阅读说明：本技术 一种rf屏蔽波纹管 (RF shielding corrugated pipe ) 是由 刘佳明 王鹏程 董海义 黄涛 刘顺明 谭彪 关玉慧 于 2020-08-14 设计创作，主要内容包括：本发明公开了一种RF屏蔽波纹管,包括：波纹管本体,设于其一端的第一法兰,设于其另一端的第二法兰,穿设于其内部、并与其同轴的束流内管,两个设置在束流内管内壁上、并关于束流内管的中轴线对称的挡光块,位于波纹管本体与束流内管之间的多个弹簧指,以及位于束流内管的另一端与第二法兰之间的多个接触指；束流内管的一端连接第一法兰,另一端与第二法兰间隔设置；接触指的一端固定在第二法兰上,另一端搭接在束流内管的另一端；弹簧指的一端固定在第一法兰上,另一端倾斜、并向朝向所述束流内管的中轴线的方向延伸,并压在接触指的另一端。本RF屏蔽波纹管将挡光块设置在束流内管的内壁上,降低挡光块高度,以降低阻抗,并提高空间利用率。(The invention discloses an RF shielding corrugated pipe, comprising: the beam inner tube is arranged on the inner wall of the beam inner tube and is symmetrical about the central axis of the beam inner tube, a plurality of spring fingers positioned between the corrugated tube body and the beam inner tube, and a plurality of contact fingers positioned between the other end of the beam inner tube and the second flange; one end of the beam inner tube is connected with the first flange, and the other end of the beam inner tube is arranged at an interval with the second flange; one end of the contact finger is fixed on the second flange, and the other end of the contact finger is lapped on the other end of the beam inner tube; one end of the spring finger is fixed on the first flange, and the other end of the spring finger inclines, extends towards the direction of the central axis of the beam inner tube and presses the other end of the contact finger. According to the RF shielding corrugated pipe, the light blocking block is arranged on the inner wall of the beam inner pipe, so that the height of the light blocking block is reduced, the impedance is reduced, and the space utilization rate is improved.)

1. An RF shielding bellows, comprising:

a bellows body;

the first flange is arranged at one end of the corrugated pipe body;

the second flange is arranged at the other end of the corrugated pipe body;

the beam inner tube is arranged in the corrugated tube body in a penetrating mode and is coaxial with the corrugated tube body; one end of the beam inner tube is connected to the first flange, and the other end of the beam inner tube is arranged at an interval with the second flange;

the two light blocking blocks are arranged on the inner wall of the beam inner tube and are symmetrical about the central axis of the beam inner tube; the light blocking block is provided with a light blocking surface for blocking synchronous radiation light, and the light blocking surface extends from one end part of the beam inner tube along the direction from one end to the other end of the beam inner tube and inclines towards the central axis direction of the beam inner tube;

the spring fingers are positioned between the corrugated pipe body and the beam inner pipe, the spring fingers are in a circumferential array, one end of each spring finger is fixed on the first flange, and the other end of each spring finger is inclined and extends towards the direction of the central axis of the beam inner pipe;

a plurality of contact fingers positioned between the other end of the beam inner tube and the second flange, the plurality of contact fingers being circumferentially arrayed; one end of the contact finger is fixed on the second flange, and the other end of the contact finger is lapped on the other end of the beam inner tube; the other end of the spring finger presses against the other end of the contact finger; the length direction of the contact finger is parallel to the axial lead direction of the beam inner tube.

2. The RF shielding bellows of claim 1, wherein the inner ring of the first flange extends horizontally toward the second flange and is spaced apart from the second flange to form an extension pipe, the extension pipe having two protrusions formed from an inner pipe wall thereof toward a central axis thereof, the two protrusions being symmetrical with respect to a central axis of the extension pipe, the protrusions having slopes extending in a direction from the first flange to the second flange and being inclined toward the central axis of the extension pipe; the extension pipe forms into the beam inner pipe, the axis of extension pipe is the axis of beam inner pipe, the lug forms the piece that is in the light, the inclined plane forms the light-blocking face, thereby first flange, the beam inner pipe, two pieces that are in the light structure as an organic whole.

