阅读说明：本技术 用于制造硅钟表部件的方法 (Method for manufacturing silicon timepiece component ) 是由 西尔万·让纳雷 于 2019-03-19 设计创作，主要内容包括：根据本发明的方法包括以下步骤：a)提供衬底(1),该衬底(1)包括第一硅层(2)、第二硅层(3)以及在第一硅层(2)和第二硅层(3)之间的中间氧化硅层(4)；b)蚀刻第一硅层(2)以在其中形成钟表部件；c)从衬底(1)释放至少由经蚀刻的第一硅层(2)的全部或部分形成的、并包括钟表部件的晶圆；d)对钟表部件进行热氧化然后脱氧；e)在钟表部件上通过热氧化或沉积形成氧化硅层；f)从晶圆(8)中分离钟表部件。(The method according to the invention comprises the following steps: a) providing a substrate (1), the substrate (1) comprising a first silicon layer (2), a second silicon layer (3) and an intermediate silicon oxide layer (4) between the first silicon layer (2) and the second silicon layer (3); b) etching the first silicon layer (2) to form a timepiece component therein; c) releasing from the substrate (1) a wafer formed at least by all or part of the etched first silicon layer (2) and comprising a timepiece component; d) thermally oxidizing and then deoxidizing the timepiece components; e) forming a silicon oxide layer on the timepiece component by thermal oxidation or deposition; f) the timepiece component is separated from the wafer (8).)

1. A method of manufacturing a timepiece component, comprising the steps of:

a) providing a substrate (1), the substrate (1) comprising a first silicon layer (2), a second silicon layer (3) and an intermediate silicon oxide layer (4) between the first silicon layer (2) and the second silicon layer (3),

b) etching the first silicon layer (2) to form the timepiece component therein,

c) Releasing from the substrate (1) a wafer (8) formed at least by all or part of the etched first silicon layer (2) and comprising the timepiece component,

d) the timepiece component is thermally oxidized and then deoxygenated,

e) forming a silicon oxide layer (10) on said timepiece component by thermal oxidation or deposition, and

f) -detaching the timepiece component from the wafer (8).

2. A method of manufacturing a timepiece component, comprising the steps of:

a) providing a substrate (20) comprising silicon layers interleaved with silicon oxide layers,

b) etching a set of layers of the substrate to form the timepiece component therein,

c) releasing from the substrate a wafer formed at least by all or part of a set of layers and comprising the timepiece-component,

d) the timepiece component is thermally oxidized and then deoxygenated,

e) forming a silicon oxide layer on said timepiece component by thermal oxidation or deposition, and

f) separating the timepiece component from the wafer.

3. The method of claim 1 or 2, wherein the etching in step b) comprises deep reactive ion etching.

4. A method according to any one of claims 1 to 3, comprising, between steps d) and e), an additional step consisting in thermally oxidizing and then deoxidizing said timepiece component.

5. Method according to claim 4, wherein step d) is used to improve the surface finish of the timepiece component, and said additional step is used to adjust the stiffness of a balance spring constituting the timepiece component.

6. A method according to claim 4 or 5, wherein during the thermal oxidation operation of the additional step the wafer (8) is in an inverted position with respect to the thermal oxidation operation of step d).

7. A method according to any one of claims 4 to 6, wherein during step e) the wafer (8) is in an inverted position with respect to the thermal oxidation operation of the additional step.

8. A method according to any one of claims 1 to 7, wherein during the high temperature oxidation operation the wafer (8) is supported by a support member (11, 12, 13) comprising a support plate (11), and a spacer (12) and a retaining element (13) carried by the support plate (11), the spacer (12) retaining a gap between the wafer (8) and the support plate (11), the retaining element (13) preventing horizontal movement of the wafer (8).

9. Method according to claim 8, wherein the spacer (12) supports the wafer (8) in an area of the wafer (8) not comprising any clock component.

10. The method according to claim 8 or 9, wherein the support plate (11) is made of silicon, quartz or silicon carbide.

11. The method according to any one of claims 8 to 10, wherein the spacer (12) and the retaining element (13) are made of quartz or silicon carbide.

12. The method according to any one of claims 8 to 11, wherein the spacer (12) and the retaining element (13) are fixed to the support plate (11) by means of a bayonet connection.

13. Method according to claim 1 and any one of claims 3 to 12, wherein step c) comprises the operation of vapor etching the intermediate silicon oxide layer (4).

