阅读说明：本技术 气体测量装置及其气体测量方法 (Gas measuring device and gas measuring method thereof ) 是由 郑庆焕 于 2019-05-24 设计创作，主要内容包括：本发明涉及一种用于测量气体流量或质量的装置,以及一种用于测量气体流量或质量的方法。根据本发明的气体测量装置可包括：能够测量多种气体中每种气体的流量的分析器；能够以恒定的预定的流量将基准气体注入分析器的第一注射器；用于将待分析气体注入分析器的第二注射器；以及计算单元,用于使用以下公式补偿由分析器测量的待分析气体的流量,并推导出待分析气体的实际流量。[待分析气体的实际流量]＝[由分析器测量的待分析气体的流量]/[由分析器测量的基准气体的流量]×[第一注射器中的预定的流量]。(The present invention relates to an apparatus for measuring gas flow or mass, and a method for measuring gas flow or mass. The gas measuring device according to the present invention may include: an analyzer capable of measuring a flow rate of each of a plurality of gases; a first injector capable of injecting a reference gas into the analyzer at a constant predetermined flow rate; a second injector for injecting a gas to be analyzed into the analyzer; and a calculation unit for compensating for the flow rate of the gas to be analyzed measured by the analyzer using the following formula and deriving an actual flow rate of the gas to be analyzed. [ actual flow rate of gas to be analyzed ]/[ flow rate of reference gas measured by analyzer ] × [ predetermined flow rate in first syringe ].)

1. A gas measurement device comprising:

an analyzer that measures flow rates of a plurality of gases;

a first injector that constantly injects a reference gas into the analyzer at a predetermined flow rate;

a second injector that injects a sample gas to be analyzed into the analyzer simultaneously with the first injector injecting the reference gas into the analyzer; and

an arithmetic operation unit that calibrates a sample gas flow rate measured by the analyzer by using the following equation, thereby deriving an actual flow rate of the sample gas:

[ actual flow rate of sample gas ]/[ reference gas flow rate measured by analyzer ] × [ predetermined flow rate of first syringe ].

2. The gas measurement device according to claim 1, further comprising a calculation unit that derives an average flow rate of the reference gas flow rate measured by the analyzer within a predetermined time after the first injector injects the reference gas into the analyzer, wherein the arithmetic operation unit derives the actual flow rate of the sample gas using the following equation:

[ actual flow rate of sample gas ]/[ reference gas flow rate measured by analyzer ] × [ initial average flow rate of reference gas flow rate derived by the calculation unit ].

3. The gas measurement device according to claim 1 or 2, wherein the reference gas is an inert gas.

4. The gas measurement device of claim 1 or 2, wherein the analyzer, the first injector, and the second injector are thermally isolated from the outside.

5. The gas measurement device of claim 1 or 2, wherein the first injector comprises a plurality of air leak valves connected in series with one another.

6. A gas measurement device according to claim 1 or 2, wherein the first injector comprises a gas leak valve and a capillary tube mounted at the rear end of the gas leak valve.

7. A gas measurement method comprising the steps of:

(1) constantly injecting a reference gas into the analyzer at a predetermined flow rate;

(2) injecting a sample gas to be analyzed into the analyzer simultaneously with the step (1);

(3) measuring a flow rate of the reference gas and a flow rate of the sample gas injected into the analyzer, respectively; and

(4) deriving an actual flow rate of the sample gas by calibrating the sample gas flow rate measured in step (3) using the following equation:

[ actual flow rate of sample gas ]/[ reference gas flow rate measured in step (3) ] × [ predetermined flow rate of step (1) ].

8. The gas measurement method of claim 7, further comprising the steps of:

(A) measuring a baseline gas flow rate of the analyzer for a predetermined time after step (1); and

(B) deriving an average flow of the reference gas flow measured in step (a), wherein step (4) comprises deriving the actual flow of the sample gas using the equation:

[ actual flow rate of sample gas ]/[ flow rate of reference gas measured in step (3) ] × [ initial average flow rate of reference gas flow rate derived in step (B) ].