3. The RF shielding bellows of claim 1, wherein the light-blocking block further has a connection surface connected between the light-blocking surface extension end and the beam inner tube inner wall; the included angle between the light blocking surface and the beam passing through the beam inner tube is an obtuse angle, and the included angle between the connecting surface and the beam passing through the beam inner tube is an acute angle.

4. The RF shield bellows of claim 1, wherein an annular rib is provided on an outer wall of the other end portion of the beam inner tube, a tip end of the annular rib is opposite to the other end of the spring finger, and the other end of the contact finger overlaps the annular rib.

5. The RF shielding bellows of claim 4, wherein the other end of the spring finger is curled in a circular arc shape, and the circular arc surface of the circular arc shape presses against the other end of the contact finger.

6. The RF shielding bellows of claim 1, further comprising: a first cooling structure and a second cooling structure; the second flange is also connected with a tail pipe facing the first flange, the tail pipe penetrates through the corrugated pipe body, and the tail pipe and the beam inner pipe are arranged at intervals; the first cooling structure is arranged on the outer wall of the beam inner tube, the second cooling structure is arranged on the outer wall of the tail tube, and one end of the contact finger is fixed on the tail tube; the first cooling structure includes: the beam inner tube is provided with a first annular cooling cavity formed on the outer wall of the beam inner tube, and a first cooling medium inlet and a first cooling medium outlet which are arranged on the first annular cooling cavity; the first cooling medium inlet is used for being communicated with an outlet of a cooling source, and the first cooling medium outlet is used for being communicated with an inlet of the cooling source; the second cooling structure includes: the tail pipe is provided with a tail pipe, a first annular cooling cavity formed on the outer wall of the tail pipe, and a first cooling medium inlet and a first cooling medium outlet which are arranged on the tail pipe; the second cooling medium inlet is used for being communicated with an outlet of the cooling source, and the second cooling medium outlet is used for being communicated with an inlet of the cooling source.

7. The RF shielding bellows of claim 6,

the outer wall of the beam inner tube is provided with a first annular connecting part, and the outer wall of the tail tube is provided with a second annular connecting part; one end of the corrugated pipe body is connected to the first annular connecting part, and the other end of the corrugated pipe body is connected to the second annular connecting part; the first annular cooling cavity is positioned between the first annular connecting part and the first flange and extends into the first flange; the second annular cooling cavity is located between the second annular connection and the second flange.

8. The RF shield bellows of claim 7, further comprising an annular fixing member disposed on the first annular connection portion, the annular fixing member having a circumference coinciding with a circumference of one end of the plurality of spring fingers, the one end of the spring fingers being fixed to the annular fixing member.

9. The RF shielding bellows of claim 6,

the first cooling structure further includes: the cooling system comprises a first cooling medium inlet pipe and a first cooling medium outlet pipe, wherein one end of the first cooling medium inlet pipe is communicated with the first cooling medium inlet, and the other end of the first cooling medium inlet pipe is connected with an outlet of a cooling source; one end of the first cooling medium outlet pipe is connected with the first cooling medium outlet, and the other end of the first cooling medium outlet pipe is connected with an inlet of a cooling source;

the second cooling structure further includes: a second cooling medium inlet pipe and a second cooling medium outlet pipe, wherein one end of the second cooling medium inlet pipe is connected with the second cooling medium inlet, and the other end of the second cooling medium inlet pipe is connected with an outlet of a cooling source; one end of the second cooling medium outlet pipe is connected with the second cooling medium outlet, and the other end of the second cooling medium outlet pipe is connected with an inlet of a cooling source.

10. The RF shield bellows of claim 1, wherein the spring fingers are pre-folded from a sheet of nickel-based alloy or stainless steel.

Technical Field

The application relates to the technical field of synchrotron radiation light shielding, in particular to an RF shielding corrugated pipe.

Background

The vacuum corrugated pipe mainly comprises a welding corrugated pipe and a hydraulic corrugated pipe, can bear pressure difference caused by vacuum, can do larger stretching and compressing movement in the axial direction, and can bear certain radial deviation. The strong current accelerator needs to be provided with a large amount of vacuum equipment, manufacturing errors are inevitably generated in the production process of the equipment, installation errors are generated in the installation process, collimation errors are generated in the collimation process, the vacuum chamber can generate heat expansion and cold contraction during baking and running, and the errors can be compensated by the characteristics of the corrugated pipe, so that a large amount of corrugated pipes need to be installed in the synchrotron radiation light source.