14. Method according to claim 1 and any one of claims 3 to 13, wherein the wafer (8) released in step c) is formed by a portion of the first silicon layer (2) that is etched.

15. A method according to claim 1 and any one of claims 3 to 14, wherein in step b) a recess is etched in the first silicon layer (2) to define the peripheral edge of the wafer (8) to be released in step c).

16. Method according to claim 1 and any one of claims 3 to 15, wherein in step b) an opening (16) is etched in the first silicon layer (2) around the central region (17) of the timepiece component (18), said opening (16) allowing the passage of an etchant for etching the intermediate silicon oxide layer (4) during step c).

17. The method according to any one of claims 1 to 16, wherein the timepiece component comprises at least one of the following types of component: a balance spring (18), a pallet fork, a wheel, a pointer, a rocker, a lever, a spring, a balance or a part of these components.

18. A support member (11, 12, 13) for supporting a wafer (8) during thermal treatment of the wafer (8), the support member comprising a support plate (11), a spacer (12) carried by the support plate (11), the spacer (12) for maintaining a gap between the support plate (11) and the wafer (8), and a retaining element (13) for preventing horizontal movement of the wafer (8).

19. The support member (11) according to claim 18, wherein the support plate (11) is made of silicon, quartz or silicon carbide.

20. The support member (11) according to claim 18 or 19, wherein the spacer (12) and the retaining element (13) are made of quartz or silicon carbide.

21. The support member (11) according to any one of claims 18 to 20, wherein the spacer (12) and the retaining element (13) are fixed to the support plate (11) by a bayonet connection.

Technical Field

The invention concerns a method for manufacturing a timepiece component made of silicon, such as a balance spring, a pallet, a wheel, a pointer, a rocker, a lever, a spring or a balance.

Background

Methods for manufacturing silicon watch parts have been described in particular in documents EP 0732635, EP 1422436, EP 2215531 and EP 3181938.

Disclosure of Invention

The aim of the invention is to propose a method for manufacturing a high-quality silicon timepiece component.

To this end, a method according to claim 1 or 2 and its dependent claims are provided.

The invention further proposes a support member which facilitates the implementation of the method and, more generally, of the thermal treatment of the wafer. The support member is defined by claim 18 and claims dependent thereon.

Drawings

Other features and advantages of the present invention will become apparent upon reading the following detailed description and upon reference to the drawings in which:

fig. 1 to 11 schematically show successive steps of a method according to a particular embodiment of the invention;

FIGS. 12 and 13 are perspective and side views, respectively, of a support member used to support a silicon wafer during a thermal oxidation process of the silicon wafer in a method in accordance with a particular embodiment of the present invention;

FIGS. 14 and 15 schematically illustrate steps of a method according to a particular embodiment of the invention, in which an etched silicon wafer is released from a composite substrate;

FIG. 16 illustrates a composite substrate in which a method according to another embodiment of the invention may be implemented.

Detailed Description

According to a particular embodiment of the invention, the method of manufacturing a silicon timepiece component, in particular for a wristwatch, comprises the successive steps illustrated in fig. 1 to 11.

In a first step (fig. 1), a silicon-on-insulator (SOI) type substrate 1 is provided. The substrate 1 comprises an upper silicon layer 2, a lower silicon layer 3 and an intermediate silicon oxide layer 4 between the upper silicon layer 2 and the lower silicon layer 3. Silicon is single crystalline, polycrystalline or amorphous. It may or may not be doped. The thickness of the upper silicon layer 2 is selected according to the thickness of the component to be produced. The lower silicon layer 3 serves to impart sufficient rigidity to the substrate 1 to facilitate the implementation of processing and operations on the substrate 1, which will be described hereinafter.

In a second step (fig. 2), a photoresist layer 5 is deposited on the upper silicon layer 2, and this layer 5 is formed by photolithography. More precisely, the photoresist layer 5 is exposed to ultraviolet light through a mask 6, typically made of glass or quartz, the mask 6 supporting a structure 7 to be transferred, the structure 7 typically being made of chromium. The photoresist layer 5 is then developed and cured (fig. 3). At the end of these operations, the photoresist layer 5 has the same shape as the structure 7 and, in turn, constitutes a mask, this shape corresponding to the shape of a batch of timepiece components to be manufactured.