9. The gas measurement method according to claim 7 or 8, wherein the reference gas is an inert gas.

Technical Field

The present invention relates to an apparatus for measuring gas and a method thereof, and more particularly, to an apparatus for measuring flow rate or mass of gas and a method thereof.

Background

Various devices for analyzing the composition and content of gases are known. As the operating time of these devices increases, their sensitivity may decrease due to degradation of the associated components, causing the gas concentration to be analyzed incorrectly.

To overcome this drawback, it has been proposed to adjust the measured value to a desired value by multiplying by a uniform arbitrary constant. However, this approach is based on the assumption that: the proposed analysis device does not deteriorate during the analysis. Therefore, in the case where the device is used for a long period of time, it may be difficult to appropriately cope with and compensate for the deterioration occurring between the initial stage and the final stage of the operation thereof.

Disclosure of Invention

Technical problem

Embodiments of the present invention provide a gas measuring apparatus and a method thereof, which can accurately and easily obtain an actual flow rate (or mass) of a sample gas (sample gas) to be analyzed.

Means for solving the problems

According to an aspect of the present invention, there is provided a gas measuring apparatus including an analyzer measuring flow rates of a plurality of gases, a first injector constantly injecting a reference gas (reference gas) into the analyzer at a predetermined flow rate, a second injector injecting a sample gas to be analyzed into the analyzer, and an arithmetic operation unit deriving an actual flow rate of the sample gas by calibrating a flow rate of the sample gas measured by the analyzer using the following equation:

[ actual flow rate of sample gas ]/[ reference gas flow rate measured by analyzer ] × [ predetermined flow rate of first syringe ].

The gas measuring apparatus may further include a calculation unit that derives an average flow rate of the reference gas measured by the analyzer within a predetermined time after the first injector injects the reference gas into the analyzer, wherein the arithmetic operation unit derives the actual flow rate of the sample gas using the following equation:

[ actual flow rate of sample gas ]/[ reference gas flow rate measured by analyzer ] × [ initial average flow rate of reference gas flow rate derived by the calculation unit ].

Further, the reference gas may be an inert gas.

Further, the analyzer, the first injector, and the second injector may be thermally insulated from the outside.

In addition, the first syringe may include a plurality of leak valves (or called leak valves) connected in series with each other.

In addition, the first syringe may include an air leak valve and a capillary tube installed at a rear end of the air leak valve.

According to another aspect of the present invention, there is provided a gas measuring method including the steps of: (1) constantly injecting a reference gas into the analyzer at a predetermined flow rate, (2) injecting a sample gas to be analyzed into the analyzer, (3) measuring the flow rate of the reference gas and the flow rate of the sample gas injected into the analyzer, respectively, and (4) deriving an actual flow rate of the sample gas by calibrating the flow rate of the sample gas measured in step (3) using the following equation:

[ actual flow rate of sample gas ]/[ reference gas flow rate measured in step (3) ] × [ predetermined flow rate of step (1) ].

In addition, the gas measuring method may further include the steps of: (A) measuring the flow rate of the reference gas of the analyzer for a predetermined time after step (1), and (B) deriving the average flow rate of the reference gas flow rate measured in step (a), wherein step (4) comprises deriving the actual flow rate of the sample gas using the equation:

[ actual flow rate of sample gas ]/[ flow rate of reference gas measured in step (3) ] × [ initial average flow rate of reference gas flow rate derived in step (B) ].

Further, the reference gas may be an inert gas.

Effects of the invention

As described above, in the gas measuring apparatus and method according to the present invention, the reference gas and the sample gas to be analyzed are injected to measure their flow rates (or masses), and the reference gas is constantly injected into the analyzer at a predetermined flow rate (or mass). Then, a difference between the actual reference gas flow rate (or mass) and the reference gas flow rate (or mass) measured by the analyzer is detected, and the sample gas flow rate (or mass) measured by the analyzer is calibrated according to the detected difference, thereby obtaining the actual flow rate of the sample gas.

