阅读说明：本技术 双滑台同步缓冲机构和密封门装置 (Double-sliding-table synchronous buffer mechanism and sealing door device ) 是由 刘凯 王刚 于 2019-11-27 设计创作，主要内容包括：本发明提供一种双滑台同步缓冲机构和密封门装置,包括：两个滑块和自适应调节结构；两个所述滑台分设于一操作对象相对的两侧,用于驱动所述操作对象往复运动；所述自适应调节结构设于一所述滑台上,并与所述滑台固定连接,所述自适应调节结构具有沿所述往复运动的方向的形变自由度,在滑台驱动所述操作对象做往复运动的过程中,当两个所述滑台因速度不同而导致不同步时,所述自适应调节结构通过往复运动方向上的形变来产生作用力作用于另一所述滑台上,以减小两个所述滑台的速度差,直至两个所述滑台同步,故而可以避免发生因不同步而导致滑台受损的情况。(The invention provides a double-sliding table synchronous buffer mechanism and a sealing door device, which comprise: two sliding blocks and a self-adaptive adjusting structure; the two sliding tables are respectively arranged on two opposite sides of an operation object and used for driving the operation object to reciprocate; the self-adaptive adjusting structure is arranged on the sliding table and is fixedly connected with the sliding table, the self-adaptive adjusting structure has deformation freedom degrees along the direction of the reciprocating motion, the sliding table drives the operation object to do the reciprocating motion, when the two sliding tables are asynchronous due to different speeds, the self-adaptive adjusting structure generates acting force to act on the other sliding table through the deformation in the reciprocating motion direction so as to reduce the two speed difference of the sliding table until the two sliding tables are synchronous, and therefore the condition that the sliding table is damaged due to the asynchronous sliding can be avoided.)

1. The utility model provides a synchronous buffer gear of two sliding platforms which characterized in that includes:

the two sliding tables are respectively arranged on two opposite sides of an operation object and are used for driving the operation object to reciprocate; and the number of the first and second groups,

the self-adaptive adjusting structure is arranged on one sliding table and fixedly connected with the sliding table, and the self-adaptive adjusting structure has deformation freedom along the direction of reciprocating motion and is used for reducing the speed difference of the two sliding tables by changing the deformation in the direction of reciprocating motion until the two sliding tables are synchronous.

2. The double-slide synchronous cushion mechanism according to claim 1, wherein each of said slides comprises:

a first guide rail arranged in the direction of the reciprocating motion; and

and the sliding block is arranged on the first guide rail and used for moving along the first guide rail so as to drive the operation object to reciprocate.

3. The dual stage synchronous cushion mechanism of claim 2, wherein each of said stages further comprises:

and the two first hydraulic buffers are respectively fixed at two ends of the first guide rail.

4. The double-slide synchronous buffer mechanism as claimed in claim 2, wherein each slide includes two sets of the first guide rails, the two sets of the first guide rails being arranged in parallel.

5. The dual stage synchronous snubber mechanism of claim 2, wherein the adaptive adjustment structure comprises:

the base is fixed on the sliding block;

the first baffle and the second baffle are fixed at two ends of the base along the reciprocating motion direction;

the adapter piece is movably arranged on the base along the reciprocating direction; and the number of the first and second groups,

the first buffer piece and the second buffer piece are symmetrically distributed, the first buffer piece is arranged between the adapter piece and the first baffle, the second buffer piece is arranged between the adapter piece and the second baffle, and the first buffer piece and the second buffer piece deform along with the motion of the adapter piece so as to change the deformation quantity.

6. The dual stage synchronous snubber mechanism of claim 5, wherein the first snubber member and the second snubber member are either of an elastic construction or of a stretchable construction.

7. The dual stage synchronous snubber mechanism of claim 6, wherein the adaptive adjustment structure further comprises a first stop element for limiting the radial displacement of the first snubber and a second stop element for limiting the radial displacement of the second snubber.

