阅读说明：本技术 用于难导电材料的离子/分子震荡放电加工装置及加工方法 (Ion/molecule oscillation discharge machining device and method for material difficult to conduct electricity ) 是由 刘江文 张永辉 邹治湘 张凯 乔顺治 于 2021-01-07 设计创作，主要内容包括：本发明涉及材料加工技术领域,尤其公开了用于难导电材料的离子/分子震荡放电加工装置及加工方法,该方法不受工件材料的导电性的影响,只需要将工具电极与加工电源连通就可以产生放电,主轴转速控制系统控制工具电极转速,供液单元持续向难导电材料与工具电极间隙输送工作介质,高频/射频电源经进电系统向工具电极施加高频/射频电波,使得工作介质与工具电极连续产生离子/分子震荡并产生放电将难导电材料被熔融蚀除。反馈控制系统根据力传感器的力信号对旋转主轴位置进行调整,使得工具电极和难导电材料之间的加工间隙保持在预定值实现持续进行加工。能够对难导电材料进行孔加工、平面加工、三维形状加工等,提升加工精度及加工质量。(The invention relates to the technical field of material processing, and particularly discloses an ion/molecule oscillation discharge processing device and a processing method for a material difficult to conduct, wherein the method is not influenced by the conductivity of a workpiece material, discharge can be generated only by communicating a tool electrode with a processing power supply, a main shaft rotating speed control system controls the rotating speed of the tool electrode, a liquid supply unit continuously conveys a working medium to a gap between the material difficult to conduct and the tool electrode, and a high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through an electric inlet system, so that the working medium and the tool electrode continuously generate ion/molecule oscillation and generate discharge to melt and erode the material difficult to conduct. And the feedback control system adjusts the position of the rotating spindle according to the force signal of the force sensor, so that the machining gap between the tool electrode and the material difficult to conduct electricity is kept at a preset value to realize continuous machining. The hole machining, the plane machining, the three-dimensional shape machining and the like can be performed on the material which is difficult to conduct electricity, and the machining precision and the machining quality are improved.)

1. An ion/molecule oscillation discharge processing device for a material difficult to conduct electricity is characterized in that: the device comprises a working medium container, a working medium, a liquid supply unit, a main shaft rotating speed control system, a feedback control system, a high-frequency/radio-frequency power supply, a rotating main shaft, a power inlet system and a tool electrode, wherein a material difficult to conduct electricity is placed in the working medium container, the tool electrode is installed on the rotating main shaft, the main shaft rotating speed control system controls the working rotating speed of the rotating main shaft, the liquid supply unit continuously conveys the working medium to a machining gap between the material difficult to conduct electricity and the tool electrode, the high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through the power inlet system, so that the contact part of the working medium and the tool electrode continuously generates ion/molecule oscillation and generates discharge, and the discharge effect enables the material difficult to conduct; the rotary main shaft is internally provided with a force sensor, the force sensor transmits a force signal to a feedback control system, and the feedback control system adjusts the position of the rotary main shaft according to the transmitted force signal, so that a tool electrode is in elastic contact with a material difficult to conduct electricity, and a machining gap is kept at a preset value for continuous discharge machining.

2. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the linear driving part is used for driving the rotary main shaft to move up and down, the force sensor transmits a force signal to the feedback control system, and the feedback control system regulates and controls the linear driving part according to the transmitted force signal, so that the linear driving part drives the rotary main shaft to drive the tool electrode to move intermittently, and the machining gap between the tool electrode and the material difficult to conduct electricity is dynamically kept at a required preset value.

3. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the rotating speed of the rotating main shaft is 0-20000 r/min, the rotating axis of the tool electrode extends in the vertical direction, the rotating main shaft can drive the tool electrode to rotate at a high speed, and the corrosion removal products of the discharge melting of the material difficult to conduct electricity are discharged from the machining gap by means of the centrifugal force generated by the high-speed rotation of the tool electrode.

4. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the working medium can be solid, viscous liquid, liquid or solid-liquid mixture.

5. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the liquid supply unit is used for conveying liquid working media to a machining gap between the tool electrode and the material difficult to conduct electricity, the liquid working media are used for infiltrating the tool electrode and the material difficult to conduct electricity, and the working media container is used for containing liquid or solid-liquid mixed working media.

6. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the liquid supply unit is provided with an atomizing nozzle, and the working medium conveyed by the liquid supply unit is atomized and sprayed to a machining gap between the tool electrode and the material difficult to conduct through the atomizing nozzle.

7. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the working medium container is used for containing a liquid or solid-liquid mixed working medium, the liquid supply unit is provided with a filter unit, and the working medium contained in the working medium container is filtered by the filter unit, recycled and conveyed to a machining gap between the tool electrode and the material difficult to be machined in an infiltration manner.

8. The ion/molecule oscillating electric discharge machining apparatus for a hardly conductive material according to claim 1, characterized in that: the power feeding system comprises a conductive column and a power feeding module, the power feeding module is composed of a conductive roller bearing and an insulating bearing seat, the conductive roller bearing is arranged in the insulating bearing seat, the insulating bearing seat is fixed on the outer shell of the rotating main shaft, the conductive column is fixed on the power feeding module and is communicated with the conductive roller bearing through threaded connection, and a high-frequency/radio-frequency power supply transmits high-frequency/radio-frequency electric waves to the rotating tool electrode through the conductive column.

9. The ion/molecule oscillation discharge processing method for the hardly conductive material is characterized by comprising the following steps of:

the high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through the power inlet system, so that ions/molecules at the contact part of the working medium and the tool electrode vibrate and discharge is generated, and the discharge effect enables the hard conductive material in the discharge area to be melted, thereby removing the material.

10. The ion/molecule oscillating electric discharge machining method for a hardly conductive material according to claim 9, characterized by further comprising the steps of:

the force sensor is arranged in the rotating main shaft, the force sensor transmits a force signal to the feedback control system, the feedback control system regulates and controls the linear driving piece according to the transmitted force signal to drive the rotating main shaft to drive the tool electrode to move, so that the tool electrode and the material difficult to conduct electricity are in elastic contact, the machining gap is dynamically kept at a preset value for continuous discharge machining, and the material difficult to conduct electricity is continuously removed by melting through high-frequency/radio-frequency discharge between the tool electrode and a working medium.

Technical Field

The invention relates to the technical field of material processing, and particularly discloses an ion/molecule oscillation discharge processing device and a processing method for a material difficult to conduct.

Background

The materials difficult to conduct electricity, such as semiconductors, optical glass, engineering ceramics and the like, have more and more extensive application in various fields, such as electronics, optics, instruments and meters, aerospace, national defense, civil industry and the like, due to the excellent properties of strong wear resistance, high hardness, good insulation and the like. The characteristics of the material difficult to conduct electricity: high brittleness, high hardness, low fracture toughness, and very close elastic limit and strength.

The current special processing methods applied to processing the materials difficult to conduct electricity are as follows:

(1) ultrasonic vibration processing:

the principle is as follows: the grinding material in the suspension impacts the surface of the workpiece under the action of mechanical impact, polishing and grinding and ultrasonic cavitation under the action of high-frequency ultrasonic waves, and the workpiece material is peeled off, so that the material is removed;

the method is characterized in that: the precision is high, and is easily controlled, and production efficiency is low, needs to process different cutters according to different processing object shapes, increases cost and process time.

(2) Laser processing:

the principle is as follows: photothermal effect

The method is characterized in that: expensive equipment, high cost, easy generation of cracks and heat affected layer.

(3) Abrasive flow processing

The principle is as follows: the abrasive medium flows through the processing surface of the workpiece under high pressure to perform the procedures of deburring, fillet grinding, flash removing and the like so as to reduce the waviness and the roughness of the surface of the workpiece and achieve the surface roughness of precision processing.

The method is characterized in that: the abrasive medium can be reused and has long service life, but the nozzle is easy to block, the processing scene is single, and the sample cannot be processed like other processing modes.

(4) Electric discharge machining

The principle is as follows: and (4) electric spark discharge.

The method is characterized in that: high speed and low cost.

Compared with other machining methods, the electric discharge machining has many advantages:

(1) the machining process is non-contact machining, and no macroscopic cutting force can be used for machining micro holes and the like in the machining process;

(2) the electric discharge machining equipment is simple, the cost is low, better surface quality can be obtained, and the electric discharge machining equipment has good application prospect in micro machining.

