阅读说明：本技术 双电机同步驱动无油真空泵 (Oil-free vacuum pump driven synchronously by double motors ) 是由 沈文武 周忠贤 于 2021-08-12 设计创作，主要内容包括：本发明的实施例提供了一种双电机同步驱动无油真空泵,涉及抽真空技术领域。双电机同步驱动无油真空泵包括壳体、第一转子、第二转子、第一电机、第二电机和驱动器,壳体内部开设有转动空腔,第一转子通过第一轴承转动连接在转动空腔内,第二转子通过第二轴承转动连接在转动空腔内,第一电机与第一转子传动连接,第一电机用于驱动第一转子,第二电机与第二转子传动连接,第二电机用于驱动第二转子,驱动器与第一电机和第二电机电性连接,驱动器用于控制第一电机和第二电机同步驱动第一转子和第二转子。这样,能够使第一转子与第二转子保持同步转动,且第一转子与第二转子之间无需通过齿轮传动、不需要注入润滑油。(The embodiment of the invention provides a dual-motor synchronous drive oil-free vacuum pump, and relates to the technical field of vacuum pumping. Two motor synchronous drive do not have oily vacuum pump includes the casing, first rotor, the second rotor, first motor, second motor and driver, the casing is inside to have seted up and to have rotated the cavity, first rotor rotates through first bearing and connects in rotating the cavity, the second rotor rotates through the second bearing and connects in rotating the cavity, first motor is connected with first rotor transmission, first motor is used for driving first rotor, the second motor is connected with second rotor transmission, the second motor is used for driving the second rotor, driver and first motor and second motor electric connection, the driver is used for controlling first motor and first rotor of second motor synchronous drive and second rotor. Therefore, the first rotor and the second rotor can keep synchronous rotation, and the first rotor and the second rotor do not need to be in gear transmission or injected with lubricating oil.)

1. The utility model provides a two motor synchronous drive do not have oily vacuum pump which characterized in that, two motor synchronous drive do not have oily vacuum pump and include:

the device comprises a shell (110), wherein a rotating cavity (111) is formed in the shell (110);

a first rotor (120) rotatably connected within the rotating cavity (111) by a first bearing (140);

a second rotor (130) rotatably connected in the rotating cavity (111) through a second bearing (150);

a first motor (180) in transmission connection with the first rotor (120), wherein the first motor (180) is used for driving the first rotor (120);

the second motor (190) is in transmission connection with the second rotor (130), and the second motor (190) is used for driving the second rotor (130);

the driver (220) is electrically connected with the first motor (180) and the second motor (190), and the driver (220) is used for controlling the first motor (180) and the second motor (190) to synchronously drive the first rotor (120) and the second rotor (130).

2. An oil-free vacuum pump driven by two motors synchronously as claimed in claim 1, further comprising:

a first gear (160) in driving connection with the first rotor (120), the first gear (160) rotating synchronously with the first rotor (120);

the second gear (170) is in transmission connection with the second rotor (130), and the second gear (170) and the second rotor (130) rotate synchronously;

wherein the first gear (160) is matched with the second gear (170), and under the condition that the first rotor (120) and the second rotor (130) normally rotate, the mutual stress of the first gear (160) and the second gear (170) is zero.

3. The dual-motor synchronous drive oil-free vacuum pump according to claim 2, wherein a fitting clearance between the first gear (160) and the second gear (170) is less than or equal to a preset clearance, and the first rotor (120) and the second rotor (130) do not interfere with each other in a case where the fitting clearance is maintained to be less than or equal to the preset clearance.

4. The dual-motor synchronous drive oil-free vacuum pump as claimed in claim 3, wherein the first gear (160) and the second gear (170) are forced to rotate synchronously with each other under the condition that the fit clearance between the first gear (160) and the second gear (170) is zero, and the first rotor (120) and the second rotor (130) are kept to rotate synchronously.

5. The dual-motor synchronous drive oil-free vacuum pump as claimed in claim 4, wherein the driver (220) is used for controlling the first motor (180) and the second motor (190) to drive the first rotor (120) and the second rotor (130) respectively, so that the first gear (160) and the second gear (170) are restored to a state of zero mutual stress.

6. The dual-motor synchronous drive oil-free vacuum pump as claimed in claim 2, wherein the first gear (160) is sleeved on the first rotor (120), and the first gear (160) is coincident with a central line of the first rotor (120).

