阅读说明：本技术 一种射频测试系统及其测试方法 (Radio frequency test system and test method thereof ) 是由 刘飞跃 吕红林 于 2020-05-26 设计创作，主要内容包括：本发明公开了一种射频测试系统及其测试方法包括：用于提供频率及能量的射频发生模块；用于保证施加能量稳定的射频匹配模块；用于修正施加能量的修正模块用于测试输出能量的射频测试模块；以及用于显示输出能量曲线的显示模块。本发明通过设计用于修正施加能量的修正模块,通过修正模块的镜像抑制进行降低性噪比,进而使得测试系统测试时的误差范围减小,进而使得测试数值更加精准,同时设计显示模块进行显示测出数值曲线,进而给出测试人员的视觉直观冲击,进而更容易辨认测出数值的范围。(The invention discloses a radio frequency test system and a test method thereof, comprising the following steps: a radio frequency generation module for providing frequency and energy; the radio frequency matching module is used for ensuring stable applied energy; a radio frequency test module for testing the output energy; and a display module for displaying the output energy curve. According to the invention, the correction module for correcting the applied energy is designed, the noise-to-noise ratio is reduced through the mirror image suppression of the correction module, the error range of the test system during test is further reduced, the test value is further more accurate, and meanwhile, the display module is designed to display the measured value curve, so that the visual impact of a tester is given, and the range of the measured value is further easier to identify.)

1. A radio frequency test system, comprising:

a radio frequency generation module for providing frequency and energy;

the radio frequency matching module is used for ensuring stable applied energy;

a correction module for correcting the applied energy;

a radio frequency test module for testing the output energy;

and a display module for displaying the output energy curve.

2. A radio frequency test system as claimed in claim 1, wherein: the radio frequency generation module is mainly used for providing frequency and energy and comprises a control part, an output part, a filtering part and a detection part; the control part sends an instruction to the power supply according to the energy required by the test system, compares the instruction with the output energy and simultaneously adjusts the instruction and the output energy; the output part outputs energy according to the requirement of the test system, and power supplies of different types determine the frequency; the filtering part is used for filtering power signals of the energy output of the output part; the detection part detects the output energy of the output part and simultaneously displays and feeds back to the control part.

3. A radio frequency test system as claimed in claim 1, wherein: the RF matching module is mainly used for ensuring stable applied energy, and because plasmas with different energies have different load factors including pressure, gas mixture and process field, the RF matching module needs to compensate errors caused by phase change, and the RF matching module uses positive phase errors generated by a load capacitor and an adjusting blade to compensate errors caused by phase change.

4. A radio frequency test system as claimed in claim 1, wherein: the correction module is mainly used for correcting the applied energy frequency, different communication modes have different requirements on the stability of the frequency, the traditional frequency stability generally refers to the short-term frequency stability, and the stability of the short-term frequency is defined as:

wherein the content of the first and second substances,

at this time whenThe smaller the frequency accuracy.

5. The radio frequency test system of claim 4, wherein: the noise coefficient is used to measure the small signal processing capability of the radio frequency component circuit, in wireless communication, the signal at the receiving end will become small, the noise coefficient of the receiver needs to be as small as possible, and the noise coefficient of the circuit after the multi-stage device can be expressed as:

6. The radio frequency test system of claim 4, wherein: the down-conversion process of the far-end signal is the same as the working principle of superheterodyne receiving, the superheterodyne channel selectivity and the high reliability are preferred structures of various receivers, and the frequency of the radio-frequency signal is assumed to beLocal oscillator frequency ofMixed intermediate frequency of

7. A radio frequency test system as claimed in claim 1, wherein: the radio frequency test module comprises an energy induction part, a simulation load part and a monitoring part; the energy induction part mainly induces energy, so as to judge whether the energy frequency meets the standard or not and feed back the judgment result to the monitoring part; the analog load part mainly has impedance and stabilization functions, so that the energy induction part can better induce energy to output frequency standard; the monitoring part is mainly used for monitoring the energy frequency amplitude and displaying the energy size, and the displayed energy data can be used as a radio frequency size adjusting basis.