At present, the electric spark machining of the material difficult to conduct electricity mainly has 3 modes: high-voltage electric spark machining, auxiliary electrode electric spark machining and electrolytic electric spark combined machining.

(1) High-voltage electric spark machining: hard and brittle materials which are difficult to conduct are directly used as media, and the hard and brittle materials are corroded and removed by strong glow discharge generated by high voltage between a tip electrode and a flat plate. The method is only suitable for punching thin-wall materials which are difficult to conduct, and although the processing speed is high and the cost is low, the method can only be applied to rough processing due to the fact that the processing surface is too rough.

(2) Auxiliary electrode electric spark machining: the method comprises the steps of directly pressing a metal plate, a metal mesh and other conductive materials on the surface of a hard and brittle material, or forming a metal, carbon and other conductive layers on the surface of a difficult-to-conduct material by evaporation, coating and other methods, taking kerosene as a working solution, and enabling carbon decomposed by the kerosene, metal sputtered by a tool electrode and other compounds to form a discharge loop between the difficult-to-conduct material and the tool electrode by utilizing the high-temperature action instantaneously generated by spark discharge so that electric spark machining can be continuously carried out.

(3) Electrolytic electric spark combined machining (ECDM): ECDM is a new technology appearing in the field of special processing in recent years, and is commonly used for processing non-conductive materials such as heat-resistant glass, ceramics, industrial diamond, quartz and the like. The method needs an auxiliary anode when processing non-conductive materials, a tool electrode is connected with a negative electrode of a processing power supply in the processing process, the auxiliary anode is connected with a positive electrode of the processing power supply, electrolyte ions migrate between the electrodes in the processing process, electrochemical reaction occurs between the positive electrode and the negative electrode, bubbles are generated on the surface of the tool electrode (the negative electrode), the bubbles are gathered to form a gas film, the gas film blocks the conduction between the electrode and the electrolyte, when the voltage between the electrode and the electrolyte exceeds a certain critical value, the gas film is punctured to generate discharge, and only workpiece materials close to the tool electrode can be affected by high temperature generated by electrochemical discharge and chemical etching at the high temperature to remove the materials, so that the processing purpose is achieved. Because the auxiliary anode is far away from the tool electrode, the energy consumption in the processing process of the method is large, and the processing process is unstable.

Disclosure of Invention

In order to overcome the defects and shortcomings in the prior art, the invention aims to provide an ion/molecule oscillation discharge machining device and a machining method for a material difficult to conduct, so that the material difficult to conduct is efficiently machined, hole machining, plane machining and three-dimensional shape machining are conveniently conducted on the material difficult to conduct, and the machining precision and the machining quality of the material difficult to conduct are improved.

In order to achieve the above object, the present invention provides an ion/molecule oscillation discharge processing apparatus for a hardly conductive material, comprising a working medium container, a working medium, a liquid supply unit, a spindle rotation speed control system, a feedback control system, a high frequency/radio frequency power supply, a rotating spindle, a power supply system and a tool electrode, wherein the hardly conductive material is placed in the working medium container, the tool electrode is mounted on the rotating spindle, the spindle rotation speed control system controls the working rotation speed of the rotating spindle, the liquid supply unit continuously supplies the working medium to a processing gap between the hardly conductive material and the tool electrode, the high frequency/radio frequency power supply applies a high frequency/radio frequency electric wave to the tool electrode through the power supply system, so that the contact part between the working medium and the tool electrode continuously generates ion/molecule oscillation and generates discharge, and the discharge effect melts the hardly conductive material in a discharge, thereby realizing the removal of the material which is difficult to conduct electricity; the rotary main shaft is internally provided with a force sensor, the force sensor transmits a force signal to a feedback control system, and the feedback control system adjusts the position of the rotary main shaft according to the transmitted force signal, so that a tool electrode is in elastic contact with a material difficult to conduct electricity, and a machining gap is dynamically kept at a preset value for continuous discharge machining.

