阅读说明：本技术 一体式涡轮螺杆组合泵 (Integrated turbine and screw combined pump ) 是由 沈文武 周贤忠 于 2021-10-14 设计创作，主要内容包括：本发明的实施例提供了一种一体式涡轮螺杆组合泵,涉及抽真空设备技术领域。一体式涡轮螺杆组合泵包括相互连通的涡轮泵和螺杆泵,其中,涡轮泵的进气端设置有进气口,螺杆泵的排气口与出气口连通,螺杆泵中还设置有旁通排气通道,旁通排气通道的入口设置有旁通阀、且与涡轮泵的排气口连通,旁通排气通道的出口与出气口连通。其中,涡轮泵负责对低真空段的气流实现大抽速、并可以用于对高真空段的气流为螺杆泵增压,对应的,螺杆泵负责对高真空段的气流继续抽气,实现更高的真空度,极大地提高了一体式涡轮螺杆组合泵的抽速,并且不影响泵的性能,装置整体体积较小,不会占用较大空间。(The embodiment of the invention provides an integrated turbine and screw combined pump, and relates to the technical field of vacuum pumping equipment. The integrated turbine and screw combined pump comprises a turbine pump and a screw pump which are mutually communicated, wherein an air inlet is formed in the air inlet end of the turbine pump, an air outlet and an air outlet of the screw pump are communicated, a bypass exhaust passage is further arranged in the screw pump, a bypass valve is arranged at the inlet of the bypass exhaust passage and communicated with the air outlet of the turbine pump, and the outlet of the bypass exhaust passage is communicated with the air outlet. The turbo pump is responsible for realizing large pumping speed for the air flow of the low vacuum section and can be used for pressurizing the air flow of the high vacuum section by the screw pump, correspondingly, the screw pump is responsible for continuously pumping the air flow of the high vacuum section, higher vacuum degree is realized, the pumping speed of the integrated turbo-screw combined pump is greatly improved, the performance of the pump is not influenced, the whole volume of the device is smaller, and larger space cannot be occupied.)

1. The utility model provides an integral type turbine screw combination pump, characterized in that, integral type turbine screw combination pump includes turbine pump (110) and screw pump (120) that communicate each other, wherein, the inlet end of turbine pump (110) is provided with air inlet (140), the gas vent and gas outlet (150) intercommunication of screw pump (120), still be provided with bypass exhaust passage (125) in screw pump (120), the entry of bypass exhaust passage (125) is provided with bypass valve (130) and with the gas vent intercommunication of turbine pump (110), the export of bypass exhaust passage (125) with gas outlet (150) intercommunication.

2. The integrated turboscrew pump according to claim 1, characterized in that said bypass exhaust channel (125) is two, two said bypass exhaust channels (125) being respectively arranged on opposite sides within a housing of said screw pump (120), an inlet of each said bypass exhaust channel (125) being provided with said bypass valve (130).

3. The integrated turbine-screw combination pump of claim 1, wherein the housing of the turbine pump (110) is integrally formed with the housing of the screw pump (120).

4. The integrated turboscrew combination pump according to claim 1, characterized in that the turbopump (110) includes a turbopump motor (111), a turbopump rotor (112), and a turbopump blade (113), wherein the turbopump motor (111) is used to drive the turbopump rotor (112), the turbopump blade (113) is connected to the turbopump rotor (112), and the turbopump blade (113) is used to press gas from the turbopump (110) toward the screw pump (120).

5. The integrated turbine-screw combination pump of claim 1, wherein the screw pump (120) comprises a screw pump motor for driving the screw pump rotor for pressing gas from the screw pump (120) towards the gas outlet (150), and a screw pump rotor.

6. The integrated turbine-screw combination pump according to claim 5, characterized in that the screw pump motor comprises a first motor (121) and a second motor (122), the screw pump rotors comprising an X rotor (123) and a Y rotor (124), the first motor (121) being for driving the X rotor (123) and the second motor (122) being for driving the Y rotor (124).

7. The integrated turbine-screw combination pump of claim 5, wherein the bypass exhaust channel (125) is formed between a housing of the screw pump (120) and the screw pump rotor.

8. The integrated turboscrew pump of claim 1 further comprising a controller electrically connected to the turbopump (110) and the progressive cavity pump (120).

9. The integrated turbine-screw combination pump of claim 8, wherein the controller is configured to control the turbine pump (110) and the progressive cavity pump (120) to be activated simultaneously.

