阅读说明：本技术 一种e×b探针 (E B probe ) 是由 王平阳 余盛楠 杭观荣 刘佳 贾晴晴 田雷超 于 2020-07-27 设计创作，主要内容包括：本发明提供了一种E×B探针,包括离子过滤准直模块、连接件、准直筒体和E×B速度过滤模块；离子过滤准直模块包括离子过滤装置壳体、离子过滤入口准直装置、绝缘板盖、绝缘板和弧形电极,绝缘板固定在离子过滤装置壳体的中部,弧形电极紧贴在绝缘板上,绝缘板盖置于弧形电极上；离子过滤入口准直装置置于离子过滤装置壳体的离子过滤入口处；连接件固定于离子过滤装置壳体的离子过滤出口处,准直筒体的前端穿过连接件并延伸至离子过滤装置壳体内与述弧形电极靠近,准直筒体的后端置于E×B速度过滤模块内。本发明的E×B探针,采用弧形电极、准直磁屏和出口准直磁屏,提高了E×B探针的分辨率以及减少结果中的杂质含量。(The invention provides an E multiplied by B probe, which comprises an ion filtering collimation module, a connecting piece, a collimation cylinder and an E multiplied by B speed filtering module; the ion filtering collimation module comprises an ion filtering device shell, an ion filtering inlet collimation device, an insulating plate cover, an insulating plate and an arc-shaped electrode, wherein the insulating plate is fixed in the middle of the ion filtering device shell, the arc-shaped electrode is tightly attached to the insulating plate, and the insulating plate cover is arranged on the arc-shaped electrode; the ion filtering inlet collimating device is arranged at the ion filtering inlet of the ion filtering device shell; the connecting piece is fixed at an ion filtering outlet of the ion filtering device shell, the front end of the collimation cylinder penetrates through the connecting piece and extends into the ion filtering device shell to be close to the arc-shaped electrode, and the rear end of the collimation cylinder is arranged in the E multiplied by B speed filtering module. The E multiplied by B probe adopts the arc-shaped electrode, the collimation magnetic screen and the outlet collimation magnetic screen, so that the resolution of the E multiplied by B probe is improved, and the impurity content in the result is reduced.)

1. An ExB probe is characterized by comprising an ion filtering collimation module, a connecting piece (6), a collimation cylinder (8) and an ExB speed filtering module;

the ion filtering collimation module comprises an ion filtering device shell (1), an ion filtering inlet collimation device (2), an insulating plate cover (3), an insulating plate (4) and an arc electrode (5), wherein the insulating plate (4) is fixed in the middle of the ion filtering device shell (1), the arc electrode (5) is tightly attached to the insulating plate (4), and the insulating plate cover (3) is arranged on the arc electrode (5); the ion filtering inlet collimation device (2) is arranged at an ion filtering inlet of the ion filtering device shell (1);

the connecting piece (6) is fixed at an ion filtering outlet of the ion filtering device shell (1), the front end of the collimating cylinder body (8) penetrates through the connecting piece (6) and extends into the ion filtering device shell (1) to be close to the arc-shaped electrode (5), and the rear end of the collimating cylinder body (8) is arranged in the E x B speed filtering module.

2. An E x B probe according to claim 1, wherein an ion filtering inlet collimating metal sheet (17) is arranged between the ion filtering inlet collimating means (2) and the arc-shaped electrode (5), and the ion filtering inlet collimating metal sheet (17) is made of a pure metal or an alloy which is resistant to high temperature and corrosion.

3. An E x B probe according to claim 1, characterized in that the front end of the collimating cylinder (8) is provided with a collimating cover (7).

4. An ExB probe according to claim 3, characterized in that a collimation front end metal sheet (18) is arranged between the collimation cover (7) and the front end of the collimation cylinder (8), a collimation rear end metal sheet (19) is arranged at the rear end of the collimation cylinder (8), and the collimation front end metal sheet (18) and the collimation rear end metal sheet (19) are made of pure metal or alloy with high temperature resistance and corrosion resistance.