8. The dual-sliding-table synchronous buffer mechanism as claimed in claim 7, wherein the first baffle has a first through hole, one end of the first limiting member movably passes through the first through hole and the first buffering member and is connected to the adaptor, the other end of the first limiting member includes a first enlarged portion, and the outer dimension of the first enlarged portion is larger than the inner dimension of the first through hole; the second baffle plate is provided with a second through hole, one end of the second limiting part movably penetrates through the second through hole and the second buffering part and is connected with the adapter, the other end of the second limiting part comprises a second expanded part, and the outer size of the second expanded part is larger than the inner size of the second through hole.

9. The dual stage synchronous draft gear according to claim 8, wherein said spring structure is a spring, said first and second cushioning members have an inner diameter d1, said first and second retaining members have an outer dimension d2, wherein d1<1.5d 2.

10. The double-slider synchronous buffer mechanism of claim 8, wherein when the adaptor is not acted by a force in the direction of the reciprocal motion and is in the initial state, the distance between the enlarged portion of the first limiting member and the first baffle is the same as the distance between the enlarged portion of the second limiting member and the second baffle, and is smaller than the maximum compression amount of the first buffering member and the second buffering member.

11. The dual stage synchronous snubber structure of claim 5, wherein the first snubber member and the second snubber member are second hydraulic snubbers.

12. The dual-sliding-table synchronous buffer mechanism according to claim 7 or 11, wherein the adaptive adjustment structure comprises a plurality of the first buffer members and a plurality of the second buffer members, the plurality of the first buffer members and the plurality of the second buffer members are respectively and uniformly arranged in sequence along a direction perpendicular to the reciprocating direction, and the number of the first limiting members and the number of the second limiting members are equal to the number of the first buffer members or the number of the second buffer members.

13. The dual stage synchronous snubber mechanism of claim 5, wherein the adaptive adjustment structure further comprises:

the third baffle plate is arranged between the second baffle plate and the second buffer piece; and

and the adjusting bolt is rotatably arranged in the second baffle in a penetrating way, and one end of the adjusting bolt is abutted against the third baffle so as to adjust the distance between the third baffle and the second baffle.

14. The dual stage synchronous snubber mechanism of claim 5, wherein the adaptive adjustment structure further includes a second rail disposed along the direction of reciprocation, the adaptor moving along the second rail.

15. A sealing door apparatus, comprising: a sealing door and a double-sliding-table synchronous buffer mechanism as claimed in any one of claims 1 to 14, wherein the sealing door is driven by the double-sliding-table synchronous buffer mechanism to perform lifting movement.

Technical Field

The invention relates to the technical field of photoetching equipment, in particular to a double-sliding-table synchronous buffer mechanism and a sealing door device.

Background

At present, when a production line mechanical arm enters equipment such as an exposure machine, a window needs to be formed in the whole equipment, but in order to enable the internal environment of the whole equipment to be stable, the sealing performance is good, and the external interference is less, a double-sliding-table synchronous buffer mechanism is required to be designed. When the manipulator enters the whole machine, the sealing door descends; when the manipulator goes out of the whole machine, the sealing door rises.

When the size of the substrate is larger, the size of the robot access window is also larger, such as 2300mm (long) 750mm (high) for the robot access window and 2350mm 800mm for the sealing door, taking 6 th generation substrate as an example. Because the sealing door is great and require the sealing door to move up and down the time and need control within 2s, 1 slip table is respectively placed to the design scheme about the sealing door, increases thrust, and two slip tables move simultaneously.

