阅读说明：本技术 使用光力效应控制金属纳米线移动的方法及光子集成系统 (Method for controlling movement of metal nanowire by using optical force effect and photonic integrated system ) 是由 谷付星 令狐双艺 顾兆麒 于 2021-01-13 设计创作，主要内容包括：本发明属于光子集成系统领域,提供了一种使用光力效应控制金属纳米线移动的方法及光子集成系统,在非液体环境中,将金属纳米线放置在微纳波导上；将脉冲激光器输出的脉冲激光输入微纳波导中,调节脉冲激光器的重复频率和功率,金属纳米线在脉冲激光的驱动下在微纳波导上移动到预定位置。通过选择合适的金属纳米线和微纳波导,调节脉冲激光的重复频率及输出功率,即可获得低至0.56nm的定位精度,和6.5μms～(-1)mW～(-1)的移动速度,该方法具有亚纳米级定位精度,低驱动功率和自平行停车的优点。另外,利用该方法,能够在单个芯片上实现各种功能化光子组件的共集成的效果。本发明具有原位操作,高选择性和多功能性。(The invention belongs to the field of photonic integrated systems, and provides a method for controlling the movement of a metal nanowire by using a light force effect and a photonic integrated system, wherein the metal nanowire is placed on a micro-nano waveguide in a non-liquid environment; inputting pulse laser output by a pulse laser into the micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, and moving the metal nanowire to a preset position on the micro-nano waveguide under the driving of the pulse laser. By selecting proper metal nano-wire and micro-nano waveguide and adjusting the repetition frequency and output power of the pulse laser, the positioning precision as low as 0.56nm and 6.5 mu ms can be obtained ‑1 mW ‑1 The method has the advantages of sub-nanometer positioning precision, low driving power and self-parallel parking. In addition, by using the method, the effect of co-integration of various functionalized photonic components can be realized on a single chip. The invention has in-situ operation and high separationSelectivity and versatility.)

1. A method for controlling movement of metal nanowires using the optical force effect, comprising the steps of:

step S1, under a microscope, in a non-liquid environment, the metal nano wire is placed on the micro-nano waveguide;

step S2, inputting pulse laser output by a pulse laser into the micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, moving the metal nanowire to a preset position on the micro-nano waveguide under the drive of the pulse laser,

wherein the metal nanowire is in a single crystal form.

2. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

wherein the pulse width of the pulse laser is 600 ps-100 ns, and the wavelength is 400 nm-2 μm.

3. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

wherein the non-liquid environment is any one of an air environment, a vacuum environment or an ultralow temperature environment of 2K-40K.

4. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

the metal nanowire is made of any one or any alloy of gold, silver, copper, aluminum, nickel, cobalt and palladium.

5. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

wherein the length of the metal nanowire is 0.5-50 μm, the width is 50-300 nm, and the thickness is 50-300 nm.

6. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

the micro-nano waveguide is made of silicon dioxide or silicon nitride.

7. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

the micro-nano waveguide can be cylindrical or cuboid, the diameter of the cylinder is 0.3-5 microns, the width of the cuboid is 100-3 microns, and the height of the cuboid is 100-3 microns.

8. The method of controlling the movement of metal nanowires using the optical force effect as claimed in claim 1, wherein:

the specific operation of step S1 is: placing the micro-nano waveguide on a substrate under a microscope by using a three-dimensional adjusting frame, fixing the micro-nano waveguide on the substrate by using glue, placing the metal nanowire on the surface of the micro-nano waveguide by using a fiber probe under the microscope by using the three-dimensional adjusting frame,

the refractive index of the substrate is lower than that of the micro-nano waveguide, and the refractive index of the glue is lower than that of the micro-nano waveguide.

9. A photonic integrated system, prepared by the steps of:

s2-1, placing a plurality of micro-nano waveguides on a substrate, and placing the micro-nano waveguides into various shapes by using a tungsten probe;

step S2-2, respectively placing a plurality of metal nanowires on different micro-nano waveguides in a non-liquid environment under a microscope;

step S2-3, inputting pulse laser output by a pulse laser into any one micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, and moving the metal nanowire on the micro-nano waveguide to a preset position on the micro-nano waveguide under the driving of the pulse laser;

s2-4, repeating the step S2-3, and adjusting the positions of all the metal nanowires to preset positions to obtain a plurality of micro-nano waveguide-metal nanowire structures;

and S2-5, placing corresponding electronic elements beside each micro-nano waveguide-metal nanowire structure to obtain a photonic integrated system.

