阅读说明：本技术 一种基于双snap结构微腔阵列的角位移传感系统及方法 (Angular displacement sensing system and method based on double SNAP structure microcavity array ) 是由 董永超 孙鹏辉 陈剑 曾学良 于 2021-06-25 设计创作，主要内容包括：本申请公开了一种基于双SNAP结构微腔阵列的角位移传感系统及方法,包括：可调谐激光器、偏振控制器、双耦合波导、双SNAP结构微腔阵列、旋转式位移装置、光电探测器及计算机。可调谐激光器产生激光经过偏振控制器调整后输入双耦合波导并耦合进SNAP结构微腔。波长符合谐振条件的光波将产生谐振而被束缚在微腔内部,其余波长的光波经光电探测器探测后转换成电信号输入计算机,经计算机处理得角位移量。当双SNAP结构微腔阵列与双耦合波导相对转动时,谐振谱的轴向模式特征参数将发生规律性变化,通过交替选用两个耦合波导的输出光波信号的模式特征参数实现角位移大量程精密测量,解决了现有技术无法实现大量程、高精度的角位移测量的问题。(The application discloses an angular displacement sensing system and method based on a double SNAP structure microcavity array, which comprises the following steps: the device comprises a tunable laser, a polarization controller, a double-coupling waveguide, a double SNAP structure microcavity array, a rotary displacement device, a photoelectric detector and a computer. The tunable laser generates laser which is adjusted by the polarization controller and then is input into the double-coupling waveguide and coupled into the SNAP structure microcavity. The light wave with the wavelength meeting the resonance condition generates resonance and is bound in the micro-cavity, the light waves with the other wavelengths are detected by the photoelectric detector and then converted into electric signals to be input into a computer, and the electric signals are processed by the computer to obtain the angular displacement. When the double SNAP structure microcavity array and the double coupling waveguides rotate relatively, the axial mode characteristic parameters of the resonance spectrum change regularly, and the mode characteristic parameters of the output light wave signals of the two coupling waveguides are selected alternately to realize the wide-range precise measurement of the angular displacement, so that the problem that the prior art cannot realize the wide-range and high-precision angular displacement measurement is solved.)

1. An angular displacement sensing system based on a microcavity array with a double SNAP structure is characterized by comprising: the device comprises a tunable laser, a polarization controller, a double-coupling waveguide, a double SNAP structure microcavity array, a rotary displacement device, a photoelectric detector and a computer;

the output end of the tunable laser is connected with the input end of the polarization controller, the output end of the polarization controller is connected with the input end of the double-coupling waveguide, the output end of the double-coupling waveguide is connected with the input end of the photoelectric detector, and the output end of the photoelectric detector is connected with the computer;

the double-SNAP structure microcavity array is fixed on the rotary displacement device, and the double-coupling waveguide is always kept in contact with the double-SNAP structure microcavity array during working;

the tunable laser is used for generating two paths of laser with continuous and tunable wavelengths and inputting the two paths of laser into the polarization controller;

the polarization controller is used for adjusting the polarization state of the laser light wave to obtain a polarized light wave, and inputting the polarized light wave into the double-coupling waveguide;

the double-coupling waveguide is used for enabling the polarized light waves to form an evanescent field to be coupled into each SNAP structure microcavity in the double-SNAP structure microcavity array to generate resonance, and inputting the first path of light wave signals and the second path of light wave signals to the photoelectric detector;

the photoelectric detector is used for converting the first path of light wave signal and the second path of light wave signal into electric signals and inputting the electric signals containing resonance signals into the computer;

and the computer is used for acquiring the relative rotation angular displacement between the double coupling waveguide and the double SNAP structure microcavity array according to the electric signal.