Wherein, still including the linear drive spare that is used for the rotatory main shaft of drive to reciprocate, force transducer transmits power signal to feedback control system, and feedback control system regulates and control linear drive spare according to the power signal that transmits for the rotatory main shaft of linear drive spare drive tool electrode intermittent type nature removes, specifically is: the feedback control system regulates and controls the linear driving part according to the transmitted force signal to adjust the position of the rotating main shaft: when the tool electrode is contacted with a workpiece, a contact force signal is transmitted to the feedback control system, the feedback control system regulates and controls the linear driving piece to drive the tool electrode to retreat for a certain distance, so that a discharge gap is formed between the tool and the workpiece, after the discharge machining is carried out for a period of time, the linear driving piece drives the tool to continue to feed to the workpiece at a certain speed until the tool is contacted with the workpiece again, and the reciprocating operation is carried out so that the tool electrode is in elastic contact with the material difficult to conduct electricity, and the machining gap is dynamically kept at a preset value for continuous discharge machining.

The rotating speed of the rotating main shaft is 0-20000 r/min, the rotating axis of the tool electrode extends in the vertical direction, the rotating main shaft can drive the tool electrode to rotate at a high speed, and the corrosion removal products of the discharge melting of the difficult-to-conduct material are discharged from the machining gap by the aid of the centrifugal force generated by the high-speed rotation of the tool electrode.

Wherein, the working medium can be solid, viscous liquid, liquid or solid-liquid mixture.

The liquid supply unit is used for conveying liquid working media to a machining gap between the tool electrode and the material difficult to conduct electricity, the liquid working media are made to infiltrate the tool electrode and the material difficult to conduct electricity, and the working media container is used for containing the liquid working media.

The liquid supply unit is provided with an atomizing nozzle, and the working medium conveyed by the liquid supply unit is atomized and sprayed to a machining gap between the tool electrode and the material difficult to conduct through the atomizing nozzle.

The working medium container is used for containing a liquid or solid-liquid mixed working medium, the liquid supply unit is provided with a filter unit, and the working medium contained in the working medium container is filtered by the filter unit, recycled and conveyed to a machining gap between the tool electrode and the material difficult to conduct and infiltrate the tool electrode and the material difficult to conduct and machine.

The power feeding system comprises a conductive column and a power feeding module, the power feeding module is composed of a conductive roller bearing and an insulating bearing seat, the conductive roller bearing is arranged in the insulating bearing seat, the insulating bearing seat is fixed on an outer shell of the rotating main shaft, the conductive column is fixed on the power feeding module and is communicated with the conductive roller bearing through threaded connection, and a high-frequency/radio-frequency power supply transmits high-frequency/radio-frequency electric waves to the rotating tool electrode through the conductive column.

In order to achieve the above object, the present invention provides an ion/molecule oscillating electric discharge machining method for a material difficult to conduct electricity, comprising the steps of:

the high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through the power inlet system, so that ions/molecules at the contact part of the working medium and the tool electrode vibrate and discharge is generated, and the discharge effect enables the hard conductive material in the discharge area to be melted, thereby removing the material. The electric discharge machining process is realized, the tool electrode is connected with a high-frequency/radio-frequency power supply, and the workpiece and the working medium can be not communicated with the high-frequency/radio-frequency power supply or can be communicated with the high-frequency/radio-frequency power supply.

Wherein, still include the following step:

the rotary main shaft is internally provided with a force sensor, the force sensor transmits a force signal to a feedback control system, the feedback control system regulates and controls a linear driving piece according to the transmitted force signal to drive the rotary main shaft to drive a tool electrode to move, so that the tool electrode is in elastic contact with a material difficult to conduct electricity, a machining gap is dynamically kept at a preset value to conduct continuous discharge machining, and the material difficult to conduct electricity is continuously melted and removed by means of high-frequency/radio-frequency discharge between the tool electrode and a working medium.

