阅读说明：本技术 微量液体检测器 (Micro-liquid detector ) 是由 莫皓然 陈世昌 廖家淯 廖鸿信 高中伟 黄启峰 韩永隆 郭俊毅 谢锦文 于 2020-06-22 设计创作，主要内容包括：本案提供一种微量液体检测器,包含检测头、微型液体泵、检测容器及吹气单元。微型液体泵具有出口通道及入口通道,出口通道连接检测头。检测容器连接入口通道,并容置待测液体。吹气单元连接入口通道。微型液体泵开始作动,微型液体泵汲取检测容器内的待测液体由入口通道进入,待测液体通过出口通道后被输送至检测头,最后待测液体由该检测头喷出。当该微型液体泵停止作动,吹气单元将气体导入微型液体泵,以使微型液体泵内所残留的该待测液体由检测头排出。(The present application provides a micro-liquid detector, which includes a detection head, a micro-liquid pump, a detection container, and a blowing unit. The micro liquid pump is provided with an outlet channel and an inlet channel, and the outlet channel is connected with the detection head. The detection container is connected with the inlet channel and contains liquid to be detected. The blowing unit is connected with the inlet channel. The micro liquid pump starts to act, liquid to be detected in the micro liquid pump sucking detection container enters from the inlet channel, the liquid to be detected is conveyed to the detection head after passing through the outlet channel, and finally the liquid to be detected is sprayed out from the detection head. When the micro liquid pump stops operating, the air blowing unit introduces air into the micro liquid pump so as to discharge the liquid to be detected remained in the micro liquid pump through the detection head.)

1. A micro-volume liquid detector, comprising:

a detection head;

a micro liquid pump having an outlet channel and an inlet channel, the outlet channel being connected to the detection head;

a detection container connected with the inlet channel and accommodating a liquid to be detected; and

an air blowing unit connected with the inlet channel;

the micro liquid pump starts to act, the micro liquid pump draws the liquid to be detected in the detection container to enter from the inlet channel, the liquid to be detected is conveyed to the detection head after passing through the outlet channel, and finally the liquid to be detected is sprayed out from the detection head; when the micro liquid pump stops operating, the air blowing unit introduces air into the micro liquid pump so as to discharge the liquid to be detected remained in the micro liquid pump through the detection head.

2. The micro-fluid detector as claimed in claim 1, further comprising a hose connected between the inlet channel, the detection container and the blowing unit.

3. The micro-fluid detector as claimed in claim 1, wherein the detecting head is a needle.

4. The micro-fluid detector as claimed in claim 1, further comprising a detecting unit, wherein the detecting head sputters the fluid to be detected to the detecting unit to detect the fluid to be detected.

5. The micro fluid detector as claimed in claim 4, further comprising a transmission module for transmitting detection information of the detection unit.

6. The micro-fluid detector as claimed in claim 1, wherein the micro-fluid pump comprises:

a valve body having the outlet passage, the inlet passage and a first mating surface, the outlet passage and the inlet passage communicating with an inlet opening and an outlet opening, respectively, on the first mating surface, and the first mating surface having a plurality of mortise slots;

the valve cavity seat is provided with a second assembling surface, a third assembling surface, an inlet valve channel and an outlet valve channel, the inlet valve channel and the outlet valve channel penetrate from the second assembling surface to the third assembling surface, part of the upper part of the third assembling surface is sunken to form a pressure chamber, the pressure chamber is respectively communicated with the inlet valve channel and the outlet valve channel, and the second assembling surface is provided with a plurality of clamping tenons which are correspondingly sleeved in the clamping tenon grooves of the valve body to position the valve cavity seat to be assembled and positioned on the valve body;

a valve diaphragm, which is a flat thin sheet structure and has two penetrating regions, each of which is etched to retain a valve plate with the same thickness, and a plurality of extending supports are arranged around the periphery of the valve plate for elastic support, and a hollow hole is formed between every two adjacent extending supports, so that the valve plate can be convexly extended and deformed by the elastic support of the extending supports to form a valve switch structure by a displacement amount under the stress of the valve plate, and the valve diaphragm is arranged between the valve body and the valve cavity seat, and is provided with a positioning hole corresponding to each tenon position of the valve cavity seat, so that each tenon penetrates through and positions the valve diaphragm, and the valve plates of the two penetrating regions respectively and correspondingly seal the inlet valve channel and the outlet valve channel of the valve cavity seat to form the valve switch structure;

an actuator covering the pressure chamber of the valve cavity seat; and

the cover body is covered on the actuator in a sealing way, and a plurality of locking holes are arranged on the cover body in a penetrating way;

the valve body, the valve cavity seat and the actuator are respectively provided with a plurality of through holes which are correspondingly communicated, and the through holes respectively correspond to the plurality of locking holes of the cover body, so that a plurality of conductive locking elements correspondingly penetrate into the through holes to be locked on the corresponding locking holes, and a fluid conveying device is formed by positioning and assembling.

7. The micro-fluid detector as claimed in claim 6, wherein a protrusion is disposed around the outlet opening of the valve body and the inlet valve passage of the valve chamber seat, respectively, for generating a pre-force by tightly closing the valve plates on the two penetrating regions of the valve membrane.

8. The micro fluid detector as claimed in claim 6, wherein a groove is formed around the inlet opening and the outlet opening of the valve body and around the inlet valve passage and the outlet valve passage of the valve chamber body seated on the second assembling surface and around the pressure chamber of the third assembling surface, and a sealing ring is fitted into the groove.

9. The micro-fluid detector as claimed in claim 6, wherein the valve membrane is made of polyimide polymer material.

10. The micro fluid detector as claimed in claim 6, wherein the actuator comprises a vibrating plate and a piezoelectric element, the piezoelectric element is attached to a side of the vibrating plate, and the vibrating plate is provided with an opening, and the locking element is inserted into the opening and electrically connected to the vibrating plate.

11. The micro-fluid detector as claimed in claim 10, wherein the cover is made of metal and is attached to the vibrating plate, and the through hole and the opening of the vibrating plate are adapted to receive the locking element and lock the locking element in the locking hole.

12. The micro fluid detector as claimed in claim 11, wherein the cover has a slot recessed in a surface of the cover, and another slot on one side thereof in vertical communication with the slot recessed in the surface of the cover, and a slot corresponding to the slot on the side of the cover is formed in one of the vibrating plate, the valve chamber body and the valve body, for embedding an electrode lead of the piezoelectric element.