2. The angular displacement sensing system based on the microcavity array with a dual SNAP structure according to claim 1, wherein the computer is specifically configured to:

when the rotary displacement device rotates, acquiring each-order axial mode characteristic parameter and corresponding angular displacement of the resonance signal;

selecting the first path of light wave signal and the second path of light wave signal according to the switching signal by taking the light wave signals of which all even-order axial modes of the resonance spectrum corresponding to the resonance signal disappear as the switching signal to obtain periodically reproduced resonance signals;

and establishing a mapping relation between each-order axial mode characteristic parameter of the resonance signal and the angular displacement, and obtaining the angular displacement according to the resonance signal based on the mapping relation.

3. The angular displacement sensing system based on the microcavity array with a double SNAP structure of claim 1, wherein the double-coupled waveguide is: micro-nano tapered optical fiber.

4. The angular displacement sensing system based on the double-SNAP-structure microcavity array according to claim 1, wherein an axial arc length and an effective radius variation of each SNAP-structure microcavity in the double-SNAP-structure microcavity array are the same.

5. The angular displacement sensing system based on the double-SNAP structure microcavity array of claim 4, wherein the SNAP structure microcavity has a parabolic longitudinal cross-sectional shape.

6. The angular displacement sensing system based on the microcavity array with the double SNAP structure of claim 1, wherein a first coupling waveguide and a second coupling waveguide in the double coupling waveguides are arranged in parallel, and an included angle between the first coupling waveguide and the second coupling waveguide along an angular displacement direction is: (N +0.5) times of the included angle corresponding to the axial arc length of the SNAP structure microcavity, wherein N is a positive integer.

7. The angular displacement sensing system based on the double-SNAP-structure microcavity array according to claim 1, wherein the axial arc lengths of the connecting fibers between the SNAP-structure microcavity and the adjacent SNAP-structure microcavity are equal.

8. The dual-SNAP-structure-microcavity array-based angular displacement sensing system according to claim 1, wherein a first SNAP-structure-microcavity array and a second SNAP-structure-microcavity array in the dual-SNAP-structure-microcavity array are parallel to each other, and the SNAP-structure microcavities on the first SNAP-structure-microcavity array are aligned with the connecting fibers on the second SNAP-structure-microcavity array.

9. The angular displacement sensing system based on the double SNAP structure microcavity array according to claim 1, wherein the axial length of the SNAP structure microcavity is 0.5-1.5 mm, and the effective radius variation is within a range of: 10 to 100 nm.

10. An angular displacement sensing method based on a double SNAP structure microcavity array is characterized in that the angular displacement sensing method is applied to any one of claims 1-9 based on the double SNAP structure microcavity array, and the method comprises the following steps:

the tunable laser generates two paths of laser with continuous and tunable wavelengths and inputs the two paths of laser into the polarization controller;

the polarization controller adjusts the polarization state of the laser light wave to obtain a polarized light wave, and the polarized light wave is input into the double-coupling waveguide;

the double coupling waveguide is used for enabling the polarized light waves to form an evanescent field to be coupled into each SNAP structure microcavity in the double SNAP structure microcavity array to generate resonance, and inputting a first path of light wave signals and a second path of light wave signals to the photoelectric detector;

the photoelectric detector converts the first path of light wave signal and the second path of light wave signal into electric signals, and the electric signals containing resonance signals are input into a computer;

and the computer acquires the relative rotation angular displacement between the double-coupling waveguide and the double SNAP structure microcavity array according to the electric signal.

Technical Field

The application relates to the technical field of optical sensing, in particular to an angular displacement sensing system and an angular displacement sensing method based on a double SNAP structure microcavity array.

Background

The angular displacement sensor is a measuring device different from a linear displacement sensor, and has important application in the fields of robot joints, automobile speed measurement, ultra-precision machining angle measurement and the like. With the technical progress, various fields put higher demands on the accuracy of angle measurement and environmental suitability. Due to the rapid development of sensing technology and computer technology, a variety of angular displacement sensors, such as magnetoelectric angular displacement sensors and photoelectric angular displacement sensors, have emerged. The magnetoelectric sensor is difficult to realize high-precision measurement due to the factors such as the limitation of the manufacturing process of the magnetoelectric sensor, and the application range of the photoelectric sensor is limited to a certain extent due to the reasons such as larger volume, complex manufacturing process of a code disc and the like.

