阅读说明：本技术 驱动和感测平衡、全耦合3轴陀螺仪 (Driving and sensing balanced, fully coupled 3-axis gyroscope ) 是由 D·申卡尔 R·亨尼西 H·乔哈里-加勒 J·西格 于 2019-09-20 设计创作，主要内容包括：本发明提供了具有完全耦合感测模式的示例性3轴(例如,GX、GY和GZ)线性和角动量平衡振动速率陀螺仪架构。实施例可以采用平衡驱动和/或平衡感测组件来减少引起的振动和/或部件间耦合。实施例可以包括两个用于GY感测模式的内框陀螺仪和一个用于GX感测模式和驱动系统耦合的外框陀螺仪或鞍形陀螺仪,耦合到两个内框陀螺仪或外框陀螺仪的驱动梭,以及耦合到用于GZ感测模式的内框陀螺仪的四个GZ验证质量块。组件可以从示例性整体结构中移除以制造单轴或双轴陀螺仪和/或可以配置成使得可以从示例性整体结构中将验证质量块的数量减少一半以制造半陀螺仪。其它实施例可以采用应力隔离框来减少封装引起的应力。(Exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balance vibratory rate gyroscope architectures with fully coupled sensing modes are provided. Embodiments may employ balanced drive and/or balanced sense components to reduce induced vibrations and/or inter-component coupling. Embodiments may include two inner frame gyroscopes for GY sense mode and one outer frame gyroscope or saddle gyroscope for GX sense mode and drive system coupling, a drive shuttle coupled to the two inner frame gyroscopes or the outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. The assembly may be removed from the example monolithic structure to fabricate a single-axis or dual-axis gyroscope and/or may be configured such that the number of proof masses may be reduced by half from the example monolithic structure to fabricate a half gyroscope. Other embodiments may employ a stress isolation frame to reduce package induced stress.)

1. A micro-electromechanical systems (MEMS) device, comprising:

at least one inner frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device about a first axis; and

an outer frame gyroscope flexibly coupled to the at least one inner frame gyroscope and configured to sense a second component of angular velocity associated with the MEMS device about a second axis orthogonal to the first axis.

2. The MEMS device of claim 1, further comprising:

at least two proof masses coupled to the at least one in-frame gyroscope and configured to sense a third component of angular velocity associated with the MEMS device about a third axis orthogonal to the first axis and the second axis.

3. The MEMS device of claim 2, wherein the motion associated with the at least two proof masses is at least partially coupled to in-plane motion of the at least one inner frame gyroscope by respective coupling mechanisms, and wherein the in-plane motion is defined with reference to a plane that includes the first axis and the second axis.

4. The MEMS device of claim 3, wherein the at least two proof masses are configured to facilitate at least partially defining the motion associated with the at least two proof masses to be a condition of linear and angular momentum balance.

5. The MEMS device of claim 2, further comprising:

at least one coupling mechanism located between the at least two proof masses, configured to force the at least two proof masses into anti-phase motion due to the third component of angular velocity applied to the MEMS device about the third axis.

6. The MEMS device of claim 1, further comprising:

at least two drive shuttles coupled to at least one of the at least one inner frame gyroscope or the outer frame gyroscope and configured to force the at least one of the at least one inner frame gyroscope or the outer frame gyroscope to vibrate.

7. The MEMS device of claim 6, wherein the outer frame gyroscope is coupled to the at least one inner frame gyroscope at least in part through the at least two drive shuttles.

8. The MEMS device of claim 6, wherein at least one of the outer frame gyroscope, the at least one inner frame gyroscope, or at least one of the at least two drive shuttles is configured to sense a drive motion associated with the vibration.

9. The MEMS device of claim 6, wherein the at least two drive shuttles are configured to drive motion in anti-phase and are configured to minimize transmission of out-of-plane motion of the at least two drive shuttles to at least one of the outer frame gyroscope or the at least one inner frame gyroscope.

10. The MEMS device of claim 1, wherein at least one of the outer frame gyroscope or the at least one inner frame gyroscope is configured to be driven by a set of drive electrodes.

11. A micro-electromechanical systems (MEMS) device, comprising:

at least one inner frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device about a first axis;

at least two proof masses coupled to the at least one in-frame gyroscope and configured to sense a second component of angular velocity associated with the MEMS device about a second axis orthogonal to the first axis; and

at least one coupling mechanism located between the at least two proof masses configured to force the at least two proof masses into anti-phase motion due to the second component of angular velocity applied to the MEMS device about the second axis.

12. The MEMS device of claim 11, wherein the motion associated with the at least two proof masses is at least partially coupled to in-plane motion of the at least one inner frame gyroscope by respective coupling mechanisms, and wherein the in-plane motion is defined with reference to a plane perpendicular to the second axis.

13. The MEMS device of claim 12, wherein the at least two proof masses are configured to facilitate defining the motion associated with the at least two proof masses at least partially as a condition of linear and angular momentum balance.

14. The MEMS device of claim 11, further comprising:

at least two drive shuttles coupled to the at least one inner frame gyroscope and configured to force the at least one inner frame gyroscope to vibrate.

15. The MEMS device of claim 14, wherein the at least two drive shuttles are configured to move with anti-phase drive motions and are configured to minimize transmission of out-of-plane motions of the at least two drive shuttles to the at least one inner frame gyroscope.

16. A micro-electromechanical systems (MEMS) device, comprising:

two inner frame gyroscopes configured to sense a first component of angular velocity associated with the MEMS device about a first axis;

two outline frame gyroscopes configured to sense a second component of angular velocity associated with the MEMS device about a second axis orthogonal to the first axis;

four proof masses coupled to the two in-frame gyroscopes and configured to sense a third component of angular velocity associated with the MEMS device about a third axis orthogonal to the first and second axes.

17. The MEMS device of claim 16, further comprising:

two coupling mechanisms associated with the pairs of the four proof masses are configured to force the pairs of the four proof masses into anti-phase motion due to the third component of angular velocity applied to the MEMS device about the third axis, and are configured to cause no net angular momentum in the four proof masses due to the two inner frame gyroscopes.

18. The MEMS device of claim 16, wherein the MEMS device is configured to operate as at least one of a single axis gyroscope, a dual axis gyroscope, or a tri-axis gyroscope.

19. The MEMS device of claim 16, wherein the two outer frame gyroscopes are coupled to the two inner frame gyroscopes at least in part via the four drive shuttles.

20. The MEMS device of claim 16, further comprising:

four drive shuttles coupled to at least one of the two inner frame gyroscopes or the outer frame gyroscope and configured to force the at least one of the two inner frame gyroscopes or the outer frame gyroscope to vibrate.

21. The MEMS device of claim 20, wherein at least one of the outer frame gyroscope, the two inner frame gyroscopes, or the at least one of the four drive shuttles is configured to sense a drive motion associated with the vibration.

22. The MEMS device of claim 20, wherein the pair of the four drive shuttles are configured to move with anti-phase drive motions and to minimize transmission of out-of-plane motions of the pair of the four drive shuttles to the two inner frame gyroscopes.

23. The MEMS device of claim 16, wherein at least one of the outer frame gyroscope or the two inner frame gyroscopes is configured to be driven by a set of drive electrodes.

24. The MEMS device of claim 16, wherein the two outer frame gyroscopes are flexibly coupled to the two inner frame gyroscopes and configured to limit out-of-plane and in-plane motion of the two outer frame gyroscopes and the two inner frame gyroscopes to be in phase.

25. The MEMS device of claim 24, wherein one of the two inner frame gyroscopes is flexibly coupled to the other of the two inner frame gyroscopes and configured to constrain out-of-plane and in-plane motion of the two inner frame gyroscopes to be in phase.

