阅读说明：本技术 一种射频电源脉冲功率检测电路 (Radio frequency power supply pulse power detection circuit ) 是由 丁义国 于 2020-08-12 设计创作，主要内容包括：本发明属于集成电路设计技术领域,具体涉及一种射频电源脉冲功率检测电路。该检测电路包括信号波信号预处理电路、脉冲保持电路、电压功率转换电路,信号波为入射波或反射波,信号波信号预处理电路、脉冲保持电路、电压功率转换电路依次电连接。本发明提供的射频电源脉冲功率检测电路,可以精准检测出重复频率和占空比可变的脉冲射频功率,对连续波状态下同样可以使用,产品适应性高。(The invention belongs to the technical field of integrated circuit design, and particularly relates to a radio frequency power supply pulse power detection circuit. The detection circuit comprises a signal wave signal preprocessing circuit, a pulse holding circuit and a voltage power conversion circuit, wherein the signal wave is an incident wave or a reflected wave, and the signal wave signal preprocessing circuit, the pulse holding circuit and the voltage power conversion circuit are electrically connected in sequence. The radio frequency power supply pulse power detection circuit provided by the invention can accurately detect the pulse radio frequency power with variable repetition frequency and duty ratio, can be used in a continuous wave state, and has high product adaptability.)

1. A kind of radio frequency power supply pulse power detection circuit, characterized by that: the device comprises a signal wave signal preprocessing circuit, a pulse holding circuit and a voltage power conversion circuit, wherein the signal wave is incident wave or reflected wave, and the signal wave signal preprocessing circuit, the pulse holding circuit and the voltage power conversion circuit are electrically connected in sequence.

2. The pulsed power detection circuit of claim 1, wherein: the signal wave signal preprocessing circuit is composed of a signal amplifier U1, a resistor R1, a resistor R2, a resistor R3, a resistor R4, a resistor R5, a resistor R6, a resistor R7, a resistor R8, a resistor R9, a resistor R14, a diode D1, a diode D2, a diode D3 and a variable resistor W1, wherein the signal amplifier U1 comprises a first signal amplifier U1-1, a second signal amplifier U1-2, a third signal amplifier U1-3 and a fourth signal amplifier U1-4;

the first signal amplifier U1-1 receives a signal wave detection voltage signal output by the radio frequency power supply detector, the output end of the first signal amplifier U1-1 is connected with a resistor R7 in series and then is connected with the non-inverting input end of a third signal amplifier U1-3, and the output end of the third signal amplifier U1-3 is electrically connected with the pulse holding circuit;

one end of the variable resistor W1 is connected with-15V voltage, the other end of the variable resistor W1 is sequentially connected with a resistor R1, a diode D1, a diode D2 and a resistor R14 in series, and the other end of the resistor R14 is grounded; a fourth signal amplifier U1-4 is connected between the diode D1 and the diode D2, the output end of the fourth signal amplifier U1-4 and the positive phase input end of the first signal amplifier U1-1 are also connected with a resistor R2, and the reverse input end of the first signal amplifier U1-1 and the output end of the first signal amplifier U1-1 are connected with a resistor R3;

the positive phase input end of the second signal amplifier U1-2 is connected with the output end of a fourth signal amplifier U1-4, the output end of the second signal amplifier U1-2 is sequentially connected in series with a resistor R5 and a resistor R6 and is connected with the negative phase input end of a third signal amplifier U1-3; the inverting input end of the second signal amplifier U1-2 and the output end of the second signal amplifier U1-2 are connected with a resistor R4; the inverting input end of the third signal amplifier U1-3 and the output end of the third signal amplifier U1-3 are connected with a resistor R9;

the resistor R7 and the non-inverting input end of the third signal amplifier U1-3 are connected with the grounded resistor R8 indirectly; the diode D3 connected with the ground is led out from the resistor R5 and the resistor R6.