7. The dual-motor synchronous drive oil-free vacuum pump as claimed in claim 2, wherein the second gear (170) is sleeved on the second rotor (130), and the second gear (170) is coincident with the central line of the second rotor (130).

8. An oil-free vacuum pump driven by two motors synchronously as claimed in claim 1, further comprising:

the first encoder (200) is installed on the first motor (180), and the first encoder (200) is used for detecting the rotating position of the output shaft of the first motor (180) in real time.

9. An oil-free vacuum pump driven by two motors synchronously as claimed in claim 1, further comprising:

and the second encoder (210) is installed on the second motor (190), and the second encoder (210) is used for detecting the rotating position of the output shaft of the second motor (190) in real time.

10. The dual-motor synchronous drive oil-free vacuum pump according to claim 1, wherein the number of the first bearings (140) is two, the two first bearings (140) are respectively installed at both ends of the first rotor (120), the number of the second bearings (150) is two, and the two second bearings (150) are respectively installed at both ends of the second rotor (130).

Technical Field

The invention relates to the technical field of vacuumizing, in particular to a dual-motor synchronous drive oil-free vacuum pump.

Background

With the development and progress of the photovoltaic semiconductor industry, the control requirements on photovoltaic semiconductor processing equipment are higher and higher, the process is more and more complex and diversified, the existing vacuum pump cannot better adapt to the requirements, and the processing process is easily polluted and damaged.

Specifically, in the conventional vacuum pump, a motor is used to drive a first rotor, and the first rotor is connected to a second rotor through a gear, so that the two rotors are driven. Such a drive design has at least the following disadvantages:

1. lubricating oil needs to be injected into the gear, and the conventional vacuum pump is difficult to apply to a special process needing to avoid oil pollution;

2. through gear transmission, the heat productivity of the gear is large, and the service life is short;

3. the bearing arranged on each rotor is stressed greatly and is worn quickly, so that the service life of the bearing is short; 4. the motor generally adopts an asynchronous motor, and the cost is higher.

Disclosure of Invention

The invention aims to provide a dual-motor synchronous drive oil-free vacuum pump which can enable a first rotor and a second rotor to keep synchronous rotation, and the first rotor and the second rotor do not need to be in gear transmission and do not need to be injected with lubricating oil.

Embodiments of the invention may be implemented as follows:

in a first aspect, the present invention provides a dual-motor synchronous drive oil-free vacuum pump, which includes:

the device comprises a shell, a rotating cavity and a rotating shaft, wherein the shell is internally provided with the rotating cavity;

the first rotor is rotatably connected in the rotating cavity through a first bearing;

the second rotor is rotatably connected in the rotating cavity through a second bearing;

the first motor is in transmission connection with the first rotor and is used for driving the first rotor;

the second motor is in transmission connection with the second rotor and is used for driving the second rotor;

the driver is electrically connected with the first motor and the second motor and used for controlling the first motor and the second motor to synchronously drive the first rotor and the second rotor.

The dual-motor synchronous drive oil-free vacuum pump provided by the embodiment at least comprises the following beneficial effects:

1. the driver is adopted to control the first motor and the second motor to synchronously drive the first rotor and the second rotor, so that the first rotor and the second rotor can keep synchronous rotation, gear transmission is not needed between the first rotor and the second rotor, and lubricating oil does not need to be added to the gears, so that the dual-motor synchronous-drive oil-free vacuum pump provided by the embodiment can be suitable for a special process needing oil pollution avoidance;

2. the first rotor and the second rotor are respectively driven by the first motor and the second motor, so that the first bearing on the first rotor and the second bearing on the second rotor are relatively low in stress, and the service lives of the first bearing and the second bearing can be prolonged;

3. the first motor and the second motor are controlled by the driver, the requirements on the working performance of the first motor and the second motor are low, a high-end motor is not needed, and the equipment cost is reduced.

In an alternative embodiment, the dual-motor synchronous drive oil-free vacuum pump further comprises:

the first gear is in transmission connection with the first rotor and synchronously rotates with the first rotor;

the second gear is in transmission connection with the second rotor and synchronously rotates with the second rotor;

the first gear is matched with the second gear, and under the condition that the first rotor and the second rotor normally rotate, the mutual stress of the first gear and the second gear is zero.

