein the adjustable flow guide device (2) comprises an air inlet chamber (21) and a plurality of flow guide inserts (22) inserted into the air inlet chamber; the number and the insertion depth of the flow guiding inserts (22) are adjustable.

8. The amplitude measuring device of an ultralight beam according to claim 7, wherein the cross-sectional shape of the intake chamber (21) matches the cross-sectional shape of the air duct case (3).

9. The amplitude measuring device of an ultra light beam according to claim 1, wherein the amplitude measuring instrument (7) is a non-contact type amplitude measuring instrument.

10. The amplitude measuring device of the ultra light beam according to claim 9, wherein the amplitude measuring instrument (7) is a non-contact type amplitude measuring instrument which adopts an optical method for measurement, and is located on the outer side of the airway shell, and the airway shell is made of a transparent material.

Technical Field

The invention relates to an amplitude measuring device for a beam, in particular to a device for measuring the amplitude of an ultra-light supporting beam on a detector, and belongs to the technical field of amplitude measurement.

Background

The silicon pixel detector technology with high spatial resolution plays an increasingly important role in the fields of material science, biochemistry, aerospace, high-energy physics and the like. Due to excellent detection and position resolution performance, the silicon pixel detector can be applied to high-precision imaging, particle track reconstruction of next-generation high-energy physical large devices and the like. Especially, in the particle track reconstruction of a high-energy physical large device, such as a high-energy annular positive and negative electronic collider, the primary planning scheme of the vertex detector adopts a plurality of strip-shaped pixel detector units (each detector unit consists of a supporting structure, a circuit board and a detector chip) which are mutually overlapped and arranged into a plurality of barreled structures with different diameters, and the detection units jointly act to realize the particle track measurement so as to achieve the purpose of detecting the collided vertex. Silicon pixel track detectors place high demands on the support structure. Firstly, the basic support structure of the detector, namely the support beam of the detector unit, is required to have enough rigidity, and the deformation of the detector under load is small enough to meet the high-precision position resolution; furthermore, it is desirable that the support beam be made of a material having a density as low as possible to reduce the amount of material and to reduce the loss of image quality due to multiple scattering. In addition, cooling is also performed on the probe to reduce the temperature of the chip and electronics. The method of air cooling with low material quality to adjust the temperature of the chip within the allowable working temperature range is the first choice for cooling the high-resolution detector. Under the condition of air cooling, the control temperature and the caused stretching deformation of a cooling system are considered, meanwhile, the vibration influence of the gas load on the detector supporting structure during air cooling is fully considered, the expected cooling effect is achieved, meanwhile, the amplitude of the supporting structure is controlled, the position instability and the shape instability of the supporting structure caused by vibration are reduced as much as possible, the position deviation of the detector caused by the position instability and the shape instability are reduced, and the position resolution of the detector system is prevented from being seriously influenced.

The vibration amplitude measurement of the supporting beam can be realized by a contact type or a non-contact type, the contact type measurement can be realized by additionally arranging an acceleration sensor on a measured point of the beam and then determining the displacement of the measured point through an integration algorithm, and the non-contact type measurement can be realized by adopting an optical or eddy current type amplitude measuring instrument. For the ultra-light beam used for track detection of the silicon vertex detector, on one hand, because the ultra-light beam is ultra-light due to self weight, and because the weight of the conventional acceleration sensor is equivalent to or even far greater than the self weight of the ultra-light beam, the inherent properties of the beam after the acceleration sensor is installed can be changed and the application is not matched; on the other hand, the amplitude itself is required to be very small, and the error of the acceleration method measurement amplitude itself is relatively slightly large, so that the method is not suitable for the measurement of the small amplitude. The non-contact type laser interferometer is suitable for amplitude measurement of the detector beam and can be arranged outside the gas environment.

For a silicon vertex detector with a multi-layer detection structure, the vibration amplitude generated by different layers of detectors needs to be fully evaluated and measured based on the self structure form and the flow state of gas flow. The ultra-light detector support beam with high rigidity only has very small deformation under the gravity load, but the amplitude of the detector support beam caused by gas flow is controlled to be lower than the spatial resolution of the detector, and the allowable amplitude is very small, so that the measurement of the small amplitude is comprehensive system-level work, and the adjustment and control of gas flow are required to measure the amplitude of the beam under different gas flow states so as to evaluate the structural dimensional stability of the support beam under the gas flow. There is currently no readily available or similar device on the market that provides a tunable gas environment while allowing amplitude measurements on similar ultra-light beams with small amplitudes.

