阅读说明：本技术 一种轻质基材薄壁反射镜的制作方法 (Manufacturing method of light base material thin-wall reflector ) 是由 高尚 康仁科 李洪钢 董志刚 朱祥龙 于 2020-07-06 设计创作，主要内容包括：本发明提供一种轻质基材薄壁反射镜的制作方法,包括以下步骤：S1：采用近净成形方法制备反射镜轻质基底,制备反射镜轻质基底材料采用热塑性工程塑料,近净成形的方法采用近净尺寸精密注塑成形方法或激光近净成形方法；S2：在五轴数控机床上,采用单点金刚石超精密车削方法或超细粒度砂轮超精密磨削方法在轻质基底表面进行超精密成形加工；S3：对反射镜轻质基底表面进行金属化,对反射镜轻质基底表面依次进行等离子体刻蚀、化学刻蚀和真空蒸镀；S4：对完成表面金属化的反射镜轻质基底进行抛光得到反射镜,表面Ra小于1nm。本发明解决了现有制造方法存在的制造工艺复杂、加工精度难以保证、镜体质量大等问题。(The invention provides a manufacturing method of a light base material thin-wall reflector, which comprises the following steps: s1: preparing a reflector light base by adopting a near-net forming method, wherein the reflector light base is made of thermoplastic engineering plastics, and the near-net forming method adopts a near-net size precision injection molding method or a laser near-net forming method; s2: on a five-axis numerical control machine tool, carrying out ultra-precise forming processing on the surface of the light substrate by adopting a single-point diamond ultra-precise turning method or an ultra-precise grinding method of an ultra-fine grain grinding wheel; s3: metalizing the surface of the light reflector substrate, and sequentially performing plasma etching, chemical etching and vacuum evaporation on the surface of the light reflector substrate; s4: and polishing the light substrate of the reflector with the metalized surface to obtain the reflector, wherein the surface Ra is less than 1 nm. The invention solves the problems of complex manufacturing process, difficult guarantee of processing precision, large mirror body quality and the like in the existing manufacturing method.)

1. The manufacturing method of the light-weight base material thin-wall reflector is characterized by comprising the following steps of:

s1: preparing a reflector light base by adopting a near-net forming method, wherein the reflector light base is made of thermoplastic engineering plastics, and the near-net forming method adopts a near-net size precision injection molding method or a laser near-net forming method;

S2: according to the surface type of a free-form surface of the reflector, ultra-precision forming machining is carried out on the surface of the light substrate on a five-axis numerical control machine tool by adopting a single-point diamond ultra-precision turning method or an ultra-precision grinding method of an ultra-fine grain grinding wheel;

s3: the step S3 of metalizing the surface of the light-weight substrate of the reflector specifically includes the following steps:

s3-1: carrying out plasma etching on the surface of the light substrate of the reflector by adopting argon and oxygen mixed plasma;

s3-2: using CrO₃-H₂SO₄The solution chemically etches the light substrate of the reflector;

s3-3: plating a surface metal layer on the light substrate of the reflector by a vacuum evaporation method;

s3-4: before vacuum evaporation, acetone is adopted to carry out deoiling and decontamination treatment on the light substrate of the reflector, and drying is carried out;

s3-5: putting the dried light substrate of the reflector into a cavity of a vacuum evaporation device, and vacuumizing to 0.5 multiplied by 10^-4Pa is above; heating the metal target material to make the metal target material light on the reflectorForming a metal coating film on the surface of the substrate; stopping heating, cooling the cavity to room temperature, filling inert gas to restore to atmospheric pressure, and taking out a finished product after surface metallization is finished;

s4: polishing the light substrate of the reflector with the metalized surface by adopting a magneto-rheological polishing method or an ion beam polishing method to obtain the reflector, wherein the Ra of the surface of the light substrate of the reflector is smaller than 1 nm.