The invention has the beneficial effects that: the hard conductive material is placed in a working medium container, a tool electrode is installed on a rotating main shaft, a main shaft rotating speed control system controls the working rotating speed of the rotating main shaft, the rotating speed range of the rotating main shaft is continuously adjustable from 0-20000 rpm, a liquid supply unit continuously conveys the working medium into a machining gap between the hard conductive material and the tool electrode, a high-frequency/radio-frequency power supply applies high-frequency/radio-frequency electric waves to the tool electrode through a power inlet system, so that the contact part of the working medium and the tool electrode continuously generates ion/molecule oscillation and generates discharge, the discharge effect melts and erodes the hard conductive material near a discharge area, and the discharge removal of the hard conductive material is realized. In addition, a force sensor is arranged in the rotary spindle, a force signal is transmitted to the feedback control system by the force sensor in the machining process, and the feedback control system adjusts the position of the rotary spindle according to the transmitted force signal, so that the tool electrode and the material difficult to conduct electricity are in elastic contact, the machining gap between the tool electrode and the material difficult to conduct electricity is kept within the range of the preset value of the optimal machining gap, and the material difficult to conduct electricity is continuously machined. The hole machining, the plane machining, the three-dimensional shape machining and the like can be carried out on the material which is difficult to conduct electricity, and the machining precision and the machining quality are greatly improved; the structure design is simplified, the manufacturing and processing cost of the material difficult to conduct is reduced, and the efficient processing of the material difficult to conduct is realized.

Drawings

FIG. 1 is a schematic structural diagram of an ion/molecule oscillating electro-discharge machining apparatus according to the present invention;

FIG. 2 is a schematic view of the skin effect and electromachining of a tool electrode according to the present invention;

FIG. 3 is a schematic view of ion/molecule oscillating electro-discharge machining;

FIG. 4 is another schematic diagram of ion/molecule oscillating electro-discharge machining;

FIG. 5 is a partial enlarged view of portion A of FIG. 3;

FIG. 6 is a schematic view of ion/molecule oscillating electro-discharge machining using a conventional liquid fluid supply method;

FIG. 7 is a schematic view of ion/molecule oscillation discharge processing by a liquid supply method of an atomizing nozzle.

The reference numerals include:

1-working medium container 2-first working medium 3-second working medium

4-tool electrode 5-conductive column 6-high frequency/radio frequency power supply

7-main shaft rotating speed control system 8-clamp 9-hardly conductive material

10-atomizing nozzle 11-electricity inlet system 12-rotating spindle

13-liquid supply unit 14-linear driving piece 15-feedback control system

101-electron 102-etching product

Detailed Description

For the understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.

Referring to fig. 1 to 7, the present invention innovatively provides an ion/molecule oscillation discharge processing apparatus and a processing method applied to a material difficult to conduct electricity, which utilize high-frequency alternating current to generate high-frequency oscillation discharge to process electricity when passing through a conductor, and the ions/molecules near the conductor are basically free from ion migration during the processing process, so that the apparatus has the characteristics of high efficiency of ECDM (electrolytic electric discharge machining) and high processing precision of the conventional electric discharge machining.

The invention discloses an ion/molecule oscillation discharge machining device for a hardly conductive material, which comprises a working medium container 1, a first working medium 2, a second working medium 3, a tool electrode 4, a conductive column 5, a high-frequency/radio-frequency power supply 6, a spindle rotating speed control system 7, a clamp 8, a hardly conductive material 9, an atomizing spray head 10, a power supply system 11, a rotating spindle 12, a liquid supply unit 13, a linear driving piece 14 and a feedback control system 15, wherein the working medium container 1 is approximately in a hollow cuboid shape, the working medium container 1 is used for accommodating the first working medium 2, the second working medium 3 and the hardly conductive material 9, the first working medium 2 is positioned in the working medium container 1, and the second working medium 3 is positioned on the hardly conductive material 9. Preferably, a clamp 8 is placed in the working medium container 1, the difficult conductive material 9 is placed on the clamp 8, and the difficult conductive material 9 is stably placed at a required position in the working medium container 1 by the clamp 8, so that poor processing caused by movement of the difficult conductive material 9 relative to the working medium container 1 is avoided.

The high-frequency/radio-frequency power supply 6 applies high-frequency/radio-frequency electric waves to the tool electrode 4 through the power inlet system 11 (the conductive column 5 and the power inlet module), the frequency of the high-frequency/radio-frequency electric waves is between 100KHz and 10MHz, the frequency value of the high-frequency/radio-frequency electric waves can be adjusted and changed according to actual requirements, so that ions/molecules are generated at the contact part of the second working medium 3 and the tool electrode 4 to vibrate and generate discharge, the discharge effect melts and erodes the difficult-to-conduct material 9 near the discharge area, and the discharge removal of the difficult-to-conduct material 9 is realized.