In a high-current accelerator, a beam passes through a discontinuous vacuum pipeline structure, an electromagnetic field is generated in the surrounding environment, generally called as a tail field, and the tail field reacts on the beam, so that disturbance is generated on the movement of the beam, even the beam is unstable, the quality of the beam is limited, and the impedance is a frequency domain expression form of the tail field.

The radial dimension of bellows prolongs the axial direction and changes a lot, can produce very high impedance when the beam current passes through, and high order mode electromagnetic wave can produce the energy accumulation, damages the bellows. Therefore, the corrugated pipe applied to the high-current synchrotron radiation light source is internally provided with an RF shielding structure. Meanwhile, relativistic electrons can generate synchrotron radiation light when passing through a deflection magnetic field, and a shielding corrugated pipe positioned at the downstream of a deflection magnet can be irradiated to damage a shielding structure, so that a light blocking block needs to be designed at the upstream of the shielding structure. The existing solution is to place the light-blocking block at the end of the upstream vacuum box, where the light-blocking block is at a certain distance from the shielding structure, the height is relatively high, the impedance is high, and the light-blocking block cannot be placed in some special areas due to limited space. At present, the end face or the inner surface of the flange of the shielding corrugated pipe is provided with a welding line, so that the integration of the light blocking block and the shielding corrugated pipe is limited, and the system impedance is increased.

Disclosure of Invention

The application aims at providing the RF shielding corrugated pipe, so that the light blocking block is arranged in the beam inner pipe, the height of the light blocking block and the height of the beam inner pipe are reduced, the impedance of the corrugated pipe is reduced, and the overall impedance of a system is further reduced.

The present application provides an RF shielding bellows, comprising:

a bellows body;

the first flange is arranged at one end of the corrugated pipe body;

the second flange is arranged at the other end of the corrugated pipe body;

the beam inner tube is arranged in the corrugated tube body in a penetrating mode and is coaxial with the corrugated tube body; one end of the beam inner tube is connected to the first flange, and the other end of the beam inner tube is arranged at an interval with the second flange;

the two light blocking blocks are arranged on the inner wall of the beam inner tube and are symmetrical about the central axis of the beam inner tube; the light blocking block is provided with a light blocking surface for blocking synchronous radiation light, and the light blocking surface extends from one end part of the beam inner tube along the direction from one end to the other end of the beam inner tube and inclines towards the central axis direction of the beam inner tube;

the spring fingers are positioned between the corrugated pipe body and the beam inner pipe, the spring fingers are in a circumferential array, one end of each spring finger is fixed on the first flange, and the other end of each spring finger is inclined and extends towards the direction of the central axis of the beam inner pipe;

a plurality of contact fingers positioned between the other end of the beam inner tube and the second flange, the plurality of contact fingers being circumferentially arrayed; one end of the contact finger is fixed on the second flange, and the other end of the contact finger is lapped on the other end of the beam inner tube; the other end of the spring finger presses against the other end of the contact finger; the length direction of the contact finger is parallel to the axial lead direction of the beam inner tube.

Further, the RF shielding corrugated pipe, wherein the inner ring of the first flange extends in a horizontal direction toward the second flange and is spaced apart from the second flange to form an extension pipe, the extension pipe forms two protrusions from an inner pipe wall thereof toward a central axis direction thereof, the two protrusions are symmetrical with respect to the central axis of the extension pipe, the protrusions have inclined surfaces, and the inclined surfaces extend in a direction from the first flange to the second flange and are inclined toward the central axis direction of the extension pipe; the extension pipe forms into the beam inner pipe, the axis of extension pipe is the axis of beam inner pipe, the lug forms the piece that is in the light, the inclined plane forms the light-blocking face, thereby first flange, the beam inner pipe, two pieces that are in the light structure as an organic whole.

