阅读说明：本技术 一种真空机械扫描装置 (Vacuum mechanical scanning device ) 是由 彭立波 胡振东 许波涛 罗南安 于 2019-10-25 设计创作，主要内容包括：本发明公开了一种真空机械扫描装置,包括真空扫描轴、安装法兰、密封套、扫描轴升降驱动机构以及扫描轴旋转驱动机构,所述密封套与真空扫描轴之间设有密封组件,真空机械扫描装置还包括两组用于使密封套可随真空扫描轴的位置浮动并保持密封套与安装法兰轴向间距不变的导向副,两组所述导向副对称布置于所述密封套的两侧,所述安装法兰与所述密封套之间连接有柔性密封套管。本发明具有结构简单、成本低、有利于提高可靠性和使用寿命等优点。(The invention discloses a vacuum mechanical scanning device which comprises a vacuum scanning shaft, a mounting flange, a sealing sleeve, a scanning shaft lifting driving mechanism and a scanning shaft rotating driving mechanism, wherein a sealing assembly is arranged between the sealing sleeve and the vacuum scanning shaft, the vacuum mechanical scanning device also comprises two groups of guide pairs, the two groups of guide pairs are used for enabling the sealing sleeve to float along with the position of the vacuum scanning shaft and keeping the axial distance between the sealing sleeve and the mounting flange unchanged, the two groups of guide pairs are symmetrically arranged on two sides of the sealing sleeve, and a flexible sealing sleeve is connected between the mounting flange and the sealing sleeve. The invention has the advantages of simple structure, low cost, being beneficial to improving the reliability and prolonging the service life, etc.)

1. The utility model provides a vacuum mechanical scanning device, includes vacuum scanning axle (1), mounting flange (2), seal cover (3), scanning axle lift actuating mechanism (7) and scanning axle rotary driving mechanism (8), be equipped with seal assembly (4), its characterized in that between seal cover (3) and vacuum scanning axle (1): the vacuum mechanical scanning device further comprises two groups of guide pairs (5) which are used for enabling the sealing sleeve (3) to float along with the position of the vacuum scanning shaft (1) and keeping the axial distance between the sealing sleeve (3) and the mounting flange (2) unchanged, the two groups of guide pairs (5) are symmetrically arranged on two sides of the sealing sleeve (3), and a flexible sealing sleeve (6) is connected between the mounting flange (2) and the sealing sleeve (3).

2. The vacuum mechanical scanning device of claim 1, wherein: the guide pair (5) comprises a first sliding block (51), a first guide rail (52) matched with the first sliding block (51), a second sliding block (53) and a second guide rail (54) matched with the second sliding block (53), the first sliding block (51) is arranged on the sealing sleeve (3), the first guide rail (52) is arranged on the second sliding block (53), the second guide rail (54) is arranged on the mounting flange (2), and the second guide rail (54), the first guide rail (52) and the vacuum scanning shaft (1) are perpendicular to each other.

3. The vacuum mechanical scanning device of claim 1, wherein: the guide pair (5) comprises a first guide shaft, a first linear bearing matched with the first guide shaft, a second guide shaft and a second linear bearing matched with the second guide shaft, the guide shaft is arranged on the sealing sleeve (3), the first linear bearing is arranged on the second guide shaft, the second linear bearing is arranged on the mounting flange (2), and the first guide shaft, the second guide shaft and the vacuum scanning shaft (1) are perpendicular to each other.

4. Vacuum mechanical scanning device according to claim 1, 2 or 3, characterized in that: the sealing assembly (4) comprises at least two sealing rings (41), an air exhaust spacer ring (42) is arranged between every two adjacent sealing rings (41), and the air exhaust spacer ring (42) is provided with a vacuum air exhaust interface (43).

5. The vacuum mechanical scanning device of claim 4, wherein: the sealing ring (41) is a polytetrafluoroethylene sealing ring.

6. Vacuum mechanical scanning device according to claim 1, 2 or 3, characterized in that: the flexible sealing sleeve (6) is a corrugated pipe, and two ends of the corrugated pipe are respectively connected with the mounting flange (2) and the sealing sleeve (3) in a welding mode.

7. Vacuum mechanical scanning device according to claim 1, 2 or 3, characterized in that: the scanning shaft lifting driving mechanism (7) comprises a first rotary driving part (71), a first transmission assembly (72), a screw rod (73) and a nut seat (74) matched with the screw rod (73), the vacuum scanning shaft (1) is arranged on the nut seat (74) through a rotary bearing (75), and the first rotary driving part (71) is connected with the screw rod (73) through the first transmission assembly (72).