In the actual use process of the ion/molecule oscillation discharge processing device for the material difficult to conduct, according to the actual requirement, the positive electrode and the negative electrode of the high-frequency/radio-frequency power supply 6 can be respectively electrically conducted with the tool electrode 4 and the second working medium 3 through two conducting wires. In order to simplify the structure design, the high frequency/radio frequency power supply 6 can also be conducted to the tool electrode 4 through only one conducting wire, and at this time, the high frequency/radio frequency power supply 6 is not electrically conducted to the second working medium 3, so that the assembly efficiency is improved, the structure complexity is reduced, and the manufacturing cost is reduced.

The present invention uses a solid medium as the second working medium 3, such as soap, alkaline solid electrolyte (NaOH, KOH, etc., preferably containing 20% alkaline electrolyte), etc., as the second working medium 3.

The skin effect is that when the electrons 101 with higher frequency of current or voltage are conducted in a conductor, the current or voltage is collected on the outer surface of the total conductor instead of being evenly distributed in the cross section of the whole conductor, the skin effect is more remarkable when the frequency of the current or voltage is higher, the skin effect enables the outer surface of the tool electrode 4 to collect a large amount of electrons 101, the discharge current is mainly concentrated on the interface of the tool electrode and a working medium, and the high temperature generated during discharge realizes the melt etching of the hard conductive material 9. Of course, the higher the current or voltage, the higher the frequency of the current or voltage, that is, the higher the machining energy when the tool electrode 4 is machined, and the faster the machining speed.

The tool electrode machining device further comprises a linear driving part 14 used for driving the tool electrode 4 to intermittently move up and down, a force sensor is arranged in the rotary main shaft 12, in the machining process of the tool electrode 4 on the difficult conducting material 9, the force sensor transmits a force signal to a feedback control system 15, the feedback control system 15 adjusts and controls the linear driving part 14 to drive the rotary main shaft 12 to drive the tool electrode 4 to move up and down according to the force signal transmitted by the force sensor, the size of a machining gap between the tool electrode 4 and the difficult conducting material 9 is guaranteed to be always dynamically kept in an optimal preset value range, and the difficult conducting material 9 can be continuously removed through melting through high-frequency/radio-frequency discharge between the tool electrode 4 and the second working medium 3.

In the actual processing process of the tool electrode 4 on the difficult conductive material 9, the main shaft rotating speed control system 7 adjusts and changes the rotating speed of the rotating main shaft 12, according to the actual requirement, the rotating speed range of the rotating main shaft 12 is 0-20000 r/min, the rotating axis of the tool electrode 4 extends along the vertical direction, through the arrangement of the rotating main shaft 12, in the actual use process of the ion/molecule oscillation discharge processing device, by means of the centrifugal force generated when the rotating main shaft 12 drives the tool electrode 4 to rotate, the molten corrosion products 102 generated in the processing gap between the tool electrode 4 and the difficult conductive material 9 are automatically discharged, the molten corrosion products 102 generated by the difficult conductive material 9 are prevented from interfering with the subsequent continuous processing of the difficult conductive material 9, and the processing efficiency and the processing quality of the difficult conductive material 9 are ensured.

The first working medium 2 is usually a liquid, and the second working medium 3 may be a solid, viscous liquid, or a mixture of solid and liquid. The first working medium 2 and the second working medium 3 each contain sufficient ions therein, so that a sufficiently continuous and stable discharge between the second working medium 3 and the tool electrode 4 can be achieved.

The liquid supply unit 13 is used for conveying the first working medium 2 into a machining gap between the tool electrode 4 and the difficult-to-conduct material 9, so that the first working medium 2 infiltrates the tool electrode 4 and the difficult-to-conduct material 9, and the working medium container 1 is used for accommodating the first working medium 2. By means of the liquid supply unit 13, the first working medium 2 can be continuously supplied between the tool electrode 4 and the hard conductive material 9, so that the high-frequency/radio-frequency discharge can be continuously performed, and the hard conductive material 9 can be continuously processed.

According to actual needs, the liquid supply unit 13 can supply the first working medium 2 to the machining gap between the tool electrode 4 and the difficult-to-conduct material 9 in the form of a common liquid fluid, that is, the liquid supply unit 13 extracts the first working medium 2 and flows into the machining gap between the tool electrode 4 and the difficult-to-conduct material 9 in the form of water flow, so that sufficient first working medium 2 is maintained in the machining gap.

