阅读说明：本技术 一种基于时序控制的二维光栅高效制造方法 (Two-dimensional grating efficient manufacturing method based on time sequence control ) 是由 刘红忠 蔡崇文 叶国永 史永胜 尹磊 雷彪 牛东 于 2021-02-01 设计创作，主要内容包括：一种基于时序控制的二维光栅高效制造方法,先清洗导轨上表面,然后涂布光刻胶；再打开线光源预热,将导轨放置在匀速移动平台上,把掩膜版和时序开关依次布置在导轨上方；导轨匀速运动,通过时序信号控制时序开关的通断,从而控制线光源是否对光刻胶进行曝光,实现用时序信号与导轨速度控制栅距；然后配置显影液,将曝光后的导轨放入显影液中显影；最后对显影后的导轨进行刻蚀,然后去除光刻胶,得到导轨共体二维光栅；本发明直接在导轨表面制造二维光栅,降低光栅与导轨粘贴的不稳定性以及装配误差；利用时序信号的精确时间插分实现光栅栅距的空间插分,有效提高光栅的制造精度,同时提高光栅的加工效率。(A two-dimensional grating high-efficiency manufacturing method based on time sequence control comprises the steps of firstly cleaning the upper surface of a guide rail, and then coating photoresist; opening a linear light source for preheating, placing the guide rail on a constant-speed moving platform, and sequentially arranging a mask plate and a time sequence switch above the guide rail; the guide rail moves at a constant speed, and the on-off of the time sequence switch is controlled through the time sequence signal, so that whether the light source exposes the photoresist is controlled, and the control of the grid distance by the time sequence signal and the guide rail speed is realized; then preparing a developing solution, and putting the exposed guide rail into the developing solution for developing; finally, etching the developed guide rail, and then removing the photoresist to obtain the guide rail integrated two-dimensional grating; the invention directly manufactures the two-dimensional grating on the surface of the guide rail, thereby reducing the instability of the adhesion of the grating and the guide rail and the assembly error; the space interpolation of the grating pitch is realized by utilizing the accurate time interpolation of the time sequence signal, the manufacturing precision of the grating is effectively improved, and meanwhile, the processing efficiency of the grating is improved.)

1. A two-dimensional grating efficient manufacturing method based on time sequence control is characterized by comprising the following steps:

1) cleaning the upper surface of the guide rail, and then coating photoresist;

2) opening a linear light source for preheating, placing a guide rail on a constant-speed moving platform, and sequentially arranging a mask plate and a pulse switch above the guide rail; the guide rail moves at a constant speed, and the on-off of the time sequence switch is controlled through the time sequence signal, so that whether the light source exposes the photoresist is controlled, and the grid distance is controlled by the time sequence signal and the guide rail speed;

3) preparing a developing solution, and developing the exposed guide rail;

4) and etching the developed guide rail, and then removing the photoresist to obtain the two-dimensional grating of the integrated guide rail.

2. The method for efficiently manufacturing two-dimensional grating based on time sequence control according to claim 1, wherein: the thickness of the photoresist coated in the step 1) is 0.7-3 μm.

3. The method for efficiently manufacturing two-dimensional grating based on time sequence control according to claim 1, wherein: the step 2) of controlling the grid distance by the timing signal and the guide rail speed is specifically as follows:

P＝v/f

a＝a_f

wherein P is the grating pitch of the two-dimensional grating, a is the duty ratio of the two-dimensional grating, f is the frequency of the time sequence signal, a_fV is the rail speed, the duty cycle of the timing signal.

4. The method for efficiently manufacturing two-dimensional grating based on time sequence control according to claim 1, wherein: the grid pitch of the mask in the step 2) is 0.1-100 μm.

5. The method for efficiently manufacturing two-dimensional grating based on time sequence control according to claim 1, wherein: and 2) in the step 2), the constant motion speed v of the guide rail is 0.1-10 mm/s.

6. The method for efficiently manufacturing two-dimensional grating based on time sequence control according to claim 1, wherein: the frequency f of the timing signal for controlling the timing switch in the step 2) is 0.01-10 khz.

7. The method for efficiently manufacturing two-dimensional grating based on time sequence control according to claim 1, wherein: the grid pitch of the two-dimensional grating of the common guide rail obtained in the step 4) is 0.1-100 μm, the duty ratio is 20-80%, and the length of the two-dimensional grating of the common guide rail in the running direction of the guide rail is 1-50 m.

Technical Field

The invention belongs to the technical field of precise grating manufacturing, and particularly relates to a two-dimensional grating efficient manufacturing method based on time sequence control.

Background

The grating co-body manufacturing is to integrally manufacture the grating ruler and the measured object, so that the stability of the system in the working process can be effectively improved, and the assembly error of the system can be reduced. Guide rails in a numerical control machine tool or a precision positioning platform are taken as an example, the two-dimensional grating is directly manufactured on the surface of the guide rail to realize the linear guiding and positioning measurement functions of the linear guide rail, and compared with the traditional method that two grating rulers are adhered or fixed by bolts on the outer side of the guide rail, the method can effectively reduce the assembly error of the system.