10. The photonic integrated system of claim 9, wherein:

the photonic integrated system comprises a coupler, an interferometer and a ring resonator.

Technical Field

The invention belongs to the field of photonic integrated systems, and particularly relates to a method for controlling movement of a metal nanowire by using a light force effect and a photonic integrated system.

Background

Chemically synthesized metal nanowires are promising basic materials for next-generation photonic integrated circuits due to their excellent characteristics of high crystallinity and smooth surface. Due to the large amount of loss of Surface Plasmon Polaritons (SPPs), metal nanowires need to be integrated with low-loss dielectric materials such as silicon dioxide micro-nano waveguides and semiconductor nanowires to construct hybrid photonic-plasmonic circuits and systems.

Although the related research has been widely developed, the optical force effect is mainly used for operation in the current methods such as optical tweezers and near-field evanescent force method, but the methods can only transfer micro-or nano-particles in a liquid environment, and have slow moving speed and low efficiency. To date, there is a lack of an effective method of manipulating metal nanowires (e.g., moving, positioning, and sorting) with high precision controllability and versatility, which severely hinders the integration of hybrid photon-plasmon components on chips. The main reason for this is the strong adhesion (e.g. van der waals and electrostatic forces) between the small-sized metal nanowires and the waveguide substrate in a non-liquid environment, and in general, the adhesion of micro-and nano-scale objects to the substrate in an air environment can reach-10^-6The magnitude of the light is bovine, and the light greatly exceeds the force (10) exerted by the light momentum on the substance in the light force effect^-12Cattle). Therefore, manipulation based on optical force effects, such as optical tweezers using a focused laser beam or a strong evanescent field at a total reflection interface, can usually only be efficiently performed by eliminating surface adhesion forces in a liquid environment. However, the ultimate operating environment for most integrated photonic circuits is a non-liquid environment, in air or vacuum, since the effects of fluid convection, turbulence and surface tension will severely limit the integration accuracy of the device. As can be seen from the above, the use of the optical force effect to drive the metal nanowires in the liquid environment is not suitable for the integrated photonic circuit, and therefore, a method capable of directly moving the metal nanowires on the chip in the non-liquid environment is increasingly required.

Disclosure of Invention

The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for controlling movement of a metal nanowire using a light force effect and a photonic integrated system.

The invention provides a method for controlling the movement of metal nanowires by using the optical force effect, which is characterized by comprising the following steps: step S1, under a microscope, in a non-liquid environment, the metal nano wire is placed on the micro-nano waveguide; and step S2, inputting the pulse laser output by the pulse laser into the micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, and moving the metal nanowire to a preset position on the micro-nano waveguide under the driving of the pulse laser, wherein the metal nanowire is in a single crystal form.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: wherein, the pulse width of the pulse laser is 600 ps-100 ns, and the wavelength is 400 nm-2 μm.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: wherein the non-liquid environment is any one of an air environment, a vacuum environment or an ultralow temperature environment of 2K-40K.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: the metal nanowire is made of any one or any alloy of gold, silver, copper, aluminum, nickel, cobalt and palladium.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: wherein the length of the metal nanowire is 0.5-50 μm, the width is 50-300 nm, and the thickness is 50-300 nm.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: wherein, the material of the micro-nano waveguide is silicon dioxide or silicon nitride.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: the micro-nano waveguide can be cylindrical or cuboid, the diameter of the cylinder is 0.3-5 mu m, the width of the cuboid is 100-3 mu m, and the height of the cuboid is 100-3 mu m.

In the method for controlling the movement of the metal nanowire by using the optical force effect, the method can further have the following characteristics: the specific operation of step S1 is: the method comprises the steps of placing the micro-nano waveguide on a substrate under a microscope by using a three-dimensional adjusting frame, fixing the micro-nano waveguide on the substrate by using glue, and placing the metal nanowire on the surface of the micro-nano waveguide by using an optical fiber probe under the microscope by using the three-dimensional adjusting frame, wherein the refractive index of the substrate is lower than that of the micro-nano waveguide, and the refractive index of the glue is lower than that of the micro-nano waveguide.