8. The vacuum mechanical scanning device of claim 7, wherein: the scanning shaft rotation driving mechanism (8) comprises a second rotation driving part (81) and a second transmission assembly (82), wherein the second rotation driving part (81) is arranged on the nut seat (74) and is connected with the vacuum scanning shaft (1) through the second transmission assembly (82).

9. The vacuum mechanical scanning device of claim 7, wherein: the nut seat (74) is also provided with a lifting guide assembly (76), and the screw rod (73) and the lifting guide assembly (76) are oppositely arranged on two sides of the vacuum scanning shaft (1).

Technical Field

The invention relates to semiconductor processing equipment, in particular to a vacuum mechanical scanning device.

Background

The vacuum mechanical scanning device used in semiconductor equipment mostly adopts a sealing sleeve for guiding, very high matching precision (unidirectional radius clearance is required to be 10-15 microns) is often required between a vacuum scanning shaft and the sealing sleeve, higher requirements are provided for the processing of the sealing sleeve and the vacuum scanning shaft, working environment (such as temperature stability) and the like, the sealing sleeve and an installation flange part of a common bearing sealing ring are rigidly connected or are the same rigid structural body, the sealing structure generally requires the installation of the sealing vacuum scanning shaft, and has good position matching precision between rotation and linear sliding and the sealing sleeve, otherwise, the sealing failure is easily caused, or the sealing ring generates uneven abrasion in the using process, the sealing failure is caused in advance, meanwhile, because of the existence of a fixed movement clearance, the sealing performance of a sealing component is also higher, these factors make the overall system relatively expensive to manufacture and use, particularly for high vacuum application scenarios.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a vacuum mechanical scanning device which has simple structure and low cost and is beneficial to improving the reliability and prolonging the service life.

In order to solve the technical problems, the invention adopts the following technical scheme:

the utility model provides a vacuum mechanical scanning device, includes vacuum scanning axle, mounting flange, seal cover, scanning axle lift actuating mechanism and scanning axle rotary driving mechanism, be equipped with seal assembly between seal cover and the vacuum scanning axle, vacuum mechanical scanning device still includes two sets ofly and is used for making the seal cover can float and keep seal cover and the unchangeable direction of mounting flange axial interval along with the position of vacuum scanning axle vice, and is two sets of the vice symmetrical arrangement of direction is in the both sides of seal cover, mounting flange with be connected with flexible sealing sleeve between the seal cover.

As a further improvement of the above technical solution: the guiding pair comprises a first slider, a first guide rail matched with the first slider, a second slider and a second guide rail matched with the second slider, the first slider is arranged on the sealing sleeve, the first guide rail is arranged on the second slider, the second guide rail is arranged on the mounting flange, and the second guide rail, the first guide rail and the vacuum scanning shaft are mutually perpendicular.

As a further improvement of the above technical solution: the direction is vice including first guiding axle, with first guiding axle complex first linear bearing, second guiding axle and with second guiding axle complex second linear bearing, the guiding axle is located on the sealing boot, and first linear bearing locates on the second guiding axle, second linear bearing locates on the mounting flange, and first guiding axle, second guiding axle and vacuum scanning axle mutually perpendicular.

As a further improvement of the above technical solution: the sealing assembly comprises at least two sealing rings, an air exhaust spacer ring is arranged between every two adjacent sealing rings, and a vacuum air exhaust interface is arranged on the air exhaust spacer ring.

As a further improvement of the above technical solution: the sealing ring is a polytetrafluoroethylene sealing ring.

As a further improvement of the above technical solution: the flexible sealing sleeve is a corrugated pipe, and two ends of the corrugated pipe are respectively connected with the mounting flange and the sealing sleeve in a welding mode.

As a further improvement of the above technical solution: the scanning shaft lifting driving mechanism comprises a first rotary driving part, a first transmission assembly, a screw rod and a nut seat matched with the screw rod, the vacuum scanning shaft is arranged on the nut seat through a rotary bearing, and the first rotary driving part is connected with the screw rod through the first transmission assembly.

As a further improvement of the above technical solution: the scanning shaft rotation driving mechanism comprises a second rotation driving part and a second transmission assembly, and the second rotation driving part is arranged on the nut seat and connected with the vacuum scanning shaft through the second transmission assembly.

As a further improvement of the above technical solution: the nut seat is also provided with a lifting guide assembly, and the screw rod and the lifting guide assembly are oppositely arranged on two sides of the vacuum scanning shaft.

