阅读说明：本技术 基于极性J-TMDs/β-Ga2O3异质结的高速光电子器件及其制备方法 (Based on polar J-TMDS/beta-Ga2O3Heterojunction high-speed optoelectronic device and preparation method thereof ) 是由 苏杰 常晶晶 朱小强 袁海东 林珍华 郝跃 于 2020-12-18 设计创作，主要内容包括：本发明公开了一种基于极性J-TMDs/β-Ga-2O-3异质结的高速光电子器件及其制备方法,主要解决现有β-Ga-2O-3基光电子器件响应速度慢的问题。其包括衬底(1)、β-Ga-2O-3光吸收层(2)和金属源漏电极(4,5),衬底采用SiO-2/Si衬底,且SiO-2作为栅介质材料,Si作为底部的栅电极；β-Ga-2O-3光吸收层的上部设有极性J-TMDs层,用于与该光吸收层构成异质结,以抑制激子复合,使得电荷在异质结界面处快速转移；金属源电极位于β-Ga-2O-3层上的一端,金属漏电极位于极性J-TMDs层上与金属源电极相对的一端。本发明提升了界面处的传输性能,提高了器件的响应速度,可用于制备高性能的光电探测器。(The invention discloses a polarity-based J-TMDS/beta-Ga 2 O 3 A heterojunction high-speed photoelectronic device and a preparation method thereof, mainly solving the problem of the prior beta-Ga 2 O 3 The response speed of the base optoelectronic device is low. Comprising a substrate (1), beta-Ga 2 O 3 A light absorption layer (2) and metal source and drain electrodes (4,5), and SiO is adopted as the substrate 2 A substrate of/Si, and SiO 2 As a gate dielectric material, Si is used as a gate electrode at the bottom; beta-Ga 2 O 3 The light absorbing layer has a polarity J on its upper part-a TMDs layer for constituting a heterojunction with the light absorbing layer to suppress exciton recombination so that charges are rapidly transferred at the heterojunction interface; the metal source electrode is positioned in beta-Ga 2 O 3 One end of the layer, and a metal drain electrode at an end of the polar J-TMDs layer opposite the metal source electrode. The invention improves the transmission performance at the interface, improves the response speed of the device, and can be used for preparing a high-performance photoelectric detector.)

1. Polarity-based J-TMDS/beta-Ga₂O₃High-speed optoelectronic device of heterojunction comprising a substrate (1), beta-Ga₂O₃A light absorbing layer (2) and metal source-drain electrodes (4,5), characterized in that:

the substrate (1) adopts SiO₂And SiO prepared by P-type heavily doped Si₂A substrate of/Si, wherein SiO₂As a gate dielectric material, P-type heavily doped Si is used as a gate electrode at the bottom;

said beta-Ga₂O₃The light absorption layer (2) is provided with a polar transition metal sulfide J-TMDS layer (3) on the upper part and is used for forming a heterojunction with the light absorption layer and inhibiting exciton recombination so as to rapidly transfer charges;

the metal source electrode (4) is positioned at beta-Ga₂O₃One end of the layer (2) and the metal drain electrode (5) are located at the end of the polar J-TMDS layer (3) opposite to the metal source electrode (4).

2. A high speed optoelectronic device according to claim 1 wherein said SiO is₂In the/Si substrate (1), the thickness of the Si layer is 50-120 nm, and SiO is₂The layer thickness is 150-300 nm.

3. A high speed optoelectronic device according to claim 1 wherein said β -Ga₂O₃The thickness of the layer (2) is 60 to 200 nm.

4. The high-speed optoelectronic device according to claim 1, wherein the polar J-TMDs layer (3) is made of any one of Janus-MoSSe material, Janus-MoSeTe material and Janus-MoSTe material, and the thickness of the polar J-TMDs layer is 0.9-1.2 nm.

5. The high-speed optoelectronic device according to claim 1, wherein the metal source/drain electrodes (4,5) are made of any one of Au, Al and Ti/Au or an alloy, and the thickness is 100-150 nm.

6. Polarity-based J-TMDS/beta-Ga₂O₃The preparation method of the heterojunction high-speed optoelectronic device is characterized by comprising the following steps:

1) selecting SiO₂The method comprises the following steps of taking a/Si substrate as a substrate, cleaning the substrate by using acetone, isopropanol and deionized water, and drying the substrate by using nitrogen to finish pretreatment;

2) SiO after pretreatment₂Growing 60-200 nm thick beta-Ga on a/Si substrate by chemical vapor deposition or magnetron sputtering₂O₃A layer;

3) preparing a polar J-TMDS layer;

3a) cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 15-20 sccm;

3b) pre-treated SiO₂Placing the/Si substrate on a corundum boat at the center of the tube furnace, and adding MoO₃Placing the powder in a corundum boat close to the center in a tube furnace, and placing the sulfur powder at the upstream of a quartz tube;

3c) introducing high-purity argon with the purity of 99.99 percent into a quartz tube, heating sulfur powder, and generating a TMDS material, namely MoS, required by preparing a polar J-TMDS material through chemical vapor deposition₂The material, and then slowly cooled to room temperature;

3d) the MoS is stripped and replaced by hydrogen plasma with the flow rate of 20sccm under the pressure of 100mtorr₂Sulfur atoms on the top layer are 20min to obtain a MoSH material;