10. The integrated turboscrew combination pump according to claim 9, characterized in that the bypass valve (130) is in a state of closing the bypass exhaust passage (125) in a case where exhaust pressure is less than a preset value, and the bypass valve (130) is in a state of opening the bypass exhaust passage (125) in a case where exhaust pressure is greater than or equal to the preset value.

Technical Field

The invention relates to the technical field of vacuumizing equipment, in particular to an integrated turbine and screw combined pump.

Background

Along with the development of economy, the progress of society, the rising of photovoltaic semiconductor trade has provided higher requirement to the manufacturing of equipment, and screw vacuum pump simple structure can adapt to abominable operating mode, corrosion-resistant.

However, the pumping speed of the existing screw pump is slow, and if the pumping speed needs to be high, the volume needs to be large, so that the existing screw pump occupies a large space, and the occupied space and miniaturization pursued by photovoltaic and semiconductor manufacturing equipment are opposite.

Disclosure of Invention

The invention aims to provide an integrated turbine and screw combined pump which has the characteristics of small volume and high pumping speed.

Embodiments of the invention may be implemented as follows:

the invention provides an integrated turbine-screw combined pump which comprises a turbine pump and a screw pump which are mutually communicated, wherein an air inlet is formed in the air inlet end of the turbine pump, an air outlet of the screw pump is communicated with the air outlet, a bypass exhaust channel is further arranged in the screw pump, a bypass valve is arranged at the inlet of the bypass exhaust channel and communicated with the air outlet of the turbine pump, and the outlet of the bypass exhaust channel is communicated with the air outlet.

The integrated turbine and screw combined pump provided by the embodiment of the invention has the beneficial effects that:

1. the integrated turbine-screw combined pump comprises a turbine pump and a screw pump which are communicated with each other, wherein the turbine pump is responsible for realizing high pumping speed on the air flow of the low vacuum section and can be used for pressurizing the air flow of the high vacuum section by the screw pump;

2. the turbo pump and the screw pump are integrally designed, so that the whole device is small in size and does not occupy large space;

3. because the turbo pump is adopted, the integrated turbo-screw combined pump has extremely high pumping speed for gas in a low vacuum section;

4. the bypass valve is arranged in the bypass exhaust channel, so that an additional electric appliance control program is not required to be designed for the bypass valve, the bypass valve is automatically opened or closed under the influence of the pressure of gas, and the bypass valve is simple and practical.

In an alternative embodiment, there are two bypass exhaust passages, the two bypass exhaust passages are respectively arranged at two opposite sides in the shell of the screw pump, and the inlet of each bypass exhaust passage is provided with a bypass valve.

Like this, two bypass exhaust passage can improve the exhaust efficiency of integral type turbine screw combination pump, and moreover, two bypass exhaust passage are for the central line symmetrical arrangement of device, are favorable to the device internal pressure even, avoid inside partial pressure too big.

In an alternative embodiment, the housing of the turbine pump is integrally formed with the housing of the screw pump.

Therefore, the structure of the device can be simplified, and the device can be smaller in size and does not occupy too much space.

In an alternative embodiment, the turbo pump comprises a turbo pump motor for driving the turbo pump rotor, a turbo pump rotor to which the turbo pump blade is attached, and a turbo pump blade for pressing gas from the turbo pump to the screw pump.

In an alternative embodiment, the screw pump comprises a screw pump motor for driving the screw pump rotor for pressing gas from the screw pump towards the gas outlet, and a screw pump rotor.

In an alternative embodiment, the screw pump motor comprises a first motor and a second motor, the screw pump rotor comprises an X-rotor and a Y-rotor, the first motor is for driving the X-rotor, and the second motor is for driving the Y-rotor.

Like this, the screw pump chooses for use bi-motor screw pump, can help integral type turbine screw combination pump to realize higher rotational speed and air extraction efficiency.

In an alternative embodiment, the bypass exhaust passage is formed between the housing of the screw pump and the screw pump rotor.

Therefore, the bypass exhaust channel is simple to form, the internal space of the shell of the screw pump is only required to be properly enlarged relative to the screw pump rotor, the bypass exhaust channel can be formed, and other structures are not required to be designed for forming the bypass exhaust channel.

In an alternative embodiment, the integrated turbine-screw combination pump includes a controller electrically connected to the turbine pump and the progressive cavity pump.

In an alternative embodiment, the controller is adapted to control the turbo pump and the progressive cavity pump to be activated simultaneously.

In an alternative embodiment, the bypass valve is in a state of closing the bypass exhaust passage in a case where the exhaust pressure is less than a preset value, and the bypass valve is in a state of opening the bypass exhaust passage in a case where the exhaust pressure is greater than or equal to the preset value.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is a schematic structural diagram of an integrated turbine-screw combination pump according to an embodiment of the present invention;

fig. 2 is a schematic diagram of the working performance of the integrated turbine-screw combined pump provided by the embodiment of the invention compared with that of a conventional screw pump.

