阅读说明：本技术 基于微波探测技术的半导体亚表面信息测试系统 (Semiconductor sub-surface information test system based on microwave detection technology ) 是由 唐军 温焕飞 刘俊 马宗敏 郭浩 李中豪 于 2021-06-24 设计创作，主要内容包括：本发明公开了一种基于微波探测技术的半导体亚表面信息测试系统,属于微波探测技术领域,为亚表面信息的无损检测提供了一种新的方法。本系统主要包含三个模块：样品检测模块、信号收发模块、控制模块。首先通过信号收发模块产生一设定频率的微波信号,并将该微波信号输入到样品检测模块当中,样品检测模块将该信号通过探针辐射向待测样品,由于微波具有穿透性,因此该微波信号可以穿过样品表面辐射入样品内部进行无损探测,最终的信号将重新回到信号收发模块中进行显示及分析,从而得出进一步的结论。本发明采用了微波探测手段实现了无损探测,并通过样品检测模块的分级步进实现了更大范围的探测。(The invention discloses a semiconductor sub-surface information testing system based on a microwave detection technology, belongs to the technical field of microwave detection, and provides a new method for nondestructive testing of sub-surface information. The system mainly comprises three modules: the device comprises a sample detection module, a signal transceiving module and a control module. Firstly, a microwave signal with a set frequency is generated through the signal transceiver module, the microwave signal is input into the sample detection module, the sample detection module radiates the signal to a sample to be detected through the probe, the microwave signal can penetrate through the surface of the sample to radiate into the sample for nondestructive detection due to the penetrability of the microwave, and finally the signal returns to the signal transceiver module again for displaying and analyzing, so that a further conclusion is obtained. The invention realizes nondestructive detection by adopting a microwave detection means, and realizes detection in a wider range by stepping the sample detection module in a grading way.)

1. Semiconductor subsurface information test system based on microwave detection technique, its characterized in that: the device comprises a signal transceiving module (1) for providing a detection signal with set frequency, acquiring a final echo signal and analyzing and processing the echo signal; the sample detection module is connected with the signal transceiving module to acquire a detection signal, radiates the signal into a sample, detects each area of the sample through the movement of the sample detection platform, and returns an echo signal to the signal transceiving module; the control module (2) is connected with the signal transceiver module and the sample detection module, controls the microwave signals emitted by the signal transceiver module, and displays the signals obtained by analyzing and processing the signals on the control module in an image form; and for the sample detection module, the movement of the sample detection table is controlled, and the measurement in different ranges is realized.

2. The semiconductor sub-surface information test system based on microwave detection technology according to claim 1, characterized in that: the signal transceiving module (1) comprises a microwave signal source and a signal spectrum analyzer.

3. The semiconductor sub-surface information test system based on microwave detection technology according to claim 1, characterized in that: the sample detection module is a three-dimensional electric control displacement platform and comprises a sample detection platform and a microwave probe (3), wherein a microwave transmission line is arranged in the microwave probe (3) and is connected with the signal transceiving module (1) to radiate microwave signals into a sample through the probe for detection; the sample detection platform is connected with the control module, and can realize step stepping in a grading way.