The SNAP (Surface nano Axial photons) structure microcavity is used as a high-performance optical resonant cavity, the electromagnetic field of the eigenmode of the SNAP structure microcavity is regularly distributed along the Axial direction, a relatively clean resonance spectrum formed by certain specific modes can be generated through coupling excitation of a coupling waveguide, and the characteristic parameters of each resonance mode in the resonance spectrum have high sensitivity to the change of the coupling position, so that the SNAP structure microcavity has the capability of realizing displacement and angular displacement measurement. However, since the size of a single SNAP microcavity structure is difficult to exceed millimeter level, an SNAP microcavity array is required to realize large-range measurement. However, when the SNAP microcavity array is used for angular displacement measurement, the fixed supporting part of the SNAP microcavity array can destroy the coupling of a single SNAP microcavity, so that the single SNAP microcavity array cannot realize continuous large-range and high-precision angular displacement measurement.

Therefore, a novel sensing measurement scheme needs to be designed to realize the application of the SNAP structure microcavity array in the field of continuous wide-range and high-precision angular displacement.

Disclosure of Invention

The application aims to provide an angular displacement sensing system and an angular displacement sensing method based on a microcavity array with a double SNAP structure, and the angular displacement sensing system and the angular displacement sensing method are used for solving the technical problem that the angular displacement measurement with large range and high precision cannot be realized in the prior art.

In view of the above, the present application provides an angular displacement sensing system based on a microcavity array with a dual SNAP structure, including:

the device comprises a tunable laser, a polarization controller, a double-coupling waveguide, a double SNAP structure microcavity array, a rotary displacement device, a photoelectric detector and a computer;

the output end of the tunable laser is connected with the input end of the polarization controller, the output end of the polarization controller is connected with the input end of the double-coupling waveguide, the output end of the double-coupling waveguide is connected with the input end of the photoelectric detector, and the output end of the photoelectric detector is connected with the computer;

the double-SNAP structure microcavity array is fixed on the rotary displacement device, and the double-coupling waveguide is always kept in contact with the double-SNAP structure microcavity array during working;

the tunable laser is used for generating two paths of laser with continuous and tunable wavelengths and inputting the two paths of laser into the polarization controller;

the polarization controller is used for adjusting the polarization state of the laser light wave to obtain a polarized light wave, and inputting the polarized light wave into the double-coupling waveguide;

the double-coupling waveguide is used for enabling the polarized light waves to form an evanescent field to be coupled into each SNAP structure microcavity in the double-SNAP structure microcavity array to generate resonance, and inputting the first path of light wave signals and the second path of light wave signals to the photoelectric detector;

the photoelectric detector is used for converting the first path of light wave signal and the second path of light wave signal into electric signals and inputting the electric signals containing resonance signals into the computer;

and the computer is used for acquiring the relative rotation angular displacement between the double coupling waveguide and the double SNAP structure microcavity array according to the electric signal.

Optionally, the computer is specifically configured to:

when the rotary displacement device rotates, acquiring each-order axial mode characteristic parameter and corresponding angular displacement of the resonance signal;

selecting the first path of light wave signal and the second path of light wave signal according to the switching signal by taking the light wave signals of which all even-order axial modes of the resonance spectrum corresponding to the resonance signal disappear as the switching signal to obtain periodically reproduced resonance signals;

and establishing a mapping relation between each-order axial mode characteristic parameter of the resonance signal and the angular displacement, and obtaining the angular displacement according to the resonance signal based on the mapping relation.

Optionally, the double-coupled waveguide is: micro-nano tapered optical fiber.

