阅读说明：本技术 一种宽温域温控装置及其控制方法 (Wide-temperature-range temperature control device and control method thereof ) 是由 刘紫阳 胡文达 靳李富 常鑫 芮守祯 曹小康 于 2021-01-25 设计创作，主要内容包括：本发明涉及温控技术领域,公开了一种宽温域温控装置及其控制方法,其中温控装置包括：制冷系统和载冷剂系统,制冷系统包括依次串联形成回路的蒸发器的第一侧、压缩机、冷凝器和主路电子膨胀阀,载冷剂系统包括依次串联形成回路的蒸发器的第二侧、加热组件和循环泵；制冷系统还包括气液换热器,蒸发器和压缩机之间的管路流经气液换热器的第一侧,冷凝器和主路电子膨胀阀之间的管路流经气液换热器的第二侧。本发明提供的一种宽温域温控装置及其控制方法,压缩机低温工况制冷量提高,高温工况制冷量不变,在满足同样性能需求的前提下温控装置的压缩机规格更小,整体的功耗下降,能效比提高,成本降低。(The invention relates to the technical field of temperature control, and discloses a wide temperature range temperature control device and a control method thereof, wherein the temperature control device comprises: the refrigerating system comprises a first side of an evaporator, a compressor, a condenser and a main circuit electronic expansion valve which are sequentially connected in series to form a loop, and the secondary refrigerant system comprises a second side of the evaporator, a heating assembly and a circulating pump which are sequentially connected in series to form the loop; the refrigeration system further comprises a gas-liquid heat exchanger, a pipeline between the evaporator and the compressor flows through the first side of the gas-liquid heat exchanger, and a pipeline between the condenser and the main-path electronic expansion valve flows through the second side of the gas-liquid heat exchanger. According to the wide-temperature-range temperature control device and the control method thereof, the refrigerating capacity of the compressor under the low-temperature working condition is improved, the refrigerating capacity under the high-temperature working condition is unchanged, the compressor specification of the temperature control device is smaller on the premise of meeting the same performance requirements, the overall power consumption is reduced, the energy efficiency ratio is improved, and the cost is reduced.)

1. A wide temperature range temperature control device, comprising: the refrigerating system comprises a first side of an evaporator, a compressor, a condenser and a main circuit electronic expansion valve which are sequentially connected in series to form a loop, the secondary refrigerant system comprises a second side of the evaporator, a heating assembly and a circulating pump which are sequentially connected in series to form the loop, and a pipeline between an outlet of the circulating pump and the second side of the evaporator is used for flowing through a load component; the refrigeration system further comprises a gas-liquid heat exchanger, a pipeline between the evaporator and the compressor flows through a first side of the gas-liquid heat exchanger, and a pipeline between the condenser and the main-path electronic expansion valve flows through a second side of the gas-liquid heat exchanger.

2. The wide temperature range temperature control device according to claim 1, wherein a thermal bypass line is communicated between an outlet line of the compressor and an inlet line of the first side of the evaporator, and a thermal bypass electronic expansion valve is arranged on the thermal bypass line; and a cold bypass pipeline is communicated between an inlet pipeline of the main-path electronic expansion valve and an outlet pipeline on the first side of the evaporator, and a cold bypass electronic expansion valve is arranged on the cold bypass pipeline.

3. The wide temperature range temperature control device according to claim 2, wherein a target temperature sensor is provided at an outlet of the circulation pump, an inlet temperature sensor is provided at an inlet of the second side of the evaporator, an outlet temperature sensor is provided at an outlet of the second side of the evaporator, a pressure sensor and a suction temperature sensor are provided at an outlet of the first side of the evaporator, and a discharge temperature sensor is provided at an outlet of the compressor; and a liquid path temperature sensor is arranged at an outlet at the second side of the gas-liquid heat exchanger.

4. A wide temperature range temperature control device control method according to any one of claims 1 to 3, comprising:

regulating and controlling the cold output of the refrigerating system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature, so that the real-time outlet temperature is consistent with the preset outlet temperature;

and regulating and controlling the heat output of the heating assembly according to the deviation between the real-time target temperature and the preset target temperature in the secondary refrigerant system, so that the real-time target temperature is consistent with the preset target temperature.

5. The wide temperature range temperature control device control method according to claim 4, wherein the controlling the refrigeration output of the refrigeration system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system from the preset outlet temperature, such that the real-time outlet temperature is consistent with the preset outlet temperature specifically comprises:

and regulating and controlling at least one of the opening degree of the main circuit electronic expansion valve, the running frequency of the compressor and the opening degree of the thermal bypass electronic expansion valve in the refrigerating system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature.