3. The pulsed power detection circuit of claim 2, wherein: the pulse holding circuit consists of an inverter U2, a sampling holder U3, a resistor R10, a resistor R11, a capacitor C1 and a capacitor C2;

the output end of the third signal amplifier U1-3 is electrically connected with a third pin of a sample holder U3, the first pin of the sample holder U3 is connected with a voltage of +15V, the fourth pin of the sample holder U3 is connected with a voltage of-15V, the eighth pin of the sample holder U3 is connected with a modulation pulse synchronous signal circuit, the sixth pin of the sample holder U3 is connected with a capacitor C2 in a grounding mode, and the fifth pin of the sample holder U3 is electrically connected with a voltage power conversion circuit;

the synchronous signal circuit is connected with a resistor R11 from a pulse synchronous signal and is connected with an inverter U2 in series and then connected with an eighth electric pin of a sampling holder U3, and the inverter U2 comprises a first inverter U2-1 and a second inverter U2-2 which are connected in series; a resistor R10 connected with 5V voltage is connected in parallel between the pulse synchronization signal output end and the resistor R11; the resistor R11 and the first inverter U2-1 lead out a capacitor C1 which is arranged in a grounding mode.

4. The pulsed power detection circuit of claim 3, wherein: the voltage power conversion circuit consists of a hardware multiplier U4, a resistor R12, a resistor R13, a resistor R15, a diode D4, a diode D5, a variable resistor W2 and a variable resistor W3;

the fifth electric pin of the sampling holder U3 is respectively connected to the first electric pin of a hardware multiplier U4 and the third electric pin of a hardware multiplier U4, and the second electric pin of the hardware multiplier U4 and the fourth electric pin of the hardware multiplier U4 are grounded; a +15V voltage is connected to an eighth electric pin of a hardware multiplier U4, a-15V voltage is connected to a fifth electric pin of a hardware multiplier U4, a resistor R15 is connected between a sixth electric pin of the hardware multiplier U4 and a seventh electric pin of the hardware multiplier U4, one ends of a resistor R15 and a sixth electric pin of the hardware multiplier U4 are connected to one end of a variable resistor W3, the variable resistor W3 and a variable resistor W2 are adjusted in a coordinated mode, one end of a variable resistor W2 is connected to a resistor R12 with a +15V voltage, one end of the variable resistor W2 is connected to a resistor R13 with a-15V voltage, and a signal wave power detection signal is output by the seventh electric pin of the hardware multiplier U4;

the two ends of the variable resistor W2 are grounded through a diode D4 and a diode D5 respectively, the diode D4 is connected between the variable resistor W2 and the resistor R12, and the diode D5 is connected between the variable resistor W2 and the resistor R13.

Technical Field

The invention belongs to the technical field of integrated circuit design, and particularly relates to a radio frequency power supply pulse power detection circuit which is used for detecting the radio frequency pulse power of an all-solid-state radio frequency power supply.

Background

The radio frequency represents an oscillation frequency, and the radio frequency power supply is widely applied to the fields of plasma generation, radio frequency induction heating and the like. Most radio frequency power supplies in the current market can only output continuous wave power, and in specific plasma processing application occasions, due to the fact that continuous wave power energy is large, the temperature of processed materials is too high, the material characteristics are poor and cannot be used, material waste is caused, and production cost is increased.

Under the condition, the radio frequency power output by the pulse is used for processing, and the peak power amplitude is equal to the continuous wave power, so that the average power is reduced, and the problem that the processed material is heated too high is effectively avoided. However, to output accurate pulse rf power, the peak power of rf incident and reflected waves needs to be detected accurately, the repetition frequency of the pulse is adjustable from 10Hz to 30kHz, and the duty ratio is adjustable from 10% to 90%, and the conventional peak detection circuit cannot adapt to the large-range signal change, so that a detection circuit for the impulse-resistant power of the rf power supply is urgently needed.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: aiming at the defects, the invention provides the radio frequency power supply pulse power detection circuit which can accurately detect the pulse radio frequency power with variable repetition frequency and duty ratio, can be used in a continuous wave state and has high product adaptability.

