阅读说明：本技术 一种新式扫描电子显微镜 (Novel scanning electron microscope ) 是由 马银平 沈非 于 2020-05-29 设计创作，主要内容包括：本发明涉及新式扫描电子显微镜,包括电子显微镜主体,以及底座；底座上设置有安装电子显微镜主体的安装座,底座上设置有供安装座放置的安装槽,安装槽的底面以及内壁均设置有减振件；安装座上设置有对电子显微镜主体安装减振的减振组件；通过将安装电子显微镜主体的部分分为底座和安装座两部分,且两部分接触处设置减振件减振,并在安装座上设置对电子显微镜主体安装减振的减振组件,不仅设置安装方便,且具有较好的二次减振效果。(The invention relates to a novel scanning electron microscope, which comprises an electron microscope main body and a base; the base is provided with a mounting seat for mounting the electron microscope main body, the base is provided with a mounting groove for placing the mounting seat, and the bottom surface and the inner wall of the mounting groove are provided with vibration damping parts; the mounting base is provided with a vibration reduction assembly for mounting vibration reduction on the electron microscope main body; the part for installing the electron microscope main body is divided into the base and the installation seat, the vibration damping part is arranged at the contact position of the two parts for damping vibration, and the vibration damping component for installing the vibration damping part on the electron microscope main body is arranged on the installation seat, so that the installation is convenient, and a better secondary vibration damping effect is achieved.)

1. A novel scanning electron microscope is characterized by comprising an electron microscope body and a base; the base is provided with an installation seat for installing the electron microscope main body, the base is provided with an installation groove for placing the installation seat, and the bottom surface and the inner wall of the installation groove are provided with vibration reduction pieces; and the mounting base is provided with a vibration reduction assembly for mounting and reducing vibration of the electron microscope main body.

2. The novel scanning electron microscope of claim 1, wherein the electron microscope body comprises a vacuum chamber, a material stage is arranged in the vacuum chamber; the vacuum chamber is provided with an electron beam emitting component for emitting electron beams to the material carrying platform and a receiving and processing unit for receiving the secondary electrons reflected by the material, converting the secondary electrons into digital signals and sending the digital signals to a computer.

3. The novel scanning electron microscope of claim 2, wherein the mounting base is provided with a receiving groove for partially receiving the vacuum chamber; the vibration reduction assembly comprises a hanging bracket arranged on the upper surface of the mounting seat, and the hanging bracket is connected with the upper surface of the vacuum chamber through a plurality of vertical hanging ropes; the bottom surface of the vacuum chamber is not in contact with the inner bottom surface of the accommodating groove, the bottom surface of the vacuum chamber is provided with a magnetic part, and the inner bottom surface of the accommodating groove is provided with a magnetic part for adsorbing the magnetic part; the inner wall of the accommodating groove is provided with an elastic limiting part for limiting the outer side surface of the vacuum chamber.

4. The novel scanning electron microscope of claim 3, wherein the elastic limiting member is an elastic air bag, and a plurality of the elastic limiting members are communicated through a multi-way tube.

5. The novel scanning electron microscope as claimed in claim 4, wherein the outer surface of the vacuum chamber is covered with a silicone vibration-damping outer layer, the silicone vibration-damping outer layer has at least three outer surfaces, and each outer surface faces at least one of the elastic air bags.

6. The novel scanning electron microscope of claim 4, wherein the multi-way tube comprises an annular tube, a plurality of branch tubes connected with the elastic air bag in a one-to-one correspondence manner are distributed on the inner side of the annular tube, and an air inlet and outlet tube is arranged on the outer side of the annular tube.

7. The novel scanning electron microscope as claimed in claim 6, wherein an annular step is provided at the opening of the accommodating groove, and an installation groove for installing the multi-pass tube is formed on the annular step; the annular step can be detachably connected with an annular cover plate for pressing the multi-way pipe to be fixed; and the surface of one side of the mounting seat is provided with an opening communicated with the annular step for the air inlet and outlet pipe to pass through.

