Line laser three-dimensional texture measuring instrument
阅读说明：本技术 一种线激光三维纹理测量仪 (Line laser three-dimensional texture measuring instrument ) 是由 聂健 王誉历 于 2020-08-25 设计创作，主要内容包括：本发明涉及精密测量设备领域,尤其是一种线激光三维纹理测量仪,其包括基础测量平台及固定安装在其上方的悬臂梁,基础测量平台上方在水平方向上正交设置丝杠滑轨结构的X向模组和Y向模组,Y向模组的滑块上固定设置载物台；悬臂梁上沿竖直方向设置Z向模组,Z向模组的滑块上固定连接镜头底板,镜头底板上设置有可调的左侧CCD相机、右侧CCD相机及两相机中部的线激光器。本发明采用线激光测量技术,配合激光光学整形结构,使激光聚焦点线宽达到0.001mm,从而提高测量的精确度；采用角度、偏距均可调整的相机空间调节座、镜头加持调节座和线激光器夹持调节座,配合激光器的十字靶标图像进行对正校准,实现精确微调。(The invention relates to the field of precision measurement equipment, in particular to a line laser three-dimensional texture measuring instrument which comprises a basic measurement platform and a cantilever beam fixedly arranged above the basic measurement platform, wherein an X-direction module and a Y-direction module of a screw rod slide rail structure are orthogonally arranged above the basic measurement platform in the horizontal direction, and an objective table is fixedly arranged on a slide block of the Y-direction module; set up Z along vertical direction on the cantilever beam to the module, Z is to fixed connection camera lens bottom plate on the slider of module, is provided with the line laser ware in adjustable left side CCD camera, right side CCD camera and two-phase machine middle part on the camera lens bottom plate. The invention adopts a line laser measurement technology and is matched with a laser optical shaping structure, so that the line width of a laser focusing point reaches 0.001mm, and the measurement accuracy is improved; the camera space adjusting seat with adjustable angle and offset distance, the lens clamping adjusting seat and the line laser clamping adjusting seat are adopted to match with a cross target image of a laser to perform alignment calibration, so that accurate fine adjustment is realized.)
1. The line laser three-dimensional texture measuring instrument is characterized by comprising a basic measuring platform (11) and a cantilever beam (12) fixedly mounted above the basic measuring platform, wherein an X-direction module (21) and a Y-direction module (23) of a screw and slide rail structure are orthogonally arranged above the basic measuring platform (11) in the horizontal direction and are respectively driven by an X-axis motor (22) and a Y-axis motor (24), the Y-direction module (23) is fixedly arranged on a sliding block of the X-direction module (21), and an objective table (27) is fixedly arranged on the sliding block of the Y-direction module (23); the cantilever beam (12) is provided with a Z-direction module (25) driven by a Z-axis motor (26) along the vertical direction, a lens bottom plate (28) is fixedly connected onto a slide block of the Z-direction module (25), and a left CCD camera (31), a right CCD camera (32) and a line laser (4) in the middle of the two cameras, which are adjustable in position and angle, are arranged on the lens bottom plate (28).
2. The line laser three-dimensional texture measuring instrument as claimed in claim 1, wherein the left side CCD camera (31) and the right side CCD camera (32) are mounted on the lens base plate (28) through a camera space adjusting base, the camera space adjusting base is an L-shaped bending plate structure and comprises a base mounting plate (331) and a camera mounting plate (333) which are perpendicular to each other, the base mounting plate (331) is mounted on the lens base plate (28) through a base mounting hole (332), and an inclined avoiding angle (336) is arranged on the base mounting plate (331); the camera is installed on the camera installation plate (333) through the camera installation hole (334), and 4 camera fine tuning screws are in threaded connection with the camera fine tuning screw holes (335) on the camera installation plate (333) and are respectively abutted to the camera.