Disclosure of Invention

The invention aims to provide an amplitude measuring device for an ultra-light beam, aiming at the problem that the amplitude measurement of the ultra-light supporting beam of a silicon track detector under the condition of air cooling is lacked at present. The ultra-light beam amplitude measuring device can provide airflow environment with adjustable flow, flow guide, turbulence, air outlet opening and the like for the ultra-light detector supporting beam, and can measure vibration amplitude generated in different environments to evaluate whether the comprehensive performance of the detector supporting beam reaches the expected target or not, so as to test and guide the structural design of the supporting beam of the detector.

The ultra-light beam amplitude measuring device has the functions of adjusting the air source flow, inlet flow guide, turbulence in an air passage, air outlet opening and the like, adopts a non-contact type amplitude measuring instrument, is suitable for measuring the amplitude of a light beam, particularly the ultra-light beam under the air flow, particularly the condition that the amplitude of the beam is expected to be very small (generally in micron order), and has more superiority in the aspects of air flow adjustment and amplitude measurement precision.

The technical scheme of the invention is as follows:

the amplitude measuring device of the ultralight beam is characterized by comprising an upstream gas flow controller 1, an adjustable flow guide device 2, an air passage shell 3, the ultralight beam 4, an adjustable turbulence device 5, an opening-adjustable air outlet structure 6, a non-contact amplitude measuring instrument 7 and a bottom plate 8. The adjustable flow guide device 2 is connected with the air passage shell 3, a front-end ultralight beam support 41 and a rear-end ultralight beam support 42 which are used for supporting the ultralight beam 4 are installed in an air passage formed by the air passage shell 3 and the bottom plate 8, the adjustable flow disturbing device 5 is arranged below the ultralight beam 4, the lower stream of the air passage is connected with the opening-adjustable air outlet structure 6, and air in the air passage is discharged from the opening-adjustable air outlet structure 6.

The gas from the gas source enters the adjustable flow guiding device 2 through the flow controller 1 and then enters the gas channel, and the bottom plate 8 and the gas channel shell 3 form the gas channel. The ultra-light beam 4 is mounted on the base plate 8 of the measuring device by means of brackets 41, 42 at both ends.

Further, the adjustable flow guiding device 2 is composed of an air inlet cavity 21 and a plurality of flow guiding inserts 22.

The flow guiding effect is adjusted by adjusting the number, the insertion depth, the insertion direction and the like of the flow guiding inserts 22 in the adjustable flow guiding device 2, so that the gas can uniformly (or transversely and differentially) flow into the beam area after passing through the gas inlet cavity 21 as much as possible.

Furthermore, the cross section of the air passage has a priority, and the cross section of the air inlet cavity is matched with the cross section of the air passage shell.

The gas enters the air passage through the adjustable flow guide device 2, the size of the cross section of the gas flow passage near the measured position is changed through the adjustment of the adjustable flow disturbing device 2 in the air passage, the flow direction and the speed of the gas are changed, the disturbed gas flow is generated near the beam, the gas flow impact is generated, and the vibration amplitude is caused.

Furthermore, the ultra-light beam can be horizontally or vertically arranged in the air passage along the axial direction of the air passage longitudinally.

The gas is adjusted by the adjustable turbulence device 5 to obtain different gas flow states, and finally flows out through the opening-adjustable gas outlet structure 6, and the gas flow state in the gas channel is further changed by adjusting the opening of the outlet, so that a beam amplitude result under a complex flow state is obtained.

Furthermore, the adjustable turbulence device 5 can be composed of a plurality of turbulence blocks with different specifications, the turbulence blocks form a convex structure from the air passage wall to the beam direction, the heights of the turbulence blocks with different specifications are different, and the heights of the protrusions are adjusted through the turbulence blocks with different heights to realize a turbulence effect; the installation positions of the turbulence blocks can be arranged on the air channel wall along the longitudinal direction of the beam in a single-point or multi-point mode according to the measurement position requirement. The adjustable turbulence device 5 can also be inserted into the air passage from the outer side of the air passage by an inserted turbulence block to form a bulge facing the beam, and turbulence adjustment is realized by adjusting the insertion depth, namely the height of the bulge; the mounting position of the plug-in type turbulence block can be arranged on the air channel wall in a single-point or multi-point mode according to the measuring position requirement along the longitudinal direction of the beam. The air flow block is arranged and adjusted near the position to be measured of the beam to adjust the air flow gap near the position to be measured to achieve air flow, according to the Bernoulli equation, the adjustment of the air flow gap causes changes of air flow degree and direction, air flow pressure difference can be caused to impact the beam to cause vibration, and amplitude detection under different conditions can be obtained.