8. A radio frequency test system as claimed in claim 1, wherein: the display module is mainly used for displaying an output energy frequency curve tested by the radio frequency testing module, so that visual experience is provided for testers, meanwhile, numerical values are marked at the inflection points of the curve, a pre-entered display curve under a normal condition is given, and then the difference value of each inflection point of the two groups of curves is displayed, so that whether the difference value is within an error range is marked.

9. The method of claim 1, comprising:

step 1, providing radio frequency test frequency and energy through a radio frequency generation module, wherein the radio frequency generation module comprises a control part, an output part, a filtering part and a detection part; the control part sends an instruction to the power supply according to the energy required by the test system, compares the instruction with the output energy and simultaneously adjusts the instruction and the output energy; the output part outputs energy according to the requirement of the test system, and power supplies of different types determine the frequency; the filtering part is used for filtering power signals of the energy output of the output part; the detection part detects the output energy of the output part, and simultaneously displays and feeds back to the control part;

step 2, after the radio frequency generation module provides energy and radio frequency test frequency, the radio frequency matching module ensures stable applied energy, and the radio frequency matching module needs to compensate errors caused by phase change due to the fact that plasmas with different energies have different load factors, wherein the load factors comprise pressure, gas mixture and process field;

step 3, after the radio frequency matching module piece stably applies energy, the energy frequency is corrected and applied through the correction module, the requirements of different communication modes on the stability of the frequency are different, the traditional frequency stability generally refers to the short-term frequency stability, and the stability of the short-term frequency is defined as:

=

wherein the content of the first and second substances,indicating a prescribed application divisionEqual intervals, the oscillation frequencies measured in each interval being、、……，

at this time when

step 4, the noise coefficient is used for measuring the processing capacity of the radio frequency component circuit on small signals, in wireless communication, the signals at the receiving end become small, the noise coefficient of the receiver needs to be used as small as possible, and the noise coefficient of the circuit after the multi-stage device can be expressed as:

representing the noise figure 10

10. And step 5, the down-conversion process of the signal by the far end is the same as the working principle of superheterodyne receiving, the superheterodyne channel selectivity and the high reliability are preferred structures of various receivers, and the frequency of the radio-frequency signal is assumed to be

step 6, after the correction of the correction module is finished, testing the energy frequency by a radio frequency testing module, wherein the radio frequency testing module comprises an energy induction part, a simulation load part and a monitoring part; the energy induction part mainly induces energy, so as to judge whether the energy frequency meets the standard or not and feed back the judgment result to the monitoring part; the analog load part mainly has impedance and stabilization functions, so that the energy induction part can better induce energy to output frequency standard; the monitoring part is mainly used for monitoring the energy frequency amplitude and displaying the energy size, and the displayed energy data can be used as a radio frequency size adjusting basis;

and 7, after the radio frequency testing module finishes testing, displaying the output energy frequency curve tested by the radio frequency testing module by the display module, further providing visual experience for testers, marking a numerical value at the inflection point of the curve, simultaneously providing a pre-recorded display curve under a normal condition, further displaying the difference value of each inflection point of the two groups of curves, and further marking whether the difference value is within an error range.

Technical Field

The invention relates to a test system, in particular to a radio frequency test system and a test method thereof.

Background

Radio Frequency (RF) is an abbreviation for Radio Frequency, which refers to the electromagnetic Frequency that can be radiated into space, ranging from 300kHz to 300 GHz. Radio frequency is radio frequency current, referred to as RF for short, and is a short term for high frequency alternating current varying electromagnetic waves. Alternating current that changes less than 1000 times per second is called low frequency current, and alternating current that changes more than 10000 times per second is called high frequency current, and radio frequency is such a high frequency current.

The radio frequency (300K-300G) is a higher frequency band of high frequency (more than 10K), and the microwave frequency band (300M-300G) is a higher frequency band of radio frequency.

However, when the existing radio frequency testing system tests the radio frequency energy, due to the influence of the noise coefficient, when the testing system cannot eliminate the influence caused by the noise coefficient in the measuring process, the radio frequency curve tested by the testing system will have errors, and the test of the testing system will be a meaningless test at this time.

Disclosure of Invention

The purpose of the invention is as follows: a radio frequency test system and a test method thereof are provided to solve the above problems in the prior art.