3. The line laser three-dimensional texture measuring instrument according to claim 2, wherein the lenses of the left CCD camera (31) and the right CCD camera (32) are mounted on the lens base plate (28) through a lens clamping and adjusting seat, the lens clamping and adjusting seat comprises a bottom mounting base (341) and a lens mounting ring (343) above the bottom mounting base, the mounting base (341) is mounted on the lens base plate (28) through a base mounting hole (342), the camera lens penetrates through the lens mounting ring (343), and lens fine-tuning screws are in threaded connection with lens fine-tuning screw holes (344) circumferentially and uniformly distributed on the lens mounting ring (343) and abut against the outer peripheral surface of the camera lens in the lens mounting ring (343).
4. The line laser three-dimensional texture measuring instrument according to claim 3, wherein a positioning surface (345) is disposed on one side of the lens mounting ring (343), and the positioning surface (345) is a plane and is disposed perpendicular to the upper surface of the mounting base (341).
5. The line laser three-dimensional texture measuring instrument as claimed in claim 1, wherein the line laser (4) is mounted on the lens base plate (28) through a line laser holder, the line laser holder comprises a laser mounting base (411) on which a main laser mounting base (413) and an auxiliary laser mounting base (415) are arranged, the mounting base (411) is mounted on the lens base plate (28) through a laser mounting hole (412), a main laser adjusting threaded hole (414) is arranged above the main laser mounting base (413), and an auxiliary laser adjusting threaded hole (416) is arranged on the side surface of the auxiliary laser mounting base (415).
6. The line laser three-dimensional texture measuring instrument according to claim 1, wherein a laser optical shaping structure is arranged inside the line laser (4), and comprises a first lens (421), a second lens (422), a third lens (423), a fourth lens (424), a fifth lens (425), a sixth lens (426) and a seventh lens (427), the first lens (421) and the second lens (422) are doubly cemented, and the cemented surface bending optical diaphragm is a negative crescent lens; the third lens (423) is a biconvex lens, the fourth lens (424) is a biconvex lens, and the fifth lens (425), the sixth lens (426) and the seventh lens (427) are negative crescent lenses; the air space between the second lens (422) and the third lens (423) is 1.5mm, the air space between the third lens (423) and the fourth lens (424) is 0.2mm, the air space between the fourth lens (424) and the fifth lens (425) is 0.9mm, the air space between the fifth lens (425) and the sixth lens (426) is 1.3mm, and the air space between the sixth lens (426) and the seventh lens (427) is 2.4 mm.
7. The line laser three-dimensional texture measuring instrument according to claim 6, wherein the first lens (421) is cemented with the second lens (422) and has a focal length of H12, and the third lens (423) has a focal length of F3, which satisfy the following relation: 0.42< H12/F3< 0.68; the focal length of the fourth lens (424) is H4, the integral focal length of the fifth lens (425) and the sixth lens (426) is H56, and the relation is satisfied: -0.57< H4/H56< -0.21; the overall focal length of the fourth lens (424), the fifth lens (425) and the sixth lens (426) is H46, the focal length of the seventh lens (427) is H7, and the following relations are satisfied: -1.857< H7/H46< -3.21.
8. The line laser three-dimensional texture measuring instrument as claimed in claim 7, wherein the lens material of the laser optical shaping structure is fluorine crown glass.
9. The line laser three-dimensional texture measuring instrument according to claim 1, wherein the included angles between the left CCD camera (31) and the laser (4) and the included angles between the right CCD camera (32) and the laser (4) are respectively theta, and 5 degrees < theta ≦ 30 degrees.
Technical Field
The invention relates to the field of precision measurement equipment, in particular to a line laser three-dimensional texture measuring instrument.
Background
The development of mechanical processing technology has led to the increasing improvement of high-precision processing technology and design technology, and the measurement of micron-sized three-dimensional size and morphology becomes an essential quality detection and process control means in fine processing and ultra-fine etching processing. At present, the micron-sized laser three-dimensional size detection technology and equipment mostly adopt a point laser technical scheme, and have the defects of low measurement efficiency, inversely proportional measurement depth of field and measurement precision, and incapability of providing high-precision measurement for some large depth of field measurement requirements. Meanwhile, due to the low scanning efficiency of the point laser, the abrasion to the high-precision measuring machine is large, and the maintenance cost and the damage rate of the high-precision measuring machine can be increased.