3e) placing selenium powder in a tube furnace, heating the quartz tube at the upstream of the quartz tube at the heating temperature of 130-240 ℃, carrying out controlled replacement reaction on the selenium powder and a MoSH material in the quartz tube at the temperature of 300-450 ℃ for 1H through conveying of mixed gas of argon and hydrogen, and replacing H atoms on the surface of the MoSH material with selenium atoms to obtain a polar J-TMDS layer;

4) transferring the polar J-TMDS layer and preparing a patterned polar J-TMDS layer;

4a) introducing argon gas serving as protective gas into the quartz tube, exhausting the gas in the quartz tube, and taking out the substrate;

4b) removing the substrate by wet etching, and transferring the polar J-TMDS layer to beta-Ga by using polymer polydimethylsiloxane PDMS and polymethyl methacrylate PMMA transfer printing₂O₃On the layer, the polar J-TMDS/beta-Ga is formed₂O₃A heterojunction structure;

4c) spin-coating photoresist on the transferred polar J-TMDS material, tightly contacting the polar J-TMDS layer with a mask, aligning, exposing, developing to obtain a patterned polar J-TMDS material layer, and washing away residual developing solution with deionized water;

5) in beta-Ga₂O₃And preparing a metal source electrode at one end of the upper part of the layer, and preparing a metal drain electrode at one end of the upper part of the polar J-TMDS layer, which is opposite to the metal source electrode, so as to finish the preparation of the whole device.

7. The method of claim 6, wherein the chemical vapor deposition in 2) is performed under the following process conditions: the reaction temperature is 500-700 ℃, the flow rate of the organic source is 15-25 sccm, and the flow rate of the carrier gas is 10-20 sccm.

8. The method of claim 6, wherein the chemical vapor deposition of 3c) is performed under the following process conditions: the reaction temperature is 750-800 ℃, the heating rate is 15-25 ℃/min, the reaction time is 10min after the furnace temperature is reached, and the thickness of the obtained TMDS material is 0.9-1.2 nm.

9. Polarity-based J-TMDS/beta-Ga₂O₃The preparation method of the heterojunction high-speed optoelectronic device is characterized by comprising the following steps:

selecting SiO₂a/Si substrate as a substrate, and acetone, isopropanol andcleaning with deionized water, and drying with nitrogen to finish pretreatment;

SiO after pretreatment₂Growing 60-200 nm thick beta-Ga on a/Si substrate by a magnetron sputtering process₂O₃A layer;

3. preparing a polar J-TMDs layer;

3.1) cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 15-20 sccm;

3.2) cleaning of the SiO₂Placing the/Si substrate on a corundum boat at the center of the tube furnace, and adding MoO₃Placing the powder in a corundum boat close to the center in a tube furnace, and placing selenium powder at the upstream of a quartz tube;

3.3) introducing high-purity argon with the purity of 99.99 percent into a quartz tube, heating selenium powder, generating a TMDS material required by preparing a polar J-TMDS material through chemical vapor deposition, and then slowly cooling to room temperature;

3.4) placing the sulfur powder in a tube furnace at the upstream of a quartz tube, heating to 140-160 ℃, and carrying out controlled replacement reaction with a TMDS material in the quartz tube at the temperature of 750-850 ℃ for 30min by conveying high-purity argon gas so as to replace selenium atoms on the surface of the TMDS material with sulfur atoms to obtain a polar J-TMDS layer;

transferring the polar J-TMDS layer and preparing a patterned polar J-TMDS layer;

4.1) introducing argon gas into the quartz tube as protective gas, exhausting the gas in the quartz tube, and taking out the substrate;

4.2) removing the substrate using wet etching and transferring the polar J-TMDs layer to the beta-Ga prepared in § 2 using polymer transfer₂O₃On the layer, the polar J-TMDS/beta-Ga is formed₂O₃A heterojunction structure;

4.3) spin-coating photoresist on the transferred polar J-TMDS material, closely contacting the polar J-TMDS layer by using a mask plate, aligning and exposing, developing to obtain a patterned polar J-TMDS material layer, and washing away residual developing solution by using deionized water;

5 in beta-Ga₂O₃Preparing a metal source electrode at one end of the upper part of the layerAnd preparing a metal drain electrode at one end of the upper part of the J-TMDS layer, which is opposite to the metal source electrode, so as to finish the preparation of the whole device.

10. The method of claim 9, wherein the magnetron sputtering of claim 2 is performed under the following process conditions:

the pressure is 0.5Pa, and the pressure is lower than the pressure,

the working power of the sputtering is 160W,

the sputtering gas was 99.99% high purity argon,

the sputtering time is 40-120 min.

Technical Field

The invention belongs to the technical field of semiconductor devices, and further relates to a high-speed photoelectronic device which is applied to the preparation of a high-performance photoelectric detector.

Background

Ga₂O₃The material is a transparent oxide semiconductor material, is an important member of wide bandgap semiconductor materials, and benefits from large-size Ga₂O₃The breakthrough of the single crystal preparation technology becomes a great research hotspot in the current semiconductor field. Ga₂O₃The material has 5 isomers of alpha, beta, gamma, epsilon and delta, wherein beta-Ga₂O₃The material is the most stable crystal structure. beta-Ga₂O₃The band gap width is very large, the band gap width is 4.2-4.9 eV, the absorption wavelength range corresponding to the band gap variation range is 253 nm-295 nm, the band gap variation range extends to a deep ultraviolet region, the transmittance of ultraviolet light is over 80 percent, and the band gap material has good light transmittance, thermal stability and chemical stability as a light absorption material and is a very excellent photoelectric device material; simultaneously, beta-Ga₂O₃Having 8MV cm^-1The breakdown field intensity of (2.5MV · cm) is SiC^-1) And GaN (3.3MV cm)^-1) Nearly three times of that of the GaN, the Barrisa plus merit (BFOM) reaches 3444, which is three times more than that of the GaN BFOM (846), and the electron saturation velocity is as high as 2 x 10⁷cm/s, has natural advantages in power devices and high-frequency devices. Thus, beta-Ga₂O₃Has wide application prospect in transparent conductive film, solar blind photoelectric detector and power device.