The first gear and the second gear are subjected to zero mutual stress under the condition that the first rotor and the second rotor normally rotate, that is, under the condition that the first rotor and the second rotor normally rotate, the first gear and the second gear are not in contact with each other, but only when the first rotor and the second rotor are subjected to adverse effects, such as load influence, the first rotor and the second rotor suddenly rotate out of synchronization with each other, and at the moment, the first rotor and the second rotor drive the first gear and the second gear to be in contact engagement with each other, so that the first rotor and the second rotor are prevented from rotating at an excessively large angle, interfering with each other and colliding with each other.

In an alternative embodiment, the fit clearance between the first gear and the second gear is less than or equal to a preset clearance, and the first rotor and the second rotor do not interfere with each other while the fit clearance is maintained at less than or equal to the preset clearance.

Therefore, as long as the first gear and the second gear are not damaged by collision, the mutual rotation angle of the first rotor and the second rotor can be ensured to be small, and the condition that the first rotor and the second rotor interfere with each other cannot occur.

In an optional embodiment, under the condition that the fit clearance between the first gear and the second gear is zero, the first gear and the second gear are stressed to rotate synchronously, and the first rotor and the second rotor are kept to rotate synchronously.

In this way, even when the first rotor and the second rotor rotate with each other until the first gear and the second gear come into contact with each other, the first rotor and the second rotor do not interfere with each other.

In an alternative embodiment, the driver is configured to control the first motor and the second motor to drive the first rotor and the second rotor, respectively, so that the first gear and the second gear return to a state where the mutual stress is zero.

Therefore, under the condition that the first rotor and the second rotor are adversely affected and rotate asynchronously, the driver can timely control the first motor and the second motor to respectively drive the first rotor and the second rotor, so that the first gear and the second gear are restored to the state that the mutual stress is zero and the first rotor and the second rotor rotate synchronously.

In an alternative embodiment, the first gear is sleeved on the first rotor, and the first gear is overlapped with a central line of the first rotor.

In this way, the first gear and the first rotor are connected simply, and the force which can be borne by each other is large.

In an alternative embodiment, a second gear is mounted on the second rotor, the second gear coinciding with a centre line of the second rotor.

In this way, the connection form of the second gear and the second rotor is simple, and the force which can be borne by the second gear and the second rotor is large.

In an alternative embodiment, the dual-motor synchronous drive oil-free vacuum pump further comprises:

the first encoder is installed on the first motor and used for detecting the rotating position of an output shaft of the first motor in real time.

In this way, the first encoder can know the rotating position, speed and other parameters of the first rotor in real time so as to accurately control the rotating position of the first rotor.

In an alternative embodiment, the dual-motor synchronous drive oil-free vacuum pump further comprises:

and the second encoder is arranged on the second motor and is used for detecting parameters such as the rotating position, the speed and the like of an output shaft of the second motor in real time.

In this way, the rotational position of the second rotor can be known in real time by the second encoder, so that the rotational position of the second rotor can be accurately controlled.

In an alternative embodiment, the number of the first bearings is two, the two first bearings are respectively installed at both ends of the first rotor, the number of the second bearings is two, and the two second bearings are respectively installed at both ends of the second rotor.

Therefore, the supporting force of the bearing to the rotor is balanced, the rotor can rotate stably, the stress of a single bearing is reduced, and the service life of the bearing is prolonged.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a dual-motor synchronous drive oil-free vacuum pump provided in an embodiment of the present invention;

fig. 2 is a schematic structural diagram of the driver.

Icon: 100-oil-free vacuum pump driven synchronously by double motors; 110-a housing; 111-rotating the cavity; 120-a first rotor; 130-a second rotor; 140-a first bearing; 150-a second bearing; 160-a first gear; 170-a second gear; 180-a first motor; 190-a second motor; 200-a first encoder; 210-a second encoder; 220-a driver; 221-a signal interface; 222-output interface.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

Referring to fig. 1, the present embodiment provides a dual-motor synchronous drive oil-free vacuum pump 100, where the dual-motor synchronous drive oil-free vacuum pump 100 includes a housing 110, a first rotor 120, a second rotor 130, a first bearing 140, a second bearing 150, a first gear 160, a second gear 170, a first motor 180, a second motor 190, a first encoder 200, a second encoder 210, and a driver 220.

Specifically, the rotating cavity 111 is formed in the shell 110, the first rotor 120 is rotatably connected to the rotating cavity 111 through the first bearings 140, the number of the first bearings 140 is two, and the two first bearings 140 are respectively installed at two ends of the first rotor 120, so that the supporting force of the first bearings 140 on the first rotor 120 is balanced, stable rotation of the first rotor 120 is facilitated, the stress of the single first bearing 140 is reduced, and the service life of the first bearing 140 is prolonged.