The technical scheme adopted by the invention for solving the technical problems is as follows: a radio frequency power supply pulse power detection circuit comprises a signal wave signal preprocessing circuit, a pulse holding circuit and a voltage power conversion circuit, wherein signal waves are incident waves or reflected waves, and the signal wave signal preprocessing circuit, the pulse holding circuit and the voltage power conversion circuit are electrically connected in sequence.

Further, the signal wave signal preprocessing circuit is composed of a signal amplifier U1, a resistor R1, a resistor R2, a resistor R3, a resistor R4, a resistor R5, a resistor R6, a resistor R7, a resistor R8, a resistor R9, a resistor R14, a diode D1, a diode D2, a diode D3 and a variable resistor W1, wherein the signal amplifier U1 comprises a first signal amplifier U1-1, a second signal amplifier U1-2, a third signal amplifier U1-3 and a fourth signal amplifier U1-4;

the first signal amplifier U1-1 receives a signal wave detection voltage signal output by the radio frequency power supply detector, the output end of the first signal amplifier U1-1 is connected with a resistor R7 in series and then is connected with the non-inverting input end of a third signal amplifier U1-3, and the output end of the third signal amplifier U1-3 is electrically connected with the pulse holding circuit;

one end of the variable resistor W1 is connected with-15V voltage, the other end of the variable resistor W1 is sequentially connected with a resistor R1, a diode D1, a diode D2 and a resistor R14 in series, and the other end of the resistor R14 is grounded; a fourth signal amplifier U1-4 is connected between the diode D1 and the diode D2, the output end of the fourth signal amplifier U1-4 and the positive phase input end of the first signal amplifier U1-1 are also connected with a resistor R2, and the reverse input end of the first signal amplifier U1-1 and the output end of the first signal amplifier U1-1 are connected with a resistor R3;

the positive phase input end of the second signal amplifier U1-2 is connected with the output end of a fourth signal amplifier U1-4, the output end of the second signal amplifier U1-2 is sequentially connected in series with a resistor R5 and a resistor R6 and is connected with the negative phase input end of a third signal amplifier U1-3; the inverting input end of the second signal amplifier U1-2 and the output end of the second signal amplifier U1-2 are connected with a resistor R4; the inverting input end of the third signal amplifier U1-3 and the output end of the third signal amplifier U1-3 are connected with a resistor R9;

the resistor R7 and the non-inverting input end of the third signal amplifier U1-3 are connected with the grounded resistor R8 indirectly; the diode D3 connected with the ground is led out from the resistor R5 and the resistor R6.

Furthermore, the pulse holding circuit is composed of an inverter U2, a sample holder U3, a resistor R10, a resistor R11, a capacitor C1 and a capacitor C2;

the output end of the third signal amplifier U1-3 is electrically connected with a third pin of a sample holder U3, the first pin of the sample holder U3 is connected with a voltage of +15V, the fourth pin of the sample holder U3 is connected with a voltage of-15V, the eighth pin of the sample holder U3 is connected with a modulation pulse synchronous signal circuit, the sixth pin of the sample holder U3 is connected with a capacitor C2 in a grounding mode, and the fifth pin of the sample holder U3 is electrically connected with a voltage power conversion circuit;

the synchronous signal circuit is connected with a resistor R11 from a pulse synchronous signal and is connected with an inverter U2 in series and then connected with an eighth electric pin of a sampling holder U3, and the inverter U2 comprises a first inverter U2-1 and a second inverter U2-2 which are connected in series; a resistor R10 connected with 5V voltage is connected in parallel between the pulse synchronization signal output end and the resistor R11; the resistor R11 and the first inverter U2-1 lead out a capacitor C1 which is arranged in a grounding mode.