Optionally, the axial arc length and the effective radius variation of each SNAP-structure microcavity in the dual-SNAP-structure microcavity array are the same.

Optionally, the longitudinal cross-sectional shape of the SNAP-structure microcavity is parabolic.

Optionally, a first coupling waveguide and a second coupling waveguide in the dual-coupling waveguide are arranged in parallel, and an included angle between the first coupling waveguide and the second coupling waveguide along the angular displacement direction is: (N +0.5) times of the included angle corresponding to the axial arc length of the SNAP structure microcavity, wherein N is a positive integer.

Optionally, the axial arc lengths of the connecting fibers between the SNAP-structure micro-cavity and the adjacent SNAP-structure micro-cavity are equal.

Optionally, a first SNAP structure microcavity array and a second SNAP structure microcavity array in the dual SNAP structure microcavity array are parallel to each other, and the SNAP structure microcavity on the first SNAP structure microcavity array is aligned with the connection fiber on the second SNAP structure microcavity array.

Optionally, the axial length of the SNAP structure microcavity is 0.5-1.5 mm, and the range of the effective radius variation is as follows: 10 to 100 nm.

The second aspect of the present application provides an angular displacement sensing method based on a dual SNAP structure microcavity array, which is applied to the angular displacement sensing system based on the dual SNAP structure microcavity array of the first aspect, and the method includes:

the tunable laser generates two paths of laser with continuous and tunable wavelengths and inputs the two paths of laser into the polarization controller;

the polarization controller adjusts the polarization state of the laser light wave to obtain a polarized light wave, and the polarized light wave is input into the double-coupling waveguide;

the double-coupling waveguide is used for enabling the polarized light waves to form an evanescent field to be coupled into each SNAP structure microcavity in the double-SNAP structure microcavity array to generate resonance, and inputting the first path of light wave signals and the second path of light wave signals to the photoelectric detector;

the photoelectric detector converts the first path of light wave signal and the second path of light wave signal into electric signals, and the electric signals containing resonance signals are input into a computer;

and the computer acquires the relative rotation angular displacement between the double-coupling waveguide and the double SNAP structure microcavity array according to the electric signal.

The application provides an angle displacement sensing system based on two SNAP structure microcavity arrays, includes: the device comprises a tunable laser, a polarization controller, a double-coupling waveguide, a double SNAP structure microcavity array, a rotary displacement device, a photoelectric detector and a computer. The principle is as follows:

according to the coupling and resonance principle, the coupling position of the coupling waveguide and the SNAP structure microcavity determines the characteristic parameters of each-order axial mode generated by the optical wave at the position. For the coupling unit composed of a single coupling waveguide and a single SNAP structure microcavity, when the angular displacement is changed, the characteristic parameters (Q value or transmittance) of the coupled and output light wave signals are correspondingly changed, and the angular displacement sensing target with high precision and wide range can be realized by comprehensively utilizing the change rule of the characteristic parameters of the multi-order axial mode. However, because the SNAP structure is axially symmetrical about the center, a single coupling unit can only measure angular displacement corresponding to 1/2 times of the axial arc length of the SNAP structure. Therefore, two SNAP structure microcavity arrays can be prepared on the optical fiber through a certain processing method, wherein the interval between the two SNAP structures is equal to the axial arc length of the SNAP structures, and the double-coupling unit is formed by matching the two SNAP structures with double-coupling waveguides. The coupling position of the double SNAP structure microcavity array and the double coupling waveguides is changed through the rotary displacement device, the light wave signals output by the two paths of waveguides are correspondingly changed, the light wave signals output by the two coupling waveguides are alternately selected, an asymmetric periodic resonance signal is obtained, and high-precision measurement of wide-range angular displacement can be realized after the asymmetric periodic resonance signal is processed by a computer.