26. The MEMS device of claim 16, further comprising:

a coupling mechanism associated with the two outline gyroscopes configured to force the two outline gyroscopes into anti-phase motion due to the second component of angular velocity applied to the MEMS device about the second axis.

27. The MEMS device of claim 16, further comprising:

a stress isolation frame coupling the MEMS device to at least one of a substrate or a package including the MEMS device.

Technical Field

The present invention relates generally to angular velocity sensors (angular velocity sensors), and more particularly, to angular velocity sensors including guided mass systems (guided mass systems).

Background

Angular velocity sensing is typically performed using a vibration rate gyroscope (vibrogyroscope). Vibratory rate gyroscopes operate broadly by driving a sensor into a first motion and measuring a second motion of the sensor that is responsive to both the first motion and the angular velocity to be sensed.

Furthermore, conventional vibration rate microelectromechanical systems (MEMS) gyroscopes may not provide adequate solutions to reduce sensitivity to vibration and part-to-part coupling, reduce in-phase offset shift due to levitation forces, and/or reduce sensitivity to package stress.

It is therefore desirable to provide a system and method that overcomes the above-mentioned problems. The present invention addresses this need.

The above-described deficiencies are intended only to summarize some of the problems of conventional implementations and are not exhaustive. Other problems with conventional implementations and techniques, as well as corresponding advantages of the various aspects described herein, may become more apparent upon review of the following description.

Disclosure of Invention

The following presents a simplified summary of the specification in order to provide a basic understanding of some aspects of the specification. This summary is not an extensive overview of the specification. It is intended to neither identify key or critical elements of the specification nor delineate the specific scope of any embodiment of the specification or any scope of the claims. Its sole purpose is to present some concepts of the specification in a simplified form as a prelude to the more detailed description that is presented later.

A linear and angular momentum balanced 3-axis gyroscope structure is disclosed for better offset stability, vibration suppression and lower inter-component coupling. In non-limiting embodiments, a linear and angular momentum balanced 3-axis gyroscope structure is described that may include one or more inner frame (inner frame) gyroscopes, two or more drive shuttles (drive shutters) coupled to the one or more inner frame gyroscopes, two or more proof masses (proof masses) coupled to the inner frame gyroscopes, and/or one or more outer frame (outer frame) or saddle (saddle) gyroscopes coupled to the inner frame gyroscopes.

Various embodiments described herein may facilitate a 3-axis gyroscope structure that provides linear and angular momentum balance for better offset stability, vibration suppression, and lower inter-component coupling. Further non-limiting embodiments may be directed to methods associated with the various embodiments described herein.

These and other embodiments are described in more detail below.

Drawings

Various non-limiting embodiments are further described with reference to the accompanying drawings, in which:

FIG. 1 is a functional block diagram of a non-limiting embodiment of an exemplary gyroscope architecture shown in accordance with a non-limiting aspect of the present invention;

FIG. 2 illustrates a functional block diagram of a non-limiting embodiment of an exemplary gyroscope architecture in drive motion (e.g., corresponding to FIG. 10), which illustrates further non-limiting aspects of the present invention;

FIG. 3 depicts further aspects of a non-limiting embodiment of an exemplary gyroscope architecture as described herein;

FIG. 4 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture;

FIG. 5 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture;

FIG. 6 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture;

FIG. 7 depicts yet another non-limiting embodiment of an exemplary gyroscope architecture in accordance with a non-limiting aspect of the present invention;

FIG. 8 depicts an exemplary drive mode shape of a non-limiting embodiment of an exemplary gyroscope architecture according to further non-limiting aspects described herein;

FIG. 9 depicts an exemplary GX mode shape of a non-limiting embodiment of an exemplary gyroscope architecture according to yet another non-limiting aspect described herein;

FIG. 10 depicts an example GY-mode shape of a non-limiting embodiment of an example gyroscope architecture, according to yet another non-limiting aspect described herein;

FIG. 11 depicts an exemplary GZ sense mode shape of a non-limiting embodiment of an exemplary gyroscope architecture, according to non-limiting aspects described herein;

FIG. 12 depicts an exemplary GZ parasitic mode shape of a non-limiting embodiment of an exemplary gyroscope architecture, according to yet another non-limiting aspect described herein;

FIG. 13 illustrates a functional block diagram of a further non-limiting embodiment of an exemplary gyroscope architecture in accordance with a further non-limiting aspect of the present invention; and

FIG. 14 illustrates another functional block diagram of other non-limiting embodiments of exemplary gyroscope architectures according to further non-limiting aspects of the present invention.

Detailed Description

The present invention relates generally to angular velocity sensors, and more particularly to angular velocity sensors including guided mass systems. The following description is presented to enable one of ordinary skill in the art to make and use the invention and is provided in the context of a patent application and its requirements. Various modifications to the preferred embodiments and the generic principles and features described herein will be readily apparent to those skilled in the art. Thus, the present invention is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features described herein. Thus, while providing a brief summary, certain aspects of the invention described or depicted herein are for purposes of illustration only and not limitation. Thus, variations of the disclosed embodiments suggested by the disclosed apparatus, systems, and methods are intended to be included within the scope of the subject matter disclosed herein.

As described above, conventional MEMS vibratory rate gyroscopes may not provide adequate solutions to reduce sensitivity to vibration (e.g., linear and/or angular vibration) and component-to-component coupling, reduce in-phase offset due to levitation forces, and/or reduce sensitivity to package stress. Various embodiments described herein may overcome one or more of these and/or related disadvantages of conventional MEMS vibratory rate gyroscopes.

Exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balance vibratory rate gyroscope architectures with fully coupled sensing modes are provided. In a non-limiting aspect, as described herein, various exemplary embodiments may employ balanced drive and/or balanced sense components to reduce induced vibrations and/or inter-component coupling. In another non-limiting aspect, various exemplary embodiments may employ a stress isolation frame to reduce package-induced stress, as further described herein. In another non-limiting aspect, various exemplary embodiments can employ mechanical coupling to facilitate linear vibration suppression. In yet another non-limiting aspect, various exemplary embodiments can use one or more drive shuttles to reject in-phase shifts caused by levitation forces. Furthermore, as described herein, various exemplary embodiments may facilitate fabrication of gyroscopes with improved lateral axis sensitivity due to decoupling (decoupling) of in-plane (in-plane) and out-of-plane (out-of-plane) gyroscopes.

By way of non-limiting example, exemplary embodiments may include two inner frame (e.g., GY) gyroscopes, wherein the inner frame gyroscope may facilitate GY sense mode and may facilitate drive system coupling, one outer frame (e.g., GX) gyroscope, wherein the outer frame gyroscope may facilitate GX sense mode and may facilitate drive system coupling, four drive shuttles coupled to the two inner frame gyroscopes or the outer frame gyroscope, four GZ proof masses (proof masses) coupled to the inner frame gyroscope, and/or a coupling mechanism that facilitates coupling the GZ proof masses, a coupling inner frame gyroscope, and/or a coupling mechanism that facilitates coupling the inner frame gyroscope with the outer frame gyroscope and/or the drive shuttles. In a further non-limiting aspect, various exemplary embodiments may be configured such that components may be removed from an exemplary overall architecture to fabricate a single-axis or dual-axis gyroscope and/or may be configured such that the number of proof masses may be halved from an exemplary overall architecture to fabricate a half-gyroscope, as further described herein. For example, according to a non-limiting aspect, an exemplary 3-axis (e.g., GX, GY, and GZ) gyroscope may be simplified to a 2-axis or 1-axis gyroscope by removing components from the architecture. By using fewer sense sensors (sense transducers), etc., and by forgoing the driving and/or sensing balance aspects of the exemplary 3-axis (e.g., GX, GY, and GZ) gyroscope architecture, the exemplary gyroscope architecture described herein may be functionally cut in half to create a more compact 3-axis (e.g., GX, GY, and GZ) gyroscope.

