阅读说明：本技术 一种氦氮混合气体抽空充注回收机 (Helium-nitrogen mixed gas evacuation, filling and recycling machine ) 是由 王绪和 张剑良 姚川 王麦原 周佳依 于 2020-11-26 设计创作，主要内容包括：本发明公开了一种氦氮混合气体抽空充注回收机,包括抽空系统、充氮系统、充氦系统、检漏系统、回收系统和电器控制系统,进行高压氮气预检作业进行检大漏,在没有检测到大漏的情况下,对产品进行抽真空,并进行氦气的充注,采用氦质谱检漏仪对产品进行检漏,检漏完成后进行回收作业。氦氮混合气体可以进行回收再使用,浓度不足时自动补充氦气到设定的浓度,设备包含各种过滤器、具有净化功能,除去回收气体中的各种杂质。电器控制PLC系统多功能一键操作,自动完成所有步骤。全自动补充氦氮混合气体到指定的浓度。所有工序在一个接头上完成,提高了效率。负压回收机制,回收效率高。(The invention discloses a helium-nitrogen mixed gas evacuation, filling and recovery machine which comprises an evacuation system, a nitrogen filling system, a helium filling system, a leakage detection system, a recovery system and an electric appliance control system, wherein high-pressure nitrogen pre-detection operation is carried out to detect leakage, a product is evacuated and filled with helium under the condition that the leakage is not detected, a helium mass spectrometer leak detector is adopted to detect the leakage of the product, and the recovery operation is carried out after the leakage detection is finished. The helium-nitrogen mixed gas can be recovered and reused, helium is automatically supplemented to a set concentration when the concentration is insufficient, and the equipment comprises various filters and has a purification function to remove various impurities in the recovered gas. The electrical appliance controls the PLC system to perform multifunctional one-key operation, and all the steps are automatically completed. Fully automatically replenishing the mixed gas of helium and nitrogen to the designated concentration. All procedures are completed on one joint, and the efficiency is improved. The negative pressure recovery mechanism has high recovery efficiency.)

1. A helium-nitrogen mixed gas evacuation and filling reclaimer is characterized in that: the device comprises an evacuation system, a nitrogen charging system, a helium charging system, a leak detection system, a recovery system and an electrical appliance control system, wherein the evacuation system comprises an evacuation vacuum pump, a vacuum measurer, a first electromagnetic valve plate valve group (1) and a stainless steel pipeline; the nitrogen charging system comprises a nitrogen charging system pressure sensor, a second electromagnetic valve plate valve group (2), a nitrogen gas inlet filter (3) and a nitrogen gas pressure regulator (4); the helium filling system comprises a helium filling system pressure sensor, a first electromagnetic valve plate valve group (1), a helium gas inlet filter (5), a helium gas pressure regulator (6), a helium concentration detection electromagnetic valve (7) and a helium concentration detection pressure regulating valve (8); the leak detection system comprises a helium mass spectrometer leak detector and a leak detection cabin; the recovery system comprises a compressor, a recovery system pressure sensor, a recovery filter (9), a third electromagnetic valve plate valve group (10), a stainless steel pipeline, a recovery vacuum pump, a helium concentration meter and a gas storage tank; the nitrogen gas inlet filter (3), the nitrogen gas pressure regulator (4), the second electromagnetic valve plate valve group (2) and the first electromagnetic valve plate valve group (1) are sequentially connected through stainless steel pipelines; the helium gas inlet filter (5), the helium gas pressure regulator (6), the helium concentration detection electromagnetic valve (7) and the helium concentration detection pressure regulating valve (8) are sequentially connected through a stainless steel pipeline; the first electromagnetic valve plate valve group (1), the pipe flat electromagnetic valve (11), the third electromagnetic valve plate valve group (10), the recovery filter (9), the recovery vacuum pump and the gas storage tank are sequentially connected through stainless steel pipelines; the first electromagnetic valve plate valve group (1) is connected with the three-in-one filter (12) through a stainless steel pipeline.

2. The helium nitrogen mixed gas evacuation and charge reclaimer of claim 1, wherein: alarm devices are arranged in the evacuation system, the nitrogen filling system, the helium filling system, the leak detection system and the recovery system, each alarm device comprises an alarm lamp, and the alarm devices are connected with the electric appliance control system through electric signals.

3. The helium nitrogen mixed gas evacuation and charge reclaimer of claim 1, wherein: the electric appliance control system is a PLC/PC touch control system.