Second rotor 130 rotates through second bearing 150 and connects in rotating cavity 111, and the quantity of second bearing 150 is two, and two second bearings 150 are installed respectively at the both ends of second rotor 130, and like this, second bearing 150 is comparatively balanced to second rotor 130's holding power, is favorable to second rotor 130 to steadily rotate, also reduces single second bearing 150's atress, improves second bearing 150's life.

The first motor 180 is in driving connection with the first rotor 120, and the first motor 180 is used for driving the first rotor 120. The second motor 190 is in transmission connection with the second rotor 130, and the second motor 190 is used for driving the second rotor 130.

The rotating cavity 111 is isolated from the outside air, the first motor 180 drives the first rotor 120, and simultaneously, the second motor 190 drives the second rotor 130, so that the rotating cavity 111 reaches a desired vacuum degree.

Referring to fig. 2, the driver 220 is provided with a signal interface 221 and an output interface 222, and the driver 220 receives an action command through the signal interface 221 to control the driver 220. The driver 220 is electrically connected to the first motor 180 and the second motor 190 through the output interface 222, so as to output signals of the first motor 180 and the second motor 190. Specifically, the driver 220 is used for controlling the first motor 180 and the second motor 190 to synchronously drive the first rotor 120 and the second rotor 130.

After the driver 220 receives the action command sent by the controller, the driver 220 outputs the specified current and voltage to the first motor 180 and the second motor 190 through a built-in mathematical model algorithm of the driver 220, so as to realize the precise control of the first motor 180 and the second motor 190.

Referring to fig. 1, the first encoder 200 is installed on the first motor 180, and the first encoder 200 is used for detecting the rotation position of the output shaft of the first motor 180 in real time. Thus, the rotational position of the first rotor 120 can be known in real time by the first encoder 200, so that the rotational position of the first rotor 120 can be precisely controlled.

The second encoder 210 is installed on the second motor 190, and the second encoder 210 is used to detect the rotational position of the output shaft of the second motor 190 in real time. Thus, the rotational position of the second rotor 130 can be known in real time by the second encoder 210, so that the rotational position of the second rotor 130 can be precisely controlled.

In this way, the driver 220 is used for controlling the first motor 180 and the second motor 190 to synchronously drive the first rotor 120 and the second rotor 130, so that the first rotor 120 and the second rotor 130 can keep synchronous rotation, gear transmission is not needed between the first rotor 120 and the second rotor 130, and further lubricating oil does not need to be added to the gears, so that the dual-motor synchronous drive oil-free vacuum pump 100 provided by the embodiment can be suitable for a special process needing oil pollution avoidance; moreover, the first bearing 140 on the first rotor 120 and the second bearing 150 on the second rotor 130 are subjected to smaller stress, so that the service lives of the first bearing 140 and the second bearing 150 can be prolonged; in addition, the first motor 180 and the second motor 190 are controlled by the driver 220, the requirements on the working performance of the first motor 180 and the second motor 190 are low, a high-end motor is not required, and the equipment cost is reduced.

The first gear 160 is in transmission connection with the first rotor 120, preferably, the first gear 160 is sleeved on the first rotor 120, and the center line of the first gear 160 coincides with the center line of the first rotor 120, so that the first gear 160 and the first rotor 120 rotate synchronously. Thus, the first gear 160 and the first rotor 120 are connected simply, and can bear a large force therebetween.

The second gear 170 is in transmission connection with the second rotor 130, preferably, the second gear 170 is sleeved on the second rotor 130, and the center lines of the second gear 170 and the second rotor 130 are overlapped, so that the second gear 170 and the second rotor 130 rotate synchronously. In this way, the second gear 170 and the second rotor 130 are connected simply, and can bear a large force therebetween.

And, the first gear 160 is engaged with the second gear 170, and the first gear 160 and the second gear 170 are forced to be zero with each other under the condition that the first rotor 120 and the second rotor 130 normally rotate. Here, the mutual force applied to the first gear 160 and the second gear 170 is zero under the normal rotation of the first rotor 120 and the second rotor 130, that is, under the normal rotation of the first rotor 120 and the second rotor 130, the first gear 160 and the second gear 170 are not in contact with each other, but only under the adverse effect, such as load effect, on the first rotor 120 and the second rotor 130, which causes the first rotor 120 and the second rotor 130 to suddenly rotate out of synchronization with each other, at this time, the first rotor 120 and the second rotor 130 also drive the first gear 160 and the second gear 170 to mesh in contact with each other, so as to avoid that the first rotor 120 and the second rotor 130 rotate at an excessively large angle, which causes the first rotor 120 and the second rotor 130 to interfere with each other and damage each other.