FIG. 1 shows a functional block diagram of a non-limiting embodiment of an exemplary gyroscope architecture 100 in accordance with a non-limiting aspect of the present invention. As non-limiting examples, an exemplary embodiment of gyroscope architecture 100 may include a MEMS device disposed in an X-Y plane parallel to substrate 102, and may include two inner frame (e.g., GY) gyroscopes, each of which may include two inner frame proof masses (e.g., GY proof masses 104, 106, 108, 110), coupled with lever arms (lever arms) 112, 114, 116, 118, wherein the inner frame gyroscopes are configured to facilitate providing a GY sensing mode, or to measure an angular velocity component (component) associated with the MEMS device about one axis (e.g., the Y axis), and may be configured to couple a drive system with the inner frame gyroscopes. In another non-limiting aspect, an exemplary embodiment of gyroscope architecture 100 may include a coupling mechanism that couples two inner frame (e.g., GY) gyroscopes to each other. In another non-limiting aspect, an exemplary embodiment of gyroscope architecture 100 may include a drive system including four drive shuttles (not shown), including a guided mass and configured to be coupled to two inner frame gyroscopes, respectively.

In another non-limiting aspect, exemplary gyroscope architecture 100 can include four GZ proof-masses (e.g., GZ proof-masses 120, 122, 124, 126), which are configured to be coupled to one another via coupling mechanisms 128 and 130, respectively (e.g., via springs and/or other coupling structures), wherein, respective pairs (pair) of four GZ proof-masses (e.g., GZ proof-masses 120, 122, 124, 126) are coupled to one another by coupling mechanisms or lever arms 128, 130, the coupling mechanisms or lever arms 128, 130 are configured to couple respective pairs of motion of four proof masses (e.g., GZ proof masses 120, 122, 124, 126), and wherein four GZ proof-masses (e.g., GZ proof-masses 120, 122, 124, 126) may be configured to facilitate providing a GZ sensing mode, or measuring an angular velocity component associated with the MEMS device about another axis (e.g., the Z-axis). In yet another non-limiting aspect, exemplary gyroscope architecture 100 may include an outer frame gyroscope or a saddle-shaped (e.g., GX) gyroscope (e.g., GX) including two pairs of two proof masses (e.g., GX proof masses 132, 134, 136, 138), wherein the GX, outer frame, or saddle-shaped gyroscope may be configured to facilitate providing a GX sensing mode or to measure an angular velocity component associated with the MEMS device about another axis (e.g., the X axis), may be configured to be respectively coupled to an inner frame gyroscope, and may be configured to couple a drive system and an outer frame gyroscope, wherein respective pairs of two GX proof masses (e.g., GX proof masses 132/134, 136/138) may be configured to be coupled to each other, and wherein respective GX proof masses (e.g., GX proof masses 132/134, of the pair may be configured to be coupled to each other, and wherein the respective GX proof masses (e.g., GX proof masses, 136/138) can be configured to couple to each other via respective frame lever arms 140/142.

In other non-limiting aspects, the example gyroscope architecture 100 may include example anchor points (e.g., depicted herein as rectangles with an X) that may help anchor various components to the substrate 102 and/or to an example stress isolation frame (not shown) configured to be attached to the substrate 102 or package. In a further non-limiting aspect, the example gyroscope architecture 100 of fig. 1 is depicted as including an example fixed pivot (pivot) point 144 (e.g., a black filled circle) that functionally may represent a center about which various components may be configured to rotate (e.g., in a plane parallel to an X-Y plane of the substrate 102, in a plane orthogonal to the X-Y plane of the substrate 102, etc.), which may include an example anchor point, and includes an example translation pivot point 146 (e.g., a white filled circle) that functionally may represent a pivot point or hinge (hinge) about which various components may be configured to rotate and translate (translate), (e.g., in a plane parallel to the X-Y plane of the substrate 102, in a plane orthogonal to the X-Y plane of the substrate 102, etc.). These exemplary pivot points may be understood as functional representations of the center of rotational motion as a result of the process required to create such devices by MEMS fabrication, which typically includes a set of springs, flexures (flexures), rigid or suspended mechanisms, or components arranged to produce the desired motion, as further described herein.

Accordingly, the example gyroscope architecture 100 of fig. 1 is depicted as including example springs (e.g., springs 145), suspension elements, or coupling mechanisms that may include flexures or other structures that are particularly rigid, or flexible and/or torsionally compatible in particular directions, to constrain or define motion (e.g., anti-phase motion, in-plane motion, guided mass motion of a guided mass, etc.) and/or transfer motion of various components of the example gyroscope architecture 100, e.g., to suspend various components of the example gyroscope architecture 100 to example anchor points 302, as shown in fig. 3, for use as example fixed pivot points 144 and/or example translational pivot points 146, etc., as further described herein.

As a non-limiting example, the example gyroscope architecture 100 of fig. 1 is depicted as including an outer frame or saddle (e.g., GX) gyroscope (e.g., GX, outer frame, or saddle gyroscope), which may include two GX outer frame gyroscopes, including two pairs of two proof masses (e.g., GX proof masses 132, 134, 136, 138), wherein the GX, outer frame, or saddle gyroscopes may be configured to be coupled to the inner frame gyroscope (e.g., by coupling 148/150), respectively, to the lever arm 112/114 of the example GY frame gyroscope including GY proof masses 104, 106, thereby facilitating providing a fixed pivot point between the lever arm 112/114 and the GX proof mass 132/134 of the example GY frame gyroscope. Likewise, an example GX, outer frame, or saddle gyroscope may be configured to couple to an inner frame gyroscope (e.g., via coupling 152/154), to a lever arm 116/118 of an example GY frame gyroscope including GY proof masses 108, 110, respectively, to facilitate providing a fixed pivot point between lever arm 116/118 and GX proof mass 136/138 of the example GY frame gyroscope. Such exemplary coupling is schematically illustrated in fig. 3-6, for example.

As another non-limiting example, respective pairs of four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) may be coupled to one another by coupling mechanisms or lever arms 128, 130, the coupling mechanisms or lever arms 128, 130 configured to couple respective pairs of four proof masses (e.g., GZ proof masses 120/122, 124/126) for movement. For example, exemplary GZ proof-mass 120 is coupled to exemplary GZ proof-mass 122 by a coupling mechanism or lever arm 128 and is configured to force respective pairs of four proof-masses (e.g., exemplary GZ proof-masses 120/122) into anti-phase (anti-phase) motion, generally in the X-Y plane, parallel to exemplary substrate 102, due to an angular velocity component associated with the MEMS device about the Z-axis. Such an exemplary coupling is functionally illustrated in fig. 1 as rotation of the coupling mechanism or lever arm 128 about a fixed pivot point, centered on the coupling mechanism or lever arm 128, and schematically illustrated in fig. 3-6, for example.

