阅读说明：本技术 一种微机电轮式双水平轴陀螺 (Micro-electromechanical wheel type double-horizontal-axis gyroscope ) 是由 赵前程 杨海兵 崔健 于 2019-10-09 设计创作，主要内容包括：本发明公开了一种微机电轮式双水平轴陀螺,用于检测围绕水平面内X、Y轴的旋转,其特征在于：它包括外框、外环、内框、内环、敏感质量块、驱动梳齿、驱动检测梳齿、驱动连接梁、连接梁、扭转梁、检测电极、锚点和衬底,整个陀螺结构同时关于器件平面的X轴和Y轴对称。驱动梳齿连接在外框上,驱动检测梳齿连接在内框上,外框一方面通过驱动连接梁和锚点连接,另一方面通过连接梁和外环连接,内框一方面通过中间连接梁和中间锚点连接,另一方面通过连接梁和内环连接,敏感质量块一方面通过扭转梁和外环连接,另一方面通过扭转梁和内环连接,检测电极位于敏感质量块下方并固定在衬底上,结构层通过锚点和衬底固定连接。(The invention discloses a micro electromechanical wheel type double-horizontal-axis gyroscope, which is used for detecting the rotation around an X, Y axis in a horizontal plane and is characterized in that: the gyroscope comprises an outer frame, an outer ring, an inner frame, an inner ring, a sensitive mass block, driving comb teeth, driving detection comb teeth, driving connecting beams, torsion beams, detection electrodes, anchor points and a substrate, wherein the whole gyroscope structure is symmetrical about an X axis and a Y axis of a device plane. The drive broach is connected on the frame, the drive detects the broach and connects on the inside casing, the frame passes through drive tie-beam and anchor point connection on the one hand, on the other hand passes through tie-beam and outer loop connection, the inside casing passes through middle tie-beam and middle anchor point connection on the one hand, on the other hand passes through tie-beam and interior loop connection, the sensitive quality piece passes through torsion beam and outer loop connection on the one hand, on the other hand passes through torsion beam and interior loop connection, detection electrode is located sensitive quality piece below and fixes on the substrate, the structural layer passes through anchor point and substrate.)

1. A microelectromechanical wheel-type dual-horizontal-axis gyroscope for sensing rotation about an axis X, Y in a horizontal plane, comprising: the gyroscope structure comprises an outer frame 101, an outer ring 102, an inner frame 103, an inner ring 104, a central sensitive mass 105, driving combs 106, driving detection combs 107, driving connection beams 108, connection beams [110, 113, 114], torsion beams [111, 112], detection electrodes [401, 402, 403, 404], anchor points [109, 115] and a substrate 500, wherein the whole gyroscope structure is symmetrical about an X axis and a Y axis of a device plane at the same time, namely, is symmetrical about the center of the device structure.

Drive combs 106 include movable drive combs 1061 and stationary drive combs 1062; the drive detection comb 107 includes a movable drive detection comb 1071 and a fixed drive detection comb 1072; the movable driving comb 1061 is connected to the outer frame 101; the movable drive detection comb 1071 is connected to the inner frame 103; the casing 101 is connected to the anchor point 109 via the drive connection beam 108 on the one hand, and to the outer ring 102 via the connection beam 110 on the other hand; the inner frame 103 is connected to the intermediate anchor point 115 via the intermediate connecting beam 114 on the one hand, and to the inner ring 104 via the connecting beam 113 on the other hand; the central proof mass 105 is connected to the outer ring 102 via the torsion beams 111 on the one hand and to the inner ring 104 via the torsion beams 112 on the other hand. The detection electrodes [401, 402, 403, 404] are positioned below the central proof mass 105 and fixed on the substrate 500, and the structural layers are fixedly connected with the substrate 500 through the anchor points [109, 115 ].

2. The micro-electromechanical wheel type double-horizontal-axis gyroscope of claim 1, wherein: electrostatic forces drive the drive combs 106, which may be one of single-sided and double-sided.