8. The novel scanning electron microscope of claim 7, wherein a vibration monitoring sensor is arranged on the base, and an inflation and deflation mechanism is connected to the air inlet and outlet pipe; the novel scanning electron microscope also comprises a controller for controlling the operation of the air inflation and deflation mechanism; when the vibration monitoring sensor monitors that the vibration exceeds a threshold value, a signal is sent to the controller, the controller controls the inflation and deflation mechanism to deflate, and the elastic air bag is separated from the contact state with the electron microscope main body.

9. The novel scanning electron microscope as claimed in claim 8, wherein the hanger is provided with a winding and unwinding wheel for winding and unwinding the lifting rope and a servo motor for driving the winding and unwinding wheel to rotate; the servo motor is in communication connection with and controlled by the controller.

10. The novel scanning electron microscope of claim 9, wherein the vibration monitoring sensor sends a signal to the controller when monitoring that the vibration exceeds a threshold value, and the controller controls the servo motor to operate to drive the winding and unwinding wheel to rotate, unwinding the lifting rope and reducing the distance between the magnetic attraction member and the magnetic member.

Technical Field

The invention relates to the technical field of scanning electron microscopes, in particular to a novel scanning electron microscope.

Background

The scanning electron microscope is used for microscopic scanning, has high requirements on precision, and needs to reduce vibration influence from the outside as much as possible; at present, for a floor-type scanning electron microscope, the scanning electron microscope is placed on the ground, the requirement on vibration reduction is high, and the requirement is difficult to achieve by a conventional installation mode.

Disclosure of Invention

The present invention is directed to a novel scanning electron microscope, which is designed to overcome the above-mentioned shortcomings of the prior art.

The technical scheme adopted by the invention for solving the technical problems is as follows:

constructing a novel scanning electron microscope, wherein the novel scanning electron microscope comprises an electron microscope body and a base; the base is provided with an installation seat for installing the electron microscope main body, the base is provided with an installation groove for placing the installation seat, and the bottom surface and the inner wall of the installation groove are provided with vibration reduction pieces; and the mounting base is provided with a vibration reduction assembly for mounting and reducing vibration of the electron microscope main body.

The novel scanning electron microscope comprises a main body, a vacuum chamber, a scanning electron microscope and a scanning electron microscope, wherein a material carrying platform is arranged in the vacuum chamber; the vacuum chamber is provided with an electron beam emitting component for emitting electron beams to the material carrying platform and a receiving and processing unit for receiving the secondary electrons reflected by the material, converting the secondary electrons into digital signals and sending the digital signals to a computer.

The novel scanning electron microscope is characterized in that the mounting seat is provided with a containing groove for partially containing the vacuum chamber; the vibration reduction assembly comprises a hanging bracket arranged on the upper surface of the mounting seat, and the hanging bracket is connected with the upper surface of the vacuum chamber through a plurality of vertical hanging ropes; the bottom surface of the vacuum chamber is not in contact with the inner bottom surface of the accommodating groove, the bottom surface of the vacuum chamber is provided with a magnetic part, and the inner bottom surface of the accommodating groove is provided with a magnetic part for adsorbing the magnetic part; the inner wall of the accommodating groove is provided with an elastic limiting part for limiting the outer side surface of the vacuum chamber.

The novel scanning electron microscope is characterized in that the elastic limiting pieces are elastic air bags, and the elastic limiting pieces are communicated through a multi-way pipe.

The novel scanning electron microscope is characterized in that the outer side surface of the vacuum chamber is wrapped with a silica gel vibration reduction outer layer, the silica gel vibration reduction outer layer is provided with at least three outer side surfaces, and each outer side surface is opposite to at least one elastic air bag.

The novel scanning electron microscope comprises a multi-way tube, wherein the multi-way tube comprises an annular tube, a plurality of branch tubes which are connected with the elastic air bags in a one-to-one correspondence mode are distributed on the inner side of the annular tube, and an air inlet tube and an air outlet tube are arranged on the outer side of the annular tube.