6. The wide temperature range temperature control device control method according to claim 4, further comprising:

acquiring a real-time superheat degree at an evaporator outlet according to a real-time evaporation pressure and a real-time suction temperature at the evaporator outlet in the refrigeration system;

and regulating and controlling the refrigerating system according to the real-time superheat degree.

7. The wide temperature range temperature control device control method of claim 6, wherein the controlling the refrigeration system according to the real-time superheat degree specifically comprises:

when the real-time inlet temperature at the inlet of the evaporator in the secondary refrigerant system is lower than the preset inlet temperature, the refrigeration system is regulated and controlled according to the real-time superheat degree, so that the real-time superheat degree is in the preset superheat degree range.

8. The wide temperature range temperature control device control method of claim 7, wherein the controlling the refrigeration system according to the real-time superheat degree such that the real-time superheat degree is within a preset superheat degree range comprises:

and regulating and controlling the opening degree of the main-circuit electronic expansion valve in the refrigeration system according to the deviation between the real-time superheat degree and the preset superheat degree range.

9. The wide temperature range temperature control device control method according to claim 4, further comprising:

monitoring the real-time liquid path temperature at the outlet of the second side of the gas-liquid heat exchanger;

and when the real-time liquid path temperature is larger than the preset liquid path temperature range, regulating and controlling the opening of the cold bypass electronic expansion valve in the refrigeration system.

10. The wide temperature range temperature control device control method according to claim 4, further comprising:

monitoring the real-time exhaust temperature at the outlet of the compressor;

and when the real-time exhaust temperature is larger than the preset exhaust temperature range, regulating and controlling the opening of the cold bypass electronic expansion valve in the refrigeration system.

Technical Field

The invention relates to the technical field of temperature control, in particular to a wide temperature range temperature control device and a control method thereof.

Background

In the manufacturing process of a semiconductor chip, etching is one of the most important processes, and a special temperature control device is required to maintain the temperature of a processing cavity to be constant in the etching process so as to ensure the etching precision. The technical requirements of the temperature control device are characterized by the following two aspects: one is that the temperature required for wafer processing is different due to different process technologies, so the design operating temperature range of the coolant for the temperature control device is wide, the high-low temperature difference can reach 60-100 ℃, and the requirement of the temperature control device for the etching equipment at low temperature and high load is more important with the development of advanced flash memory technology in a plurality of memory chip manufacturing factories in recent years. The other is that the maximum power of the radio frequency device in the same processing cavity equipment is determined, so the maximum heat load of the temperature control device under different temperature working conditions is not changed greatly.

The temperature control device for semiconductor production currently mainly uses a system structure of 'refrigerating system + electric heating', uses high-insulativity electronic fluorinated liquid as a secondary refrigerant, and controls the temperature of a wafer processing cavity. For freon refrigeration systems, the lower the evaporation temperature, the lower the refrigeration capacity will be. Therefore, the compressor of the temperature control device is selected according to the load requirement at the lowest temperature, but the problems of overlarge specification, overhigh refrigerating capacity, overhigh power consumption and the like of the compressor can occur under the working condition of medium and high temperature. In order to ensure the stable operation under the low-load working condition under the high-temperature working condition, the refrigerating output needs to be reduced by utilizing modes such as frequency reduction of a compressor and the like.

The above temperature control device mainly has the following disadvantages: on the premise that the temperature control device meets the low-temperature working condition, the Energy Efficiency Ratio (EER) of the medium-temperature section and the high-temperature section is lower, and the average power consumption of the operation of the temperature control device is increased; meanwhile, the specifications of refrigeration parts such as a compressor and the like are increased, so that the product cost is high and the equipment volume is large.

Disclosure of Invention

The invention provides a wide temperature range temperature control device and a control method thereof, which are used for solving the problems that the energy efficiency ratio of a middle-temperature section and a high-temperature section is low and the average power consumption of the operation of the temperature control device is increased on the premise that the existing temperature control device meets the low-temperature working condition; meanwhile, the specifications of refrigeration parts such as a compressor and the like are increased, so that the problems of high product cost and large equipment volume are caused.

The invention provides a wide temperature range temperature control device, comprising: the refrigerating system comprises a first side of an evaporator, a compressor, a condenser and a main circuit electronic expansion valve which are sequentially connected in series to form a loop, the secondary refrigerant system comprises a second side of the evaporator, a heating assembly and a circulating pump which are sequentially connected in series to form the loop, and a pipeline between an outlet of the circulating pump and the second side of the evaporator is used for flowing through a load component; the refrigeration system further comprises a gas-liquid heat exchanger, a pipeline between the evaporator and the compressor flows through a first side of the gas-liquid heat exchanger, and a pipeline between the condenser and the main-path electronic expansion valve flows through a second side of the gas-liquid heat exchanger.