13. The micro-fluid detector as claimed in claim 11, wherein the locking element is a screw.

14. The micro-fluid detector as claimed in claim 1, wherein the gas blowing unit is a thin gas pump comprising:

the micro gas transmission device comprises an air inlet manifold plate, a resonance sheet and a piezoelectric actuator, wherein one surface of the air inlet manifold plate is provided with at least one air inlet hole, the other surface of the air inlet manifold plate is provided with at least one bus channel and a central hole, the bus channel is correspondingly communicated with the air inlet hole, the resonance sheet is provided with a hollow hole corresponding to the central hole of the air inlet manifold plate, and the piezoelectric actuator is sequentially and correspondingly stacked with the resonance sheet and the air inlet manifold plate to be arranged and positioned;

the cover plate is arranged on the air inlet collecting plate of the micro gas transmission device; and

a tube plate disposed below the piezoelectric actuator of the micro gas transport device and having an inlet tube and at least one outlet tube;

wherein the cover plate, the micro gas transmission device and the tube plate are stacked and hermetically connected, a first air inlet cavity is formed at the joint of the cover plate and the inlet tube of the tube plate, a second air inlet cavity is formed between the cover plate and the air inlet manifold plate of the micro gas transmission device, and an air outlet cavity is formed between the tube plate and the piezoelectric actuator of the micro gas transmission device, so that when the micro gas transmission device is driven, gas enters from the inlet tube of the tube plate, sequentially flows through the first air inlet cavity and the second air inlet cavity, is guided into the micro gas transmission device through at least one air inlet of the air inlet manifold plate, is collected to the central hole through the at least one bus duct of the air inlet manifold plate, then flows through the hollow hole of the resonator plate, is piezoelectrically and downwards transmitted through the piezoelectric actuator to enter the air outlet cavity, and flows out through the outlet tube of the tube plate, the gas transfer is completed.

15. The micro liquid detector as claimed in claim 14, wherein the piezoelectric actuator has a suspension plate and a frame, the suspension plate and the frame are connected by at least one support, and a piezoelectric ceramic plate is attached to a surface of the suspension plate.

16. The micro fluid detector as claimed in claim 15, wherein an upper surface of the suspension plate of the piezoelectric actuator has a stepped surface structure, i.e., the upper surface has a protrusion, and the protrusion is coplanar with an upper surface of the housing, and a specific depth is provided between the protrusion and the upper surface of the housing and the upper surface of the suspension plate and the upper surface of the holder.

17. The micro fluid detector as claimed in claim 15, wherein the micro gas delivery device further comprises an insulating plate and at least one conductive plate, and the insulating plate and the conductive plate are sequentially disposed under the piezoelectric actuator.

18. The micro-liquid detector as claimed in claim 14, wherein a gap is formed between the resonator plate and the piezoelectric actuator of the micro-gas delivery device to form a first chamber, and when gas is introduced from the at least one gas inlet hole of the gas inlet manifold of the micro-gas delivery device, the gas is collected to the central hole through the at least one manifold channel of the gas inlet manifold, flows through the hollow hole of the resonator plate to enter the first chamber, and is then downwardly transmitted through the piezoelectric actuator.

19. The micro-fluid detector as claimed in claim 14, wherein the inlet manifold plate comprises an inlet plate and a flow channel plate stacked on each other.

20. The micro liquid detector as claimed in claim 1, wherein the blowing unit is a blowing pump or a nitrogen gun.

[ technical field ] A method for producing a semiconductor device

The present disclosure relates to a micro-liquid detector, and more particularly, to a micro-liquid detector capable of accurately transmitting a liquid to be detected to a detection head.

[ background of the invention ]

Liquid detection is widely used in factories at present, such as detecting urine and blood to confirm human health conditions or analyzing components of liquid such as sewage and solvents, and liquid is often used as an object to be detected.

[ summary of the invention ]

The main purpose of the present disclosure is to provide a micro liquid detector, which can efficiently and accurately control the volume of a liquid to be detected by pumping the liquid to be detected to a detection head via a micro liquid pump.

To achieve the above object, a broad aspect of the present invention provides a micro liquid detector, which includes a detection head, a micro liquid pump, a detection container, and an air blowing unit. The micro liquid pump is provided with an outlet channel and an inlet channel, and the outlet channel is connected with the detection head. The detection container is connected with the inlet channel and contains liquid to be detected. The blowing unit is connected with the inlet channel. The micro liquid pump starts to act, liquid to be detected in the micro liquid pump sucking detection container enters from the inlet channel, the liquid to be detected is conveyed to the detection head after passing through the outlet channel, and finally the liquid to be detected is sprayed out from the detection head. When the micro liquid pump stops operating, the air blowing unit introduces air into the micro liquid pump so as to discharge the liquid to be detected remained in the micro liquid pump through the detection head.

[ description of the drawings ]

Fig. 1A is a schematic view of the micro-liquid detector.

Fig. 1B is a schematic diagram of the micro liquid detector for providing the liquid to be detected.

FIG. 1C is a schematic diagram of the micro-liquid detector for removing the liquid to be detected

Fig. 2 is a schematic perspective view of the micro liquid pump.

Fig. 3 is an exploded view of the micro liquid pump.

FIG. 4 is a schematic cross-sectional view of the micro-fluid pump of the present invention.

Fig. 5 is a schematic view of the bottom of the valve body of the micro liquid pump.

Fig. 6 is a schematic front view of a valve diaphragm of the micro liquid pump.

FIG. 7A is a schematic view of the valve chamber seat of the micro fluid pump of the present disclosure.

FIG. 7B is a schematic bottom view of the valve chamber of the micro fluid pump of the present invention.

Fig. 8 is a schematic front view of a vibrating plate of the micro liquid pump.

FIG. 9A is a front view of the cover of the micro fluid pump.

FIG. 9B is a schematic view of the bottom surface of the cover of the micro-pump.

FIG. 10A is a schematic diagram of the connection state of the actuator electrode lead of the micro-fluid pump of the present invention.

FIG. 10B is a schematic diagram of the actuator electrode lead wire embedding protection of the present micro fluid pump.

FIG. 10C is a schematic diagram of the micro liquid pump with the actuator electrode lead connected to the driving circuit board.

Fig. 11A and 11B are schematic views illustrating the operation state of the micro liquid pump for delivering fluid.

FIG. 12A is a schematic front exploded view of the micro gas pump of the present invention.