The height direction of the turbulence block is perpendicular to the plane of the ultra-light beam, namely the plane direction of the detector. If the beam is vertically arranged in the transverse direction, a non-contact measurement method is adopted, the amplitude measuring instrument is arranged corresponding to the wide surface of the beam, and if an optical measuring instrument is adopted, the air duct shell on one side of the instrument is required to be transparent; the flow disturbing device is also opposite to the wide surface of the beam.

Furthermore, the opening-adjustable air outlet structure 6 can be composed of a single baffle, and the opening adjustment is realized through the sliding of the baffle relative to the cross section of the air passage; or the double-baffle plate structure comprises double baffle plates, wherein each baffle plate is provided with matching holes distributed at intervals, one baffle plate is fixed relative to the air passage, and the other baffle plate can realize the adjustment of the ventilation section by sliding on the fixed baffle plate to obtain different outlet opening degrees.

Furthermore, because the beam is ultra-light, it is not suitable for using a contact acceleration sensor to derive the amplitude, and because the amplitude value of the beam under the air current is small, it is not suitable for obtaining the acceleration measurement. Therefore, a non-contact measurement method is adopted. If the non-contact amplitude measuring instrument adopting the optical method is adopted, the material of the air channel shell needs to be a transparent material, and the shell wall needs to be as thin as possible, so that the measuring precision of the optical instrument is not influenced.

Furthermore, the non-contact type amplitude measuring instrument is arranged outside the air passage, is not fixed in position and is arranged according to different amplitude measuring positions on the beam.

Compared with the prior art, the invention has the beneficial effects that:

the amplitude measuring device of the ultralight supporting beam can realize the amplitude measurement of the ultralight beam under forced airflow, integrates multiple adjusting functions, can provide airflow environments with adjustable flow, flow guide, turbulence, air outlet opening and the like for the ultralight detector supporting beam, adopts a non-contact amplitude measuring instrument, and can measure the vibration amplitude generated in different environments so as to evaluate the comprehensive performance of the detector supporting beam and check and guide the structural design of the supporting beam of the detector. The device is suitable for measuring the amplitude of a light and especially ultra-light beam under the airflow, especially for the condition that the amplitude of the beam is expected to be very tiny (generally in a micron order), and has more superiority in both the adjustment of the airflow and the measurement precision of the amplitude.

Drawings

Fig. 1 is a schematic view of an ultra-light beam amplitude measuring device.

Fig. 2 is a side view of an ultra-light beam amplitude measuring apparatus.

Fig. 3 is a side view (transparent air passage and visible inside) of the ultra-light beam amplitude measuring device.

Fig. 4 is a top view (with the air passage transparent and the inside visible) of the ultra-light beam amplitude measuring device.

Fig. 5 is an internal structure view of the adjustable air guiding device.

The device comprises a gas flow controller 1, an adjustable flow guide device 2, an air passage shell 3, an ultra-light beam 4, an adjustable flow disturbing device 5, an opening-adjustable air outlet structure 6, a non-contact amplitude measuring instrument 7, a bottom plate 8, an air inlet cavity 21, a flow guide plug 22, a front end ultra-light beam support 41 and a rear end ultra-light beam support 42.

Detailed Description

The attached drawings 1, 2, 3 and 4 are schematic diagrams of the ultra-light beam amplitude measuring device. The following examples are provided to further illustrate the embodiments of the present invention.

The amplitude measuring device of the ultralight beam comprises an upstream gas flow controller 1, an adjustable flow guide device 2, an air passage shell 3, the ultralight beam 4, an adjustable turbulence device 5, an opening-adjustable air outlet structure 6 and a non-contact amplitude measuring instrument 7. The adjustable flow guide device 2 is connected with the air passage shell 3, a front-end ultralight beam support 41 and a rear-end ultralight beam support 42 which are used for supporting the ultralight beam 4 are installed in the air passage, an adjustable flow disturbing device 5 is arranged below the ultralight beam 4, the downstream of the air passage is connected with an opening-adjustable air outlet structure 6, and air is discharged from the opening-adjustable air outlet structure 6.

1) The gas from the gas source enters the adjustable flow guiding device 2 through the flow controller 1 and then enters the air passage shell 3, the measured ultra-light beam is installed on a bottom plate 8 of the measuring device through supports at two ends, and the bottom plate 8 and the air passage shell 3 form an air passage.

Furthermore, the adjustable flow guiding device is composed of an air inlet cavity 21 and a plurality of backflow inserts 22.