2. The method for manufacturing a thin-walled reflector with a light base material as claimed in claim 1, wherein the step S1 is performed by a near-net-size precision injection molding method:

s1-1: placing the thermoplastic engineering plastic particles in an oven, and drying for 3-4 hours at 150-160 ℃ to reduce the water content of the thermoplastic engineering plastic particles to be less than 0.1%;

s1-2: preparing a reflector hot runner precision mold according to the shape and the size of a reflector, wherein the material for preparing the mold is Cr12MoV, 5CrMnMo or 5 CrNiMo;

s1-3: preheating and closing a reflector hot runner precision mold, and keeping the temperature of the mold at 180-280 ℃;

s1-4: pouring the dried thermoplastic engineering plastic particles into a charging barrel of a single-screw reciprocating type injection molding machine, heating the charging barrel, and keeping the injection molding temperature at 360-400 ℃ and the nozzle temperature of the injection molding machine at 380-420 ℃; injecting the molten thermoplastic engineering plastic into a mold cavity through a nozzle by driving a screw rod through a motor, keeping the injection pressure at 10MPa-12MPa for 5s-6s, and then maintaining the pressure at 50MPa-80MPa for 5s-10 s;

s1-5: cooling the cavity of the mold to solidify the thermoplastic engineering plastic for 5-8 min;

S1-6: the product is ejected by a demoulding mechanism to finish demoulding, and the thickness of the reflector wall prepared by adopting a near net size precision injection moulding method is 0.8mm-1 mm.

3. The method for manufacturing a thin-walled reflector with a light weight base material as claimed in claim 1, wherein step S1 is performed by a laser near-net-shape forming method:

s1-1: performing computer three-dimensional modeling on the reflector light substrate according to the preset reflector shape and size, and performing slice discretization processing on the three-dimensional digital model to obtain the profile information of each layer of slices;

s1-2: inputting the outline information into a selective laser sintering molding system layer by layer; selecting thermoplastic engineering plastic powder with the particle size of 20-50 microns for sintering layer by layer, uniformly paving a layer of thermoplastic engineering plastic powder on a workbench by a powder paving roller before sintering each layer, and leveling by a scraper, wherein the thickness of the powder is 150-200 microns; selectively sintering the layer according to the profile information of the layer by using a high-energy laser beam during sintering, wherein the whole sintering process is carried out in an inert atmosphere, and the temperature of a sintering area is 380-420 ℃; after the upper layer is sintered, the workbench descends by one layer thickness, the next layer of thermoplastic engineering plastic powder is paved by the powder paving roller, and the high-energy laser beam selectively sinters according to the profile information of the next layer until the sintering molding of the whole light reflector substrate is completed; the thickness of the light base wall of the reflector prepared by adopting a laser near-net forming method is 0.8mm-1 mm.

4. The method for manufacturing the thin-walled reflector with the light base material as claimed in claim 1, wherein step S2 is performed by single-point diamond ultra-precision turning:

processing the free curved surface of the reflector by adopting a single crystal diamond cutter; the radius of the adopted single crystal diamond cutter is 0.1-0.01 mu m, the cutter point is in single-point contact with the surface of a workpiece, and the cutting depth of each feeding is 0.5-0.1 mu m; the profile surface type error PV of the processed reflector is less than 0.8 μm, the roundness error is less than 0.3 μm, and the surface roughness Ra is less than 20 nm.

5. The method for manufacturing the thin-wall reflector with the light base material as claimed in claim 1, wherein step S2 is performed by ultra-precision grinding with ultra-fine grain grinding wheel:

processing a free-form surface of the reflector by adopting an ultra-fine granularity grinding wheel; the adopted superfine granularity grinding wheel bonding agent is ceramic bonding agent with granularity distribution W0.5-W0.25, the abrasive grain is diamond; the grinding wheel structure is a small grinding head grinding wheel with the diameter50-80 mm; clamping a grinding wheel on a machine tool spindle through a pneumatic clamp, wherein the rotating speed of the grinding wheel is 6000-9000 r/min, and the grinding depth of each feeding is 0.5-0.1 mu m; processed reflector profile surface type error PV<0.8 μm, roundness error<0.3 μm, surface roughness Ra <20nm。

6. The method for manufacturing a thin-walled reflector with a light weight base material as claimed in claim 1, wherein the step S3-1 includes: placing the light substrate processed by the step S2 into a reaction chamber of a plasma generator, and vacuumizing to 0.5 × 10^-4Ionizing the mixed gas of argon and oxygen into plasma by using a radio frequency source, controlling the flow of the plasma gas to be 150ml/min-250ml/min, and bombarding the surface of the light substrate of the reflector to etch;

in step S3-2, the light substrate of the reflector is put into CrO with the temperature of 65-70 DEG C₃-H₂SO₄Corroding in the solution for 5-6 min;

in the step S3-4, the light substrate of the reflector is dried for more than 2 hours at 50-70 ℃ after being degreased and decontaminated;

in step S3-5, the heating temperature of the metal target is kept above 2500 ℃.