Fig. 12B is a schematic backside exploded view of the micro gas pump of the present disclosure.

Fig. 13A is a schematic front view of the piezoelectric actuator of the micro gas pump shown in fig. 12A.

Fig. 13B is a schematic diagram of the back structure of the piezoelectric actuator of the micro gas pump shown in fig. 12A.

Fig. 14 is a schematic diagram of various embodiments of the piezoelectric actuator shown in fig. 13A.

Fig. 15A is a schematic front view of the tube sheet of the micro gas pump shown in fig. 12A.

FIG. 15B is a schematic view of the micro gas pump of FIG. 12B after assembly.

Fig. 16A to 16E are schematic operation diagrams of the micro gas transmission device of the micro gas pump shown in fig. 12A.

FIG. 17A is a cross-sectional view of the assembled micro gas pump of FIG. 12A.

Fig. 17B to 17D are schematic operation diagrams of the micro gas pump shown in fig. 12A.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1A to 1C, a micro-liquid detector 100 includes a detecting head 1, a micro-liquid pump 2, a detecting container 3 and a blowing unit 4. The micro liquid pump 2 is connected with the detection head 1, the detection container 3 and the air blowing unit 4. The micro liquid pump 2 pumps the liquid to be detected in the detection container 3 and guides the liquid to the detection head 1, so that the detection head 1 can rapidly detect the liquid to be detected. The air blowing unit 4 sends air to the micro liquid pump 2, and then discharges air from the detection head 1, and discharges the liquid to be detected remaining in the micro liquid pump 2 and the detection head 1.

As shown in fig. 2 to 5, the micro liquid pump 2 is connected to the detection head 1 to guide the liquid to be detected to the detection head 1. The micro liquid pump 2 includes a valve body 21, a valve diaphragm 22, a valve chamber seat 23, an actuator 24, and a cover 25, which are sequentially stacked, and a plurality of locking members 26 are locked and positioned on the valve body 21, the valve diaphragm 22, the valve chamber seat 23, the actuator 24, and the cover 25, thereby completing the assembly of the micro liquid pump 2. The valve body 21, the valve diaphragm 22 and the valve chamber seat 23 are sequentially stacked to form a fluid valve seat, and a pressure chamber 237 for storing fluid is formed between the valve chamber seat 23 and the actuator 24. The locking element 26 is a conductive screw.

Referring to fig. 2, 3, 4 and 5, the valve body 21 and the valve chamber seat 23 are the main structures for guiding the fluid to enter and exit in the micro liquid pump 2 of the present invention. The valve body 21 has an inlet channel 211 and an outlet channel 212 and a first assembling surface 210, the inlet channel 211 connects the detecting container 3 and the blowing unit 4, so that the liquid and air to be detected can enter the micro liquid pump 2. The inlet passage 211 communicates with an inlet opening 213, and fluid can be delivered to the inlet opening 213 through the inlet passage 211 of the first set of seating surfaces 210 of the valve body 21. The outlet channel 212 communicates with an outlet opening 214, and the fluid can be delivered from the outlet opening 214 of the first assembling surface 210 of the valve body 21 to the outlet channel 212 to be discharged, and the outlet channel 212 can also be connected with the detecting head 1. The valve body 21 has a butt region 215 on the first abutting surface 210, and the butt region 215 further has a groove 216 surrounding the periphery of the inlet opening 213 for a sealing ring 28a to be disposed thereon to prevent fluid leakage around the inlet opening 213. In this embodiment, the abutting region 215 has a groove 217 around the periphery of the outlet opening 214 for a sealing ring 28b to be disposed thereon to prevent fluid leakage around the outlet opening 214. In addition, a protrusion 218 is disposed around the outlet opening 214 in the abutting region 215, a through hole 219 is disposed at each of four corners of the valve body 21 for the locking element 26 to pass through for positioning and assembling, a plurality of locking slots 21a are disposed in the abutting region 215, and a slot 21b is disposed at one side of the valve body 21.

Referring to fig. 2, 3, 4 and 6, when the main material of the valve diaphragm 22 is Polyimide (PI) polymer material, the manufacturing method mainly uses Reactive Ion Etching (RIE) method to coat photosensitive photoresist on the valve structure, expose and develop the valve structure pattern, and then perform etching, since the Polyimide (PI) sheet is protected from etching by the photoresist covering portion, the valve structure on the valve diaphragm 22 can be etched. The valve membrane 22 is a flat sheet structure. As shown in fig. 6, the valve diaphragm 22 has two through regions 22a, 22b, the valve diaphragm 22 has a valve piece 221a, 221b with the same thickness etched in each through region 22a, 22b, and a plurality of extending supports 222a, 222b are respectively disposed around the valve piece 221a, 221b for elastic support, and a hollow hole 223a, 223b is respectively formed between adjacent extending supports 222a, 222b, so that a valve piece 221a, 221b with the same thickness can be forced on the valve diaphragm 22, and is elastically supported by the extending supports 222a, 222b to be protruded and deformed by a displacement to form the valve switch structure. The valve pieces 221a, 221b may be circular, rectangular, square, or various geometric shapes, but not limited thereto. In this embodiment, a 50 μm thick valve membrane 22 is used, and circular valve pieces 221a and 221b are retained in the two through regions 22a and 22b, the diameter of the valve pieces 221a and 221b is 17mm, and 3 extending supports 222a and 222b connected in a spiral manner are retained in the two through regions 22a and 22b, and the width of the extending supports 222a and 222b is 100 μm. In addition, the valve membrane 22 is provided with a plurality of positioning holes 22c, such as 6 positioning holes 22c in the embodiment shown in fig. 6, but not limited thereto.

Referring to fig. 2, 3, 4, 7A and 7B, the valve cavity seat 23 has a second assembling surface 230 and a third assembling surface 236. The valve cavity seat 23 has an inlet valve passage 231 and an outlet valve passage 232 extending through the second assembly surface 230 to the third assembly surface 236. The valve cavity seat 23 has a groove 233 around the inlet valve passage 231 for a sealing ring 28c to be seated thereon to prevent fluid leakage around the inlet valve passage 231. The valve cavity seat 23 has a groove 234 around the periphery of the outlet valve passage 232 for a sealing ring 28d to be seated thereon to prevent fluid leakage around the outlet valve passage 232. The second assembly surface 230 of the valve cavity seat 23 is provided with a protrusion 235 around the inlet valve channel 231, and the third assembly surface 236 of the valve cavity seat 23 is partially recessed to form a pressure chamber 237, the pressure chamber 237 communicating with the inlet valve channel 231 and the outlet valve channel 232, respectively. The third set of surfaces 236 of the valve cavity seat 23 has a groove 238 circumferentially disposed around the pressure chamber 237 for a sealing ring 28e to be disposed therein to prevent fluid leakage around the pressure chamber 237. In addition, four corners of the valve cavity seat 23 are respectively provided with a through hole 239 for the insertion of the locking element 26 for positioning and assembling, the second assembling surface 230 of the valve cavity seat 23 is provided with a plurality of tenons 23a, and one side of the valve cavity seat 23 is provided with a wire slot 23 b.