As another non-limiting example, two example in-frame gyroscopes may be configured to couple to one another (e.g., shown functionally as coupling example GY proof mass 106 to example GY proof mass 108 by springs, such as springs 145 of fig. 1 shown schematically in association with GX proof mass 136) in order to limit motion associated with the two GY or in-frame gyroscopes to conditions of linear and angular momentum balance. For example, as described further herein, example GY proof mass 106 may be coupled to example GY proof mass 108 via springs or other structures or combinations of structures that may facilitate conditions that limit motion associated with two in-frame gyroscopes to linear and angular momentum balance, as described further herein. Such a coupling is schematically illustrated in fig. 3 to 6, for example. In another non-limiting example, two exemplary GX or outer frame (saddle) gyroscopes, each including two proof masses (e.g., GX proof masses 132, 134, 136, 138) may be coupled to two exemplary GY or inner frame gyroscopes, respectively, and/or may be configured to couple two exemplary GX, outer frame, or saddle gyroscopes to four drive shuttles (not shown), as further described herein. For example, such coupling is shown schematically in fig. 3 as GY proof masses 108/110(104/106) between GX proof masses 136 and 138(132 and 134) (e.g., by springs, flexures, drive shuttles, lever arms 112, 114, 116, 118, etc.) to provide an axis of rotation for GY proof masses 104, 106, 108, 110 to traverse GX proof masses 132, 134, 136, 138 while transferring the respective motions of GY proof masses 104 and 106(108 and 110) to GX proof masses 132, 134, 136, 138. Such exemplary coupling is schematically illustrated in fig. 3-6, for example.

Further, the example gyroscope architecture 100 of fig. 1 is depicted as including various sense electrodes or sensor (transducer) elements that may be respectively configured to detect motion of various proof masses or other components of the example gyroscope architecture 100, such as detecting motion due to Coriolis forces on the various proof masses to provide measurements of angular velocity about the X, Y or Z-axis, to detect drive motion, and so forth. While electrostatic actuators and sensors are described in this specification, those of ordinary skill in the art will recognize that a variety of actuators and/or sensors may be used to accomplish these functions and that such uses are within the spirit and scope of the present invention. For example, exemplary actuators and/or sensors may include piezoelectric, thermal, electromagnetic types of actuators and/or sensors, and the like. In non-limiting aspects, exemplary gyroscope architecture 100 may include capacitive electrodes 156, 158, 160, 162 configured to detect motion of exemplary GX proof masses 132, 134, 136, 138, respectively, and may include capacitive electrodes 164, 166, 168, 170 configured to detect motion of exemplary GY proof masses 104, 106, 108, 110, respectively, and so on. As further described herein, it can be appreciated that the example capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 can be configured to primarily facilitate detecting coriolis forces acting on the respective proof masses due to angular velocities associated with the MEMS device about respective axes (e.g., X or Y axes). As further described herein, these coriolis forces acting on the respective proof masses as a result of angular velocities associated with the MEMS device about the respective axes (e.g., X or Y axes) may result in out-of-plane motion of the respective proof masses, where out-of-plane motion is defined as motion along the Z-axis direction (e.g., out of the X-Y plane).

Additionally, the exemplary gyroscope architecture 100 of fig. 1 is depicted as undergoing a driving motion at a particular time in fig. 2, indicated by the solid arrows in the direction of the various components of the exemplary gyroscope architecture 100. As further described herein, to generate the drive motions, electrostatic forces may be applied using exemplary drive combs (not shown) that may be respectively coupled to exemplary drive shuttles (not shown) that may include a guided mass configured to be coupled to two inner frame gyroscopes GX, such as the GX, outer frame or saddle gyroscopes described herein, and/or combinations or portions thereof. By applying an Alternating Current (AC) voltage to the various exemplary drive combs (not shown) at a drive frequency, an electrostatic force can be applied to the exemplary drive shuttles (not shown) via the exemplary drive combs (not shown) to generate a drive force at the drive frequency, which can result in a drive motion of the various components of the exemplary gyroscope architecture 100 as shown in fig. 1. The driving force applied to the various exemplary drive shuttles (not shown) is configured to be transmitted to the various components of the exemplary gyroscope architecture 100 through the coupling mechanisms, lever arms, pivot points, and springs as described above, which results in driving motion of the various components of the exemplary gyroscope architecture 100, as shown in fig. 1, and in translation of the various components of the exemplary gyroscope architecture 100, as shown in fig. 2. Note that FIG. 2 depicts the deflections of the various components of the example gyroscope architecture 100 due to Coriolis forces (Coriolis forces) arising from angular velocities about various axes with a given direction of drive motion being positive (e.g., GX +, GY +), or above the X-Y plane of the MEMS device, or negative (e.g., GX-, GY-), or below the X-Y plane of the MEMS device.

Note that, as described above, four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are configured to be coupled (e.g., by springs or other coupling structures) to four GY proof masses 104, 106, 108, 110, respectively, wherein respective pairs of the four GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupled to one another by coupling mechanisms or lever arms 128, 130, which coupling mechanisms or lever arms 128, 130 are configured to couple respective pairs of motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126). As further described herein, coriolis forces acting on the respective GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) may cause movement of the respective GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) generally in a plane due to angular velocities associated with the MEMS device about the Z axis, wherein in-plane movement is defined as movement along the X-axis direction (e.g., in the X-Y plane), as shown. Accordingly, the various GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) of the example gyroscope architecture 100 of fig. 1 are depicted as experiencing sensing motion at a particular time, as indicated by the dashed arrows in the direction of the various components of the example gyroscope architecture 100 of fig. 2.

Thus, as another non-limiting example, the example gyroscope architecture 100 may include additional capacitive electrodes (not shown) that may be configured to detect movement of individual GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126), respectively. As further described herein, it can be appreciated that such exemplary capacitive electrodes can be configured to primarily facilitate detection of coriolis forces acting on the respective proof masses due to angular velocities associated with the MEMS device about the Z-axis. As noted above, while the above-described sensors, electrodes, or actuators (e.g., drive combs) are described as capacitive sensors, electrodes, or actuators, various types of sensors, electrodes, or actuators may be used, including but not limited to piezoelectric, thermal, electromagnetic, optical, and the like, as the use of which would be within the spirit and scope of the present invention, as the case may be.

FIG. 2 illustrates a functional block diagram 200 of a non-limiting embodiment of an exemplary gyroscope architecture in driving motion (e.g., corresponding FIG. 1), which illustrates further non-limiting aspects of the present invention. Fig. 2 depicts translational and rotational motion produced by various components of exemplary gyroscope architecture 100 as a result of driving forces applied to various exemplary drive shuttles (not shown) and transferred to various components of exemplary gyroscope architecture 100 via the coupling mechanisms, lever arms, pivot points, and springs described above, as described above. It is further noted that for clarity, some reference characters and/or components of the exemplary gyroscope architecture 100 shown in fig. 1 are not shown in the functional block diagram 200.

Several points can be seen from a review of fig. 1-2. First, note that according to various non-limiting embodiments, the drive motions of the various proof masses and assemblies are linearly and/or angularly momentum balanced. That is, the drive motion of an exemplary drive shuttle (not shown) may be in anti-phase motion or in opposite directions, as further described herein. Second, the drive motions of the two inner frame gyroscopes are also anti-phase or opposite direction, facilitated by the anti-phase drive motions of the four example drive shuttles (not shown) being coupled to the GY proof masses (e.g., GY proof masses 104, 106, 108, 110) through respective example lever arms 112, 114, 116, 118 that provide rotation about a fixed pivot point and translation of the X proof masses (e.g., GX proof masses 132, 134, 136, 138) via the pivot point, and facilitated by coupling the two example GY or inner frame gyroscopes to each other (e.g., functionally shown coupling the example GY proof mass 106 to the example GY proof mass 108 through a spring, such as spring 145 associated with GX proof mass 136 shown in fig. 1 for example). The two internal frame gyroscopes thus constitute a four-bar system which, under the action of the actuation motion, is deformed into a parallelogram. Furthermore, the coupling of an exemplary GX, outer frame or saddle gyroscope with a corresponding GY or inner frame gyroscope may ensure that the drive motions of the GX, outer frame or saddle gyroscope are also anti-phase or opposite in direction. Finally, note that the drive motions of the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) that are respectively coupled (e.g., by springs or other coupling structures) to the GY proof masses (e.g., GY proof masses 104, 106, 108, 110) are also anti-phase or opposite in direction. Thus, according to exemplary aspects described herein, the drive motion of a 3-axis (e.g., GX, GY, and GZ) gyroscope as shown in fig. 1-2 may benefit from linear and angular momentum balancing.