According to the novel scanning electron microscope, an annular step is arranged at an opening of the accommodating groove, and an installation groove for installing the multi-way tube is formed in the annular step; the annular step can be detachably connected with an annular cover plate for pressing the multi-way pipe to be fixed; and the surface of one side of the mounting seat is provided with an opening communicated with the annular step for the air inlet and outlet pipe to pass through.

The novel scanning electron microscope is characterized in that a vibration monitoring sensor is arranged on the base, and an inflation and deflation mechanism is connected to the air inlet and outlet pipe; the novel scanning electron microscope also comprises a controller for controlling the operation of the air inflation and deflation mechanism; when the vibration monitoring sensor monitors that the vibration exceeds a threshold value, a signal is sent to the controller, the controller controls the inflation and deflation mechanism to deflate, and the elastic air bag is separated from the contact state with the electron microscope main body.

The novel scanning electron microscope is characterized in that the hanger is provided with a winding and unwinding wheel for winding and unwinding the lifting rope and a servo motor for driving the winding and unwinding wheel to rotate; the servo motor is in communication connection with and controlled by the controller.

According to the novel scanning electron microscope, when the vibration monitoring sensor monitors that the vibration exceeds a threshold value, a signal is sent to the controller, the controller controls the servo motor to operate, the winding and unwinding reel is driven to rotate, the lifting rope is unwound, and the distance between the magnetic suction piece and the magnetic piece is reduced.

The invention has the beneficial effects that: the part for installing the electron microscope main body is divided into the base and the installation seat, the vibration damping part is arranged at the contact position of the two parts for damping vibration, and the vibration damping component for installing the vibration damping part on the electron microscope main body is arranged on the installation seat, so that the installation is convenient, and a better secondary vibration damping effect is achieved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be further described with reference to the accompanying drawings and embodiments, wherein the drawings in the following description are only part of the embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive efforts according to the accompanying drawings:

FIG. 1 is a schematic diagram of a novel SEM structure according to a preferred embodiment of the present invention;

fig. 2 is a schematic block diagram of a novel scanning electron microscope in accordance with a preferred embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without inventive step, are within the scope of the present invention.

The novel scanning electron microscope of the preferred embodiment of the present invention, as shown in fig. 1 and also referring to fig. 2, includes an electron microscope body, and a base 2; the base 2 is provided with an installation seat 3 for installing an electron microscope main body, the base 2 is provided with an installation groove 20 for placing the installation seat 3, and the bottom surface and the inner wall of the installation groove 20 are provided with vibration damping pieces 200; the mounting base 3 is provided with a vibration reduction assembly for mounting and reducing vibration of the electron microscope main body; divide into base 2 and mount pad 3 two parts through the part with the installation electron microscope main part, and two parts contact department sets up the damping piece damping to set up the damping subassembly to the electron microscope main part installation damping on mount pad 3, not only set up simple to operate, and have better secondary damping effect.

Preferably, the electron microscope main body comprises a vacuum chamber 10, and a material stage 100 is arranged in the vacuum chamber 10; the vacuum chamber 10 is provided with an electron beam emitting component 11 for emitting electron beams to the material carrying platform 100, and a receiving processing unit 12 for receiving the secondary electrons reflected by the material, converting the secondary electrons into digital signals and sending the digital signals to a computer;

preferably, the electron beam emitting assembly 11 may include an electron gun for emitting an electron beam, a condenser for converging the electron beam emitted from the electron gun, a diaphragm mechanism for filtering off-axis electron beams from the electron beam focused by the condenser, a scanning coil for scanning the electron beam passing through the diaphragm mechanism, and a focusing lens located below the scanning coil for focusing the electron beam into a spot; an adjusting mechanism for driving the material carrying platform to move longitudinally and/or transversely is arranged in the vacuum chamber; the electron beam converged by the focusing lens is projected on the material to generate secondary electrons.

