阅读说明：本技术 控制系统、光学系统和方法 (Control system, optical system and method ) 是由 M.霍夫曼 G.舒尔茨 于 2020-02-10 设计创作，主要内容包括：本发明涉及一种开环控制系统(10),特别用于光学系统(100),包括：致动器(12)、用于获取致动器(12)的致动器测量数据(15)的测量元件(14)、用于根据致动器测量数据(15)生成用于控制致动器(12)的控制信号(13)的闭环控制单元(20)、以及用于根据所获取的致动器测量数据(15)监控开环控制系统(10)状态的状态监控单元(30)。(The invention relates to an open-loop control system (10), in particular for an optical system (100), comprising: an actuator (12), a measuring element (14) for acquiring actuator measurement data (15) of the actuator (12), a closed-loop control unit (20) for generating a control signal (13) for controlling the actuator (12) in dependence of the actuator measurement data (15), and a condition monitoring unit (30) for monitoring a condition of the open-loop control system (10) in dependence of the acquired actuator measurement data (15).)

1. A control system (10), in particular for an optical system (100), comprising:

an actuating element (12) for the actuator,

a measuring element (14) for acquiring actuating element measurement data (15) of the actuating element (12),

an adjustment unit (20) for generating an adjustment signal (13) for adjusting the actuating element (12) as a function of the acquired actuating element measurement data (15), and

a condition monitoring unit (30) for monitoring a condition of the control system (10) based on the acquired actuation element measurement data (15), wherein the condition monitoring unit (30) comprises:

a first processing unit (32) for generating pre-processing state data (33) according to:

(i) the acquired actuation element measurement data (15) and a Physical Model (PM) and/or a Mathematical Model (MM) of the actuation element (12), or

(ii) The acquired actuation element measurement data (15), a Physical Model (PM) and/or a Mathematical Model (MM) of the actuation element (12) and the generated adjustment signal (13), and

a second processing unit (34) for determining a state of the control system (10) from the pre-processed state data (33).

2. The control system according to claim 1, characterized in that the first processing unit (32) is configured to continuously acquire and process the acquired actuation element measurement data (15), in particular to acquire and process the acquired actuation element measurement data (15) synchronously with the acquisition of the actuation element measurement data (15) by the measurement element (14).

3. The control system according to claim 1 or 2, characterized in that the first processing unit (32) is configured to generate the pre-processing state data (15) based on the acquired actuation element measurement data (15) during operation of the control system (10).

4. The control system of any of claims 1-3, further comprising: a drive unit (40) for generating actuation element drive data (42) in accordance with the executed operating program,

wherein the adjustment unit (20) is configured for generating the adjustment signal (13) in dependence of the actuation element drive data (42), and

wherein the first processing unit (32) is configured for generating the pre-processing state data (33) in accordance with a currently executed operation program.

5. The control system of any one of claims 1 to 4, further comprising: an environmental sensor (16) for acquiring environmental sensor data (17),

wherein the first processing unit (32) is configured for generating the pre-processing state data (33) from the acquired environmental sensor data (17).

6. The control system of any one of claims 1 to 5, wherein the measuring element (14) is configured to acquire actuation element measurement data (15) having a frequency of 1 kilohertz to 10 kilohertz, preferably to 100 kilohertz, more preferably to 1 megahertz.

7. The control system of any one of claims 1 to 6, wherein the adjustment unit (20) is configured to generate an adjustment signal (13) having a frequency of 1 kilohertz to 10 kilohertz, preferably to 100 kilohertz, more preferably to 1 megahertz.

8. The control system according to any one of claims 1 to 7, wherein the first processing unit (32) is configured to generate the pre-processing state data (33), the pre-processing state data (33) having a data rate of at most 10%, preferably at most 1%, of the data rate of the acquired actuation element measurement data (15), wherein each individually acquired actuation element measurement data influences the pre-processing state data (33).

9. The control system according to any one of claims 1 to 8, wherein the actuation element (12) comprises an actuator, in particular a Lorentz actuator, for setting an element position and the measurement element (14) comprises a position sensor, in particular an interferometer and/or a CCD camera, for acquiring an element position.

10. The control system according to any one of claims 1 to 9, wherein the status monitoring unit (30) is configured to determine a future status of the control system (10), in particular a fault status or a status requiring maintenance of an optical system, from monitored status or pre-processed status data (33).

11. An optical system (100), in particular a lithographic apparatus, comprising a control system (10) according to any one of claims 1 to 10.

12. A method for operating a control system (10), in particular according to any one of claims 1 to 10, or an optical system (100), in particular according to claim 11, the method comprising the steps of:

a) acquiring actuation element measurement data (15) of the actuation element (12),

b) generating an adjustment signal (13) from the acquired actuation element measurement data (15), an

c) Monitoring a state of the control system (10) or the optical system (100) as a function of the actuation element measurement data (15), wherein pre-processing state data is generated as a function of:

(i) the acquired actuation element measurement data (15) and a Physical Model (PM) and/or a Mathematical Model (MM) of the actuation element (12), or

(ii) The acquired actuation element measurement data (15), a Physical Model (PM) and/or a Mathematical Model (MM) of the actuation element (12) and the generated adjustment signal (13),

and determining a state of the control system (10) or the optical system (100) from the pre-processing state data (33).

13. The method according to claim 12, wherein the optical system (100) is maintained according to the monitoring state.