Icon: 100-integrated turbine-screw combination pump; 110-a turbopump; 111-turbo pump motor; 112-a turbopump rotor; 113-turbine pump blades; 120-screw pump; 121-a first motor; 122-a second motor; 123-X rotor; 124-Y rotor; 125-bypass exhaust channel; 130-a bypass valve; 140-an air inlet; 150-air outlet.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

Referring to fig. 1, the integrated turbo-screw combination pump 100 includes a turbo pump 110, a screw pump 120, and a bypass valve 130, wherein the turbo pump 110 and the screw pump 120 are communicated with each other, and a housing of the turbo pump 110 and a housing of the screw pump 120 are integrally formed.

An air inlet 140 is arranged at the air inlet end of the turbine pump 110, the air outlet of the screw pump 120 is communicated with an air outlet 150, a bypass exhaust channel 125 is further arranged in the screw pump 120, a bypass valve 130 is arranged at the inlet of the bypass exhaust channel 125 and is communicated with the air outlet of the turbine pump 110, and the outlet of the bypass exhaust channel 125 is communicated with the air outlet 150.

Wherein the bypass valve 130 is in a state of closing the bypass exhaust passage 125 when the exhaust pressure is less than a preset value, and the bypass valve 130 is in a state of opening the bypass exhaust passage 125 when the exhaust pressure is greater than or equal to the preset value.

The bypass exhaust passages 125 are two, the two bypass exhaust passages 125 are respectively disposed at opposite sides in the housing of the screw pump 120, and an inlet of each bypass exhaust passage 125 is provided with a bypass valve 130.

In this way, the two bypass exhaust passages 125 can improve the exhaust efficiency of the integrated turbine-screw combined pump 100, and the two bypass exhaust passages 125 are symmetrically arranged relative to the center line of the device, so that the internal pressure of the device is uniform, and the excessive internal local pressure is avoided.

The housing of the turbo pump 110 is integrally formed with the housing of the screw pump 120. Therefore, the structure of the device can be simplified, and the device can be smaller in size and does not occupy too much space.

Specifically, the turbo pump 110 includes a turbo pump motor 111, a turbo pump rotor 112, and a turbo pump blade 113, wherein the turbo pump motor 111 is used to drive the turbo pump rotor 112, the turbo pump blade 113 is connected to the turbo pump rotor 112, and the turbo pump blade 113 is used to press the gas from the turbo pump 110 to the screw pump 120.

The screw pump 120 includes a screw pump motor for driving the screw pump rotor, and a screw pump rotor for pressing gas from the screw pump 120 toward the gas outlet 150.

In this embodiment, the screw pump 120 is a dual-motor screw pump, the screw pump motor includes a first motor 121 and a second motor 122, the screw pump rotor includes an X rotor 123 and a Y rotor 124, the first motor 121 is used to drive the X rotor 123, and the second motor 122 is used to drive the Y rotor 124. In this way, the progressive cavity pump 120 can help the integrated turbine-screw combination pump 100 achieve higher rotational speed and air extraction efficiency.

Of course, in other embodiments, the screw pump 120 may also be a single motor screw pump, and may also meet the application scenario with less requirements on the rotation speed and the pumping efficiency, and the device has lower cost and occupies less space.

A bypass exhaust passage 125 is formed between the housing of the screw pump 120 and the screw pump rotor. Thus, the bypass exhaust passage 125 is simply formed, the bypass exhaust passage 125 can be formed only by appropriately increasing the inner space of the housing of the screw pump 120 with respect to the screw pump rotor, and other structures are not required to be designed for forming the bypass exhaust passage 125, which does not increase the production cost of the device.

Of course, in other embodiments, a separate bypass exhaust passage 125 may be provided with respect to screw pump 120, such as by providing a separate, externally disposed conduit with respect to screw pump 120 as bypass exhaust passage 125 and providing a bypass valve 130 within the conduit.

The integrated turboscrew pump 100 further includes a controller (not shown) electrically connected to the turbopump 110 and the screw pump 120. The controller is used for controlling the working states of the turbo pump 110 and the screw pump 120.

Of course, in other embodiments, the controller electrically connected to the turbo pump 110 and the screw pump 120 may not be provided, and the turbo pump 110 and the screw pump 120 may be directly set to be simultaneously started or simultaneously closed, or separate start/stop buttons may be respectively designed for the turbo pump 110 and the screw pump 120, thereby simplifying the device structure and reducing the device cost.