4. The semiconductor sub-surface information test system based on microwave detection technology according to claim 3, characterized in that; the sample detection platform comprises a piezoelectric ceramic tube (5), a protective shell (6), a platform (7), a microspur screw (8), a stepping motor (9), a voltage controller (11), an x-direction displacement screw (12), an x-direction displacement motor (13), an x-direction displacement layer (14), a y-direction displacement layer (15), a y-direction displacement motor (16), a y-direction displacement screw (17) and a displacement layer protective shell (18); the protective shell (6) is fixed with the platform (7), and the protective shell (6) is communicated with the platform (7) through a through hole; the piezoelectric ceramic tube (5) is positioned in the protective shell (6), a vertical groove is formed in the tube body of the piezoelectric ceramic tube (5), a convex strip matched with the groove is arranged on the inner wall of the protective shell (6), the microspur screw (8) is connected with the piezoelectric ceramic tube (5) in a threaded nested manner, the lower end of the microspur screw (8) is connected with the stepping motor (9) through a rotating shaft, the stepping motor (9) is fixed in the protective shell (6), the voltage controller (11) is positioned in the platform (7), the voltage controller (11) is connected with the piezoelectric ceramic tube (5), the platform (7) is placed on the x-direction displacement layer (14), the x-direction displacement motor (13) is fixedly connected with the y-direction displacement layer (15) through a support, the x-direction displacement screw (12) is connected with the x-direction displacement motor (13) through the rotating shaft in a penetrating manner, and the x-direction displacement screw penetrates through the x-direction displacement layer (14) through a through hole, x direction displacement layer (14) are connected through the slide groove that is located on y direction displacement layer (15) with y direction displacement layer (15), there is the draw runner that matches with the slide groove x direction displacement layer below, y direction displacement motor (16) are fixed in platform protective housing (18) wall, and be connected with y direction displacement screw rod (17) through the rotation axis, y direction displacement screw rod (17) run through y direction displacement layer (15) through a through-hole, x direction displacement layer (14) are located displacement layer protective housing (18) with y direction displacement layer (15), y direction displacement layer (15) hang in displacement layer protective housing (18), control module (2) and step motor (9), voltage controller (11), x direction displacement motor (13), y direction displacement motor (16) are connected.

5. The semiconductor sub-surface information test system based on microwave detection technology as claimed in claim 4, wherein: a shock insulation platform (10) integrally connected with the displacement layer protective shell (18) is arranged below the displacement layer protective shell.

6. The semiconductor sub-surface information test system based on the microwave detection technology according to claim 4 or 5, characterized in that: the grooves on the piezoelectric ceramic tube (5) are arranged on the tube body in a bilateral symmetry mode, and the raised lines on the inner wall of the protective shell (6) are also arranged in a bilateral symmetry mode.

Technical Field

The invention relates to the technical field of microwave testing, in particular to a semiconductor subsurface information testing system based on a microwave detection technology.

Background

In recent years, with the progress of science and technology, particularly the development of 5G technology, various information industries have been developed greatly, and semiconductors, as the "heart" of the information industry, are becoming more important in the advancement of the information industry. Under such circumstances, the demand for a semiconductor material testing method is more urgent. The main problems of the previous test methods are as follows: in some cases, the surface of the sample is damaged to a certain extent during detection, so that certain cost waste is generated; because the measurement range of the semiconductor device is usually in the micrometer or even nanometer order, the measurement in a larger range is easy to realize. These problems put higher demands on the test method.

The microwave refers to electromagnetic wave with frequency between 300MHz and 300GHz and corresponding wavelength range between 1m and 1mm, and is mainly characterized by its photophobia, penetrability and nonionizability. The pseudogloss means that it is more propagated and concentrated like light than radio waves with lower frequencies; penetrability means that it is easier to penetrate into a substance when irradiating a medium than infrared rays; non-ionicity means that its quantum energy is not large enough to change its kinetic state when interacting with a substance, but not enough to change the internal structure of the substance molecules or the intermolecular bonds. At present, microwaves are widely applied to various fields, such as microwave communication, radar navigation, microwave heating, microwave measurement, microwave remote sensing and the like.

Disclosure of Invention

The invention aims to solve the problems of sample damage and small measurement range of a test method in the background art, and provides a semiconductor sub-surface information test system based on a microwave detection technology, which can perform nondestructive detection in a large range and with high precision.

In order to achieve the purpose, the invention adopts a technical scheme that: the semiconductor sub-surface information test system based on the microwave detection technology comprises:

the signal transceiver module is used for providing a detection signal with set frequency, acquiring a final echo signal and analyzing and processing the echo signal according to relevant logic;

the sample detection module is connected with the signal transceiving module to acquire a detection signal, radiates the signal into a sample, detects each area of the sample through the movement of the sample detection platform, and returns an echo signal to the signal transceiving module;

and the control module is connected with the signal receiving and transmitting module and the sample detection module. For the signal transceiver module, controlling the frequency of the microwave signal sent by the signal transceiver module, and displaying the signal obtained by analyzing and processing the signal on the control module according to the situation of the image; and for the sample detection module, the movement of the sample detection table is controlled, and the measurement in different ranges is realized.

Specifically, the signal transceiver module comprises two functions, namely a microwave signal source and a signal spectrum analyzer.