It is noted, however, that although beta-Ga₂O₃Has wide application prospect in photoelectronic devices, but beta-Ga₂O₃Ga based on single crystals, thin films and nanowires is limited by the properties of the material itself₂O₃Performance of optoelectronic devices. It was found that beta-Ga₂O₃The material can introduce oxygen vacancy and other defects in the preparation process, so that the material has high exciton recombination, and electron hole pairs cannot complete effective transmission. beta-Ga₂O₃Is about 1/4 for GaN material. Lower mobility affects Ga₂O₃Response speed of the electronic device.

At present, based on beta-Ga₂O₃The response speed of single crystal, thin film and nano-wire photoelectric detectors of materials is in the order of milliseconds or microseconds. In 2009, Japanese scholars R Sukuki et al in article "Vertical solar-bamboo deep-ultraviolet schottk photodetectors based on beta-Ga₂O₃Substratates proposes single-crystal beta-Ga₂O₃Preparation of Au/beta-Ga on substrate₂O₃The result of the photodetector with Shockley contact is shown in figure 1(a), and the maximum photoresponse of the annealed sample can reach 10³A/W, but the optical response time is only about 9ms, which is difficult to meet the actual requirement. 2013, Nakagomi et al, in the article Deep ultraviolet photodiodes based on beta-Ga₂O₃Growth of about 200nm of beta-Ga on P-type 6H-SiC substrates is proposed in/SiC heterejunction₂O₃Film of beta-Ga₂O₃As shown in fig. 1(b), although the photodetector formed by the/SiC heterojunction structure exhibits good rectification characteristics and good optical responsivity, the response time of the detector is still in the order of milliseconds, which is much longer than the response time of a mature silicon-based photodetector in the order of nanoseconds.

Therefore, how to effectively inhibit exciton recombination and improve beta-Ga₂O₃The electron mobility of the base device, so as to improve the response speed of the related electronic device, and is an urgent problem to be solved for preparing high-speed optoelectronic devices.

Disclosure of Invention

The invention aims to provide a polarity-based J-TMDS/beta-Ga device aiming at the defects of the prior device₂O₃The heterojunction high-speed photoelectronic device and the preparation method thereof effectively inhibit exciton recombination, enable charges to be rapidly transferred between heterojunctions, and improve the mobility of photon-generated carriers, thereby improving the response speed of the device and obtaining the high-performance high-speed photoelectronic device.

The basic idea of the invention is as follows: the construction of the heterojunction structure according to two-dimensional semiconductor materials such as transition metal sulfides and graphene can regulate and control key parameters of electronic devices, and MoSe₂The graphene heterojunction structure can generate rapid photon-generated carrier transfer, and graphene and beta-Ga₂O₃The heterojunction detector constructed by the method has the characteristic of short response time, and the method selects and uses a two-dimensional polar material and beta-Ga₂O₃Heterojunctions are constructed to improve the response speed of the device. Meanwhile, the two-dimensional polar J-TMDS material is used for being combined with beta-Ga according to the characteristics that the two-dimensional polar J-TMDS material has large band gap width, excellent chemical property, good thermal stability and obvious short channel effect inhibition effect, especially the polar chemical structure of the material can generate an intrinsic electric field in a crystal to effectively inhibit exciton recombination and enable charges to be rapidly transferred₂O₃Heterojunctions are constructed to improve the response speed of the device.

According to the above thought, the invention is realized as follows:

the invention is based on polar J-TMDS/beta-Ga₂O₃High speed heterojunction optoelectronic device comprising a substrate, beta-Ga₂O₃Light absorption layer and metal source-drain electrode, its characterized in that:

the substrate is made of SiO₂And SiO prepared by P-type heavily doped Si₂A substrate of/Si, wherein SiO₂As a gate dielectric material, P-type heavily doped Si is used as a gate electrode at the bottom;

said beta-Ga₂O₃A light absorbing layer with a J-TMDS layer on the upper part for forming a heterojunction with the light absorbing layer and inhibiting excitonsRecombination, enabling rapid charge transfer;

the metal source electrode is positioned in beta-Ga₂O₃One end of the layer, and a metal drain electrode at an end of the polar J-TMDs layer opposite the metal source electrode.

Further, the SiO₂In the/Si substrate, the thickness of the Si layer is 50-120 nm, and SiO is₂The layer thickness is 150-300 nm.

Further, the beta-Ga₂O₃The thickness of the layer is 60 to 200 nm.

Further, the two-dimensional polar J-TMDs layer is made of any one of a two-dimensional Janus-MoSSe material, a Janus-MoSeTe material and a Janus-MoSTe material, and the thickness of the two-dimensional polar J-TMDs layer is 0.9-1.2 nm.

Furthermore, the metal source and drain electrodes are made of any one of Au, Al and Ti/Au or alloy, and the thickness of the metal source and drain electrodes is 100-150 nm.