However, the above design has the following problems:

(1) the motion response time of the two sliding tables is asynchronous, the possibility that one sliding table moves firstly and the other sliding table does not start to move exists, and due to the large span of the sliding tables at the two sides, the sliding table moving firstly on one side can generate large bending moment on the sliding table moving later on one side, and the possibility of damaging the sliding table exists;

(2) when the two sliding tables move to the mechanical limit stop process, the stop motion time of the sliding tables at the two sides is asynchronous, the possibility that one sliding table stops firstly and the other sliding table does not stop exists, and the possibility that the sliding table at one side is stopped later generates larger bending moment on the sliding table at one side due to the large span of the sliding tables at the two sides, so that the sliding table is damaged;

(3) two slip tables are at the motion in-process, because the load is great, and the stroke is longer, to the cylinder slip table, if both sides cylinder compressed air pressure and compressed air flow rate difference, the both sides cylinder will be asynchronous at the motion, can cause the wearing and tearing between first guide rail and the slider, influences slip table life.

Disclosure of Invention

The invention aims to provide a double-sliding-table synchronous buffer mechanism and a sealing door device, which aim to solve the problem that when double sliding tables are used for reciprocating, the sliding tables are damaged due to the asynchronous double sliding tables.

In order to solve the above technical problem, the present invention provides a double-sliding table synchronous buffer mechanism, including:

the two sliding tables are respectively arranged on two opposite sides of an operation object and are used for driving the operation object to reciprocate; and the number of the first and second groups,

the self-adaptive adjusting structure is arranged on one sliding table and fixedly connected with the sliding table, and the self-adaptive adjusting structure has deformation freedom along the direction of reciprocating motion and is used for reducing the speed difference of the two sliding tables by changing the deformation in the direction of reciprocating motion until the two sliding tables are synchronous.

Optionally, in the double-sliding-table synchronous buffer mechanism, each sliding table includes:

a first guide rail arranged in the direction of the reciprocating motion; and

and the sliding block is arranged on the first guide rail and used for moving along the first guide rail so as to drive the operation object to reciprocate.

Optionally, in the double-sliding-table synchronous buffer mechanism, each sliding table further includes:

and the two first hydraulic buffers are respectively fixed at two ends of the first guide rail.

Optionally, in the double-sliding-table synchronous buffer mechanism, each sliding table includes two sets of the first guide rails, and the two sets of the first guide rails are arranged in parallel.

Optionally, in the double-sliding-table synchronous buffer mechanism, the adaptive adjustment structure includes:

the base is fixed on the sliding block;

the first baffle and the second baffle are fixed at two ends of the base along the reciprocating motion direction;

the adapter piece is movably arranged on the base along the reciprocating direction; and the number of the first and second groups,

the first buffer piece and the second buffer piece are symmetrically distributed, the first buffer piece is arranged between the adapter piece and the first baffle, the second buffer piece is arranged between the adapter piece and the second baffle, and the first buffer piece and the second buffer piece deform along with the motion of the adapter piece so as to change the deformation quantity.

Optionally, in the double-sliding-table synchronous buffer mechanism, the first buffer member and the second buffer member are elastic structures or telescopic structures.

Optionally, in the double-sliding-table synchronous buffer mechanism, the self-adaptive adjustment structure further includes a first limiting member and a second limiting member, the first limiting member is used to limit the radial displacement of the first buffer member, and the second limiting member is used to limit the radial displacement of the second buffer member.

Optionally, in the double-sliding-table synchronous buffer mechanism, the first baffle has a first through hole, one end of the first limiting member movably penetrates through the first through hole and the first buffering member and is connected to the adaptor, the other end of the first limiting member includes a first enlarged portion, and an outer contour dimension of the first enlarged portion is larger than an inner dimension of the first through hole; the second baffle plate is provided with a second through hole, one end of the second limiting part movably penetrates through the second through hole and the second buffering part and is connected with the adapter, the other end of the second limiting part comprises a second expanded part, and the outer size of the second expanded part is larger than the inner size of the second through hole.

Optionally, in the double-sliding-table synchronous buffer mechanism, the elastic structure is a spring, the inner diameters of the first buffer member and the second buffer member are both d1, the outer dimensions of the first limiting member and the second limiting member are both d2, and d1 is less than 1.5d 2.