5. An E x B probe according to claim 1, wherein the E x B speed filter module comprises an E x B housing (16), an E x B speed filter housing (10), a magnetic pole (11), an electrode (12), a collimating magnetic shield (9), an outlet collimating magnetic shield (13), and an outlet collimating cylinder (14);

the interior of the E multiplied by B shell is tightly surrounded on the exterior of the E multiplied by B speed filtering shell (10), the left side and the right side of the interior of the E multiplied by B speed filtering shell (10) are fixed with the magnetic poles (11), the upper side and the lower side of the interior of the E multiplied by B speed filtering shell (10) are fixed with the electrodes (12), and the collimation magnetic screen (9) is fixed at the front end of the E multiplied by B speed filtering shell (10) and is close to the edge of the magnetic poles (11); the rear end of the AXB speed filtering shell (10) is provided with the outlet collimation magnetic screen (13), and the outlet collimation cylinder (14) is arranged in the outlet collimation magnetic screen (13); the rear end of the collimation cylinder (8) penetrates through the collimation magnetic screen (9) to be close to the electrode (12).

6. An ExB probe according to claim 5, characterized in that the front end of the exit collimating magnetic shield (13) is provided with exit collimating metal sheet (20) near the edge of the electrode (12), and the exit collimating metal sheet (20) is made of a pure metal or alloy that is resistant to high temperature and corrosion.

7. An ExB probe according to claim 5, wherein the end of the ExB housing is provided with channel electron multiplier fixing means (15) for fixing a channel electron multiplier receiving ions.

8. The ExB probe according to claim 1, wherein the insulating plate (4) is provided with a fixing through hole (23) and a mounting hole (24), the fixing through hole (23) is used for fixing the arc-shaped electrode (5) and filling insulating material, and the mounting hole (24) is used for fixing the insulating plate cover (3) and the insulating plate (4) with the middle part of the ion filtering device shell (1).

9. An ExB probe according to claim 1, characterized in that the arc of the arc-shaped electrode (5) is 118 ° -128 °.

10. An E x B probe according to claim 1, wherein the ion filtering inlet of the ion filtering device housing (1) is provided with a cylindrical through hole (21), the cylindrical through hole (21) being aligned with the ion filtering inlet collimating means (2).

Technical Field

The invention relates to the technical field of plasma measurement, in particular to a novel ExB probe, and particularly relates to a high-precision ExB probe which is used for measuring ion distribution in plasma and applied devices.

Background

The pursuit of low cost and high efficiency of space missions is a high risk, high difficulty, high cost activity that drives the explosion development of space propulsion systems. In the chemical propulsion with relatively mature technology, the solid propulsion has the advantage of large thrust but cannot be started for many times; the two-component liquid propulsion in liquid propulsion can produce high specific impulse, but is technically complex and expensive to manufacture. The current near-earth space mission and deep space exploration mission both put higher requirements on a space propulsion system. The electric propulsion is a propulsion technology which utilizes electric energy ionization and accelerates working medium to spray high-speed jet flow in an electromagnetic field to generate thrust, an electric propulsion system has the characteristics of high specific impulse, small pollution and long service life, and the electric propulsion system gradually occupies an important position in the development of aerospace industry. The electric thruster is a core subsystem of an electric propulsion system, about more than ten electric thrusters are successfully developed all over the world at present, and more spacecrafts are applied to the propulsion system.

Among a plurality of electric thrusters, the Hall thruster has the advantages of small volume, high thrust density and the like. The plasma drifts in an orthogonal electromagnetic field to form Hall current, the ejected jet flow is generally called as a plume, and relevant performance parameters of the thruster are obtained by diagnosing the ion characteristics in the plume, so that the thruster is optimized, and the service efficiency of the propellant is improved. In the plume, the multivalent ions have higher energy than the monovalent ions, so that the sputtering probability is easily increased, and the corrosion of the wall surface in contact with the ions is easily caused. Therefore, it is necessary to detect the ion distribution in the plume. For the measurement of multivalent ions, parameters such as multivalent ion energy distribution and the number proportion of each multivalent ion need to be obtained for plume detection. The novel E multiplied by B probe is placed in the direction deviating from the central line of the plume at different angles, measures the fraction of ions in each valence state in the direction and has higher precision.