The microwave detection module is a three-dimensional electric control displacement platform and comprises a sample detection platform and a microwave probe, wherein a microwave transmission line is arranged in the microwave probe and is connected with the signal transceiving module, and the microwave signal is radiated into a sample through the probe to be detected; the sample detection platform is connected with the control module, and can realize step stepping in a grading way. The microwave signals generated by the signal transceiving module are transmitted through a microwave circuit in the microwave probe, so that the transmission loss of the microwave signals is reduced; the sample detection module realizes wider detection range on the basis of keeping detection precision through grading movement.

Specifically, the sample detection platform comprises a piezoelectric ceramic tube, a protective shell, a platform, a micro-pitch screw, a stepping motor and a voltage controller; the protective shell is fixed with the platform and is communicated with the platform through a through hole; the piezoelectric ceramic tube is positioned in the protective shell, a vertical groove is arranged on the tube body of the piezoelectric ceramic tube, a convex strip matched with the groove is arranged on the inner wall of the protective shell, a microspur screw rod is connected with the piezoelectric ceramic tube in a nested manner through threads, the lower end of the microspur screw rod is connected with a stepping motor through a rotating shaft, the stepping motor is fixed in the protective shell, a voltage controller is positioned in a platform, the voltage controller is connected with the piezoelectric ceramic tube, the platform is placed on an x-direction displacement layer, an x-direction displacement motor is fixedly connected with a y-direction displacement layer through a support, the x-direction displacement screw rod is connected with the x-direction displacement motor through the rotating shaft in a penetrating manner, the x-direction displacement screw rod penetrates through the x-direction displacement layer through a through hole, the x-direction displacement layer is connected with the y-direction displacement layer through a slide groove positioned on the y-direction displacement layer, and a slide strip matched with the slide groove is arranged below the x-direction displacement layer, y direction displacement motor is fixed in the platform protective housing wall, and is connected with y direction displacement screw rod through the rotation axis, and y direction displacement screw rod runs through y direction displacement layer through a through-hole, and x direction displacement layer and y direction displacement layer are located displacement layer protective housing, and y direction displacement layer hangs in displacement layer protective housing, and control module and step motor, voltage controller, x direction displacement motor, y direction displacement motor are connected.

During detection of the tool, a detection sample is placed on a piezoelectric ceramic tube of a sample detection table, a control module controls a sample detection module to carry out step stepping, and firstly, the control module controls a displacement motor to drive a displacement screw to carry out large-amplitude step stepping in the x direction and the y direction; after the detection range is approximately determined, the micro-pitch screw is controlled to rotate through the stepping motor to drive the piezoelectric ceramic tube to vertically upwards realize vertical stepping, so that the sample is close to the microwave probe; after the signal is detected, scanning is started, and the control module controls the voltage applied to the piezoelectric ceramic tube by the voltage controller in the scanning process so as to realize small-step stepping; in the detection process, a set microwave signal is output through the signal transceiver module and loaded on the probe through the coaxial cable, the microwave signal is radiated into a detection sample through the probe, a detection signal returns to the coaxial cable through the probe and finally returns to the signal transceiver module, and after processing, a related image is displayed on the control module. The step stepping of the sample detection module is realized by the large step stepping of the platform, the vertical step stepping of the stepping motor and the small step stepping of the piezoelectric ceramic tube.

Specifically, a shock insulation platform integrally connected with the displacement layer protection shell is arranged below the displacement layer protection shell.

In the semiconductor subsurface information testing system based on the microwave detection technology, the grooves in the piezoelectric ceramic tube are arranged on the tube body in a bilateral symmetry mode, and the raised lines on the inner wall of the protective shell are also arranged in a bilateral symmetry mode.

Compared with the prior method, the invention has the advantages in the aspect of semiconductor subsurface information detection that: the semiconductor sub-surface information is detected by means of microwave detection, so that the surface of the sample is not damaged, and nondestructive detection is realized; by the step-by-step of the sample detection table, measurement in a larger range is realized on the premise of ensuring high precision.

Drawings

FIG. 1 is a schematic block diagram of the system of the present invention.

Fig. 2 is a schematic structural diagram of the present invention.

