阅读说明：本技术 用单晶材料制造钟表发条的方法及通过该方法获得的钟表发条 (Method for manufacturing a timepiece spring from a single crystal material and timepiece spring obtained by this method ) 是由 让-吕克·布卡耶 于 2020-09-08 设计创作，主要内容包括：本发明提供了一种由单晶材料制造钟表发条(1,2)的方法,包括以下步骤：绘制发条(1,2)；确定发条(1,2)的一个或多个薄弱区域(4),一个或多个薄弱区域或一个或多个薄弱区域中的至少一个薄弱区域(4),发条(1、2)在过度变形的情况下会断裂；用在确定平面内延伸的单晶材料晶片制造发条(1,2),同时在晶片中对发条(1,2)进行定向,使得当发条(1,2)变形时,薄弱区域(4)或每个薄弱区域中的宏观应力的方向(D)基本上平行于材料的、与确定平面相交的解理面。本发明还提供了一种通过这种方法获得的钟表发条(1,2)。(The invention provides a method for manufacturing a timepiece spring (1, 2) from a single crystal material, comprising the steps of: drawing a clockwork spring (1, 2); determining one or more weakened areas (4) of the spring (1, 2), at least one weakened area (4) of the one or more weakened areas or of the one or more weakened areas, the spring (1, 2) being intended to break in the event of excessive deformation; a balance spring (1, 2) is manufactured from a wafer of monocrystalline material extending in a defined plane, with the balance spring (1, 2) being oriented in the wafer such that when the balance spring (1, 2) is deformed, the direction (D) of the macroscopic stress in the or each region of weakness (4) is substantially parallel to a cleavage plane of the material intersecting the defined plane. The invention also provides a timepiece spring (1, 2) obtained by such a method.)

1. A method of manufacturing a timepiece spring from a single crystal material, comprising the steps of:

a) drawing a clockwork spring (1, 2),

b) determining one or more weakened areas (4) of the spring (1, 2), at least one of said weakened areas (4) or weakened areas (4), said spring (1, 2) being breakable in the event of excessive deformation,

c) is produced by a single crystal material (5; 8; 11) the spring (1, 2) is manufactured while the wafer (5; 8; 11) in such a way that the spring (1, 2) is oriented: when the spring (1, 2) is deformed, the direction (D) of the macroscopic stress in the or each weakened area (4) is substantially parallel to a cleavage plane of the material intersecting the determined plane (P).

2. A method according to claim 1 wherein step b) includes the step of calculating the macroscopic stress to which the balance spring is subjected when it is deformed.

3. Method according to claim 1 or 2, characterized in that between step b) and step c) the following steps are included:

(i) selecting the orientation of the balance spring in a wafer of monocrystalline material such that when the balance spring (1, 2) is deformed, the direction (D) of the macroscopic stress in the or each weakened area (4) is substantially parallel to a cleavage plane of the material intersecting the determined plane (P),

(ii) modifying the balance spring based on elastic properties of the single crystal material, taking into account the anisotropy of the material and the selection of the balance spring orientation in the wafer.

4. A method according to any one of claims 1 to 3, wherein said weakened area or areas (4) are located in a portion of the spring (1, 2) which is subjected to tension when the spring (1, 2) is deformed.

5. A method according to any one of claims 1 to 4, characterized in that said spring (1, 2) comprises only one said weakened area (4).

6. A method according to any one of claims 1 to 5, wherein the single crystal material is silicon, diamond, alumina or silicon carbide.

7. Method according to any one of claims 1 to 6, wherein said timepiece spring is a rocker spring, a hammer spring, a lever spring, a detent lever, a flexible guide or an elastic part of a timepiece component for mounting the timepiece component on a support member.

8. A method according to any one of claims 1 to 7, including an additional processing step for increasing the mechanical strength of the balance spring, such as the step of forming a reinforcing layer on the balance spring.