The ions actually received by the E x B probe are ions within a certain angular range, and the measurement results show the presence of impurities therein. The conventional E multiplied by B probe can measure better results within a small angle range of the center of the plume, and a large amount of impurities exist at an angle slightly deviated from the central line of the plume to influence the measurement result, so that the E multiplied by B probe is generally used for measuring the position of the central point of the plume. Meanwhile, since the number of ions finally received by the E × B probe is too small, part of the E × B probe increases the number of ions that can be collected at the expense of decreasing the resolution of the probe. The traditional E multiplied by B probe uses a permanent magnet with stronger magnetism to provide a fixed-position magnetic field, so that the problem of difficulty in measurement caused by nonuniform magnetic field distribution exists, although the magnetic field can be relatively stable and controllable by using an electromagnet to replace the permanent magnet, the space required for reaching the same field intensity level as the permanent magnet is too large, and the application space of the E multiplied by B probe is limited.

In summary, there are the following areas to be improved with conventional E.times.B probes: (1) an inlet collimating cylinder structure is adopted, the plume receiving range of the short inlet collimating cylinder is too large, and excessive impurities exist when the short inlet collimating cylinder deviates from the center of the plume by a large angle; the number of ions received by the long inlet collimating cylinder is too small, so that an accurate detection result cannot be obtained. (2) By adopting the permanent magnet device, the edge distribution of the magnetic field is uneven and is not easy to measure.

Through the search of the prior art, the invention with application publication number CN 104730066A discloses a near-field plume mass spectrometry diagnosis E multiplied by B probe based on a Faraday cylinder, belongs to the technical field of plasma mass spectrometry diagnosis, and is mainly applied to near-field plume measurement of an ion thruster and a Hall thruster. The method comprises the following steps: the device comprises a central frame, a ferrite permanent magnet, a flat plate electrode plate, an electrode plate fixing seat, a collimator, a drift tube, a Faraday cylinder, a carbon steel shell and an anti-sputtering heat-insulating layer. The connection relationship is as follows: the central frame is used as a core component, the ferrite permanent magnets are respectively arranged on the upper surface and the lower surface of the central frame, and the electrode plates are fixed inside the central frame to form a uniform orthogonal electromagnetic field region. The probe is packaged by six carbon steel shells, and the front end of the probe shell is coated by a sputtering-proof heat-insulating layer. The stainless steel collimator and the drift tube are fixed at the centers of two ends of the central frame through the shaft hole in a matched manner. The E x B probe has uneven magnetic field distribution and a large amount of impurities influencing the measurement result.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide an E x B probe.

The purpose of the invention is realized by the following scheme:

the invention provides an E multiplied by B probe, which comprises an ion filtering collimation module, a connecting piece, a collimation cylinder and an E multiplied by B speed filtering module;

the ion filtering collimation module comprises an ion filtering device shell, an ion filtering inlet collimation device, an insulating plate cover, an insulating plate and an arc-shaped electrode, wherein the insulating plate is fixed in the middle of the ion filtering device shell, the arc-shaped electrode is tightly attached to the insulating plate, and the insulating plate cover is arranged on the arc-shaped electrode; the ion filtering inlet collimation device is arranged at an ion filtering inlet of the ion filtering device shell;

the connecting piece is fixed at an ion filtering outlet of the ion filtering device shell, the front end of the collimation cylinder penetrates through the connecting piece and extends into the ion filtering device shell to be close to the arc-shaped electrode, and the rear end of the collimation cylinder is arranged in the E x B speed filtering module.

Furthermore, an ion filtering inlet collimating metal sheet is arranged between the ion filtering inlet collimating device and the arc-shaped electrode, and the ion filtering inlet collimating metal sheet is made of high-temperature-resistant and corrosion-resistant pure metal or alloy.

Furthermore, the front end of the collimation cylinder body is provided with a collimation cover.