According to various non-limiting embodiments, vibration suppression may be improved by employing a balance mass and arranging such that its driving motions oppose each other and such that the net linear and angular momentum of its driving motions is zero. For example, by coupling the various components of the exemplary gyroscope architecture 100, these various components do not move independently of one another. As used herein, motion in the same direction is referred to as common motion or common mode, while motion in the opposite direction is referred to as anti-phase motion or differential motion. It will be appreciated that ordinary movements are susceptible to acceleration from external sources (e.g. vibrations), where acceleration may be considered to be a uniform object load. Because it is uniform, it is defined as acceleration in one direction, or linear. This linear acceleration will excite the ordinary motion. However, since the various drive motions are physically coupled to ensure that they are in anti-phase (non-normal) or opposite directions, uniform object loads or linear accelerations do not produce motion in the sense mode in various non-limiting respects, thereby improving the ability to suppress vibrations. Further, by employing balancing masses and being arranged such that their driving motions are opposite to each other and such that the net linear and angular momentum of their driving motions is zero, the torque applied to the device package of a Printed Circuit Board (PCB) at the driving frequency can be minimized. Thus, in an exemplary implementation where multiple MEMS gyroscope devices are mounted to the same PCB, where the resonant frequencies are close to each other, the exemplary devices as described herein may minimize cross-talk (cross-talk) or inter-component coupling that may otherwise result in unwanted noise and offset from the devices experiencing cross-talk due to mass or momentum imbalance.

Note that as shown in FIG. 1, FIG. 2 depicts the deflections of the various components of the exemplary gyroscope architecture 100 due to Coriolis forces resulting from angular velocities about various axes with a given direction of drive motion being positive (e.g., GX +, GY +), or above the X-Y plane of the MEMS device, and negative (e.g., GX-, GY-), or below the X-Y plane of the MEMS device. Thus, it can be seen in fig. 1-2 that, at a given drive motion, the coriolis forces generated at angular velocities about the axes in a given direction of the drive motion will cause out-of-plane (e.g., deviation from the X-Y plane) deflections of the GY or inner frame gyroscope and the GX, outer frame gyroscope, or saddle gyroscope. As described above, the example capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 may be configured to primarily facilitate detection of coriolis forces acting on the respective proof masses due to angular velocities associated with the MEMS device about respective axes (e.g., X or Y axes).

It is further noted, however, that four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are respectively coupled (e.g., by springs or other coupling structures) to a GY proof mass (e.g., GY proof masses 104, 106, 108, 110), wherein the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupled to one another by coupling mechanisms or lever arms 128, 130, which coupling mechanisms or lever arms 128, 130 are configured to couple respective pairs of motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126). Thus, the drive motion of the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) is in the Y direction, and in a given direction of that drive motion, Coriolis forces from angular velocity about the Z axis will cause in-plane (e.g., in the X-Y plane) deflections in the X direction. Accordingly, the example gyroscope architecture 100 may include further capacitive electrodes (not shown) that may be configured to detect motion of each GZ proof mass (e.g., GZ proof masses 120, 122, 124, 126), respectively, to primarily facilitate detection of coriolis forces acting on each proof mass due to angular velocities associated with the MEMS device about the Z-axis.

Note that the example drive systems with respect to fig. 1-2 may be decoupled from the example GX, outer frame or saddle gyroscope, and/or the example GY or inner frame gyroscope such that drive motions on the example GX, outer frame or saddle gyroscope and the example GY or inner frame gyroscope may be symmetric, and/or, according to various non-limiting aspects, a GZ gyroscope including a GZ proof mass (e.g., GZ proof masses 120, 122, 124, 126) may be configured such that the GZ gyroscope including the GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) is very compliant to out-of-plane motions. However, as shown in fig. 11-12, note that in another non-limiting aspect, exemplary embodiments as described herein may experience a parasitic mode on the GZ sensing mode.

As described above, conventional MEMS vibratory rate gyroscopes may not provide adequate solutions to reduce sensitivity to vibration (e.g., linear and/or angular vibration) and component-to-component coupling, reduce in-phase offset due to levitation forces, and/or reduce sensitivity to package stress. However, according to various non-limiting implementations, by placing the example drive system in an example drive shuttle (not shown), and by employing a weak coupling between the out-of-plane gyroscope (e.g., a GY or in-frame gyroscope and a GX, outer frame, or saddle gyroscope), various non-limiting embodiments may help minimize the out-of-plane or levitating forces transferred to the GZ gyroscope, and/or it may be rejected, as described herein. In addition, decoupling of in-plane and out-of-plane gyroscopes can improve cross-axis sensitivity.

This may result in better offset stability because as the sensor measures the quantity of interest (e.g., angular velocity about the Z axis as determined by sensing coriolis forces on the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126)), the sensor is expected to output a signal proportional to the angular velocity. By decoupling or employing weak coupling, offset or bias error, i.e., how much there is an offset between the quantity of interest and the reported quantity (e.g., coriolis force due to angular velocity about the z-axis), between the out-of-plane gyroscope (e.g., the GY or frame gyroscope and the GX, the outline frame or saddle gyroscope) and the in-plane gyroscope (e.g., the GZ gyroscope), the out-of-plane force (or hover force) on the GZ gyroscope will be reduced, which may otherwise be detected as applied angular velocity.

For example, various embodiments described herein may reduce in-phase offset caused by levitation forces by using an exemplary drive shuttle (not shown) on the GX and/or GY gyroscopes. For example, as described above, the GY or inner frame gyroscope and the GX, outer frame, or saddle gyroscopes are out-of-plane gyroscopes, where rotation of the MEMS device about the X or Y axis will result in out-of-plane motion of the GY proof masses (e.g., GY proof masses 104, 106, 108, 110) and the GX proof masses (e.g., GX proof masses 132, 134, 136, 138). Since the four exemplary GZ proof-masses (e.g., GZ proof-masses 120, 122, 124, 126) are coupled to each other via coupling mechanisms or lever arms 128, 130, rotation of the MEMS device about the Z-axis will result in movement of only the four exemplary GZ proof-masses (e.g., GZ proof-masses 120, 122, 124, 126) in or parallel to the X-Y plane (i.e., the plane of the MEMS device). By defining the motion of the in-plane and out-of-plane motion components (GX, GY), respectively, and by connecting the out-of-plane motion components (GX, GY) with the flexible coupling mechanisms (e.g., via couplings 148, 150, 152, 154), the transmission of the in-plane motion components (GZ) (e.g., GZ proof masses 120, 122, 124, 126) the levitation forces (and associated offsets) associated with the out-of-plane motion components (GX, GY) may be minimized.

Fig. 3 depicts further aspects of a non-limiting embodiment of an exemplary gyroscope architecture 100 as described herein. Note the relative positions and configurations of the example GY proof masses (e.g., GY proof masses 104, 106, 108, 110), the example GX proof masses (e.g., GX proof masses 132, 134, 136, 138), the couplings between them, the example lever arms 112, 114, 116, 118, anchor points 302 and various springs 145 (e.g., GZ springs 304, etc.), the couplings (e.g., GX or frame gyroscope to drive shuttle coupling 306, etc.), suspension elements, etc., described herein.