Furthermore, the RF shielding corrugated tube, wherein the light blocking block further has a connection surface connected between the light blocking surface extension end and the inner wall of the beam inner tube; the included angle between the light blocking surface and the beam passing through the beam inner tube is an obtuse angle, and the included angle between the connecting surface and the beam passing through the beam inner tube is an acute angle.

Further, the RF shielding corrugated tube, wherein an annular rib is provided on an outer wall of an end portion of the other end of the beam inner tube, a top end of the annular rib faces the other end of the spring finger, and the other end of the contact finger is lapped on the annular rib.

Further, the other end of the spring finger is curled into an arc shape, and the arc surface of the arc shape presses the other end of the contact finger.

Further, the RF shielding bellows further includes: a first cooling structure and a second cooling structure; the second flange is also connected with a tail pipe facing the first flange, the tail pipe penetrates through the corrugated pipe body, and the tail pipe and the beam inner pipe are arranged at intervals; the first cooling structure is arranged on the outer wall of the beam inner tube, the second cooling structure is arranged on the outer wall of the tail tube, and one end of the contact finger is fixed on the tail tube; the first cooling structure includes: the beam inner tube is provided with a first annular cooling cavity formed on the outer wall of the beam inner tube, and a first cooling medium inlet and a first cooling medium outlet which are arranged on the first annular cooling cavity; the first cooling medium inlet is used for being communicated with an outlet of a cooling source, and the first cooling medium outlet is used for being communicated with an inlet of the cooling source; the second cooling structure includes: the tail pipe is provided with a tail pipe, a first annular cooling cavity formed on the outer wall of the tail pipe, and a first cooling medium inlet and a first cooling medium outlet which are arranged on the tail pipe; the second cooling medium inlet is used for being communicated with an outlet of the cooling source, and the second cooling medium outlet is used for being communicated with an inlet of the cooling source.

Further, the RF shielding bellows, wherein,

the outer wall of the beam inner tube is provided with a first annular connecting part, and the outer wall of the tail tube is provided with a second annular connecting part; one end of the corrugated pipe body is connected to the first annular connecting part, and the other end of the corrugated pipe body is connected to the second annular connecting part; the first annular cooling cavity is positioned between the first annular connecting part and the first flange and extends into the first flange; the second annular cooling cavity is located between the second annular connection and the second flange.

Further, the RF shielding corrugated pipe, wherein an annular fixing member is disposed on the first annular connecting portion, a circumference where the annular fixing member is located coincides with a circumference where one end of the plurality of spring fingers is located, and one end of the spring finger is fixed to the annular fixing member.

Further, the RF shielding bellows, wherein,

the first cooling structure further includes: the cooling system comprises a first cooling medium inlet pipe and a first cooling medium outlet pipe, wherein one end of the first cooling medium inlet pipe is communicated with the first cooling medium inlet, and the other end of the first cooling medium inlet pipe is connected with an outlet of a cooling source; one end of the first cooling medium outlet pipe is connected with the first cooling medium outlet, and the other end of the first cooling medium outlet pipe is connected with an inlet of a cooling source;

the second cooling structure further includes: a second cooling medium inlet pipe and a second cooling medium outlet pipe, wherein one end of the second cooling medium inlet pipe is connected with the second cooling medium inlet, and the other end of the second cooling medium inlet pipe is connected with an outlet of a cooling source; one end of the second cooling medium outlet pipe is connected with the second cooling medium outlet, and the other end of the second cooling medium outlet pipe is connected with an inlet of a cooling source.

Further, the RF shielding corrugated pipe, wherein the spring fingers are pre-folded and formed by a nickel-based alloy sheet or a stainless steel sheet.

The invention has the beneficial effects that:

the present application provides an RF shielding bellows, comprising: a bellows body; the first flange is arranged at one end of the corrugated pipe body; the second flange is arranged at the other end of the corrugated pipe body; the beam inner tube is arranged in the corrugated tube body in a penetrating mode and is coaxial with the corrugated tube body; one end of the beam inner tube is connected to the first flange, and the other end of the beam inner tube is arranged at an interval with the second flange; the two light blocking blocks are arranged on the inner wall of the beam inner tube and are symmetrical about the central axis of the beam inner tube; the light blocking block is provided with a light blocking surface for blocking synchronous radiation light, and the light blocking surface extends from one end part of the beam inner tube along the direction from one end to the other end of the beam inner tube and inclines towards the central axis direction of the beam inner tube; the spring fingers are positioned between the corrugated pipe body and the beam inner pipe, the spring fingers are circumferentially arrayed, one end of each spring finger is fixed on the first flange, and the other end of each spring finger extends towards the direction of the central axis of the beam inner pipe in an inclined mode; a plurality of contact fingers positioned between the other end of the beam inner tube and the second flange, the plurality of contact fingers being circumferentially arrayed; one end of the contact finger is fixed on the second flange, and the other end of the contact finger is lapped on the other end of the beam inner tube; the other end of the spring finger presses against the other end of the contact finger; the length direction of the contact finger is basically parallel to the axial lead direction of the beam current inner tube. According to the RF shielding corrugated pipe, the light blocking block is arranged on the inner wall of the beam inner pipe, the height of the light blocking block is reduced, and the purposes of reducing impedance and improving space utilization rate can be achieved.

Drawings

Fig. 1 is a schematic partial cross-sectional view of the overall structure of an RF shielding bellows provided in the present application;

fig. 2 is a partial perspective view of a RF shielding bellows provided in the present application;

fig. 3 is a partial structural schematic diagram of the RF shielding corrugated tube provided in the present application after the first flange, the beam inner tube, the light blocking block, and the first cooling structure are combined.

Detailed Description

The present application will be described in further detail below with reference to the accompanying drawings by way of specific embodiments.

The RF shielding corrugated pipe provided by the application is applied to a synchrotron radiation light source device, a storage ring vacuum chamber in the synchrotron radiation light source device is generally hundreds of meters to hundreds of meters and is divided into hundreds of sections, and two adjacent sections are connected through the RF shielding corrugated pipe to form a ring. The RF shielding corrugated pipe can absorb the variable quantity generated by the vacuum chamber due to expansion with heat and contraction with cold during the operation of the storage ring and the baking of the vacuum system, provides a working space for the connection of adjacent vacuum chamber sections, and compensates the manufacturing and installation errors of the vacuum chamber. High-current strong electron beam current close to the light speed penetrates through the inside of a beam current inner tube in the RF shielding corrugated tube, so that the particle beam current induces mirror current (also called wall current) with the same value on the beam current inner tube, and a wall current path is formed by the contact between the inner tube and the contact finger, so that the wall resistance of the corrugated tube is reduced, the coupling impedance between the corrugated tube and the beam current inner tube is reduced, higher thermal load cannot be generated on the corrugated tube, and the use requirement of a storage ring is met. The light blocking block can block synchronous radiation light emitted along a tangent line when the electron beam is deflected, and deformation failure caused by direct irradiation of the light blocking block on the shielding structure is avoided.

Referring to fig. 1 to 3, the present embodiment provides an RF shield bellows, including: the corrugated pipe comprises a corrugated pipe body 1, a first flange 2, a second flange 3, a beam inner pipe 4, two light blocking blocks 5, a plurality of spring fingers 6 and a plurality of contact fingers 7.

The corrugated pipe body 1 has certain scalability, a first flange 2 is arranged at one end (such as the left end in fig. 1) of the corrugated pipe body 1, a second flange 3 is arranged at the other end (such as the right end in fig. 1) of the corrugated pipe body 1, the first flange 2 is used for connecting with one vacuum chamber, the second flange 3 is used for connecting with another vacuum chamber, and the one vacuum chamber and the another vacuum chamber are two adjacent vacuum chambers. In the storage ring, most adjacent two vacuum chambers are connected through flanges at two ends of the corrugated pipe body to form a closed storage ring. The particle beam passes through the central axis of the beam inner tube 4, and the beam inner tube 4 is arranged in the corrugated tube body 1 in a penetrating way and is coaxial with the corrugated tube body 1. One end of the beam inner tube 4 is connected to the first flange 2, and the other end of the beam inner tube and the second flange 3 keep a spaced position relation. The two light blocking blocks 5 are positioned in the same horizontal plane, and the two light blocking blocks 5 are arranged on the inner wall of the beam inner tube 4 and are in a symmetrical relation with the central axis of the beam inner tube 4. Each light blocking block 5 has a light blocking surface 51 for blocking the synchrotron radiation light, and the light blocking surface 51 extends from one end of the beam inner tube 4 in the direction from one end to the other end of the beam inner tube 4, and is inclined toward the central axis of the beam inner tube 4. A plurality of spring fingers 6 are circumferentially arrayed between the bellows body 1 and the beam inner tube 4, one end of each spring finger 6 is fixedly connected to the first flange 1, and the other end extends obliquely downwards, that is, the other end of each spring finger 6 is oblique and extends towards the direction of the central axis of the beam inner tube 4. The plurality of contact fingers 7 are circumferentially arrayed between the other end of the beam inner tube 4 and the second flange 3, the length directions of all the contact fingers 7 are parallel to a straight line where the axis of the beam inner tube 4 is located, one end of each contact finger 7 is fixed on the second flange 3, and the other end of each contact finger 7 is in lap joint with the other end of the beam inner tube 4. The other end of the spring finger 6 presses against the other end of the contact finger 7.