Compared with the prior art, the embodiment of the application has the advantages that:

1. the angular displacement sensing scheme based on the double SNAP structure microcavity array can realize submicron-level precision and wide-range angular displacement measurement, and overcomes the defect that a single coupling unit cannot realize wide-range angular displacement measurement.

2. The double SNAP structure microcavity array keeps contact with the coupling waveguide all the time in the working process, and the weak electrostatic force between the double SNAP structure microcavity array and the coupling waveguide provides stability for the system, so that the whole system has better anti-vibration interference capability. The system is easy to miniaturize, simple to manufacture and low in cost, and is suitable for measurement occasions of small angles.

3. The scheme for realizing angular displacement sensing based on multi-order axial resonance mode combined calculation in the application can homogenize system measurement errors and has strong anti-noise signal interference capability.

Drawings

In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic structural diagram of an angular displacement sensing system based on a microcavity array with a dual SNAP structure according to an embodiment of the present disclosure;

fig. 2 is a schematic view of an assembly of a microcavity array with a dual SNAP structure and a dual-coupling waveguide provided in an embodiment of the present application;

FIG. 3 is a schematic diagram illustrating Q value calculation of a resonance spectrum according to an embodiment of the present application;

fig. 4a and fig. 4b are graphs respectively illustrating Q values of the first 8-order axial resonant mode in the output resonant spectrum of the double-coupled waveguide according to the embodiment of the present application as a function of axial displacement of the microcavity of the SNAP structure.

Reference numbers: 1. a tunable laser; 2. a polarization controller; 3. a double-coupled waveguide; 4. a microcavity array with a double SNAP structure; 5. a rotary displacement device; 6. a photodetector; 7. and (4) a computer.

Detailed Description

The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

Referring to fig. 1, fig. 1 is a schematic structural diagram of an angular displacement sensing system based on a microcavity array with a dual SNAP structure according to an embodiment of the present disclosure.

The device comprises a tunable laser 1, a polarization controller 2, a double-coupling waveguide 3, a double SNAP structure microcavity array 4, a rotary displacement device 5, a photoelectric detector 6 and a computer 7.

The output end of the tunable laser 1 is connected with the input end of the polarization controller 2, the output end of the polarization controller 2 is connected with the input end of the double-coupling waveguide 3, the output end of the double-coupling waveguide 3 is connected with the input end of the photoelectric detector 6, and the output end of the photoelectric detector 6 is connected with the computer 7.

The double-SNAP structure microcavity array 4 is fixed on the rotary displacement device 5, and the double-coupling waveguide 3 is always kept in contact with the double-SNAP structure microcavity array 4 during working.

The tunable laser 1 is used for generating two paths of laser with continuous and tunable wavelengths and inputting the two paths of laser into the polarization controller 2;

the polarization controller 2 is used for adjusting the polarization state of the laser light wave to obtain a polarized light wave, and inputting the polarized light wave into the double-coupling waveguide 3;

the double-coupling waveguide 3 is used for enabling the polarized light waves to form an evanescent field to be coupled into each SNAP structure microcavity in the double-SNAP structure microcavity array 4 to generate resonance, and inputting the first path of light wave signals and the second path of light wave signals to the photoelectric detector 6;

the photoelectric detector 6 is used for converting the first path of light wave signal and the second path of light wave signal into electric signals and inputting the electric signals containing resonance signals into the computer 7;

and the computer 7 is used for acquiring the relative rotation angular displacement between the double-coupling waveguide 3 and the double SNAP structure microcavity array 4 according to the electric signals.

It should be noted that, when the system works, the rotary displacement device 5 is used to change the coupling position of the double-coupling waveguide 3 and the double-SNAP structure microcavity array 4 to change the coupling strength of each order of axial mode, and the data output by the photodetector 6 is processed by the computer 7 to obtain the angular displacement.

