阅读说明：本技术 一种磁控拉单晶超导磁体线圈及超导磁体装置 (Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device ) 是由 刘伟 李超 李勇 马鹏 葛正福 兰贤辉 张弛 李猛 张文涛 韩志晨 周涛 冯勇 于 2021-11-08 设计创作，主要内容包括：本发明公开了一种磁控拉单晶超导磁体线圈及超导磁体装置,磁控拉单晶超导磁体线圈包括两个线圈组,两个线圈组相对设置,且每个线圈组均为弧形环结构,线圈组由至少两个环状的子线圈组成,至少两个子线圈依次并排设置。本发明实施例在保留马鞍形线圈磁场利用率高、相同磁场强度需求情况下超导线使用量少等优点的基础上,采用多线圈结构降低单个线圈的绕线难度,利于提高生产效率。同时多线圈结构在强大的电磁力作用下受力更为合理,缓解了线圈在运行过程中失超的风险。(The invention discloses a magnetic control single crystal pulling superconducting magnet coil and a superconducting magnet device. On the basis of keeping the advantages of high utilization rate of the saddle-shaped coil magnetic field, low using amount of the superconducting wire under the condition of the same magnetic field intensity requirement and the like, the embodiment of the invention adopts a multi-coil structure to reduce the winding difficulty of a single coil, thereby being beneficial to improving the production efficiency. Meanwhile, the multi-coil structure is more reasonable in stress under the action of strong electromagnetic force, and the risk of quenching of the coil in the operation process is relieved.)

1. A magnetic control single crystal pulling superconducting magnet coil is characterized by comprising two coil groups, wherein the two coil groups are oppositely arranged, and each coil group is an arc-shaped ring structure;

the coil group consists of at least two annular sub-coils, and the at least two sub-coils are sequentially arranged side by side.

2. A magnetron pulled single crystal superconducting magnet coil as claimed in claim 1 wherein the current flow direction between two adjacent sub-coils in the coil assembly is opposite.

3. The magnetron pulled single crystal superconducting magnet coil of claim 1, wherein at least two sub-coils in the coil assembly are the same in shape and size.

4. A magnetron pulled single crystal superconducting magnet coil as claimed in claim 1 wherein at least two of said sub-coils are arranged side by side in series horizontally.

5. A magnetron pulled single crystal superconducting magnet coil as claimed in claim 1 wherein at least two of said sub-coils are arranged side by side in series in the vertical direction.

6. The magnetron pulled single crystal superconducting magnet coil according to claim 1, wherein the number of the at least two sub-coils is at least four, and at least two of the at least four sub-coils are arranged side by side in sequence along the horizontal direction to form a sub-coil row;

the other at least two sub-coils are sequentially arranged side by side along the vertical direction to form another sub-coil row, and the two sub-coil rows are arranged side by side along the vertical direction to form the coil group.

7. A superconducting magnet apparatus comprising the magnetron-pulled single crystal superconducting magnet coil according to any one of claims 1 to 6.

Technical Field

The invention relates to the technical field of semiconductor production equipment, in particular to a magnetic control single crystal pulling superconducting magnet coil and a superconducting magnet device.

Background

The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety.

According to the research and study of the existing documents, the regional and monopolized property of the processing and preparation of the single crystal silicon in the field of the superconducting magnet for magnetically controlled pulling of the single crystal leads to that the prior foreign development units are mainly enterprises such as Sumitomo, Toshiba and Japan superconducting technology company (Jastec), and the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the technology are coming to the fore over the years, and related patents such as CN103106994A, CN110136915A and the like have been applied for protection in recent years. However, most of the prior magnets have the following problems, such as 4 more coils or even more coils of the magnet, complex structure and low magnetic field utilization rate, and particularly, the magnetic field utilization rate is low due to the problem that the magnetic fields between the coils of the 4 coils and the above structures are mutually offset, so that the use amount of the superconducting wire is large and the cost is high under the same magnetic field requirement. However, CN210535437U and CN210429450U, which both use saddle coils as shown in fig. 1 and 2, and the coils include a first saddle coil 1 and a second saddle coil 2, can avoid the above problems well, and the utilization rate of the magnet is improved significantly, and under the condition of generating the same central magnetic field B, the amount of superconducting wire is less than 1/2 of the conventional 4 coils, so the production cost is greatly reduced compared with that of the conventional magnetron single crystal pulling superconducting magnet.