The method for preparing the device provides the following two technical schemes.

The technical scheme 1:

polarity-based J-TMDS/beta-Ga₂O₃The preparation method of the heterojunction high-speed optoelectronic device is characterized by comprising the following steps:

1) selecting SiO₂The method comprises the following steps of taking a/Si substrate as a substrate, cleaning the substrate by using acetone, isopropanol and deionized water, and drying the substrate by using nitrogen to finish pretreatment;

2) SiO after pretreatment₂Growing 60-200 nm thick beta-Ga on a/Si substrate by chemical vapor deposition or magnetron sputtering₂O₃A layer;

3) preparing a two-dimensional polar J-TMDS layer;

3a) cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 15-20 sccm;

3b) pre-treated SiO₂Placing the/Si substrate on a corundum boat at the center of the tube furnace, and adding MoO₃Placing the powder in a corundum boat close to the center in a tube furnace, and placing the sulfur powder at the upstream of a quartz tube;

3c) introducing high purity with the purity of 99.99 percent into a quartz tubeArgon gas is heated, sulfur powder is heated at the same time, and a two-dimensional TMDS material, namely two-dimensional MoS, required by preparing a polar J-TMDS material is generated through chemical vapor deposition₂The material, and then slowly cooled to room temperature;

3d) the MoS is stripped and replaced by hydrogen plasma with the flow rate of 20sccm under the pressure of 100mtorr₂Sulfur atoms on the top layer are 20min to obtain a MoSH material;

3e) placing selenium powder in a tube furnace, heating the quartz tube at the upstream of the quartz tube at the heating temperature of 130-240 ℃, carrying out controlled replacement reaction on the selenium powder and a MoSH material in the quartz tube at the temperature of 300-450 ℃ for 1H through conveying of mixed gas of argon and hydrogen, and replacing H atoms on the surface of the MoSH material with selenium atoms to obtain a two-dimensional polar J-TMDS layer;

4) transferring the polar J-TMDS layer and preparing a patterned polar J-TMDS layer;

4a) introducing argon gas serving as protective gas into the quartz tube, exhausting the gas in the quartz tube, and taking out the substrate;

4b) removing the substrate by wet etching, and transferring the two-dimensional polar J-TMDS layer to beta-Ga by using a transfer printing mode of polymer polydimethylsiloxane PDMS and polymethyl methacrylate PMMA₂O₃On the layer, the polar J-TMDS/beta-Ga is formed₂O₃A heterojunction structure;

4c) spin-coating photoresist on the transferred polar J-TMDS material, tightly contacting the two-dimensional polar J-TMDS layer by using a mask, aligning, exposing and developing to obtain a patterned two-dimensional polar J-TMDS material layer, and washing away residual developing solution by using deionized water;

5) in beta-Ga₂O₃And preparing a metal source electrode at one end of the upper part of the layer, and preparing a metal drain electrode at one end of the upper part of the polar J-TMDS layer, which is opposite to the metal source electrode, so as to finish the preparation of the whole device.

The technical scheme 2 is as follows:

polarity-based J-TMDS/beta-Ga₂O₃The preparation method of the heterojunction high-speed optoelectronic device is characterized by comprising the following steps:

selecting SiO₂a/Si substrate as a substrate, and acetone, isopropyl alcoholCleaning with propanol and deionized water, and blow-drying with nitrogen to complete pretreatment.

SiO after pretreatment₂Growing 60-200 nm thick beta-Ga on a/Si substrate by a magnetron sputtering process₂O₃And (3) a layer.

3. preparation of two-dimensional polar J-TMDS layers.

3.1) cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 15-20 sccm;

3.2) cleaning of the SiO₂Placing the/Si substrate on a corundum boat at the center of the tube furnace, and adding MoO₃Placing the powder in a corundum boat close to the center in a tube furnace, and placing selenium powder at the upstream of a quartz tube;

3.3) introducing high-purity argon with the purity of 99.99 percent into a quartz tube, heating selenium powder, generating a two-dimensional TMDS material required by preparing a polar J-TMDS material through chemical vapor deposition, and slowly cooling to room temperature;

and 3.4) placing the sulfur powder in a tube furnace at the upstream of a quartz tube, heating to 140-160 ℃, and carrying out controlled replacement reaction with a two-dimensional TMDS material in the quartz tube at the temperature of 750-850 ℃ for 30min by conveying high-purity argon gas so as to replace selenium atoms on the surface of the TMDS material with sulfur atoms to obtain a two-dimensional polar J-TMDS layer.

Transfer printing the polar J-TMDS layer, and preparing the patterned polar J-TMDS layer.

4.1) introducing argon gas into the quartz tube as protective gas, exhausting the gas in the quartz tube, and taking out the substrate;

4.2) removing the substrate using wet etching and transferring the two-dimensional polar J-TMDS layer to § 2 prepared beta-Ga using Polymer transfer₂O₃On the layer, the polar J-TMDS/beta-Ga is formed₂O₃A heterojunction structure;

and 4.3) spin-coating photoresist on the transferred polar J-TMDS material, closely contacting the two-dimensional polar J-TMDS layer by using a mask plate, aligning, exposing, developing to obtain a patterned two-dimensional polar J-TMDS material layer, and washing away residual developing solution by using deionized water.

5. in beta-Ga₂O₃And preparing a metal source electrode at one end of the upper part of the layer, and preparing a metal drain electrode at one end of the upper part of the polar J-TMDS layer, which is opposite to the metal source electrode, so as to finish the preparation of the whole device.