9. A timepiece spring (1, 2) made of a single crystal material, which is elastically deformable in a determined plane and comprises one or more weakened areas (4), at least one of said one or more weakened areas (4) or said one or more weakened areas (4), said spring (1, 2) breaking in the event of excessive deformation, characterized in that, when said spring (1, 2) is deformed, the direction (D) of the macroscopic stress in the or each weakened area (4) is substantially parallel to a cleavage plane of the material intersecting said determined plane.

10. A timepiece spring according to claim 9, wherein the weakened area or areas (4) are located in a portion of the spring (1, 2) which is subjected to tensile force when the spring (1, 2) is deformed.

11. A timepiece spring according to claim 9 or 10, wherein the spring (1, 2) comprises only one said weakened area (4).

12. A timepiece spring according to any one of claims 9 to 11, wherein the single crystal material is silicon, diamond, alumina or silicon carbide.

13. A timepiece spring according to any one of claims 9 to 12, being a rocker spring, a hammer spring, a lever spring, a detent lever, a flexible guide or an elastic part of a timepiece component for mounting the timepiece component on a support member.

14. A timepiece spring according to any one of claims 9 to 13, wherein a reinforcing layer is applied to the spring.

15. A timepiece movement including a timepiece spring (1, 2) according to any one of claims 9 to 14.

16. Timepiece, in particular watch or pocket watch, comprising a timepiece spring (1, 2) according to any one of claims 9 to 14 or a timepiece movement according to claim 15.

Technical Field

The invention relates to a timepiece spring made of monocrystalline material, in particular monocrystalline silicon. It also relates to a method for manufacturing such a timepiece spring. The term "clock spring" refers to any elastically deformable element for receiving energy and/or generating a force or motion.

Background

Single crystal silicon is a very popular material in the mechanical surfacing industry because of its superior properties, particularly its low density, high corrosion resistance, non-magnetic properties, and ability to be processed by micromachining techniques. It is used to make balance springs, balances, flexible guided oscillators, escapement anchors and escape wheels.

However, this material has the disadvantage of low mechanical strength. It does not undergo pre-plastic deformation (prior plastic deformation) under the action of external force and is easy to break.

To alleviate this drawback, silicon oxide coatings are often employed to reinforce silicon, as proposed in patent application WO 2007/000271.

In the case of a clockwork spring, in addition to the impacts or accelerations to which it may be subjected during assembly in the movement or when wearing a watch, it is also important that the mechanical strength is as high as possible, since it must be able to withstand elastic deformation without breaking to perform its function, and must also be able to resist fatigue.

Disclosure of Invention

The invention aims to propose a new method for increasing the mechanical strength of a timepiece spring made of monocrystalline silicon, which may or may not be combined with a method comprising coating the silicon with silicon oxide or any other treatment method aimed at increasing the mechanical strength.

More generally, the invention aims to provide a new method for increasing the mechanical strength of a timepiece spring made of a single crystal material.

To this end, a method is provided for manufacturing a timepiece spring from a single crystal material, comprising the steps of:

a) a clockwork spring is drawn,

b) determining one or more areas of weakness in the spring, at least one area of weakness in or of the one or more areas of weakness, the spring breaking in the event of excessive deformation,

c) the balance spring is manufactured from a wafer of single crystal material extending in a defined plane, with the balance spring being oriented in the wafer such that when the balance spring is deformed, the direction of macroscopic stress in the or each region of weakness is substantially parallel to a cleavage plane of the material intersecting the defined plane.

The invention also proposes a timepiece spring made of a single crystal material, which is elastically deformable in a determined plane and comprises one or more weakened areas, at least one of which, in the or each weakened area, breaks in the event of excessive deformation, characterized in that, when the spring is deformed, the direction of the macroscopic stress in the or each weakened area is substantially parallel to a cleavage plane of the material intersecting the determined plane.

The invention also provides a timepiece movement and a timepiece including such a spring.