4. The helium nitrogen mixed gas evacuation and charge reclaimer of claim 1, wherein: the helium charging system includes a helium concentration meter.

5. The helium nitrogen mixed gas evacuation and charge reclaimer of claim 1, wherein: the first electromagnetic valve plate valve group (1) comprises a nitrogen discharge electromagnetic valve plate valve group and an evacuation electromagnetic valve plate valve group.

Technical Field

The invention relates to the technical field of gas filling, in particular to a helium-nitrogen mixed gas evacuation, filling and recycling machine.

Background

In leak testing of vacuum equipment, leaks are typically detected with nitrogen and leaks are detected with helium. Because the price of high-concentration helium gas is very high, and the product cost is too high when the helium gas is directly used for leak detection in large-scale equipment, a helium-nitrogen mixed gas evacuation and filling reclaimer is developed to meet the actual demand of the market.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provides a three-in-one helium-nitrogen mixed gas evacuation, filling and recycling machine.

In order to achieve the purpose, the technical scheme of the invention is as follows:

a helium-nitrogen mixed gas evacuation, filling and recovery machine comprises an evacuation system, a nitrogen filling system, a helium filling system, a leak detection system, a recovery system and an electric appliance control system, wherein the evacuation system comprises an evacuation vacuum pump, a vacuum measurer, a first electromagnetic valve plate valve group and a stainless steel pipeline; the nitrogen charging system comprises a nitrogen charging system pressure sensor, a second electromagnetic valve plate valve group, a nitrogen gas inlet filter and a nitrogen gas pressure regulator; the helium filling system comprises a helium filling system pressure sensor, a first electromagnetic valve plate valve group, a helium gas inlet filter, a helium gas pressure regulator, a helium concentration detection electromagnetic valve and a helium concentration detection pressure regulating valve; the leak detection system comprises a helium mass spectrometer leak detector and a leak detection cabin; the recovery system comprises a compressor, a recovery system pressure sensor, a recovery filter, a third electromagnetic valve plate valve group, a stainless steel pipeline, a recovery vacuum pump, a helium concentration meter and a gas storage tank; the nitrogen gas inlet filter, the nitrogen gas pressure regulator, the second electromagnetic valve plate valve group and the first electromagnetic valve plate valve group are sequentially connected through stainless steel pipelines; the helium gas inlet filter, the helium gas pressure regulator, the helium concentration detection electromagnetic valve and the helium concentration detection pressure regulating valve are sequentially connected through a stainless steel pipeline; the first electromagnetic valve plate valve group, the pipe flat electromagnetic valve, the third electromagnetic valve plate valve group, the recovery filter, the recovery vacuum pump and the gas storage tank are sequentially connected through stainless steel pipelines; the first electromagnetic valve plate valve group is connected with the three-in-one filter through a stainless steel pipeline.

As a further scheme of the invention, alarm devices are arranged in the evacuation system, the nitrogen filling system, the helium filling system, the leakage detection system and the recovery system, each alarm device comprises an alarm lamp, and the alarm devices are connected with the electric appliance control system through electric signals.

As a further scheme of the invention, the electric appliance control system is a PLC/PC touch control system.

As a further aspect of the invention, the helium charging system includes a helium concentration meter.

As a further scheme of the invention, the first electromagnetic valve plate valve group (1) comprises a nitrogen discharge electromagnetic valve plate valve group and an evacuation electromagnetic valve plate valve group.

The invention has the beneficial effects that: the evacuation system, the nitrogen filling system, the helium filling system, the leakage detection system, the recovery system and the electric appliance control system are subjected to high-pressure nitrogen pre-detection operation to detect large leakage, the product is vacuumized and filled with helium under the condition that the large leakage is not detected, a helium mass spectrometer leak detector is adopted to detect leakage of the product, and the recovery operation is carried out after the leakage detection is finished. The helium-nitrogen mixed gas can be recovered and reused, helium is automatically supplemented to a set concentration when the concentration is insufficient, and the equipment comprises various filters and has a purification function to remove various impurities in the recovered gas. The electrical appliance controls the PLC system to perform multifunctional one-key operation, and all the steps are automatically completed. Fully automatically replenishing the mixed gas of helium and nitrogen to the designated concentration. All procedures are completed on one joint, and the efficiency is improved. The negative pressure recovery mechanism has high recovery efficiency.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic diagram of the piping of the present invention;

FIG. 3 is a block diagram of the nitrogen charge recovery system of the present invention;

FIG. 4 is a flow diagram of a nitrogen charge recovery system of the present invention.