Optionally, in the double-sliding-table synchronous buffer mechanism, when the adaptor is not subjected to an acting force in the direction of the reciprocating motion and is in an initial state, a distance between the enlarged portion of the first limiting member and the first baffle is the same as a distance between the enlarged portion of the second limiting member and the second baffle, and is smaller than a maximum compression amount of the first buffering member and the second buffering member.

Optionally, in the double-sliding-table synchronous buffer mechanism, the first buffer member and the second buffer member are second hydraulic buffers.

Optionally, in the double-sliding-table synchronous buffer mechanism, the adaptive adjustment structure includes a plurality of the first buffer parts and a plurality of the second buffer parts, the first buffer parts and the second buffer parts are respectively arranged in sequence and uniformly along the vertical direction of the reciprocating direction, and the number of the first limiting parts and the number of the second limiting parts are equal to the number of the first buffer parts or the second buffer parts.

Optionally, in the double-sliding-table synchronous buffer mechanism, the adaptive adjustment structure further includes:

the third baffle plate is arranged between the second baffle plate and the second buffer piece; and

and the adjusting bolt is rotatably arranged in the second baffle in a penetrating way, and one end of the adjusting bolt is abutted against the third baffle so as to adjust the distance between the third baffle and the second baffle.

Optionally, in the double-sliding-table synchronous buffer mechanism, the self-adaptive adjustment structure further includes a second guide rail, the second guide rail is arranged along the direction of the reciprocating motion, and the adaptor moves along the second guide rail.

The present invention also provides a sealing door apparatus comprising: the sealing door is driven by the double-sliding-table synchronous buffer mechanism to move up and down.

Optionally, in the sealing door device, the sealing door includes a profile frame and a sealing plate covering the profile frame.

The invention provides a double-sliding-table synchronous buffer mechanism and a sealing door device, which comprise: two sliding blocks and a self-adaptive adjusting structure; the two sliding tables are respectively arranged on two opposite sides of an operation object and used for driving the operation object to reciprocate; the self-adaptive adjusting structure is arranged on the sliding table and is fixedly connected with the sliding table, the self-adaptive adjusting structure has deformation freedom degrees along the direction of the reciprocating motion, the sliding table drives the operation object to do the reciprocating motion, when the speed of the operation object is different, the sliding table is asynchronous due to different speeds, the self-adaptive adjusting structure generates acting force to act on the other sliding table through the deformation in the direction of the reciprocating motion, so that the speed difference of the sliding table is reduced, until the speed of the sliding table is synchronous, and the condition that the sliding table is damaged due to the asynchronization can be avoided.

Drawings

Fig. 1 is a schematic structural view of a sealing door apparatus according to an embodiment of the present invention;

fig. 2 is a schematic structural view of a sliding table according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of an adaptive adjustment structure according to a first embodiment of the present invention;

FIG. 4 is a cross-sectional view of an adaptive tuning structure according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a sealing door according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of an adaptive adjustment structure according to a second embodiment of the present invention;

FIGS. 7 and 8 are schematic diagrams illustrating bending moments borne by a sliding table according to an embodiment of the present invention;

wherein the reference numerals are as follows:

1-a slide table; 100-a sealing door; 2-adaptive adjustment structure; 11-a first guide rail; 12-a slide block; 13-a first hydraulic buffer; 21-a base; 22-a first baffle; 23-a second baffle; 24-an adaptor; 25-a first buffer; 26-a second buffer; 27-a first stop; 28-a second stop; 29-a third baffle; 30-adjusting the bolt; 31-a second guide rail; 200-a scaffold; 101-section bar frame; 102-sealing plate.

Detailed Description

The dual-sliding-table synchronous buffer mechanism and the sealing door device provided by the invention are further described in detail with reference to the accompanying drawings and specific embodiments. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.