However, there is a disadvantage in the saddle-shaped coil, because the magnet diameter of the magnetic control pulling single crystal is about 2m, and the coil is a saddle-shaped curved coil, the winding of the saddle-shaped coil is difficult and time-consuming, which results in that the production period and cost of producing saddle-shaped magnetic control pulling single crystal magnet on a large scale are limited by the winding effect of the coil. Therefore, on the basis of keeping the high utilization rate of the saddle-shaped coil magnetic field, the difficulty of coil winding is further simplified, and the method becomes the key for reducing the cost and improving the efficiency.

Disclosure of Invention

The embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet coil and a superconducting magnet device, which are used for solving the problems in the prior art.

On one hand, the embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet coil which comprises two coil groups, wherein the two coil groups are oppositely arranged, and each coil group is an arc-shaped ring structure;

the coil group consists of at least two annular sub-coils, and the at least two sub-coils are sequentially arranged side by side.

In one possible implementation, the current direction between two adjacent sub-coils in the coil set is opposite.

In one possible implementation, the shape and size of at least two sub-coils in the coil assembly are the same.

In one possible embodiment, at least two partial coils are arranged next to one another in the horizontal direction.

In one possible embodiment, at least two partial coils are arranged next to one another in the vertical direction.

In one possible implementation manner, the number of the at least two sub-coils is at least four, and at least two of the at least four sub-coils are sequentially arranged side by side along the horizontal direction to form one sub-coil row; the other at least two sub-coils are sequentially arranged side by side along the vertical direction to form another sub-coil row, and the two sub-coil rows are arranged side by side along the vertical direction to form a coil group.

On the other hand, the embodiment of the invention provides a superconducting magnet device, which comprises the magnetic control single crystal pulling superconducting magnet coil.

The magnetic control single crystal pulling superconducting magnet coil and the superconducting magnet device have the following advantages:

on the basis of retaining advantages such as the messenger uses the volume less under the high, the same magnetic field intensity demand condition of shape of a saddle coil magnetic field utilization ratio, adopt many coil structures to reduce the wire winding degree of difficulty of single coil, do benefit to and improve production efficiency. Meanwhile, the multi-coil structure is more reasonable in stress under the action of strong electromagnetic force, and the risk of quenching of the coil in the operation process is relieved. In conclusion, the invention can improve the batch production efficiency of the magnetic control pulling single crystal magnet, reduce the production and maintenance cost, and simultaneously relieve the risk of magnet quench, thereby further influencing the important realization problem of the growth quality of the single crystal.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic diagram of a saddle coil of the prior art;

FIG. 2 is a schematic view of the magnetic field of a saddle coil of the prior art;

fig. 3 is a schematic perspective view of a coil according to an embodiment of the present invention;

fig. 4 is a schematic top view of a coil according to an embodiment of the present invention.

Description of reference numerals: 1-first saddle coil, 2-second saddle coil, 3-first sub-coil, 4-second sub-coil, 5-third sub-coil, 6-fourth sub-coil, 7-fifth sub-coil, 8-sixth sub-coil.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 3-4 are schematic structural diagrams of a magnetron-pulled single crystal superconducting magnet coil according to an embodiment of the present invention. The embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet coil which comprises two coil groups, wherein the two coil groups are oppositely arranged, and each coil group is an arc-shaped ring structure; the coil group consists of at least two annular sub-coils, and the at least two sub-coils are sequentially arranged side by side.

Illustratively, the coil assembly in the embodiment of the invention adopts a multi-coil structure, the existing saddle-shaped coil structure is divided into a plurality of sub-coils, the advantages of high magnetic field utilization rate, less wires with the same magnetic field strength B, low leakage magnetic field and the like of the magnetic control single crystal pulling magnet manufactured by the saddle-shaped coil relative to the traditional solenoid coil are reserved, the coil assembly is in an arc shape as a whole, the occupied space size is smaller than that of the traditional solenoid coil, the occupied space position of the magnet is smaller, and the magnet is more compact finally. In addition, under the condition of generating the same central magnetic field B intensity, the magnet with the multi-coil structure has smaller magnetic leakage, has smaller influence on surrounding electromagnetic equipment and people, and greatly reduces the iron yoke material required for magnetic leakage protection if magnetic shielding is required.

Furthermore, the number, size and shape of the sub-coils in the coil group can be changed more flexibly according to the requirement of the magnetic control pulling single crystal on the magnetic field, and the requirement of final magnetic field distribution and strength is met. Meanwhile, the single sub-coil is relatively smaller, so that the test at the early stage is convenient to carry out, and the quality of the coil is ensured.

