阅读说明：本技术 一种便携式大面积等离子体射流装置、系统 (Portable large-area plasma jet device and system ) 是由 吕洋 聂兰兰 刘凤梧 卢新培 于 2021-06-23 设计创作，主要内容包括：本发明公开了一种便携式大面积等离子体射流装置、系统,属于等离子体发生装置技术领域,包括壳体、射流喷口阵列、针电极阵列、电阻阵列、高压节点和升压模块；壳体内设有升压模块的固定腔及主管道；主管道的一端设有进气接口,另一端设有多个独立的气体管道；射流喷口阵列中每一射流喷口与相对应的气体管道连通,针电极阵列中多个针电极位于相对应的多个气体管道中；针电极阵列的多个针电极分别与电阻阵列相对应的多个电阻电性连接,多个电阻均与高压节点电性连接；高压节点与升压模块的高压侧电性连接。本发明使用分布式的电阻-针串联阵列的电极结构,以及独立的针电极-射流喷口连通气体管道优化了电场分布,提高了大面积射流放电的均匀性。(The invention discloses a portable large-area plasma jet device and a portable large-area plasma jet system, which belong to the technical field of plasma generation devices and comprise a shell, a jet nozzle array, a needle electrode array, a resistor array, a high-voltage node and a boosting module; a fixed cavity and a main pipeline of the boosting module are arranged in the shell; one end of the main pipeline is provided with an air inlet interface, and the other end of the main pipeline is provided with a plurality of independent air pipelines; each jet flow nozzle in the jet flow nozzle array is communicated with a corresponding gas pipeline, and a plurality of needle electrodes in the needle electrode array are positioned in the corresponding gas pipelines; a plurality of pin electrodes of the pin electrode array are respectively electrically connected with a plurality of resistors corresponding to the resistor array, and the plurality of resistors are all electrically connected with the high-voltage node; the high-voltage node is electrically connected with the high-voltage side of the boosting module. The invention uses the electrode structure of the distributed resistance-needle series array and the independent needle electrode-jet nozzle communicated gas pipeline to optimize the electric field distribution and improve the uniformity of large-area jet discharge.)

1. A portable large area plasma jet device, the device comprising: the plasma generator comprises a shell (1), a plasma generating mechanism and a boosting module (2);

a fixed cavity and a main pipeline of the boosting module (2) are arranged in the shell (1); one end of the main pipeline is provided with an air inlet interface (4), and the other end of the main pipeline is provided with a plurality of independent gas pipelines (9);

the plasma generating mechanism comprises a jet flow nozzle array (6), a needle electrode array (11), a resistor array (7) and a high-voltage node (8); each jet nozzle in the jet nozzle array (6) is communicated with a corresponding gas pipeline (9), and a plurality of needle electrodes in the needle electrode array (11) are positioned in the corresponding gas pipelines (9); a plurality of pin electrodes of the pin electrode array (11) are respectively electrically connected with a plurality of resistors corresponding to the resistor array (7), and the plurality of resistors are all electrically connected with the high-voltage node (8); the high-voltage node (8) is electrically connected with the high-voltage side of the boosting module (2).

2. A portable large area plasma jet device according to claim 1, characterized in that the gas duct (9) is arranged inside the housing (1) and is of a bent structure; the needle electrode array (11) further comprises a fixing groove (10), the needle electrodes are arranged in the fixing groove (10) and needle points of the needle electrodes are located in the gas pipeline (9) and face the gas outflow direction, and the needle electrodes are made of a conductive material of a linear solid seamless structure.

3. A portable large area plasma jet device according to claim 1, characterized in that the gas duct (9) is arranged inside the housing (1) and is of a straight line configuration; the needle electrode array (11) further comprises a fixing groove (10), the needle electrodes are arranged in the fixing groove (10) and needle points of the needle electrodes are located in the gas pipeline (9) and face the gas outflow direction, and the needle electrodes are made of L-shaped conductive materials with solid seamless structures.

4. A portable large area plasma j et device as claimed in claim 1, wherein said gas duct (9) is arranged outside said housing (1) and communicates with said main duct through a flexible duct, each resistor in said array of resistors (7) being wrapped by an insulating material and embedded in the corresponding gas duct (9); the needle electrode array (11) further comprises a fixing groove (10), the needle electrodes are arranged in the fixing groove (10) and needle points of the needle electrodes are located in the gas pipeline (9) and face the gas outflow direction, and the needle electrodes are made of a conductive material of a linear solid seamless structure.