[ EXAMPLES one ]

First, referring to fig. 1, the dual sliding table synchronous buffering mechanism provided in the embodiment of the present invention includes:

the two sliding tables 1 are respectively arranged at two opposite sides of an operation object (such as a sealing door) 100 and used for driving the operation object 100 to reciprocate; and the number of the first and second groups,

the self-adaptive adjusting structure 2 is arranged on the sliding table 1 and fixedly connected with the sliding table 1, and the self-adaptive adjusting structure 2 has deformation freedom degrees along the direction of the reciprocating motion and is used for reducing the speed difference of the sliding table 1 by changing the deformation amount in the direction of the reciprocating motion until the sliding tables are synchronous.

As described above, in the conventional dual-slide mechanism, when the two slide mechanisms are not synchronized, damage to the slide mechanism is easily caused. In the double-sliding table synchronous buffer mechanism provided by the embodiment of the invention, when the sealing door 100 is driven to reciprocate, if the two sliding tables 1 are asynchronous due to different speeds, the self-adaptive adjusting structure 2 generates acting force to act on the other sliding table 1 through deformation, so that the speed difference of the two sliding tables 1 is reduced, and the condition that the sliding tables are damaged due to asynchronous can be avoided.

As shown in fig. 2, each of the sliding tables 1 provided in the embodiment of the present invention may include: a first guide rail 11 and a slider 12, the first guide rail 11 being arranged in the direction of the reciprocating motion; the slide block 12 is disposed on the first guide rail 11, and configured to move along the first guide rail 11 to drive the operation object 100 to reciprocate, where the slide block 12 may be an air cylinder slide block 12, driven by an air cylinder, or an electrically driven slide block; preferably, each of the sliding tables 1 further includes: and two first hydraulic buffers 13, wherein the two first hydraulic buffers 13 are respectively fixed at two ends of the first guide rail 11. Further preferably, the number of the first guide rails 11 is 2, two sets of the first guide rails 11 are arranged in parallel, and the sliding blocks 12 are arranged on the two sets of the first guide rails 11. When two sets of the first guide rails 11 are used, the bending moment resistance can be increased.

As shown in fig. 3 and 4, the adaptive adjustment structure 2 according to the embodiment of the present invention includes: the damping device comprises a base 21, a first baffle 22, a second baffle 23, an adapter 24, a first buffering member 25 and a second buffering member 26 which are symmetrically distributed; wherein the base 21 is fixed on the sliding block 12; the first baffle 22 and the second baffle 23 are fixed at two ends of the base 21 along the descending direction; the adaptor 24 is movably arranged on the base 21 along the reciprocating direction; the first buffer member 25 is arranged between the adapter 24 and the first baffle 22, the second buffer member 26 is arranged between the adapter 24 and the second baffle 23, and the first buffer member 25 and the second buffer member 26 deform along with the movement of the adapter 24 to change the deformation amount; the first stop plate 22 and the adapter 24 limit the movement space of the first buffer 25, and the second stop plate 23 and the adapter 24 limit the movement space of the second buffer 26.

In this embodiment, the first buffer 25 and the second buffer 26 are elastic structures, such as springs, flexible reeds, or flexible hinges, and at this time, the speed difference between the two sliding tables 1 is reduced by the elastic deformation amount specifically; alternatively, in this embodiment, the first buffer 25 and the second buffer 26 are of a telescopic structure, for example, a multi-segment metal tube nested tube, and in this case, the first buffer 25 and the second buffer 25 specifically reduce the speed difference between the two slide tables 1 by the telescopic amount. It is preferable that the first buffer member 25 and the second buffer member 26 are elastic structures, and the elastic structures are springs to adapt to the operation object with a larger stroke, so fig. 3 and 4 illustrate the first buffer member 25 and the second buffer member 26 as springs, but it should be understood that, in addition to the above description, any mechanism capable of increasing the buffer force through the spring deformation or the telescopic deformation is within the scope of the present application.