Additionally, FIG. 3 depicts an exemplary stress isolation block 308 in accordance with other non-limiting aspects. Recall that the offset may be caused by a levitating force generated in the drive shuttle, or may be caused by deformation of the gyroscope frame caused by external stresses (e.g., package stresses). The offset may also be affected by other sources such as package stress, temperature effects, etc. To decouple package deformation from the example device, thereby minimizing offsets caused by package deformation, the example stress isolation block 308 may be used in various non-limiting embodiments. Although not shown in FIG. 1, the example stress isolation box 308 may be shown as being connected to all of the external anchor points 302 shown in FIG. 3. Here, note that the example stress isolation frame 308 may be connected to the package or substrate 102, and peripheral components of the example gyroscope architecture 100 may be suspended thereon and/or anchored to, including but not limited to, four example drive shuttles 310, example coupling mechanisms or lever arms 128, 130, and the like. Thus, according to further non-limiting aspects, package bending or deformation sensitivity may be improved, wherein deflection resulting from package bending associated with a MEMS device may be reduced through the use of one or more of the example stress isolation frames 308 and the example drive shuttle 310, or the like, as described herein.

Fig. 3 further depicts an exemplary drive sense comb (drive sense comb)312 that may be configured to detect drive motion. Note that while in a non-limiting embodiment, the example drive sense comb 312 is depicted as being coupled to a GY or inner frame gyroscope component (e.g., GY proof masses 104, 106, 108, 110), in further non-limiting embodiments, the example drive sense comb 312 may be coupled to other ones of the various components of the example gyroscope architecture 100, including, but not limited to, one or more of the four example drive shuttles 310, and so forth. Fig. 3 further depicts an example drive comb 314, which can be coupled to the example drive shuttle 310 to generate a drive force at a drive frequency, and which can result in drive motion of various components of the example gyroscope architecture 100, as described above with respect to fig. 1-2. Furthermore, fig. 3 depicts other capacitive electrodes 316 that may be configured to detect motion of individual GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126), respectively, as described further above with respect to fig. 1-2.

Fig. 4 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture 100. For example, fig. 4 depicts the relative positions of the example capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 in fig. 3, e.g., as further described above with respect to fig. 1, which may be configured to primarily facilitate detection of coriolis forces acting on the respective proof masses due to angular velocities associated with the MEMS device about respective axes (e.g., X or Y axes).

Fig. 5 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture 100. Note that in fig. 5, the location of anchor point 302 is depicted as a black box, rather than as shown in fig. 1-2. FIG. 5 depicts a small graph (instet) 502 further described with respect to FIG. 6. For example, fig. 6 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture 100. Fig. 6 depicts the relative positions and configurations of various components of exemplary gyroscope architecture 100, as shown in fig. 1-5, for a small graph 502. Fig. 7 depicts yet another non-limiting embodiment of an exemplary gyroscope architecture 100, in the depiction of fig. 7 depicting the relative positions of exemplary capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170, which may be configured to primarily assist in detecting coriolis forces acting on the respective proof masses due to angular velocities associated with the MEMS device about the respective axes (e.g., X or Y axes), e.g., as further described above with respect to fig. 1 and 4, etc. Further note the fabrication design of the coupling mechanisms or lever arms 128, 130 configured to couple respective pairs of motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126), which respectively correspond to the configuration of the functionally fixed pivot points between the respective pairs of GZ proof masses, as described above with respect to fig. 1-2.

Fig. 8 depicts an exemplary drive mode shape of a non-limiting embodiment of an exemplary gyroscope architecture 100 according to further non-limiting aspects described herein. As shown in fig. 2, the drive motions applied via the four exemplary drive shuttles 310 as described above result in the deflection and translation of the various components of the exemplary gyroscope architecture 100, as described herein. As can be seen in fig. 8 from the relative lack of displacement of the in-plane motion components (GZ), the in-plane motion components (GZ) are separated from the out-of-plane motion components (GX) and are constrained by coupling mechanisms or lever arms 128, 130 configured to couple respective pairs of motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126), various embodiments as described herein may be configured to constrain the transmission of the out-of-plane motion components (GX, GY) to the in-plane motion components (GZ) (drive shuttle, Z proof masses) and, therefore, the transmission of levitation forces associated with the out-of-plane motion components (GX, GY) may be minimized.

Fig. 9 depicts an exemplary GX mode shape of a non-limiting embodiment of an exemplary gyroscope architecture 100 in accordance with yet another non-limiting aspect described herein. Fig. 9 depicts relative displacement above and below the X-Y plane, where the "+" sign indicates displacement above the X-Y plane and the "-" sign indicates displacement below the plane, instead of a color thermal map or appropriate grayscale resolution. As can be seen in fig. 9, the GX, outline frame or saddle gyroscope sensing mode is a balanced sensing mode, where each GX proof mass is in anti-phase motion, as facilitated by the exemplary fixed pivot point functionally created by the structure shown in fig. 9.

Fig. 10 depicts an example GY mode shape of a non-limiting embodiment of an example gyroscope architecture, according to yet another non-limiting aspect described herein. Fig. 10 depicts relative displacement above and below the X-Y plane, where the "+" sign indicates displacement above the X-Y plane and the "-" sign indicates displacement below the plane, instead of a color thermal map or appropriate grayscale resolution. As can be seen in fig. 10, the GY or frame gyroscope sensing mode is a balanced sensing mode, where each GY proof mass is in anti-phase motion (e.g., both linear and angular momentum balance). As can further be seen from the relative lack of displacement of the in-plane motion component (GZ) of fig. 10, which is separate from the out-of-plane motion component (GX) and is constrained by coupling mechanisms or lever arms 128, 130 configured to couple respective pairs of motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126), various embodiments as described herein may be configured to constrain the transmission (drive shuttle, Z proof mass) of the out-of-plane motion component (GX, GY) to the in-plane motion component (GZ) such that the transmission of the levitation forces associated with the out-of-plane motion component (GX, GY) may be minimized. Furthermore, as can be seen in fig. 10, it can help isolate levitating forces on drive combs (e.g., drive combs 314) from transferring to the frame proof masses.

Fig. 11 depicts an exemplary GZ sense mode shape of a non-limiting embodiment of an exemplary gyroscope architecture, according to non-limiting aspects described herein. FIG. 11 depicts relative displacement in the X-Y plane, where the "+" sign represents + X displacement and the "-" sign represents-X displacement, instead of a color heat map or appropriate grayscale resolution. As can be seen in fig. 11, the GZ gyroscope sensing mode is a balanced sensing mode, where each GZ proof mass is in anti-phase motion.

Fig. 12 depicts an exemplary GZ parasitic mode shape of a non-limiting embodiment of an exemplary gyroscope architecture, according to yet another non-limiting aspect described herein. Fig. 12 depicts relative displacement in the X-Y plane, where the "+" sign represents + displacement and the "-" sign represents-displacement, instead of a color thermal map or appropriate grayscale resolution. As can be seen in fig. 12, the GZ gyroscope has linear and angular momentum balanced parasitic modes.

Thus, an exemplary, non-limiting embodiment may include a 3-axis coriolis vibratory rate gyroscope having a substantially 2-dimensional device architecture that is substantially planar in geometry and can be fabricated from silicon. In non-limiting aspects, example embodiments as described herein may include two inner frame (e.g., GY) gyroscopes, wherein the inner frame gyroscope facilitates GY sense mode and drive system coupling, two outer frame or saddle gyroscopes, four drive shuttles coupled to the two outer frame gyroscopes, four GZ proof masses coupled to the GY or inner frame gyroscopes, and/or two lever arms or coupling mechanisms that facilitate coupling the GZ proof masses. In a further non-limiting aspect, various exemplary embodiments may be configured such that components may be removed from an exemplary overall architecture to fabricate a single-axis or dual-axis gyroscope and/or may be configured such that the number of proof masses may be halved from an exemplary overall architecture to fabricate a half-gyroscope, as further described herein.