The technical scheme is as follows: a radio frequency test system and a test method thereof comprise:

a radio frequency generation module for providing frequency and energy;

the radio frequency matching module is used for ensuring stable applied energy;

a correction module for correcting the applied energy;

a radio frequency test module for testing the output energy;

and a display module for displaying the output energy curve.

In a further embodiment, the radio frequency generation module is mainly used for providing frequency and energy, and comprises a control part, an output part, a filtering part and a detection part; the control part sends an instruction to the power supply according to the energy required by the test system, compares the instruction with the output energy and simultaneously adjusts the instruction and the output energy; the output part outputs energy according to the requirement of the test system, and power supplies of different types determine the frequency; the filtering part is used for filtering power signals of the energy output of the output part; the detection part detects the output energy of the output part and simultaneously displays and feeds back to the control part.

In a further embodiment, the rf matching module is mainly used to ensure stable energy application, and since the plasmas with different energies have different load factors including pressure, gas mixture and process location, the rf matching module needs to compensate for an error caused by a phase change, and the rf matching module compensates for an error caused by a phase change using a load capacitor and a positive phase error generated by an adjusting blade, and stably applies energy through the video matching module, thereby avoiding a disorder phenomenon when applying energy, and further increasing the current precision of the test system.

In a further embodiment, the correction module is mainly used for correcting the frequency of the applied energy, and different communication modes have different requirements on the stability of the frequency, whereas the conventional frequency stability generally refers to short-term frequency stability, and the stability of the short-term frequency is defined as:

=

wherein the content of the first and second substances,

indicating a prescribed application divisionEqual intervals, the oscillation frequencies measured in each interval being

、、……，The nominal frequency is represented by the frequency of the frequency,

=is as follows

The absolute frequency difference measured over a time interval,

=

at this time when

The smaller the frequency accuracy.

In a further embodiment, the noise factor is used to measure the processing capability of the rf component circuit on a small signal, in wireless communication, the signal at the receiving end becomes small, and the noise factor of the receiver needs to be as small as possible, and the noise factor of the circuit after the multi-stage device can be expressed as:

++

+……+

representing the noise figure 10The gain of the 1 st stage device is shown,

is shown as

The gain of the stage device can be seen from the above formula, the noise coefficient of the radio frequency circuit is related to the gain and the noise coefficient of each stage device, when the gain of the first stage is large enough, the influence of the following each stage device on the noise coefficient of the link is small, and the noise coefficient of the link is from the first stage

And (6) determining.

In a further embodiment, the down-conversion process of the signal by the far end is the same as the working principle of superheterodyne reception, the superheterodyne channel selectivity and high reliability are preferred structures of various receivers, and the frequency of the radio-frequency signal is assumed to beLocal oscillator frequency of

Mixed intermediate frequency of(ii) a At a frequency ofAt the position of the air compressor, the air compressor is started,after mixing, intermediate frequency signals with the same frequency can be obtained, assuming the frequencyThe noise power at the receiving intermediate frequency position can be increased due to strong interference, the signal to noise ratio is reduced through the correction module, and the test value of the test system is more accurate.

In a further embodiment, the radio frequency test module comprises an energy induction part, a simulation load part and a monitoring part; the energy induction part mainly induces energy, so as to judge whether the energy frequency meets the standard or not and feed back the judgment result to the monitoring part; the analog load part mainly has impedance and stabilization functions, so that the energy induction part can better induce energy to output frequency standard; the monitoring part is mainly used for monitoring the energy frequency amplitude and displaying the energy size, and the displayed energy data can be used as a radio frequency size adjusting basis.

In a further embodiment, the display module is mainly used for displaying an output energy frequency curve tested by the radio frequency testing module, so that visual experience is provided for testers, values are marked at inflection points of the curve, a pre-entered display curve under a normal condition is provided, a difference value of each inflection point of two groups of curves is displayed, whether the marking is within an error range is judged, the display module is designed to form the curve with the tested values, so that the test is provided, visual experience is provided, and a value range is displayed more clearly.