5. A portable large area plasma j et device as claimed in any one of claims 1 to 4, wherein each jet orifice of the jet orifice array (6) has a diameter of 0.5mm to 3mm, a wall thickness of 0.5mm to 1mm and a jet orifice pitch of 1mm to 20 cm.

6. A portable large area plasma jet device according to any of claims 1-4, characterized in that the output voltage amplitude of the boost module (2) is 0-15 kV.

7. A portable large area plasma j et device according to any of claims 1-4, characterized in that each resistor in the resistor array (7) has a resistance of 10M Ω -2G Ω.

8. A portable large area plasma jet device according to any of claims 1-4, characterized in that a low voltage power supply interface (3) and a switch (5) are provided on the housing (1), the low voltage power supply interface (3) is electrically connected to the switch (5) and the boost module (2), respectively, and the input voltage of the low voltage power supply interface (3) is 0-50V.

9. A portable large area plasma-jet system, comprising the portable large area plasma-jet apparatus of claim 8, further comprising a controller and a removable gas cabinet;

the controller comprises a flow control unit (13), a voltage control unit (14), a grounding terminal (15) and a jet device power supply port (16), wherein the jet device power supply port (16) is electrically connected with the low-voltage power supply interface (3);

the movable gas cylinder cabinet comprises a gas cylinder (17) and a clamping mechanism (18), the gas cylinder (17) is arranged in the movable gas cylinder cabinet and is communicated with the gas inlet interface (4), and the clamping mechanism (18) is used for placing the jet device;

the fluidic device power supply port (16) is used for supplying power to the fluidic device; the voltage control unit (14) is used for adjusting the power supply voltage to the fluidic device; the flow control unit (13) is used for controlling the flow rate of gas input to the gas inlet interface (4).

Technical Field

The invention belongs to the technical field of plasma generating devices, and particularly relates to a portable large-area plasma jet device and a portable large-area plasma jet system.

Background

Atmospheric non-equilibrium plasma is plasma generated at atmospheric pressure, with electron temperatures as high as tens of thousands of degrees, and ions and neutral particles at temperatures much lower than the electron temperature, usually close to room temperature, so the gas temperature at discharge is also close to room temperature. The atmospheric pressure low-temperature plasma jet device can generate plasma jet under atmospheric pressure, the treated object is not limited by the size of a plasma discharge gap, the operation is simple, the temperature of the generated gas is low, and the activity is high.

With the wide application of low-temperature plasma in the biomedical field, the miniaturization, simplification, large-area plasma and the controllability of active ingredients of a plasma generating device are new development trends. Patent application 201811235432.5 discloses a hand-held plasma treatment device that generates a plasma jet through an array of hollow electrodes. Patent application 201780001937.2 discloses a plasma discharge skin treatment device. The device generates large-area plasma by generating air dielectric barrier discharge between electrodes wrapping the dielectric. However, the existing large-area plasma device is still limited by safety, uniformity, controllable components and other factors, for example, the high-voltage electrode is easy to generate arc discharge to cause electric shock and ablation, the hollow needle is small in jet flow area and hollow annular, the action efficiency is low, the air dielectric barrier discharge gap is short, wound infection is easy to cause, the jet flow caused by the uneven distribution of the electrode electric field is uneven, the jet flow density is limited by the electrode structure and the like, the working gas is single, and the active particle components and the like cannot be controlled.

In summary, the conventional large-area plasma device still has the problems of complex device, low safety, non-uniformity and difficult control of components.

Disclosure of Invention

In view of the above defects or improvement requirements of the prior art, the present invention provides a portable large-area plasma jet device and system, which aims to optimize electric field distribution and improve uniformity of large-area jet discharge by using a distributed electrode structure with a resistor-needle series array and an independent needle electrode-jet nozzle communicated gas pipeline, thereby solving the technical problem of plasma jet non-uniformity caused by non-uniform electrode electric field in the prior art.