As shown in fig. 2, fig. 3, fig. 4 and fig. 8, the actuator 24 is assembled by a vibration plate 241 and a piezoelectric element 242, wherein the piezoelectric element 242 is attached and fixed to one side of the vibration plate 241, two through holes 243 and openings 244 are also formed in the vibration plate 241, the through holes and the openings are diagonally opposite to each other, the locking element 26 can be inserted into the through holes for positioning and assembling, and a slot 24b is formed in one side of the vibration plate 241. In the present embodiment, the vibrating plate 241 is made of stainless steel, and the piezoelectric element 242 is made of piezoelectric powder of lead zirconate titanate (PZT) series with high piezoelectric number, so as to be attached to the vibrating plate 241, and an electrode lead 27 (as shown in fig. 10A and 10B) is connected to the piezoelectric element 242, so that the piezoelectric element 242 is driven to deform by applying a voltage, and the vibrating plate 241 is driven to vibrate and deform in a vertical direction, so as to drive the micro liquid pump 2 to operate.

Referring to fig. 2, fig. 3, fig. 4, fig. 9A and fig. 9B, the cover 25 is made of metal, and has a hollow space 251 in the middle, and a plurality of locking holes 252 are also formed through the hollow space for the locking element 26 to pass through for positioning and assembling, a slot 25a is recessed on a cover surface 250 of the cover 25, and a slot 25B is also formed on one side of the cover 25 for vertical communication with the slot 25 a.

In the present embodiment, the valve body 21 and the valve cavity seat 23 may be made of thermoplastic plastics, such as Polycarbonate (PC), poly mock (PSF), ABS resin (Acrylonitrile Butadiene Styrene), Longitudinal Low Density Polyethylene (LLDPE), Low Density Polyethylene (LDPE), High Density Polyethylene (HDPE), polypropylene (PP), Polyphenylene Sulfide (PPs), p-polystyrene (SPS), Polyphenylene oxide (PPO), Polyacetal (POM), polybutylene terephthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), or cyclic olefin polymer (COC), but not limited thereto.

As can be seen from the above description, the micro-fluid pump 2 is mainly composed of a valve body 21, a valve diaphragm 22, a valve cavity seat 23, an actuator 24 and a cover 25, which are sequentially stacked, each layer of stack can be assembled and positioned by ultrasonic welding, thermal welding, gluing and the like, the assembling process may be over-melted by ultrasonic welding or thermal welding, and the assembling process is positioned by gluing and the like, if the gluing and the gluing are slow, the overall assembling process time is prolonged, and if the gluing and the gluing are fast, the components of the plastic parts are easy to embrittle. Therefore, in order to overcome the above-mentioned problems of assembling and positioning by ultrasonic welding, thermal welding, gluing, etc., the micro-liquid pump 2 is assembled by locking and positioning the locking elements 26, and the cover 25 is made of metal material, and not only has a plurality of locking holes 252 for the locking elements 26 to penetrate into for positioning and assembling, but also the valve body 21, the valve diaphragm 22, the valve cavity seat 23, the actuator 24 and the cover 25 are sequentially stacked to form a whole structure, so that the assembling and positioning of the closer joint can be adjusted, and not only the better leakage-proof performance is achieved, but also the overall structural strength can be improved.

In addition, as shown in fig. 10A, 10B and 10C, in the present invention, the locking element 26 is locked, positioned and assembled to the micro liquid pump 2, and the electrode lead for applying voltage to the vibrating plate 241 is also used as an electrode lead by using the locking element 26, and the vibrating plate 241 has a through hole 243 and an opening 244, so that the locking element 26 can easily penetrate into the through hole and the vibrating plate 241 is electrically connected to serve as an electrode lead; in the design of the piezoelectric element 242, not only the wire slot 25a recessed on the cover surface 250 of the cover 25 is used to provide an electrode wire 27 to be embedded (as shown in fig. 10B), but also the wire slot 25B vertically communicated with one side of the cover 25 is designed to be embedded, and then the wire slot 24B of the vibrating plate 241, the wire slot 23B of the valve body seat 23 and the wire slot 21B of the valve body 21 are designed (as shown in fig. 10C), so as to be embedded without exposure, and extend vertically at a right angle without being pulled, so as to avoid being broken or damaged by a sharp right-angle plate, thereby achieving the effect of protecting the electrode wire 27 of the piezoelectric element 242. In addition, the driving circuit board 29 of the micro liquid pump 2 is mounted thereon, and can penetrate into the locking element 26 through the conductor counterbore 291 of the driving circuit board 29, and directly weld a welding point (as shown in fig. 10C) on the locking element 26, so that the locking element 26 can be used as an electrode lead of the vibrating plate 241 and directly contact and conduct with the vibrating plate 241 (as shown in fig. 10A), thereby reducing the arrangement of the electrode lead of the vibrating plate 241, meanwhile, the cover 25 is made of metal, the locking element 26 locks the locking hole 252, and the whole surface of the cover 25 is in joint contact with the vibrating plate 241, increasing the conductive area of the vibrating plate 241, avoiding the problem of poor conduction, and simultaneously, the locking element 26 can be used for locking to perform a fine adjustment of the conductive performance.

Therefore, the micro liquid pump 2 is assembled by stacking the valve body 21, the valve diaphragm 22, the valve chamber seat 23, the actuator 24 and the cover 25 in sequence, inserting the 4 locking elements 26 through the through hole 219 of the valve body 21, the through hole 239 of the valve chamber seat 23, the through hole 243 of the vibration plate 241 and the opening 244, and locking and positioning the locking elements with the locking hole 252 of the cover 25, thereby completing the assembly of the entire structure of the micro liquid pump 2.