For example, FIG. 13 illustrates a functional block diagram of another non-limiting embodiment of an exemplary gyroscope architecture 100 in accordance with a further non-limiting aspect of the present invention. For example, according to non-limiting aspects, the example 3-axis (e.g., GX, GY, and GZ) gyroscope architecture 100 may be reduced to a 2-axis or 1-axis gyroscope by removing components from the architecture, using fewer sensing sensors, etc., and by forgoing the driving and/or sensing balance aspects of the example 3-axis (e.g., GX, GY, and GZ) gyroscope structure, the example gyroscope architecture described herein may be functionally cut in half to create a more compact 3-axis (e.g., GX, GY, and GZ) gyroscope. For example, as shown in FIG. 13, four GZ proof masses may be omitted to produce balanced dual axes (e.g., X-Y gyroscopes). In another non-limiting aspect, as shown in fig. 15, two GX proof masses or outer frame gyroscopes and corresponding GY or inner frame gyroscopes may be omitted from fabrication to produce a 2-axis gyroscope that occupies half the footprint (footprint) of a balanced 2-axis gyroscope. In other non-limiting aspects, the GY electrodes 162, 164, 166, 168 may be omitted from manufacturing or electrical connections, such that variations of the exemplary gyroscope architecture 100 may produce a 1-axis gyroscope.

In another non-limiting example, FIG. 14 shows another functional block diagram of other non-limiting embodiments of an exemplary gyroscope architecture 100 in accordance with further non-limiting aspects of the present invention. For example, by omitting half of the components of the example gyroscope architecture 100, the example gyroscope architecture 100 may produce a more compact but unbalanced drive and sense 3-axis gyroscope. Other variations may include omitting the GZ proof mass to produce a 2-axis X-Y gyroscope with a drive system coupled to the GY or frame gyroscope as described herein.

Accordingly, in other non-limiting implementations, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) includes one or more in-frame gyroscopes (e.g., a GY or in-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.), e.g., configured to sense a first component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) about a first axis (e.g., a Y axis), as described herein. As used herein, a box gyroscope may be understood to include a guided mass system consisting of two proof masses and a rotating arm connecting the two proof masses and constraining the proof masses to anti-phase motion. As further used herein, it is understood that the outer frame gyroscope surrounds and/or is flexibly coupled to the inner frame gyroscope.

As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may further include an outer frame gyroscope (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) flexibly coupled (e.g., via coupling 148/150/152/154 or portions thereof) to one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) and configured to sense a second component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) about a second axis (e.g., the X axis) that may be orthogonal to the first axis (e.g., the Y axis).

Moreover, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may also include two or more proof masses (GZ proof masses 120, 122, 124, 126) coupled to one or more in-frame gyroscopes (e.g., a GY or in-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) and configured to sense a third component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) about a third axis (e.g., Z axis) that may be orthogonal to the first axis (e.g., Y axis) and the second axis (e.g., X axis).

In a non-limiting aspect, motion associated with two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) may be at least partially coupled to in-plane motion (e.g., X-Y plane) of one or more in-frame gyroscopes (e.g., GY or in-frame gyroscopes comprising two or more GY proof masses 104, 106, 108, 110, etc.) by respective coupling mechanisms (e.g., by coupling mechanisms or lever arms 128, 130), and wherein in-plane motion may be defined with reference to a plane comprising a first axis (e.g., Y axis) and a second axis (e.g., X axis). For example, in another non-limiting aspect, two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) may be configured to facilitate a condition that at least partially limits motion associated with the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) to linear and angular momentum balance.

As further described herein, an example MEMS device (e.g., including the example gyroscope structure 100 or a portion thereof) may further include one or more coupling mechanisms (e.g., coupling mechanisms or lever arms 128, 130) between two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) configured to force the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to a third component of angular velocity applied to the MEMS device (e.g., including the example gyroscope structure 100 or a portion thereof) about a third axis (e.g., Z axis).

In addition, an exemplary MEMS device (e.g., including exemplary gyroscope architecture 100 or portions thereof) can also include two or more drive shuttles (e.g., drive shuttle 310), the drive shuttle is coupled (e.g., by lever arms 112, 114, 116, 118 or portions thereof) to one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) or outer frame gyroscopes (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.), and is configured to force one or more of the one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) or the outer frame gyroscope (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) to vibrate. In a non-limiting aspect, an outer frame gyroscope (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) may be coupled to one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) at least in part via the two or more drive shuttles (e.g., drive shuttle 310).

In another non-limiting aspect, one or more of one or more outer frame gyroscopes (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.), one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.), or two or more drive shuttles may be configured to sense drive motion associated with vibration (e.g., via drive sense combs 312). In another non-limiting aspect, two or more drive shuttles (e.g., drive shuttle 310) may be configured to move with anti-phase drive motions and may be configured to minimize transmission of out-of-plane motion of the two or more drive shuttles (e.g., drive shuttle 310) to one or more in-frame gyroscopes (e.g., a GY or in-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.).

As further described herein, an example MEMS device (e.g., including example gyroscope architecture 100 or portions thereof) may further include one or more outer frame gyroscopes (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) or one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) may be configured to be driven by a set of drive electrodes (e.g., drive combs 314), e.g., as described herein.

Moreover, in other non-limiting embodiments, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) includes one or more in-frame gyroscopes (e.g., a GY or in-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) configured to sense a first component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) about a first axis (e.g., a Y axis), e.g., as described herein.

As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may further include two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) coupled to one or more in-frame gyroscopes (e.g., a GY or in-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) and configured to sense a second component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) about a second axis (e.g., Z axis) that may be orthogonal to the first axis (e.g., Y axis).

Moreover, in other non-limiting embodiments, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) includes one or more coupling mechanisms between two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) configured to force the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to a second component of angular velocity applied to the MEMS device (e.g., including the example gyroscope structure 100 or portions thereof) about a second axis (e.g., Z axis), e.g., as described herein. In a non-limiting aspect, motion associated with two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) may be at least partially coupled to in-plane motion of one or more in-frame gyroscopes (e.g., GY or in-frame gyroscopes comprising two or more GY proof masses 104, 106, 108, 110, etc.) by respective coupling mechanisms, and wherein in-plane motion may be defined with reference to a plane (e.g., an X-Y plane) perpendicular to the second axis. In another non-limiting aspect, two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) may be configured to facilitate at least partially defining motion associated with the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) as a condition of linear and angular momentum balance.

As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may further include two or more drive shuttles (e.g., drive shuttle 310) coupled to the one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) configured to force the one or more inner frame gyroscopes (e.g., a GY or inner frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) to vibrate. In a non-limiting aspect, two or more drive shuttles (e.g., drive shuttle 310) may be configured to move with anti-phase drive motions and may be configured to minimize transmission of out-of-plane motion of the two or more drive shuttles (e.g., drive shuttle 310) to one or more in-frame gyroscopes (e.g., a GY or in-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.).