FIG. 3 is a schematic cross-sectional view of a sample testing station in the system of the present invention.

FIG. 4 is a side sectional view of the displacement platform

Fig. 5 is a schematic view of a piezoelectric ceramic tube.

Fig. 6 is a top view of the protective housing.

In the figure: 1. a signal transceiving module; 2. a control module; 3. a probe; 4. detecting a sample; 5. a piezoelectric ceramic tube; 6. a protective housing; 7. a platform; 8. a fine pitch screw; 9. a stepping motor; 10. a seismic isolation platform; 11. a voltage controller; 12. a screw rod is displaced in the x direction; 13. an x-direction displacement motor; 14. an x-direction displacement layer; 15. a y-direction displacement layer; 16. a y-direction displacement motor; 17. a y-direction displacement screw; 18. displacement layer protective housing.

Detailed Description

The method of the present invention will be further explained in detail with reference to the drawings attached hereto. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

As shown in fig. 1, a semiconductor sub-surface information testing system based on microwave detection technology includes a signal transceiver module 1, a sample detection module, and a control module 2. Referring to fig. 2, the signal transceiver module 1 is a signal processing device for generating microwave signals and processing detected signals; the control module 2 is a computer, the computer can control the output microwave signal and display the obtained detection signal, and the computer can control the sample detection module to realize grading stepping.

The sample detection module comprises a probe 3 and a sample detection table; the structural schematic diagram of the sample detection platform is shown in fig. 3, and the sample detection platform comprises a piezoelectric ceramic tube 5, a protective shell 6, a platform 7, a microspur screw 8, a stepping motor 9, a vibration isolation platform 10, a voltage controller 11, an x-direction displacement screw 12, an x-direction displacement motor 13, an x-direction displacement layer 14, a y-direction displacement layer 15, a y-direction displacement motor 16, a y-direction displacement screw 17 and a displacement layer protective shell 18.

During detection of a sample, a detection sample 4 is placed on a piezoelectric ceramic tube 5 of a sample detection table, a control module 2 controls a sample detection module to carry out step stepping in a grading manner, and firstly, displacement motors 13 and 16 are controlled by the control module 2 to drive displacement screws 12 and 17 to carry out large-amplitude step stepping in the x direction and the y direction; after the detection range is approximately determined, the micro-pitch screw 8 is controlled to rotate through the stepping motor 9 to drive the piezoelectric ceramic tube 5 to vertically upwards realize vertical stepping, so that the detection sample 4 approaches the microwave probe 3; after the signal is detected, scanning is started, and the control module 2 controls the voltage applied to the piezoelectric ceramic tube 5 by the voltage controller 11 in the scanning process so as to realize small-step stepping; in the detection process, a set microwave signal is output through the signal transceiver module 1 and is loaded on the probe 3 through the coaxial cable, the microwave signal is radiated into the detection sample 4 through the probe 3, the detection signal returns to the coaxial cable through the probe 3 and finally returns to the signal transceiver module 1, and after being processed, a relevant image is displayed on the control module 2. The step stepping of the sample detection module is realized by the large step stepping of a large sample table (platform 7), the vertical step stepping of a stepping motor and the small step stepping of a small sample table (piezoelectric ceramic tube 5).

The grading of the sample detection table is stepped as follows: the x-direction displacement motor 13 and the y-direction displacement motor 16 are controlled to drive the x-direction displacement screw 12 and the y-direction displacement screw 17 to rotate, so that the x-direction displacement layer 14 and the y-direction displacement layer 15 are driven to transversely and longitudinally move, a target range area of a sample to be detected is moved to the position below the probe 3, and primary stepping is realized; the control module 2 controls the micro-pitch screw 8 to rotate through the stepping motor 9 so as to push the piezoelectric ceramic tube to enable the sample to approach the probe 3 to realize secondary stepping; the voltage controller 11 controls the load voltage on the piezoelectric ceramic tube 5 in the detection process, so that the piezoelectric ceramic tube swings slightly, and three-stage stepping is realized. And repeating the grading stepping after the target area is detected until all the target areas are detected.

The above description is only exemplary of the present invention and should not be taken as limiting the invention, and any modification, replacement, or improvement made within the spirit of the present invention should be considered as the protection scope of the present patent.