Since the first buffer 25 and the second buffer 26 may generate displacement in the radial direction to generate bending moment on the guide rail when the first buffer 25 and the second buffer 26 are elastic structures or telescopic structures, it is preferable that the adaptive adjustment structure further includes a first limiting member 27 and a second limiting member 28, the first limiting member 27 is used for limiting the radial displacement of the first buffer 25, and the second limiting member 28 is used for limiting the radial displacement of the second buffer 26.

Further, the first baffle 22 has a first through hole, one end of the first limiting member 27 movably penetrates through the first through hole and the first buffering member 25, and is connected to the adaptor 24, the other end of the first limiting member 27 includes a first enlarged portion, and an outer contour dimension of the first enlarged portion is larger than an inner dimension of the first through hole; the second baffle 23 has a second through hole, one end of the second limiting member 28 movably passes through the second through hole and the second buffering member 26, and is connected to the adaptor 24, and the other end of the second limiting member 28 includes a second enlarged portion, and the outer size of the second enlarged portion is larger than the inner size of the second through hole. The first retaining member 27 and the second retaining member 28 may be, for example, retaining screws, and correspondingly, the first enlarged portion and the second enlarged portion are nuts.

That is, in the present embodiment, the first limiting member 27 and the second limiting member 28 limit the radial displacement of the first buffering member 25 and the second buffering member 26 through a penetrating main type, in this case, both ends of the first buffering member 25 and the second buffering member 26 may not be necessarily fixed to the first baffle 22 and the adaptor 24, and both ends of the second buffering member 26 may not be necessarily fixed to the second baffle 23 and the adaptor 24, thereby facilitating installation and replacement.

In this embodiment, when the adaptor 24 is not subjected to the acting force in the reciprocating direction and is in the initial state, the distance between the enlarged portion of the first limiting member 27 and the first baffle 22 is the same as the distance between the enlarged portion of the second limiting member 28 and the second baffle 23, and is smaller than the maximum compression amount of the first buffering member 25 and the second buffering member 26, so that the up stroke and the down stroke of the adaptor 24 are not limited to exceed the maximum compression amount of the first buffering member 25 and the second buffering member 26, and the first buffering member 25 and the second buffering member 26 are prevented from being excessively damaged due to compression.

The inner diameters of the first buffering member 25 and the second buffering member 26 are d1, the outer sizes of the first limiting member 27 and the second limiting member 28 are d2, when the first buffering member 25 and the second buffering member 26 are springs, d1<1.5d2 is met, and by the arrangement, the bending moment of the guide rail caused by the bending deformation of the springs can be effectively reduced.

Preferably, the adaptive adjustment structure 2 further includes: a third baffle plate 29 and an adjusting bolt 30, wherein the third baffle plate 29 is arranged between the second baffle plate 23 and the second buffer 26; the adjusting bolt 30 is rotatably disposed through the second baffle 23, and one end of the adjusting bolt abuts against the third baffle 29, so as to adjust the distance between the third baffle 29 and the second baffle 23, and further adjust the pre-tightening force of the second buffer 26. Further, the third baffle 23 has a third through hole, and the second limiting member 28 sequentially passes through the second through hole, the third through hole and the second buffering member 26 to be connected to the adaptor 24.

The double-sliding table synchronous buffer mechanism provided by the invention is not only suitable for a vertical movement working condition, but also suitable for an inclined or horizontal movement working condition, and under the vertical movement working condition or the inclined movement working condition, the third baffle plate 29 moves towards the direction close to the second buffer member 26 by adjusting the adjusting bolt 30, so that the pretightening force of the second buffer member 26 is adjusted, and the pretightening force and the sliding table 1 without the self-adaptive adjusting structure 2 bear the load of the operation object 100 together.