A test method of a radio frequency test system comprises the following steps:

step 1, providing radio frequency test frequency and energy through a radio frequency generation module, wherein the radio frequency generation module comprises a control part, an output part, a filtering part and a detection part; the control part sends an instruction to the power supply according to the energy required by the test system, compares the instruction with the output energy and simultaneously adjusts the instruction and the output energy; the output part outputs energy according to the requirement of the test system, and power supplies of different types determine the frequency; the filtering part is used for filtering power signals of the energy output of the output part; the detection part detects the output energy of the output part, and simultaneously displays and feeds back to the control part;

step 2, after the radio frequency generation module provides energy and radio frequency test frequency, the radio frequency matching module ensures stable applied energy, and the radio frequency matching module needs to compensate errors caused by phase change due to the fact that plasmas with different energies have different load factors, wherein the load factors comprise pressure, gas mixture and process field;

step 3, after the radio frequency matching module piece stably applies energy, the energy frequency is corrected and applied through the correction module, the requirements of different communication modes on the stability of the frequency are different, the traditional frequency stability generally refers to the short-term frequency stability, and the stability of the short-term frequency is defined as:

=

wherein the content of the first and second substances,indicating a prescribed application division

Equal intervals, the oscillation frequencies measured in each interval being、、……

，The nominal frequency is represented by the frequency of the frequency,=is as follows

The absolute frequency difference measured over a time interval,

=

at this time when

The smaller, the higher the frequency accuracy;

step 4, the noise coefficient is used for measuring the processing capacity of the radio frequency component circuit on small signals, in wireless communication, the signals at the receiving end become small, the noise coefficient of the receiver needs to be used as small as possible, and the noise coefficient of the circuit after the multi-stage device can be expressed as:

+

++……+

representing the noise figure 10The gain of the 1 st stage device is shown,

is shown asGain of stage device, as can be seen from the above formula, noise figure of radio frequency circuit followsThe gain of each stage of device is related to noise coefficient, when the gain of the first stage is large enough, the influence of the following stages of devices on the noise coefficient of the link is small, and the noise coefficient of the link is determined by the first stage

And (6) determining.

And step 5, the down-conversion process of the signal by the far end is the same as the working principle of superheterodyne receiving, the superheterodyne channel selectivity and the high reliability are preferred structures of various receivers, and the frequency of the radio-frequency signal is assumed to be

Local oscillator frequency ofMixed intermediate frequency of(ii) a At a frequency ofAt the position of the air compressor, the air compressor is started,

after mixing, intermediate frequency signals with the same frequency can be obtained, assuming the frequency

If strong interference exists, the noise power at the receiving intermediate frequency position can be increased, and the signal to noise ratio is further reduced;

step 6, after the correction of the correction module is finished, testing the energy frequency by a radio frequency testing module, wherein the radio frequency testing module comprises an energy induction part, a simulation load part and a monitoring part; the energy induction part mainly induces energy, so as to judge whether the energy frequency meets the standard or not and feed back the judgment result to the monitoring part; the analog load part mainly has impedance and stabilization functions, so that the energy induction part can better induce energy to output frequency standard; the monitoring part is mainly used for monitoring the energy frequency amplitude and displaying the energy size, and the displayed energy data can be used as a radio frequency size adjusting basis;

and 7, after the radio frequency testing module finishes testing, displaying the output energy frequency curve tested by the radio frequency testing module by the display module, further providing visual experience for testers, marking a numerical value at the inflection point of the curve, simultaneously providing a pre-recorded display curve under a normal condition, further displaying the difference value of each inflection point of the two groups of curves, and further marking whether the difference value is within an error range.

Has the advantages that: the invention discloses a radio frequency test system and a test method thereof.A correction module for correcting applied energy is designed, the noise ratio is reduced through the mirror image inhibition of the correction module, the error range of the test system during test is further reduced, the test value is further more accurate, and a display module is designed to display a measured value curve, so that visual impact of a tester is given, and the range of the measured value is further easier to identify.

Drawings

FIG. 1 is a schematic diagram of the system architecture of the present invention.

Fig. 2 is a functional diagram of the modules of the present invention.

Fig. 3 is a schematic diagram of a radio frequency generation module of the present invention.

FIG. 4 is a schematic diagram of an adaptation test module of the present invention.