According to the wide temperature range temperature control device provided by the invention, a heat bypass pipeline is communicated between an outlet pipeline of the compressor and an inlet pipeline at the first side of the evaporator, and a heat bypass electronic expansion valve is arranged on the heat bypass pipeline; and a cold bypass pipeline is communicated between an inlet pipeline of the main-path electronic expansion valve and an outlet pipeline on the first side of the evaporator, and a cold bypass electronic expansion valve is arranged on the cold bypass pipeline.

According to the wide temperature range temperature control device provided by the invention, a target temperature sensor is arranged at an outlet of the circulating pump, an inlet temperature sensor is arranged at an inlet of the second side of the evaporator, an outlet temperature sensor is arranged at an outlet of the second side of the evaporator, a pressure sensor and a suction temperature sensor are arranged at an outlet of the first side of the evaporator, and an exhaust temperature sensor is arranged at an outlet of the compressor; and a liquid path temperature sensor is arranged at an outlet at the second side of the gas-liquid heat exchanger.

The invention also provides a control method of the wide temperature range temperature control device, which is based on the wide temperature range control device and comprises the following steps: regulating and controlling the cold output of the refrigerating system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature, so that the real-time outlet temperature is consistent with the preset outlet temperature; and regulating and controlling the heat output of the heating assembly according to the deviation between the real-time target temperature and the preset target temperature in the secondary refrigerant system, so that the real-time target temperature is consistent with the preset target temperature.

According to the control method of the wide temperature range temperature control device provided by the invention, the control of the cold output of the refrigerating system is carried out according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature, so that the consistency of the real-time outlet temperature and the preset outlet temperature specifically comprises the following steps: and regulating and controlling at least one of the opening degree of the main circuit electronic expansion valve, the running frequency of the compressor and the opening degree of the thermal bypass electronic expansion valve in the refrigerating system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature.

According to the control method of the wide temperature range temperature control device provided by the invention, the method further comprises the following steps: acquiring a real-time superheat degree at an evaporator outlet according to a real-time evaporation pressure and a real-time suction temperature at the evaporator outlet in the refrigeration system; and regulating and controlling the refrigerating system according to the real-time superheat degree.

According to the control method of the wide temperature range temperature control device provided by the invention, the regulation and control of the refrigeration system according to the real-time superheat degree specifically comprises the following steps: when the real-time inlet temperature at the inlet of the evaporator in the secondary refrigerant system is lower than the preset inlet temperature, the refrigeration system is regulated and controlled according to the real-time superheat degree, so that the real-time superheat degree is in the preset superheat degree range.

According to the control method of the wide temperature range temperature control device provided by the invention, the refrigeration system is regulated and controlled according to the real-time superheat degree, so that the real-time superheat degree is in a preset superheat degree range, and the method particularly comprises the following steps: and regulating and controlling the opening degree of the main-circuit electronic expansion valve in the refrigeration system according to the deviation between the real-time superheat degree and the preset superheat degree range.

According to the control method of the wide temperature range temperature control device provided by the invention, the method further comprises the following steps: monitoring the real-time liquid path temperature at the outlet of the second side of the gas-liquid heat exchanger; and when the real-time liquid path temperature is larger than the preset liquid path temperature range, regulating and controlling the opening of the cold bypass electronic expansion valve in the refrigeration system.

According to the control method of the wide temperature range temperature control device provided by the invention, the method further comprises the following steps: monitoring the real-time exhaust temperature at the outlet of the compressor; and when the real-time exhaust temperature is larger than the preset exhaust temperature range, regulating and controlling the opening of the cold bypass electronic expansion valve in the refrigeration system.

According to the wide-temperature-range temperature control device and the control method thereof, precise temperature control can be realized through the matching regulation and control of the refrigerating system and the heating assembly, the gas-liquid heat exchanger is arranged in the refrigerating system, the refrigerating capacity output of the compressor under the low-temperature working condition is improved, the refrigerating capacity under the high-temperature working condition is unchanged, namely the output curve of the compressor is closer to the refrigerating demand curve of the temperature control device, the compressor specification of the temperature control device is smaller on the premise of meeting the same performance demand, the overall power consumption is reduced, the energy efficiency ratio is improved, and the cost is reduced.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a wide temperature range temperature control device provided by the present invention;

FIG. 2 is a schematic representation of a compressor performance curve provided by the present invention;

FIG. 3 is a schematic diagram of a wide temperature range temperature control device control method provided by the present invention;

fig. 4 is another schematic structural diagram of the wide temperature range temperature control device provided by the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The wide temperature range temperature control device and the control method thereof according to the present invention will be described with reference to fig. 1 to 4.

Referring to fig. 1, the present embodiment provides a wide temperature range temperature control device, including: a refrigeration system and a coolant system. The refrigeration system comprises a first side of an evaporator 6, a compressor 1, a condenser 2 and a main circuit electronic expansion valve 5 which are sequentially connected in series to form a loop, and the coolant system comprises a second side of the evaporator 6, a heating assembly and a circulation pump 12 which are sequentially connected in series to form a loop, wherein a pipeline between an outlet of the circulation pump 12 and the second side of the evaporator 6 is used for flowing through a load element 14. The refrigeration system is used for providing cold output and transferring cold to the secondary refrigerant in the secondary refrigerant system through heat exchange in the evaporator 6. The heating assembly is used for providing heat output for the secondary refrigerant. Thereby achieving stable temperature output through the refrigeration system and the heating assembly. The refrigeration system further comprises a gas-liquid heat exchanger 17, wherein a pipeline between the evaporator 6 and the compressor 1 flows through a first side of the gas-liquid heat exchanger 17, and a pipeline between the condenser 2 and the main circuit electronic expansion valve 5 flows through a second side of the gas-liquid heat exchanger 17.

The evaporating temperature of the refrigerating system needs to be changed along with the operation temperature of different circulating liquid, namely the secondary refrigerant. The increase or decrease of the evaporation temperature can cause the corresponding increase or decrease of the refrigerating capacity of the refrigerating system, and the demand of the temperature control device is not greatly changed along with the temperature of the circulating liquid. As shown in figure 2, the solid line in the figure is the performance curve of the compressor, the test working condition is constant frequency 50Hz, the condensation temperature is 30 ℃, and different evaporation temperatures T are different when the supercooling degree is 5 DEG C_eVariation of the temporal refrigerating capacity Q; the dotted line in the figure is the refrigeration capacity requirement of the temperature control device of the semiconductor equipmentAnd (6) calculating a curve. When the compressor is selected, the temperature control device can cause the problem of overhigh refrigerating capacity in the middle and high temperature section on the premise of meeting the performance requirements of low-temperature working conditions. Aiming at the problem, the existing refrigerating system mainly adopts two measures of increasing the opening range of a hot gas bypass electronic expansion valve at a high-temperature section and increasing the power of a heater to maintain the cold and heat load balance in a temperature control device and keep the temperature control stable.

Referring to fig. 1, in the temperature control device provided in this embodiment, in the gas-liquid heat exchanger 17, the low-temperature superheated steam in the suction pipe of the compressor 1 is used to cool the refrigerant liquid before throttling, so that the refrigerant liquid obtains a larger supercooling degree, and the refrigerating capacity q per unit mass is increased_m(ii) a The mass flow q of the system is not much increased because the specific volume of the refrigerant in the refrigerating system is not much increased after the superheated steam absorbs heat_eNot much reduced, i.e. the total refrigerating capacity Q of the refrigerating system is Q_m×q_eIs improved. The heat exchange quantity Q 'in the gas-liquid heat exchanger 17 is influenced by the gas-liquid heat exchange temperature difference and the flow of the refrigerant, the lower the evaporation temperature is, the larger the flow of the refrigerant is, the larger the heat exchange quantity Q' in the gas-liquid heat exchanger 17 is, and the more obvious the refrigerating capacity Q of the refrigerating system is improved. Therefore, under the temperature control device system, the refrigeration system is obviously improved under the working conditions that the running temperature of the low circulating liquid corresponds to higher heat exchange temperature difference in the gas-liquid heat exchanger and the high external load corresponds to higher refrigerant flow; under the medium-high temperature working condition, the refrigerating capacity has no obvious change. That is, the temperature control device provided by the embodiment can use the compressor with smaller specification and lower power consumption to meet the refrigeration requirement of the temperature control device.

The wide temperature range temperature control device that this embodiment provided, cooperation regulation and control through refrigerating system and heating element, can realize accurate temperature control, and set up gas-liquid heat exchanger among the refrigerating system, the refrigerating output of compressor under the low temperature operating mode has been improved, compressor low temperature operating mode refrigerating output improves, high temperature operating mode refrigerating output is unchangeable, compressor output curve is more close with temperature control device refrigeration demand curve promptly, temperature control device's compressor specification is littleer under the prerequisite that satisfies the same performance demand, holistic consumption descends, the energy efficiency ratio improves, and cost reduction.

Further, a refrigeration systemThe refrigerant in the system may be R404a refrigerant. The R404a refrigerant has a small change in specific volume in the superheated vapor region, and the specific volume of the superheated vapor of the refrigerant does not increase much after absorbing heat in the gas-liquid heat exchanger 17, so the mass flow rate q of the system is small_eNot much reduced, i.e. the total refrigerating capacity Q of the refrigerating system is Q_m×q_eIs improved.

In addition to the above-described embodiments, a hot bypass line is communicated between the outlet line of the compressor 1 and the inlet line of the first side of the evaporator 6, and a hot bypass electronic expansion valve 16 is provided on the hot bypass line. One end of the hot bypass line is connected to the line between the compressor 1 and the condenser 2, and the other end is connected to the line between the main electronic expansion valve 5 and the first side of the evaporator 6. A cold bypass pipeline is communicated between an inlet pipeline of the main-path electronic expansion valve 5 and an outlet pipeline of the first side of the evaporator 6, and a cold bypass electronic expansion valve 18 is arranged on the cold bypass pipeline. One end of the cold bypass pipeline is connected to the pipeline between the second side of the gas-liquid heat exchanger 17 and the main-path electronic expansion valve 5, and the other end of the cold bypass pipeline is connected to the pipeline between the first side of the evaporator 6 and the first side of the gas-liquid heat exchanger 17.

Further, referring to fig. 1, in the temperature control device provided in this embodiment, in a specific refrigeration system, a dry filter 3 and a liquid sight glass 4 are sequentially and serially connected between an outlet of a condenser 2 and a second-side inlet of a gas-liquid heat exchanger 17; a compressor inverter 21 is connected to the compressor 1. In the secondary refrigerant system, the heating assembly comprises a water tank 10, and pipelines of the secondary refrigerant system flow through the water tank 10; a heater 11 may be provided in the water tank 10.

On the basis of the above embodiment, further, referring to fig. 1, a target temperature sensor 13 is provided at the outlet of the circulation pump 12, an inlet temperature sensor 15 is provided at the inlet of the second side of the evaporator 6, an outlet temperature sensor 9 is provided at the outlet of the second side of the evaporator 6, a pressure sensor 8 and a suction temperature sensor 7 are provided at the outlet of the first side of the evaporator 6, and an exhaust temperature sensor 19 is provided at the outlet of the compressor 1; a liquid path temperature sensor 20 is provided at an outlet of the second side of the gas-liquid heat exchanger 17. Specifically, the liquid path temperature sensor 20 is provided between the outlet of the second side of the gas-liquid heat exchanger 17 and the cold bypass line. A pressure sensor 8 and a suction temperature sensor 7 are provided between the outlet of the first side of the evaporator 6 and the inlet of the first side of the gas-liquid heat exchanger 17.

Further, the heating component is used for adjusting the heating quantity in real time according to the deviation of the real-time target temperature detected by the target temperature sensor 13 and the preset target temperature. The refrigerating system is used for adjusting refrigerating capacity in real time according to the deviation of the real-time outlet temperature detected by the outlet temperature sensor 9 and the preset outlet temperature; the refrigeration system is also used for real-time adjustment according to the real-time outlet temperature detected by the outlet temperature sensor 9, the real-time inlet temperature detected by the inlet temperature sensor 15, the real-time evaporation pressure detected by the pressure sensor 8, the real-time suction temperature detected by the suction temperature sensor 7, the real-time exhaust temperature detected by the exhaust temperature sensor 18 and the real-time liquid path temperature detected by the liquid path temperature sensor 20.

Namely, the temperature control device firstly sets a preset outlet temperature according to a preset target temperature and the heating temperature range of the heating assembly; so that the temperature difference between the preset outlet temperature and the preset target temperature is within the adjustment range of the heating assembly. The temperature control device enables the real-time outlet temperature to approach the preset outlet temperature through the regulation and control of the refrigerating system. And then the real-time target temperature approaches to the preset target temperature through the regulation and control of the heating assembly. The temperature control device is also provided with a pressure sensor and a plurality of temperature sensors, and is used for monitoring the working conditions of all parts in the system in real time, and specifically monitoring real-time inlet temperature, real-time outlet temperature, real-time evaporation pressure, real-time suction temperature, real-time exhaust temperature and real-time liquid path temperature. The refrigerating system is regulated and controlled by aiming at the fact that the real-time outlet temperature approaches to the preset outlet temperature, and meanwhile, the refrigerating system is regulated and controlled according to the real-time inlet temperature, the real-time outlet temperature, the real-time evaporation pressure, the real-time suction temperature, the real-time exhaust temperature and the real-time liquid path temperature in the temperature control device, so that the working condition of the refrigerating system is kept stable in the regulating and controlling process, and the improvement of the temperature regulation precision is facilitated.

Further, the refrigeration system is specifically configured to regulate and control at least one of the operation frequency of the compressor 1, the opening degree of the main-path electronic expansion valve 5, and the opening degree of the thermal bypass electronic expansion valve 16 according to the deviation between the real-time outlet temperature and the preset outlet temperature, so as to adjust the cooling capacity. The refrigerating system is also used for controlling the opening degree of the main-path electronic expansion valve 5 to enable the real-time superheat degree of the outlet at the first side of the evaporator 6 to be within a preset superheat degree range when the real-time inlet temperature is lower than the preset inlet temperature range. The refrigeration system is also used for regulating and controlling the opening of the cold bypass electronic expansion valve 18 when the real-time liquid path temperature exceeds the preset liquid path temperature range. The refrigeration system is also used for regulating and controlling the opening degree of the cold bypass electronic expansion valve 18 when the real-time exhaust temperature is higher than the preset exhaust temperature range.

On the basis of the foregoing embodiments, further, the present embodiment provides a control method for a wide temperature range temperature control device, where the control method is based on the wide temperature range temperature control device, and includes: regulating and controlling the cold output of the refrigerating system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature, so that the real-time outlet temperature is consistent with the preset outlet temperature; and regulating and controlling the heat output of the heating assembly according to the deviation between the real-time target temperature and the preset target temperature in the secondary refrigerant system, so that the real-time target temperature is consistent with the preset target temperature.

The control method of the temperature control device comprises the steps of firstly setting a preset outlet temperature according to a preset target temperature and a heating temperature range of a heating assembly; so that the temperature difference between the preset outlet temperature and the preset target temperature is within the adjustment range of the heating assembly. The control method of the temperature control device enables the real-time outlet temperature to approach the preset outlet temperature through the regulation and control of the refrigerating system. And then the real-time target temperature approaches to the preset target temperature through the regulation and control of the heating assembly. According to the control method of the wide-temperature-range temperature control device, the precise temperature control can be realized through the matching regulation and control of the refrigerating system and the heating assembly, in the temperature control process, the temperature of an outlet of an evaporator in the secondary refrigerant system is kept stable through adjusting the refrigerating system, the load of the heating assembly is favorably reduced, the power consumption of the temperature control device is reduced, the refrigerating capacity change rate of the temperature control system is improved, and the rapid change of an external load is better adapted.

On the basis of the above embodiment, further, the controlling the cold output of the refrigeration system according to the deviation between the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature, so that the making of the real-time outlet temperature consistent with the preset outlet temperature specifically includes: and regulating and controlling at least one of the opening degree of the main circuit electronic expansion valve, the running frequency of the compressor and the opening degree of the thermal bypass electronic expansion valve in the refrigerating system according to the deviation of the real-time outlet temperature at the outlet of the evaporator in the secondary refrigerant system and the preset outlet temperature.

In a secondary refrigerant circulating system, calculating a real-time error value according to a set value SV0 of the outlet temperature of a temperature control device, namely a preset target temperature, and an actual measurement value PV0, namely a real-time target temperature, and controlling the output ratio of a heater by utilizing a PID algorithm to realize high-precision temperature control of the outlet temperature; aiming at a refrigerating system, a target value of an outlet of an evaporator at a secondary refrigerant side, namely preset outlet temperature SV is equal to SV 0-delta T, and the delta T takes different values according to different temperature working conditions and circulating pump flow, so that the difference value of SV and SV0 is ensured to be in the adjustable range of a heater. The inlet temperature of the water tank 10 is matched with the target value SV by adjusting the refrigerating output of the Freon refrigerating system. The specific control flow is as follows: according to the real-time error value of SV and the measured value of the water tank inlet temperature sensor, namely the real-time outlet temperature PV, the PID algorithm is utilized to control the output frequency of the compressor frequency converter 21 of the refrigeration system, namely, the rotating speed of the compressor is adjusted, the gas transmission quantity of the compressor is changed, and meanwhile, the opening degrees of the main circuit electronic expansion valve 5 and the thermal bypass electronic expansion valve 16 (the adjusting direction is opposite to that of the main circuit expansion valve 5) are adjusted to realize the adjustment of the refrigerating capacity, thereby maintaining the stability of the water. The whole temperature control device realizes high-precision temperature control of outlet temperature through two cascade PID control systems.

On the basis of the foregoing embodiment, further, the method for controlling a wide temperature range temperature control device provided in this embodiment further includes: acquiring a real-time superheat degree at an evaporator outlet according to a real-time evaporation pressure and a real-time suction temperature at the evaporator outlet in the refrigeration system; and regulating and controlling the refrigerating system according to the real-time superheat degree.

On the basis of the above embodiment, further, the controlling the refrigeration system according to the real-time superheat degree specifically includes: when the real-time inlet temperature at the inlet of the evaporator in the secondary refrigerant system is lower than the preset inlet temperature, the refrigeration system is regulated and controlled according to the real-time superheat degree, so that the real-time superheat degree is in the preset superheat degree range. The risk of liquid return of the compressor is avoided.

On the basis of the above embodiment, further, the control of the refrigeration system according to the real-time superheat degree makes the real-time superheat degree in the preset superheat degree range specifically include: and regulating and controlling the opening degree of the main-circuit electronic expansion valve in the refrigeration system according to the deviation between the real-time superheat degree and the preset superheat degree range. Specifically, when the real-time inlet temperature at the inlet of the evaporator in the secondary refrigerant system is lower than the preset inlet temperature, the real-time superheat SH at the outlet of the evaporator needs to be collected, a reasonable range of the superheat is set, and when the real-time superheat is too high or too low, the opening degree of the main-path electronic expansion valve needs to be correspondingly increased or reduced in a stepwise manner according to the real-time superheat overshoot Δ SH.

On the basis of the foregoing embodiment, further, the method for controlling a wide temperature range temperature control device provided in this embodiment further includes: monitoring the real-time liquid path temperature at the outlet of the second side of the gas-liquid heat exchanger; and when the real-time liquid path temperature is larger than the preset liquid path temperature range, regulating and controlling the opening of the cold bypass electronic expansion valve in the refrigeration system. Specifically, when the real-time liquid path temperature is higher than the preset liquid path temperature range, the opening degree of the cold bypass electronic expansion valve 18 is increased; and when the real-time liquid path temperature is lower than the preset liquid path temperature range, reducing the opening degree of the cold bypass electronic expansion valve 18.

On the basis of the foregoing embodiment, further, the method for controlling a wide temperature range temperature control device provided in this embodiment further includes: monitoring the real-time exhaust temperature at the outlet of the compressor; and when the real-time exhaust temperature is larger than the preset exhaust temperature range, regulating and controlling the opening of the cold bypass electronic expansion valve in the refrigeration system. Specifically, when the real-time exhaust temperature is higher than the preset exhaust temperature range, the opening degree of the cold bypass electronic expansion valve 18 is increased.

On the basis of the above embodiments, further, the temperature control device system provided by the present embodiment is as shown in fig. 1. The temperature control device is mainly divided into two parts, one is a Freon refrigerating system, and the other is a secondary refrigerant circulating system. The Freon refrigerating system uses R404A refrigerant, and the system comprises a compressor 1, a condenser 2, a drying filter 3, a liquid viewing mirror 4, a main circuit electronic expansion valve 5, an evaporator 6, an evaporator outlet suction temperature sensor 7, a low-pressure sensor 8, a hot bypass electronic expansion valve 16, a gas-liquid heat exchanger 17, a cold bypass electronic expansion valve 18, an exhaust temperature sensor 19, a liquid circuit temperature sensor 20 and a circulating system formed by connecting pipelines thereof; the coolant circulation system includes an evaporator 6, an outlet temperature sensor 9, a water tank 10, a heater 11, a circulation pump 12, a target temperature sensor 13, an external load unit 14, and an inlet temperature sensor 15.

The control method for the above system, as shown in fig. 3, is mainly divided into the following parts: the cold-carrying circulation system still adopts a PID algorithm, the input quantity is the error between the set value of the outlet temperature of the temperature control device, namely the preset target temperature SV0, and the actual value, namely the real-time target temperature PV0, and the PID output quantity controls the output ratio of the heater so as to realize the stability of the outlet temperature of the temperature control device. The control of the refrigerating system is divided into two parts, firstly, according to the error between the set value of the outlet temperature of the circulating liquid side evaporator, namely the preset outlet temperature SV, and the actual value, namely the real-time outlet temperature PV, the PID algorithm is adopted to adjust the main circuit electronic expansion valve 5, the compressor frequency converter 21 and the hot gas bypass electronic expansion valve 16 (the adjusting direction is opposite to that of the main circuit expansion valve), so that the adjustment of the refrigerating capacity is realized.

In addition, under the low-temperature working condition, the temperature difference between the evaporation temperature and the circulating liquid temperature is not large, the superheat degree of the outlet at the first side of the evaporator is possibly too low, and the compressor has the risk of liquid return, so that when the circulating liquid temperature, namely the real-time inlet temperature, is lower than a certain set value m, the real-time superheat degree SH of the outlet of the evaporator needs to be collected, a reasonable range of the superheat degree is set, and when the superheat degree is too high/too low, the opening degree of the main-path electronic expansion valve needs to be increased/decreased in a stepped mode according to the superheat degree overshoot delta SH.

The second is the control of the cold bypass electronic expansion valve 18, which mainly controls the exhaust temperature of the compressor and the temperature of the liquid before throttling. When the circulating liquid operating temperature exceeds the condenser cooling water outlet temperature, the gas side, i.e., the first side inlet temperature of the gas-liquid heat exchanger 17 may be higher than the condensing temperature of the refrigeration system. At this time, the refrigerant liquid enters the second side of the gas-liquid heat exchanger 17 and is heated, the measured value of the liquid path temperature sensor 20 exceeds the condensation temperature value, namely flash steam appears in the liquid pipe before throttling, the proportion of the liquid flowing through the throttling opening of the expansion valve is rapidly reduced, the refrigerating capacity is obviously reduced, the fluctuation is large, and the temperature of the refrigerating system cannot be normally controlled. Therefore, the supercooling degree of the liquid before throttling is ensured to be more than 3 ℃ by the low-temperature liquid passing through the cold bypass electronic expansion valve 18 under the medium-high temperature working condition. Setting the measurement value of the liquid path temperature sensor 20 in the (n, m) range, that is, setting the liquid path temperature range as (n, m); the difference between m and n is 3-5; the value m, i.e., the maximum value of the preset liquid path temperature range, is suitably set to the cooling water inlet temperature of the condenser 2.

In addition, the superheated steam passing through the first side of the gas-liquid heat exchanger 17 has a high temperature, which causes an increase in the compressor discharge temperature, and when the discharge temperature is higher than the set value p, it is necessary to gradually increase the opening degree of the cold bypass electronic expansion valve 18 to control the discharge temperature to be equal to or lower than an appropriate value.

The present embodiment provides a temperature control device as shown in fig. 1. The system comprises a refrigeration system which comprises a compressor 1, a condenser 2, a main circuit electronic expansion valve 5, a hot bypass electronic expansion valve 16, an evaporator 6, a gas-liquid heat exchanger 17, a cold bypass electronic expansion valve 18, an air suction temperature sensor 20 and the like, and a circulating system which comprises a water tank inlet temperature sensor, a water tank 10, a heater 11, a circulating pump 12, a target temperature sensor 13 and a connecting pipeline thereof. The method for controlling a thermostat shown in fig. 3 provides a specific control logic for each component of the thermostat, particularly for the cold bypass electronic expansion valve 18.

The energy consumption of the temperature control device is reduced, and the product cost is reduced. The temperature control device system and the control method thereof according to the embodiment improve the refrigerating capacity of the compressor under the low-temperature working condition aiming at the performance demand characteristics of the temperature control device for the semiconductor equipment, so that the output curve of the compressor is more matched with the demand curve. For the temperature control device for the semiconductor with the same performance requirement, the specification of the compressor is reduced, and the operation energy consumption of the temperature control device is reduced.

Aiming at the high load requirement of the system under the low-temperature operation working condition, the problem of overhigh exhaust temperature of the compressor is easy to occur due to the fact that the compression ratio is high and the suction temperature is high after the compressor passes through the gas-liquid heat exchanger 17. Therefore, based on the system structure shown in fig. 4, the compressor 1 is replaced by the liquid injection compressor 1, and the running state of the compressor under the low-temperature working condition is improved by adopting the matched temperature regulating valve 22. Specifically, the compressor 1 is a liquid injection compressor. The liquid spraying compressor is provided with a liquid spraying pipeline, the inlet end of the liquid spraying pipeline is connected to the inlet of the second side of the gas-liquid heat exchanger 17, and the outlet end of the liquid spraying pipeline is connected to the compressor. The liquid spraying pipeline is provided with a temperature regulating valve 22. The temperature control valve 22 is a mechanical component, and automatically adjusts the amount of spray liquid according to the exhaust gas temperature.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.