阅读说明：本技术 一种用贵金属陶瓷薄膜制作三面金属化陶瓷热沉的生产工艺 (Production process for manufacturing three-side metallized ceramic heat sink by using precious metal ceramic film ) 是由 陈其林 胡彩霞 于 2021-09-29 设计创作，主要内容包括：本发明属于陶瓷热沉加工生产的技术领域,特别涉及一种用贵金属陶瓷薄膜制作三面金属化陶瓷热沉的生产工艺。在光电通信领域,用于装配光电器件、激光器件的单面金属化的陶瓷热沉已经有比较长的生产、应用历史,但是,随着通信技术的进步和器件使用频率的提高,常用的单面金属化陶瓷热沉已经不能够充分满足通信技术发展的需求,研究开发侧面金属化多面金属化的陶瓷热沉产品势在必行。在研究多面金属化陶瓷热沉的过程中,发明人继承了传统的贵金属陶瓷薄膜的加工生产工艺,开发了切割陶瓷条、粘接陶瓷条成平面、用金刚砂磨抛粘接的陶瓷条平面、在磨抛后的陶瓷条平面上光刻并进行多层金属化镀膜加工等一整套的加工工序,最终形成了本发明专利一种用贵金属陶瓷薄膜制作三面金属化陶瓷热沉的生产工艺。(The invention belongs to the technical field of ceramic heat sink processing production, and particularly relates to a production process for manufacturing a three-side metallized ceramic heat sink by using a precious metal ceramic film. In the field of photoelectric communication, single-sided metalized ceramic heat sinks for assembling photoelectric devices and laser devices have a relatively long production and application history, but with the progress of communication technology and the improvement of the use frequency of the devices, the conventional single-sided metalized ceramic heat sinks cannot fully meet the development requirements of the communication technology, and the research and development of ceramic heat sink products with metalized sides and metalized sides is imperative. In the process of researching the multi-surface metallized ceramic heat sink, the inventor inherits the traditional processing and production process of the noble metal ceramic film, develops a whole set of processing procedures of cutting ceramic strips, bonding the ceramic strips into planes, polishing the bonded ceramic strip planes by using carborundum, photoetching the polished ceramic strip planes, carrying out multi-layer metallized film coating processing and the like, and finally forms the production process for manufacturing the three-surface metallized ceramic heat sink by using the noble metal ceramic film.)

1. The invention relates to a production process technology for manufacturing a ceramic heat sink with three metalized surfaces by using a noble metal ceramic film, which is characterized in that a multilayer metalized film coating process is applied to a ceramic substrate with the thickness of 1mm or less to manufacture a noble metal film with a multilayer structure and the total thickness of 3 microns; then, manufacturing a designed metal film pattern on the noble metal ceramic film substrate by a photoetching process; cutting the noble metal ceramic film substrate with the metal film pattern into designed ceramic strips by adopting a machining mode; selecting one side surface of a ceramic strip, bonding the ceramic strip into a designed ceramic strip bonding plane by using specific industrial glue, and preparing the ceramic strip bonding plane of the first side surface by using a diamond grinding and polishing process; carrying out second photoetching on the flat bonding plane to obtain a designed photoresist pattern; secondly, a multilayer metallization coating process is applied to manufacture a multilayer-structured noble metal film with the total thickness of 3 microns on the smooth bonding plane with the photoresist pattern; the flat bonding plane on which the metallized film is made is detached and restored into a ceramic strip with two metallized surfaces with the same width, the other side surface of the ceramic strip is bonded into a designed ceramic strip bonding plane again, and a ceramic strip bonding plane on the second side surface is prepared by a carborundum grinding and polishing process; carrying out third photoetching on the new flat ceramic strip bonding plane to obtain a designed photoresist pattern; thirdly, a multilayer metallized coating process is applied to manufacture a multilayer noble metal film with the total thickness of 3 microns on the smooth ceramic strip bonding plane with the photoresist pattern; and finally, cutting the ceramic strip with the three-sided metalized film into designed line segments by adopting a machining mode, decomposing the line segments and cleaning to obtain the three-sided metalized ceramic heat sink made of the noble metal ceramic film.