The invention also provides a photon integration system, which is characterized by being prepared by the following steps: s2-1, placing a plurality of micro-nano waveguides on a substrate, and placing the micro-nano waveguides into various shapes by using a tungsten probe; step S2-2, respectively placing a plurality of metal nanowires on different micro-nano waveguides in a non-liquid environment under a microscope; step S2-3, inputting pulse laser output by a pulse laser into any one micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, and moving the metal nanowire on the micro-nano waveguide to a preset position on the micro-nano waveguide under the driving of the pulse laser; s2-4, repeating the step S2-3, and adjusting the positions of all the metal nanowires to preset positions to obtain a plurality of micro-nano waveguide-metal nanowire structures; and S2-5, placing corresponding electronic elements beside each micro-nano waveguide-metal nanowire structure to obtain the photonic integrated system.

The photonic integrated system provided by the invention can also have the following characteristics: the photonic integrated system comprises a coupler, an interferometer and a ring resonator.

Action and Effect of the invention

According to the method for controlling the movement of the metal nanowire by using the optical force effect and the photonic integrated system, the metal nanowire with single crystal property is placed on the micro-nano waveguide, then pulse laser is introduced into the micro-nano waveguide to generate an evanescent field, and the micro-nano waveguide can couple the pulse laser to the metal nanowire through the evanescent field. The plasmon polariton in the metal nanowire is effectively excited by an evanescent field outside the micro-nano waveguide, and standing waves are formed around the front end of the metal nanowire, so that absorption is enhancedThermal effects of light. The plasma generated by the optical force effect greatly enhances the thermal effect in the metal nanowire, so that surface acoustic waves are generated to drive the metal nanowire to crawl along the micro-nano waveguide in a non-liquid environment. By selecting proper metal nano wire and micro-nano waveguide and adjusting the repetition frequency and output power of the pulse laser, the positioning precision as low as 0.56nm and 6.5 mu m s can be obtained^-1mW^-1The method has the advantages of sub-nanometer positioning precision, low driving power and self-parallel parking.

The method for controlling the movement of the metal nanowire by using the optical force effect is based on a surface acoustic wave driving method caused by the optical force effect, can enable the metal nanowire to overcome strong surface adhesion force between the metal nanowire and the micro-nano waveguide in a non-liquid environment, and can continuously and controllably operate the single metal nanowire along the micro-nano waveguide. And the initial posture of the metal nanowire on the micro-nano waveguide can be adjusted, which is very helpful for the operation process on a chip, a plurality of micro-nano waveguide-metal nanowire structures are obtained on one chip, and different electronic elements are placed at the corresponding micro-nano waveguide-metal nanowire structures by adjusting the shapes of the micro-nano waveguide-metal nanowire structures, so that the effect of realizing the co-integration of various functional photonic components on a single chip is achieved. The method can also be combined with other nanowire manipulation methods to work cooperatively so as to achieve the effect of realizing the co-integration of various functionalized photonic components on a single chip.

Drawings

FIG. 1 is a schematic diagram of two typical micro-nano waveguide-metal nanowire structures in the invention;

FIG. 2 is a transmission electron micrograph of gold nanowires in example 1 of the present invention;

FIG. 3 is a lattice diffraction pattern of gold nanowires in example 1 of the present invention;

FIG. 4 is an optical sequence photograph of controlling the self-parallel parking of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention;

FIG. 5 is a thermal power density simulation graph for controlling the self-parallel parking of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention;

FIG. 6 is an optical sequence photograph for controlling the sub-nanometer positioning accuracy of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention;

FIG. 7 is a repetition frequency-velocity diagram for controlling sub-nanometer positioning accuracy of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention; and

fig. 8 is a schematic diagram of the photonic integrated system according to embodiment 3 of the present invention.

Detailed Description

In order to make the technical means, the creation features, the achievement objects and the effects of the present invention easy to understand, the method for controlling the movement of the metal nanowire by using the optical force effect and the photonic integrated system of the present invention are described in detail below with reference to the embodiments and the accompanying drawings.

The invention provides a method for controlling the movement of a metal nanowire by using a light force effect, which specifically comprises the following steps:

step S1, under a microscope, in a non-liquid environment, the metal nano wire is placed on the micro-nano waveguide;

and step S2, inputting the pulse laser output by the pulse laser into the micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, and moving the metal nanowire to a preset position on the micro-nano waveguide under the driving of the pulse laser.

The schematic structural diagram of the prepared micro-nano waveguide-metal nanowire structure is shown in figure 1.

Fig. 1 is a schematic diagram of two typical micro-nano waveguide-metal nanowire structures in the invention.