Detailed Description

The reason for this problem (inaccurate test data of the existing test system) is that, when the existing radio frequency test system is used for testing radio frequency energy, due to the influence of the noise coefficient, when the test system cannot eliminate the influence caused by the noise coefficient in the measurement process, the radio frequency curve tested by the test system has errors, at the moment, the test of the test system is meaningless, the invention reduces the signal to noise ratio by designing the correction module for correcting the applied energy and by the mirror image suppression of the correction module, thereby reducing the error range of the test system during the test, further making the test value more accurate, and simultaneously designing the display module to display the measured value curve, and then visual and intuitive impact of a tester is given, so that the range of the measured value can be more easily identified.

A radio frequency test system, comprising: a radio frequency generation module for providing frequency and energy; the radio frequency matching module is used for ensuring stable applied energy; a correction module for correcting the applied energy; a radio frequency test module for testing the output energy; and a display module for displaying the output energy curve.

The radio frequency generation module is mainly used for providing frequency and energy and comprises a control part, an output part, a filtering part and a detection part; the control part sends an instruction to the power supply according to the energy required by the test system, compares the instruction with the output energy and simultaneously adjusts the instruction and the output energy; the output part outputs energy according to the requirement of the test system, and power supplies of different types determine the frequency; the filtering part is used for filtering power signals of the energy output of the output part; the detection part detects the output energy of the output part and simultaneously displays and feeds back to the control part.

The radio frequency matching module is mainly used for ensuring stable applied energy, because plasmas with different energies have different load factors including pressure, gas mixture and process places, the radio frequency matching module needs to compensate errors caused by phase change, the radio frequency matching module compensates the errors caused by the phase change by using positive phase errors generated by a load capacitor and an adjusting blade, the video matching module is used for stably applying the energy, and further, the disorder phenomenon is avoided when the energy is applied, and the precision of the test system at the moment is improved.

The correction module is mainly used for correcting the applied energy frequency, different communication modes have different requirements on the stability of the frequency, the traditional frequency stability generally refers to the short-term frequency stability, and the stability of the short-term frequency is defined as:

=

wherein the content of the first and second substances,indicating a prescribed application division

Equal intervals, the oscillation frequencies measured in each interval being、、……，The nominal frequency is represented by the frequency of the frequency,=is as followsThe absolute frequency difference measured over a time interval,

=

at this time whenThe smaller, the more accurate the frequencyThe higher the degree.

The noise coefficient is used to measure the small signal processing capability of the radio frequency component circuit, in wireless communication, the signal at the receiving end will become small, the noise coefficient of the receiver needs to be as small as possible, and the noise coefficient of the circuit after the multi-stage device can be expressed as:

++

+……+

representing the noise figure 10

The gain of the 1 st stage device is shown,

is shown asThe gain of the stage device can be seen from the above formula, the noise coefficient of the radio frequency circuit is related to the gain and the noise coefficient of each stage device, when the gain of the first stage is large enough, the influence of the following each stage device on the noise coefficient of the link is small, and the noise coefficient of the link is from the first stage

And (6) determining.

The down-conversion process of the far-end signal is the same as the working principle of superheterodyne receiving, the superheterodyne channel selectivity and the high reliability are preferred structures of various receivers, and the radio-frequency signal is supposed to beAt a frequency ofLocal oscillator frequency ofMixed intermediate frequency of

(ii) a At a frequency ofAt the position of the air compressor, the air compressor is started,after mixing, intermediate frequency signals with the same frequency can be obtained, assuming the frequencyThe noise power at the receiving intermediate frequency position can be increased due to strong interference, the signal to noise ratio is reduced through the correction module, and the test value of the test system is more accurate.

The radio frequency test module comprises an energy induction part, a simulation load part and a monitoring part; the energy induction part mainly induces energy, so as to judge whether the energy frequency meets the standard or not and feed back the judgment result to the monitoring part; the analog load part mainly has impedance and stabilization functions, so that the energy induction part can better induce energy to output frequency standard; the monitoring part is mainly used for monitoring the energy frequency amplitude and displaying the energy size, and the displayed energy data can be used as a radio frequency size adjusting basis.