2. The process for producing a three-sided metallized ceramic heat sink with a noble metal ceramic film as claimed in claim 1, which is particularly suitable for a ceramic substrate having a thickness of 1mm or less, wherein the ceramic substrate may be alumina or aluminum nitride.

3. According to the claim 1 of the technology for manufacturing ceramic heat sink with three metallized surfaces by precious metal ceramic film, the adopted multi-layer metallized coating process equipment can be electron beam evaporation coating system or magnetron sputtering coating system, but on the ceramic strip bonding plane prepared by diamond sand polishing process, when preparing metallized film with photoresist pattern, magnetron sputtering coating system is necessary.

4. The process for producing a three-sided metallized ceramic heat sink using a noble metal ceramic film as claimed in claim 1, wherein the multilayer noble metal produced by the multilayer metallized coating process equipment can be a two-layer structure or a three-layer structure, but the outermost layer of metal must be pure gold, and the thickness thereof cannot be less than 2 μm.

5. The process for manufacturing ceramic heat sink with three metallized surfaces by using noble metal ceramic film as claimed in claim 1, wherein the machining mode is grinding wheel dicing machine or laser cutting machine.

6. The process for manufacturing a three-sided metallized ceramic heat sink from a noble metal ceramic film as claimed in claim 1, wherein the photolithography technique used is the lowest-end photolithography technique commonly used in semiconductor microelectronics manufacturing lines.

7. According to the production process technique of the ceramic heat sink with three metallized surfaces made of noble metal ceramic film as claimed in claim 1, the adopted carborundum polishing process must go through two processes of coarse sand polishing and fine sand polishing.

8. According to the production process technology of the ceramic heat sink with three metalized surfaces made of the noble metal ceramic film as claimed in claim 1, the ceramic heat sink with three metalized surfaces with simple figures as exemplified in the invention can be produced, and the ceramic heat sink with three metalized surfaces with complex figures can also be produced; the ceramic heat sink with three metalized surfaces can be produced, and the ceramic heat sink with two metalized surfaces can also be produced; whether the produced pattern is simple or complex, whether the produced heat sink is three-sided metalized or two-sided metalized will be determined by the actual needs of the customer, however, the manufacture of such a side-metalized ceramic heat sink can only be realized by the present invention.

Technical Field

The invention belongs to the technical field of ceramic heat sink processing production, and particularly relates to a production process for manufacturing a three-side metallized ceramic heat sink by using a precious metal ceramic film.

Background

In the field of photoelectric communication, materials such as single-sided metallized ceramic heat sinks and single-sided metallized ceramic gaskets for assembling photoelectric devices and laser devices have long production and application history, corresponding technologies are simple, and the process is mature. However, with the progress of communication technology and the increase of the use frequency, the sizes of a single device and an assembled module are smaller and smaller, so that the packaging space is narrower and narrower, the assembly structure is more and more complex, the commonly used single-sided metalized ceramic heat sink cannot fully meet the requirements of the development of the communication technology, and the research and development of ceramic heat sink products with metalized sides and metalized multifacets are imperative. In the process of researching and developing the multi-face metallized ceramic heat sink, the production process for manufacturing the three-face metallized ceramic heat sink by using the noble metal ceramic film is invented on the basis of inheriting the traditional single-face metallization process technology.

Disclosure of Invention

The production of the ceramic heat sink product with single-sided metallization commonly used at present is carried out on the plane of the precious metal ceramic film substrate. According to the practical application requirements of clients, some substrates are directly cut into the size required by the design by adopting a machining mode, some substrates are etched into a designed metal film pattern by a photoetching process, and then the metal film pattern is cut into a plane rectangular structure by adopting the machining mode, so that the appeal of single-side metallized noble metal ceramic film heat sink is realized. The invention relates to a production process for manufacturing a three-side metallized ceramic heat sink by using a precious metal ceramic film, which develops a whole set of processing procedures of cutting ceramic strips, bonding the ceramic strips into planes, polishing the bonded ceramic strip planes by using carborundum, photoetching the polished ceramic strip planes, carrying out multi-layer metallized film coating processing and the like on the basis of inheriting the traditional processing production of the precious metal ceramic film, and finally forms the production process for manufacturing the three-side metallized ceramic heat sink by using the precious metal ceramic film.

