阅读说明：本技术 一种三自由度双向运动精密定位平台 (Three-degree-of-freedom bidirectional movement precision positioning platform ) 是由 甘金强 龙家荣 邓高峰 张俊仓 张旭东 昌诗宇 于 2021-10-26 设计创作，主要内容包括：本发明公开了一种三自由度双向运动精密定位平台,包括平台的固定端、桥式放大机构、单平行导向机构、Z型梁结构和工作平台,所述平台的固定端,被设置为静止不动,且平台的固定端包括外圈的四边环形固定端与中间四个正方形的固定端,所述桥式放大机构包括四个压电陶瓷。该三自由度双向运动精密定位平台,是使两自由度精密定位平台采用Z型梁弯曲变形的原理,利用其原理在X与Y轴反向布置Z型梁,实现了空间三自由度双向运动,并具有较大的行程,而本发明相对于传统三自由度精密定位平台的最大优势在于不仅可以实现三自由度运动,还以平面机构方式实现,节约了空间,并可实现相对中心点的双向运动,在某些特定的工作场合具有较大优势。(The invention discloses a three-degree-of-freedom bidirectional movement precision positioning platform which comprises a fixed end of the platform, a bridge type amplification mechanism, a single parallel guide mechanism, a Z-shaped beam structure and a working platform, wherein the fixed end of the platform is arranged to be static, the fixed end of the platform comprises a four-side annular fixed end of an outer ring and fixed ends of four squares in the middle, and the bridge type amplification mechanism comprises four piezoelectric ceramics. The three-degree-of-freedom bidirectional movement precision positioning platform adopts the principle of bending deformation of a Z-shaped beam, and the Z-shaped beam is reversely arranged on an X axis and a Y axis by utilizing the principle of the two-degree-of-freedom precision positioning platform, so that the three-degree-of-freedom bidirectional movement is realized, and the three-degree-of-freedom bidirectional movement precision positioning platform has a larger stroke.)

1. The utility model provides a three degree of freedom bidirectional movement precision positioning platform, includes stiff end (1), bridge type amplification mechanism (2), single parallel guiding mechanism (3), Z type beam structure (4) and work platform (5) of platform, its characterized in that: the stiff end (1) of platform is set up to the stillness, and the stiff end (1) of platform includes the stiff end of four sides annular stiff ends and the stiff end of four squares in the middle of the outer lane.

2. The three-degree-of-freedom two-way motion precision positioning platform of claim 1, characterized in that: the bridge type amplification mechanism (2) comprises four piezoelectric ceramics, wherein the four piezoelectric ceramics are respectively a first piezoelectric ceramic (8), a second piezoelectric ceramic (9), a third piezoelectric ceramic (10) and a fourth piezoelectric ceramic (11);

the bridge type amplification mechanism (2) comprises a driving bridge type mechanism input end (201), a driving bridge type mechanism output end (202) and a flexible hinge (203);

and the piezoelectric ceramics are placed in a bridge type amplification mechanism (2) to drive an input end (201) of the bridge type mechanism, and the rigid block and a flexible hinge (203) are connected through the middle, and finally the displacement is amplified and output to an output end (202).

3. The three-degree-of-freedom two-way motion precision positioning platform of claim 1, characterized in that: the single parallel guide mechanism (3) is composed of two symmetrical blade-shaped hinges and is mainly used for realizing decoupling motion in the XY direction of the platform plane and reducing parasitic displacement.

4. The three-degree-of-freedom two-way motion precision positioning platform of claim 1, characterized in that: the Z-shaped beam structure (4) can realize displacement amplification and movement in the out-of-plane Z direction through stressed bending deformation;

and the Z-shaped beam structure (4) comprises a Z-shaped beam body (7) and semicircular notch type flexible hinges (6) at two ends of the Z-shaped beam body (7), the Z-shaped beam body (7) is formed by connecting three straight beam type hinges in series, and the middle straight beam is vertical to the straight beams at two ends.

5. The three-degree-of-freedom two-way motion precision positioning platform of claim 1, characterized in that: the arrangement directions of the Z-shaped beam body (7) on the plane XY axis are opposite, namely when the piezoelectric ceramics are respectively driven in the XY direction, the working platform (5) moves towards the Z axis in different directions.

6. The three-degree-of-freedom two-way motion precision positioning platform of claim 1, characterized in that: the bridge type amplification mechanism (2), the single parallel guide mechanism (3), the Z-shaped beam structure (4) and the working platform (5) are all located inside the fixed end (1) of the platform.