Referring to fig. 3 and 4, the first assembling surface 210 of the valve body 21 is engaged with the second assembling surface 230 of the valve cavity seat 23, and the valve membrane 22 is inserted into the tenon 23a of the valve cavity seat 23 through the six positioning holes 22c, so that the valve membrane 22 is positioned on the valve cavity seat 23, and the tenons 23a of the valve cavity seat 23 are respectively inserted into the tenon slots 21a of the valve body 21, so that the valve membrane 22 is positioned between the valve body 21 and the valve cavity seat 23, and the third assembling surface 236 of the valve cavity seat 23 is engaged with the vibration plate 241 of the actuator 24, and the other surface of the vibration plate 241 of the actuator 24 is engaged with the cover 25, and the piezoelectric element 242 of the actuator 24 is located in the hollow space 251 of the cover 25, so that the cover 25 is covered on the actuator 24; thus, the inlet valve passage 231 is disposed at a position corresponding to the inlet opening 213 of the valve body 21, the outlet valve passage 232 is disposed at a position corresponding to the outlet opening 214 of the valve body 21, the valve piece 221a of the valve diaphragm 22 corresponds to the inlet valve passage 231 of the sealing/capping valve cavity seat 235, and the protrusion structure 235 of the valve cavity seat 23 is attached to generate a pre-force (pre-force) effect, which is helpful for generating a greater pre-capping effect to prevent backflow. The valve plate 221b of the valve diaphragm 22 also corresponds to the outlet opening 214 of the sealing/capping valve body 21, and is attached to the protrusion structure 218 of the valve body 21 to generate a pre-force (pressure) effect, which helps to generate a greater pre-capping effect to prevent backflow. The diaphragm 241 of the actuator 24 covers the pressure chamber 237 of the valve cavity seat 23; while the provision of the sealing rings 28a, 28b between the valve body 21 and the valve body seat 23 provides fluid leakage prevention around the inlet opening 213 and the outlet opening 214, and the provision of the sealing rings 28c, 28d provides fluid leakage prevention around the inlet valve passage 231 and the outlet valve passage 232, while the provision of the sealing ring 28e between the valve body seat 23 and the vibration plate 241 of the actuator 24 provides fluid leakage prevention around the pressure chamber 237.

As can be seen from the above description, in the micro liquid pump 2, as shown in fig. 4, fig. 6, fig. 11A and fig. 11B, a pressure chamber 237 formed by partially recessing the third assembling surface 236 of the valve cavity seat 23 is disposed corresponding to the piezoelectric element 242 of the actuator 24, and the pressure chamber 237 is simultaneously communicated with the inlet valve channel 231 and the outlet valve channel 232, so that when the piezoelectric element 242 of the actuator 24 is energized to deform the vibrating plate 241 upwards (as shown in fig. 11A), the volume of the pressure chamber 237 is increased, and a thrust is generated, so that the valve plate 221A of the valve diaphragm 22 is rapidly opened by receiving an upward thrust, and a large amount of fluid can be sucked from the inlet channel 211 of the valve body 21 and flows into the pressure chamber 237 through the inlet opening 213 of the valve body 21, the hollow hole 223a of the valve diaphragm 22, and the inlet valve channel 231 of the valve cavity seat 23, at the same time, the outlet valve channel 232 is also subjected to a thrust force, and the valve piece 221b of the valve membrane 22 is subjected to the thrust force, supported by the extension bracket 222b, to be entirely and flatly attached to the convex portion structure 218 in an upward direction to be in a closed state; thereafter, when the direction of the electric field applied to the piezoelectric element 242 is changed, the piezoelectric element 242 will deform the vibration plate 241 downward (as shown in fig. 11B), causing the pressure chamber 237 to contract and decrease in volume, so that the fluid in the pressure chamber 237 flows out of the pressure chamber 237 from the outlet valve channel 232, meanwhile, a part of the fluid will flow into the inlet valve channel 231, however, since the valve piece 221a of the valve diaphragm 22 at this time is under the action of the suction force and the impulse force of the fluid flowing from the inlet channel 211 to the inlet opening 213 are supported by the extension bracket 222a to generate the whole downward flat close contact with the protrusion 235 to be in the closed state, the fluid in the pressure chamber 237 will not flow backward through the valve piece 221a, and at this time, the valve diaphragm 22 will be pulled and displaced by the suction force generated by the increase in volume of the pressure chamber 237, losing the whole pre-force effect of flatly abutting against the convex portion structure 218, the opening state is presented by the support of the extension bracket 222B, at this time, the fluid in the pressure chamber 237 can flow out of the micro liquid pump 2 through the outlet valve channel 232 of the valve cavity seat 23, the hollow hole 223B of the valve membrane 22, the outlet opening 214 of the valve body 21 and the outlet channel 212, thereby completing the fluid transferring process, and the operations shown in fig. 11A and 11B are repeated to transfer the fluid, so that the micro liquid pump 2 of the present invention can achieve high efficiency and accurate transfer without generating a backflow situation during the fluid transferring process.

Referring to fig. 1C, after the detection is finished, the micro liquid pump 2 stops operating, so as to prevent a part of the liquid to be detected from remaining in the micro liquid pump 2 and the detection head 1, the air blowing unit 4 sends air into the micro liquid pump 2 and the detection head 1, and the air discharges the remaining liquid to be detected from the detection head 1.

The blowing unit 4 may be, but is not limited to, a blowing pump or a nitrogen gun. In addition, in the present embodiment, the blowing unit 4 is a micro gas pump 5. Fig. 12A and 12B are a front exploded view and a back exploded view of the micro gas pump according to the first preferred embodiment of the present application, respectively. As shown in the figure, the micro gas pump 5 of the present embodiment is composed of a cover plate 50, a micro gas transmission device 5A and a tube plate 51, wherein the micro gas transmission device 5A has a structure of an air intake manifold plate 52, a resonance plate 53, a piezoelectric actuator 54, an insulation plate 55, another insulation plate 57, a conductive plate 56, etc., the piezoelectric actuator 54 is disposed corresponding to the resonance plate 53, and the air intake manifold plate 52, the resonance plate 53, the piezoelectric actuator 54, the insulation plate 55, the conductive plate 56, and the another insulation plate 57, etc. are sequentially stacked. In the present embodiment, a gap g0 is formed between the resonator plate 53 and the piezoelectric actuator 54 (as shown in FIG. 16A). In other embodiments, there may be no gap between the resonator plate 53 and the piezoelectric actuator 54, and the implementation aspect is not limited thereto. In some embodiments, the intake manifold 52 may be, but not limited to, an integrally formed plate structure, however, in other embodiments, the intake manifold 52 may be, but not limited to, an intake plate and a flow channel plate.