In the above embodiment, the light blocking block 5 is disposed on the inner wall of the beam inner tube 4, so that the height of the light blocking block 5 is reduced, the impedance of the beam inner tube 4 can be reduced, and the space utilization rate can be improved.

In this embodiment, one end of the beam inner tube 4 is an end of the beam inner tube 4 close to the first flange 2, and the other end is an end of the beam inner tube 4 close to the second flange 3.

In the above embodiment, the number of the spring fingers 6 and the number of the contact fingers 7 are the same, and the positions of the spring fingers 6 and the positions of the contact fingers 7 are in one-to-one correspondence, all the spring fingers 6 and the contact fingers 7 in one-to-one correspondence are always in contact relation when the RF shielding corrugated pipe is compressed and stretched, so that a shielding envelope structure is formed, and the shielding envelope structure bridges the corrugated structure of the corrugated pipe body to form a direct path of mirror image current, so that wall current flows on the shielding envelope structure, the envelope structure shields the corrugated pipe structure, the continuity of a beam pipeline is improved, the excitation of high-order modes is reduced, and the problem of leakage of high-order modes is reduced. Meanwhile, the gaps between the adjacent contact fingers 7 form an air channel inside and outside the envelope, so that the air in the corrugated structure can be conveniently pumped out.

The spring fingers 6 are uniformly pressed on the contact fingers 7 one to one, and the spring fingers 6 applying the contact force and the beam inner tube 4 bearing the pressure are positioned on the same side with the contact force between the contact fingers 7 and the beam inner tube, the relative positions are kept unchanged, and the contact force cannot be changed along with the compression and the extension or the bending of the corrugated tube body 1. In the application, the spring finger 6 is formed by pre-folding a nickel-based alloy sheet or a stainless steel sheet according to a pre-folding angle. That is, the spring finger 6 is formed by bending the other end downward at an angle, which is a pre-bending angle. The contact finger 7 does not need to provide elasticity and can be made to be thin, so that the contact finger 6 can be pressed on the beam inner tube, and the contact force is not changed greatly even if the corrugated tube body is bent or the two ends are slightly eccentric. The contact fingers 7 are slightly wider than the spring fingers 6 to avoid twisting of the bellows body 1, influence on contact force when the contact fingers 7 and the spring fingers 6 are relatively offset, and even sliding of the spring fingers 6 away from the contact fingers. At the same time, the spring fingers 6 cannot be too narrow to provide a suitable spring force at a certain thickness and a certain pre-break angle.

In the application, in order to prevent the corrugated pipe body 1 from being bent or eccentric, the contact finger 7 and the beam inner pipe 4 are in two-point contact to form two contact resistance points, which causes overheating and discharging, a circle of annular convex rib 41 is arranged on the outer wall of the other end of the beam inner pipe 4, the top end of the annular convex rib 41 is opposite to the other end of the spring finger 6, and the other end of the contact finger 7 is overlapped on the top end of the annular convex rib 41, so that two-point contact cannot be generated when the corrugated pipe body 1 is bent or eccentric. Meanwhile, the deformation amount of the corrugated pipe body 1 when bent or eccentric far exceeds the thermal expansion amount of the vacuum chamber. In the present embodiment, the other end of the spring finger 6 is curled into an arc shape, and the arc surface of the arc shape presses against the other end of the contact finger 7, that is, the tip of the annular rib 41, thereby preventing contact between two points.