As shown in fig. 1, a metal nanowire 1 is placed on a cylindrical or rectangular micro-nano waveguide 2 to form a typical micro-nano waveguide-metal nanowire structure 7.

In addition, a plurality of micro-nano waveguide-metal nanowire structures and other elements are integrated on a substrate with the refractive index lower than that of the micro-nano waveguide, and the photonic integrated system can be obtained by placing the micro-nano waveguide-metal nanowire structures in a non-liquid environment, and the specific steps are as follows:

s2-1, placing a plurality of micro-nano waveguides on a substrate, and placing the micro-nano waveguides into various shapes by using a tungsten probe;

step S2-2, respectively placing a plurality of metal nanowires on different micro-nano waveguides in a non-liquid environment under a microscope;

step S2-3, inputting pulse laser output by a pulse laser into any one micro-nano waveguide, adjusting the repetition frequency and power of the pulse laser, and moving the metal nanowire on the micro-nano waveguide to a preset position on the micro-nano waveguide under the driving of the pulse laser;

s2-4, repeating the step S2-3, and adjusting the positions of all the metal nanowires to preset positions to obtain a plurality of micro-nano waveguide-metal nanowire structures;

and S2-5, placing corresponding electronic elements beside each micro-nano waveguide-metal nanowire structure to obtain the photonic integrated system.

The specific operation of step S1 is: and placing the micro-nano waveguide on the substrate under the microscope by using a three-dimensional adjusting frame, fixing the micro-nano waveguide on the substrate by using glue, and placing the metal nanowire on the surface of the micro-nano waveguide by using an optical fiber probe under the microscope by using the three-dimensional adjusting frame. The refractive index of the substrate is lower than that of the micro-nano waveguide, and the refractive index of the glue is lower than that of the micro-nano waveguide.

In practical application, the operation of fixing the micro-nano waveguide on the substrate by using glue can be adopted, or the operation of fixing one end of the micro-nano waveguide on the substrate by using glue to enable one part of the micro-nano waveguide to extend out of the substrate so as to be suspended in a preset environment and then placing the metal nanowire on the surface of the part of the micro-nano waveguide extending out of the substrate by using the optical fiber probe under a microscope by using the three-dimensional adjusting frame. In the embodiment of the invention, the operation of suspending the micro-nano waveguide part is adopted.

The metal nanowire is in a single crystal form, and can be any one of gold, silver, copper, aluminum, nickel, cobalt and palladium or a single crystal alloy of any several of the gold, silver, copper, aluminum, nickel, cobalt and palladium. The length of the metal nanowire is 0.5-50 μm, the width is 50-300 nm, and the thickness is 50-300 nm.

The micro-nano waveguide is made of silicon dioxide or silicon nitride, and can be cylindrical or cuboid. When the micro-nano waveguide is cylindrical, the diameter is 0.3-5 μm. When the micro-nano waveguide is cuboid, the width is 100 nm-3 μm, and the height is 100 nm-3 μm.

The preparation of the micro-nano waveguide-metal nanowire structure can be carried out in an air environment, a vacuum environment or an ultralow temperature environment of 2K-40K. During preparation, the pulse width of the pulse laser is 600 ps-100 ns, and the wavelength is 400 nm-2 μm.

The substrate is made of materials such as magnesium fluoride and the like with lower refractive index than micro-nano waveguides (silicon dioxide and silicon nitride).

The initial gesture occurring in the present invention means: when the optical fiber probe is used for placing the metal nanowires on the micro-nano waveguide, the metal nanowires cannot be placed very parallel due to the limitation of operation precision, so that the metal nanowires can be in a state with a certain initial included angle on the micro-nano optical fiber.

In the embodiment of the invention, the metal nanowire is only illustrated by the gold material, and other materials which are not illustrated in detail can achieve the same technical effect as the gold material. The material of the micro-nano waveguide is only explained by silicon dioxide, and silicon nitride can achieve the same technical effect.

In the invention, the metal nanowire is made of any one or any several single crystal alloys of gold, silver, copper, aluminum, nickel, cobalt and palladium, and the materials can generate stable SPPs in the micro-nano waveguide-metal nanowire structure.

In the invention, the proper growth temperature and time of the high-temperature furnace are adjusted, and the proper metal material is selected, so that the single crystal metal nanowires with different sizes of different metal materials can be obtained.

< example 1>

This embodiment describes a method for controlling the movement of the metal nanowire using the optical force effect.