Furthermore, the voltage power conversion circuit is composed of a hardware multiplier U4, a resistor R12, a resistor R13, a resistor R15, a diode D4, a diode D5, a variable resistor W2 and a variable resistor W3;

the fifth electric pin of the sampling holder U3 is respectively connected to the first electric pin of a hardware multiplier U4 and the third electric pin of a hardware multiplier U4, and the second electric pin of the hardware multiplier U4 and the fourth electric pin of the hardware multiplier U4 are grounded; a +15V voltage is connected to an eighth electric pin of a hardware multiplier U4, a-15V voltage is connected to a fifth electric pin of a hardware multiplier U4, a resistor R15 is connected between a sixth electric pin of the hardware multiplier U4 and a seventh electric pin of the hardware multiplier U4, one ends of a resistor R15 and a sixth electric pin of the hardware multiplier U4 are connected to one end of a variable resistor W3, the variable resistor W3 and a variable resistor W2 are adjusted in a coordinated mode, one end of a variable resistor W2 is connected to a resistor R12 with a +15V voltage, one end of the variable resistor W2 is connected to a resistor R13 with a-15V voltage, and a signal wave power detection signal is output by the seventh electric pin of the hardware multiplier U4;

the two ends of the variable resistor W2 are grounded through a diode D4 and a diode D5 respectively, the diode D4 is connected between the variable resistor W2 and the resistor R12, and the diode D5 is connected between the variable resistor W2 and the resistor R13.

The invention has the beneficial effects that:

by adopting the scheme, the signal wave signal and processing circuit provides direct current bias current for the detection diode of the radio frequency power coupler, so that the detection diode is in a linear working state, and the output signal wave voltage signal is ensured to have a good linear dynamic range. Meanwhile, the zero compensation circuit is provided, when the radio frequency power supply works in a continuous wave, the detection output voltage is 0-5V direct current voltage, and when the radio frequency power supply works in a pulse mode, the detection output voltage is 0-5V pulse voltage; the pulse holding circuit can uniformly convert a direct current detection power supply and pulse detection voltage into stable direct current voltage signals through a sampling holder, so that subsequent processing is facilitated; the voltage power conversion circuit converts the voltage signal output by the pulse holding circuit into a voltage signal which is in linear correspondence with the power through a hardware multiplier and outputs the voltage signal to a control and display circuit of the radio frequency power supply. The circuit can accurately detect the pulse radio frequency power with variable repetition frequency and duty ratio, can be used in a continuous wave state, and has high product adaptability and wide application range.

Drawings

The foregoing and other objects, features, and advantages of the invention will be apparent from the following detailed description taken in conjunction with the accompanying drawings.

FIG. 1 is a detection circuit of the present invention;

FIG. 2 is a signal wave signal preprocessing circuit in the detection circuit of the present invention;

FIG. 3 is a pulse hold circuit of the detection circuit of the present invention;

FIG. 4 is a diagram of a voltage-to-power converter circuit in the detection circuit of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1, the radio frequency power supply pulse power detection circuit comprises a signal wave signal preprocessing circuit, a pulse holding circuit and a voltage power conversion circuit, wherein a signal wave is an incident wave or a reflected wave, and the signal wave signal preprocessing circuit, the pulse holding circuit and the voltage power conversion circuit are electrically connected in sequence.