In a subsequent step (fig. 4), the upper silicon layer 2 is etched by Deep Reactive Ion Etching (DRIE) through the photoresist mask 5 to form the clock parts in this layer 2. The etching is stopped by the intermediate silicon oxide layer 4, allowing a precise thickness to be defined for the timepiece component. Etch parameters may be adjusted depending on the feature to obtain specific characteristics such as roughness or facet angle. The watch components formed in the upper silicon layer 2 are preferably identical, but may alternatively be divided into several groups, each group corresponding to a component type. For example, a timepiece component includes at least one of the following types of components: a balance spring, a pallet fork, a wheel, in particular an escape wheel, a pointer, a rocker, a lever, a spring, a balance or a part of these components. The method according to the invention is particularly suitable for regulating parts of devices (regulating organ components) and more generally for horological movement parts requiring low mass and/or low inertia.

Then, the photoresist mask 5 is removed by chemical etching or plasma etching (fig. 5).

In a subsequent step (fig. 6), the wafer 8 formed by at least all or part of the etched upper silicon layer 2 is released from the substrate 1 in a manner to be described later. The wafer 8 comprises a basic structure and a timepiece component attached to the basic structure by a bridge of material left during etching.

The wafer 8 is then placed in an oxidation oven to undergo a heat treatment, typically between 600 ℃ and 1300 ℃, oxidizing the entire outer surface of the watch part (fig. 7). The subsequent layer 9 of silicon oxide (SiO2) covering the wafer 8 and in particular the watch component is formed by consuming the silicon from the wafer 8, which causes the interface between the silicon and the silicon oxide to recede and weakens the surface defects of the silicon. Subsequently, the silicon oxide is removed by wet etching, steam etching or dry etching (fig. 8), obtaining a watch component with a good surface finish. In particular, the side roughness and surface crystal defects due to DRIE etching are greatly reduced.

At this stage of the method, the physical properties of the timepiece component or part of a timepiece component, in particular their dimensions, can be measured. These physical properties are well defined due to the previous oxidation-deoxidation step, and therefore the measurement of these physical properties can be accurate as it is not disturbed by surface defects. For balance springs, their stiffness can be determined. For a given balance spring, the stiffness can be determined by connecting the spring to a balance of predetermined inertia, measuring the frequency of the balance-spring assembly and deducing from this measurement the stiffness of the spring by calculation, while the spring is still attached to wafer 8 or detached from wafer 8. More specifically, the method described in patent application EP 3181938 may be implemented, namely a balance spring in which the stiffness of the balance spring is determined, the thickness of material to be removed from the balance spring is calculated to obtain the desired stiffness, and then the thickness of material is removed to obtain the desired stiffness. To remove this material thickness, the wafer 8 and its clock components may be thermally oxidized (fig. 9) and then deoxygenated (fig. 10) in the same manner as described above with reference to fig. 7 and 8. The operations of determining the stiffness, calculating the thickness to be removed and removing it by oxidation-deoxidation can be repeated, if necessary, to improve the dimensional accuracy of the balance spring.

In a further step of the method (fig. 11), a layer 10 of silicon oxide (SiO2) is formed on the wafer 8 and its watch parts, for example by thermal oxidation or by chemical or physical vapour deposition (CVD, PVD). This silicon oxide layer 10 coating the timepiece component increases the mechanical strength of the timepiece component. For the balance spring, as described in patents EP 1422436 and EP 2215531, the silicon oxide layer 10 has a thickness such that it can compensate for the variation of the elastic modulus of the silicon core with temperature, and the variation of the moment of inertia of the balance to which the balance spring is to be fitted with temperature, so that the frequency of the balance-spring oscillator is insensitive to temperature.

In a final step, the watch part is separated from the bottom structure of the wafer 8.

During the oxidation step (fig. 7 and 9, and fig. 11 (if applicable)), the wafer 8 is preferably supported horizontally by a support plate 11, which may be operated manually or by a robot, as shown in fig. 12 and 13. The support plate 11 is made of a material compatible with oxidation processes, such as quartz, silicon or silicon carbide. To allow uniform oxidation of the wafer 8, the wafer 8 is cushioned with respect to the support plate 11 by a gasket 12, the gasket 12 supporting the wafer 8 in areas not containing any components (in particular between the components). The wafer 8 is prevented from moving horizontally by a retaining element 13 cooperating with the peripheral edge of the wafer 8. The spacer 12 and the retaining element 13 are generally cylindrical. They are fixed relative to the support plate 11, for example attached to the support plate 11 by means of a bayonet connection. The spacer 12 and the holding element 13 are made of, for example, quartz or silicon carbide, and may be made of the same material or different materials. In the preferred embodiment, the support plate 11 is made of silicon and the spacer and retaining members 12, 13 are made of quartz. Such a support plate 11 with its spacers 12 and retaining elements 13 can also be used during the step in fig. 11 when this step comprises a CVD or PVD deposition operation.

