阅读说明：本技术 一种光分路器芯片自动贴片生产工艺 (Automatic chip mounting production process for optical splitter chip ) 是由 袁春英 高小燕 何芯锐 于 2020-08-27 设计创作，主要内容包括：本发明公开了一种光分路器芯片自动贴片生产工艺,首先将晶圆放入专用固定晶圆与石英盖板治具中,用无水压缩空气对表面脏污进行处理；然后将脱离气泡胶水倒入晶圆正中,再将石英盖板平压在晶圆上方；对晶圆与盖板粘接胶层进行处理,将粘贴后的晶圆和石英盖板进行UV固化处理,而后进行高温烘烤；最后取出粘贴好的晶圆和石英盖板产品进行切割。使用本发明的生产工艺,每天每人可以粘贴40片晶圆,效率比现有工艺提升10倍,胶水用量比现有工艺降低30%,降低胶水成本,清洗晶圆减少危化品使用,提高了操作安全性,胶量控制工艺提高了产品生命,满足PCT验证标准。(The invention discloses an automatic chip mounting production process of an optical splitter chip, which comprises the following steps of firstly, putting a wafer into a special fixed wafer and quartz cover plate jig, and treating surface stains by using anhydrous compressed air; pouring the bubble-free glue into the center of the wafer, and flatly pressing the quartz cover plate on the wafer; processing the wafer and the cover plate adhesive layer, carrying out UV curing treatment on the adhered wafer and the quartz cover plate, and then carrying out high-temperature baking; and finally, taking out the adhered wafer and quartz cover plate products for cutting. By using the production process, 40 wafers can be stuck by each person every day, the efficiency is improved by 10 times compared with the prior art, the glue consumption is reduced by 30 percent compared with the prior art, the glue cost is reduced, the use of dangerous chemicals is reduced when the wafers are cleaned, the operation safety is improved, the product life is improved by the glue quantity control process, and the PCT verification standard is met.)

1. The automatic chip mounting production process of the optical splitter mainly comprises production materials including a wafer and a quartz cover plate, and is characterized by comprising the following steps:

s1: pouring the bubble-free glue into the center of the wafer, and flatly pressing the quartz cover plate on the wafer;

s2: processing the wafer and the cover plate bonding glue layer;

s3: carrying out UV curing treatment on the adhered wafer and the quartz cover plate, and then carrying out high-temperature baking;

s4: and taking out the adhered wafer and quartz cover plate product after high temperature and cutting.

2. The automatic chip-mounting production process for the optical splitter chip as claimed in claim 1, wherein before the step of adhering S1, the process further comprises the following steps:

s01: carrying a finger sleeve by an operator, putting the wafer into a special fixed wafer and quartz cover plate jig, and treating surface stains by using anhydrous compressed air;

s02: the cleaned wafer was placed with the waveguide side up on a 1cm thick glass substrate.

3. The automatic chip mounting production process for the optical splitter chip as claimed in claim 1, wherein the step S2 specifically comprises the following substeps:

s21: vertically placing the adhered wafer and the quartz cover plate into an appliance, and rotating the wafer and the quartz cover plate in a counterclockwise direction for 90 ℃ every 5 minutes until glue flows to the bonding position of the wafer and the cover plate;

s22: the adhered wafer and the quartz cover plate are flatly placed on a glass bottom plate with the thickness of 1CM, the front, the back, the left and the right of the glass bottom plate are fixed by baffles, 10kg of pressing strips are placed on the glass bottom plate, the pressing is carried out for 10 minutes, redundant glue is extruded out, and the glue layer is controlled, so that the service life of a product is prolonged.

4. The automatic chip mounting production process for the optical splitter chip as claimed in claim 1, wherein the step S3 specifically comprises the following substeps:

s31: and wiping the adhered wafer and the quartz cover plate, putting the wafer and the quartz cover plate into a UV box for curing for 40 minutes, and then taking out the wafer and baking the wafer for 4 hours at a high temperature of 100 ℃.

5. The automatic chip mounting production process for an optical splitter according to claim 3, wherein after step S21 is completed, the following operations are further performed:

s211: and checking whether the glue between the wafer and the quartz cover plate has bubbles, and if the glue has bubbles, extruding the glue at the edge to ensure that the bonding surface has no bubbles.

6. The automatic chip mounting production process for an optical splitter according to claim 3, wherein after step S22 is completed, the following operations are further performed:

s221: and putting the wafer and the quartz cover plate which are pressed with the glue into a UV (ultraviolet) box for UV5 minutes, taking out the adhered wafer finished product, treating the glue on the surface of the wafer by using a blade, and wiping the surface of the adhered finished product by using alcohol completely to avoid the contact of the alcohol and the glue layer to cause the corrosion of the glue layer during wiping.