Referring to fig. 2, the signal wave signal preprocessing circuit is composed of a signal amplifier U1, a resistor R1, a resistor R2, a resistor R3, a resistor R4, a resistor R5, a resistor R6, a resistor R7, a resistor R8, a resistor R9, a resistor R14, a diode D1, a diode D2, a diode D3, and a variable resistor W1, wherein the signal amplifier U1 includes a first signal amplifier U1-1, a second signal amplifier U1-2, a third signal amplifier U1-3, and a fourth signal amplifier U1-4; the first signal amplifier U1-1 receives a signal wave detection voltage signal output by the radio frequency power supply detector, the output end of the first signal amplifier U1-1 is connected with a resistor R7 in series and then is connected with the non-inverting input end of a third signal amplifier U1-3, and the output end of the third signal amplifier U1-3 is electrically connected with the pulse holding circuit; one end of the variable resistor W1 is connected with-15V voltage, the other end of the variable resistor W1 is sequentially connected with a resistor R1, a diode D1, a diode D2 and a resistor R14 in series, and the other end of the resistor R14 is grounded; a fourth signal amplifier U1-4 is connected between the diode D1 and the diode D2, the output end of the fourth signal amplifier U1-4 and the positive phase input end of the first signal amplifier U1-1 are also connected with a resistor R2, and the reverse input end of the first signal amplifier U1-1 and the output end of the first signal amplifier U1-1 are connected with a resistor R3; the positive phase input end of the second signal amplifier U1-2 is connected with the output end of a fourth signal amplifier U1-4, the output end of the second signal amplifier U1-2 is sequentially connected in series with a resistor R5 and a resistor R6 and is connected with the negative phase input end of a third signal amplifier U1-3; the inverting input end of the second signal amplifier U1-2 and the output end of the second signal amplifier U1-2 are connected with a resistor R4; the inverting input end of the third signal amplifier U1-3 and the output end of the third signal amplifier U1-3 are connected with a resistor R9; the resistor R7 and the non-inverting input end of the third signal amplifier U1-3 are connected with the grounded resistor R8 indirectly; the diode D3 connected with the ground is led out from the resistor R5 and the resistor R6.

Referring to fig. 3, the pulse holding circuit is composed of an inverter U2, a sample holder U3, a resistor R10, a resistor R11, a capacitor C1, and a capacitor C2; the output end of the third signal amplifier U1-3 is electrically connected with a third pin of a sample holder U3, the first pin of the sample holder U3 is connected with a voltage of +15V, the fourth pin of the sample holder U3 is connected with a voltage of-15V, the eighth pin of the sample holder U3 is connected with a modulation pulse synchronous signal circuit, the sixth pin of the sample holder U3 is connected with a capacitor C2 in a grounding mode, and the fifth pin of the sample holder U3 is electrically connected with a voltage power conversion circuit; the synchronous signal circuit is connected with a resistor R11 from a pulse synchronous signal and is connected with an inverter U2 in series and then connected with an eighth electric pin of a sampling holder U3, and the inverter U2 comprises a first inverter U2-1 and a second inverter U2-2 which are connected in series; a resistor R10 connected with 5V voltage is connected in parallel between the pulse synchronization signal output end and the resistor R11; the resistor R11 and the first inverter U2-1 lead out a capacitor C1 which is arranged in a grounding mode.

Referring to fig. 4, the voltage-power conversion circuit is composed of a hardware multiplier U4, a resistor R12, a resistor R13, a resistor R15, a diode D4, a diode D5, a variable resistor W2, and a variable resistor W3; the fifth electric pin of the sampling holder U3 is respectively connected to the first electric pin of a hardware multiplier U4 and the third electric pin of a hardware multiplier U4, and the second electric pin of the hardware multiplier U4 and the fourth electric pin of the hardware multiplier U4 are grounded; a +15V voltage is connected to an eighth electric pin of a hardware multiplier U4, a-15V voltage is connected to a fifth electric pin of a hardware multiplier U4, a resistor R15 is connected between a sixth electric pin of the hardware multiplier U4 and a seventh electric pin of the hardware multiplier U4, one ends of a resistor R15 and a sixth electric pin of the hardware multiplier U4 are connected to one end of a variable resistor W3, the variable resistor W3 and a variable resistor W2 are adjusted in a coordinated mode, one end of a variable resistor W2 is connected to a resistor R12 with a +15V voltage, one end of the variable resistor W2 is connected to a resistor R13 with a-15V voltage, and a signal wave power detection signal is output by the seventh electric pin of the hardware multiplier U4; the two ends of the variable resistor W2 are grounded through a diode D4 and a diode D5 respectively, the diode D4 is connected between the variable resistor W2 and the resistor R12, and the diode D5 is connected between the variable resistor W2 and the resistor R13.