Disclosure of Invention
The invention aims to solve the problems and provides a line laser three-dimensional texture measuring instrument, which adopts the following technical scheme:
a line laser three-dimensional texture measuring instrument comprises a basic measuring platform and a cantilever beam fixedly installed above the basic measuring platform, wherein an X-direction module and a Y-direction module of a lead screw slide rail structure are orthogonally arranged above the basic measuring platform in the horizontal direction and are respectively driven by an X-axis motor and a Y-axis motor, the Y-direction module is fixedly arranged on a slide block of the X-direction module, and an objective table is fixedly arranged on a slide block of the Y-direction module; the cantilever beam is provided with a Z-direction module driven by a Z-axis motor along the vertical direction, the Z-direction module is fixedly connected with a lens bottom plate on a sliding block, and the lens bottom plate is provided with a left CCD camera, a right CCD camera and a line laser at the middle part of the two cameras, wherein the positions and the angles of the left CCD camera and the right CCD camera are adjustable.
On the basis of the scheme, the left CCD camera and the right CCD camera are installed on the lens bottom plate through a camera space adjusting seat, the camera space adjusting seat is of an L-shaped bending plate structure and comprises a base installing plate and a camera installing plate which are perpendicular to each other, the base installing plate is installed on the lens bottom plate through a base installing hole, and an inclined avoiding angle is formed in the base installing plate; the camera passes through the camera mounting hole and installs on the camera mounting panel, and 4 camera fine setting screws are connected with camera fine setting screw hole threaded connection on the camera mounting panel to respectively with camera butt.
On the basis of the scheme, the camera lens of left side CCD camera and right side CCD camera passes through the camera lens centre gripping and adjusts the seat and install on the camera lens bottom plate, the camera lens centre gripping is adjusted the seat and is included the mounting base of bottom and the camera lens collar of top, and the mounting base passes through the base mounting hole and installs on the camera lens bottom plate, and camera lens passes the camera lens collar, and the camera lens fine setting screw of circumference equipartition is connected with camera lens fine setting screw hole screw thread on the camera lens collar to the camera lens outer peripheral face in the butt camera lens collar.
On the basis of the scheme, one side of the lens mounting ring is provided with a positioning surface which is a plane and is perpendicular to the upper surface of the mounting base.
Preferably, the line laser passes through the line laser grip slipper and installs on the camera lens bottom plate, the line laser grip slipper includes laser installation base, is provided with main laser installation base and supplementary laser installation base on it, and the installation base passes through the laser mounting hole and installs on the camera lens bottom plate, and main laser installation base top sets up main laser and adjusts the screw hole, and supplementary laser installation base side is provided with supplementary laser and adjusts the screw hole.
Preferably, a laser optical shaping structure is arranged in the line laser, and comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens, wherein the first lens and the second lens form double-gluing, and the gluing surface bending light diaphragm is a negative crescent lens; the third lens is a biconvex lens, the fourth lens is a biconvex lens, and the fifth lens, the sixth lens and the seventh lens are negative crescent lenses; the air space between the second lens and the third lens is 1.5mm, the air space between the third lens and the fourth lens is 0.2mm, the air space between the fourth lens and the fifth lens is 0.9mm, the air space between the fifth lens and the sixth lens is 1.3mm, and the air space between the sixth lens and the seventh lens is 2.4 mm.
On the basis of the scheme, the first lens is cemented with the second lens, the focal length is H12, the focal length of the third lens is F3, and the relation is satisfied: 0.42< H12/F3< 0.68; the focal length of the fourth lens is H4, the integral focal length of the fifth lens and the sixth lens is H56, and the relation is satisfied: -0.57< H4/H56< -0.21; the overall focal length of the fourth lens, the fifth lens and the sixth lens is H46, the focal length of the seventh lens is H7, and the following relations are satisfied: -1.857< H7/H46< -3.21.
On the basis of the scheme, all lens materials in the laser optical shaping structure adopt the fluorine crown glass.