To achieve the above object, according to one aspect of the present invention, there is provided a portable large area plasma jet device, comprising: the plasma generator comprises a shell, a plasma generating mechanism and a boosting module;

a fixed cavity and a main pipeline of the boosting module are arranged in the shell; one end of the main pipeline is provided with an air inlet interface, and the other end of the main pipeline is provided with a plurality of independent gas pipelines;

the plasma generating mechanism comprises a jet flow nozzle array, a needle electrode array, a resistor array and a high-voltage node; each jet flow nozzle in the jet flow nozzle array is communicated with a corresponding gas pipeline, and a plurality of needle electrodes in the needle electrode array are positioned in the corresponding gas pipelines; a plurality of pin electrodes of the pin electrode array are respectively electrically connected with a plurality of resistors corresponding to the resistor array, and the resistors are all electrically connected with the high-voltage node; the high-voltage node is electrically connected with the high-voltage side of the boosting module.

Preferably, the gas pipeline is arranged inside the shell and is of a bent structure; the needle electrode array further comprises a fixing groove, the needle electrodes are arranged in the fixing groove, needle points of the needle electrodes are located in the gas pipeline and face the gas outflow direction, and the needle electrodes are made of conductive materials of linear solid seamless structures.

Preferably, the gas pipeline is arranged inside the shell and is of a linear structure; the needle electrode array further comprises a fixing groove, the needle electrodes are arranged in the fixing groove, needle points of the needle electrodes are located in the gas pipeline and face the gas outflow direction, and the needle electrodes are made of L-shaped conductive materials with solid seamless structures.

Preferably, the gas pipeline is arranged outside the shell and communicated with the main pipeline through a flexible pipeline, and each resistor in the resistor array is wrapped by an insulating material and embedded into the corresponding gas pipeline; the needle electrode array further comprises a fixing groove, the needle electrodes are arranged in the fixing groove, needle points of the needle electrodes are located in the gas pipeline and face the gas outflow direction, and the needle electrodes are made of conductive materials of linear solid seamless structures.

Preferably, each jet orifice of the array of jet orifices has a diameter of 0.5mm to 3mm, a wall thickness of 0.5mm to 1mm, and a jet orifice pitch of 1mm to 20 cm.

Preferably, the output voltage amplitude of the boosting module is 0-15 kV.

Preferably, each resistor in the resistor array has a resistance value of 10M omega-2G omega.

Preferably, the flow rate of the gas input by the gas inlet interface is 0-15L/min.

Preferably, a low-voltage power supply interface and a switch are arranged on the shell, the low-voltage power supply interface is electrically connected with the switch and the boosting module respectively, and the input voltage of the low-voltage power supply interface is 0-50V.

According to another aspect of the present invention, there is provided a portable large area plasma jet system comprising the portable large area plasma jet device described above, further comprising a controller and a movable gas cabinet;

the controller comprises a flow control unit, a voltage control unit, a grounding terminal and a power supply port of the jet device, and the power supply port of the jet device is electrically connected with the low-voltage power supply interface;

the movable gas cylinder cabinet comprises a gas cylinder and a clamping mechanism, the gas cylinder is arranged in the movable gas cylinder cabinet and is communicated with the gas inlet interface, and the clamping mechanism is used for placing the jet device;

the power supply port of the fluidic device is used for supplying power to the fluidic device; the voltage control unit is used for adjusting the power supply voltage to the jet device; the flow control unit is used for controlling the flow rate of gas input to the gas inlet interface.

In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:

1. the portable large-area plasma jet device provided by the invention optimizes electric field distribution by using a distributed electrode structure of a resistor-needle series array and an independent needle electrode-jet nozzle communicated gas pipeline, and improves the uniformity of large-area jet discharge.

2. The portable large-area plasma jet device provided by the invention can prevent discharge through the resistor to generate plasma jet, can ensure the safe touch of a human body, cannot generate any heating and electric shock feeling, and ensures the life safety of a user.

3. The portable large-area plasma jet device provided by the invention adopts a solid and seamless needle array electrode structure, the output ends of the resistor body and the boosting module are isolated from working gas, the generation of high-voltage arc discharge is avoided, the solid needle electrode discharges through a dielectric tube orifice, more dispersive plasma jet can be generated, the size of the tube orifice and the gap are not limited by the size of the electrode, the plasma jet density can be effectively improved, uniform planar plasma jet can be generated under the condition of proper jet nozzle spacing and treatment gap, and the plasma action efficiency is improved.