In this embodiment, the working wavelength of the tunable laser 1 is around 1550nm, and the line width is 300 kHz; the double SNAP structure micro-cavity array 4 is obtained by carbon dioxide laser processing, the number of the array is 4, the axial length of a single micro-cavity is about 400 mu m, and the length of a connecting optical fiber between two SNAP structure micro-cavities is equal to that of the connecting optical fiber. In the working process of the system, the double-coupling waveguide 3 and the double SNAP structure microcavity array 4 are always kept in contact, so that the stability of the coupling system is improved.

Two paths of laser emitted from the tunable laser 1 enter the double SNAP structure microcavity array 4 through the double-coupling waveguide 3, and the light waves meeting the resonance condition form resonance in the microcavity and are bound. Because the characteristic parameters (Q value or transmittance) of the resonant mode are influenced by the coupling condition (namely the microcavity coupling position), when the rotary displacement device 5 makes the microcavity array 4 with the double SNAP structure generate angular displacement relative to the double coupling waveguide 3, the characteristic parameters of each axial mode in the light wave signals output by the two coupling units change, and the high-precision sensing of the diagonal displacement of the system is realized by utilizing the mapping relation between the characteristic parameters of each axial mode and the angular displacement. Under the condition that the processing quality of the double SNAP structure microcavity array 4 is guaranteed, the resolution and the measuring range of the angular displacement sensing system are determined by the field distribution characteristics of each mode and the number of the microcavity arrays. By increasing the number of SNAP structures in the microcavity array and the axial length of the SNAP structures, the problem that the prior art cannot realize large-range and high-precision angular displacement measurement is solved.

Further, in an alternative embodiment, the tunable laser 1 has an operating wavelength around 1550nm with a linewidth of 300 kHz; the single SNAP structure microcavity on the double SNAP structure microcavity array 4 is obtained by arc discharge machining, the axial length of the single SNAP structure microcavity is about 300 mu m, the single SNAP structure microcavity is radially in a Gaussian curve shape, the maximum radius change is about 15nm, and the array number is 40.

Further, in an alternative embodiment, the tunable laser 1 has an operating wavelength around 1550nm with a linewidth of 300 kHz; the single micro-cavity on the double SNAP structure micro-cavity array 4 is obtained by ultraviolet laser processing, the axial length of the micro-cavity is about 400 mu m, the radial direction of the micro-cavity is in a trapezoid-like shape, the maximum radius change is about 10nm, and the array number is 20.

Fig. 3 is a schematic diagram showing the calculation of the Q value of the resonance spectrum in the present embodiment. As shown in fig. 3, the difference between the wavelengths corresponding to the transmittance 1/2 is called the full width at half maximum, the wavelength corresponding to the resonance valley is called the resonance center wavelength, and the Q value is the quotient of the resonance center wavelength and the full width at half maximum.

Fig. 4(a) and (b) are graphs showing the relationship between the Q value of the first 8-order axial mode in the resonance spectrum corresponding to the optical wave signal output by the double-coupled waveguide 3 according to the present application and the axial displacement of the microcavity of the SNAP structure. According to the microcavity coupling theory, the field distribution of each axial resonance mode determines the change characteristic of the Q value or transmittance of each axial resonance mode along with the coupling position. As can be seen from fig. 4, the Q values of the resonant modes are different at different coupling positions and have a certain regularity. It can be seen that the number of the dual SNAP microcavity arrays 4 determines the range of the sensing system, and the distance between two nodes of the mode field and the variation range of the characteristic parameter determine the resolution of the sensing system. The large-range displacement sensing can be realized by comprehensively utilizing the change rule of the characteristic parameters of the axial modes of all the steps.

In one embodiment, the computer of the present application is specifically configured to:

when the rotary displacement device rotates, acquiring each-order axial mode characteristic parameter and corresponding angular displacement of the resonance signal;

selecting a first path of light wave signal and a second path of light wave signal according to the switching signal by taking the light wave signals of which all even-order axial modes of the resonance spectrum corresponding to the resonance signal disappear as the switching signal to obtain periodically reproduced resonance signals;

and establishing a mapping relation between each-order axial mode characteristic parameter of the resonance signal and the angular displacement, and obtaining the angular displacement according to the resonance signal based on the mapping relation.