Preferably, during the oxidation process of fig. 9, the wafer 8 is placed on the support plate 11 in an inverted position with respect to the oxidation process of fig. 7. Likewise, during the oxidation or deposition process of fig. 11, wafer 8 is placed on support plate 11 in an inverted position relative to the oxidation process of fig. 9. This prevents or at least limits the permanent deformation of the timepiece component under the effect of gravity and heat.

The step of releasing the wafer 8 from the substrate 1 (fig. 6) may be carried out by removing the entire lower silicon layer 3 and the entire intermediate silicon oxide layer 4 by chemical etching or plasma etching. Alternatively, the lower silicon layer 3 and the intermediate silicon oxide layer 4 can only be removed at the back side of the component or group of components, whereby the wafer 8 retains a part of these layers 3, 4. However, these operations are time consuming and expensive. In the present invention, it is preferred that the wafer 8 is formed from a portion of the upper silicon layer 2, and that releasing the wafer 8 from the substrate 1 is performed in a manner described below and illustrated in fig. 14 and 15.

The etched substrate 1 as shown in fig. 5 is fixed on a heating element 14 in a closed chamber 15 (fig. 14) with the upper silicon layer 2 facing downwards and thus the upper lower silicon layer 3 against the heating element 14. The method of fixing the substrate 1 on the heating element 14 may be electrostatic (by applying an electric field) or mechanical. A hydrofluoric acid (HF) solution is added to the chamber 15 without contacting the substrate 1. The vapour of hydrofluoric acid filling the interior of the chamber 15 then etches the intermediate silicon oxide layer 4 without etching the silicon. The temperature-regulated heating element 14 prevents condensation of water produced by the reaction between hydrofluoric acid and silicon oxide, which could cause the component to be released to adhere to the rest of the substrate 1.

The portion to be released, i.e. the wafer 8, is predefined by a recess formed during etching of the upper silicon layer 2, which recess forms the peripheral edge of the wafer 8. During this same etch of the upper silicon layer 2, openings 16, for example in the form of the shadows shown in fig. 15, are etched in the wafer 8 around the central region 17 containing the features. These openings 16 allow hydrofluoric acid vapor to pass through.

Fig. 15 shows an example of a wafer 8, the shape of which consists of rectangular or square parts. Of course, other shapes, such as circular, are also contemplated. In fig. 15, a watch part 18 carried by the wafer 8 can be seen, the watch part 18 here consisting of a balance spring. For ease of viewing the figures, the timepiece components are shown in a smaller number than their actual number.

The timepiece component manufactured according to the method of the invention can have very precise dimensions and a good surface finish, which will improve the operating precision and the performance of the mechanical device in which it is to be used.

The method according to the invention can of course be modified as described above.

For example, while two oxidation-deoxidation steps (fig. 7, 8 and 9, 10) for respectively improving the surface finish and adjusting the stiffness of a timepiece component (in the presence of a balance spring) are particularly advantageous, it is possible to provide only one oxidation-deoxidation step before determining the stiffness, which can both improve the surface finish and adjust the stiffness.

Alternatively, it is possible to start with a double or triple SOI substrate, or even more, i.e. a substrate comprising more than two silicon layers separated by an intermediate silicon oxide layer, such as the substrate 20 shown in fig. 16, and to etch the watch part in a set of upper layers to be subsequently released from the substrate. The watch component will then have a composite structure comprising one or more intermediate silicon oxide layers.

The photoresist mask 5 used to construct the upper silicon layer 2 (fig. 3) may be replaced by a silicon oxide mask. It is also possible to combine a photoresist mask and a silicon oxide mask to produce a multilayer watch component by etching in an upper silicon layer or a set of upper layers.

In other variations, the substrate may be etched from both sides thereof.

The silicon oxide layer(s) used to stop the etch may be reinforced by one or more parylene-type layers.

Finally, the present invention does not preclude the use of one or more metal layers to stop etching.