Compared with the prior art, the invention has the advantages that: the invention discloses a vacuum mechanical scanning device, wherein a vacuum scanning shaft is driven by a scanning shaft lifting driving mechanism to lift to realize scanning motion along a Z axis, and is driven by a scanning shaft rotating driving mechanism to realize rotating motion around the Z axis, the part of the vacuum scanning shaft, which is positioned in a sealing sleeve, is sealed by a sealing component, the part of the vacuum scanning shaft, which is positioned between a mounting flange and the sealing sleeve, is sealed by a flexible sealing sleeve, the flexible sealing sleeve realizes sealing connection without obstructing the motion of the sealing sleeve, the sealing sleeve realizes relative fixation between the sealing sleeve and the mounting flange through 2 groups of guide pairs, so that the position Z axis direction between the sealing sleeve and the mounting flange is relatively fixed, the X axis direction and the Y axis direction can move in a small range and/or rotate around an X, Y axis, thereby realizing that a sealing main body consisting of the sealing sleeve, the sealing component and the like has the characteristic, therefore, the position deviation between the vacuum scanning shaft and the mounting flange can be eliminated, the position matching precision requirement between the vacuum scanning shaft and the sealing assembly and the sealing performance requirement of the sealing assembly are reduced, the cost is reduced, and the problems of sealing failure or uneven wear in the use process and the like are avoided.

Drawings

Fig. 1 is a schematic structural diagram of a vacuum mechanical scanning device according to the present invention.

Fig. 2 is a schematic structural view of a second embodiment of the sealing assembly of the present invention.

The reference numerals in the figures denote: 1. a vacuum scanning axis; 2. installing a flange; 3. sealing sleeves; 4. a seal assembly; 41. a seal ring; 42. an air exhaust spacer ring; 43. a vacuum air extraction interface; 5. a guide pair; 51. a first slider; 52. a first guide rail; 53. a second slider; 54. a second guide rail; 6. a flexible sealing sleeve; 7. a scanning shaft lifting driving mechanism; 71. a first rotary drive member; 72. a first transmission assembly; 73. a screw rod; 74. a nut seat; 75. a rotating bearing; 76. a lifting guide assembly; 8. a scanning shaft rotation driving mechanism; 81. a second rotary drive; 82. a second transmission assembly; 9. a vacuum chamber.

Detailed Description

The invention is described in further detail below with reference to the figures and specific examples of the specification.

Fig. 1 shows an embodiment of a vacuum mechanical scanning apparatus according to the present invention, which includes a vacuum scanning shaft 1, a mounting flange 2, a sealing sleeve 3, a scanning shaft lifting driving mechanism 7, and a scanning shaft rotating driving mechanism 8, wherein a sealing assembly 4 is disposed between the sealing sleeve 3 and the vacuum scanning shaft 1, the vacuum mechanical scanning apparatus further includes two sets of guiding pairs 5 for enabling the sealing sleeve 3 to float along with the position of the vacuum scanning shaft 1 and keeping the axial distance between the sealing sleeve 3 and the mounting flange 2 unchanged, the two sets of guiding pairs 5 are symmetrically disposed at two sides of the sealing sleeve 3, and a flexible sealing sleeve 6 is connected between the mounting flange 2 and the sealing sleeve 3.

The vacuum mechanical scanning device, the vacuum scanning shaft 1 is driven by a scanning shaft lifting driving mechanism 7 to lift and realize the scanning movement along the Z axis, the scanning shaft rotating driving mechanism 8 to realize the rotating movement around the Z axis, the part of the vacuum scanning shaft 1 positioned in a sealing sleeve 3 is sealed by a sealing component 4, the part positioned between a mounting flange 2 and the sealing sleeve 3 is sealed by a flexible sealing sleeve 6, the flexible sealing sleeve 6 can not obstruct the movement of the sealing sleeve 3 relative to the mounting flange 2 while realizing the sealing connection, the sealing sleeve 3 realizes the relative fixation with the mounting flange 2 through 2 groups of guide pairs 5, the position Z axis direction between the sealing sleeve 3 and the mounting flange 2 is relatively fixed, the X axis and the Y axis direction can move in a small range and/or rotate around X, Y axes, thereby realizing that a sealing main body composed of the sealing sleeve 3, the sealing component 4 and the like has the characteristic of floating along the position of the vacuum scanning shaft 1, therefore, the position deviation between the vacuum scanning shaft 1 and the mounting flange 2 can be eliminated, the position matching precision requirement between the vacuum scanning shaft 1 and the sealing assembly 4 and the sealing performance requirement of the sealing assembly 4 are properly reduced, the cost is reduced, and the problems of sealing failure or uneven wear in the use process and the like are avoided.