Here, since the average flow rate of the reference gas measured by the analyzer within a predetermined time after the reference gas is injected into the analyzer is adopted as the actual flow rate (or mass) of the reference gas, any case where an error occurs in the quantitative injector for injecting the reference gas is appropriately dealt with, and the actual flow rate (or mass) of the sample gas is finally obtained more accurately.

Drawings

FIG. 1 is a schematic view of a gas measurement device according to one embodiment of the present invention.

FIG. 2 is a flow chart of a gas measurement method according to one embodiment of the invention.

Fig. 3 is a graph illustrating a reference gas flow rate measured by an analyzer of a gas measurement device according to an embodiment of the present invention.

Fig. 4 is a graph illustrating a sample gas flow rate measured by an analyzer of a gas measurement device according to an embodiment of the present invention.

Fig. 5 is a graph illustrating an actual sample gas flow rate measured by an arithmetic operation unit of the gas measuring apparatus according to one embodiment of the present invention.

FIG. 6 is a schematic view of a gas measurement device according to another embodiment of the invention.

FIG. 7 is a flow chart of a gas measurement method according to another embodiment of the invention.

Detailed Description

Hereinafter, with reference to the drawings, the gas measurement apparatuses 10 and 20 and the gas measurement method according to the embodiments of the present invention will now be described in detail.

FIG. 1 is a schematic view of a gas measurement device 10 according to one embodiment of the present invention.

Referring to fig. 1, the gas measuring device 10 includes a first injector 11, a second injector 12, an analyzer 13, and an arithmetic operation unit 14.

The first injector 11 is connected to the analyzer 13, and injects the reference gas into the analyzer 13. Here, the reference gas is a gas that hardly reacts with the sample gas to be analyzed, i.e., the analysis target gas, and may be an inert gas such as helium, argon, or the like. However, the kind of such reference gas may vary according to the characteristics of the individual sample gas and is not particularly limited.

The first injector 11 may comprise a leak valve. Therefore, the leak valve is appropriately changed in response to the pressure of the analyzer 13, in other words, the pressure difference between the opposite ends of the leak valve, thereby constantly maintaining the flow rate of the reference gas at the normal pressure. For example, in the case where the reference gas is injected at normal pressure, if the flow rate of the reference gas increases, the pressure of the analyzer 13 may increase, so that the pressure difference between the opposite ends of the air leak valve decreases. In this case, the air leak valve may operate to reduce the opening area, thereby controlling the reference gas flow rate to be reduced. Conversely, if the reference gas flow rate is decreased, the pressure of the analyzer 13 is decreased, so that the pressure difference between the opposite ends of the air leak valve is increased.

Thus, the air leak valve can operate to increase the opening area to control the increase in the baseline gas flow. That is, the air leak valve is suitably variably operable such that its opening area is decreased if the reference gas flow rate is increased beyond a predetermined flow rate, and its opening area is increased if the reference gas flow rate is decreased below the predetermined flow rate, thereby constantly maintaining the flow rate of the reference gas at normal pressure.

In addition, the first injector 11 may include a plurality of air leakage valves connected in series with each other. Accordingly, the reference gas flow rate may be adjusted in multiple steps to more constantly maintain the flow rate of the atmospheric reference gas.

In addition, the first syringe 11 may further include a capillary tube installed at the rear end of the air leakage valve. As mentioned above, the reference gas flow may be controlled primarily by the blow-by valve and finally further by the capillary tube.

The second syringe 12 is connected to the analyzer 13, and injects the sample gas into the analyzer 13.