Furthermore, a collimation front end metal sheet is arranged between the collimation cover and the front end of the collimation cylinder, a collimation rear end metal sheet is arranged at the rear end of the collimation cylinder, and the collimation front end metal sheet and the collimation rear end metal sheet are made of high-temperature-resistant and corrosion-resistant pure metal or alloy.

Furthermore, the E × B speed filtering module comprises an E × B shell, an E × B speed filtering shell, magnetic poles, electrodes, a collimation magnetic screen, an outlet collimation magnetic screen and an outlet collimation cylinder; the inside of the E multiplied by B shell is tightly surrounded outside the E multiplied by B speed filtering shell, the left side and the right side of the inside of the E multiplied by B speed filtering shell are fixed with the magnetic poles, the upper side and the lower side of the inside of the E multiplied by B speed filtering shell are fixed with the electrodes, and the collimation magnetic screen is fixed at the front end of the E multiplied by B speed filtering shell and is close to the edge of the electrodes; the rear end of the E multiplied by B speed filtering shell is provided with the outlet collimation magnetic screen, and the outlet collimation cylinder is arranged in the outlet collimation magnetic screen; the rear end of the collimation cylinder penetrates through the collimation magnetic screen and is close to the magnetic pole.

Furthermore, an outlet collimation metal sheet is arranged at the front end of the outlet collimation magnetic screen and is close to the edge of the electrode, and the outlet collimation metal sheet is made of high-temperature-resistant and corrosion-resistant pure metal or alloy.

Furthermore, the end of the E x B shell is provided with a channel electron multiplier fixing device for fixing a channel electron multiplier for receiving ions.

Furthermore, the insulating plate is provided with a fixing through hole and a mounting hole, the fixing through hole is used for fixing the arc electrode and filling insulating materials, and the mounting hole is used for fixing the insulating plate cover and the insulating plate with the middle part of the shell of the ion filtering device.

Further, the radian of the arc-shaped electrode is 118-128 degrees.

Furthermore, a cylindrical through hole is formed in an ion filtering inlet of the ion filtering device shell, and the cylindrical through hole is aligned with the ion filtering inlet collimating device.

Compared with the prior art, the invention has the following beneficial effects:

1. the E x B probe adopts the arc-shaped electrode, has collimation effect on one hand, and can screen out the ion beam in a certain angle direction; and on the other hand, the ion-exchange membrane has a filtering function, ions with the same effective accelerating voltage are filtered, the resolution of the E multiplied by B probe is improved, and the impurity content in the result is reduced.

2. The E multiplied by B probe, the collimation magnetic screen and the outlet collimation magnetic screen are arranged at the edges of the magnetic poles and are respectively used for shielding the magnetic field generated by the magnetic poles at the front end of the E multiplied by B speed filtering shell and the magnetic field generated by the magnetic poles at the rear end of the E multiplied by B speed filtering shell, so that the magnetic induction lines at the edges of the magnetic fields are bound, and the stability at the edges of the magnetic fields is maintained.

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:

FIG. 1 is an exploded view of an E.times.B probe according to the present invention;

FIG. 2 is an overall assembly view of the E.times.B probe of the present invention;

FIG. 3 is an assembled view of the velocity filter housing and electrodes and magnetic poles of the E B probe of the present invention;

FIG. 4 is a cross-sectional view of an E.times.B probe of the present invention;

FIG. 5 is a cross-sectional view of a housing of an ion filtration device of the present invention;

FIG. 6 is a schematic view of the structure of the insulating panel of the present invention;

FIG. 7 is a schematic view of the structure of an arc electrode according to the present invention;

FIG. 8 is a schematic view of the structure of the insulating plate cover according to the present invention;

FIG. 9 is a schematic view of the structure of each foil of the present invention;

FIG. 10 is a schematic view of a magnetic pole of the present invention;

FIG. 11 is a schematic view of the structure of the collimating magnetic shield of the present invention;

FIG. 12 is a schematic view of the construction of the exit collimating magnetic shield of the present invention;

FIG. 13 is a schematic view of an E B velocity filter housing according to the present invention;

FIG. 14 is a schematic view of the structure of the E B housing of the present invention;

FIG. 15 is a schematic structural view of a channel electron multiplier mounting apparatus according to the present invention.