Compared with the prior art, the invention has the following advantages:

first, the present invention uses polar J-TMDS material and beta-Ga₂O₃The layers form a heterojunction structure, and an intrinsic electric field is generated inside the crystal through a polar chemical structure of the two-dimensional polar J-TMDS material, so that exciton recombination can be effectively inhibited, charges can be rapidly transferred between the heterojunction, and the response speed of the device is improved.

Secondly, the invention can generate a built-in electric field in the device due to the asymmetrical distribution of the metal source and drain electrodes, so as to effectively improve the separation and transmission of carriers at the interface and effectively improve the performance of the device.

Thirdly, the invention can realize the accurate control of the thickness of the two-dimensional polar J-TMDS layer by controlling the time of growing the two-dimensional TMDS material by chemical vapor deposition and the time of the controlled replacement reaction of the two-dimensional TMDS material, thereby realizing the accurate control of the size of the device and effectively improving the performance of the device.

Fourthly, the polar J-TMDS layer is prepared through chemical vapor deposition and controlled replacement reaction, so that Van der Waals force connection is formed between the polar J-TMDS layer and the substrate, the polar J-TMDS layer is conveniently stripped and transferred to a proper substrate, and meanwhile, the defect of the stripped and transferred polar J-TMDS material is less, the effect of fine patterning treatment on the polar J-TMDS layer can be improved, and the performance of the device is further improved.

Drawings

FIG. 1 shows a conventional beta-Ga-based alloy₂O₃A schematic view of an optoelectronic device of a material;

FIG. 2 is a diagram of the structure of a device of the present invention;

FIG. 3 is a flow chart of a first implementation of a method of making a device of the present invention;

fig. 4 is a flow chart of a second embodiment implementation of a device of the present invention.

Detailed Description

In order to make the technical solutions of the present invention better understood and implemented by those skilled in the art, the present invention is further explained below with reference to the accompanying drawings and examples.

Referring to fig. 2, the device structure of the present invention comprises a base substrate 1, beta-Ga₂O₃Layer 2, polar J-TMDs layer 3, and metal source drain electrodes 4 and 5.

The substrate 1 adopts SiO₂And SiO prepared by P-type heavily doped Si₂A substrate of/Si, wherein SiO₂The thickness of the gate dielectric material is 150-300 nm, and the thickness of the gate dielectric material is 50-120 nm, wherein the P-type heavily doped Si is used as a gate electrode at the bottom;

said beta-Ga₂O₃The layer 2 is positioned on the upper part of the substrate 1 and has the thickness of 60-200 nm;

the polar J-TMDS layer 3 is positioned in beta-Ga₂O₃Upper part of layer 2, with beta-Ga₂O₃The layer 2 forms a heterojunction, inhibits exciton recombination and enables charges to be transferred rapidly, the polar J-TMDS layer adopts any one of a two-dimensional Janus-MoSSe material, a Janus-MoSeTe material and a Janus-MoSTe material, and the thickness of the polar J-TMDS layer is 0.9-1.2 nm;

the metal source electrode 4 is positioned at beta-Ga₂O₃And one end of the upper part of the layer 2 and one end of the metal drain electrode 5, which is opposite to the metal source electrode 4, on the polar J-TMDS layer 3 are both made of any one metal or alloy of gold Au, aluminum Al and titanium-gold Ti/Au, and the thickness of the metal source electrode is 100-150 nm.

The invention provides three examples of the method for preparing the device as follows:

example 1: preparation of SiO₂The thickness of the gate dielectric layer is 150 nm; beta-Ga₂O₃The surface area of the layer is 1cm²The thickness is 60 nm; TMDS layer is MoS₂The material is characterized in that the polar J-TMDS layer is a two-dimensional Janus-MoSSe material, and the thickness is 1 nm; the source and drain electrodes are made of Al metal and have a thickness of 100nm and are based on polarity J-TMDS/beta-Ga₂O₃High speed optoelectronic devices of heterojunction.

Referring to fig. 3, the implementation steps of this example are as follows:

step 1: pretreatment of SiO₂a/Si substrate.

1.1) selecting SiO₂The layer thickness was 150nm and the area 1cm²SiO of (2)₂a/Si substrate, placing the substrate in a beaker, ultrasonically cleaning the substrate in an acetone solution for 10-20 min, then placing the substrate in an ethanol solution, cleaning the substrate for 10-20 min, removing residual acetone, and finally ultrasonically cleaning the substrate in deionized water for 5 min;

1.2) drying the cleaned substrate by nitrogen to obtain the pretreated SiO₂a/Si substrate.

Step 2: preparation of beta-Ga by chemical vapor deposition₂O₃And (3) a layer.

