阅读说明：本技术 一种基于迈克尔逊干涉的台阶仪探针 (Step appearance probe based on michelson is interfered ) 是由 李文海 于 2020-11-26 设计创作，主要内容包括：本发明涉及实验设备技术领域,且公开了一种基于迈克尔逊干涉的台阶仪探针,包括固定架,固定架的中心固定设置有准直器,准直器中心的上部设置有准直透镜,准直器的上部耦接有总线光纤,总线光纤的上端设置有分光器,分光器的上方设置有输入光纤,分光器的右侧设置有输出光纤,准直器中心的下部耦接有耦合光纤,耦合光纤的下段固定连接有顶盖,顶盖的下方设置有氩气室,氩气室的上端连接有两根气管,氩气室的下端固定连接有测头支架。该基于迈克尔逊干涉的台阶仪探针,通过在耦合光纤内设置耦合器和环形镜,使得干涉位置在耦合光纤内,借助支架固定,大大减小了各种振动干扰,且光感偏移的方式相比电感不会受到磁场干扰,更为稳定。(The invention relates to the technical field of experimental equipment and discloses a step profiler probe based on Michelson interference, which comprises a fixed frame, wherein a collimator is fixedly arranged at the center of the fixed frame, a collimating lens is arranged at the upper part of the center of the collimator, a bus optical fiber is coupled to the upper part of the collimator, a light splitter is arranged at the upper end of the bus optical fiber, an input optical fiber is arranged above the light splitter, an output optical fiber is arranged at the right side of the light splitter, a coupling optical fiber is coupled to the lower part of the center of the collimator, a top cover is fixedly connected to the lower section of the coupling optical fiber, an argon gas chamber is arranged below the top cover, two gas pipes are connected to the upper end of the argon gas chamber. This step appearance probe based on michelson interferes through set up coupler and annular mirror in coupling optic fibre for the interference position is fixed with the help of the support in coupling optic fibre, has reduced various vibration interferences greatly, and the inductance can not receive magnetic field interference, and is more stable is compared to the mode that the light sense squinted.)

1. The utility model provides a step appearance probe based on michelson is interfered, includes mount (1), its characterized in that: the center of the fixing frame (1) is fixedly provided with a collimator (2), the upper part of the center of the collimator (2) is provided with a collimating lens (3), the upper part of the collimator (2) is coupled with a bus optical fiber (4), the upper end of the bus optical fiber (4) is provided with a light splitter (5), an input optical fiber (6) is arranged above the light splitter (5), the right side of the light splitter (5) is provided with an output optical fiber (7), the lower part of the center of the collimator (2) is coupled with a coupling optical fiber (8), the lower section of the coupling optical fiber (8) is fixedly connected with a top cover (9), the lower part of the top cover (9) is provided with an argon gas chamber (10), the upper end of the argon gas chamber (10) is connected with two gas pipes (11), the lower end of the argon gas chamber (10) is fixedly connected with a measuring head bracket (12), the center of the measuring head bracket (, the coupling optical fiber comprises a needle-shaped measuring head (13), and is characterized in that a high-reflection mirror (14) is arranged at the top end of the needle-shaped measuring head (13), an inner core (81) is arranged at the center of the coupling optical fiber (8), a high-transmittance cladding layer (82) is coated outside the inner core (81), an outer skin (83) is coated outside the high-transmittance cladding layer (82), a coupler (84) is arranged at the upper section of the coupling optical fiber (8), and an annular mirror (85) is arranged at the lower section of the coupling optical fiber (.

2. The michelson interference-based step-meter probe according to claim 1, wherein: the bus optical fiber (4), the input optical fiber (6) and the output optical fiber (7) all use single-mode optical fibers.

3. The michelson interference-based step-meter probe according to claim 1, wherein: the coupling fiber (8) is a multimode fiber, and the cladding material is also a material having good light transmittance.

4. The michelson interference-based step-meter probe according to claim 1, wherein: the argon air chamber (10) is connected with the upper end and the lower end in a sealing way, and an air pipe (11) connected with the upper end of the argon air chamber is not provided with an inlet and an outlet.

5. The michelson interference-based step-meter probe according to claim 1, wherein: and a mechanism for limiting the descending and ascending limit positions of the needle-shaped measuring head (13) is arranged in the measuring head bracket (12).