7. The method for manufacturing the thin-wall reflector with the light base material as claimed in claim 1, wherein the step S4 is implemented by a magnetorheological polishing method:

the adopted magnetic spherical polishing wheel is a spherical surface with the diameter of 50-80 mm, the magnetic field intensity of the magnetic spherical polishing wheel is controlled by an internal electromagnet, the motion track is controlled by a five-axis numerical control system, and the rotating speed of the polishing wheel is 300-500 r/min;

The adopted magnetorheological polishing solution comprises the following components in percentage by volume: 0.5-0.8% of surfactant, 0.5-1.5% of dispersant, 5-10% of cerium oxide or aluminum oxide or silicon carbide or diamond micropowder, 30-40% of carbonyl iron powder and the balance of deionized water;

the surface roughness Ra of the processed light substrate of the reflector is less than 1 nm.

8. The method for manufacturing a thin-wall reflector with a light base material as claimed in claim 1, wherein step S4 is performed by ion beam polishing:

firstly, the reflector is placed in the reaction chamber of the plasma generator, and the reaction chamber is evacuated to 0.5X 10^-4Pa is above; secondly, ionizing gas into plasma by using a radio frequency source in the discharge chamber, wherein the gas is one or a mixture of argon, nitrogen and oxygen, the radio frequency power is controlled to be 160-200W, the gas flow is controlled to be 8-12 sccm, the plasma concentration of the reaction chamber is kept constant, and the ion energy voltage is controlled to be 1.2-1.6 KeV; surface roughness Ra of light substrate of reflector after processing<1nm。

9. The method for manufacturing a thin-walled reflector with a lightweight base material as claimed in claim 1, wherein the metal target material adopted in step S3-5 comprises one or more layers of gold, platinum, iridium, chromium, etc.; the thickness of the formed metal coating film is 300nm-500 nm.

10. The method for manufacturing a thin-walled reflector with a lightweight base material as claimed in any one of claims 1 to 9, wherein the reflector lightweight base material is made of polyetheretherketone, polyphenylene sulfide or polyphenylene oxide.

Technical Field

The invention relates to the technical field of reflector manufacturing, in particular to a manufacturing method of a light-weight base material thin-wall reflector.

Background

X-ray communication and X-ray pulsar navigation are new-generation technologies of future spacecraft deep space communication and high-precision autonomous navigation. The X-ray communication and X-ray pulsar navigation technology can provide powerful support for development of deep space exploration and space technology experiments in China.

X-ray focusing mirrors are important components in X-ray communication systems and X-ray pulsar navigation systems. The function of the device is to focus X-rays on a receiving and demodulating device for data processing. In order to collect the X-ray with higher intensity, a multilayer nested mode is adopted to increase the reflection area of the X-ray. While the curved design of the mirror is usually based on a coaxial confocal conic grazing incidence mirror, i.e. a Wolter I-type structure, as shown in fig. 1 for a multilayer nested X-ray focusing mirror. Which respectively use different combinations of inner and outer reflecting surfaces of a paraboloid and a hyperboloid (or an ellipsoid) to realize the focusing imaging of X-rays. This configuration is also one of the most effective means for achieving X-ray focusing at present. The focusing reflector has the characteristics of large-caliber thin-wall cylindrical structure and high precision of a reflecting surface, the surface roughness of the reflecting surface is close to the atomic scale, the requirements on the manufacturing precision and quality are strict, and the manufacturing difficulty is high.

The present method for making light-weight base material thin-wall reflector mainly includes nickel electroforming duplication process and hot bending glass forming process.

The so-called electroforming nickel replication process comprises the steps of firstly electroplating a layer of thin nickel on an ultra-precisely turned aluminum core die, polishing, then electroplating a gold film on the polished surface, and then electroplating a nickel layer with the thickness of 0.5-1 mm. And finally, separating the thin nickel shell reflector from the core mold by adopting a quenching separation method. As shown in fig. 3, the process can reproduce the surface micro-topography, micro-structure and dimensional accuracy of the cathode mandrel, and the mandrel can be used for unlimited times theoretically without any loss during electroforming. Therefore, the surface quality of the core mold is extremely important in the manufacturing process, and the surface of the core mold needs to be ultra-precisely polished and modified. Meanwhile, the density of nickel metal is high, and the number of nested layers of the lenses under the same quality is limited, so that the light collecting efficiency of the reflector is influenced. The electroforming speed cannot be too high due to the existence of the electrodeposition limiting current density, which greatly limits the processing efficiency.