In the figure, 1 is a first electromagnetic valve plate valve group, 2 is a second electromagnetic valve plate valve group, 3 is a nitrogen gas inlet filter, 4 is a nitrogen gas pressure regulator, 5 is a helium gas inlet filter, 6 is a helium gas pressure regulator, 7 is a helium concentration detection electromagnetic valve, 8 is a helium concentration detection pressure regulating valve, 9 is a recovery filter, 10 is a third electromagnetic valve plate valve group, 11 is a pipe flat electromagnetic valve, and 12 is a three-in-one filter.

Detailed Description

The technical solution of the present patent will be described in further detail with reference to the following embodiments.

Reference will now be made in detail to embodiments of the present patent, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present patent and are not to be construed as limiting the present patent.

In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.

In the description of this patent, it is noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can include, for example, fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meaning of the above terms in this patent may be understood by those of ordinary skill in the art as appropriate.

Referring to fig. 1-4, the helium-nitrogen mixed gas evacuation and filling recovery machine comprises an evacuation system, a nitrogen filling system, a helium filling system, a leak detection system, a recovery system and an electrical appliance control system, wherein the evacuation system comprises an evacuation vacuum pump, a vacuum measurer, a first electromagnetic valve plate valve group 1 and a stainless steel pipeline; the nitrogen charging system comprises a nitrogen charging system pressure sensor, a second electromagnetic valve plate valve group 2, a nitrogen gas inlet filter 3 and a nitrogen gas pressure regulator 4; the helium filling system comprises a helium filling system pressure sensor, a first electromagnetic valve plate valve group 1, a helium gas inlet filter 5, a helium gas pressure regulator 6, a helium concentration detection electromagnetic valve 7 and a helium concentration detection pressure regulating valve 8; the leak detection system comprises a helium mass spectrometer leak detector and a leak detection cabin; the recovery system comprises a compressor, a recovery system pressure sensor, a recovery filter 9, a third electromagnetic valve plate valve group 10, a stainless steel pipeline, a recovery vacuum pump, a helium concentration meter and a gas storage tank; the nitrogen gas inlet filter 3, the nitrogen gas pressure regulator 4, the second electromagnetic valve plate valve group 2 and the first electromagnetic valve plate valve group 1 are sequentially connected through stainless steel pipelines; the helium gas inlet filter 5, the helium gas pressure regulator 6, the helium concentration detection electromagnetic valve 7 and the helium concentration detection pressure regulating valve 8 are sequentially connected through stainless steel pipelines; the first electromagnetic valve plate valve group 1, the pipe level electromagnetic valve 11, the third electromagnetic valve plate valve group 10, the recovery filter 9, the recovery vacuum pump and the gas storage tank are sequentially connected through stainless steel pipelines; the first electromagnetic valve plate valve group 1 is connected with the three-in-one filter 12 through a stainless steel pipeline. Alarm devices are arranged in the evacuation system, the nitrogen filling system, the helium filling system, the leak detection system and the recovery system, each alarm device comprises an alarm lamp, and the alarm devices are connected with the electric appliance control system through electric signals. The electric appliance control system is a PLC/PC touch control system. The helium charging system includes a helium concentration meter. The first electromagnetic valve plate valve group 1 comprises a nitrogen discharge electromagnetic valve plate valve group and an evacuation electromagnetic valve plate valve group.

The overall function of the present embodiment is mainly as follows:

1. an evacuation system: the vacuum pump mainly comprises a vacuum pump, a vacuum measurement device, an electromagnetic valve and a stainless steel pipeline system, and can evacuate a workpiece, pump out air in the workpiece and ensure the concentration of helium;

2. helium filling system: the device mainly comprises a pressure sensor, an electromagnetic valve and a stainless steel pipeline system, and helium with specified pressure can be filled into a workpiece;

3. a leak detection system: mainly comprises a helium mass spectrometer leak detector and a leak detection cabin. The leakage detection system is self-provided by a user and can perform suction method leakage detection on the workpiece;

4. a recovery system: the helium recovery device mainly comprises a compressor, a pressure sensor, an electromagnetic valve, a stainless steel pipeline, a vacuum pump, a helium concentration meter, a gas storage tank and the like, and can be used for recovering and storing helium in a workpiece. The helium concentration meter detects the helium concentration, when the concentration is lower than a set value, an alarm is given, high-purity helium is automatically supplemented, and a pressure gauge is required on a pipeline to display the recovery pressure;

5. an electric appliance control system: by adopting the touch screen control, the working parameter setting (leak detection time, leak detection pressure and the like) can be carried out, and the functions of working state monitoring (reflecting the working state of equipment in real time), fault alarm, manual maintenance and the like are achieved.