It should be noted that, when the rotary displacement device rotates directionally, the coupling position of the double-coupling waveguide and the double-SNAP structure microcavity array changes, which causes the Q value and transmittance of each axial mode in the resonance spectrum to change, and a sensing model between the characteristic parameter (Q value or transmittance) of each axial mode and the angular displacement of the resonance spectrum is established by using the corresponding relationship between the Q value or transmittance of each axial mode and the angular displacement, and based on this mapping relationship, a single coupling unit can measure the angular displacement in the length measuring range of the SNAP structure of 1/2. And then taking the light wave signals with all even-order axial modes disappeared in the resonance signals as switching signals, obtaining synthesized periodically recurring sensing signals by alternately selecting the light wave signals output from the double-coupling waveguide, and realizing the large-range angular displacement sensing function after the sensing signals are processed by a computer.

In an alternative embodiment, the double-coupled waveguide 3 of the present application is: micro-nano tapered optical fiber.

It should be noted that, in addition to the micro-nano tapered optical fiber, the double-coupling waveguide may also be a coupling prism, an integrated optical waveguide, a ground tilt optical fiber, or a fiber grating. And are not limited herein.

The micro-nano tapered optical fiber is obtained by drawing a single-mode optical fiber through oxyhydrogen flame; the polished angled optical fiber is obtained by high precision polishing of the end face of a conventional optical fiber.

In an alternative embodiment, the axial length and the effective radius variation of each SNAP-structure microcavity in the dual SNAP-structure microcavity array 3 of the present application are the same.

It should be noted that each SNAP structure on the double SNAP structure microcavity array is a whispering gallery microcavity, and each SNAP structure has the same axial length and effective radius variation.

In an alternative embodiment, the longitudinal cross-sectional shape of the SNAP-structure microcavity of the present application is parabolic.

It should be noted that the longitudinal cross-sectional shape of the SNAP-structure microcavity, instead of being parabolic, may be gaussian or trapezoidal. And are not limited herein.

In an alternative embodiment, the first coupling waveguide and the second coupling waveguide in the double coupling waveguide 3 of the present application are disposed in parallel, and the included angle between the first coupling waveguide and the second coupling waveguide along the angular displacement direction is: (N +0.5) times of the included angle corresponding to the axial arc length of the SNAP structure microcavity, wherein N is a positive integer.

Referring to fig. 2, fig. 2 is a schematic view illustrating an assembly of a microcavity array with a dual SNAP structure and a dual-coupling waveguide according to an embodiment of the present disclosure.

It should be noted that, the first coupling waveguide and the second coupling waveguide in the double-coupling waveguide 3 of the present application are arranged in parallel, so as to avoid that the corresponding relationship between the characteristic parameter and the displacement is damaged due to the symmetry of the SNAP structure and the measurement result error is caused by the mutual influence between the two coupling waveguides, an included angle between the two coupling waveguides along the angular displacement direction is set to be (N +0.5) times an included angle corresponding to the length of the SNAP structure axis, N is a positive integer, and meanwhile, the two coupling waveguides are also respectively kept in contact with the SNAP structure microcavity. By setting the distance between the two coupling waveguides, the light wave signals output by the two coupling waveguides alternately reappear with the angle corresponding to the axial length of the half SNAP structure as a period, and a proper switching signal is easy to find.

In an alternative embodiment, the axial arc lengths of the connecting fibers between the SNAP-structure microcavity and an adjacent SNAP-structure microcavity of the present application are equal.

It can be understood that the axial arc lengths of the SNAP-structure micro-cavity on the SNAP-structure micro-cavity array and the connecting optical fiber between two adjacent SNAP-structure micro-cavities of the SNAP-structure micro-cavity are equal.