The hot bending glass forming process is to utilize the characteristic that the viscosity of glass changes along with the temperature change, to place the ultrathin plane glass lens on a forming cylindrical mold, and to precisely process the surface of the forming cylindrical mold, wherein the surface is designed to be a Wolter I type reflector. After the glass is heated to the softening point, the ultrathin glass is bent into a cylindrical surface under the action of gravity, and the surface shape of the cylindrical mold is copied. Finally, preparing a metal iridium film on the reflecting surface of the lens through processes such as vacuum evaporation and the like, and improving the reflectivity of the lens to X rays, wherein the process is shown in figure 2, 1 in the figure represents a plane lens, and 2 represents a forming die. The process method mostly adopts ultrathin glass ceramics, is easy to realize light weight, but is extremely sensitive to factors such as temperature control curves, mold surface quality, air cleanliness and the like, and has low yield and low processing efficiency.

In summary, the following problems in the manufacture of X-ray focusing mirrors are the main difficulties that restrict the existing mirror processing technology:

1. the substrate material of the current mirrors is denser, e.g. nickel metal (8.9 g/cm)³) Microcrystalline glass (2.5 g/cm)³) And the number of nested layers of the lenses under the same quality is limited, so that the light collecting efficiency of the reflector is influenced.

2. The existing manufacturing process adopts a method of copying the surface shape of a forming die, and the precision of a reflector has great correlation with the surface quality of the forming die. The low frequency surface profile error, the high frequency surface roughness error and the medium frequency waviness error of the surface of the forming die have a direct relation to the focusing performance of the reflector.

3. The process of the nickel electroforming replication technology is complex, the waste electroplating solution pollutes the environment, and the concept of green development is not met. Because of the existence of the electrodeposition limiting current density, the electroforming speed cannot be too high, the production efficiency is low, and the product period is long.

4. The hot bending glass forming process has strict requirements on temperature control and air environment, low yield and low processing efficiency, and is not beneficial to large-scale production.

Therefore, a high-efficiency, light-weight and low-cost X-ray focusing mirror processing technology is urgently needed to be solved.

Disclosure of Invention

According to the technical problems of complex manufacturing process, difficult guarantee of processing precision, large mirror body mass and the like existing in the conventional manufacturing method, the manufacturing method of the light-weight base material thin-wall reflector is provided. The invention provides a novel method for integrally and precisely manufacturing a light base material thin-wall reflector, which sequentially comprises the steps of 'near net forming of a light reflector base → ultra-precise forming processing of a base surface → metallization of the base surface → polishing of the base surface'; the multilayer nested X-ray reflector is formed by precisely assembling a plurality of layers of ultrathin reflectors with large curvature and complex curved surfaces, and the processing requirements of each layer of reflectors are consistent.

The technical means adopted by the invention are as follows:

a manufacturing method of a light-weight substrate thin-wall reflector comprises the following steps:

s1: preparing a reflector light base by adopting a near-net forming method, wherein the reflector light base is made of thermoplastic engineering plastics, and the near-net forming method adopts a near-net size precision injection molding method or a laser near-net forming method;

s2: according to the surface type of a free-form surface of the reflector, ultra-precision forming machining is carried out on the surface of the light substrate on a five-axis numerical control machine tool by adopting a single-point diamond ultra-precision turning method or an ultra-precision grinding method of an ultra-fine grain grinding wheel;

S3: the step S3 of metalizing the surface of the light-weight substrate of the reflector specifically includes the following steps:

s3-1: carrying out plasma etching on the surface of the light substrate of the reflector by adopting argon and oxygen mixed plasma;

s3-2: using CrO₃-H₂SO₄The solution chemically etches the light substrate of the reflector;

s3-3: plating a surface metal layer on the light substrate of the reflector by a vacuum evaporation method;

s3-4: before vacuum evaporation, acetone is adopted to carry out deoiling and decontamination treatment on the light substrate of the reflector, and drying is carried out;

s3-5: putting the dried light substrate of the reflector into a cavity of a vacuum evaporation device, and vacuumizing to 0.5 multiplied by 10^-4Pa is above; heating the metal target material to form a metal coating film on the surface of the light substrate of the reflector; stopping heating, cooling the cavity to room temperature, filling inert gas to restore to atmospheric pressure, and taking out a finished product after surface metallization is finished;

s4: polishing the light substrate of the reflector with the metalized surface by adopting a magneto-rheological polishing method or an ion beam polishing method to obtain the reflector, wherein the Ra of the surface of the light substrate of the reflector is smaller than 1 nm.