The motion mechanism of the three-degree-of-freedom bidirectional motion precision positioning platform is as follows:

s1, the first piezoelectric ceramics 8, the first piezoelectric ceramics 9, the first piezoelectric ceramics 10 and the first piezoelectric ceramics 11 are all arranged on the working platform 5, the first piezoelectric ceramics 8 and the second piezoelectric ceramics 9 control the working platform 5 to move along the Y and Z directions, and the third piezoelectric ceramics 10 and the fourth piezoelectric ceramics 11 control the working platform 5 to move along the X and Z directions.

S2, only driving the third piezoelectric ceramics 10 to make the working platform 5 move towards the positive direction of the X axis; to move the stage in the negative X-axis direction, only the fourth piezoelectric ceramic 11 may be driven.

S3, driving the first piezoelectric ceramics 8 only to make the working platform 5 move in the positive direction of the Y axis; to move the stage in the negative Y-axis direction, only the second piezoelectric ceramic 9 may be driven.

S4, to make the platform move in the positive direction of the Z axis, referring to the working principle of the Z-shaped beam in fig. 5 and the perspective view in fig. 2, it can be known that two piezoelectric ceramics, i.e. the third piezoelectric ceramic 10 and the fourth piezoelectric ceramic 11, can be driven simultaneously, when the driving forces of the two piezoelectric ceramics are the same, the platform does not displace towards the X axis, and when the driving forces of the two piezoelectric ceramics are different, the platform displaces towards the X axis.

S5, to make the platform move toward the negative direction of the Z axis, referring to the working principle of the Z-shaped beam in fig. 5 and the perspective view in fig. 2, it can be known that two piezoelectric ceramics, i.e. the first piezoelectric ceramic 8 and the second piezoelectric ceramic 9, can be driven simultaneously, when the driving forces of the two piezoelectric ceramics are the same, the working platform 5 does not displace toward the Y axis, and when the driving forces of the two piezoelectric ceramics are different, the platform displaces toward the Y axis.

S6, to make the working platform 5 move along the three XYZ axes, at least three of the four piezoelectric ceramics 8, 9, 10, 11 are driven, and the direction of displacement is determined by driving different piezoelectric ceramics.

Technical Field

The invention relates to the technical field of motion control, in particular to a three-degree-of-freedom bidirectional motion precision positioning platform.

Background

With the rapid development of modern scientific technology and engineering technology field, the micro-nano technology gradually becomes a hot point of research at home and abroad, and the precision machining technology is an important component of the micro-nano technology, reflects the comprehensive economy and technical level of a country to a great extent, is a mark for measuring the national machining and manufacturing technical level, is also an important pillar of national economy, and has a crucial position in advanced industrial production and academic research, thereby influencing the development of various industries such as scanning electron microscope, micro-electro-mechanical system, precision optics, bioengineering, integrated circuit and the like.

The precise positioning platform based on the piezoelectric ceramics and the compliant mechanism also becomes an important research part of micro-nano technology in recent years, the platform with different degrees of freedom is developed from an early single-degree-of-freedom precise positioning platform to the existing spatial six-degree-of-freedom precise positioning platform, the platforms with different degrees of freedom can meet various requirements of precise positioning, the positioning precision of the existing precise positioning platform can reach a nanometer level at most, and the stroke can reach a micrometer level to a millimeter level.

Disclosure of Invention

The invention aims to solve the defects in the prior art and provides a three-degree-of-freedom bidirectional movement precision positioning platform.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a three degree of freedom bidirectional movement precision positioning platform, includes stiff end, bridge type amplification mechanism, single parallel guiding mechanism, Z type beam structure and the work platform of platform, the stiff end of platform is set up to the stillness, and the stiff end of platform includes the stiff end of four sides annular stiff ends of outer lane and four squares in the middle of.

Preferably, the bridge type amplification mechanism comprises four piezoelectric ceramics, and the four piezoelectric ceramics are respectively a first piezoelectric ceramic, a second piezoelectric ceramic, a third piezoelectric ceramic and a fourth piezoelectric ceramic;

the bridge type amplification mechanism comprises a driving bridge type mechanism input end, a driving bridge type mechanism output end and a flexible hinge;

and the piezoelectric ceramic is placed in the bridge type amplification mechanism to drive the input end of the bridge type mechanism, and the rigid block and the flexible hinge are connected through the middle, so that the displacement is amplified and output to the output end.

Preferably, the single parallel guide mechanism is composed of two symmetrical blade-shaped hinges, and is mainly used for realizing decoupling motion in the XY direction of the platform plane and reducing parasitic displacement.