Preferably, the fitting clearance between the first gear 160 and the second gear 170 is less than or equal to a preset clearance, and the first rotor 120 and the second rotor 130 do not interfere with each other while the fitting clearance is maintained at less than or equal to the preset clearance. In this way, as long as the first gear 160 and the second gear 170 are not damaged, the angle of rotation between the first rotor 120 and the second rotor 130 is ensured to be small, and the first rotor 120 and the second rotor 130 do not interfere with each other.

When the first rotor 120 or the second rotor 130 is affected by a load and is not rotated synchronously, the first gear 160 and the second gear 170 rotate relatively, and when the fit clearance between the first gear 160 and the second gear 170 is zero, the first gear 160 and the second gear 170 are forced to rotate synchronously, so that the first rotor 120 and the second rotor 130 are kept to rotate synchronously. Thus, in the case where the first and second rotors 120 and 130 rotate with each other until the first and second gears 160 and 170 contact each other, the first and second rotors 120 and 130 do not interfere with each other.

After the first rotor 120 and the second rotor 130 do not rotate synchronously, the driver 220 is configured to control the first motor 180 and the second motor 190 to drive the first rotor 120 and the second rotor 130, respectively, so that the first gear 160 and the second gear 170 are restored to a state where the mutual stress is zero. In this way, in the case that the first rotor 120 and the second rotor 130 are adversely affected and rotate asynchronously with respect to each other, the driver 220 can timely control the first motor 180 and the second motor 190 to respectively drive the first rotor 120 and the second rotor 130, so that the first gear 160 and the second gear 170 are restored to the state where the mutual force is zero and the first rotor 120 and the second rotor 130 rotate synchronously.

The beneficial effects of the dual-motor synchronous drive oil-free vacuum pump 100 provided by the embodiment include:

1. the driver 220 is adopted to control the first motor 180 and the second motor 190 to synchronously drive the first rotor 120 and the second rotor 130, so that the first rotor 120 and the second rotor 130 can keep synchronous rotation, gear transmission is not needed between the first rotor 120 and the second rotor 130, and lubricating oil does not need to be added to the gears, so that the dual-motor synchronous drive oil-free vacuum pump 100 provided by the embodiment can be suitable for special processes needing oil pollution avoidance, such as the chemical industry;

2. the first motor 180 and the second motor 190 are adopted to respectively drive the first rotor 120 and the second rotor 130, so that the stress on the first bearing 140 on the first rotor 120 and the stress on the second bearing 150 on the second rotor 130 are smaller, and the service lives of the first bearing 140 and the second bearing 150 can be prolonged;

3. the first motor 180 and the second motor 190 are controlled by the driver 220, the requirements on the working performance of the first motor 180 and the second motor 190 are low, a high-end motor is not needed, and the equipment cost is reduced;

4. the first gear 160 and the second gear 170 are assembled to prevent the first rotor 120 and the second rotor 130 from interfering with each other, and under the condition that the first rotor 120 and the second rotor 130 normally rotate, the first gear 160 and the second gear 170 are not in contact with each other, but only when the first rotor 120 and the second rotor 130 are affected by adverse effects, such as load, and the first rotor 120 and the second rotor 130 suddenly rotate out of synchronization with each other, at this time, the first rotor 120 and the second rotor 130 drive the first gear 160 and the second gear 170 to be in contact and meshed with each other, so as to avoid that the first rotor 120 and the second rotor 130 rotate at an excessive angle and interfere with each other;

5. the first gear 160 and the second gear 170 are stressed little or not stressed, are subjected to little abrasion and have long service life;

6. the first encoder 200 and the second encoder 210 are arranged to monitor the rotation positions of the first rotor 120 and the second rotor 130 respectively in real time, and the first motor 180 and the second motor 190 can be controlled in time to drive the first rotor 120 and the second rotor 130 respectively through the driver 220, so that the first gear 160 and the second gear 170 are restored to the state that the mutual stress is zero and the first rotor 120 and the second rotor 130 rotate synchronously;

7. the two motors are integrated into a whole and respectively and directly drive the two rotors, so that the whole equipment is small in size and compact in structure.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.