6. The michelson interference-based step-meter probe according to claim 1, wherein: the coupler (84) is arranged to intercept the coupling fiber (8), and the upper and lower surfaces are fused with the intercepted fiber.

7. The michelson interference-based step-meter probe according to claim 1, wherein: the annular mirror (85) is of an annular structure with a mirror surface on the upper surface, the inner diameter of the annular mirror is consistent with the diameter of the high-transmittance inner core (81), and the upper surface and the lower surface of the annular mirror are welded with cut optical fibers.

Technical Field

The invention relates to the technical field of experimental equipment, in particular to a step profiler probe based on Michelson interference.

Background

Michelson interference is the process of changing the optical path length of two beams of light to form different interference patterns on a light screen. The interference fringe is a track with equal optical path difference, so that the function of the optical path difference position distribution of coherent light of two beams with the same wavelength is also fixed, and the optical path difference change can be calculated by recording the interference fringe change on the optical screen.

A step appearance belongs to a contact type surface appearance measuring instrument. The measurement principle is as follows: when the probe slides lightly along the surface to be detected, the micro peak valley of the surface makes the contact pin move up and down along the peak valley while sliding. The motion of the probe reflects the surface profile. The up-and-down motion signal of the probe is captured and converted into an electric signal, and the electric signal is subjected to noise reduction, filtering, demodulation and other circuits, and then the accurate displacement of the probe deviating from the balance position is recorded so as to represent the surface appearance of the measured object.

The existing step appearance probe mostly uses a capacitive sensor, has high sensitivity and a simple probe structure, but has a complex subsequent noise reduction circuit, the measurement precision is seriously reduced along with the aging of capacitance, the fluctuation is large due to the electromagnetic influence, the low-frequency corresponding time is long, and the whole service life is short.

Disclosure of Invention

Technical problem to be solved

Aiming at the defects of the prior art, the invention provides the step profiler probe based on the Michelson interference, which has the advantages of electromagnetic interference resistance and high response speed, and solves the problems of high aging speed and low-frequency response speed of the traditional capacitance probe.

(II) technical scheme

In order to achieve the purposes of electromagnetic interference resistance and high response speed, the invention provides the following technical scheme: a step profiler probe based on Michelson interference comprises a fixing frame, wherein a collimator is fixedly arranged at the center of the fixing frame, a collimating lens is arranged at the upper part of the center of the collimator, a bus optical fiber is coupled to the upper part of the collimator, a light splitter is arranged at the upper end of the bus optical fiber, an input optical fiber is arranged above the light splitter, an output optical fiber is arranged on the right side of the light splitter, a coupling optical fiber is coupled to the lower part of the center of the collimator, a top cover is fixedly connected to the lower section of the coupling optical fiber, an argon gas chamber is arranged below the top cover, two gas pipes are connected to the upper end of the argon gas chamber, a probe support is fixedly connected to the lower end of the argon gas chamber, a needle-shaped probe is arranged at the center of the probe support, a high-reflection mirror is arranged at the top end of the probe, an, the outer part of the high-transmittance cladding layer is coated with an outer skin, the upper section of the coupling optical fiber is provided with a coupler, and the lower section of the coupling optical fiber is provided with an annular mirror.

Preferably, the bus fiber, the input fiber and the output fiber all use single-mode fibers.

Preferably, the coupling fiber is a multimode fiber, and the cladding material is a material having good light transmittance.

Preferably, the argon chamber is connected with the upper end and the lower end in a sealing way, and a gas pipe connected with the upper end of the argon chamber is not divided into an inlet and an outlet.

Preferably, a mechanism for limiting the descending and ascending limit positions of the needle-shaped measuring head is arranged in the measuring head support.

Preferably, the coupler cuts off the coupling fiber, and the upper and lower surfaces are welded to the cut fiber.

Preferably, the annular mirror is of an annular structure with a mirror surface on the upper surface, the inner diameter of the annular mirror is consistent with the diameter of the high-transmittance inner core, and the upper surface and the lower surface of the annular mirror are welded with the cut optical fiber.

(III) advantageous effects

Compared with the prior art, the invention provides a step profiler probe based on Michelson interference, which has the following beneficial effects:

1. this step appearance probe based on michelson interferes through set up coupler and annular mirror in coupling optic fibre for the interference position is fixed with the help of the support in coupling optic fibre, has reduced various vibration interferences greatly, and the inductance can not receive magnetic field interference, and is more stable is compared to the mode that the light sense squinted.