Referring to fig. 12A and 12B, in the present embodiment, the air intake manifold 52 of the micro gas transmission device 5A has a first surface 521 and a second surface 522, the first surface 521 and the second surface 522 are disposed opposite to each other, and the first surface 521 has at least one air intake hole 520 for allowing air to flow into the micro gas transmission device 5A. As shown in fig. 12B, the second surface 522 of the intake manifold plate 52 has at least one bus duct 523 and a central hole 524, and the bus ducts 523 are respectively communicated with the intake holes 520 corresponding to the first surface 521, so in the embodiment, since the first surface 521 has 4 intake holes 520, the second surface 522 also has 4 corresponding bus ducts 523 and converges at the central hole 524 for downward transmission of the air.

As shown in fig. 12A and 12B, the resonator plate 53 is made of a flexible material, but not limited thereto, and the resonator plate 53 has a hollow hole 530 corresponding to the central hole 524 of the inlet manifold so that the gas can flow downward.

Referring to fig. 13A and 13B, which are a front structural schematic view and a back structural schematic view of the piezoelectric actuator of the micro gas pump shown in fig. 12A, as shown in the figure, the piezoelectric actuator 54 is assembled by a suspension plate 540, an outer frame 541, at least one support 542, and a piezoelectric ceramic plate 543. The piezoceramic plate 543 is attached to the lower surface 540b of the suspension plate 540, the at least one bracket 542 is connected between the suspension plate 540 and the outer frame 541, and at least one gap 545 is further formed among the bracket 542, the suspension plate 540 and the outer frame 541 for air circulation. The shapes and the number of the suspension plate 540, the outer frame 541 and the bracket 542 can be varied according to the actual situation. In addition, the outer frame 541 further has a conductive pin 544 protruding outward for power connection, but not limited thereto.

In the present embodiment, as shown in fig. 13A, the suspension plate 540 is a stepped structure, that is, the suspension plate upper surface 540a of the suspension plate 540 further has a protrusion 540c, the protrusion 540c of the suspension plate 540 is coplanar with the outer frame upper surface 541a of the outer frame 541, the suspension plate upper surface 540a of the suspension plate 540 and the bracket upper surface 542a of the bracket 542 are also coplanar, a specific depth is provided between the protrusion 540c of the suspension plate 540 and the upper surface 540a of the suspension plate 540, and a specific depth is provided between the outer frame upper surface 541a of the outer frame 541 and the bracket upper surface 542a of the bracket 542. As for the lower suspension surface 540B of the suspension 540, as shown in fig. 13B, it is a flat coplanar structure with the lower frame surface 541B of the outer frame 541 and the lower frame surface 542B of the frame 542, and the piezoelectric ceramic plate 543 is attached to the flat lower suspension surface 540B of the suspension 540. In some embodiments, the suspension plate 540, the bracket 542 and the frame 541 can be made of a metal plate, but not limited thereto, so that the piezoelectric actuator 54 is made by bonding the piezoelectric ceramic plate 543 with the metal plate.

Please refer to fig. 14, which is a schematic diagram of various embodiments of the piezoelectric actuator shown in fig. 13A. As shown in the figure, it can be seen that the suspension plate 540, the outer frame 541 and the bracket 542 of the piezoelectric actuator 54 can have various types, and at least various types (a) to (l) shown in fig. 14 can be provided. For example, the outer frame a1 and the suspension plate a0 of the (a) aspect are square structures, and are connected by a plurality of brackets a2, such as: 8, but not limited to, gaps a3 are formed among the brackets a2, the suspension plate a0 and the outer frame a1 for the circulation of gas; in the aspect (i), the outer frame i1 and the suspension plate i0 are also square structures, but only 2 brackets i2 are connected; in the (j) to (l) modes, the suspension plate j0 and the like may be circular, and the outer frame j1 and the like may be a frame structure having a slight arc shape, but the invention is not limited thereto. Therefore, according to various embodiments, the suspension plate 540 may be square or circular, and similarly, the piezoelectric ceramic plate 543 attached to the lower surface 540b of the suspension plate 540 may also be square or circular, but not limited thereto. The type and number of the supporting frames 542 connected between the suspension plate 540 and the outer frame 541 can be varied according to the actual implementation, and are not limited to the embodiment shown in this application. The suspension plate 540, the outer frame 541 and the bracket 542 may be integrally formed, but not limited thereto, and the manufacturing method thereof may be manufactured by conventional machining, photolithography, laser machining, electroforming, or electrical discharge machining, but not limited thereto.

In addition, referring to fig. 12A and 12B, the micro gas transmission device 5A further includes an insulating sheet 55, another insulating sheet 57 and a conducting sheet 56. In the present embodiment, the insulation sheet 55, the conductive sheet 56 and the another insulation sheet 57 are sequentially disposed between the piezoelectric actuator 54 and the tube plate 51, and the shapes of the insulation sheet 55, the another insulation sheet 57 and the conductive sheet 56 correspond to the shape of the outer frame of the piezoelectric actuator 54, but not limited thereto. In some embodiments, the insulating sheets 55 and 57 are made of an insulating material, such as: plastic, but not limited to this, for insulation. In some embodiments, the micro gas delivery device 5A can be provided with only a single insulation sheet 55 and a single conductive sheet 56, without providing another insulation sheet 57, i.e. the number of the insulation sheets 55 and the other insulation sheets 57 can be varied according to the actual implementation, and is not limited thereto. In other embodiments, the conductive sheet 56 is made of a conductive material, such as: but not limited to, metals for electrical conduction. In this embodiment, a conductive pin 561 may also be disposed on the conductive sheet 56 for electrical conduction.

Please refer to fig. 15A, which is a schematic front view of the tube plate of the micro gas pump shown in fig. 12A. As shown, the tube plate 51 has an inlet tube 51a and an outlet tube 51b, and the frame of the tube plate 51 further has two recesses 51c and 51d for the conductive pins 544 and 561 of the piezoelectric actuator 54 and the conductive plate 56 to be disposed correspondingly. After the tube plate 51, the micro gas transmission device 5A and the cover plate 50 are assembled correspondingly, the gas transmission direction is as shown by the arrow in the figure, the gas flows into the tube plate 51 from the inlet tube 51a, flows into the second gas inlet cavity 500 between the cover plate 50 and the micro gas transmission device 5A from the connection part of the inlet tube 51a and the micro gas transmission device 5A, namely the first gas inlet cavity 511 shown in fig. 17A, flows into the micro gas transmission device 5A, flows into the gas outlet cavity 512 between the micro gas transmission device 5A and the tube plate 51, and flows out from the outlet tube 51 b.