The working principle of the detection circuit is as follows:

the signal wave signal preprocessing forms an adjustable voltage with the range of 0.2-1.0V through a variable resistor W1, a resistor R1, a diode D1, a diode D2 and a resistor R14, the adjustable voltage is isolated through a fourth signal amplifier U1-4, an adjustable voltage source is formed at the output end of the fourth signal amplifier U1-4, the adjustable voltage source provides about 1.0mA bias current for a detection diode of a radio frequency power supply through a resistor R2, the detection diode is enabled to be in an exponential state, and signals output by detection and the radio frequency voltage are in linear corresponding relation. Due to the bias voltage, there is a small amplitude voltage output at the output of the first signal amplifier U1 when there is no rf power output, which can disrupt the linearity. In order to eliminate the voltage, the first signal amplifier U1-1, the second signal amplifier U1-2, the resistor R3 and the resistor R4 are used for signal isolation, then the differential amplifier composed of the third signal amplifier U1-3, the resistor R5, the resistor R6, the resistor R7, the resistor R8, the resistor R9 and the diode D3 is used for eliminating the influence, and the signal output by the third signal amplifier U1-3 always keeps good linear corresponding relation with the amplitude of the radio frequency voltage signal.

When the radio frequency power supply works in a continuous wave state, the output end of the third signal amplifier U1-3 outputs a stable voltage signal; when the radio frequency power supply works in a pulse modulation state, the output end of the third signal amplifier U1-3 outputs pulsating voltage synchronous with pulses, and stable voltage signals are output under the action of the pulse holding circuit. The pulse hold circuit has two operating states:

(1) when the radio frequency power supply works in a continuous wave state, a signal applied to the resistor R11 is at a high level of 5V, is buffered by the inverter U2 and then is applied to the eighth pin of the sample-and-hold unit U3, meanwhile, a direct current signal is input to the third pin of the sample-and-hold unit U3 from signal wave signal preprocessing, and since the eighth pin of the sample-and-hold unit U3 is always at a high level, the output of the fifth pin of the sample-and-hold unit U3 is always equal to the input of the third pin of the sample-and-hold unit U3, and is a stable voltage signal.

(2) When the radio frequency power supply works in a modulation pulse state, a signal with alternating high and low levels is applied to the eighth pin of the sample holder U3, a pulse voltage signal synchronized with the eighth pin of the sample holder U3 is simultaneously input to the third pin of the sample holder U3, and when the eighth pin of the sample holder U3 inputs a high level, the fifth pin of the sample holder U3 outputs an input equal to the third pin of the sample holder U3 and simultaneously charges the capacitor C2; when the input voltage of the eighth pin of the sample-and-hold unit U3 is 0V, the fifth pin of the sample-and-hold unit U3 is powered by the capacitor C2 until the next high level comes, which ensures that the signal output by the fifth pin of the sample-and-hold unit U3 keeps continuously stable.

The output of the sampling holder U3 is a voltage signal proportional to the RF voltage, and the detection circuit needs a voltage signal proportional to the RF power according to ohm's law²and/R, performing square operation on the radio frequency voltage signal by using a hardware multiplier U4, forming a zero adjustment circuit by using a variable resistor W2, a resistor R12, a resistor R13, a diode D4 and a diode D5 to compensate the offset voltage of the hardware multiplier U4, adjusting the gain of the hardware multiplier U4 by using the variable resistor W3 and the resistor R15, and finally outputting a stable voltage signal linearly corresponding to radio frequency power at a seventh pin of the hardware multiplier U4.

The detection circuit can accurately measure the pulse radio frequency power with variable repetition frequency and duty ratio, is also suitable for use in a continuous wave state, realizes that one radio frequency power supply can be in a continuous wave mode or a pulse mode, and improves the adaptability of products.

In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.