2.1) cleaning a reaction chamber of the tubular furnace by adopting argon with the flow of 15-20 sccm;

2.2) pretreating the finished SiO₂Putting the/Si substrate into a tray of the reaction chamber, and vacuumizing the reaction chamber by opening a vacuum pump to reduce the pressure in the reaction chamber to 10^-1Pa magnitude order;

2.3) turning on the power supply to make the tray rotate at the speed of 600r/min, so that the substrate is uniformly heated, and the beta-Ga with good growth quality is obtained₂O₃A layer;

2.4) heating the temperature of the center of the reaction chamber to 600 ℃ at a heating rate of 50 ℃/min while rotating the tray;

2.5) when the temperature reaches a preset value, firstly introducing high-purity nitrogen, and controlling the pressure of the reaction chamber to 30Pa by matching with a pressure controller;

2.6) argon gas with a flow rate of 10sccm was introduced into the reaction chamber as a carrier gas, and Ga (C) was introduced at a flow rate of 20sccm₂H₅)₃An organic source, after the flow of the organic source is kept stable, high-purity oxygen is introduced at the flow of 80sccm to generate beta-Ga₂O₃Depositing on the surface of the substrate;

2.7) after growing for 10-15 min, closing the organic source gas circuit, closing oxygen introduction, stopping heating the center of the reaction chamber and rotating the tray, slowly cooling the reaction chamber to room temperature, closing the pressure controller when the temperature reaches the room temperature, and introducing high-purity gas with the flow of 15-20 sccmPurging the reaction chamber with nitrogen gas, recovering the pressure to be equal to the external pressure, and taking out the epitaxial wafer to obtain the SiO₂beta-Ga with thickness of 60nm on/Si substrate₂O₃And (3) a layer.

And step 3: chemical vapor deposition is used to prepare two-dimensional transition metal sulfide TMDs materials.

3.1) cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 15 sccm;

3.2) area of 1cm²SiO of (2)₂the/Si substrate is placed on a corundum boat in the center of the quartz tube, the sulfur powder with the purity of more than 99.5 percent is placed at the upstream of the quartz tube, and the MoO with the purity of more than 99.5 percent is placed₃Placing the powder in a corundum boat close to the center in a tubular furnace;

3.3) introducing high-purity argon with the flow of 100sccm into the quartz tube, and controlling the chamber pressure at 40 torr;

3.4) heating the central furnace to 750 ℃ at the heating rate of 15 ℃/min while introducing argon, heating the sulfur powder on the upstream of the quartz tube to 150 ℃, and preserving heat for 10min on the basis of the temperature to obtain the two-dimensional MoS₂A material. After completion, the quartz tube was naturally cooled to room temperature.

And 4, step 4: two-dimensional MoS Using Hydrogen plasma₂Sulfur atoms on the surface of the material are replaced by H atoms to form a MoSH material.

4.1) MoS₂Placing a sample on a quartz bracket in a quartz tube, placing a plasma coil at the upstream position of the sample, and keeping the distance between the center of the plasma coil and the sample to be 10 cm;

4.2) pumping the bottom pressure to 1mtorr, removing residual air in the room, and keeping the sample at room temperature;

4.3) exfoliation substitution of MoS with a hydrogen plasma at a flow rate of 20sccm at a pressure of 100mtorr₂And (4) sulfur atoms on the top layer of the material are 20min, so that the MoSH material is obtained.

And 5: preparing two-dimensional polar J-TMDs material.

5.1) carrying out the replacement reaction of the H element in the same tube furnace on the premise of not damaging the vacuum condition in the quartz tube, namely moving a corundum boat containing selenium powder, which is placed at the upstream tail end of a plasma coil in advance, to the edge of a main furnace by using a magnet;

5.2) heating the selenium powder to 150 ℃, introducing the mixture of hydrogen and argon with the flow rates of 5sccm and 65sccm into a quartz tube by using the mixture as carrier gas, keeping the pressure at 35torr, raising the temperature of a main furnace to 400 ℃ at the speed of 20 ℃/min, keeping the temperature for 1h, and then slowly lowering the temperature to room temperature to obtain the single-layer polar Janus-MoSSe two-dimensional material with the thickness of 1nm after sulfur replacement.

Step 6: the polar J-TMDS layer was transferred and a patterned polar J-TMDS layer was prepared.

6.1) introducing argon to exhaust gas in the quartz tube, taking out the polar J-TMDS material prepared on the substrate, spin-coating a layer of polymethyl methacrylate PMMA with the thickness of 100nm on the surface of the two-dimensional polar J-TMDS material to support and protect the two-dimensional polar J-TMDS layer, heating for 5min at 100 ℃, and drying to ensure that the PMMA is fully contacted with the two-dimensional polar J-TMDS layer; then PMMA/polar J-TMDS/SiO₂Putting the/Si structure into 10% hydrofluoric acid solution, wet etching for 60min, and removing SiO₂a/Si substrate and transferring the separated two-dimensional polar J-TMDs material to beta-Ga using PDMS stamp₂O₃Upper part of layer and beta-Ga₂O₃Forming a heterojunction structure;

6.2) spin-coating photoresist on the two-dimensional polar J-TMDS layer, soft-baking for 1.5min at 100 ℃ to ensure the stability of the photoresist, closely contacting the two-dimensional polar J-TMDS material with a mask plate, aligning and exposing, developing for 40s to obtain a patterned two-dimensional polar J-TMDS material layer, and cleaning residual developing solution with deionized water.

And 7: by vapor deposition on beta-Ga through a mask₂O₃And preparing a metal source electrode at one end of the upper part of the layer, and preparing a metal drain electrode at one end of the upper part of the polar J-TMDS layer, which is opposite to the metal source electrode.

7.1) preparation of SiO₂substrate/beta-Ga of/Si₂O₃Putting the/polarity J-TMDs device structure into a vacuum chamber through a mask plate, and vacuumizing to reduce the pressure of the vacuum chamber to 10^-5Pa below;

7.2) passing Al through a mask to form AlIs evaporated to a two-dimensional polar J-TMDS layer and beta-Ga₂O₃On a layer of beta-Ga₂O₃A metal source electrode having a thickness of 100nm was obtained at one end of the upper portion of the layer, and a metal drain electrode having a thickness of 100nm was obtained at the end of the upper portion of the polar J-TMDS layer opposite to the metal source electrode.