In this application, the inner circle of first flange 2 to the second flange 3 along the horizontal direction extension, and with be the interval position relation setting between the second flange 3, in order to form the extension pipe, this extension pipe superposes from the extension pipe and forms two lugs in the tip department of first flange 2 inner circle, these two lugs are symmetrical about the axis of extension pipe, this lug has the inclined plane, this inclined plane superposes from this extension pipe in the tip department of first flange 2 inner circle, extend along the direction of the one end to the other end of extension pipe, and form to the axis direction slope of this extension pipe. The central axis of the extension tube coincides with the central axis of the beam inner tube 4, the extension tube is formed into the beam inner tube 4, the convex block is formed into the light blocking block 5, and the inclined surface on the convex block is formed into the light blocking surface 5, so that the first flange 2, the beam inner tube 4 and the two light blocking blocks 5 are formed into an integrated structure. Therefore, the integrated structure can be processed in a machining center processing mode, compared with the traditional welding mode, one end of the beam inner tube 4 is not required to be welded on the inner ring of the first flange 2 in a welding mode (or other modes), the light blocking block 5 is not required to be welded on the inner wall of the beam inner tube 4 in a welding mode (or other modes), the joints among all the parts are in smooth transition, the surface smoothness is improved, and the impedance of the beam inner tube 4 is further reduced.

With continued reference to fig. 1, the light-blocking block 5 further has a connecting surface 52, and the connecting surface 52 is connected between the extending end of the light-blocking surface 51 (i.e. the direction from the first flange to the second flange on the light-blocking surface) and the inner wall of the beam inner tube 4. The angle formed between the light blocking surface 51 and the particle beam passing through the beam inner tube 4 is an obtuse angle, and the angle formed between the connecting surface 52 and the particle beam passing through the beam inner tube 4 is an acute angle. In this way, the extension of the light blocking surface 51 returns to a state flush with the inner wall of the beam inner tube 4 after extending for a certain distance.

With continued reference to fig. 1-3, the RF shielding structure provided by the present application further includes: a first cooling structure 8 and a second cooling structure 9. The second flange 3 is further connected with a tail pipe 31 facing the first flange 2, the tail pipe 31 and the second flange 3 are also integrally formed by machining, the tail pipe 31 is also inserted into the corrugated pipe body 1, and the tail pipe 31 and the beam inner pipe 4 are in a spaced position relation. The first cooling structure 8 is arranged on the outer wall of the beam inner tube 4, the second cooling structure 9 is arranged on the outer wall of the tail tube 31, and one end of the contact finger 7 is fixed on the tail tube 31.

The first cooling structure 8 includes: the beam current cooling device comprises a first annular cooling cavity 81 formed on the outer wall of a beam current inner tube 4, a first cooling medium inlet and a first cooling medium outlet which are arranged on the first annular cooling cavity 81, a first cooling medium inlet tube 82 and a first cooling medium outlet tube 83, wherein one end of the first cooling medium inlet tube 82 is communicated to the first cooling medium inlet, and the other end of the first cooling medium inlet tube 82 is communicated to the outlet of a cooling source. One end of the first cooling medium outlet pipe 83 is connected to the first cooling medium outlet, and the other end is connected to the inlet of the cooling source. That is, the first cooling medium inlet is communicated to the outlet of the cooling source through the first cooling medium inlet pipe 81, and the first cooling medium outlet is communicated to the inlet of the cooling source through the first cooling medium outlet pipe 82, forming a closed structure for the cooling medium to circulate.

The second cooling structure 9 includes: a second annular cooling chamber 91 formed on the outer wall of the tail pipe 31, a second cooling medium inlet and a second cooling medium outlet provided on the second annular cooling chamber 91, and a second cooling medium inlet pipe 92 and a second cooling medium outlet pipe 93. One end of the second cooling medium inlet pipe 92 is connected to the second cooling medium inlet, and the other end is connected to the outlet of the cooling source. One end of the second cooling medium outlet pipe 93 is communicated to the second cooling medium outlet, and the other end is communicated to the inlet of the cooling source. That is, the second cooling medium inlet is communicated to the outlet of the cooling source through the second cooling medium inlet pipe 92, and the second cooling medium outlet is communicated to the inlet of the cooling source through the second cooling medium outlet pipe 93, forming a closed structure in which the cooling medium circulates.