4. The portable large-area plasma jet device provided by the invention is small and exquisite, convenient and low in price, greatly improves the use flexibility, and can be used in various scenes such as hospitals, families, fields and the like.

5. The portable large-area plasma jet system provided by the invention changes the components of the working gas through the external gas supply system, and can effectively control the specific gravity of various active components through the flow control unit, thereby improving the use efficiency.

Drawings

FIG. 1 is a schematic diagram of the structure of one embodiment of the portable large area plasma jet device of the present invention;

FIG. 2 is a schematic diagram of the structure of one embodiment of the portable large area plasma jet device of the present invention;

FIG. 3 is a schematic diagram of the structure of one embodiment of the portable large area plasma jet device of the present invention;

FIG. 4 is a schematic diagram of the structure of the controller of the portable large area plasma jet device of the present invention;

fig. 5 is a schematic structural diagram of a movable gas cylinder cabinet of the portable large-area plasma jet device of the invention.

The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-a shell; 2-a boost module; 3-a low voltage power supply interface; 4-an air inlet interface; 5-a switch; 6-jet nozzle array; 7-a resistor array; 8-high voltage node; 9-a gas pipeline; 10-a fixed groove; 11-a needle electrode array; 12-plasma jet; 13-a flow control unit; 14-a voltage control unit; 15-a ground terminal; 16-fluidic device power supply port; 17-a gas cylinder; 18-clamping means.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in fig. 1-5, the present invention provides a portable large-area plasma jet device, which comprises a housing 1, a resistance blocking type plasma generating mechanism, a voltage boosting module 2, a low voltage power supply interface 3, an air inlet interface 4, and a switch 5; the shell 1 is provided with a fixing cavity for fixing the plasma generating mechanism and the boosting module 2 and is made of insulating materials.

Specifically, the plasma generation mechanism includes jet nozzle array 6, needle electrode array 11, resistance array 7, high-voltage node 8, each jet nozzle of jet nozzle array 6 with the needle point of a needle electrode that needle electrode array 11 corresponds is located same independent gas pipeline 9, the other end of every needle electrode of needle electrode array 11 with the one end pin electric connection of a resistance that resistance array 7 corresponds, resistance array 7 other end pin is connected to same high-voltage node 8, high-voltage node 8 with boost module 2's high pressure side electric connection.

Further explanation, boost module 2 is fixed inside fluidic device by fixed chamber, boost module 2's output one utmost point and plasma generation mechanism high voltage node electric connection, another utmost point and low pressure side negative pole are connected altogether, 2 low pressure sides of boost module pass through switch 5 with low pressure power supply interface 3 electric connection, can by low pressure power supply interface 3 connects battery or low pressure DC power supply, interface 4 is connected with gas supply system admits air, and the input can be single gas, also can be the mist, and power supply and gas supply system can integrate to the controller in, through adjusting input voltage, gas component isoparametric, changes the object of plasma jet intensity, the different demands of active particle composition adaptation different constitutions.

As a preferred embodiment of the present invention, the shape of the housing 1 is cylindrical, oblate, square, or irregular.

In a preferred embodiment of the present invention, the housing 1 is made of an insulating material such as teflon alkoxy resin or plastic.

In a further description, each jet nozzle of the jet nozzle array 6 has a diameter of 0.5-3mm, a wall thickness of 0.5-1mm, and a jet nozzle pitch of 1mm-20 cm.

As a preferred embodiment of the invention, the jet orifice array may be planar or of any three-dimensional shape.

The pin electrode array 11 comprises a fixing groove 10 made of an insulating material and a solid pin array made of a conductive material, the length of the pin electrode is smaller than 10cm, and the pin electrode array 11 is of a solid seamless structure and used for preventing working gas from flowing into the resistor body and avoiding high-current and overheating arc discharge. Each jet nozzle of the jet nozzle array 6 is connected with each needle electrode of the needle electrode array 11 through a gas pipeline 9 made of an independent insulating material, so that the uneven distribution of an electric field caused by the mutual influence of the electric field around the needle electrodes is reduced, and the uniformity of the plasma jet array is further maintained.