Further, step S1 employs a near net size precision injection molding method:

S1-1: placing the thermoplastic engineering plastic particles in an oven, and drying for 3-4 hours at 150-160 ℃ to reduce the water content of the thermoplastic engineering plastic particles to be less than 0.1%;

s1-2: preparing a reflector hot runner precision mold according to the shape and the size of a reflector, wherein the material for preparing the mold is Cr12MoV, 5CrMnMo or 5 CrNiMo;

s1-3: preheating and closing a reflector hot runner precision mold, and keeping the temperature of the mold at 180-280 ℃;

s1-4: pouring the dried thermoplastic engineering plastic particles into a charging barrel of a single-screw reciprocating type injection molding machine, heating the charging barrel, and keeping the injection molding temperature at 360-400 ℃ and the nozzle temperature of the injection molding machine at 380-420 ℃; injecting the molten thermoplastic engineering plastic into a mold cavity through a nozzle by driving a screw rod through a motor, keeping the injection pressure at 10MPa-12MPa for 5s-6s, and then maintaining the pressure at 50MPa-80MPa for 5s-10 s;

s1-5: cooling the cavity of the mold to solidify the thermoplastic engineering plastic for 5-8 min;

s1-6: the product is ejected by a demoulding mechanism to finish demoulding, and the thickness of the reflector wall prepared by adopting a near net size precision injection moulding method is 0.8mm-1 mm.

Further, step S1 adopts a laser near-net-shape forming method:

s1-1: performing computer three-dimensional modeling on the reflector light substrate according to the preset reflector shape and size, and performing slice discretization processing on the three-dimensional digital model to obtain the profile information of each layer of slices;

s1-2: inputting the outline information into a selective laser sintering molding system layer by layer; selecting thermoplastic engineering plastic powder with the particle size of 20-50 microns for sintering layer by layer, uniformly paving a layer of thermoplastic engineering plastic powder on a workbench by a powder paving roller before sintering each layer, and leveling by a scraper, wherein the thickness of the powder is 150-200 microns; selectively sintering the layer according to the profile information of the layer by using a high-energy laser beam during sintering, wherein the whole sintering process is carried out in an inert atmosphere, and the temperature of a sintering area is 380-420 ℃; after the upper layer is sintered, the workbench descends by one layer thickness, the next layer of thermoplastic engineering plastic powder is paved by the powder paving roller, and the high-energy laser beam selectively sinters according to the profile information of the next layer until the sintering molding of the whole light reflector substrate is completed; the thickness of the light base wall of the reflector prepared by adopting a laser near-net forming method is 0.8mm-1 mm.

Further, step S2 adopts a single point diamond ultra-precision turning method:

processing the free curved surface of the reflector by adopting a single crystal diamond cutter; the radius of the adopted single crystal diamond cutter is 0.1-0.01 mu m, the cutter point is in single-point contact with the surface of a workpiece, and the cutting depth of each feeding is 0.5-0.1 mu m; the profile surface type error PV of the processed reflector is less than 0.8 μm, the roundness error is less than 0.3 μm, and the surface roughness Ra is less than 20 nm.

Further, step S2 adopts an ultra-precision grinding method using an ultra-fine grain grinding wheel:

processing a free-form surface of the reflector by adopting an ultra-fine granularity grinding wheel; the adopted superfine particle size grinding wheel bonding agent is ceramic bonding agent, the particle size distribution W is 0.5-W0.25, and the type of the abrasive particles is diamond; the grinding wheel structure is a small grinding head grinding wheel with the diameter50-80 mm; clamping a grinding wheel on a machine tool spindle through a pneumatic clamp, wherein the rotating speed of the grinding wheel is 6000-9000 r/min, and the grinding depth of each feeding is 0.5-0.1 mu m; processed reflector profile surface type error PV<0.8 μm, roundness error<0.3 μm, surface roughness Ra<20nm。

