阅读说明：本技术 一种晶硅电池槽式制绒的烘干槽及烘干方法 (Drying groove and drying method for crystalline silicon battery groove type texturing ) 是由 朱纹哲 彭文博 田鸿翔 陈雄飞 李晓磊 罗丽珍 郑建涛 于 2021-07-14 设计创作，主要内容包括：本发明公开了一种晶硅电池槽式制绒的烘干槽及烘干方法,烘干槽包括槽体,槽体的底部设置有用于放置承载花篮的底座,所述底座上方设置有吸附杆,所述吸附杆用于吸取承载花篮中卡槽和硅片贴合处的水分。采用在晶硅槽式制绒烘干槽内增加吸附杆的方式,改善硅片的烘干效果。吸附杆结构简单,可以直接拆装更换,便于安装更换,成本投入低,没有负面的隐患,适用范围广,在目前大多数的单晶制绒机台中都可以应用。(The invention discloses a drying groove and a drying method for groove type texturing of a silicon cell. The drying effect of the silicon wafer is improved by adding the adsorption rod in the crystal silicon groove type texturing drying groove. The adsorption rod is simple in structure, can be directly disassembled and assembled for replacement, is convenient to install and replace, is low in cost investment, free of negative hidden danger, wide in application range and applicable to most of single crystal texturing machines at present.)

1. The utility model provides a stoving groove of crystalline silicon battery slot type system fine hair, its characterized in that, includes cell body (2), the bottom of cell body (2) is provided with base (3) that are used for placing and bear the weight of basket of flowers, base (3) top is provided with adsorption rod (1), adsorption rod (1) are used for absorbing the moisture that bears draw-in groove and silicon chip laminating department on basket of flowers sill bar (4).

2. The drying bath for trough type texturing of crystalline silicon cells according to claim 1, wherein the adsorption bar comprises a support bar (11) and adsorption cotton (12) wrapped outside the support bar (11).

3. The drying oven for trough type texturing of crystalline silicon cells according to claim 2, wherein the support rods (11) are made of carbon fiber reinforced polyvinylidene fluoride material.

4. The drying oven for trough type texturing of crystalline silicon cells according to claim 2, wherein the surface of the support bar (11) has a hydrophobic layer.

5. The drying oven for trough type texturing of crystalline silicon cells according to claim 2 or 4, wherein the surface of the support bar (11) is coated with nano fluorine.

6. The drying bath for trough type texture etching of crystalline silicon cells as claimed in claim 1, wherein the adsorption rod (1) is detachably mounted at the bottom of the bath body (2).

7. The drying cell for trough type texturing of crystalline silicon cells according to claim 1, wherein the adsorption rod (1) is arranged right below the bottom rod (4) of the carrying basket.

8. The drying method of the drying tub according to claim 1, comprising the steps of:

step 1, placing a silicon wafer in a clamping groove of a bottom rod of a bearing flower basket, and moving the bearing flower basket to an adsorption rod (1);

step 2: bear the contact of basket of flowers bottom pole and adsorb the cotton, bear the weight of the water droplet on basket of flowers bottom pole (4) and directly be adsorbed on adsorbing pole (1), open the hot gas flow in the stoving groove, weather silicon chip (5) surface.

Technical Field

The invention belongs to the technical field of crystalline silicon battery manufacturing, and particularly relates to a drying groove and a drying method for crystalline silicon battery groove type texturing.

Background

Currently, in order to improve the utilization rate of incident light, in the preparation process of a crystalline silicon battery, the surface of the battery is usually treated by a method of increasing the texture. The manufacturing link of the suede is called as a suede making process, and the wet-method groove type suede making technology is generally adopted in the industry at present, has the advantages of high productivity, low cost and good suede consistency, but has certain defects, wherein the poor groove type drying effect is one of the defects.

The drying design of the groove type machine table is as follows: and (3) reacting an oxide layer on the surface of the silicon wafer in the last liquid medicine tank by using HF, wherein the silicon wafer is in a bare silicon state, and the surface of the silicon wafer is hydrophobic due to the hydrophobic characteristic of silicon. And the surface of the used bearing flower basket is sprayed with nano fluorine, and the bearing flower basket has hydrophobic property.

Bear basket of flowers and silicon chip and can place at a slow speed in drawing the groove afterwards, draw the higher pure water of temperature to use inside the groove slowly, wait to bear basket of flowers and silicon chip and soak the back slowly and dewater completely, the silicon chip with bear the hydrophobicity of basket of flowers, the mutual adsorptivity of the higher pure water of temperature can make the silicon chip and bear the weight of the moisture on basket of flowers surface and reduce by a wide margin. The silicon chip and the bearing flower basket which greatly reduce the moisture are placed in a drying groove, and the hot air is used for continuously blowing for a long time to blow off the residual moisture on the surface.