A production process for manufacturing a three-side metallized ceramic heat sink by using a noble metal ceramic film mainly comprises the following process steps: selecting a ceramic substrate with the thickness equal to or less than 1mm, and manufacturing a multilayer precious metal film on one surface of the substrate through a precious metal coating process with a multilayer structure; entering a photoetching process, and etching a metal film pattern meeting the customer requirements by using a photoetching plate; entering a machining cutting procedure, and cutting the ceramic substrate with the etched metal film pattern into ceramic strips with consistent width according to the design requirement; the front surface of the cut ceramic strip is provided with a metal film pattern, the two side surfaces and the front surface form a 90-degree right angle relation, and the metal film patterns manufactured on the two side surfaces are connected with the specific metal edge of the metal film pattern on the front surface according to the design requirement; firstly, selecting and manufacturing the side surface of a first side surface metal film pattern, upwards placing the side surface of the first side surface metal film pattern, and tightly bonding ceramic strips on another ceramic substrate with the same size one by one with the help of a special clamp to obtain a bonding strip plane; in the diamond grinding and polishing process, firstly, grinding the plane of the bonding strip by using diamond mortar with relatively large particles until micro pits appearing when the ceramic strip is bonded cannot be seen, and then, polishing the plane of the bonding strip by using diamond polishing liquid with relatively small particles until a specific metal edge of a front metal film pattern can be clearly seen; the photoetching process is carried out for the second time, the photoresist is used for covering all the areas which do not need to be connected with the specific metal edge of the front metal film pattern, and the pattern areas which need to be connected with the specific metal edge of the front metal film pattern are completely exposed; the adhesive enters a multilayer metallization film coating process for the second time and multilayer metallization film coating on the surface of the plane of the bonding strip is completed; decomposing the plane of the bonding strip which has finished the multi-layer metallized coating into a single ceramic strip; the other side surface of the decomposed ceramic strip faces upwards, and the ceramic strip is tightly bonded on another ceramic substrate with the same size one by one with the help of a special fixture to obtain a new bonding strip plane; entering a carborundum polishing process, polishing the plane of the new bonding strip by using carborundum mortar with thicker particles until micro pits appearing when the ceramic strip is bonded cannot be seen, and then polishing the plane of the new bonding strip by using carborundum polishing liquid with thinner particles until a specific metal edge of the front metal film pattern can be clearly seen; the third time, the photoetching process is carried out, the photoresist is used for covering all the regions which are not required to be connected with the specific metal edge of the front metal film pattern, and the pattern regions which are required to be connected with the specific metal edge of the front metal film pattern are completely exposed; the adhesive enters a multilayer metallization film coating procedure for the third time and finishes the multilayer metallization film coating of the surface of the new bonding strip plane; and entering a machining and cutting procedure, cutting the ceramic strip on the plane of the new bonding strip into a preset length according to the requirements of customers, and then decomposing, cleaning, drying, inspecting by a mirror, packaging and warehousing the plane of the new bonding strip, thereby completely finishing the production process flow of manufacturing the three-sided metallized ceramic heat sink by using the noble metal ceramic film.

Drawings

Fig. 1 is a three-dimensional view of a three-sided metallized ceramic heat sink fabricated in accordance with the fabrication process of the present invention. 1 is a ceramic substrate, 2 is a metal film pattern on the front surface of the substrate, and 3 is a metal film pattern on both side surfaces.

Fig. 2 shows a cermet film substrate on which a multilayer noble metal plating film is completed. 1 is a ceramic substrate, and 2 is a multilayer noble metal thin film.

Fig. 3 is a three-dimensional view of one of ceramic strips having uniform width, which are obtained by a machining and cutting process, of a cermet film substrate. 1 is a ceramic strip after cutting, 2 is a metal film pattern on the front surface of the ceramic strip, and 3 is a 90-degree right-angle relationship between the front surface and two side surfaces of the ceramic strip.