Example 2: preparation of SiO₂The thickness of the gate dielectric layer is 200 nm; beta-Ga₂O₃The surface area of the layer is 1cm²The thickness is 120 nm; the TMDS layer is MoSe₂The material is characterized in that the polar J-TMDS layer is a two-dimensional Janus-MoSSe material, and the thickness is 1 nm; the source and drain electrodes are made of Au metal and have a thickness of 120nm and are based on polarity J-TMDS/beta-Ga₂O₃High speed optoelectronic devices of heterojunction.

Referring to fig. 4, the implementation steps of this example are as follows:

the method comprises the following steps: pretreatment of SiO₂a/Si substrate.

1a) Selecting SiO₂Layer thickness of 200nm and area of 1cm²SiO of (2)₂a/Si substrate, placing the substrate in a beaker, ultrasonically cleaning the substrate in an acetone solution for 10-20 min, then placing the substrate in an ethanol solution, cleaning the substrate for 10-20 min, removing residual acetone, and finally ultrasonically cleaning the substrate in deionized water for 5 min;

1b) drying the cleaned substrate by nitrogen to obtain pretreated SiO₂a/Si substrate.

Step two: magnetron sputtering technology for growing beta-Ga₂O₃And (3) a layer.

2a) SiO after pretreatment₂the/Si substrate is placed on a glass slide of a growth chamber, and the degree of vacuum of pre-sputtering in the growth chamber is pumped to 2X 10 by a vacuum pump^-3Pa；

2b) Selecting an ultra-high purity gallium oxide ceramic target material with the purity of more than 99.999 percent as a target material for magnetron sputtering, putting the target material into a growth chamber, and introducing high purity argon with the purity of more than 99.99 percent into the growth chamber as sputtering gas for magnetron sputtering;

2c) before magnetron sputtering starts, a baffle plate is used for blocking a substrate, the working power of sputtering is set to be 160W, sputtering gas is introduced, the pressure is controlled to be 0.5Pa, and pre-sputtering is started;

2d) after the pre-sputtering is carried out for 10min, the baffle is removed, and the sputtering growth of the beta-Ga on the substrate is started₂O₃Layer, when sputtering time is 40min, beta-Ga with thickness of 120nm is obtained₂O₃Closing gas introduction and a vacuum pump, taking out the layer, and growing the layer on SiO by magnetron sputtering₂beta-Ga on a/Si substrate₂O₃And (3) a layer.

Step three: two-dimensional transition metal sulfide TMDs materials are prepared using chemical vapor deposition.

3a) Cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 18 sccm;

3b) the area is 1cm²SiO of (2)₂the/Si substrate is placed on a corundum boat in the center of the quartz tube, the selenium powder with the purity of more than 99.5 percent is placed at the upstream of the quartz tube, and the MoO with the purity of more than 99.5 percent is placed₃Placing the powder in a corundum boat close to the center in a tubular furnace;

3c) introducing a mixed gas of hydrogen and argon with the flow rates of 8sccm and 20sccm respectively into a quartz tube as a carrier, heating the temperature of the center of the furnace to 750 ℃ at the rate of 20 ℃/min, simultaneously heating the selenium powder to 345 ℃, and keeping the temperature for 10min to obtain two-dimensional MoSe₂And (3) after the selenization process is finished, slowly cooling the quartz tube to room temperature.

Step four: preparing two-dimensional polar J-TMDs material.

Sulfur powder is placed at the upstream of a quartz tube, and the prepared two-dimensional MoSe is₂The material is placed on a corundum boat in the center of a quartz tube, 99.99% of high-purity argon is introduced as carrier gas, the furnace temperature center is heated to 800 ℃, sulfur powder is heated to 150 ℃, the temperature is kept for reaction for 30min, and the two-dimensional polar Janus-MoSSe material with the thickness of 1nm is obtained.

Step five: the polar J-TMDS layer was transferred and a patterned polar J-TMDS layer was prepared.

This step was carried out in the same manner as in step 6 of example 1.

Step six: by vapor deposition on beta-Ga through a mask₂O₃And preparing a metal source electrode at one end of the upper part of the layer, and preparing a metal drain electrode at one end of the upper part of the polar J-TMDS layer, which is opposite to the metal source electrode.

6a) Prepared SiO₂/Si/β-Ga₂O₃Putting the/two-dimensional polar J-TMDS layer structure into a vacuum chamber through a mask plate, and vacuumizing to reduce the pressure of the vacuum chamber to 10^-5Pa below;

6b) through a mask, the Au is metallizedIs evaporated to a two-dimensional polar J-TMDS layer and beta-Ga₂O₃On a layer of beta-Ga₂O₃A metal source electrode having a thickness of 120nm was obtained at one end of the upper portion of the layer, and a metal drain electrode having a thickness of 120nm was obtained at the end of the upper portion of the polar J-TMDS layer opposite to the metal source electrode.

Example 3: preparation of SiO₂The thickness of the gate dielectric layer is 300 nm; beta-Ga₂O₃The surface area of the layer is 1cm²The thickness is 180 nm; TMDS layer is MoS₂The material is characterized in that the polar J-TMDS layer is a two-dimensional Janus-MoSSe material, and the thickness is 1 nm; the source and drain electrodes are made of Ti/Au alloy and have a thickness of 150nm based on polarity J-TMDS/beta-Ga₂O₃High speed optoelectronic devices of heterojunction.