In the figure, 1, an ion filtering device shell, 2, an ion filtering inlet collimating device, 3, an insulating plate cover, 4, an insulating plate, 5, an arc electrode, 6, a connecting piece, 7, a collimating cover, 8, a collimating cylinder body, 9, a collimating magnetic screen, 10, an E multiplied by B speed filtering shell, 11, a magnetic pole, 12, an electrode, 13, an outlet collimating magnetic screen, 14, an outlet collimating cylinder body, 15, a channel electron multiplier fixing device, 16, an E multiplied by B shell, 17, an ion filtering inlet collimating metal sheet, 18, a collimating front end metal sheet, 19, a collimating rear end metal sheet, 20, an outlet collimating metal sheet, 21, a cylindrical through hole, 22, a lead through hole, 23, a fixing through hole, 24, a mounting hole, 25, an arc electrode lead through hole, 26, an insulating plate fixing threaded hole, 27 and a channel electron multiplier fixing port.

Detailed Description

The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.

The E multiplied by B probe screens out particles with certain speed through an orthogonal electromagnetic field based on a speed filtering basic structure. The plume detection requirement has strict requirements on the precision of the E multiplied by B probe, and for the plume detection, only ions acted by the same effective accelerating voltage can be separated out through the E multiplied by B probe speed selection method. In the plasma detection of the invention, a method of making the electric field force borne by ions equal to the centripetal force is adopted, an arc electrode structure is applied, ion beams with the same accelerating voltage are separated, the collimation and filtration effects of the arc electrode are used for improving the resolution of the E multiplied by B probe and reducing the impurity content in the result, and meanwhile, a magnetic shielding device made of soft magnetic materials is adopted at the edge of a magnetic field to bind the magnetic induction lines at the edge of the magnetic field so as to maintain the stability at the edge of the magnetic field.

The plasma firstly passes through the arc electrode in front before entering the E multiplied by B probe, and the ion beam with the same effective accelerating voltage is screened out in the arc electrode by utilizing the electric field force and centripetal force applied to the ions. On one hand, the device has a collimation effect and can screen out the ion beam in a certain angle direction; on the other hand, the ion filter has a filtering function, and ions with the same effective acceleration voltage are filtered out.

As shown in fig. 1 to 15, an E × B probe includes an ion filtering collimation module, a connection member 6, a collimation cylinder 8, and an E × B velocity filtering module;

the ion filtering collimation module comprises an ion filtering device shell 1, an ion filtering inlet collimation device 2, an insulating plate cover 3, an insulating plate 4 and an arc electrode 5, wherein the insulating plate 4 is fixed in the middle of the ion filtering device shell 1, the arc electrode 5 is tightly attached to the insulating plate 4, and the insulating plate cover 3 is arranged on the arc electrode 5; the ion filtering device is characterized in that a cylindrical through hole 21 is formed in an ion filtering inlet of the ion filtering device shell 1, and the ion filtering inlet collimating device 2 is arranged in the ion filtering device shell 1 and aligned to the cylindrical through hole 21 and used for collecting plasma beams.

The connecting piece 6 is fixed outside the ion filtering device shell 1, the front end of the collimation cylinder 8 penetrates through the connecting piece 6 and extends into the ion filtering device shell 1 to be close to the arc-shaped electrode 5, the front end of the collimation cylinder 8 is provided with a collimation cover 7, and the rear end of the collimation cylinder 8 is arranged in the E × B speed filtering shell 10.