2. This step appearance probe based on michelson is interfered sets up in the argon gas room through the position that changes the optical distance, has both reduced the measuring error that factors such as dust and air density difference made, also makes the stroke resistance that the gauge head reciprocated reduce, makes the measurement more accurate, and the reaction is more sensitive.

Drawings

FIG. 1 is a schematic view of the main structure of the present invention;

FIG. 2 is an exploded view of a coupling fiber according to the present invention;

FIG. 3 is a schematic diagram of a collimator structure and optical path according to the present invention;

FIG. 4 is a schematic diagram of the structure and optical path of the coupling fiber according to the present invention;

FIG. 5 is a schematic view of the optical path within an argon chamber according to the present invention.

In the figure: 1. a fixed mount; 2. a collimator; 3. a collimating lens; 4. a bus fiber; 5. a light splitter; 6. an input optical fiber; 7. an output optical fiber; 8. a coupling optical fiber; 9. a top cover; 10. an argon chamber; 11. an air tube; 12. a probe holder; 13. needle-shaped measurement; 14. a high-reflection mirror; 81. an inner core; 82. a high-transmittance cladding; 83. a skin; 84. a coupler; 85. a ring mirror.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, a michelson interference-based step profiler probe comprises a fixed frame 1, a collimator 2 is fixedly arranged at the center of the fixed frame 1, a collimating lens 3 is arranged at the upper part of the center of the collimator 2, a bus fiber 4 is coupled to the upper part of the collimator 2, a splitter 5 is arranged at the upper end of the bus fiber 4, an input fiber 6 is arranged above the splitter 5, an output fiber 7 is arranged at the right side of the splitter 5, the bus fiber 4, the input fiber 6 and the output fiber 7 are all made of single-mode fiber collimator 2, a coupling fiber 8 is arranged at the lower part of the center, the coupling fiber 8 is made of multimode fiber, the cladding material of the coupling fiber is also made of material with good light transmittance, a top cover 9 is fixedly connected to the lower section of the coupling fiber 8, an argon gas chamber 10 is arranged below the top cover 9, two gas pipes 11 are connected to the upper, the gas pipe 11 connected with the upper end of the gas pipe is not divided into an inlet and an outlet, the lower end of the argon chamber 10 is fixedly connected with a measuring head support 12, the center of the measuring head support 12 is provided with a needle-shaped measuring head 13, a mechanism for limiting the descending and ascending limit positions of the needle-shaped measuring head 13 is arranged in the measuring head support 12, the top end of the needle-shaped measuring head 13 is provided with a high-reflection mirror 14, the center of the coupling optical fiber 8 is provided with an inner core 81, the outer part of the inner core 81 is coated with a high-transmission cladding 82, the outer part of the high-transmission cladding 82 is coated with an outer skin 83, the upper section of the coupling optical fiber 8 is provided with a coupler 84, the coupler 84 cuts the coupling optical fiber 8, the upper surface and the lower surface of the coupling optical fiber are welded with the cut optical fiber, the lower.

The working principle of the step profiler probe based on the Michelson interference is that a laser generator is used as a light source, emitted laser enters an optical splitter 5 from an input optical fiber 6 and then enters a bus optical fiber 4, the emitted laser vertically penetrates through a collimating lens 3 in a collimator 2 and then enters an inner core 81 from the upper end surface of a coupling optical fiber 8, at the moment, the emitted laser is a single incident beam, the single incident beam enters a coupler 84 and then is divided into two beams, one beam vertically penetrates through the coupler 84 and then enters an argon gas chamber 10, the other beam is divided and deflected to downwards reach the upper surface of a ring mirror 85 from a high-transmission cladding 82 and then is reflected and then returns to the coupler 84, the beam entering the argon gas chamber 10 reaches a bottom high-reflection mirror 14 and is reflected and returns to the coupler 84, because the two beams of reflected light have the same wavelength and interfere, two beams of coherent light pass through the bus optical fiber 4 and upwards enter the optical splitter 5 and then are output from a right-side output optical fiber, the optical path of the coherent light entering the argon gas chamber 10 changes, which causes the phase change of the output light beam, and the displacement of the needle-shaped measuring head 13 can be obtained by demodulating and calculating the optical path difference by a machine.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.