The preparation method of the gold nanowire in the embodiment comprises the following steps: putting 80mg of gold wires (99.99 percent, a national medicine reagent) into a corundum boat, putting the corundum boat containing the gold wires into a central heating zone of a corundum tube of a high-temperature furnace, putting a alumina substrate in a low-temperature zone of the corundum tube close to an air outlet, introducing argon gas with the flow rate of 0.6L/min into the corundum tube, discharging the argon gas from the other end of the corundum tube, controlling the air pressure in the corundum tube to be maintained at 1torr, maintaining the temperature of the high-temperature furnace at 1200 ℃ for 120min, naturally cooling, obtaining gold nanowires with different lengths on the alumina substrate, and selecting the gold nanowires with the length of 6.3 mu m. The prepared gold nanowires are detected by a transmission electron microscope, and the test result is shown in figure 2.

Fig. 2 is a transmission electron micrograph of gold nanowires in example 1 of the present invention.

Fig. 2 is a photograph of gold nanowires placed on a copper mesh and taken by a transmission electron microscope. Wherein, the black strip in the middle is gold nanowire, and the copper net used for catching the gold nanowire is arranged beside the black strip.

Fig. 3 is a lattice diffraction pattern of gold nanowires in example 1 of the present invention, which was photographed by a transmission electron microscope for front, middle and rear ends of the gold nanowires in fig. 2.

As shown in fig. 3, the front, middle and rear ends of the gold nanowires were photographed by using electron diffraction patterns of crystal lattices, and it was confirmed from the electron diffraction patterns of crystal lattices of each portion that the lattice points thereof were in the shape of a regular hexagon, and it was confirmed that the gold nanowires obtained by the high temperature furnace growth method according to the present embodiment had excellent single crystal properties.

The preparation method of the silicon dioxide micro-nano waveguide in the embodiment comprises the following steps: a standard optical fiber (SMF-28, Corning) was coated with an alcohol and wiped clean, heated on an alcohol burner flame and then drawn at a constant speed to obtain a cylindrical structure having a diameter of 2.1 μm.

The method for controlling the movement of the metal nanowire by using the optical force effect in the embodiment comprises the following steps: the method comprises the steps of placing a micro-nano waveguide on a substrate with a refractive index lower than that of a micro-nano waveguide material under a microscope by using a three-dimensional adjusting frame, fixing the micro-nano waveguide on the substrate by using glue with a refractive index lower than that of the micro-nano waveguide material, picking up a metal nanowire from a alumina substrate on which the metal nanowire grows by using a fiber probe under the microscope by using the three-dimensional adjusting frame, and transferring the metal nanowire to the surface of the micro-nano waveguide fixed on the substrate to form a micro-nano waveguide-metal nanowire structure.

In the method for controlling the movement of the metal nanowire by using the optical force effect and the photonic integrated system, a schematic diagram of a process of adjusting the initial posture of the gold nanowire to perform self-parallel parking is shown in fig. 4, and a forming principle is shown in fig. 5.

Fig. 4 is an optical sequence photograph of controlling the self-parallel parking of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention.

As shown in fig. 4, the initial tilt angle of the gold nanowire 101 transferred by the fiber probe on the silica micro-nano waveguide 201 is 22 °, and under the drive of 1064nm nanosecond laser with an average power of 6 μ W, the tilted gold nanowire 101 rotates on the suspended portion of the silica micro-nano waveguide 201 (i.e., the portion of the silica micro-nano waveguide 201 extending out of the substrate, and the periphery of the portion is completely air) and is gradually parallel to the silica micro-nano waveguide 201.

Fig. 5 is a thermal power density simulation graph for controlling the self-parallel parking of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention.

As shown in fig. 5, simulation analysis was performed on different inclination angles of the gold nanowires 101, heat sources were mainly distributed in the middle and right sides of the gold nanowires 101, and the thermal power density of the lower surface of the gold nanowires 101 was greater than that of the upper surface. This uneven heat distribution will cause the gold nanowires 101 to rotate clockwise until the axis of the gold nanowires 101 is parallel to the axis of the silica micro-nano waveguide 201. This rotation phenomenon (which may be referred to as self-parallel parking) may be used to adjust the initial attitude of the gold nanowires 101 on the silica micro-nano waveguide 201, thereby facilitating the on-chip operation process.