Further, each resistor of the resistor array 7 is connected with a corresponding pin electrode of the pin electrode array 11, the distributed current-limiting resistor array can avoid the situation that the whole voltage of the pin point is reduced due to the discharge conduction of a part of pin electrodes so that the part of the pin electrodes are not discharged, the uniformity of the plasma jet array is maintained, and the resistance value of the resistor array 7 is 10M Ω -2G Ω.

Further, the output of the boosting module 2 can be direct current, alternating current, pulse high voltage, and the voltage amplitude is 0-15 kV. The input voltage of the low-voltage power supply interface 3 is 0-50V. The flow rate of the gas input by the gas inlet interface 4 is 0-15L/min.

The technical solution of the present invention is further illustrated by the following specific examples.

Example one

As shown in fig. 1, 4 and 5, the portable large-area plasma jet device provided by the invention comprises a housing 1, a resistance blocking type plasma generating mechanism, a boosting module 2, a low-voltage power supply interface 3, an air inlet interface 4 and a switch 5.

The shell 1 is provided with a fixed cavity which comprises a fixed plasma generating mechanism and a boosting module 2 and is made of insulating materials such as polytetrafluoroethylene resin and the like.

The resistance blocking type plasma generating mechanism comprises a jet flow nozzle array 6, a needle electrode array 11, a resistance array 7 and a high-voltage node 8, wherein each jet flow nozzle of the jet flow nozzle array 6 and a needle point of a needle electrode corresponding to the needle electrode array 11 are located in the same independent gas pipeline 9, and working gas enters the bent independent gas pipeline 9 from a main pipeline and is sprayed out from the jet flow nozzles.

The needle electrode array 11 comprises a holding groove 10 made of an insulating material in which the upright needle electrodes are inserted and a solid needle array made of a conductive material with the needle tips inserted into the individual gas ducts 9 and directed in the gas outflow direction. The other end of every needle of needle electrode array 11 and the one end pin electric connection of a corresponding resistance of resistance array 7, resistance array 7 other end pin is connected to same high-voltage node 8, high-voltage node 8 and 2 high-pressure side electric connection of boost module, independent gas pipeline 9 passes through the trunk line with interface 4 that admits air and is connected. The length of the pin electrode is 5mm, and the pin electrode array 11 is of a solid seamless structure integrally and is used for preventing working gas from flowing into the exposed resistor body and avoiding generating large-current and overheated arc discharge.

Each jet nozzle of the jet nozzle array 6 is connected with each needle electrode of the needle electrode array 11 through a gas pipeline 9 made of an independent insulating material, so that the problem of uneven electric field distribution caused by mutual influence of electric fields around the needle electrodes is solved, plasmas generated by different electrodes are prevented from discharging through the same electrode channel, and the uniformity of the plasma jet array is further maintained.

The boost module 2 is fixed inside the shell 1 by a fixed cavity, the positive electrode of the output end of the boost module 2 is electrically connected with a high-voltage node 8 of the plasma generation mechanism, the negative electrode of the boost module is connected with the negative electrode of the low-voltage side in a common ground mode, and the low-voltage side of the boost module 2 is electrically connected with the low-voltage power supply interface 3 through the switch 5.

The shell 1 is similar to a cube, the diameter of each nozzle of the jet flow nozzle array 6 with the total volume smaller than 20cm multiplied by 3cm multiplied by 7cm is 1mm, the wall thickness is 1mm, in order to improve the jet flow nozzle density, the adjacent jet flow nozzles share one wall, the central distance of the jet flow nozzles is 2mm, and when the treatment gap is smaller than 5mm, the planar uniform plasma jet flow 12 can be generated.

The fluidic device is provided with a controller shown in figure 4 and a movable gas cylinder cabinet filled with small bottled gas shown in figure 5, the controller is integrated with a flow control unit 13, a voltage control unit 14, a grounding terminal 15, a fluidic device power supply port 16 and the like, 220V mains supply is used for supplying power, working gas is sent into the flow control unit 13 of the controller through a pressure reducer and then enters a fluidic device, the controller voltage control unit 14 outputs 0-15V adjustable low-voltage direct current, and the negative pole of the controller voltage control unit is electrically connected with the negative pole of the low-voltage side of the fluidic device and is directly grounded. The jet device is connected with a low-voltage power supply interface of the jet device by a controller for supplying power, and the gas interface is connected with a gas supply system. As shown in figure 5, the gas cylinder cabinet can be provided with two small gas cylinders 17, the output can be single gas or mixed gas, the gas cylinder cabinet is provided with a flexible clamping mechanism 18, and the gas cylinder cabinet can replace an operator to fix the position of the jet device when in use. The power supply and gas supply system of the jet device is integrated into the controller, and the plasma jet intensity and the active particle components are changed by adjusting parameters such as input voltage and gas components so as to adapt to objects with different requirements.