Please refer to fig. 15B, which is a schematic diagram illustrating the micro gas pump shown in fig. 12B after the assembly. As shown in the figure, when the cover plate 50, the micro gas transmission device 5A and the tube plate 51 are assembled, as shown in fig. 15B, the conductive pins 544 of the piezoelectric actuator 54 and the conductive pins 561 of the conductive sheet 56 are exposed outside the micro gas pump 5 by being disposed in the recesses 51c and 51d (shown in fig. 15A) of the tube plate 51, so as to be electrically connected. And the cover plate 50 and the tube plate 51 are sealed with respect to each other so that the gas can enter the micro gas pump 5 through the inlet tube 51a, enter the micro gas transmission device 5A in the sealed state for transmission, and then exit the outlet tube 51 b.

Referring to fig. 12A and fig. 16A to 16E, fig. 16A to 16E are schematic operation diagrams of the micro gas transmission device of the micro gas pump shown in fig. 12A. First, as shown in fig. 16A, it can be seen that the micro gas delivery device 5A is formed by stacking the inlet manifold 52, the resonator plate 53, the piezoelectric actuator 54, the insulating plate 55, the conducting plate 56, etc. in sequence, and a gap g0 is formed between the resonator plate 53 and the piezoelectric actuator 54. In the present embodiment, a material is filled in the gap g0 between the resonator plate 53 and the outer frame 541 of the piezoelectric actuator 54, for example: the conductive paste, but not limited thereto, maintains the depth of the gap g0 between the resonator plate 53 and the protrusion 540c of the suspension plate 540 of the piezoelectric actuator 54, so as to guide the air flow to flow more rapidly, and since the protrusion 540c of the suspension plate 540 and the resonator plate 53 maintain a proper distance, the contact interference between them is reduced, so that the generation of noise can be reduced. In other embodiments, the height of the outer frame 541 of the high voltage electric actuator 54 can be increased to increase a gap when the high voltage electric actuator is assembled with the resonator plate 53, but not limited thereto. In other embodiments, the resonator plate 53 and the piezoelectric actuator 54 may not have a gap g0 therebetween, i.e., the implementation aspect is not limited thereto.

Referring to fig. 16A to 16E, as shown in the figure, after the air intake manifold 52, the resonance plate 53 and the piezoelectric actuator 54 are assembled in sequence, a chamber for collecting air is formed at the central hole 524 of the air intake manifold 52 together with the resonance plate 53, a first chamber 531 is further formed between the resonance plate 53 and the piezoelectric actuator 54 for temporarily storing air, the first chamber 531 is communicated with the chamber at the central hole 524 of the air intake manifold 52 through the hollow hole 530 of the resonance plate 53, and two sides of the first chamber 531 are communicated with the air outlet chamber 512 (shown in fig. 17A) below through the gap 545 between the brackets 542 of the piezoelectric actuator 54.

When the micro gas transfer device 5A of the micro gas pump 5 is operated, the piezoelectric actuator 54 is mainly driven by a voltage to perform reciprocating vibration in the vertical direction with the support 542 as a fulcrum. When the piezoelectric actuator 54 is actuated by voltage to vibrate downward, as shown in fig. 16B, air enters through at least one air intake hole 520 on the air intake manifold plate 52, and then flows downwards into the first chamber 531 through at least one bus duct 523 of the intake manifold plate 52 to the central hole 524, and then through the hollow hole 530 of the resonance plate 53 corresponding to the central hole 524, thereafter, the resonant piece 53 resonates with the piezoelectric actuator 54 to perform a vertical reciprocating vibration, as shown in fig. 16C, the resonance plate 53 is vibrated downward and attached to and abutted against the convex 540c of the suspension plate 540 of the piezoelectric actuator 54, and by the deformation of the resonance plate 53, to compress the volume of the first chamber 531 and close the middle flow space of the first chamber 531, so that the gas in the first chamber is pushed to flow towards two sides, and through the flow downwardly through the gaps 545 between the legs 542 of the piezoelectric actuator 54. In fig. 16D, the resonator plate 53 returns to the initial position, and the piezoelectric actuator 54 is driven by the voltage to vibrate upwards, so as to compress the volume of the first chamber 531, but at this time, since the piezoelectric actuator 54 is lifted upwards, the gas in the first chamber 531 flows towards two sides, so as to drive the gas to continuously enter from the at least one gas inlet hole 520 on the gas inlet manifold plate 52, and then flows into the chamber formed by the central hole 524 on the gas inlet manifold plate 52, and as shown in fig. 16E, the resonator plate 53 is vibrated upwards by the upward lifting vibration of the piezoelectric actuator 54 to resonate upwards, so that the gas in the central hole 524 of the gas inlet manifold plate 52 flows into the first chamber 531 from the hollow hole 530 of the resonator plate 53, and flows downwards through the gap 545 between the brackets 542 of the piezoelectric actuator 54 and flows out of the micro gas delivery device 5A. In this way, when the resonator plate 53 performs vertical reciprocating vibration, the gap g0 between the resonator plate and the piezoelectric actuator 54 can increase the maximum vertical displacement distance, i.e., the gap g0 between the two structures can make the resonator plate 53 generate a larger vertical displacement during resonance, thereby promoting faster gas flow and achieving the effect of silencing. Thus, a pressure gradient is generated in the flow channel design of the micro gas transmission device 5A, so that the gas flows at a high speed, the gas is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel, and the gas can be continuously pushed out under the condition that the discharge end has gas pressure.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant diaphragm 53 may be the same as the vibration frequency of the piezoelectric actuator 54, i.e. both may be upward or downward at the same time, which may be varied according to the actual implementation, and is not limited to the operation manner shown in this embodiment.