The liquid supply unit 13 is provided with an atomizing nozzle 10, and the first working medium 2 conveyed by the liquid supply unit 13 is atomized and sprayed between the tool electrode 4 and the hard conductive material 9 through the atomizing nozzle 10. By means of the arrangement of the atomizing nozzle 10, the first working medium 2 can be uniformly and sufficiently sprayed between the tool electrode 4 and the material 9 which is difficult to conduct, so that the uniformity of high-frequency/radio-frequency discharge between the tool electrode 4 and the material 9 which is difficult to conduct is ensured, and the discharge machining quality and the discharge machining consistency of the material 9 which is difficult to conduct are further improved.

The liquid supply unit 13 is further provided with a filter unit, and the first working medium 2 accommodated in the working medium container 1 is filtered by the filter unit and then recycled and conveyed to the machining gap between the tool electrode 4 and the difficult conductive material 9, so that the tool electrode 4 and the difficult conductive material 9 are soaked. By means of the arrangement of the filtering unit, corrosion products 102 generated after the difficult conductive material 9 in the first working medium 2 is melted are filtered, the first working medium 2 is ensured to be recycled, meanwhile, the corrosion products 102 mixed in the second working medium 3 are prevented from interfering the normal processing of the difficult conductive material 9, and the electric discharge processing efficiency and the electric discharge processing quality of the difficult conductive material 9 are improved.

The ion/molecule oscillation discharge machining device for the difficult-to-conduct material greatly simplifies the structural design, reduces the manufacturing and processing cost of the difficult-to-conduct material 9, realizes the efficient processing of the difficult-to-conduct material 9, facilitates the processing treatment of various processing requirements such as hole processing, plane processing, three-dimensional shape processing and the like on the difficult-to-conduct material 9, and improves the processing precision and the processing quality.

When the tool electrode 4 moves downwards, the second working medium 3 is firstly contacted with the tool electrode, the second working medium 3 is dissolved, a groove capable of containing a molten working medium is formed, ions in the molten working medium are kept in the groove, the solid medium (namely the second working medium 3) is broken down by the tool electrode 4 along with continuous processing, at the moment, conductive ions in the molten working medium are immersed on the surface of the difficult conductive material 9, ion/molecule oscillation discharge is continuously formed under the effect of high-frequency/radio-frequency electric waves, and the temperature is far higher than the melting point of the difficult conductive material 9 due to extremely high discharge temperature, so that the surface of the difficult conductive material 9 can be corroded.

At the same time, electrolytic corrosion of the tool electrode 4 and the hard conductive material 9 occurs in the machining region. Since this method is a rotational machining method, the machined erosion product 102 can be ejected from the machining gap by the centrifugal force generated when the tool electrode 4 rotates at a high speed, and the machining can be continued and stably performed.

The power feeding system 11 comprises a conductive column 5 and a power feeding module, the power feeding module is composed of a conductive roller bearing and an insulating bearing seat, the conductive roller bearing is arranged in the insulating bearing seat, the insulating bearing seat is fixed on the outer shell of the rotating main shaft 12, the conductive column 5 is fixed on the power feeding module, the conductive column 5 is communicated with the conductive roller bearing through threaded connection, and the high-frequency/radio-frequency power supply 6 transmits high-frequency/radio-frequency electric waves to the rotating tool electrode 4 through the conductive column 5.

The invention relates to an ion/molecule oscillation discharge processing method for a hardly conductive material, which comprises the following steps:

high-frequency/radio-frequency electric waves are applied to the tool electrode 4 by the high-frequency/radio-frequency power supply 6 through the power inlet system, so that ions/molecules at the contact part of the working medium and the tool electrode 4 are vibrated and discharge is generated, the melting corrosion of the material 9 difficult to conduct is realized, the discharge machining of the material 9 difficult to conduct is realized, and the discharge current is mainly concentrated on the interface of the tool electrode and the working medium due to the skin effect of the high-frequency/radio-frequency electric waves.