Preferably, the included angles between the left CCD camera and the laser and the included angles between the right CCD camera and the laser are theta, and the theta is more than 5 degrees and less than or equal to 30 degrees.
The invention has the beneficial effects that: by adopting a line laser measurement technology and matching with a laser optical shaping structure, the line width of a laser focusing point reaches 0.001mm, so that the measurement accuracy is improved; the camera space adjusting seat with adjustable angle and offset distance, the lens clamping adjusting seat and the line laser clamping adjusting seat are adopted to match with a cross target image of a laser to perform alignment calibration, so that accurate fine adjustment is realized.
Drawings
FIG. 1: the invention has a structure schematic diagram;
FIG. 2: the invention is a structural schematic diagram of a camera space adjusting seat;
FIG. 3: the invention is a schematic structure diagram of a lens clamping and adjusting seat;
FIG. 4: the invention is a schematic diagram of a clamping and adjusting seat of a line laser;
FIG. 5: the invention is a schematic diagram of a laser optical shaping structure;
FIG. 6: the invention is a schematic diagram of a light path measurement principle.
Detailed Description
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
in the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, it is to be understood that the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
As shown in fig. 1, a line laser three-dimensional texture measuring instrument includes a basic measuring platform 11 and a cantilever beam 12 fixedly installed above the basic measuring platform 11, an X-direction module 21 and a Y-direction module 23 of a screw-and-slide rail structure are orthogonally arranged above the basic measuring platform 11 in a horizontal direction, and are respectively driven by an X-axis motor 22 and a Y-axis motor 24, the Y-direction module 23 is fixedly arranged on a slide block of the X-direction module 21, and an objective table 27 is fixedly arranged on a slide block of the Y-direction module 23, so that the objective table 27 can freely move in the horizontal plane. The cantilever beam 12 is provided with a Z-direction module 25 driven by a Z-axis motor 26 in the vertical direction, the Z-direction module 25 is fixedly connected with a lens bottom plate 28 on a sliding block, the lens bottom plate 28 is provided with a left CCD camera 31 and a right CCD camera 32 with adjustable positions and angles and a line laser 4 in the middle of the two cameras, and the Z-axis motor 26 drives the lens bottom plate 28 and the cameras and the laser 4 on the lens bottom plate to move in the vertical direction. The line laser 4 is arranged at the central symmetry line of the two cameras, the left CCD camera 31 and the right CCD camera 32 are symmetrically arranged relative to the laser 4, the cameras on the two sides are matched for use, the measurement dead angle can be eliminated to the maximum extent, the measurement of the three-dimensional space universe range is realized, the included angles between the left CCD camera 31 and the laser 4 and the included angles between the right CCD camera 32 and the laser 4 are respectively theta, the included angle theta is smaller than or equal to 30 degrees by 5 degrees, the smaller the included angle theta is, the smaller the measurement dead zone generated during the measurement of the three-dimensional space is, but the.