Preferably, the mounting base 3 is provided with a receiving groove 30 for partially receiving the vacuum chamber 10; the damping assembly comprises a hanger 31 arranged on the upper surface of the mounting seat 3, and the hanger 31 is connected with the upper surface of the vacuum chamber 10 through a plurality of vertical lifting ropes 310; the bottom surface of the vacuum chamber 10 is not in contact with the inner bottom surface of the accommodating groove 30, the bottom surface of the vacuum chamber 10 is provided with a magnetic part 101, and the inner bottom surface of the accommodating groove 30 is provided with a magnetic part 300 for adsorbing the magnetic part 101; the inner wall of the accommodating groove 30 is provided with an elastic limit piece 32 for limiting the outer side surface of the vacuum chamber 10; rely on gallows 31 and lifting rope 310 to make the unsettled setting of vacuum chamber 10, can reduce to the minimum with the vertical vibration interference from the external world to rely on magnetism to inhale the adsorption effort of piece 101 and magnetic part 300 and reduce and rock in longitudinal direction, recycle elasticity locating part 32 and carry out horizontal spacing and horizontal damping to vacuum chamber 10, thereby reach the purpose that reduces most external vibration.

Preferably, the elastic limiting member 32 is an elastic airbag 32, and the elastic limiting members 32 are communicated through a multi-way pipe 33; the elastic air bags 32 are convenient to communicate with each other, relatively uniform extrusion force is provided for the vacuum chamber 10, and good effects of buffering and damping vibration and automatic resetting are achieved.

Preferably, the outer side surface of the vacuum chamber 10 is wrapped with a silica gel vibration-damping outer layer 102, the silica gel vibration-damping outer layer 102 has at least three outer side surfaces, and each outer side surface is opposite to at least one elastic air bag 32; the stability is good.

Preferably, the multi-way tube 33 comprises an annular tube 330, a plurality of branch tubes 331 connected with the elastic air bags 32 in a one-to-one correspondence manner are distributed on the inner side of the annular tube 330, and an air inlet and outlet tube 332 is arranged on the outer side of the annular tube 330; the assembly is convenient.

Preferably, an annular step 301 is arranged at an opening of the accommodating groove 30, and an installation groove for installing the multi-way pipe 33 is formed in the annular step 301; the annular step 301 can also be detachably connected with an annular cover plate 302 for pressing the multi-way pipe 33 to be fixed; an opening 34 which is communicated with the annular step 301 and is used for the air inlet and outlet pipe 332 to pass through is arranged on one side surface of the mounting seat 3; the assembly is convenient, and the stability is good.

Preferably, the base 2 is provided with a vibration monitoring sensor 20, and the air inlet/outlet pipe 332 is connected with an air charging/discharging mechanism 4; the novel scanning electron microscope also comprises a controller 5 for controlling the operation of the inflation and deflation mechanism 4; when the vibration monitoring sensor 20 monitors that the vibration exceeds the threshold value, a signal is sent to the controller 5, the controller 5 controls the inflation and deflation mechanism 4 to deflate, and the elastic air bag 32 is separated from the contact state with the electron microscope main body; when the vibration is encountered, the elastic air bag 32 is separated from the electron microscope body in a contact state for the first time, namely, the electron microscope body is in a completely suspended state, so that the interference caused by the subsequent vibration is reduced to the minimum.

Preferably, the hanger 31 is provided with a winding and unwinding wheel 311 for winding and unwinding the lifting rope 310 and a servo motor 312 for driving the winding and unwinding wheel 311 to rotate; the servo motor 312 is in communication connection with and controlled by the controller 5; when the vibration monitoring sensor 20 monitors that the vibration exceeds the threshold value, a signal is sent to the controller 5, the controller 5 controls the servo motor 312 to operate, the winding and unwinding wheel 311 is driven to rotate, the lifting rope 310 is unwound, and the distance between the magnetic attraction piece 101 and the magnetic piece 300 is reduced; when the vibration is encountered, the electron microscope body in a suspended state descends, the distance between the magnetic part 101 and the magnetic part 300 is reduced, namely, a larger downward adsorption force is applied to the electron microscope body in the suspended state, so that the electron microscope body is stable;

as required, the magnetic members 101 and 300 can be correspondingly arranged in multiple sets.

It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.