In other non-limiting embodiments, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) includes two inner frame gyroscopes (e.g., GY or inner frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) configured to sense a first component of angular velocity about a first axis (e.g., Y axis) associated with the MEMS device (e.g., including the example gyroscope structure 100 or portions thereof), e.g., as described herein. As a non-limiting example, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may be configured to operate as one or more of a dual-axis gyroscope or a tri-axis gyroscope. In non-limiting aspects, one of the two inner frame gyroscopes (e.g., a GY or inner frame gyroscope including GY proof masses 104, 106, 108, 110, etc.) may be flexibly coupled (e.g., by springs or flexures 145) to the other of the two inner frame gyroscopes (e.g., a GY or inner frame gyroscope including GY proof masses 104, 106, 108, 110, etc.) and configured to limit out-of-plane and in-plane motion of the two inner frame gyroscopes (e.g., a GY or inner frame gyroscope including GY proof masses 104, 106, 108, 110, etc.) to be in phase.

As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) may further include two outline gyroscopes (e.g., GX or outline gyroscopes including the GX proof masses 132, 134, 136, 138, etc.) configured to sense a second component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a second axis (e.g., X-axis) that may be orthogonal to the first axis (e.g., Y-axis). In a non-limiting aspect, two outer frame gyroscopes (e.g., GX or outer frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) may be coupled (e.g., by coupling 148/150/152/154 or portions thereof) to two inner frame gyroscopes (e.g., GY or inner frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.) at least in part via four drive shuttles (e.g., drive shuttle 310. in another non-limiting aspect, one or more outer frame gyroscopes (e.g., GX or outer frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.), or one or more of the two gyroscopes (e.g., inner frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) may be configured to be driven by a set of drive electrodes (e.g., as further described herein, drive combs 314).

As another non-limiting example, two outer frame gyroscopes (e.g., GX or outer frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) may be flexibly coupled (e.g., by coupling 148/150/152/154 or portions thereof) to two inner frame gyroscopes (e.g., GY or inner frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) and configured to limit out-of-plane and in-plane motions of the two outer frame gyroscopes (e.g., GX or outer frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) and the two inner frame gyroscopes (e.g., GY or inner frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) to be in phase.

Furthermore, an example MEMS device (e.g., including example gyroscope architecture 100 or portions thereof) may also include four proof masses (e.g., GZ proof masses 120, 122, 124, 126) coupled to two in-frame gyroscopes (e.g., GY or in-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.), and configured to sense a third component of angular velocity associated with the MEMS device (e.g., including example gyroscope architecture 100 or portions thereof) about a third axis (e.g., Z axis) that may be orthogonal to the first axis (e.g., Y axis) and the second axis (e.g., X axis).

Moreover, in other non-limiting implementations, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) includes two coupling mechanisms (e.g., coupling mechanisms or lever arms 128, 130) associated with pairs (pairs) of four proof masses (e.g., GZ proof masses 120, 122, 124, 126), configured to force the pairs of four proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to a third component of angular velocity applied to the MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) about a third axis (e.g., the Z axis), and configured to force the pairs of four proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to two in-frame gyroscopes (e.g., GY or in-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.), among the four proof masses (e.g., GZ proof masses 120 proof masses, 122. 124, 126) does not produce a net angular momentum (net angular momentum), e.g., as described herein.

As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may also include four drive shuttles (e.g., drive shuttle 310) coupled to one or more of two inner frame gyroscopes (e.g., a GY or inner frame gyroscope including GY proof masses 104, 106, 108, 110, etc.) or an outer frame gyroscope (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) and configured to force one or more of the two inner frame gyroscopes (e.g., a GY or inner frame gyroscope including GY proof masses 104, 106, 108, 110, etc.) or the outer frame gyroscope (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) to vibrate. In non-limiting aspects, one or more of an outer frame gyroscope (e.g., a GX or outer frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.), two inner frame gyroscopes (e.g., a GY or inner frame gyroscope including GY proof masses 104, 106, 108, 110, etc.), or four drive shuttles (e.g., drive shuttle 310) may be configured to sense drive motion associated with vibration (e.g., by driving sense comb 312). In another non-limiting aspect, the pair of four drive shuttles (e.g., drive shuttle 310) may be configured to move with anti-phase drive motion and may be configured to minimize transmission of out-of-plane motion of the pair of four drive shuttles (e.g., drive shuttle 310) to two inner frame gyroscopes (e.g., GY or inner frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.), as further described herein.

Moreover, in other non-limiting embodiments, an exemplary MEMS device (e.g., including exemplary gyroscope architecture 100 or portions thereof) includes a coupling mechanism (e.g., via fixed pivot point 144 and respective bezel lever arm 140/142 or portions thereof) associated with two bezel gyroscopes (e.g., GX or bezel gyroscopes including GX proof masses 132, 134, 136, 138, etc.) that is configured to force the two bezel gyroscopes (e.g., GX or bezel gyroscopes including GX proof masses 132, 134, 136, 138, etc.) into anti-phase motion due to a second component of angular velocity applied to the MEMS device (e.g., including exemplary gyroscope architecture 100 or portions thereof) about a second axis (e.g., the X axis), e.g., as described herein.

Other non-limiting implementations of the exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) may include a stress isolation block (e.g., stress isolation block 308) coupled to the MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) and configured to reject stress transmitted to the MEMS device (e.g., including the exemplary gyroscope structure 100 or a portion thereof) from a package associated with the MEMS device (e.g., including the exemplary gyroscope structure 100 or a portion thereof), e.g., as further described herein.

In view of the above-described subject matter, various methods may be implemented in accordance with the methods of operation for the various embodiments described herein, in accordance with the motion of various components, actuation of a drive system, experiencing applied angular momentum, sensing same, etc., and methods of manufacturing directions to various manufacturing steps to form part of the various embodiments herein. For purposes of simplicity of explanation, such methodologies may be described as a series of steps, and it is to be understood and appreciated that the illustrated or corresponding descriptions will be understood by those skilled in the art based upon a review of the herein embodiments and are not limited by the order of the steps, as some steps may occur in different orders and/or concurrently with other steps from that depicted and/or described herein.

The foregoing includes examples of embodiments of the present invention. While specific embodiments of, and examples for, the invention are described herein for illustrative purposes, various modifications are possible within the scope of the embodiments and examples, as those skilled in the relevant art will recognize. It is, of course, not possible to describe every conceivable combination of configurations, components, and/or methodologies for purposes of describing the claimed subject matter, but it is to be appreciated that many further combinations and permutations of various embodiments are possible. Thus, while the disclosed subject matter has been described in accordance with the embodiments shown, one of ordinary skill in the art will readily recognize that there could be variations to the embodiments and those variations would be within the spirit and scope of the disclosed subject matter. Accordingly, many modifications may be made by one of ordinary skill in the art without departing from the spirit and scope of the disclosed subject matter. Accordingly, the claimed subject matter is intended to embrace all such alterations, modifications and variations that fall within the spirit and scope of the appended claims.

Moreover, the word "example" or "exemplary" is used herein to mean serving as an example, instance, or illustration. Any aspect or design described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other aspects or designs. Rather, the term "exemplary" is used to present concepts in a concrete fashion. In this application, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or". That is, unless otherwise specified or clear from context, "X employs A or B" is intended to mean any of the natural inclusive permutations. That is, if X employs A; b is used as X; or X employs both A and B, then in either case, "X employs A or B" is satisfied. Furthermore, the articles "a" and "an" and the appended claims used in this application should generally be construed to mean "one or more" unless specified otherwise or clear from context to be directed to a singular form.

In addition, while an aspect may have been disclosed with respect to only one of several embodiments, the described feature may be combined with one or more other features of the other embodiments as may be desired and advantageous for any given or particular application. Furthermore, to the extent that the terms "includes," "including," "has," "contains," variants thereof, and other similar words are used in either the detailed description or the claims, these terms are intended to be inclusive in a manner similar to the term "comprising" as an open transition word without precluding any additional or other elements.