Referring to fig. 3, the implementation steps of this example are as follows:

step A: pretreatment of SiO₂a/Si substrate.

Selecting SiO₂Layer thickness of 300nm and area of 1cm²SiO of (2)₂a/Si substrate, placing the substrate in a beaker, and ultrasonically cleaning the substrate in an acetone solution for 10-20 min; then, the substrate is placed in an ethanol solution to be cleaned for 10-20 min, residual acetone is removed, the substrate is cleaned in deionized water for 5min in an ultrasonic mode, the cleaned substrate is dried by blowing with nitrogen, and the pretreated SiO is obtained₂a/Si substrate.

And B: magnetron sputteringGrowth of beta-Ga₂O₃And (3) a layer.

SiO after pretreatment₂The substrate is placed on a glass slide of a growth chamber, and the degree of vacuum of pre-sputtering in the growth chamber is pumped to 2 × 10 by a vacuum pump^-3Pa; then selecting an ultra-high purity gallium oxide ceramic target material with the purity of more than 99.999 percent as a target material for magnetron sputtering to be put into a growth chamber; then introducing high-purity argon with the purity of more than 99.99 percent into the growth chamber as sputtering gas of magnetron sputtering; before magnetron sputtering starts, a baffle plate is used for blocking a substrate, the working power of sputtering is set to be 160W, sputtering gas is introduced, the pressure is controlled to be 0.5Pa, and pre-sputtering is started;

after the pre-sputtering is carried out for 10min, the baffle plate is removed, and the sputtering growth of the beta-Ga on the substrate is started₂O₃Material, when the sputtering time is 1h, beta-Ga with the thickness of 180nm is obtained₂O₃Closing gas introduction and a vacuum pump, taking out the layer, and growing the layer on SiO by magnetron sputtering₂beta-Ga on a/Si substrate₂O₃And (3) a layer.

And C: chemical vapor deposition is used to prepare two-dimensional TMDs materials.

Cleaning a quartz tube and a corundum boat of the tube furnace by adopting argon with the flow of 20 sccm; then the area is 1cm²SiO of (2)₂the/Si substrate is placed on a corundum boat in the center of the quartz tube, sulfur powder with the purity of more than 99.5 percent is placed at the upstream of the quartz tube, and MoO with the purity of more than 99.5 percent is placed₃Placing the powder in a corundum boat close to the center in a tubular furnace; then introducing high-purity argon with the flow of 100sccm into the quartz tube, and controlling the chamber pressure at 40 torr; while introducing argon, heating the central furnace to 800 ℃ at a heating rate of 25 ℃/min, heating the sulfur powder on the upstream of the quartz tube to 150 ℃, and preserving heat for 10min on the basis of the temperature to obtain two-dimensional MoS₂And (4) after finishing the material, naturally cooling the quartz tube to room temperature.

Step D: two-dimensional MoS Using Hydrogen plasma₂Sulfur atoms on the surface of the material are replaced by H atoms to form a MoSH material.

Mixing MoS₂The sample is placed on a quartz support at the center of a quartz tube and placed on the samplePlacing a plasma coil at the upstream position of the sample, and keeping the distance between the center of the plasma coil and the sample to be 10 cm; then pumping the bottom pressure of the quartz tube to 1mtorr, removing residual air in the room, and keeping the sample at room temperature; then the MoS is stripped and replaced by hydrogen plasma with the flow rate of 20sccm under the pressure of 100mtorr₂And (4) sulfur atoms on the top layer of the material are 20min, so that the MOSH material is obtained.

Step E: preparing two-dimensional polar J-TMDs material.

Keeping the vacuum condition in the quartz tube, carrying out the replacement reaction of the H element in the same tube furnace, namely moving a corundum boat containing selenium powder, which is placed at the upstream end of a plasma coil in advance, to the edge of a main furnace by using a magnet, heating the selenium powder to 240 ℃, and introducing hydrogen and argon mixed gas with the flow of 5sccm and 65sccm respectively serving as carrier gas into the quartz tube to keep the pressure at 35torr, heating to 450 ℃ at the speed of 20 ℃/min, and keeping for 1H; then slowly cooling to room temperature to obtain the polar Janus-MoSSe two-dimensional material with the thickness of 1nm after sulfur replacement.

Step F: the polar J-TMDS layer was transferred and a patterned polar J-TMDS layer was prepared.

This step was carried out in the same manner as in step 6 of example 1.

Step G: by vapor deposition on beta-Ga through a mask₂O₃And preparing a metal source electrode at one end of the upper part of the layer, and preparing a metal drain electrode at one end of the upper part of the polar J-TMDS layer, which is opposite to the metal source electrode.

Prepared SiO₂/Si/β-Ga₂O₃Putting the/polarity J-TMDs structure into a vacuum chamber through a mask plate, and vacuumizing to reduce the pressure of the vacuum chamber to 10^-5Pa below; then Ti/Au alloy is coated by a mask plateIs evaporated to a two-dimensional polar J-TMDS layer and beta-Ga₂O₃On a layer of beta-Ga₂O₃A metal source electrode with a thickness of 150nm was obtained at one end of the upper part of the layer, and a metal drain electrode with a thickness of 150nm was obtained at the end of the upper part of the polar J-TMDS layer opposite to the metal source electrode。

While the foregoing is directed to three specific embodiments of the present invention and is not intended to limit the invention, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.