For the manufacture of the long and narrow two-dimensional grating, the length-width ratio is extremely large, a traditional photoetching method needs an extremely large mask, and the manufactured grating has the problems of breadth limitation and splicing. Meanwhile, in the traditional method, the grating pitch of the grating is controlled by utilizing the grating pitch of the mask plate, the fixed mask plate pitch can only manufacture the grating with fixed grating pitch and fixed duty ratio, and when the two-dimensional grating with different grating pitches is manufactured, the mask plate needs to be frequently replaced, so that the processing efficiency is greatly reduced.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention aims to provide a two-dimensional grating efficient manufacturing method based on time sequence control, which directly manufactures a two-dimensional grating on the surface of a guide rail, reduces the instability and the assembly error of the two-dimensional grating and the guide rail in sticking, and improves the manufacturing precision and the processing efficiency of the two-dimensional grating.

In order to achieve the purpose, the technical scheme adopted by the invention is as follows:

a two-dimensional grating efficient manufacturing method based on time sequence control comprises the following steps:

1) cleaning the upper surface of the guide rail, and then coating photoresist;

2) opening a linear light source for preheating, placing a guide rail on a constant-speed moving platform, and sequentially arranging a mask plate and a pulse switch above the guide rail; the guide rail moves at a constant speed, and the on-off of the time sequence switch is controlled through the time sequence signal, so that whether the light source exposes the photoresist is controlled, and the grid distance is controlled by the time sequence signal and the guide rail speed;

3) preparing a developing solution, and developing the exposed guide rail;

4) and etching the developed guide rail, and then removing the photoresist to obtain the two-dimensional grating of the integrated guide rail.

The photoresist in the step 1) is EPG535 or EPG510, and the coating thickness is 0.7-3 μm.

The step 2) of controlling the grid distance by the timing signal and the guide rail speed is specifically as follows:

P＝v/f

a＝a_f

wherein P is the grating pitch of the two-dimensional grating, a is the duty ratio of the two-dimensional grating, f is the frequency of the time sequence signal, a_fV is the rail speed, the duty cycle of the timing signal.

The grid pitch of the mask in the step 2) is 0.1-100 μm.

And 2) in the step 2), the constant motion speed v of the guide rail is 0.1-10 mm/s.

The frequency f of the timing signal for controlling the timing switch in the step 2) is 0.01-10 khz.

The grid pitch of the two-dimensional grating of the common guide rail obtained in the step 4) is 0.1-100 μm, the duty ratio is 20-80%, and the length of the two-dimensional grating of the common guide rail in the running direction of the guide rail is 1-50 m.

The invention has the beneficial effects that:

because the two-dimensional grating and the guide rail are integrally manufactured, the instability of adhesion of the grating and the guide rail and assembly errors are reduced; because the space interpolation of the grating pitch is realized by utilizing the accurate time interpolation of the time sequence signal, the manufacturing precision of the grating is effectively improved, and meanwhile, the processing efficiency of the grating is improved.

Drawings

FIG. 1 is a schematic view illustrating the coating of photoresist on the upper surface of a guide rail according to an embodiment.

FIG. 2 is a diagram illustrating the exposure of the timing switch to the photoresist controlled by the timing signal according to the embodiment.

FIG. 3 is a top view of an embodiment reticle.

FIG. 4 is a schematic diagram of a tank type after development of the embodiment.

FIG. 5 is a schematic diagram of an etched guide rail according to an embodiment.

FIG. 6 is a front view of a two-dimensional grating with a common body guide rail obtained by removing photoresist according to an embodiment.

FIG. 7 is a top view of an embodiment corporate guide two-dimensional grating.

Detailed Description

The present invention will be described in detail below with reference to examples and the accompanying drawings.

A two-dimensional grating efficient manufacturing method based on time sequence control comprises the following steps:

1) referring to fig. 1, the upper surface of a guide rail 1 was cleaned, and then coated with EPG535 photoresist 2 to a thickness of 2 μm;

2) referring to fig. 2 and 3, turning on a linear light source 5 for preheating, placing a guide rail 1 on a uniform-speed moving platform, and sequentially arranging a mask 3 and a time sequence switch 4 above the guide rail 1; the speed v of the uniform motion of the guide rail 1 is 1mm/s, the frequency f of the time sequence signal is 0.05kHz, and the on-off of the time sequence switch 4 is controlled, so that whether the photoresist 2 is exposed by the control line light source 5 or not is realized, the grid distance is controlled by the time sequence signal and the guide rail speed, and the control method specifically comprises the following steps:

P＝v/f

a＝a_f

wherein P is the grating pitch of the two-dimensional grating, a is the duty ratio of the two-dimensional grating, f is the frequency of the time sequence signal, a_fIs the duty cycle of the timing signal, v is the rail velocity;

3) referring to fig. 4, preparing a sodium hydroxide solution with a concentration of 5 ‰, and then placing the exposed guide rail 1 into a developing solution to develop the photoresist;

4) referring to fig. 5, 6 and 7, the developed guide rail 1 is etched by using ferric chloride solution, and then the photoresist 2 is removed, so that the common guide rail two-dimensional grating 6 is obtained, wherein the grid pitch is 20 μm, the duty ratio is 50%, and the length of the common guide rail two-dimensional grating 6 in the guide rail running direction is 2 m.

The beneficial effect of this embodiment does: the two-dimensional grating and the guide rail are integrally manufactured, so that the bonding instability and assembly error of the grating and the guide rail are reduced; the space interpolation of the grating pitch is realized by utilizing the accurate time interpolation of the pulse signal, the manufacturing precision of the grating is effectively improved, the error of the grating pitch is controlled within 3 percent, meanwhile, the mask is prevented from being frequently replaced when different grating pitches are processed, and the processing efficiency of the grating is improved.