However, the silicon wafer is in close contact with the clamping grooves of the flower basket, the space of the clamping grooves for bearing the flower basket is narrow, and after the silicon wafer is inserted into the clamping grooves, moisture can adsorb the silicon wafer and the clamping grooves on the two sides of the silicon wafer. Because the angle is small, the blowing effect of hot air in the existing drying groove shown in fig. 1 on the clamping groove is limited, so that the risk that the silicon wafer cannot be thoroughly dried exists. When the silicon wafer which is not dried enters the next working procedure, the silicon wafers around can be polluted completely, and after the silicon wafers are changed into finished batteries, the conversion efficiency of the batteries is seriously influenced. During normal production, such contaminated batteries are often not sold as normal batteries, and are typically treated as degraded, such that the contaminated batteries also affect the overall quality of the product.

Secondly, when the silicon wafer which is not dried enters the next working procedure, the tool and the machine table can be directly polluted. Receive the frock and the board that pollute, can continuously pollute the silicon chip of constantly producing, and then lead to bad battery to continuously produce, have the influence of continuation to the conversion efficiency and the rate of certified products of producing the product, also have certain destruction to the stability of producing the line, produce the line technical staff and need spend a large amount of efforts and investigate the processing, also need a large amount of maintenances among the process of eliminating the pollution, influence and produce line productivity and cost.

Disclosure of Invention

The invention provides a drying groove and a drying method for groove type texturing of a crystalline silicon battery, which are used for improving drying of moisture at a joint position of a silicon wafer and a clamping groove and improving drying effect of the silicon wafer.

In order to achieve the purpose, the drying groove for the groove-type texturing of the crystalline silicon battery comprises a groove body, wherein a base for placing a bearing flower basket is arranged at the bottom of the groove body, an adsorption rod is arranged above the base and used for absorbing water at the joint of a clamping groove in the bearing flower basket and a silicon wafer.

Furthermore, the adsorption rod comprises a support rod and adsorption cotton wrapped outside the support rod.

Furthermore, the support rod is made of carbon fiber reinforced polyvinylidene fluoride materials.

Further, the surface of the support rod is provided with a hydrophobic layer.

Further, the surface of the support rod is coated with nano fluorine.

Furthermore, the adsorption rod is detachably arranged at the bottom of the groove body.

Furthermore, the adsorption rod is arranged under the bottom rod of the bearing flower basket.

The drying method based on the drying groove comprises the following steps:

step 1, placing a silicon wafer in a clamping groove of a bottom rod of a bearing flower basket, and moving the bearing flower basket to an adsorption rod;

step 2: bear the contact of basket of flowers sill bar and adsorb the cotton, bear the direct adsorbed absorption pole of the water droplet on the basket of flowers sill bar on, open the hot gas flow in the stoving inslot, weather the silicon chip surface.

Compared with the prior art, the invention has at least the following beneficial technical effects:

the invention adopts a mode of adding the adsorption rod in the crystal silicon groove type texturing drying groove to improve the drying effect of the silicon wafer. The adsorption rod has the advantages of simple structure, low cost investment, no negative hidden danger and wide application range, and can be applied to most of the existing single crystal texturing machines. After the adsorption rod is added, the part which is difficult to blow dry is adsorbed, the pressure for drying hot air flow is reduced, the hot air flow is effectively supplemented, the moisture which is difficult to blow dry at the joint of the bearing flower basket and the silicon wafer can be effectively dried, and the drying effect of groove type texturing can be effectively improved. The method is helpful for improving the conversion efficiency and the rate of certified products of the crystalline silicon battery and the stability of a production line.

Furthermore, the support rod is made of carbon fiber reinforced polyvinylidene fluoride materials, has the characteristics of high temperature resistance, corrosion resistance, friction resistance and stable physical structure, can bear higher drying temperature in a drying groove, and cannot pollute the silicon wafer.

Furthermore, the surface of the supporting rod is subjected to hydrophobic treatment, so that moisture can be adsorbed by the adsorbed cotton to the maximum extent, and the drying effect is further improved.

Furthermore, the surface of the support rod is sprayed with the nano fluorine, so that the performance is stable and durable, and no corrosion or environmental pollution is caused.

Furthermore, the adsorption rod is detachably arranged at the bottom of the groove body, and can be directly disassembled, assembled and replaced, so that the adsorption rod is convenient to install and replace.

Drawings

FIG. 1 is a schematic view of a conventional drying bath;

FIG. 2 is a schematic view of a drying oven according to the present invention;

FIG. 3 is a perspective view of the adsorption rod;

FIG. 4 is a longitudinal sectional view of the adsorption bar;

FIG. 5 is a schematic view of the position of the adsorption bar and the bottom bar.