The ion/molecule oscillation discharge processing method also comprises the following steps:

the force sensor is arranged in the rotary main shaft 12, in the processing process of the tool electrode 4 on the difficult conductive material 9, the force sensor transmits a force signal to the feedback control system 15, the feedback control system 15 regulates and controls the linear driving piece 14 according to the transmitted force signal to drive the rotary main shaft 12 to drive the tool electrode 4 to move, so that the tool electrode 4 and the difficult conductive material are in elastic contact (namely, the tool electrode 4 is prevented from being in direct contact with the difficult conductive material 9, and meanwhile, the gap size between the tool electrode 4 and the difficult conductive material 9 is also prevented from being too large), the processing gap is kept at an optimal preset value to carry out continuous discharge processing, and the difficult conductive material 9 is continuously melted and corroded by means of high-frequency/radio-frequency discharge between the tool electrode 4 and a working medium.

At present, the electric machining modes applied to the material 9 difficult to conduct electricity are high-voltage electric spark machining, auxiliary electrode electric spark machining and electrolytic electric spark composite machining. The electric machining is characterized in that (1) the machining process is non-contact machining, and no macroscopic cutting force exists in the machining process, so that micro-hole machining and the like can be carried out; (2) the electrolytic electric spark composite processing equipment is simple, has low cost, can obtain better surface quality, and has good application prospect in micro-machining. However, high-voltage electric spark machining uses a high-voltage power supply, high-voltage power generation energy is large, the control is not easy, the surface quality of a machined sample piece is poor, the sample piece with high precision requirement cannot be machined at one time, and the high-voltage electric spark machining is only suitable for punching a thin-wall conductive material 9, although the machining speed is high and the cost is low, the machined surface is too rough, and the high-voltage electric spark machining can only be applied to rough machining; the auxiliary electrode electric spark processing is to utilize the high temperature action generated in the moment of spark discharge to lead carbon decomposed from kerosene, metal sputtered from the tool electrode 4 and other compounds to form a discharge loop between the material 9 which is difficult to conduct and the tool electrode 4, thus leading the electric spark processing to be capable of going on continuously, leading the quality of the processing surface to be low and the processing technological process to be complex because the kerosene contains a plurality of impurities; the electrolytic electric spark composite machining (ECDM) adopts an integrated process of an electrolysis process and an electric spark process, and controls the machining process by controlling electrical parameters, and although the combination of the electrolysis process and the electric spark process can ensure high machining precision, the electrical parameters are not easy to control, so that the machining efficiency is low.

The method combines the characteristics of the traditional electromachining and the advantages of the ECDM, and innovatively provides an ion/molecule oscillation discharge machining method applied to the material difficult to conduct. The method is not influenced by the conductivity of workpiece materials, the discharge can be generated only by communicating the tool electrode with a processing power supply, and the processing parameters can be well controlled only by controlling the frequency of the high-frequency/radio-frequency power supply 6 in the processing process, so that the method can be quickly adapted to different processing occasions. In addition, in order to ensure that the alkaline dielectric medium can be continuously supplemented to a processing area, so that the ion/molecule oscillation discharge processing can be continuously carried out, the invention provides two liquid supply modes, wherein the first mode is ordinary liquid fluid liquid supply, and the other mode is an atomization liquid supply mode, so that the processing can be well carried out.

Compared with the prior art, the invention has the advantages that:

1) hard and brittle materials which are difficult to conduct can be efficiently processed, such as engineering ceramics, semiconductors and the like;

2) the cutting tool can be applied to various cutting occasions, can be applied to hole machining and plane cutting, can also be used for machining three-dimensional shapes, and is convenient to operate;

3) the solid medium (namely the second working medium 3) has various choices and low cost, and can be exchanged and matched according to different application occasions;

4) the machining efficiency is high, and the precision is good.

Because the electrolytic machining is carried out while the electric discharge machining is carried out in the electrolyte, the electrochemical machining device has the advantages of inheriting ECDM and traditional electric machining, and meanwhile, the machining process can be controlled only by regulating and controlling the frequency. Because solid electrolyte is alkaline dielectric mostly, and raw and other materials are cheap, greatly reduced the processing cost, the dielectric variety is various simultaneously, can match according to different demands. In addition, the tool electrode can be made into various shapes, and various three-dimensional cavities can be machined.

The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.