The working process of the integrated turbine-screw combined pump 100 provided by the embodiment is as follows:

firstly, the controller is used for controlling the turbo pump 110 and the screw pump 120 to be started simultaneously, the pressure of pumped gas is close to atmospheric pressure, the gas enters the turbo pump 110 from the gas inlet 140, the turbo pump motor 111 drives the turbo pump rotor 112 and the turbo pump blades 113 to rotate at high speed, and the rotating speed can reach 3-5 ten thousand revolutions per minute;

then, the turbo pump 110 pumps the gas into a space between the turbo pump 110 and the screw pump 120, at this time, because the pumping speed of the turbo pump 110 is very high, the screw pump 120 has no time to discharge the gas at the gas outlet 150 of the turbo pump 110, and the exhaust side of the turbo pump 110 forms a high pressure, so that the exhaust pressure of the bypass valve 130 is greater than or equal to a preset value, so that the bypass valve 130 is in a state of opening the bypass exhaust passage 125, and most of the gas is discharged from the bypass exhaust passage 125, in this process, the turbo pump 110 pumps the gas as a main pump;

when the integrated turbo-screw combination pump 100 operates for a period of time, the gas pressure in the space between the turbo pump 110 and the screw pump 120 is reduced, so that the exhaust pressure of the bypass valve 130 is smaller than a preset value, and the bypass valve 130 is in a state of closing the bypass exhaust passage 125, and the gas is completely immersed in the screw pump 120 and discharged by the screw pump 120, in this process, the screw pump 120 is used as a main pump to pump air, and the turbo pump 110 is used as a booster pump of the screw pump 120.

The integrated turbine-screw combination pump 100 provided by the embodiment has the advantages that:

when the pressure of the pumped gas is higher, the turbopump 110 is used as a main pump for pumping gas, so that the problem that the pumping speed of the screw pump 120 to the gas at a high-pressure section is lower can be solved, when the pressure of the pumped gas is reduced to a certain value, the screw pump 120 is used as the main pump for pumping gas, the turbopump 110 plays a role in supercharging, and the extremely high vacuum degree can be pumped.

Referring to FIG. 2, the lower curve of FIG. 2 shows the relationship between pumping speed and pumping pressure of the conventional screw pump, in which the pumping speed of the conventional screw pump is 10 at the maximum³About Pa, to reach the maximum pumping speed, the volume of the screw pump is required to be very large, the occupied space is very large, and the pumping speed of the existing screw pump is not high in the atmospheric state.

The upper curve in fig. 2 represents the relationship between the pumping speed and the pumping pressure of the integrated turbine-screw combined pump 100 provided in this embodiment, and it can be seen that the pumping pressure and the pumping speed of the integrated turbine-screw combined pump 100 provided in this embodiment can be much higher than those of the conventional screw pump.

The integrated turbine-screw combined pump 100 provided by the embodiment has the beneficial effects that:

1. the integrated turbine-screw combined pump 100 comprises a turbine pump 110 and a screw pump 120 which are communicated with each other, the turbine pump 110 is responsible for realizing high pumping speed on the air flow of the low vacuum section and can be used for pressurizing the air flow of the high vacuum section for the screw pump 120, correspondingly, the screw pump 120 is responsible for continuously pumping the air flow of the high vacuum section, higher vacuum degree is realized, the pumping speed of the integrated turbine-screw combined pump 100 is greatly improved, and the performance of the pump is not influenced;

2. the turbo pump 110 and the screw pump 120 are integrally designed, so that the whole device is small in size and does not occupy large space;

3. because the turbo pump 110 is adopted, the integrated turbine-screw combined pump 100 has extremely high pumping speed for gas in a low vacuum section;

4. the bypass valve 130 is arranged in the bypass exhaust channel 125, an additional electric appliance control program does not need to be designed for the bypass valve 130, and the bypass valve 130 is automatically opened or closed under the influence of the pressure of gas, so that the device is simple and practical.

Of course, in other embodiments, a solenoid valve or other electrically operated valve may be used as the bypass valve 130, which increases the cost, but can flexibly control the on/off state of the bypass valve 130 to provide conditions for achieving the pumping rate and the internal pressure of the precise control device.

The integrated turbine-screw combination pump 100 provided by the embodiment can be applied to any application scene requiring air extraction, for example, can be applied to a semiconductor manufacturing process for performing vacuum-pumping treatment on some working chambers, and can also be applied to the aerospace field for forming a capsule in a vacuum state.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.