Specifically, the E × B speed filtering module comprises an E × B shell 16, an E × B speed filtering shell 10, a magnetic pole 11, an electrode 12, a collimation magnetic screen 9, an outlet collimation magnetic screen 13 and an outlet collimation cylinder 14; the end part of the E multiplied by B shell is provided with a channel electron multiplier fixing device 15 which is used for fixing a channel electron multiplier for receiving ions; the inside of the E × B casing tightly surrounds the outside of the E × B speed filtering casing 10, the magnetic poles 11 are fixed on the left and right sides of the inside of the E × B speed filtering casing 10, the electrodes 12 are fixed on the upper and lower sides of the inside of the E × B speed filtering casing 10, and the collimating magnetic screen 9 is fixed at the front end of the E × B speed filtering casing 10 and close to the edges of the electrodes 12; the rear end of the E × B speed filtering shell 10 is provided with the outlet collimation magnetic screen 13, and the outlet collimation cylinder 14 is arranged inside the outlet collimation magnetic screen 13; the rear end of the collimating cylinder 8 passes through the collimating magnetic screen 9 and is close to the magnetic pole 11.

Specifically, an ion filtering inlet collimating metal sheet 17 is arranged between the ion filtering inlet collimating device 2 and the arc-shaped electrode 5, a collimating front end metal sheet 18 is further arranged between the collimating cover 7 and the front end of the collimating cylinder 8, a collimating rear end metal sheet 19 is arranged at the rear end of the collimating cylinder 8, an outlet collimating metal sheet 20 is arranged at the front end of the outlet collimating magnetic screen 13 and is close to the edge of the electrode 12, the ion filtering inlet collimating metal sheet 17, the collimating front end metal sheet 18, the collimating rear end metal sheet 19 and the outlet collimating metal sheet 20 are metal sheets with small holes in the centers, plasma passes through the small holes, and the metal sheets are all made of high-temperature-resistant and corrosion-resistant pure metal or alloy.

Next, the technical solution of the present invention will be described in further detail with reference to specific structures.

An ion filtering inlet collimator 2 is disposed inside the ion filtering device housing 1 for collecting and generating a plasma over a range of angles. The ion filtering device shell 1 is used as a supporting structure for placing the ion filtering inlet collimating device 2, the arc-shaped electrode 5, the insulating plate 4 and other components. And an arc-shaped electrode lead through hole 25 at the rear end of the ion filter device housing 1 for connecting the arc-shaped electrode 5 and other components through leads. The insulation plate fixing screw hole 26 at the center of the ion filtering device housing 1 is used for fixing the insulation plate 4. The insulating plate 4 is made of an insulating material with good temperature resistance, the insulating plate 4 is provided with a fixing through hole 23 and a mounting hole 24, the fixing through hole 23 is used for fixing a screw of the arc-shaped electrode, the fixing through hole 23 is used for providing a space for filling the insulating material between the insulating screw and the arc-shaped electrode, and the mounting hole 24 is used for fixing the insulating plate cover 3 and the insulating plate 4 with the middle part of the ion filtering device shell 1. The arc-shaped electrode 5 is made of aluminum with good conductivity and good temperature resistance, and can be made of other metals or alloys with good conductivity and good temperature resistance. The radian of the arc-shaped electrode 5 is 118-128 degrees, preferably, the radian of the arc-shaped electrode 5 is about 120 degrees, so that charged particles with the same accelerating voltage entering the center of the arc-shaped electrode can be gathered at the outlet. An arc-shaped electric field is formed in the arc-shaped electrode, and the plasma can be gathered into a beam again after passing through the arc-shaped electrode. The insulating plate cover 3 is arranged on the arc-shaped electrode 5 to insulate the arc-shaped electrode 5 from the ion filtering device shell 1. Preferably, the insulating plate 4 and the insulating plate cover 3 are made of high temperature resistant insulating material, polytetrafluoroethylene.

The connecting piece 6 is fixed outside the ion filtering device shell 1, and a collimating cylinder 8 arranged in the connecting piece is used for connecting the arc electrode 5 and the E multiplied by B speed filtering shell 10. The collimating cap 7 is fixed to the front end of the collimating cylinder 8 to reduce plasma erosion to the metal sheet fixed to the front end of the collimating cylinder 8. The collimating magnetic screen 9 is fixed at the front end of the E × B speed filtering casing 10, and is used for shielding the magnetic field generated at the front end of the E × B speed filtering casing 10 by the magnetic poles 11 fixed at both sides of the E × B speed filtering casing 10.