3. The micro-electromechanical wheel type double-horizontal-axis gyroscope of claim 1, wherein: the driving comb 106 is located at the outermost end of the gyroscope structure, the driving connecting beams 108 are distributed at the outer end of the outer frame 101, and the central connecting beam 114 is fixedly connected with the central anchor point 115.

4. The central connecting beam 114 and the central anchor point 115 of claims 1 and 3, wherein: the central connecting beam 114 passes through the geometric center of the structure and is distributed in a centrosymmetric way about the geometric center of the structure, and the central anchor points 115 are distributed in a centrosymmetric way about the geometric center of the structure.

5. The micro-electromechanical wheel type double-horizontal-axis gyroscope of claim 1, wherein: the outer and inner rings 102, 104 and the connecting beams [110, 113] and torsion beams [111, 112] associated therewith have the effect of decoupling between the two sensing modes and reducing the coupling of the sensing modes to the driving modes.

6. The micro-electromechanical wheel type double-horizontal-axis gyroscope of claim 1, wherein: the outer frame 101, the outer ring 102, the inner frame 103, the inner ring 104 and the central sensing mass 105 are circular ring structures, but not limited to circular ring structures.

7. The micro-electromechanical wheel type double-horizontal-axis gyroscope of claim 1, wherein: the driving state of the gyroscope is that the driving comb 105 drives the outer frame 101 to drive the whole structure to do angular vibration around the axial direction (Z axis) vertical to the plane of the device; when an angular velocity in the X direction in the horizontal direction is input, the central sensitive mass 105 is subjected to the Coriolis force to rotate around the Y axis through the torsion beam 111, and the input X direction angular velocity can be obtained through differential detection of the detection electrodes [403, 404] in the X direction; when an angular velocity in the horizontal direction Y is input, the central sensing mass 105 is subjected to the coriolis force and rotates around the X axis through the torsion beam 112, and the input X-direction angular velocity can be obtained through differential detection of the Y-direction detection electrodes [401, 402 ].

The technical field is as follows:

the invention belongs to the technical field of micro-electro-mechanical systems, and relates to a micro-electro-mechanical wheeled double-horizontal-axis gyroscope, which applies the micro-inertia sensor technology and is widely applied to the fields of automobile industry, aerospace, earthquake monitoring, consumer electronics and the like as a micro-inertia device.

Background art:

a gyroscope is a device that detects the angular velocity of the motion of an object. The micro-electro-mechanical gyroscope has the advantages of small volume, light weight, low cost, low power consumption, easy integration and the like, and is widely applied to the fields of aviation, aerospace, weapons, automobiles, consumer electronics and the like.

The Inertial Measurement Unit (IMU) is a unit formed by combining a single-axis gyroscope, a double-axis gyroscope or a three-axis gyroscope and an accelerometer, can simultaneously measure the acceleration and the angular velocity of three orthogonal axial directions of an object, can obtain information such as the velocity, displacement, direction and posture of the object through a series of data processing, and is widely applied to unmanned aerial vehicles, unmanned vehicles, robots, Virtual Reality (VR) and Augmented Reality (AR).

The performance of the Z-axis micro-electromechanical tuning fork gyroscope for detecting the angular velocity perpendicular to the surface of the device reaches a higher level at present. Thus, one idea behind multi-axis inertial sensors is the assembly of discrete components, assembling multiple single-axis (Z-axis) gyroscopes and accelerometers into an IMU. However, because a plurality of elements are assembled together, the volume is large, installation errors can be generated, different devices are difficult to be assembled in a strict orthogonal mode, the performance of the devices can be affected due to coupling among the different devices, and meanwhile, the requirement on process compatibility is high due to the assembly of the plurality of elements. At present, a single detection mass block gyroscope is the most widely researched and mature micro-electromechanical vibration gyroscope form, the structural form is easy to have the problem of sensitivity to linear acceleration in principle, and the resonant wheel type gyroscope can well solve the problem due to the completely symmetrical characteristic. The wheel type horizontal axis gyroscope is driven to vibrate angularly around an axis vertical to the plane of the device, when the angular velocity in the horizontal direction is input from the outside, the sensitive mass block can generate out-of-plane motion under the action of the Coriolis force, and the value of the angular velocity of the input horizontal axis can be obtained by detecting the change of capacitance between the sensitive mass block and a bottom electrode. Therefore, the horizontal axis gyroscope and the Z axis gyroscope are monolithically integrated on the same plane, and the size of the IMU device can be reduced. However, the horizontal axis gyroscope is an important research breakthrough in IMU research due to the existence of many design limitations. The Beijing university gyroscope group has already studied a certain amount of micro-electromechanical wheel-type horizontal axis gyroscopes, the wheel-type double-horizontal axis gyroscopes can simultaneously detect the X-axis input angular velocity and the Y-axis input angular velocity along the plane of the device due to the structural symmetry performance of the wheel-type double-horizontal axis gyroscopes, and the structural design realization and the performance improvement of the wheel-type double-horizontal axis gyroscopes are beneficial to the monolithic integration of multi-axis inertial devices.