In the drawings: 1. the device comprises an adsorption rod, 2, a groove body, 3, a base, 11, a support rod, 12, adsorption cotton, 31, a first limiting rod, 32, a second limiting rod, 33, a connecting rod, 4-a bearing flower basket bottom rod and 5-a silicon chip.

Detailed Description

In order to make the objects and technical solutions of the present invention clearer and easier to understand. The present invention will be described in further detail with reference to the following drawings and examples, wherein the specific examples are provided for illustrative purposes only and are not intended to limit the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified. In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example 1

Referring to fig. 2 and 3, a drying groove for crystalline silicon cell groove-type texturing comprises a groove body 2, wherein a base 3 for fixing the position of a bearing flower basket is fixed at the bottom of the groove body 2, a plurality of adsorption rods 1 are arranged above the base 3 side by side, when the bearing flower basket is placed in the groove body 2, the adsorption rods 1 are located under a bottom rod 4 of the bearing flower basket and are in contact with the bottom rod of the bearing flower basket, and a clamping groove for placing a silicon wafer 5 is formed in the bottom rod 4 of the bearing flower basket.

Wherein, base 3 includes first gag lever post 31, second gag lever post 32 and connecting rod 33, and connecting rod 33 one end and first gag lever post 31 fixed connection, the other end and second gag lever post 32 fixed connection. The adsorption lever 1 and the connection lever 33 are parallel to each other.

The adsorption rod 1 is detachably installed in the tank body 2, and can be connected by fasteners such as bolts and screws, or connected by fasteners such as buckles.

Referring to fig. 4, the adsorption rod is composed of a support rod 11 and adsorption cotton 12, the support rod 11 is made of carbon fiber reinforced polyvinylidene fluoride (PVDF) material, and the surface of the support rod is subjected to nano fluorine spraying treatment to show hydrophobicity. The absorbent cotton 12 is made of high temperature resistant material, which has both absorption and gas permeability, such as polyurethane and aramid fiber.

When drying, adsorption rod 1 is located in the below of bearing the weight of the basket of flowers, places in the position under bearing the weight of the bottom rod of the basket of flowers, when hot-blast blowing is dried: firstly, the adsorption rod 1 can quickly adsorb moisture on the bottom rod, and the moisture at the joint position of the silicon wafer and the clamping groove can be partially adsorbed, so that the pressure of blowing and drying is reduced. Meanwhile, the adsorption cotton 12 has excellent penetrability, so that the adsorbed moisture can be swept out by hot air, and the dryness of the adsorption cotton 12 is kept. Finally, drying of moisture at the joint position of the silicon wafer and the clamping groove is improved, and the drying effect is improved.

When the manipulator is placed and is born the weight of basket of flowers to the stoving inslot, the cell body bottom has been placed and has been born the weight of basket of flowers base, for the manipulator draws and bears the weight of the basket of flowers, guarantees to bear the weight of the relative position of basket of flowers in the stoving inslot and keeps unchangeable. The groove body base is provided with an adsorption rod 1, the adsorption rod 1 is fixed on the base in a detachable mode, and the adsorption cotton is replaced. Referring to fig. 5, the diameter of the adsorption rod is 20mm, the diameter of the support rod is 5mm, and the diameter width of the adsorption cotton is 15mm, so that the moisture of the bearing flower basket can be absorbed, and the drying of the bearing flower basket by bottom airflow can not be hindered.

Bear the basket of flowers and get into the drying groove after, at first bear the basket of flowers sill bar contact and adsorb cotton 12, bear the water droplet above the basket of flowers sill bar directly adsorbed on adsorbing pole 1, alleviate the pressure that bears basket of flowers and silicon chip laminating department stoving. The turbo fan in the drying groove directly blows hot air in a special pipeline into the groove body to form hot air flow, and the hot air flow blows the surface of the silicon wafer to be dried. Wherein, the hot gas flow also can be with the moisture in the absorption cotton 12 blow-dry, absorbs the cotton 12 and remain dry state all the time, is born the basket extrusion deformation when absorption cotton 12 for a long time, will adsorb pole 1 and dismantle, change and adsorb cotton 12.

Example 2

A drying method for crystalline silicon cell groove type texturing comprises the following steps:

step 1, placing a silicon wafer in a clamping groove of a bearing flower basket, and moving the bearing flower basket to a drying groove base;

step 2: bear the weight of basket of flowers bottom bar contact and adsorb the cotton, bear the weight of the water droplet on the basket of flowers bottom bar and directly adsorbed on adsorbing the pole 1, open the hot gas flow in the stoving groove, weather the silicon chip surface.

The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.