Further preferably, the adaptive adjustment structure 2 includes a plurality of the first buffering members 25 and a plurality of the second buffering members 26, for example, the number of the first buffering members 25 and the number of the second buffering members 26 may be 4, 6, or 8, the plurality of the first buffering members 25 and the plurality of the second buffering members 26 are respectively and uniformly arranged in sequence along a direction perpendicular to the direction of the reciprocating motion, and the number of the first limiting members 27 and the number of the second limiting members 28 are equal to the number of the first buffering members 25 or the number of the second buffering members 26, so as to ensure the stability of the motion of the adaptor 24. Preferably, the number of the adjusting bolts is also equal to the number of the first buffer members 25 or the second buffer members 26, and the adjusting bolts are in one-to-one correspondence with the second buffer members 26 and are used for adjusting the pretightening force of each second buffer member 26 respectively so as to ensure that the pretightening force of each second buffer member 26 is equal.

In addition, the adaptive adjustment structure 2 further includes a second guide rail 31, the second guide rail 31 is disposed along the direction of the reciprocating motion, and the adaptor 24 moves along the second guide rail 31. Likewise, to increase the bending moment resistance, the adaptive control structure 2 preferably has two sets of guide rails, which may be arranged corresponding to the first guide rails 11.

In addition, referring to fig. 1 again, an embodiment of the present invention further provides a sealing door apparatus, including: a sealing door 100 and a double-sliding-table synchronous buffer mechanism according to the embodiment. One side of the sealing door 100 can be fixedly connected with a sliding block 12 of the sliding table 1 which is not provided with the self-adaptive adjusting structure 2 through a support 200, and the other side of the sealing door 100 is fixedly connected with the adaptor 24 of the self-adaptive adjusting structure 2, so that the sealing door 100 can be driven by the double-sliding-table synchronous buffer mechanism to move up and down.

Preferably, as shown in fig. 5, the sealing door 100 includes a profile frame 101 and a sealing plate 102 covering the profile frame 101, and the profile frame 101 is preferably constructed by a 20X20 profile, so that the overall weight of the sealing door can be effectively reduced, and the structural strength is ensured, thereby facilitating the installation of the sealing door.

Setting the stroke as S, the thrust as F, the total thrust as 2F, the upward movement time of the sliding table 1 as t, the mass of the sealing door as m, the load as G, and obtaining the upward movement acceleration a of the sealing door as (2F-G)/m, wherein in the upward acceleration process, the relation between the stroke S and the t satisfies: s 1/2 a t²I.e. s-1/2 (2F-G)/m t²Therefore, the required thrust force value can be calculated according to the requirement of the movement time, and then a proper driving unit is selected and the pretightening force of the self-adaptive adjusting structure 2 is adjusted. Taking the first buffer member 25 and the second buffer member 26 as springs for example, it is preferable that the compression amount of the springs should be less than 1/4 the maximum compression length of the springs when adjusting the pre-tightening force, and meanwhile, to ensure that the springs can play the role of buffering and decelerating, the compression amount of the springs should at least reach 1/2 the maximum compression length of the springs when the sealing door moves downwards, so that according to this,and under the condition that the thrust force is F and the load is G, the self-adaptive adjusting mechanism spring is selected.

[ example two ]

Unlike the first embodiment, as shown in fig. 6, in the present embodiment, the first cushion member 25 and the second cushion member 26 are second hydraulic cushion members, and the first cushion member 25 and the second cushion member 26 are adapted to a speed difference by hydraulic compression deformation, not spring deformation or expansion deformation.

In this embodiment, the first buffer 25 is fixed on the first baffle 22, and the second buffer 26 is fixed on the second baffle 23, and when a third baffle 29 is further adopted to adjust the pre-tightening force, the second buffer 26 is correspondingly fixed on the third baffle 29, and at this time, the relative position relationship among the second buffer 26, the second baffle 23, and the third baffle 29 is consistent with that of the embodiment, and is not described herein again.