In this embodiment, a schematic diagram of a process of controlling the movement of the gold nanowires to achieve sub-nanometer positioning accuracy by using a light force effect in an air environment is shown in fig. 6, and a repetitive frequency-velocity diagram of the movement velocity of the gold nanowires at different frequencies is shown in fig. 7.

Fig. 6 is an optical sequence photograph for controlling the sub-nanometer positioning accuracy of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention.

As shown in fig. 6, the power of the 1064nm nanosecond pulsed laser was kept constant, and the repetition frequency was changed to obtain the moving speed of the gold nanowires at different repetition frequencies. The gold nanowire 101 placed on the suspended part of the silicon dioxide micro-nano waveguide 201 generates different moving speeds under the action of different frequencies of 1064nm nanosecond pulse laser.

Fig. 7 is a repetition frequency-velocity diagram for controlling sub-nanometer positioning accuracy of gold nanowires in a non-liquid environment using the optical force effect in example 1 of the present invention.

As shown in fig. 7, the abscissa represents the repetition frequency of the 1064nm nanosecond pulsed laser, the ordinate represents the moving speed of the gold nanowire 101, the fitting represents a speed curve fitting the moving speed of the gold nanowire 101 in the present embodiment, and the error line is the variance of the moving speed of the gold nanowire 101.

As can be seen from fig. 7, the moving speed of the gold nanowire 101 depends on the repetition frequency of the laser. In the embodiment, the single pulse energy of the laser is kept to be 8.6nJ, the repetition frequency of the 1064nm nanosecond laser is reduced from 1600Hz to 50Hz, and the moving speed of the gold nanowire 101 on the silicon dioxide micro-nano waveguide 201 depends on the repetition frequency of the laser in the air atmosphere. And the positioning resolution of the single-pulse drive obtained by fitting the trend line calculation is 0.56nm, which is equivalent to the resolution of a commercial ultra-fine piezoelectric driver, and the high-precision control of the metal nanowire in a non-liquid environment is realized. The moving speed of the gold nanowire 101 is 6.5 mu m s under the drive of 1064nm nanosecond pulse laser^-1mW^-1Compared with the method using optical tweezers and near-field evanescent force to control the transmission speed of the micro-nano particles in a liquid environment, the method has the advantages that the transmission speed is two orders of magnitude higher, and the method has higher efficiency and more universal application environment in the method for controlling the movement of the gold nanowires in the non-liquid environment by using the optical force effect.

Effects and Effect of example 1

According to the method for controlling the movement of the metal nanowire using the optical force effect provided in this embodiment, the metal nanowire having a single crystal property is transferred to the micro-nano wave using the optical fiber probeAnd guiding, then introducing the pulse laser into the micro-nano waveguide to generate an evanescent field, wherein the micro-nano waveguide can couple the pulse laser into the metal nanowire through the evanescent field. The plasmon polariton in the metal nanowire is effectively excited by an evanescent field outside the micro-nano waveguide, and standing waves are formed around the front end of the metal nanowire, so that the heat effect of absorbed light is enhanced. The plasma generated by the optical force effect greatly enhances the thermal effect in the metal nanowire, so that surface acoustic waves are generated to drive the metal nanowire to crawl along the micro-nano waveguide in a non-liquid environment. By selecting proper metal nano wire and micro-nano waveguide and adjusting the repetition frequency and output power of the pulse laser, the positioning precision as low as 0.56nm and 6.5 mu m s can be obtained^-1mW^-1The method has the advantages of sub-nanometer positioning precision, low driving power and self-parallel parking.

The method for controlling the movement of the metal nanowire by using the optical force effect provided by the embodiment is based on a surface acoustic wave driving method caused by the optical force effect, so that the metal nanowire can overcome strong surface adhesion force between the metal nanowire and the micro-nano waveguide in a non-liquid environment, and a single metal nanowire can be continuously and controllably manipulated along the micro-nano waveguide. And the initial posture of the metal nanowire on the micro-nano waveguide can be adjusted, which is very helpful for the operation process on the chip.

In this embodiment, the single crystal metal nanowires with different sizes can be obtained by adjusting the appropriate growth temperature and time of the high temperature furnace.

In the embodiment, the pulse width of the pulse laser is 600 ps-100 ns, and the wavelength is 400 nm-2 μm; the length of the metal nanowire is 0.5-50 μm, the width is 50-300 nm, and the thickness is 50-300 nm; the micro-nano waveguide can be cylindrical or cuboid, the diameter of the cylinder is 0.3-5 mu m, the width of the cuboid is 100-3 mu m, and the height of the cuboid is 100-3 mu m, so that the micro-nano waveguide-metal nanowire structure can play a better moving effect in a non-liquid environment under the action of a light force effect.