Technical Field

The invention relates to a chip production process, in particular to an automatic chip mounting production process of an optical splitter chip, and belongs to the technical field of semiconductor chip manufacturing.

Background

Optical fiber access has become a hotspot in the field of optical communication in China, and an optical distribution network ODN is a key part of an optical access network and consists of an optical splitter, an optical fiber cable, an optical distribution line product and the like, wherein the optical splitter is a core device in the ODN, and the key part in the optical splitter is a chip from a planar optical waveguide splitter. The optical distribution network provides a transmission channel between the optical network unit and the optical line terminal through the optical splitter. The optical branching device is an integrated waveguide optical rate distribution device based on a quartz substrate, has the characteristics of small volume, wide working wavelength range, high reliability, good light branching uniformity and the like, is particularly suitable for connecting local and terminal equipment in a passive optical network and realizing branching of optical signals, and the control point of a chip is the cutting of the chip. In prior art's branching unit chip paster, cut glass apron and wafer earlier respectively and paste the wafer after will cutting with the apron again, to paster personnel technological operation height, the difficult management and control of glue quantity, glue excessively increases the grinding process production degree of difficulty, pastes the inefficiency.

Disclosure of Invention

The invention provides an automatic chip mounting production process for an optical splitter, aiming at solving the problems that the production difficulty of a grinding process is increased and the sticking efficiency is low due to the fact that the glue amount is not easy to control.

The technical scheme adopted by the automatic chip mounting production process of the optical divider disclosed by the invention is as follows:

the method is characterized by comprising the following steps:

s1: pouring the bubble-free glue into the center of the wafer, and flatly pressing the quartz cover plate on the wafer;

s2: processing the wafer and the cover plate bonding glue layer;

s3: carrying out UV curing treatment on the adhered wafer and the quartz cover plate, and then carrying out high-temperature baking;

s4: and taking out the adhered wafer and quartz cover plate product after high temperature and cutting.

Further, before the pasting step S1, the method further includes the following steps:

s01: carrying a finger sleeve by an operator, putting the wafer into a special fixed wafer and quartz cover plate jig, and treating surface stains by using anhydrous compressed air;

s02: the cleaned wafer was placed with the waveguide side up on a 1cm thick glass substrate.

Further, the step S2 specifically includes the following sub-steps:

s21: vertically placing the adhered wafer and the quartz cover plate into an appliance, and rotating the wafer and the quartz cover plate in a counterclockwise direction for 90 ℃ every 5 minutes until glue flows to the bonding position of the wafer and the cover plate;

s22: the adhered wafer and the quartz cover plate are flatly placed on a glass bottom plate with the thickness of 1CM, the front, the back, the left and the right of the glass bottom plate are fixed by baffles, 10kg of pressing strips are placed on the glass bottom plate, the pressing is carried out for 10 minutes, redundant glue is extruded out, and the glue layer is controlled, so that the service life of a product is prolonged.

Further, the step S3 specifically includes the following sub-steps:

s31: and wiping the adhered wafer and the quartz cover plate, putting the wafer and the quartz cover plate into a UV box for curing for 40 minutes, and then taking out the wafer and baking the wafer for 4 hours at a high temperature of 100 ℃.

Further, after the step S21 is completed, the following operations are required to be performed:

s211: and checking whether the glue between the wafer and the quartz cover plate has bubbles, and if the glue has bubbles, extruding the glue at the edge to ensure that the bonding surface has no bubbles.

Further, after the step S22 is completed, the following operations are required to be performed:

s221: and putting the wafer and the quartz cover plate which are pressed with the glue into a UV (ultraviolet) box for UV5 minutes, taking out the adhered wafer finished product, treating the glue on the surface of the wafer by using a blade, and wiping the surface of the adhered finished product by using alcohol completely to avoid the contact of the alcohol and the glue layer to cause the corrosion of the glue layer during wiping.

The invention achieves the following beneficial effects:

1. by using the novel process, each person can paste 40 wafers every day, and the efficiency is improved by 10 times compared with that of the existing process;

2. compared with the prior art, the glue using amount of the novel process is reduced by 30%, and the glue cost is reduced;

3. the novel process for cleaning the wafer reduces the use of hazardous chemicals, and improves the operation safety;

4. the new process glue amount control process improves the product life and meets the PCT verification standard.

Drawings

Other features and advantages of the invention will be apparent from the following description of the preferred embodiments of the invention, taken in conjunction with the accompanying drawings and from the claims. Individual features of the different embodiments shown in the figures may be combined in any desired manner in this case without going beyond the scope of the invention. In the drawings:

FIG. 1 is a block diagram of the process flow of the present invention.

The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.