Preferably, the Z-shaped beam structure can realize displacement amplification and movement in the out-of-plane Z direction through stressed bending deformation;

the Z-shaped beam structure comprises a Z-shaped beam body and semicircular notch type flexible hinges at two ends of the Z-shaped beam body, the Z-shaped beam body is formed by connecting three straight beam type hinges in series, and the middle straight beam is perpendicular to the straight beams at two ends.

Preferably, the arrangement directions of the Z-shaped beam body on the plane XY axes are opposite, namely when the piezoelectric ceramics are respectively driven in the XY directions, the working platform moves to the Z axis in different directions.

Preferably, the bridge type amplification mechanism, the single parallel guide mechanism, the Z-shaped beam structure and the working platform are all located inside the fixed end of the platform.

The motion mechanism of the three-degree-of-freedom bidirectional motion precision positioning platform is as follows:

s1, the first piezoelectric ceramics 8, the first piezoelectric ceramics 9, the first piezoelectric ceramics 10 and the first piezoelectric ceramics 11 are all arranged on the working platform 5, the first piezoelectric ceramics 8 and the second piezoelectric ceramics 9 control the working platform 5 to move along the Y and Z directions, and the third piezoelectric ceramics 10 and the fourth piezoelectric ceramics 11 control the working platform 5 to move along the X and Z directions.

S2, only driving the third piezoelectric ceramics 10 to make the working platform 5 move towards the positive direction of the X axis; to move the stage in the negative X-axis direction, only the fourth piezoelectric ceramic 11 may be driven.

S3, driving the first piezoelectric ceramics 8 only to make the working platform 5 move in the positive direction of the Y axis; to move the stage in the negative Y-axis direction, only the second piezoelectric ceramic 9 may be driven.

S4, to make the platform move in the positive direction of the Z axis, referring to the working principle of the Z-shaped beam in fig. 5 and the perspective view in fig. 2, it can be known that two piezoelectric ceramics, i.e. the third piezoelectric ceramic 10 and the fourth piezoelectric ceramic 11, can be driven simultaneously, when the driving forces of the two piezoelectric ceramics are the same, the platform does not displace towards the X axis, and when the driving forces of the two piezoelectric ceramics are different, the platform displaces towards the X axis.

S5, to make the platform move toward the negative direction of the Z axis, referring to the working principle of the Z-shaped beam in fig. 5 and the perspective view in fig. 2, it can be known that two piezoelectric ceramics, i.e. the first piezoelectric ceramic 8 and the second piezoelectric ceramic 9, can be driven simultaneously, when the driving forces of the two piezoelectric ceramics are the same, the working platform 5 does not displace toward the Y axis, and when the driving forces of the two piezoelectric ceramics are different, the platform displaces toward the Y axis.

S6, to make the working platform 5 move along the three XYZ axes, at least three of the four piezoelectric ceramics 8, 9, 10, 11 are driven, and the direction of displacement is determined by driving different piezoelectric ceramics.

The invention has the following beneficial effects:

the two-degree-of-freedom precision positioning platform adopts the bending deformation principle of the Z-shaped beam, and the Z-shaped beam is reversely arranged on the X axis and the Y axis by utilizing the principle of the bending deformation principle, so that the spatial three-degree-of-freedom two-way motion is realized, and the two-degree-of-freedom precision positioning platform has larger stroke.

Drawings

FIG. 1 is a top view of a three-freedom two-way motion platform of the present invention;

FIG. 2 is a perspective view of the three-degree-of-freedom bidirectional motion platform of the present invention;

FIG. 3 is a schematic view of a Z-beam body;

FIG. 4 is a schematic structural view of a Z-beam body when unstressed;

FIG. 5 is a schematic view of a Z-shaped beam body under bending deformation;

fig. 6 is a schematic view of a piezoelectric ceramic arrangement.

In the figure: the piezoelectric ceramic piezoelectric actuator comprises a platform 1, a platform 2, a bridge type amplification mechanism, a platform 201 driving bridge type mechanism input end, a platform 202 driving bridge type mechanism output end, a flexible hinge 203, a single parallel guide mechanism 3, a beam structure 4Z, a working platform 5, a flexible hinge 6 with semicircular notches, a beam body 7Z, a first piezoelectric ceramic 8, a second piezoelectric ceramic 9, a third piezoelectric ceramic 10 and a fourth piezoelectric ceramic 11.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

According to fig. 1-5, a three-degree-of-freedom two-way motion precision positioning platform comprises a fixed end 1 of the platform, a bridge amplification mechanism 2, a single parallel guide mechanism 3, a Z-shaped beam structure 4 and a working platform 5, wherein the fixed end 1 of the platform is set to be stationary and comprises four annular fixed ends of an outer ring and four square fixed ends in the middle, the bridge amplification mechanism 2 and piezoelectric ceramics (four in total, as shown in fig. 6) are placed in the bridge amplification mechanism 2 to drive an input end 201 of the bridge mechanism, and displacement is amplified and output to an output end 202 of the bridge mechanism through a rigid block and a compliant hinge 203 which are connected in the middle.