The display module is mainly used for displaying an output energy frequency curve tested by the radio frequency testing module, so that visual experience is provided for testers, numerical values are marked at inflection points of the curve, a pre-entered display curve under a normal condition is given, difference values of each inflection point of two groups of curves are displayed, whether the marking is within an error range is judged, the display module is designed to form the curve mainly for the tested numerical values, so that the test result is displayed, visual experience is provided, and a numerical range is displayed more clearly.

Description of the working principle: providing radio frequency test frequency and energy through a radio frequency generation module, wherein the radio frequency generation module comprises a control part, an output part, a filtering part and a detection part; the control part sends an instruction to the power supply according to the energy required by the test system, compares the instruction with the output energy and simultaneously adjusts the instruction and the output energy; the output part outputs energy according to the requirement of the test system, and power supplies of different types determine the frequency; the filtering part is used for filtering power signals of the energy output of the output part; the detection part detects the output energy of the output part, and simultaneously displays and feeds back to the control part; after the radio frequency generation module provides energy and radio frequency test frequency, the stability of applied energy is ensured by the radio frequency matching module, the radio frequency matching module needs to compensate errors caused by phase change because plasmas with different energies have different load factors, wherein the load factors comprise pressure, gas mixture and process places, and the radio frequency matching module compensates the errors caused by the phase change by using a load capacitor and positive phase errors generated by adjusting blades; after the radio frequency matching module piece stably applies energy, the frequency of the applied energy is corrected through the correction module, the requirements of different communication modes on the stability of the frequency are different, the traditional frequency stability generally refers to the short-term frequency stability, and the stability of the short-term frequency is defined as:

=

wherein the content of the first and second substances,

indicating a prescribed application divisionEqual intervals, the oscillation frequencies measured in each interval being

、、……

，The nominal frequency is represented by the frequency of the frequency,=

is as followsThe absolute frequency difference measured over a time interval,

=

at this time when

The smaller, the higher the frequency accuracy;

the noise coefficient is used to measure the small signal processing capability of the radio frequency component circuit, in wireless communication, the signal at the receiving end will become small, the noise coefficient of the receiver needs to be as small as possible, and the noise coefficient of the circuit after the multi-stage device can be expressed as:

+

++……+

representing the noise figure 10

The gain of the 1 st stage device is shown,is shown asThe gain of the stage device can be seen from the above formula, the noise coefficient of the radio frequency circuit is related to the gain and the noise coefficient of each stage device, when the gain of the first stage is large enough, the influence of the following each stage device on the noise coefficient of the link is small, and the noise coefficient of the link is from the first stage

And (6) determining.

The down-conversion process of the far-end signal is the same as the working principle of superheterodyne receiving, the superheterodyne channel selectivity and the high reliability are preferred structures of various receivers, and the frequency of the radio-frequency signal is assumed to beLocal oscillator frequency ofMixed intermediate frequency of(ii) a At a frequency of

At the position of the air compressor, the air compressor is started,

after mixing, intermediate frequency signals with the same frequency can be obtained, assuming the frequency

If strong interference exists, the noise power at the receiving intermediate frequency position can be increased, and the signal to noise ratio is further reduced; after the correction of the correction module is finished, the radio frequency test module is used for testing the energy frequency, and the radio frequency test module comprises an energy induction part, a simulation load part and a monitoring part; the energy induction part mainly induces energy, so as to judge whether the energy frequency meets the standard or not and feed back the judgment result to the monitoring part; the analog load part mainly has impedance and stabilization functions, so that the energy induction part can better induce energy to output frequency standard; the monitoring part is mainly used for monitoring the energy frequency amplitude and displaying the energy size, and the displayed energy data can be used as a radio frequency size adjusting basis; after the radio frequency testing module finishes testing, the display module displays an output energy frequency curve tested by the radio frequency testing module, so that visual experience is provided for testers, meanwhile, numerical values are marked at the inflection points of the curve, a pre-recorded display curve under a normal condition is given, a difference value of each inflection point of the two groups of curves is displayed, and whether the difference value is within an error range is marked.

The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the specific details of the embodiments, and various equivalent changes can be made to the technical solution of the present invention within the technical idea of the present invention, and these equivalent changes are within the protection scope of the present invention.