The invention content is as follows:

the invention aims to provide a high-performance micro-electromechanical wheel type double-horizontal-axis gyroscope.

The invention relates to a wheel type double-horizontal-axis gyroscope, which mainly comprises an outer frame 101, an outer ring 102, an inner frame 103, an inner ring 104, a central sensitive mass block 105, connecting beams [108, 110, 113 and 114], torsion beams [111 and 112], a driving comb 106, a driving detection comb 107 and detection electrodes [401, 402, 403 and 404], and is characterized in that: the entire gyroscope structure is symmetrical about both the X-axis and the Y-axis along the plane of the device, i.e., centered about the center of the device structure.

The invention has the beneficial effects that: the driving comb 106 is connected to the outer frame 101, a driving force acts on the outer frame 101, so that the outer frame 101 performs back-and-forth angular vibration around an axial direction (Z axis) perpendicular to the device plane, and the outer frame 101 drives the outer ring 102, the central sensing mass 105, the inner ring 104 and the inner frame 103 to perform back-and-forth angular vibration at an equal angular rate through the connecting beams [110, 113] and the torsion beams [111, 112 ]. In order to inhibit the out-of-plane displacement caused by the existence of machining errors in the driving state, the driving comb teeth 106 are arranged at the outermost end, and the middle connecting beams 114 which pass through the geometric center of the structure and are symmetrically distributed about the geometric center are fixedly connected with the central anchor points 115 which are symmetrically distributed about the geometric center, so that the out-of-plane displacement of the central sensitive mass 105 when no angular velocity is input is reduced as much as possible. When an angular velocity along the X axial direction in the horizontal direction is input, the central sensitive mass block 105 is subjected to the Coriolis force to rotate around the Y axis, and the input angular velocity value can be obtained through differential detection electrodes [403, 403] in the X direction; when an angular velocity along the Y-axis direction in the horizontal direction is input, the central sensitive mass block 105 is subjected to the Coriolis force to rotate around the X-axis, the input angular velocity value can be obtained through the differential detection electrodes [401, 402] in the Y-direction, and the design of the outer ring 102, the inner ring 103, the relevant connecting beams [110, 113] and the torsion beams [111, 112] enables the driving mode and the detection mode of the double-horizontal-axis gyroscope applicable to the invention to be decoupled, and meanwhile, the two detection modes are also decoupled.

Drawings

Fig. 1 is a schematic view of a micro electromechanical wheel type dual-horizontal-axis gyroscope structure suitable for use in the present invention.

Fig. 2 is an enlarged view of the upper right portion of the structure of fig. 1.

FIG. 3 is an enlarged view of the middle portion of the structure of FIG. 1.

Fig. 4 is a schematic diagram of the distribution of the detection electrodes of the wheel-type double-horizontal-axis gyroscope applicable to the invention.

Fig. 5 is a schematic cross-sectional view of a wheeled bi-horizontal axis gyroscope along a certain direction.