The single parallel guide mechanism 3 is composed of two symmetrical blade type hinges and mainly used for realizing decoupling movement in the XY direction of a platform plane and reducing parasitic displacement, the Z-shaped beam structure 4 can realize displacement amplification and movement in the Z direction out of the plane through stressed bending deformation, detailed description is further carried out in figures 3, 4 and 5, in order to more clearly see the layout of the Z-shaped beam in the integral structure of the platform, a perspective view shown in figure 3 can be referred to, and seen in figure 3, the arrangement directions of the Z-shaped beam on the XY axis of the plane are opposite, namely when piezoelectric ceramics are respectively driven in the XY direction, a tail end platform moves in different directions of the Z axis; further, the work platform 5 in fig. 1 is an end-moving platform.

The platform can realize the application of three-freedom two-way core elements of piezoelectric ceramics distributed in four directions and a Z-shaped beam with semicircular notch type hinges, a structural schematic diagram of a single Z-shaped beam is shown in figure 3, wherein the two ends of the Z-shaped beam are provided with semicircular notch type flexible hinges 6, the main function of the hinges is to increase one degree of freedom of the Z-shaped beam on a plane so that the Z-shaped beam can move on the plane in two directions, a Z-shaped beam body 7 is formed by connecting three straight beam type hinges in series, and the middle straight beam is vertical to the straight beams at the two ends.

The working principle of the Z-shaped beam is shown in fig. 4 and 5, fig. 4 shows a state when the two sides are not stressed, at this time, the Z-shaped beam is not deformed, and fig. 5 shows a state when the two sides of the Z-shaped beam are stressed, at this time, the Z-shaped beam is bent and deformed, so that the movable platform connected with the Z-shaped beam moves upwards.

A three-degree-of-freedom bidirectional motion precision positioning platform is a symmetrical structure, the platform is manufactured by using an electric spark cutting technology, in order to reduce the overall mass of the platform and enable the platform to have better dynamic performance, the platform is made of 7075AL materials, and piezoelectric ceramics have higher resolution and response speed, so that the three-degree-of-freedom bidirectional motion platform adopts the piezoelectric ceramics as a driver and is arranged in a symmetrical four-direction bridge type amplification mechanism 2 (shown in figure 6).

The method comprises the following steps:

the motion mechanism of the three-degree-of-freedom bidirectional motion precision positioning platform is as follows:

s1, as shown in fig. 6 and fig. 6, the arrangement of four piezoelectric ceramics 8, 9, 10, and 11 is shown, wherein the first piezoelectric ceramic 8 and the second piezoelectric ceramic 9 control the movement of the working platform 5 along the Y and Z directions, and the third piezoelectric ceramic 10 and the fourth piezoelectric ceramic 11 control the movement of the working platform 5 along the X and Z directions.

S2, only driving the third piezoelectric ceramics 10 to make the working platform 5 move towards the positive direction of the X axis; to move the stage in the negative X-axis direction, only the fourth piezoelectric ceramic 11 may be driven.

S3, driving the first piezoelectric ceramics 8 only to make the working platform 5 move in the positive direction of the Y axis; to move the stage in the negative Y-axis direction, only the second piezoelectric ceramic 9 may be driven.

S4, to make the platform move in the positive direction of the Z axis, referring to the working principle of the Z-shaped beam in fig. 5 and the perspective view in fig. 2, it can be known that two piezoelectric ceramics, i.e. the third piezoelectric ceramic 10 and the fourth piezoelectric ceramic 11, can be driven simultaneously, when the driving forces of the two piezoelectric ceramics are the same, the platform does not displace towards the X axis, and when the driving forces of the two piezoelectric ceramics are different, the platform displaces towards the X axis.

S5, to make the platform move toward the negative direction of the Z axis, referring to the working principle of the Z-shaped beam in fig. 5 and the perspective view in fig. 2, it can be known that two piezoelectric ceramics, i.e. the first piezoelectric ceramic 8 and the second piezoelectric ceramic 9, can be driven simultaneously, when the driving forces of the two piezoelectric ceramics are the same, the working platform 5 does not displace toward the Y axis, and when the driving forces of the two piezoelectric ceramics are different, the platform displaces toward the Y axis.

S6, to make the working platform 5 move along the three XYZ axes, at least three of the four piezoelectric ceramics 8, 9, 10, 11 are driven, and the direction of displacement is determined by driving different piezoelectric ceramics.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.