Fig. 4 is a plane of a bonded strip obtained by closely bonding ceramic strips one by one to another ceramic substrate of the same size. 1 is another ceramic substrate with the same size which is newly added, 2 is a ceramic strip which is closely adhered, and 3 is a specific metal edge which is required to be connected with the side metal film pattern for adhering the front metal film pattern on the ceramic strip.

Detailed Description

The production process flow of the three-side metallized ceramic heat sink made of the noble metal ceramic film is carried out according to the following procedure steps.

Firstly, a ceramic substrate equal to or less than 1mm is selected according to the actual needs of customers.

And (3) performing a noble metal coating process for the first time to manufacture a multilayer noble metal film meeting the design requirement, so as to obtain the noble metal ceramic film substrate shown in the figure 2.

And (3) carrying out a photoetching process for the first time, and etching a specially designed metal film pattern on the ceramic film substrate by using a photoetching plate.

The first time, the noble metal ceramic thin film substrate with the metal film pattern photoetched on the front is cut into ceramic strips with consistent width according to the design requirement, and the front surface and the two side surfaces of the ceramic strips form a 90-degree right angle relationship, as shown in fig. 3.

The side face of the first side metal film pattern is selected and made on the ceramic strip and is placed upwards, and the ceramic strip of the selected side is tightly bonded on another ceramic substrate with the same size one by the aid of a special fixture to obtain a bonding strip plane.

The first time, entering the working procedure of grinding and polishing diamond sand, firstly grinding the plane of the bonding strip by using diamond sand slurry with thicker particles until micro pits appearing when the ceramic strip is bonded can not be seen, and then polishing the plane of the bonding strip by using diamond sand polishing solution with thinner particles until a specific metal edge, required to be connected with the side metal film pattern, of the front metal film pattern of the ceramic strip can be clearly seen on the plane of the bonding strip, as shown in figure 4.

And the photoetching process is carried out for the second time, the photoresist is used for completely covering the area which is not required to be connected with the specific metal edge of the front metal film pattern on the ceramic strip, and the area of the side metal film pattern which is required to be connected with the specific metal edge of the front metal film pattern on the ceramic strip is completely exposed.

And secondly, performing a noble metal coating process, and bonding the ceramic strip subjected to the second photoetching process with plane tape glue to manufacture a multilayer noble metal film to obtain a metallized film pattern of the first side surface.

And decomposing, cleaning and drying the bonding plane of the ceramic strip with the finished multilayer precious metal coating by using a chemical solution, thereby obtaining a new ceramic strip with two metallized coatings.

Selecting the side surface without metal film pattern on the other side surface of the decomposed new ceramic strip, placing the side surface upwards, and tightly bonding the ceramic strips with the determined side surfaces one by one on another ceramic substrate with the same size with the help of a special fixture to obtain a new bonding strip plane.

And (3) entering the diamond grinding and polishing process for the second time, and repeating all the work of entering the diamond grinding and polishing process for the first time, so as to obtain a new bonding plane of the ceramic strip similar to that shown in figure 4, wherein the specific metal edge, which is connected with the metal film pattern on the second side, of the front metal film pattern of the ceramic strip can be seen clearly on the plane.

And carrying out the photoetching process for the third time, and repeating the whole work of the photoetching process for the second time, thereby obtaining a new ceramic strip bonding plane with a specific photoresist pattern.

And thirdly, performing a noble metal coating process, and manufacturing a plurality of layers of noble metal films on the new ceramic strip bonding plane subjected to the third photoetching process, thereby obtaining a plurality of layers of metallized film patterns on the second side surface.

And entering a machining and cutting process for the second time, cutting the new ceramic strip bonding plane on which the second side surface multilayer metallized film graph is finished into a preset length according to the requirement of a customer, and then decomposing, cleaning, drying, inspecting with a mirror, packaging and warehousing in a chemical solution to obtain the three-side metallized ceramic heat sink shown in the figure 1.

Thus, the production process flow for manufacturing the three-side metallized ceramic heat sink by using the noble metal ceramic film is completely finished.