Further, the cross section of the air inlet cavity is not limited (can be made as required), and can be rectangular, semicircular and the like.

Further, the flow directing inserts may be in the form of posts, pins, plates, strips, or the like.

Further, the installation and positioning of the flow guide insert in the air inlet cavity can be made horizontal, vertical or inclined according to requirements.

2) The device adjusts the flow guide effect by adjusting the number, the depth and the like of the flow guide plug-in pieces 22, and gas can uniformly (or transversely differentially) flow into the beam area after passing through the gas inlet cavity as much as possible.

Further, the ultra-light beam 4 is installed in the air passage through a front end ultra-light beam bracket 41 and a rear end ultra-light beam bracket 42 at both ends, that is, fixed on the bottom plate 8 of the amplitude measuring device. The size of the bracket is close to that of a detector supporting structure as much as possible, and the bracket is small as much as possible, occupies less extra space and reduces the blockage to air inlet.

Furthermore, the shape and the size of the air passage are not unique, and the air passages with different sizes can be made according to the arrangement of the supporting beams in the detector structure so as to obtain different beam peripheral spaces, and the gaps of the air passages are similar to those of the supporting beams on the same layer or different layers on the detector. The cross-sectional size of the airway is preferred and the cross-sectional shape of the inlet chamber 21 should match that of the airway shell 3.

3) The gas enters the air passage through the adjustable flow guide device 2, the size of the cross section of the gas flow passage near the measured position is changed through the adjustment of the adjustable flow disturbing device 5 in the air passage, the flow direction and the speed of the gas are changed, the disturbed gas flow is generated near the beam, the gas flow impact is generated, and the vibration amplitude is caused.

Furthermore, the adjustable turbulence device 5 can be composed of a plurality of turbulence blocks with different specifications, the turbulence blocks form a convex structure from the air passage wall to the beam direction, the heights of the turbulence blocks with different specifications are different, and the heights of the protrusions are adjusted through the turbulence blocks with different heights to realize a turbulence effect; the installation positions of the turbulence blocks can be arranged on the air channel wall along the longitudinal direction of the beam in a single-point or multi-point mode according to the measurement position requirement. The adjustable turbulence device or the plug-in turbulence block can be inserted into the channel from the outer side of the air passage to form a bulge facing the beam, and the turbulence adjustment is realized through the insertion depth, namely the height adjustment of the bulge; the mounting position of the plug-in type turbulence block can be arranged on the air channel wall in a single-point or multi-point mode according to the measuring position requirement along the longitudinal direction of the beam. The air flow block is arranged and adjusted near the position to be measured of the beam to adjust the air flow gap near the position to be measured to achieve air flow, according to the Bernoulli equation, the adjustment of the air flow gap causes changes of air flow degree and direction, pressure air flow pressure difference can be caused to impact the beam to cause vibration, and different amplitudes can be obtained.

4) The gas is adjusted by the adjustable turbulence device 5 to obtain different gas flow states, and finally flows out through the opening-adjustable gas outlet structure 6, and the gas flow state in the gas channel is further changed by adjusting the opening of the outlet, so that a beam amplitude result under a complex flow state is obtained.

Furthermore, the opening-adjustable air outlet structure 6 can be composed of a single baffle, and the opening adjustment is realized through the sliding of the single plate relative to the section of the air passage; or the double-baffle plate structure comprises double baffle plates, wherein each baffle plate is provided with matching holes distributed at intervals, one baffle plate is fixed relative to the air passage, and the other baffle plate can realize the adjustment of the ventilation section by sliding on the fixed baffle plate to obtain different outlet opening degrees.

5) The amplitude of the measured position on the beam is measured by a non-contact amplitude measuring instrument 7 arranged outside the air passage.

Further, since the beam itself is ultra-light, it is not suitable for obtaining the amplitude by using a contact acceleration sensor, and since the amplitude value of the beam under the air flow is originally small, it is not suitable for obtaining the amplitude by an acceleration measurement method. A non-contact measuring instrument 7 is used. If the non-contact amplitude measuring instrument adopting the optical method is adopted, the material of the air duct shell 3 needs to be a transparent material, and the shell wall needs to be as thin as possible, so that the measuring precision of the optical instrument is not influenced.

The non-contact amplitude measuring instrument 7 is arranged outside the air passage, is not fixed in position, and is arranged according to different amplitude measuring positions on the beam.

Although specific details of the invention are disclosed for purposes of illustration and in order to facilitate an understanding of the contents of the invention and its implementation, those skilled in the art will appreciate that: various substitutions, changes and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. It is intended that the invention not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims.