阅读说明：本技术 扫描光刻机的同步诊断方法、装置、介质及电子设备 (Synchronous diagnosis method and device for scanning photoetching machine, medium and electronic equipment ) 是由 朱晶 陈丹 谢仁飚 张骥 于婷 于 2019-11-27 设计创作，主要内容包括：本申请实施例公开了一种扫描光刻机的同步诊断方法、装置、介质及电子设备。该方法包括：根据接收到的测试对象与测试参数,生成同步测试用例；若测试对象为运动控制器,则通过运动同步时序控制板卡发送；若为位置采样控制器,准同步时序控制板卡,剂量同步时序控制板卡,像质同步时序控制板卡,垂向同步时序控制板卡以及照明同步时序控制板卡中的至少一种,则通过同步伺服时钟控制板卡发送；通过被测主系统接收被测分系统返回的同步返回值,并根据同步返回值诊断测试对象的同步问题。通过执行本方案,可以快速并准确的对扫描光刻机的同步问题进行定位,无需由人工诊断消耗大量的人力成本和时间成本,达到了保证扫描光刻机运行稳定性的效果。(The embodiment of the application discloses a synchronous diagnosis method, a synchronous diagnosis device, a synchronous diagnosis medium and electronic equipment of a scanning photoetching machine. The method comprises the following steps: generating a synchronous test case according to the received test object and the test parameters; if the test object is a motion controller, the board card is controlled to transmit through a motion synchronous time sequence; if the lighting synchronous timing control board card is at least one of a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and a lighting synchronous timing control board card, the lighting synchronous timing control board card is sent through a synchronous servo clock control board card; and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value. By executing the scheme, the synchronous problem of the scanning photoetching machine can be quickly and accurately positioned, a large amount of labor cost and time cost are not required to be consumed by manual diagnosis, and the effect of ensuring the operation stability of the scanning photoetching machine is achieved.)

1. A synchronous diagnosis method of a scanning photoetching machine is characterized by comprising the following steps:

generating a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value.

2. The method of claim 1, wherein the main system under test is further configured to test transmission problems of the bus with the sub-system under test;

accordingly, the method can be used for solving the problems that,

receiving a synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value, wherein the synchronous return value comprises the following steps:

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object and the transmission problem between the test object and the test object according to the synchronous return value.

3. The method of claim 2, wherein receiving, by the main system under test, a synchronization return value returned by the sub-system under test, and diagnosing synchronization problems of the test object and transmission problems with the test object according to the synchronization return value comprises:

reading a synchronous return value returned by the tested sub-system from a register of the tested main system;

determining specific information of the synchronous return value according to the synchronous return value and a preset return value definition table; and the synchronous return value comprises a wiring state return value and a board card state return value.

4. The method of claim 2, wherein after receiving, by the tested host system, the synchronization return value returned by the tested sub-system, the method further comprises:

performing synchronous problem attribute judgment through the main system to be tested;

and switching the state machine of the scanning lithography machine into a stop state or an error state according to the judgment result of the synchronization problem attribute.

5. The method of claim 1, wherein before generating the synchronous test case according to the received test object and the test parameters, the method further comprises:

responding to a self-checking program starting request, and sending self-checking instructions to the tested main system and the tested sub-systems;

and receiving self-checking results of the tested main system and the tested sub-systems, and if the self-checking results are unqualified self-checks, not generating a synchronous test case.

6. The method of claim 1, wherein after diagnosing a synchronization problem with the test object based on the synchronization return value, the method further comprises:

if the test object has the synchronization problem, the test of the test object with the synchronization problem is interrupted, and alarm information aiming at the test object with the synchronization problem is generated.

7. A synchronous diagnostic device of a scanning lithography machine is characterized by comprising:

the synchronous test case generation module is used for generating a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

the synchronous test case sending module is used for sending the test case to the test object through the motion synchronous timing sequence control board card if the test object comprises the motion controller; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and the synchronous problem diagnosis module is used for receiving the synchronous return value returned by the tested sub-system through the tested main system and diagnosing the synchronous problem of the test object according to the synchronous return value.

8. The apparatus of claim 7, wherein the main system under test is further configured to test transmission problems of the bus between the main system under test and the sub system under test;

correspondingly, the synchronization problem diagnosis module is specifically configured to:

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object and the transmission problem between the test object and the test object according to the synchronous return value.

9. A computer-readable storage medium, on which a computer program is stored, which program, when being executed by a processor, is adapted to carry out a method for the synchronized diagnosis of a scanning lithography machine according to any one of claims 1 to 6.

10. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements the method of synchronized diagnosis of a scanning lithography machine according to any one of claims 1 to 6 when executing the computer program.

Technical Field

The embodiment of the application relates to the technical field of computers, in particular to a synchronous diagnosis method, a synchronous diagnosis device, a synchronous diagnosis medium and electronic equipment of a scanning photoetching machine.

Background

At present, with the rapid development of the technology level, the demand of the lithography machine is increasing. The photoetching machine is a device for manufacturing high-precision chips by adopting a photoetching technology. At present, in order to meet the development requirements of high precision and large size of chips, a scanning photoetching machine becomes the most favored equipment.

The scanning photoetching machine is mainly characterized by a synchronous scanning function. The light beam passes through a slit and is projected on the mask surface through the illumination system, and the mask plate passes through the light speed at a set constant speed. Meanwhile, the silicon wafer moves under the lens in the opposite direction to the mask plate. During scanning, the involved subsystem modules must complete the scanning within the same time period, and the start time and the end time of the scanning must be the same. That is, for scanning, all involved subsystem modules must be strictly consistent in scanning timing. And strict synchronous timing requirements are imposed on involved subsystems in the exposure scanning process, and strict synchronous timing requirements are imposed on all involved subsystem modules.

However, because the scanning lithography machine has a complex structure, once a synchronization problem occurs, the workload of checking the synchronization problem is huge, and the efficiency of diagnosing the synchronization problem of the lithography machine is greatly influenced. Therefore, an accurate and efficient diagnosis method for diagnosing the synchronization problem of the scanning lithography machine is urgently needed.

Disclosure of Invention

The embodiment of the application provides a synchronous diagnosis method, a synchronous diagnosis device, a synchronous diagnosis medium and electronic equipment of a scanning photoetching machine, which can quickly and accurately position the synchronous problem of the scanning photoetching machine, do not need manual diagnosis to consume a large amount of labor cost and time cost, and achieve the effect of ensuring the operation stability of the scanning photoetching machine.

In a first aspect, an embodiment of the present application provides a synchronous diagnostic method for a scanning lithography machine, where the method includes:

generating a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value.

Optionally, the main system under test is further configured to test a transmission problem of a bus between the main system under test and the sub-system under test;

accordingly, the method can be used for solving the problems that,

receiving a synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value, wherein the synchronous return value comprises the following steps:

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object and the transmission problem between the test object and the test object according to the synchronous return value.

Optionally, the receiving, by the main system under test, a synchronization return value returned by the sub-system under test, and diagnosing a synchronization problem of the test object and a transmission problem between the test object and the test object according to the synchronization return value includes:

reading a synchronous return value returned by the tested sub-system from a register of the tested main system;

determining specific information of the synchronous return value according to the synchronous return value and a preset return value definition table; and the synchronous return value comprises a wiring state return value and a board card state return value.

Optionally, after receiving, by the tested host system, a synchronization return value returned by the tested sub-system, the method further includes:

performing synchronous problem attribute judgment through the main system to be tested;

and switching the state machine of the scanning lithography machine into a stop state or an error state according to the judgment result of the synchronization problem attribute.

Optionally, before generating the synchronous test case according to the received test object and the test parameter, the method further includes:

responding to a self-checking program starting request, and sending self-checking instructions to the tested main system and the tested sub-systems;

and receiving self-checking results of the tested main system and the tested sub-systems, and if the self-checking results are unqualified self-checks, not generating a synchronous test case.

Optionally, after diagnosing the synchronization problem of the test object according to the synchronization return value, the method further includes:

if the test object has the synchronization problem, the test of the test object with the synchronization problem is interrupted, and alarm information aiming at the test object with the synchronization problem is generated.

In a second aspect, an embodiment of the present application provides a synchronous diagnostic apparatus for a scanning lithography machine, the apparatus including:

the synchronous test case generation module is used for generating a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

the synchronous test case sending module is used for sending the test case to the test object through the motion synchronous timing sequence control board card if the test object comprises the motion controller; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and the synchronous problem diagnosis module is used for receiving the synchronous return value returned by the tested sub-system through the tested main system and diagnosing the synchronous problem of the test object according to the synchronous return value.

Optionally, the main system under test is further configured to test a transmission problem of a bus between the main system under test and the sub-system under test;

correspondingly, the synchronization problem diagnosis module is specifically configured to:

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object and the transmission problem between the test object and the test object according to the synchronous return value.

In a third aspect, an embodiment of the present application provides a computer-readable storage medium, on which a computer program is stored, and the computer program, when executed by a processor, implements a synchronous diagnosis method for a scanning lithography machine according to an embodiment of the present application.

In a fourth aspect, an embodiment of the present application provides an electronic device, including a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor executes the computer program to implement the synchronous diagnosis method for a scanning lithography machine according to the embodiment of the present application.

According to the technical scheme provided by the embodiment of the application, a synchronous test case is generated according to a received test object and test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card; if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card; and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value. By adopting the technical scheme provided by the application, the synchronization problem of the scanning photoetching machine can be quickly and accurately positioned, a large amount of labor cost and time cost are not required to be consumed by manual diagnosis, and the effect of ensuring the operation stability of the scanning photoetching machine is achieved.

Drawings

FIG. 1 is a flowchart of a synchronous diagnostic method for a scanning lithography machine according to an embodiment of the present application;

FIG. 2 is a schematic structural diagram of a synchronous diagnostic system of a scanning lithography machine according to an embodiment of the present application;

FIG. 3 is a schematic diagram of an FPGA logic design provided in an embodiment of the present application;

FIG. 4 is a diagram of a synchronous motion control panel card scanning state machine provided in an embodiment of the present application;

FIG. 5 is a schematic structural diagram of a synchronous diagnostic apparatus of a scanning lithography machine according to an embodiment of the present application;

fig. 6 is a schematic structural diagram of an electronic device according to an embodiment of the present application.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be further noted that, for the convenience of description, only some of the structures related to the present application are shown in the drawings, not all of the structures.

Before discussing exemplary embodiments in more detail, it should be noted that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although a flowchart may describe the steps as a sequential process, many of the steps can be performed in parallel, concurrently or simultaneously. In addition, the order of the steps may be rearranged. The process may be terminated when its operations are completed, but may have additional steps not included in the figure. The processes may correspond to methods, functions, procedures, subroutines, and the like.

Fig. 1 is a flowchart of a synchronous diagnosis method for a scanning lithography machine according to an embodiment of the present application, where the present embodiment is applicable to a case of diagnosis of a scanning lithography machine, and the method can be executed by a synchronous diagnosis apparatus for a scanning lithography machine according to an embodiment of the present application, and the apparatus can be implemented by software and/or hardware, and can be integrated in an electronic device such as a server.

As shown in fig. 1, the synchronous diagnosis method of the scanning lithography machine includes:

and S110, generating a synchronous test case according to the received test object and the test parameters.

The test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: the controller comprises at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card.

The test object may be a main system to be tested, or may also be a sub-system to be tested connected to the main system to be tested, and the test object may be one or more of the main system to be tested and the sub-system to be tested. The test parameters may be specific test instructions and parameters for testing each test object, for example, may be synchronous scan parameters for testing synchronicity between each tested sub-system. Specifically, the state parameters and the like of each board card can be obtained through testing parameters. The test case is a case for testing each main system and each subsystem of the scanning photoetching machine according to the working characteristics of the scanning photoetching machine. When the test case is used, the scanning photoetching machine can be in a detection state, and whether the synchronization condition of the scanning photoetching machine has a problem or not can be diagnosed by using the test case.

In this embodiment, the test object includes a tested main system and a tested sub-system, and the tested main system includes: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the motion synchronization timing control board card is a board card for controlling motion synchronization timing, and can be understood as a board card for providing a motion synchronization timing instruction. The synchronous servo clock control board is a board for providing synchronous servo clock signals.

The tested sub-system comprises: the controller comprises at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card. The motion controller may be a core device that controls various moving parts of the scanning lithography machine. The position sampling controller can be a core device for sampling the positions of all the moving parts. The synchronous motion timing control board card is connected with the motion controller, the synchronous servo clock control board card is connected with the quasi-synchronous timing control board card, the dose synchronous timing control board card, the image quality synchronous timing control board card, the vertical synchronous timing control board card and the illumination synchronous timing control board card.

S120, if the test object comprises a motion controller, sending a test case to the test object through a motion synchronous time sequence control board card; and if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, the test case is sent to the test object through a synchronous servo clock control board card.

Due to the relationship between the tested main system and the tested sub-systems, the test case can be transmitted to the tested sub-systems through different tested main systems according to different test objects. For example, if the current test object includes a dose synchronization timing control board, the test case may be sent to the dose synchronization timing control board through the synchronization servo clock control board.

And S130, receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value.

And the tested main system and the tested sub-system can return corresponding numerical values to be used as the test result of the test object in the process of executing the test case to test. If the wiring state is tested currently, if the returned value is 0X1, the wiring state is not in problem, and if the tested object returns 0X0, the tested object is in no problem. If the boundary state and the board card state are tested simultaneously, whether the wiring state of each board card and the board card state of the board card are in a problem or not can be determined according to the content of each field by predefining different fields.

According to the technical scheme provided by the embodiment of the application, a synchronous test case is generated according to a received test object and test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card; if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card; and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value. By adopting the technical scheme provided by the application, the synchronization problem of the scanning photoetching machine can be quickly and accurately positioned, a large amount of labor cost and time cost are not required to be consumed by manual diagnosis, and the effect of ensuring the operation stability of the scanning photoetching machine is achieved.

Fig. 2 is a schematic structural diagram of a synchronous diagnostic system of a scanning lithography machine according to an embodiment of the present application. As shown in fig. 2, the synchronous diagnostic system of the scanning lithography machine includes a calibration module running on an upper computer 101, a simulation test driving module 102 running on vxworks, a firmware module 103 running on DSP, and a logic module 104 running on FPGA.

The upper computer 101 can run Linux/Solaris and other operations, and is connected with the motion control CPU1, the position sampling CPU2, the image quality control CPU3, the vertical control CPU4, the alignment control CPU5, the illumination control CPU6, the volume control CPU7 and the upper computer Linux/Solaris in the simulation test driving module 102 through 100 Ethernet.

The subsystem controller motion control CPU1, the position sampling CPU2, the image quality control CPU3, the vertical control CPU4, the alignment control CPU5, the illumination control CPU6 and the dosage control CPU7 are respectively connected with the motion controller 10, the position sampling controller 11, the alignment controller 12, the dosage controller 13, the image quality controller 14, the vertical controller 15 and the illumination controller 16 in the subsystem controller through communication buses. The communication bus can be Gbe/VME/PCIe/SRIO bus. For example, the subsystem controller CPU issues control parameters and instructions to the respective motion controllers over 200Gbe/VME/PCIe and returns results over bus 200 SRIO/VME.

The motion synchronization timing control board card 20 and the synchronization servo clock control board card 21 are respectively connected with the motion control CPU1 and the position sampling CPU2 through a 200Gbe/VME/PCIe bus.

The motion synchronization timing sequence control board card 20 and the synchronization servo clock control board card 21 are used as a main synchronization controller; the motion synchronization timing control board 20 is connected with the synchronization servo clock control board 21 through a 500MO-sync bus. The alignment synchronization timing control board 22, the dose synchronization timing control board 23, the image quality synchronization timing control board 24, the vertical synchronization timing control board 25, and the illumination synchronization timing control board 26 are slave synchronization controllers. The master synchronous controller synchronous servo clock control board card 21 is respectively connected with each slave synchronous controller in the subsystem, and each slave synchronous controller in the subsystem is kept connected through a 500sync bus.

The motion control CPU1 issues a scanning instruction according to a preset scanning action, issues the scanning instruction to the motion synchronization timing sequence control board card 20 through 200Gbe/VME/PCIe, forwards the board card to the synchronization servo clock control board card 21 through a 500MO-Syncbus bus, forwards the synchronization servo clock control board card 21 to each scanning related sub-timing sequence board card through the 500Syncbus bus, and returns a structure related to hardware to the synchronization servo clock control board card 21 according to a specified Syncbus bus protocol format.

In a Syncbus bus protocol format, the subsystem STARTs counting according to the START time, STARTs storing synchronous data when the counting reaches 30, completes analysis at the STOP time and gives a synchronous trigger next-stage instruction; delaying by one 50us, returning the synchronous scanning parameters of the subsystem according to a fixed format: the parameters involved are: wiring state, last synchronous state code, board card state, state parameter and the like; these parameters are key parameters for subsystem synchronization failures.

The Syncbus bus expands the function, and takes a dose time sequence control board card as an example, and judges whether a Syncout signal at the normal light emitting time is aligned with the synchronous state code transition time (START- > SCAN) of a synchronous servo clock time sequence control board card; if the alignment is carried out, the board card state of the dose control time sequence control board card is 0; if not, the card status of the dose control timing control card is 0x 8.

Fig. 3 is a schematic diagram of an FPGA logic design provided in the embodiment of the present application. As shown in fig. 3, if the state of the board card received by the synchronization module of the synchronous servo clock control board card from the subsystem is not 0, a latch instruction is generated to latch the current state and state parameters of the board card; simultaneously, generating a falling edge and generating VME interruption; initiating a VME interrupt request to the bus and placing an interrupt vector and a level on the VME bus; the sampling control CPU2 responds to the VME interrupt response and transmits the response on the VME backboard; the synchronous servo clock control board card sets a data response signal again, and an interrupt vector is put on the VME bus; the sample control CPU2 then executes an interrupt service routine, reads the latched board status and the value of the status parameter register, and clears the latch. Meanwhile, the state of each subsystem is collected through a 500MO-Syncbus bus and then forwarded to the motion synchronization timing sequence control board card 20.

Fig. 4 is a schematic diagram of a synchronous motion control board card scanning state machine provided in an embodiment of the present application. As shown in fig. 4, the motion synchronization timing control board controls the state machine of the whole synchronization control system; the normal process is as follows: EMPTY- > START- > SCAN- > STOP; if a fault occurs, the fault is processed from any current state through an arbitration mechanism: performing error reporting arbitration processing according to the error grade, wherein the faults of the slave synchronous timing control daughter board card, the slave dosage synchronous timing control daughter board card 23, the slave image quality synchronous timing control daughter board card 24, the slave vertical synchronous timing control daughter board card 25 and the slave lighting synchronous timing control daughter board card 26 are low in grade; the faults of the motion synchronization timing sequence control board card 20 and the synchronous servo clock control board card 21 are high-level synchronization errors; in a high-level synchronization ERROR, the state machine of the motion synchronization timing sequence control board card 20 is switched to ERROR; the low level switches the state machine to STOP.

The firmware module 103 is mainly used for testing the drive and data stream required by the interaction of the internal synchronous bus; the firmware module 103 may run on a DSP; and receiving an instruction of the simulation test driving module 102, executing a data stream, and performing data interaction with the motion synchronization timing control board 20 and the synchronous servo clock control board 21 through a synchronous bus in the 400SDB, wherein the bus channel can transmit a software flow result.

The upper computer 101 and the simulation test driving module 102 issue a synchronization instruction through 100Ethernet, and can obtain register results of the motion synchronization timing control board 20 and the synchronous servo clock control board 21. The test results of the firmware module 103 may also be obtained. The upper computer 101 can take the results of the motion control CPU1, the position sampling CPU2, the image quality control CPU3, the vertical control CPU4, the alignment control CPU5, the illumination control CPU6, and the dose control CPU 7. After the upper computer 101 obtains the return result, the result is analyzed through the data processing and analyzing module according to the preset fault tree model and is displayed on the interface, so that a user can conveniently and directly check the diagnosis result and guide troubleshooting.

The subsystem controller CPU is an embedded processor which runs an embedded operating system. Firmware drivers are library programs familiar to signal processing firmware. The subsystem controller is a digital signal processing control board card.

After the synchronous fault occurs, the diagnostic system can automatically report, and the whole machine can also report the fault due to the STOP or ERROR and store the fault; the upper computer 101 records the current failure time.

The clock frequency of the Syncbus bus is 20K, and the time sequence analysis board cards of all the subsystems analyze and trigger the next-stage instruction according to the unified Syncbus bus protocol, or perform frequency doubling treatment according to the requirement.

On the basis of the foregoing embodiments, optionally, the main system under test is further configured to test a transmission problem of a bus between the main system under test and the sub system under test; correspondingly, the method for receiving the synchronous return value returned by the tested sub-system through the tested main system and diagnosing the synchronous problem of the test object according to the synchronous return value comprises the following steps: and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object and the transmission problem between the test object and the test object according to the synchronous return value. Wherein the transmission problem can be determined by a synchronization return value of the wiring state. By means of the arrangement, not only synchronous diagnosis can be carried out on each subsystem, but also the wiring state of each subsystem and the bus can be diagnosed.

On the basis of the foregoing embodiments, optionally, receiving, by the main system under test, a synchronization return value returned by the sub-system under test, and diagnosing, according to the synchronization return value, a synchronization problem of the test object and a transmission problem with the test object, includes: reading a synchronous return value returned by the tested sub-system from a register of the tested main system; determining specific information of the synchronous return value according to the synchronous return value and a preset return value definition table; and the synchronous return value comprises a wiring state return value and a board card state return value.

For example, the return value definition table may include the following:

the present embodiment may set different return values for the wiring status and the board status, and each return value represents a corresponding status, such as no error, a synchronization status error, and the like. By the arrangement, the subsystem with the abnormal synchronization can be quickly and accurately determined, and quick diagnosis of the scanning photoetching machine is facilitated.

On the basis of the foregoing embodiments, optionally, after receiving, by the master system under test, the synchronization return value returned by the slave system under test, the method further includes: performing synchronous problem attribute judgment through the main system to be tested; and switching the state machine of the scanning lithography machine into a stop state or an error state according to the judgment result of the synchronization problem attribute. For example, it may be determined according to whether the test object with the problem belongs to the tested main system or the tested sub-system, if the test object is the tested main system, it may be determined as an attribute that needs to be reported in error, and if the test object is the tested sub-system, it may be determined as an attribute that needs to be switched to the stopped state. Through the arrangement, a user can be helped to quickly master the severity of the problem diagnosed by the scanning photoetching machine.

On the basis of the foregoing embodiments, optionally, before generating the synchronous test case according to the received test object and the test parameter, the method further includes: responding to a self-checking program starting request, and sending self-checking instructions to the tested main system and the tested sub-systems; and receiving self-checking results of the tested main system and the tested sub-systems, and if the self-checking results are unqualified self-checks, not generating a synchronous test case. In the technical scheme, before the detection, self-detection may be preferentially performed, including self-detection of the main system to be detected and self-detection of the sub-systems to be detected, where a detection result may be determined according to data returned by each system, for example, self-detection may be performed on whether each system can be normally powered on. Through self-checking, the authenticity of data in the subsequent diagnosis process can be ensured, and the detection efficiency of the scanning photoetching machine is improved.

On the basis of the foregoing embodiments, optionally, after diagnosing the synchronization problem of the test object according to the synchronization return value, the method further includes: if the test object has the synchronization problem, the test of the test object with the synchronization problem is interrupted, and alarm information aiming at the test object with the synchronization problem is generated. After the diagnosis result is that a problem exists, analysis can be carried out, a diagnosis result report is obtained, and alarm information aiming at the test object with the synchronization problem is generated. The corresponding diagnosis result can be displayed, for example, through a display screen, so that a user can determine whether further maintenance processing needs to be performed on the scanning lithography machine.

In order to make the technical solution more obvious to those skilled in the art, the present application also provides the following specific embodiments.

1) In the testing process, a tester can set the operations of testing flow logic, parameter configuration and the like through a human-computer interaction interface. The task of the test development platform is to generate necessary test cases according to requirements.

Testing tasks	Hardware configuration parameters	Software parameters
			00 synchronous board card function test	TMC	E/M TIME CMMD
001 synchronous module and scene test	MO-SYNCBUS\SYNCBUS	E/M TIME CMMD N

2) After the test information task is edited, starting the test execution task, analyzing the test information in the test execution task, and issuing an effective instruction to the software driver.

3) And initializing the driving software.

4) After the firmware is downloaded, the initialization is executed after the command is issued according to the driver.

5) After successful initialization of the firmware, the system hardware begins a self-test.

6) And after the self-checking is passed, starting driving according to the test to realize the test work.

7) Executing a test task, if fault diagnosis occurs, diagnosing and giving an analysis result; if the test is reasonable, the task is circulated until the test is completed.

8) And finally, displaying the test result, and storing the result in the server after the test work is finished.

As shown in fig. 3, when the board state of the synchronous servo clock control board 21 receiving the dose synchronous timing control board 23 is not 0, VME interrupt is generated and the CPU2 is informed; meanwhile, the dose synchronization timing sequence control board card 23 latches the synchronization buffer area until the software reads the value of the parameter register and clears the latch register, and the VME is restarted again for interruption; and simultaneously setting the error position of the Syncbus bus of the board card 21 as 1.

After the synchronous servo clock control board card 21 obtains the interruption of the fault VME, the synchronous servo clock control board card informs a position sampling CPU2, and then the synchronous servo clock control board card is provided for a calibration module of an upper computer in an event mode.

The online real-time diagnostic protocol must follow the following points:

1) the subsystems judge respective time sequence states: if the time sequence is not correct, the situation is automatically judged through the subsystem, and the status of the juxtaposed board card and the status of the firmware are in error status.

2) And (3) giving alarm information by time sequence faults: and the synchronous servo control board synchronous hardware detects the board card state information of the subsystem in real time, detects the board card error and immediately generates VME interrupt to inform a software program. The software program gives out alarm signal, but does not affect the whole process.

3) And (3) real-time measurement: the subsystem time sequence detection and the alarm report of the synchronous servo control board card are designed and analyzed by the FPAG, and the real-time performance is guaranteed.

Specifically, after the motion synchronization timing control board 20 receives the synchronization status code of the synchronization servo clock control board 21, it will arbitrate how the current synchronization state machine switches according to the error reporting level as shown in fig. 4.

The state machine of the motion synchronization timing motion board card is as shown in fig. 4: and controlling a state machine of the board card by synchronous motion. Each state of the system corresponds to the scanning state of the subsystem one by one, wherein:

SBC _ START: entering a scanning preparation stage, and moving the workpiece platform to a scanning starting point;

SBC _ SCAN: entering an actual scanning stage;

SBC _ STOP: the actual scanning phase is finished, only used for single-field scanning and the last scanning, and the workpiece starts to decelerate to the speed zero.

And the SBC _ EMPTY state corresponds to the IDLE state of the subsystem. A synchronous arbitration mechanism is added in a scanning state machine of the synchronous motion control board card, and the state machine is switched to STOP for error reporting with lower grade in a synchronous control framework; for the higher synchronous ERROR level, the state machine switches to ERROR.

The upper computer 101 can test the functions of the synchronous control module, the bus and the link according to the module function test; and the self-checking program of the hardware and the software can be realized according to the hardware and the actual configuration condition, so that the complete machine can automatically detect faults in the integrated engineering conveniently.

The upper computer 101 can collect hardware and software parameters of all subsystems through the Ethernet, and can identify problems such as synchronous time sequence, wiring faults, bus faults and the like by combining a fault tree.

The technical problem that this scheme can solve is, provide the automatic diagnostic system of the synchronous hardware of complete machine for scanning the lithography machine, position and solve the relevant problem of synchronous time sequence among the subsystems in time, the wiring configuration and frequency problem of the internal and external synchronization of automatic detection, can read and write/broadcast anomaly of the internal synchronization bus of automatic diagnosis, provide the frequency method of reducing the easy hanging servo of the platform.

Fig. 5 is a schematic structural diagram of a synchronous diagnostic apparatus of a scanning lithography machine according to an embodiment of the present application. As shown in fig. 5, the synchronous diagnostic apparatus for a scanning lithography machine includes:

a synchronous test case generation module 510, configured to generate a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

a synchronous test case sending module 520, configured to send the test case to the test object through the motion synchronous timing control board if the test object includes the motion controller; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and a synchronization problem diagnosis module 530, configured to receive, by the main system under test, a synchronization return value returned by the sub-system under test, and diagnose a synchronization problem of the test object according to the synchronization return value.

According to the technical scheme provided by the embodiment of the application, a synchronous test case is generated according to a received test object and test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card; if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card; and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value. By adopting the technical scheme provided by the application, the synchronization problem of the scanning photoetching machine can be quickly and accurately positioned, a large amount of labor cost and time cost are not required to be consumed by manual diagnosis, and the effect of ensuring the operation stability of the scanning photoetching machine is achieved.

The product can execute the method provided by any embodiment of the application, and has the corresponding functional module and the beneficial effect of the execution method.

Embodiments of the present application also provide a storage medium containing computer-executable instructions, which when executed by a computer processor, perform a method for synchronized diagnosis of a scanning lithography machine, the method comprising:

generating a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value.

Storage medium-any of various types of memory devices or storage devices. The term "storage medium" is intended to include: mounting media such as CD-ROM, floppy disk, or tape devices; computer system memory or random access memory such as DRAM, DDR RAM, SRAM, EDO RAM, Lanbas (Rambus) RAM, etc.; non-volatile memory such as flash memory, magnetic media (e.g., hard disk or optical storage); registers or other similar types of memory elements, etc. The storage medium may also include other types of memory or combinations thereof. In addition, the storage medium may be located in the computer system in which the program is executed, or may be located in a different second computer system connected to the computer system through a network (such as the internet). The second computer system may provide the program instructions to the computer for execution. The term "storage medium" may include two or more storage media that may reside in different locations, such as in different computer systems that are connected by a network. The storage medium may store program instructions (e.g., embodied as a computer program) that are executable by one or more processors.