Drawings

Other features and advantages of the present invention will become apparent from the following detailed description, which proceeds with reference to the accompanying drawings, in which:

figure 1 is a top view of an example of a timepiece spring that can be manufactured with the method according to the invention, the spring being shown in a deformed state, more precisely in its maximum deformed state in normal operation, and the tensile stress to which it is subjected being indicated by grey shading;

fig. 2 is a perspective view of a portion of the timepiece spring shown in fig. 1, wherein the tensile stress is represented by grey shading;

figure 3 is a diagram illustrating the different steps of the method according to the invention;

FIG. 4 schematically shows a monocrystalline silicon wafer (100) with a wafer plane [110] in a top view (FIG. 4(a)) and a cross-sectional view (FIG. 4 (b));

fig. 5 schematically shows a monocrystalline silicon wafer (110) with a wafer plane [100] in a top view (fig. 5(a)) and a cross-sectional view (fig. 5 (b));

FIG. 6 schematically shows a monocrystalline silicon wafer (111) with a wafer plane [112] in a top view (FIG. 6(a)) and in a cross-sectional view (FIG. 6 (b)).

Detailed Description

Fig. 1 and 2 show a timepiece spring, in this case a rocker spring, comprising a rigid base 1 and a resilient arm 2. Rigid base 1 is intended to be attached to a fixed or mobile frame of a timepiece movement, typically to a plate (plate) of the movement. The resilient arms 2 extend from the rigid base 1 and act resiliently. In use, the resilient arm 2 works in a curved manner and acts on the rocker arm by its free end 3 to return the rocker arm to a determined angular position. To manufacture such a balance spring from monocrystalline silicon, the invention proposes, according to a particular embodiment, a method as shown in fig. 3 and described below, having steps E1 to E3.

First, the spring is drawn by computer-aided design (step E1), taking into account the function to be performed by the spring and the position it will occupy in the movement.

The magnitude and direction of the macroscopic stress to which the spring is subjected under its normal conditions of use when loaded in bending is then calculated by finite element methods (step E2). The calculations take into account the dimensions of the balance spring and the elastic properties of the material (modulus of elasticity and poisson's ratio). In the case of anisotropic single crystal silicon, the average modulus of elasticity and the average poisson's ratio may be used at this stage. Since silicon is much less tensile than it is compressive, the simulation can be limited to the side of the resilient arm 2 on which the tensile force acts during bending, i.e. the right side in fig. 1. The region 4 of the spring where the tensile stress is greatest is the weak region where the spring will break when a certain force is applied to the free end of the spring. The calculation in this step E2 can be performed for the maximum deformation state of the spring, which is when it is operating normally in the movement. Experience has shown, however, that the position of the region of weakness 4 and the direction of the macroscopic stress in this region hardly changes with the degree of deformation.

The balance spring is then fabricated by etching (e.g., Deep Reactive Ion Etching (DRIE) or laser etching) a wafer of single crystal silicon (step E3). The etching is carried out in such a way that the spring has a specific orientation in the wafer, i.e. an orientation such that the direction D of the stress in the weak areas 4 is parallel to a cleavage plane of the monocrystalline silicon that intersects a mean plane P (see fig. 4 to 6) in which the wafer extends and in which the spring will deform in use.

Single crystal silicon has a diamond-like cubic crystal structure with (i) one atom at each of eight vertices of the cube, (ii) one atom at the center of each face of the cube, and (iii) one atom at the center of a tetrahedron formed by three atoms at one corner of the cube and the centers of three adjacent faces of that corner, among four tetrahedra of the eight tetrahedral positions of the cube. The crystal plane in which the atomic density is the greatest is the cleavage plane, i.e., the plane of weakness along which the material fractures when subjected to excessive stress. In the case of single crystal silicon, the cleavage plane is a plane of group {111 }. Fig. 4 shows a single crystal silicon wafer 5 cut in plane (100) with the wafer plane 6 oriented in direction [110 ]. The dotted line 7 represents the intersection (interaction) between the plane (100) and the plane of the family {111 }. Fig. 5 shows a single crystal silicon wafer 8 cut in plane (110) with the wafer plane 9 oriented along direction [100 ]. Dashed line 10 represents the intersection between plane (110) and the plane of family {111 }. Finally, FIG. 6 shows a single crystal silicon wafer 11 cut in plane (111) with the wafer plane 12 oriented along direction [112 ]. Dashed line 13 represents the intersection between plane (111) and the other planes of family {111 }. The intersection lines 7, 10 and 13 between the plane of the wafer being cut and the planes of the family {111} constitute the cleaving direction.