In an optional embodiment, in the dual SNAP-structure microcavity array of the present application, the first SNAP-structure microcavity array and the second SNAP-structure microcavity array are parallel to each other, and the SNAP-structure microcavity on the first SNAP-structure microcavity array is aligned with the connection fiber on the second SNAP-structure microcavity array.

It will be appreciated that the two arrays of the microcavity array of dual SNAP structures are positioned in staggered, parallel relationship, wherein the connecting fibers between the SNAP structures in one array are positioned in alignment with the SNAP structures in the other array, and the arc lengths formed by the axes of the two arrays are equal, as shown in fig. 2.

In an optional embodiment, the axial length of the SNAP-structure microcavity is 0.5-1.5 mm, and the effective radius transformation amount ranges from: 10 to 100 nm.

It should be noted that the double SNAP-structure microcavity array is obtained by using arc discharge, carbon dioxide laser or ultraviolet light to act on the optical fiber, and the number of the array can be determined according to actual needs without limitation. And the length of the SNAP structure is 0.5-1.5 mm, and the effective radius variation of the SNAP structure microcavity is within 10-100 nm.

The embodiment of the application provides an angular displacement sensing system based on a double-SNAP structure microcavity array, which is based on the mode field distribution and mode spectrum structure characteristics of an SNAP structure microcavity, utilizes the characteristic that the change of displacement can cause the change of characteristic parameters of each axial mode of the SNAP structure microcavity, and realizes the sensing of angular displacement corresponding to 1/2 times of the axial length of the SNAP structure by measuring and processing the Q value of each axial mode in a resonance signal; the double-coupling waveguide 3 is arranged, the included angle between the two coupling waveguides along the angular displacement direction is (N +0.5) times of the angle corresponding to the arc length of the axis of the SNAP structure, wherein N is a positive integer, the two coupling waveguides and different SNAP structures respectively form two coupling units, the central coupling position of the SNAP structure microcavity is used as a switching point to realize the mutual switching of two resonance signals, and the large-range angular displacement measurement function is realized.

The above is an embodiment of an angular displacement sensing system based on a microcavity array with a dual SNAP structure, and the following is an embodiment of an angular displacement sensing method based on a microcavity array with a dual SNAP structure.

The embodiment of the application also provides an angular displacement sensing method based on the double SNAP structure microcavity array, which is applied to the angular displacement sensing system based on the double SNAP structure microcavity array, and the method comprises the following steps:

the tunable laser generates two paths of laser with continuous and tunable wavelengths and inputs the two paths of laser into the polarization controller.

The polarization controller adjusts the polarization state of the laser light wave to obtain a polarized light wave, and the polarized light wave is input into the double-coupling waveguide.

The double coupling waveguide enables the polarized light waves to form an evanescent field to be coupled into each SNAP structure microcavity in the double SNAP structure microcavity array to generate resonance, and the first path of light wave signal and the second path of light wave signal are input into the photoelectric detector.

The photoelectric detector converts the first path of light wave signal and the second path of light wave signal into electric signals and inputs the electric signals containing resonance signals into a computer;

the computer obtains the angular displacement according to the electrical signal.

It can be clearly understood by those skilled in the art that, for convenience and brevity of description, the above-described method may refer to the corresponding process in the foregoing system embodiment, and is not described herein again.

It should be understood that in the present application, "at least one" means one or more, "a plurality" means two or more. "and/or" for describing an association relationship of associated objects, indicating that there may be three relationships, e.g., "a and/or B" may indicate: only A, only B and both A and B are present, wherein A and B may be singular or plural. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship. "at least one of the following" or similar expressions refer to any combination of these items, including any combination of single item(s) or plural items. For example, at least one (one) of a, b, or c, may represent: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", wherein a, b, c may be single or plural.

Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.