Further, step S3-1 includes: placing the light substrate processed by the step S2 into a reaction chamber of a plasma generator, and vacuumizing to 0.5 × 10 ^-4Ionizing the mixed gas of argon and oxygen into plasma by using a radio frequency source, controlling the flow of the plasma gas to be 150ml/min-250ml/min, and bombarding the surface of the light substrate of the reflector to etch;

in step S3-2, the light substrate of the reflector is put into CrO with the temperature of 65-70 DEG C₃-H₂SO₄Corroding in the solution for 5-6 min;

in the step S3-4, the light substrate of the reflector is dried for more than 2 hours at 50-70 ℃ after being degreased and decontaminated;

in step S3-5, the heating temperature of the metal target is kept above 2500 ℃.

Further, step S4 adopts a magnetorheological polishing method:

the adopted magnetic spherical polishing wheel is a spherical surface with the diameter of 50-80 mm, the magnetic field intensity of the magnetic spherical polishing wheel is controlled by an internal electromagnet, the motion track is controlled by a five-axis numerical control system, and the rotating speed of the polishing wheel is 300-500 r/min;

the adopted magnetorheological polishing solution comprises the following components in percentage by volume: 0.5-0.8% of surfactant, 0.5-1.5% of dispersant, 5-10% of cerium oxide or aluminum oxide or silicon carbide or diamond micropowder, 30-40% of carbonyl iron powder and the balance of deionized water;

the surface roughness Ra of the processed light substrate of the reflector is less than 1 nm.

Further, step S4 adopts an ion beam polishing method:

Firstly, the reflector is placed in the reaction chamber of the plasma generator, and the reaction chamber is evacuated to 0.5X 10^-4Pa is above; secondly, ionizing gas into plasma by using a radio frequency source in the discharge chamber, wherein the gas is one or a mixture of argon, nitrogen and oxygen, the radio frequency power is controlled to be 160-200W, the gas flow is controlled to be 8-12 sccm, the plasma concentration of the reaction chamber is kept constant, and the ion energy voltage is controlled to be 1.2-1.6 KeV; surface roughness Ra of light substrate of reflector after processing<1nm。

Further, the metal target material adopted in step S3-5 includes one or more layers of gold, platinum, iridium, chromium, etc.; the thickness of the formed metal coating film is 300nm-500 nm.

Further, the light base material for preparing the reflector adopts polyether-ether-ketone, polyphenylene sulfide or polyphenylene oxide.

Compared with the prior art, the invention has the following advantages:

1. lightweight manufacturing, low substrate density: the light base material adopted by the invention, such as engineering plastics with small density, high strength and excellent processing performance, such as PEEK (polyether ether ketone), can greatly reduce the weight of the reflector base and accord with the design concept of lightweight spaceflight.

2. The single-layer wall thickness is small, and the number of nested layers is large: the wall thickness of the single-layer reflector manufactured by the invention can be less than 1mm, more layers can be nested in a limited space, and the light collecting efficiency of the reflector is improved.

3. Can be shaped near net, has small processing allowance: the invention adopts the manufacturing method of precise injection molding and laser near-net forming to manufacture and form the reflector at one time, thereby ensuring the dimensional stability, only needing a small amount of processing after forming, greatly improving the material utilization rate and reducing the cost.

4. Simple process and low manufacturing cost: the manufacturing method of the invention does not need a complex electroforming process, and has simple precision injection molding process, high production efficiency and short product period.

5. The machining precision is high, and the machining quality is good: the invention adopts the substrate surface ultra-precision forming processing method and the substrate surface polishing technology, the processing precision is easy to ensure, the processing quality is good, and the roughness Ra of the processed reflector substrate surface is smaller than 1nm and the surface type precision is smaller than 1 mu m through test verification.

For the above reasons, the present invention can be widely applied to the field of manufacturing of reflectors and the like.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic diagram of a multi-layer nested X-ray mirror according to the background art.

FIG. 2 is a schematic view of a prior art hot-bending glass forming process.

FIG. 3 is a schematic diagram of a prior art electroformed nickel replication process.

FIG. 4 is a flow chart of a method for manufacturing a thin-walled reflector with a lightweight base material according to the present invention.

FIG. 5 is a three-dimensional effect diagram of the reflector in the manufacturing process of the light-weight substrate thin-wall reflector of the present invention.

Detailed Description

It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.