Referring to fig. 12A, fig. 12B and fig. 17A to 17D, fig. 17A is a schematic cross-sectional view of the assembled micro gas pump shown in fig. 12A, and fig. 17B to 17D are schematic operation views of the micro gas pump shown in fig. 12A. As shown in fig. 17A, when the cover plate 50 and the tube plate 51 are disposed in sealing abutment with each other, the joint of the cover plate 50 and the inlet pipe 51a of the tube plate 51 forms a first inlet chamber 511, a second inlet chamber 500 is formed between the cover plate 50 and the inlet manifold plate 52 of the micro-gas delivery device 5A, and an outlet chamber 512 is formed between the tube plate 51 and the piezoelectric actuator 54 of the micro-gas delivery device 5A. Thus, when the piezoelectric actuator 54 of the micro-gas delivery device 5A is driven, as shown in fig. 17B, gas can be sucked in by the negative pressure generated by the inlet tube 51a of the tube sheet 51, and sequentially flows through the first inlet chamber 511 at the connection of the cover plate 50 and the inlet tube 51a of the tube sheet 51 and the second inlet chamber 500 between the cover plate 50 and the inlet manifold plate 52, as shown by arrows in the figure, is introduced into the micro-gas delivery device 5A through the at least one inlet hole 520 of the inlet manifold plate 52, is collected to the central hole 524 through the at least one manifold channel 523 of the inlet manifold plate 52, flows through the hollow hole 530 of the resonator plate 53, and flows downward through the gap 545 between the supports 542 of the piezoelectric actuator 54 and out of the micro-gas delivery device 5A to enter the outlet chamber 512 between the tube sheet 51 and the piezoelectric actuator 54 as shown by arrows in fig. 17C, and exits through the outlet tube 51b of the tube sheet 51.

As shown in fig. 17D, when the resonance plate 53 of the micro gas transmission device 5A is shifted upward by resonance, so that the gas in the central hole 524 of the gas inlet manifold 52 can flow into the first chamber 531 through the hollow hole 530 of the resonance plate 53 (in the same state as shown in fig. 16E), and then continuously transmit downward through the gap 545 between the supports 542 of the piezoelectric actuator 54 to the gas outlet chamber 512 between the tube plate 51 and the piezoelectric actuator 54, the gas pressure continuously increases downward, so that the gas can continuously transmit downward and flow out through the outlet tube 51b of the tube plate 51, so that the pressure can be accumulated in any container at the outlet end, and when pressure relief is required, the gas is discharged in a proper amount through the outlet tube 51b to reduce the pressure or be discharged completely to relieve the pressure by regulating the output of the micro gas transmission device 5A.

Referring to fig. 1A, the micro-fluid detector 100 further includes a flexible tube 6, wherein the flexible tube 6 is connected between the inlet channel 211 of the micro-fluid pump 2, the detection container 3 and the blowing unit 4. The flexible tube 6 is detachably assembled to the detection container 3 or the blowing unit 4, and controls the micro-pump 2 and the blowing unit 4 to operate at different times, so as to eject the liquid to be detected and remove the residual liquid to be detected, but not limited thereto. In another embodiment, the micro-fluid detector 100 includes two flexible tubes 6, one flexible tube 6 is connected between the micro-fluid pump 2 and the detection container 3, and the other flexible tube 6 is connected between the micro-fluid pump 2 and the blowing unit 4, but not limited thereto.

In summary, the detection head 1 may be a needle, the micro-liquid detector 100 further includes a detection unit 7, the detection head 1 sputters the liquid to be detected onto the detection unit 7, and the detection unit 7 is used to detect the liquid component to be detected, in addition, please refer to fig. 1B, the micro-liquid detector 100 further includes a transmission module 8 (as shown in fig. 1A), the transmission module 8 is connected to the detection unit 7, and the detection information of the detection unit 7 is transmitted to the outside, such as to a cloud hard disk and a mobile device.

In summary, the micro-liquid detector provided by the present disclosure draws the liquid to be detected in the detection container through the micro-liquid pump, can efficiently and accurately convey the liquid to be detected to the detection head, and then the liquid is sputtered to the detection unit through the detection head, so as to accurately provide appropriate detection liquid to improve the detection efficiency, and then the air is introduced into the micro-liquid pump and the detection head through the blowing unit, so as to discharge the residual liquid to be detected, thereby avoiding the residual liquid to be detected from causing detection misalignment.

The present invention can be modified by those skilled in the art without departing from the scope of the appended claims.

[ notation ] to show

100: micro-liquid detector

1: detection head

2: miniature liquid pump

20: fluid delivery device

21: valve body

210: first assembled surface

211: inlet channel

212: outlet channel

213: an inlet opening

214: outlet opening

215: butt joint area

216. 217: groove

218: convex part structure

219: through hole

21 a: mortise and tenon slot

21 b: wire slot

22: valve diaphragm

22a, 22 b: through region

221a, 221 b: valve plate

222a, 222 b: extension support

223a, 223 b: hollow hole

22 c: locating hole

23: valve cavity seat

230: second assembled surface

231: inlet valve passage

232: outlet valve passage

233. 234, 238: groove

235: convex part structure

236: third connecting surface

237: pressure chamber

239: through hole

23 a: clamping tenon

23 b: wire slot

24: actuator

241: vibrating plate

242: piezoelectric element

243: through hole

244: opening part

24 b: wire slot

25: cover body

250: surface of the cover body

251: hollow space

252: lock hole

25a, 25 b: wire slot

26: locking element

27: electrode lead

28a, 28b, 28c, 28d, 28 e: sealing ring

29: driving circuit board

291: conductor counterbore

3: detection container

4: air blowing unit

5: miniature gas pump

5A: miniature gas transmission device

50: cover plate

500: second air inlet cavity

51: tube plate

51 a: inlet pipe

51 b: outlet pipe

51c, 51 d: concave part

511: first air inlet cavity

512: air outlet chamber

52: air inlet collecting plate

520: air intake

521: first surface

522: second surface

523: bus duct

524: center hole

53. 23: resonance sheet

530: hollow hole

531: the first chamber

54: piezoelectric actuator

540: suspension plate

540 a: upper surface of the suspension plate

540 b: lower surface of the suspension plate

540 c: convex part

541: outer frame

541 a: upper surface of the outer frame

541 b: lower surface of the outer frame

542: support frame

542 a: upper surface of the support

542 b: lower surface of the support

543: piezoelectric ceramic plate

544: conductive pin

545: voids

55: insulating sheet

57: another insulating sheet

56: conductive sheet

561: conductive pin

g 0: gap

(a) To (l): various embodiments of conductive actuator

a0, i0, j 0: suspension plate

a1, i1, j 1: outer frame

a2, i 2: support frame

a 3: voids

6: flexible pipe

7: detection unit

8: transmission module