Further, in this embodiment, the guiding pair 5 includes a first slider 51, a first guide rail 52 and a second slider 53 that are matched with the first slider 51, and a second guide rail 54 that is matched with the second slider 53, the first slider 51 is disposed on the sealing sleeve 3, the first guide rail 52 is disposed on the second slider 53, the second guide rail 54 is disposed on the mounting flange 2, and the second guide rail 54, the first guide rail 52, and the vacuum scanning shaft 1 are perpendicular to each other, that is, only a linear guiding pair is adopted in this embodiment, and the floating effect is limited to the translational floating in the X direction and the Y direction. Of course, in other embodiments, the guiding pair 5 may also be: including first guiding axle, with first guiding axle complex first linear bearing, second guiding axle and with second guiding axle complex second linear bearing, on seal cover 3 was located to the guiding axle, first linear bearing located on the second guiding axle, second linear bearing located mounting flange 2, and first guiding axle, second guiding axle and vacuum scanning axle 1 mutually perpendicular. The structure similar to a gyroscope can be adopted, and the guide structure with double functions of sliding and rotating is provided, so that the floating effect has translation in the X direction and the Y direction and rotation around the X axis and the Y axis, and the maximum floating capacity is provided.

Further, in this embodiment, the sealing assembly 4 includes two sealing rings 41, an air exhaust spacer ring 42 is disposed between two adjacent sealing rings 41, the air exhaust spacer ring 42 is provided with a vacuum air exhaust interface 43, the vacuum air exhaust interface 43 can be connected to a vacuum pump, and air between the two sealing rings 41 is exhausted to form a vacuum area. Referring to fig. 2, in other embodiments, more sealing rings 41 may be provided and matched with the air-extracting spacer ring 42, so as to further improve the sealing effect.

In the present embodiment, the seal ring 41 is preferably a teflon seal ring. The polytetrafluoroethylene sealing ring has small sliding friction coefficient, good wear resistance and better elasticity, and can ensure the sealing performance and the service life.

As a preferred technical solution, in this embodiment, the flexible sealing sleeve 6 is a corrugated pipe, and two ends of the corrugated pipe are respectively connected with the mounting flange 2 and the sealing sleeve 3 by welding. The corrugated pipe is adopted and welded for connection, the sealing performance is good, and the structure is reliable.

Further, in the present embodiment, the scanning shaft elevating driving mechanism 7 includes a first rotary driving member 71 (e.g. a motor, etc.), a first transmission assembly 72 (e.g. a gear transmission, a belt transmission, etc.), a screw rod 73, and a nut seat 74 engaged with the screw rod 73, the vacuum scanning shaft 1 is disposed on the nut seat 74 through a rotary bearing 75, and the first rotary driving member 71 is connected with the screw rod 73 through the first transmission assembly 72. When the vacuum scanning device works, the first rotary driving part 71 is started, the screw rod 73 is driven to rotate through the first transmission assembly 72, and then the integral lifting motion of the nut seat 74, the rotary bearing 75, the vacuum scanning shaft 1 and the scanning shaft rotary driving mechanism 8 is realized, and the vacuum scanning device is simple and reliable in structure.

Further, in the present embodiment, the scanning shaft rotation driving mechanism 8 includes a second rotation driving member 81 (e.g., a motor, etc.) and a second transmission assembly 82 (e.g., a gear transmission, a belt transmission, etc.), and the second rotation driving member 81 is disposed on the nut seat 74 and connected to the vacuum scanning shaft 1 through the second transmission assembly 82. The whole scanning shaft rotation driving mechanism 8 is driven by the nut seat 74 to lift, and when the vacuum scanning shaft 1 needs to rotate, the second rotation driving member 81 is started to drive the vacuum scanning shaft 1 to rotate on the nut seat 74 through the second transmission assembly 82.

Furthermore, in this embodiment, the nut seat 74 is further provided with an elevation guide assembly 76 (the above-mentioned guide rail plus slide block, linear bearing plus guide shaft, etc.), and the lead screw 73 and the elevation guide assembly 76 are disposed on two sides of the vacuum scanning shaft 1, so that the scanning motion of the vacuum scanning shaft 1 can be more stable and accurate.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.