Detailed Description

As shown in fig. 1, the micro electromechanical wheel type dual-horizontal axis gyroscope structure applicable to the present invention is composed of an outer frame 101, an outer ring 102, an inner frame 103, an inner ring 104, a central sensing mass 105, driving comb teeth 106, driving detection comb teeth 107, connection beams [108, 110, 113, 114], torsion beams [111, 112], anchor points [109, 115], bottom detection electrodes [401, 402, 403, 403] and a substrate 500. The whole structure is symmetrical about both the X-axis and the Y-axis, i.e. about the geometric center.

As shown in fig. 1, 2, and 3, in the wheel-type dual-horizontal-axis gyroscope, the outer frame 101 is connected to the anchor point 109 through the driving connection beam 108, the driving connection beam 108 and the anchor point 109 are distributed centrosymmetrically, and the driving connection beam 108 is generally a folding beam; the driving comb teeth 106 comprise movable driving comb teeth 1061 and fixed driving comb teeth 1062 connected to the outer frame 101, and the driving comb teeth 106 are distributed in a central symmetry manner; the outer frame 101 and the outer ring 102 are connected through a connecting beam 110, and the connecting beam 110 is distributed in a central symmetry way; the outer ring 102 and the central sensing mass 105 are connected through a torsion beam 111, and the torsion beam 111 is distributed in a central symmetry way; the central sensing mass 105 and the inner ring 104 are connected through a torsion beam 112, and the torsion beam 112 is distributed in a central symmetry way; the inner ring 104 and the inner frame 103 are connected through a connecting beam 113, and the connecting beam 113 is distributed in a central symmetry way; the drive detection comb 107 is composed of a movable drive detection comb 1071 and a fixed drive detection comb 1072 connected to the inner frame 103, and the drive detection comb 107 is distributed centrosymmetrically. The inner frame 103 is connected with a central anchor point 115 through a central connecting beam 114, the central connecting beam 114 passes through the geometric center of the structure and is symmetrically distributed with the geometric center of the structure, and the anchor point 115 is symmetrically distributed with the center.

FIG. 4 is a schematic diagram of the distribution of the detection electrodes of the wheeled bi-horizontal axis gyroscope, where the electrodes 401 and 402 are used for differential detection to detect Y-axis output; electrodes 403 and 404 detect differentially to detect the X-axis output.

Fig. 5 is a schematic cross-sectional view of a wheeled dual-horizontal-axis gyroscope applicable to the present invention along a certain direction, in which a detection electrode is fixed on a bottom substrate 500, and a gyroscope structure layer is fixed with the bottom substrate 500 through an anchor point structure. Typically the substrate material is glass.

The driving force generated by the driving comb 106 acts on the outer frame 101, so that the outer frame 101 performs back-and-forth angular vibration around the axial direction (Z axis) perpendicular to the device plane, and the outer frame 101 drives the outer ring 102, the central sensing mass 105, the inner ring 104 and the inner frame 103 to perform back-and-forth angular vibration at an equal angular rate through the connecting beams [110, 113] and the torsion beams [111, 112 ]. According to the invention, on one hand, the driving comb teeth 106 are arranged at the outermost end, and on the other hand, the center connecting beam 114 which passes through the geometric center of the structure and is centrally and symmetrically distributed is designed at the center and fixedly connected with the anchor point 115, so that the out-of-plane displacement of the central sensitive mass block 105 when no angular velocity is input under the gyro driving state caused by machining errors is reduced as much as possible. When an angular velocity along the horizontal direction X axis is input, the central sensing mass 105, subjected to the cole-elli force, will rotate around the Y axis through the torsion beam 111, and an input angular velocity value will be obtained through the differential detection electrodes 403 and 404 in the X direction; when an angular velocity along the Y-axis in the horizontal direction is input, the central sensing mass 105 is subjected to the coriolis force and will rotate around the X-axis through the torsion beam 112, and the input angular velocity value will be obtained through the differential detection electrodes 401 and 402 in the Y-axis. The design of the outer ring 102, the inner ring 103, the relevant connecting beams [108, 110, 113, 114] and the torsion beams [111, 112] ensures that the driving mode and the detection mode of the double-horizontal-axis gyroscope applicable to the invention are decoupled, and the two detection modes are also decoupled mutually.