For example, as shown in fig. 6, the first cushion member 25 and the second cushion member 26 may respectively include a fixing portion penetrating through the first baffle plate 22 and the second baffle plate 23, and the fixing portion may have a screw thread so that it may be fixed to the first baffle plate 22 and the second baffle plate 23 by a nut.

The following takes the movement of the cylinder sliding block along the descending direction as an example, and compares the movement states of the double-sliding-table synchronous buffer mechanism under the conditions of no self-adaptive adjusting structure and the self-adaptive adjusting structure, so as to illustrate that the problem that the sliding tables are damaged due to asynchronous double sliding tables when the double sliding tables are used for reciprocating motion can be solved through the self-adaptive adjusting structure. For the convenience of description, two slip tables of sealing door elevation structure order respectively for left side slip table and right side slip table, two sliders that correspond, order respectively for left side slider and right side slider. The distance between the sliding tables is L, and the self-adaptive adjusting structure is fixed on the right sliding table.

1) Without the adaptive adjustment structure

(11) When the slide block moves downwards, the left slide block starts faster than the right slide block, that is, the speed of the right cylinder is 0, the reaction force of the first hydraulic buffer of the right slide table to the slide block is Fn (Fn ═ F), and from the momentum theorem F Δ t ═ M × Δ v, it can be known that when Δ t is very small, Δ v will be very large, the left slide block will generate a speed, and because the span of the slide blocks on both sides is large, the left slide table will generate a bending moment to the right slide table, as shown in fig. 7, the bending moment M generated by the left slide table to the right slide table under this working condition is the maximum, where M is F × L + G1/2 × L.

(12) When the slide block moves downwards to the mechanical limit, the time that the speed of the left slide block is reduced to 0 is slower than that of the right slide block, that is, when the speed of the right cylinder is 0, the speed of the left cylinder is v, the reaction force of the first hydraulic buffer of the left slide table to the slide block is Ft, and the reaction force of the first hydraulic buffer of the right slide table to the slide block is Fn (Fn is equal to F), as shown in fig. 8, the left slide table will generate a bending moment M to the right slide table, where M is (F-Ft) × L + G × 1/2 × L.

(13) In the motion process, when the motion speed of the cylinders on the two sides is inconsistent, relative motion can be generated, the cylinders on the two sides are asynchronous in motion, abrasion between the guide rail and the sliding block can be caused, and the service life of the sliding table is influenced.

2) In the case of the adaptive adjustment structure

(21) The slider moves down, and when the left side slider started to be faster than the right side slider, the second bolster 26 decrement is bigger and bigger, and the left side slider slows down to V1, and the right side slider begins to move this moment, and the speed is V2.

If V1> V2, the second dampener 26 continues to compress, causing the left slider to continue to decelerate and the right slider to continue to accelerate, eventually accelerating both cylinders at the same speed.

If V1< V2, the first buffer 25 will compress, causing the left slider to continue accelerating while the right slider decelerates, and eventually the two side cylinders will accelerate at the same speed.

The whole process can not produce bending moment, the guide rail of the air cylinder can be effectively protected, and the service life is prolonged.

(22) When the slider moves downwards and the stop time of the left slider is slower than that of the right slider, the compression amount of the second buffer member 26 is larger and larger, and finally, the speed of the left slider is reduced to 0 under the action of the first hydraulic buffer of the left air cylinder. The whole process can not produce bending moment, the guide rail of the air cylinder can be effectively protected, and the service life is prolonged.

(23) In the motion process, when the motion speeds of the cylinders on the two sides are not consistent, the buffer part of the self-adaptive adjusting structure can adapt to the motion speed difference of the cylinders on the two sides, so that the motion process is stable, no impact is generated, the guide rail can be effectively prevented from being abraded, and the service life is prolonged.

In summary, the double-sliding table synchronous buffer mechanism and the sealing door device provided by the invention solve the problem that when the double-sliding table is used for reciprocating motion, the sliding table is damaged due to the asynchronous double-sliding table.

The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.