The main technical parameters of the equipment of the embodiment are as follows:

1. the maximum leakage pressure of nitrogen gas detection is 4.5MPa, and the pressure in the range can be adjusted;

2. the helium leakage detection pressure is 1.2MPa at most, and the pressure in the range is adjustable;

3. the absolute vacuum pressure of the workpiece during evacuation is less than or equal to 1000 Pa;

4. helium recovery rate: more than or equal to 98 percent, is the total recovery rate of helium in the workpiece and the system, and has the recovery pressure of about 2000 Pa;

5. the pressure of the residual helium gas in the helium gas bottle for helium supplement is not higher than 0.1 MPa.

The main technical parameters of each process of the embodiment are as follows:

1. nitrogen filling and leakage detection: the nitrogen charging pressure is adjustable within 4.5Mpa, the nitrogen charging time and the pressure maintaining time can be set optionally, and the pressure reduction range can be set optionally;

2. and (3) an evacuation process: the evacuation rate is 40m3/h, and the vacuum degree is less than or equal to 1000 Pa;

3. a helium filling procedure: the helium filling pressure is adjustable within 1.2 Mpa;

4. a recovery process: the helium recovery rate is more than or equal to 98 percent;

5. the nitrogen filling, the vacuumizing, the helium filling and the recycling in the leak detection system have alarm functions, when the operation procedures can not be normally passed through, the system immediately alarms, and production is carried out after resetting;

6. the running state of the equipment is dynamically monitored, and a fault alarm lamp displays and gives an alarm;

7. complete data recording, equipment and key component state monitoring recording and alarming system;

8. when the leakage detection is finished, the pressure is automatically released to normal pressure, an alarm signal is correspondingly sent out, and a fault alarm lamp displays and gives an alarm sound;

9. the vacuum-pumping unqualified workpiece should be automatically released to normal pressure without helium filling, and a corresponding alarm signal is sent out, and a fault alarm lamp displays and gives an alarm sound;

10. when the workpiece is recovered to a recovery station, if the pressure in the workpiece is lower than a set value, the equipment displays a fault alarm lamp and gives an alarm sound;

11. when the helium concentration in the gas storage tank is lower than 80% (adjustable), the system automatically supplies pure helium.

The equipment production process flow of the embodiment is as follows:

1. an operator places a workpiece at a preparation position and installs the quick connector;

2. the high-pressure nitrogen gas is filled into the detected workpiece in the high-pressure nitrogen gas pre-detection-large leakage detection process, the variation rate of the pressure value of the high-pressure nitrogen gas filled into the workpiece in a specified time interval is monitored, whether the detected workpiece is large in leakage or not is judged, and the coarse detection pressure value of the filled nitrogen gas is 2-4 Mpa. And (5) the workpiece with qualified leakage detection enters the next procedure. And (4) if the workpieces are unqualified, the equipment is moved away from the production line according to the alarm prompt, and the workpieces are inspected and processed additionally. Manually pasting a defective marking card on a defective product, so that the defective product is convenient to distinguish;

3. and (5) performing a vacuumizing process on the qualified workpiece subjected to the leakage detection process. And after the vacuum pumping is qualified, entering the next procedure. If the air is not qualified, the equipment is moved away from the production line corresponding to the alarm prompt, and is inspected and processed separately, and a defective marking card is stuck manually;

4. filling the vacuumized workpiece with high-pressure helium gas, wherein the concentration is adjustable, the helium gas pressure is adjustable within 1.2Mpa, qualified products enter the next procedure, and unqualified products are alarmed;

5. a suction gun of the helium mass spectrometer leak detector is used for carrying out suction method leak detection on suspicious leak points of the workpiece, and whether the leak rate of the detected workpiece is qualified is judged;

6. finally, helium in the detected workpiece is recovered in a helium recovery station by a vacuum method for recycling; the working internal pressure value is below 0.05 MPa.

7. The apparatus automatically records each undesirable quantity and the number of helium replenishes and hourly, daily production, etc.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.