The camera in this scheme adopts the adjustable support technique of space three-dimensional. As shown in fig. 2, the left CCD camera 31 and the right CCD camera 32 are mounted on the lens base plate 28 through a camera space adjusting base, the camera space adjusting base is an L-shaped bending plate structure, and includes a base mounting plate 331 and a camera mounting plate 333 that are perpendicular to each other, the base mounting plate 331 is mounted on the lens base plate 28 through a base mounting hole 332, and an inclined avoiding angle 336 is provided on the base mounting plate 331 for reserving a mounting space for other components on the lens base plate 28. The camera is mounted on the camera mounting plate 333 through the camera mounting hole 334, and 4 camera fine adjustment screws are screwed with the camera fine adjustment screw holes 335 on the camera mounting plate 333 and are respectively abutted against the camera. The 4 camera fine-tuning screws are uniformly distributed on the camera mounting plate 333, flat-bottom tip screws are adopted, and the angle of the camera is finely tuned through the relative position between the camera fine-tuning screws and the camera fine-tuning screw holes 335. The camera space adjusting seat is used for fixedly mounting and adjusting the camera base part, and the camera lens part is positioned and adjusted by adopting the lens clamping adjusting seat. As shown in fig. 3, the lenses of the left CCD camera 31 and the right CCD camera 32 are mounted on the lens base plate 28 through a lens clamping and adjusting seat, the lens clamping and adjusting seat includes a mounting base 341 at the bottom and a lens mounting ring 343 above the mounting base 341, the mounting base 341 is mounted on the lens base plate 28 through a base mounting hole 342, the camera lens passes through the lens mounting ring 343, lens fine-tuning screws are in threaded connection with lens fine-tuning screw holes 344 evenly distributed on the lens mounting ring 343 in the circumferential direction and abut against the outer peripheral surface of the camera lens in the lens mounting ring 343, the number of the lens fine-tuning screws can be 4 to 6, so that the lens is fixed while the center line of the lens is finely tuned to realize deflection focusing. One side of the lens mounting ring 343 is provided with a positioning surface 345, and the positioning surface 345 is a plane and is perpendicular to the upper surface of the mounting base 341. The lens is positioned by the fixing block fixed on the lens bottom plate 28 and the positioning surface 345, so that the lens is prevented from axial deflection. The camera fine adjustment screw and the lens fine adjustment screw are adjusted to enable the focal point of the camera fine adjustment screw to be aligned to the cross target generated by the laser 4, and therefore accurate fine adjustment of the camera is achieved.
As shown in fig. 4, the line laser 4 is mounted on the lens base plate 28 through a line laser holder, which includes a laser mounting base 411, on which a main laser mounting base 413 and an auxiliary laser mounting base 415 are provided for mounting the main laser and the auxiliary laser, respectively, and the auxiliary laser performs a positioning function when being used for mounting the main laser. The mounting base 411 is mounted on the lens base plate 28 through a laser mounting hole 412, a main laser adjusting threaded hole 414 is arranged above the main laser mounting base 413, the main laser can be respectively adjusted in the deflection and the middle axis direction through the laser mounting hole 412 and the main laser adjusting threaded hole 414, and an auxiliary laser adjusting threaded hole 416 is arranged on the side surface of the auxiliary laser mounting base 415 and used for adjusting the mounting of an auxiliary laser.
In order to reduce the line width of the laser focus and improve the measurement accuracy, a laser optical shaping structure is arranged inside the line laser 4, as shown in fig. 5, the laser optical shaping structure comprises a
During installation, the central optical axes of the CCD cameras on the two sides and the central optical axis of the corresponding lens are respectively adjusted to be coaxial postures, and then the adjusted central optical axes are adjusted to be coplanar with the central axis of the laser 4; and adjusting the camera fine-tuning screw and the lens fine-tuning screw to enable the cross center target surface axes of the center optical axes of the CCD cameras on the two sides to be respectively superposed with the light center axis of the laser 4, so that the accurate alignment of the measuring equipment is realized.
Processing images shot by CCD cameras on two sides, identifying coordinate values of laser fed back on the images and sent by a laser 4, measuring and calculating three-dimensional shape parameters of a measured object by utilizing a triangulation principle, further realizing that point cloud space coordinate data is obtained from certain collected three-dimensional section data and converted into point cloud data in a three-coordinate system, realizing continuous scanning by matching with continuous motion of the three-dimensional motion system, and finally obtaining continuous space point cloud data. The measurement principle is shown in fig. 6, in the figure, the included angle between the central line of the light path of the CCD camera and the vertical laser is alpha, and alpha is a determined value, such as 30 degrees; l isOThe distance between the target center O of the CCD camera and the laser vertical point O'; l isiThe distance between the CCD camera light path and the surface contact point P and the light path feedback point P' of the measured object; h is the measurement height difference of the surface of the measured object relative to the reference surface, so that the dimensional relation calculation formula of the measured object is as the formula (1)
Wherein h ' is the distance between the laser vertical point O ' and the light path feedback point P '.
The present invention has been described above by way of example, but the present invention is not limited to the above-described specific embodiments, and any modification or variation made based on the present invention is within the scope of the present invention as claimed.