Thus, for example, in step E3 of the method according to the invention, the balance spring is oriented in the wafer in such a way that: the direction of stress D in weak area 4 is parallel to one of cleavage directions 7 if the spring is made of silicon (100) having wafer plane [110], parallel to one of cleavage directions 10 if the spring is made of silicon (110) having wafer plane [100], parallel to one of cleavage directions 13 if the spring is made of silicon (111) having wafer plane [112 ].

The spring shown in figures 1 and 2 has a single area of weakness. For other spring shapes, the spring may have several areas of weakness where the tensile stress is greatest, and the direction of the stress may vary depending on the area of weakness. If such a configuration is found in step E2, the springs are oriented in the silicon wafer such that the direction of the stress in each area of weakness is parallel to one of the cleavage planes. If this cannot be done due to the crystallographic orientation of the wafer, the spring is redrawn (step E1) and the stress is recalculated (step E2) until the shape of the spring is found to include a single area of weakness or two or more areas of weakness in which the respective directions of stress can be parallel to one of the cleavage planes respectively. In order to change the position of the weakened area and thus the direction of the stress, the thickness of the resilient leaf 2 may be changed. In addition to or instead of changing the shape of the balance spring, a single crystal silicon wafer cut in another crystal plane may be selected.

Between steps E2 and E3, the method according to the invention may comprise intermediate steps EI1 and EI2, respectively comprising: the method includes the steps of re-calculating the stress in the balance spring based on the precise elastic properties, taking into account the anisotropy of the material and the orientation of the balance spring selected in the wafer, and modifying the size and/or shape of the balance spring to obtain the desired stiffness and/or the desired breaking stress. If the balance spring is modified to change the direction of maximum stress and thus the orientation of the balance spring in the wafer, these intermediate steps can be iteratively performed to improve the balance spring characteristics.

The mechanical strength of a timepiece spring made according to the invention is significantly increased compared to a spring whose direction of maximum stress is not parallel to any cleavage plane. In particular, two samples of approximately thirty samples each, made of (100) silicon, coated with silicon oxide and stressed when bent, were tested to show a median value of stress at break of approximately 4.7GPa when the stress in the weakened region is oriented along the cleavage plane and a median value of stress at break of approximately 3.4GPa when the stress in the weakened region is oriented at 45 ° with respect to the cleavage plane. This difference is much greater than the improvement achieved by the difference in elastic modulus between the two orientations of the sample. Such a result is surprising because one might expect a reduction in mechanical strength by stressing the cleavage face as desired in the present invention. One possible explanation is that the fracture starts from a micro-crack, the tip of which is subjected to a micro-stress in a direction different from the macro-stress of the weak area.

As described above, a monocrystalline silicon spring manufactured according to the invention may be covered with a silicon oxide reinforcing layer. The thickness of such a layer is typically at least 0.5 μm, for example between 0.5 μm and 5 μm. Other types of reinforcement layers and/or other treatments may be considered to further increase mechanical strength, such as smoothing of the surface of the balance spring.

The improvement in mechanical strength obtained by the invention can be used to reduce the size of the spring for a given force applied in normal operation, thus reducing the space it occupies in the timepiece movement.

The invention can be applied to various types of timepiece springs, in particular to rocker springs, hammer springs, lever springs, positioning rods, flexible guides (for example parallel blades or flexible pivots guided in translation, in particular oscillator flexible pivots) or elastic parts (for example gears or collets) of timepiece parts for mounting these parts on a support part such as a shaft or the like. In particular, the invention can be applied to the elastic arm of a balance spring shown in fig. 10B of patent application EP 2175328.

The single crystal material of a balance spring made according to the present invention need not be silicon. In alternative embodiments of the invention, it may be diamond, alumina (e.g. sapphire or ruby) or silicon carbide.

The spring made according to the invention can be used, for example, in the movement of a watch, pocket watch or miniature timepiece.