The analyzer 13 may include, for example, an Electron Multiplier Tube (EMT), and may measure the flow rates of the reference gas injected by the first injector 11 and the sample gas injected by the second injector 12 by fractionating the reference gas and the sample gas. However, since the specific configuration of the analyzer 13 is the same as known in the art, a detailed description thereof will not be given.

The first syringe 11, the second syringe 12 and the analyzer 13 are thermally insulated from the outside so as to constantly maintain the temperature thereof.

Meanwhile, if the analyzer 13 is operated for a long time, for example, more than about 3 to 4 hours, the gas flow rate measured by the analyzer 13 may be lower than the actual flow rate due to degradation of various components related to the analyzer 13.

The arithmetic operation unit 14 calibrates the sample gas flow rate using the reference gas flow rate and the sample gas flow rate measured by the analyzer 13. A method for calibrating the sample gas flow will now be described.

For better understanding, the overall gas measurement method will be described first in turn.

FIG. 2 is a flow chart of a gas measurement method according to one embodiment of the invention.

Referring to fig. 2, first, the first injector 11 constantly injects the reference gas into the analyzer 13 at a predetermined flow rate (S11).

Further, the second syringe 12 injects the sample gas to be analyzed into the analyzer 13 (S12).

Here, the first injector 11 first injects the reference gas and then the second injector 12 injects the sample gas, but this is not necessarily so. In contrast, the first and second injectors 11 and 12 may simultaneously inject the reference gas and the sample gas, respectively.

Next, the analyzer 13 measures the flow rate of the reference gas injected by the first injector 11 and the flow rate of the sample gas injected by the second injector 12, respectively (S13).

Here, since the reference gas is injected using the first injector 11, i.e., the quantitative injector, the flow rate of the reference gas measured by the analyzer 13 should be theoretically recorded as a constant level. However, as described above, due to the degradation of the analyzer 13, the reference gas flow rate may be recorded as a value that gradually decreases with the passage of time as shown in fig. 3.

In this case, the sample gas flow rate measured by the analyzer 13 may be recorded as shown in fig. 4, which indicates that the measured sample gas flow rate is recorded lower than the actual flow rate over time.

The arithmetic operation unit 14 derives the actual flow rate of the sample gas by calibrating the sample gas flow rate measured by the analyzer 13 using the following equation (1) (S14):

reference gas flow rate measured by the analyzer 13 ]: [ sample gas flow rate measured by the analyzer 13 ] ═ actual flow rate of reference gas ]: [ actual flow of sample gas ] equation (1)

Wherein, since the actual flow rate of the reference gas is the predetermined flow rate of the first injector 11, the equation finally used to derive the actual flow rate of the sample gas is as follows:

equation (2) of [ actual flow rate of sample gas ]/[ flow rate of sample gas measured by analyzer 13 ]/[ flow rate of reference gas measured by analyzer 13 ] × [ predetermined flow rate of first syringe 11 ]

The actual flow rate of the sample gas recorded may be as shown in fig. 5.

Therefore, the flow rate of the sample gas measured by the analyzer 13 is calibrated based on the difference, thereby obtaining the actual flow rate of the sample gas.

FIG. 6 is a schematic view of a gas measurement device 20 according to another embodiment of the present invention.

Referring to fig. 6, the gas measuring device 20 includes a first injector 21, a second injector 22, an analyzer 23, a calculation unit 24, and an arithmetic operation unit 25.

Here, the first injector 21, the second injector 22 and the analyzer 23 are substantially the same as the first injector 11, the second injector 12 and the analyzer 13 of the gas measuring device 10 according to one embodiment of the present invention, which has been described above with reference to fig. 1. However, the difference between the gas measurement device 10 according to one embodiment of the present invention and the gas measurement device 20 according to another embodiment of the present invention, which will be described later, if any, can be expected to be naturally modified by those skilled in the art, and thus redundant description thereof will not be given.