In addition, the multi-coil structure adopted by the embodiment of the invention structurally segments the upper long arc edge and the lower long arc edge, and the vertical edges of the multi-coil are used as reinforcing structures of the arc segments, so that the coils are more reasonable in stress. When the coil is electrified and excited, the problem of quench of the superconducting coil caused by large stress and strain of the superconducting coil due to strong electromagnetic force is solved, so that the magnetic control single crystal pulling magnet manufactured by multiple coils can run more stably and reliably. Meanwhile, the multiple-coil structure adopted by the embodiment of the invention is convenient for quench protection, reduces the risk of coil burnout caused by accidental quench of the magnet, and is more convenient for coil replacement and lower in maintenance cost as in the case of coil burnout.

The embodiment of the invention adopts a multi-coil structure to convert the space curved surface structure of the existing saddle-shaped coil into an approximate plane structure of the multi-coil, thereby greatly reducing the winding difficulty of the saddle-shaped coil, having low production cost and being convenient for large-scale batch production.

In one possible embodiment, the current direction between two adjacent sub-coils in the coil set is opposite.

Illustratively, when a coil assembly composed of a plurality of sub-coils is connected in series in the embodiment of the present invention, and then current is applied as shown in fig. 3, since the operating currents of vertically adjacent sub-coils are opposite, the magnetic fields cancel each other out, and finally an operating current similar to that shown in fig. 1 is formed in the coil assembly, so that the electromagnetic field finally generated by the multi-coil structure in the embodiment of the present invention will be consistent with that of the saddle-shaped coil.

In a possible embodiment, at least two sub-coils of the coil set are identical in shape and size.

Illustratively, the central angle of the conventional saddle coil is θ, and the number of the sub-coils in each coil set is three, as shown in fig. 3, wherein one coil set is composed of a first sub-coil 3, a second sub-coil 4 and a third sub-coil 5 which are sequentially arranged side by side, and the other coil set is composed of a fourth sub-coil 6, a fifth sub-coil 7 and a sixth sub-coil 8 which are sequentially arranged side by side. The first sub-coil 3, the second sub-coil 4 and the third sub-coil 5 are identical in shape and size, and the central angles of the first sub-coil 3, the second sub-coil 4 and the third sub-coil 5 are all theta/3, so that the central angle of a coil group consisting of the first sub-coil 3, the second sub-coil 4 and the third sub-coil 5 is still theta.

According to the embodiment of the invention, the central angle theta of the single saddle-shaped coil is divided into a plurality of parts, so that the radian of the single sub-coil is relatively reduced, the winding difficulty of the single sub-coil is approximate to that of a planar coil, the winding difficulty is reduced, the coil can be wound by adopting a traditional winding machine, and the problem of high winding difficulty of the saddle-shaped coil is finally avoided.

In one possible embodiment, at least two sub-coils are arranged side by side in the horizontal direction.

Exemplarily, a coil assembly arranged side by side in the horizontal direction is adopted as shown in fig. 3, wherein the number of sub-coils in the coil assembly is not limited to three in the embodiment of the present invention, and can be adjusted according to actual needs.

In a possible embodiment, at least two sub-coils are arranged side by side in the vertical direction.

Illustratively, turning the sub-coils in the coil assembly of fig. 3 by 90 degrees results in a coil assembly that is arranged side by side in the vertical direction.

In a possible embodiment, the number of the at least two sub-coils is at least four, and at least two of the at least four sub-coils are arranged side by side in sequence along the horizontal direction to form a sub-coil row; the other at least two sub-coils are sequentially arranged side by side along the vertical direction to form another sub-coil row, and the two sub-coil rows are arranged side by side along the vertical direction to form a coil group.

Illustratively, the coil assembly obtained by adopting the above arrangement mode comprises two sub-coil rows which are arranged side by side, but the invention is not to be construed as limiting the embodiment of the invention, and the number of the sub-coil rows can be changed according to the actual requirement. Meanwhile, for the sub-coils arranged in both the horizontal direction and the vertical direction, it is necessary to ensure that the current directions in the adjacent sub-coils at any position are opposite.

The embodiment of the invention also provides a superconducting magnet device which comprises the magnetic control single crystal pulling superconducting magnet coil.

In addition to the above-mentioned magnetic control single crystal pulling superconducting magnet coil, the superconducting magnet device further includes components such as a dewar and a cold shield, and the connection mode of the magnetic control single crystal pulling superconducting magnet coil and other components and the structures of other components are the prior art, and detailed description is not given in the embodiments of the present invention.

While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.