The arc-shaped electrode 5 is arranged in front of the magnetic pole 11 and the electrode 12, and an arc-shaped electric field is formed in the arc-shaped electrode, so that the plasma can be gathered into a beam again after passing through the arc-shaped electrode. The magnetic pole 11 is used for providing a magnetic field with higher magnetic field intensity, the magnetic pole 11 is made of samarium cobalt magnet with good high temperature resistance and magnetic property, and of course, other permanent magnet materials with good high temperature resistance and magnetic property can be adopted. The electrode 12 is fixed inside the filtering casing 10 of E x B speed to provide electric field for filtering ions of certain speed, and the arc electrode 5 and the electrode 12 are connected to external circuit separately to apply voltage. The exit collimating magnetic shield 13 is fixed to the rear end of the E × B speed filtering casing 10 to shield the magnetic field generated by the magnetic pole 11 at the rear end of the E × B speed filtering casing 10. The collimating magnetic screen 9 and the outlet collimating magnetic screen 13 are made of soft magnetic materials with high magnetic conductivity and good temperature resistance. An exit collimating cylinder 14 is placed inside the exit collimating magnetic shield 13 to collect the ion beam over a range of angles. The collimating magnetic shield 9 and the outlet collimating magnetic shield 13 are made of pure iron, and other high temperature resistant soft magnetic materials can be adopted.

The interior of the exb housing 16 closely surrounds the exterior of the exb velocity filter housing 10, protecting the devices within the exb housing from erosion, on the one hand, and preventing other ions from entering the interior of the exb velocity filter housing 10, on the other hand. Two wire through holes 22 are located under the exb housing for passing wires to be connected to power or ground. A channel electron multiplier fixture 15 is mounted outside the E x B housing 16 for holding a channel electron multiplier that can receive ions.

The metal sheets are respectively fixed at the rear end of the ion filtering inlet collimating device, the front end and the rear end of the collimating cylinder body and the front end of the outlet collimating cylinder body, a small hole is formed in the center, plasma passes through the small hole, the metal sheets are made of high-melting-point corrosion-resistant metal tantalum, and of course, under the condition that the plasma beam is less sputtered on the metal sheets, other high-melting-point corrosion-resistant pure metals or alloys can be adopted.

The E × B probe of the invention works as follows: an external power supply is first activated to apply a voltage to the arc-shaped electrode 5 and the electrode 12, and the channel electron multiplier is fixed in the channel electron multiplier fixing port 27 in the channel electron multiplier fixing device 15. The plasma beam enters the ion filtering inlet collimating device 2 through the cylindrical through hole 21 of the ion filtering device housing 1, and the ion filtering inlet collimating metal sheet 17 filters the incoming plasma beam into an extremely fine plasma beam and makes the plasma beam pass through the center of the arc-shaped electrode 5. The plasmas with the same accelerating voltage are converged into a beam again at the tail end of the arc-shaped electrode 5, and the plasma beam passes through the collimation front end metal sheet 18 at the front end of the collimation cylinder 8 and the collimation rear end metal sheet 19 at the rear end of the collimation cylinder 8 and then is changed into an extremely fine plasma beam again. The plasma beam enters the orthogonal area of the magnetic pole 11 and the electrode 12, and if the electric field force and the magnetic field force are equal, the plasma beam continuously passes through the outlet collimation metal sheet 20 at the front end of the outlet collimation cylinder, the outlet collimation cylinder 14 and the channel electron multiplier fixing device 15 and is collected by the channel electron multiplier. The voltage applied to the electrode 12 is constantly changed and the collection process is repeated. The charge of the collected particles can be obtained from the voltage applied to the arc-shaped electrode 5, the voltage applied to the electrode 12, the magnetic field strength at the center of the magnetic field generated by the magnetic pole 11, and the known mass of the particles. The proportion of particles with different charge amounts in the direction can be obtained according to the current intensity collected by different voltages on the electrode 12, thereby completing the measuring process of the E × B probe.

In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.