The calculation unit 24 may obtain the average flow rate of the reference gas flow rate measured by the analyzer 23 within a predetermined time after the first injector 21 injects the reference gas into the analyzer 23 and then starts measuring the reference gas flow rate. Here, the predetermined time may be a time in which the analyzer 23 is not deteriorated after starting operation, for example, 1 hour. However, the time may vary depending on the design or use conditions of the analyzer 23, and is not particularly limited.

The arithmetic operation unit 25 calibrates the sample gas flow rate using the flow rates of the reference gas and the sample gas measured by the analyzer 23 and the initial average flow rate of the reference gas flow rate derived by the calculation unit 24. A method of calibrating the flow of sample gas will now be described.

FIG. 7 is a flow chart of a gas measurement method according to another embodiment of the invention.

Referring to fig. 7, first, the first injector 21 constantly injects the reference gas into the analyzer 23 at a predetermined flow rate (S21).

Then, the analyzer 23 measures the flow rate of the reference gas injected by the first injector 21 (S22).

Here, the calculation unit 24 derives an average flow rate of the reference gas flow rate measured by the analyzer 23 within a predetermined time after the first injector 21 starts injecting the reference gas, that is, an initial average flow rate of the reference gas flow rate (S23).

Next, the second injector 22 injects the sample gas into the analyzer 23 (S24).

Then, the analyzer 23 measures the flow rate of the reference gas injected by the first injector 21 and the flow rate of the sample gas injected by the second injector 22, respectively (S25).

The arithmetic operation unit 25 derives the actual flow rate of the sample gas by calibrating the sample gas flow rate measured by the analyzer 23 using the following equation (3) (S26):

reference gas flow rate measured by the analyzer 23 ]: [ sample gas flow rate measured by the analyzer 23 ] ═ actual flow rate of reference gas ]: [ actual flow rate of sample gas ] equation (3)

Wherein the actual flow of the reference gas is taken as the initial average flow of the reference gas flow derived by the calculation unit 24. Thus, the equation ultimately used to derive the actual flow of sample gas is as follows:

[ actual flow rate of sample gas ]/[ flow rate of sample gas measured by the analyzer 23 ]/[ flow rate of reference gas measured by the analyzer 23 ] × [ initial average flow rate of reference gas flow rate derived by the calculation unit 24 ] < equation (4)

With this configuration, in the case where there is a difference between the predetermined flow rate of the first injector 21 and the actual flow rate of the reference gas injected by the first injector 21 due to an error occurring on the first injector 21, appropriate measures can be taken to cope with such a problem. Therefore, the actual flow rate of the sample gas can be obtained more accurately.

Although it has been described in the above-described embodiment that the reference gas is injected by the first injector 21, the initial average flow rate of the reference gas is first derived by the calculation unit 24, and then the sample gas is injected by the second injector 22, the reference gas and the sample gas may be simultaneously injected by the first injector 21 and the second injector 22, respectively.

In this case, the flow rate of the sample gas measured by the analyzer 23 during a predetermined time after the reference gas and the sample gas are simultaneously injected by the first injector 21 and the second injector 22, respectively, is regarded as the actual flow rate of the sample gas because the analyzer 23 does not deteriorate during a predetermined time after the start of operation.

At the same time, the calculation unit 24 derives an initial average flow of the reference gas flow. After a predetermined time, as described above, the flow rate derived by the arithmetic operation unit 25 is regarded as the actual flow rate of the sample gas.

The above-described embodiments of the invention do not limit the spirit and concepts of the invention, the scope of which is defined by the appended claims. Also, the concept of the present invention will be modified or changed in various ways by those skilled in the art. For example, while the present invention has been shown and described with respect to gas flow measurement devices and methods in the above embodiments, gas mass measurement devices and methods may be readily implemented by those skilled in the art in light of the gas flow measurement devices and methods shown and described herein. Modifications or variations of the inventive concept, as would be apparent to a skilled addressee, are deemed to be within the scope and spirit of the present invention.