The cooling sources used by the two cooling structures can be the same, or different cooling sources can be respectively adopted, and similarly, the cooling media circulating and flowing in the two cooling structures can be the same or different. In this embodiment, the same cooling source is used for the two cooling structures, and the cooling medium is the same. The cooling medium is preferably cooling water, so that the cost is reduced.

The outer wall of the beam inner tube 4 is also provided with a first annular connecting part 42, and the outer wall of the tail tube 31 is also provided with a second annular connecting part 32. One end of the bellows body 1 is connected to the first annular connecting portion 42, and the other end of the bellows body 1 is connected to the second annular connecting portion 32. The first annular cooling cavity 81 is located between the first annular connecting portion 42 and the first flange 2, and the first annular cooling cavity 81 extends into the first flange 2 to improve the space utilization. The aforementioned second annular cooling chamber 91 is located between the second annular connection 32 and the second flange 3.

A ring-shaped fixing member 43 is further provided on the first ring-shaped connecting portion 42, the circumference of the ring-shaped fixing member 43 is overlapped with the circumference of the ring-shaped fixing member 43, and one end of each of the spring fingers 6 is fixed to the ring-shaped fixing member 43. In the actual processing process, all the spring fingers 6 are divided into two parts, the number of the spring fingers 6 in the two parts is the same, wherein one end of each spring finger 6 in each part is connected into one piece, and then the end parts of the connected spring fingers 6 are welded and fixed on the annular fixing piece 43, so that the welding uniformity can be ensured. Thereafter, the ring-shaped fixing member 43 to which the spring fingers 6 are welded is welded and fixed to the first ring-shaped connecting portion 42.

In some embodiments, the present RF shield bellows further comprises: at least one positioning structure, as shown in fig. 2, the positioning structure comprising: two connecting plates 10 that set up respectively on first annular connecting portion 42 and second annular connecting portion 32 to and locating lever 11, be provided with coaxial via hole on two connecting plates 10, wear to establish respectively in two via holes at the both ends of locating lever 11, and, the both ends of locating lever 11 all are provided with the external screw thread, and the both ends of locating lever 11 are all through the mode of two nut locking with locating lever 11 locking location. Of course, the locking and positioning needs to satisfy the condition that the bellows body 1 is not under the over-tension or over-compression state, so as to prevent the contact finger 7 from coming off due to the over-tension of the bellows body 1 in the transfer process, or prevent the contact finger 7 and the first annular connecting portion 32 from deforming due to the over-compression.

Of course, in other embodiments, the tension limit pin 12 and the compression limit pin 13 may be disposed on the positioning rod 11 to prevent over-tension or over-compression. Tensile spacing pin 12 is located the outside of connecting plate 10, and compression spacing pin 13 is located the inboard of connecting plate 10, and the tensile spacing pin 12 in outside prevents bellows body 1 overstretching, and inboard compression spacing pin 13 prevents bellows body 13 excessive compression.

In summary, in the RF shielding corrugated tube provided in this embodiment, the light blocking block is disposed on the inner wall of the beam inner tube, so as to reduce the height of the light blocking block, and achieve the purposes of reducing impedance and improving space utilization. The first flange, the beam inner tube, the light blocking block and the water cooling structure are integrally processed, so that no welding line exists on the inner surface of the RF shielding corrugated pipe, the surface smoothness is improved, and the impedance is reduced. Simultaneously, through the reasonable integration of first flange and first water-cooling structure, when realizing that the piece high-efficient water-cooling that is in the light, still improved space utilization, so, more can shorten the whole length of shielding bellows.

The foregoing is a more detailed description of the present application in connection with specific embodiments thereof, and it is not intended that the present application be limited to the specific embodiments thereof. It will be apparent to those skilled in the art from this disclosure that many more simple derivations or substitutions can be made without departing from the inventive concepts herein.