In this embodiment, the metal nanowire is a gold nanowire in a single crystal form, and the material of the micro-nano waveguide is silicon dioxide, so that the metal nanowire can be better coupled with an evanescent wave in the micro-nano waveguide, and the expansion and contraction of the crystal lattice of the metal nanowire in the single crystal form have stability, so that the method can obtain sub-nanometer control accuracy.

< example 2>

The embodiment describes the structure of the micro-nano waveguide-metal nanowire and the preparation method thereof in detail.

The preparation method of the gold nanowire in the embodiment comprises the following steps: putting 80mg of gold wires (99.99 percent, a national medicine reagent) into a corundum boat, putting the corundum boat containing the gold wires into a central heating zone of a corundum tube of a high-temperature furnace, putting a alumina substrate in a low-temperature zone of the corundum tube close to an air outlet, introducing argon gas with the flow rate of 0.6L/min into the corundum tube, discharging the argon gas from the other end of the corundum tube, controlling the air pressure in the corundum tube to be maintained at 1torr, maintaining the temperature of the high-temperature furnace at 1200 ℃ for 120min, naturally cooling, obtaining gold nanowires with different lengths on the alumina substrate, and selecting the gold nanowires with the length of 2.3 mu m.

The preparation method of the micro-nano waveguide in the embodiment comprises the following steps: a standard optical fiber (SMF-28, Corning) was coated with an alcohol and wiped clean, heated on an alcohol burner flame and then drawn at a constant speed to obtain a cylindrical structure having a diameter of 2.2 μm.

The method for controlling the movement of the metal nanowires by using the optical force effect in this embodiment is the same as that in embodiment 1, and is not described herein again.

Effects and Effect of example 2

The operation and effect of this embodiment are the same as those of embodiment 1, and are not described herein again.

< example 3>

This example details the preparation of the photonic integrated system.

Fig. 8 is a schematic diagram of the photonic integrated system according to embodiment 3 of the present invention.

As shown in fig. 8, a plurality of micro-nano waveguides 6 are placed on a substrate having a refractive index lower than that of the micro-nano waveguide material, and the micro-nano waveguides 6 are placed in a plurality of different shapes using a tungsten probe, wherein the micro-nano waveguides are marked in a ring shape and the micro-nano waveguides are 5 in a ring shape. Then, a plurality of metal nanowires 3 are respectively placed on different micro-nano waveguides 6 and annular micro-nano waveguides 5, and pulse laser is introduced into each micro-nano waveguide 6, so that functional operations such as transportation, positioning, orientation, classification and the like of the metal nanowires can be realized.

An annular resonator B can be obtained by placing electrode plates 4 at two sides of an annular micro-nano waveguide 5 provided with the metal nano-wires 3; a coupler A can be obtained by placing a metal nanowire 3 at the junction of two micro-nano waveguides 6; and placing electrode plates 4 on two sides of a micro-nano waveguide 6 provided with a part of suspended metal nanowires 3 to obtain an interferometer C.

Effects and Effect of example 3

According to the photonic integration system provided by the embodiment, a plurality of micro-nano waveguide-metal nanowire structures are obtained on one chip by using a method for controlling the movement of the metal nanowires by using an optical force effect, then different electronic elements are placed at the corresponding micro-nano waveguide-metal nanowire structures, and the photonic integration system is prepared by using the method for controlling the movement of the metal nanowires by using the optical force effect, so that the effect of realizing the co-integration of various functionalized photonic components on a single chip is achieved.

In the embodiment, the operation of the metal nanowires on the chip in a non-liquid environment, including transportation, positioning, orientation and classification, is realized, and the method has the advantages of in-situ operation, high selectivity and multiple functionality.

The method according to the present embodiment can also be applied to photonic integrated systems made of other materials and structures. Over the past few years, metal nanowires have been integrated with various micro-nano waveguides to implement a variety of functionalized circuits and devices ranging from routers/couplers, interferometers and resonators to lasers. The method related to the embodiment can also be combined with other nanowire manipulation methods to work cooperatively, so that the effect of realizing the co-integration of various functionalized photonic components on a single chip is achieved.

The above embodiments are preferred examples of the present invention, and are not intended to limit the scope of the present invention.