When the plasma jet device is used, any area near a part to be processed is connected with a controller grounding terminal through a grounding wire, the controller is connected, a voltage and flow control unit is started, a discharge gap is adjusted to be aligned with a processing area, a switch of the jet device is operated to be conducted, the needle electrode array is charged through surrounding stray capacitors, a plasma jet is generated in working gas when the breakdown field intensity is reached, the plasma jet 12 is ejected through a jet nozzle, and active particles are generated along with the jet and act on a target.

Example 2

As shown in fig. 2, 4 and 5, the portable large-area plasma jet device provided by the invention comprises a housing 1, a resistance blocking type plasma generating mechanism, a boosting module 2, a low-voltage power supply interface 3, an air inlet interface 4 and a switch 5.

The shell 1 is provided with a fixed cavity which comprises a fixed plasma generating mechanism and a boosting module 2 and is made of insulating materials such as polytetrafluoroethylene resin and the like.

The resistance blocking type plasma generating mechanism comprises a jet flow nozzle array 6, a needle electrode array 11, a resistance array 7 and a high-voltage node 8, wherein each nozzle of the jet flow nozzle array 6 and a needle point of a needle electrode corresponding to the needle electrode array are located in the same independent gas pipeline 9, the bent needle electrode is embedded into the corresponding gas pipeline 9 through an insulated outward independent channel, the length of the needle electrode depends on the distance from a fixing groove 10 to the corresponding independent gas pipeline, and the needle point faces the gas outflow direction. The other end of each pin electrode of the pin electrode array 11 is electrically connected with one end pin of a corresponding resistor of the resistor array 7, the other end pin of the resistor array 7 is connected to the same high-voltage node 8,

high pressure node 8 and 2 high pressure side electric connection of module that steps up, independent gas conduit 9 and interface 4 of admitting air connect this structure through the trunk line under a large amount of electrodes parallel circumstances, and independent gas circuit design is easier.

The length difference of the needle electrodes can lead the stray capacitance in each discharge loop to be different, so that the discharge is not uniform, and in practical application, the resistance values of different current-limiting resistors can be changed to be matched with the stray capacitance, so that a uniform plasma jet array can be obtained.

The boosting module 2 is fixed in the jet device through a fixed cavity, the boosting module 2 outputs alternating-current high voltage, one electrode of the boosting module is electrically connected with a high-voltage node 8 of the plasma generating mechanism, the other electrode of the boosting module is connected with the negative electrode of the low-voltage side in a common ground mode, and the low-voltage side of the boosting module 2 is electrically connected with the low-voltage power supply interface 3 through the switch 5.

The overall volume of the device is less than 20cm multiplied by 3cm multiplied by 7cm jet flow nozzle array, the diameter of each nozzle is 2mm, the wall thickness is 1mm, for improving the density of the jet flow nozzles, a wall is shared by adjacent jet flow nozzles, the central distance of the jet flow nozzles is 4mm, when the device is used, the shell 1 at the position of the boosting module 2 is held by a hand, and the holding direction is vertical to the jet flow direction.

Example 3

As shown in fig. 3, 4 and 5, the portable large-area plasma jet device provided by the invention comprises a housing 1, a resistance blocking type plasma generating mechanism, a boosting module 2, a low-voltage power supply interface 3, an air inlet interface 4 and a switch 5.

The difference from the first embodiment is that the independent gas pipeline 9 is connected with the main pipeline through a hose made of flexible insulating materials such as silica gel, a high-voltage node 8 of the independent gas pipeline is fixed in the shell, the resistors in the resistor array 7 are connected to the high-voltage node 8 through a high-voltage conducting wire wrapped and insulated, a resistor body is wrapped and embedded in the independent pipelines through the insulating materials, and each independent pipeline can freely move in a certain space range and can be used for treating irregular three-dimensional surfaces.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.