Of course, the storage medium provided in the embodiments of the present application contains computer-executable instructions, and the computer-executable instructions are not limited to the synchronous diagnosis operation of the scanning lithography machine described above, and may also perform related operations in the synchronous diagnosis method of the scanning lithography machine provided in any embodiment of the present application.

The embodiment of the application provides electronic equipment, and the synchronous diagnosis device of the scanning photoetching machine provided by the embodiment of the application can be integrated in the electronic equipment. Fig. 6 is a schematic structural diagram of an electronic device according to an embodiment of the present application. As shown in fig. 6, the present embodiment provides an electronic device 600, which includes: one or more processors 620; the storage device 610 is used for storing one or more programs, and when the one or more programs are executed by the one or more processors 620, the one or more processors 620 are enabled to implement the synchronous diagnosis method for the scanning lithography machine provided by the embodiment of the application, the method includes:

generating a synchronous test case according to the received test object and the test parameters; the test object comprises a tested main system and a tested sub-system, wherein the tested main system comprises: a motion synchronization time sequence control board card and a synchronization servo clock control board card; the tested sub-system comprises: at least one of a motion controller, a position sampling controller, a quasi-synchronous timing control board card, a dose synchronous timing control board card, an image quality synchronous timing control board card, a vertical synchronous timing control board card and an illumination synchronous timing control board card;

if the test object comprises a motion controller, sending the test case to the test object through the motion synchronous time sequence control board card; if the test object comprises at least one of a position sampling controller, a quasi-synchronous time sequence control board card, a dose synchronous time sequence control board card, an image quality synchronous time sequence control board card, a vertical synchronous time sequence control board card and an illumination synchronous time sequence control board card, sending the test case to the test object through a synchronous servo clock control board card;

and receiving the synchronous return value returned by the tested sub-system through the tested main system, and diagnosing the synchronous problem of the test object according to the synchronous return value.

Of course, those skilled in the art will understand that the processor 620 also implements the technical solution of the synchronous diagnosis method for a scanning lithography machine provided in any embodiment of the present application.

The electronic device 600 shown in fig. 6 is only an example, and should not bring any limitation to the functions and the scope of use of the embodiments of the present application.

As shown in fig. 6, the electronic device 600 includes a processor 620, a storage device 610, an input device 630, and an output device 640; the number of the processors 620 in the electronic device may be one or more, and one processor 620 is taken as an example in fig. 6; the processor 620, the storage device 610, the input device 630, and the output device 640 in the electronic apparatus may be connected by a bus or other means, and are exemplified by being connected by a bus 650 in fig. 6.

The storage device 610 is a computer-readable storage medium, and can be used to store software programs, computer-executable programs, and module units, such as program instructions corresponding to the synchronous diagnosis method of the scanning lithography machine in the embodiment of the present application.

The storage device 610 may mainly include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required for at least one function; the storage data area may store data created according to the use of the terminal, and the like. In addition, the storage 610 may include high speed random access memory and may also include non-volatile memory, such as at least one magnetic disk storage device, flash memory device, or other non-volatile solid state storage device. In some examples, the storage 610 may further include memory located remotely from the processor 620, which may be connected via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.

The input means 630 may be used to receive input numbers, character information, or voice information, and to generate key signal inputs related to user settings and function control of the electronic device. The output device 640 may include a display screen, speakers, etc.

The electronic equipment provided by the embodiment of the application can quickly and accurately position the synchronization problem of the scanning photoetching machine, does not need to consume a large amount of labor cost and time cost through manual diagnosis, and achieves the effect of ensuring the operation stability of the scanning photoetching machine.

The synchronous diagnosis device, medium and electronic device of the scanning lithography machine provided in the above embodiments can execute the synchronous diagnosis method of the scanning lithography machine provided in any embodiment of the present application, and have corresponding functional modules and beneficial effects for executing the method. For technical details that are not described in detail in the above embodiments, reference may be made to a synchronous diagnostic method for a scanning lithography machine provided in any of the embodiments of the present application.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present application and the technical principles employed. It will be understood by those skilled in the art that the present application is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the application. Therefore, although the present application has been described in more detail with reference to the above embodiments, the present application is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present application, and the scope of the present application is determined by the scope of the appended claims.