阅读说明：本技术 一种三坐标测量机接触式探头 (Contact type probe of three-coordinate measuring machine ) 是由 王宗省 刘珠荣 于明州 于 2020-07-30 设计创作，主要内容包括：本发明公开了一种三坐标测量机接触式探头,具体涉及三坐标测量机领域,包括探头外壳,所述探头外壳底部设有测量机构和测球,且测球位于测量机构底部,所述测量机构包括连接杆、连接片和传感器靶片,所述传感器靶片活动连接于连接杆与连接片之间,所述连接杆与测球之间固定连接,所述连接片远离传感器靶片的一端固定设有固定片,且固定片与探头外壳底部固定连接,所述传感器靶片顶部固定设有电容传感器。本发明通过设置测量机构,可使三坐标测量机的测量分辨率达3nm,量程达20μm,提高了三坐标测量机的精度,可用来测量非接触式探头所不能测量或者测不准的具有斜面、台阶、深孔、倒角、圆弧、透明体等特征的工件。(The invention discloses a contact type probe of a three-coordinate measuring machine, and particularly relates to the field of three-coordinate measuring machines, which comprises a probe shell, wherein the bottom of the probe shell is provided with a measuring mechanism and a measuring ball, the measuring ball is positioned at the bottom of the measuring mechanism, the measuring mechanism comprises a connecting rod, a connecting sheet and a sensor target sheet, the sensor target sheet is movably connected between the connecting rod and the connecting sheet, the connecting rod is fixedly connected with the measuring ball, one end of the connecting sheet, which is far away from the sensor target sheet, is fixedly provided with a fixing sheet, the fixing sheet is fixedly connected with the bottom of the probe shell, and the top of the sensor target sheet is fixedly provided. The invention can make the measuring resolution of the three-coordinate measuring machine reach 3nm and the measuring range reach 20 μm by arranging the measuring mechanism, improves the precision of the three-coordinate measuring machine, and can be used for measuring workpieces which can not be measured or can not be accurately measured by a non-contact probe and have the characteristics of inclined planes, steps, deep holes, chamfers, circular arcs, transparent bodies and the like.)

1. A three coordinate measuring machine contact probe, comprising a probe housing (1), characterized in that: probe shell (1) bottom is equipped with measuring mechanism (2) and surveys ball (3), and surveys ball (3) and be located measuring mechanism (2) bottom, measuring mechanism (2) are including connecting rod (21), connection piece (22) and sensor target piece (23), sensor target piece (23) swing joint is between connecting rod (21) and connection piece (22), connecting rod (21) and survey fixed connection between ball (3), the one end that sensor target piece (23) were kept away from in connection piece (22) is fixed and is equipped with stationary blade (24), and stationary blade (24) and probe shell (1) bottom fixed connection, sensor target piece (23) top is fixed and is equipped with capacitive sensor (4).

2. A three coordinate measuring machine contact probe according to claim 1, wherein: eight groups of measuring mechanisms (2) are arranged around the measuring ball (3) as the center, and the measuring ball (3) is suspended by the measuring mechanisms (2).

3. A three coordinate measuring machine contact probe according to claim 1, wherein: the material of connecting rod (21) is tungsten carbide, and eight sets of connecting rod (21) are the setting of rice font.

4. A three coordinate measuring machine contact probe according to claim 1, wherein: the connecting piece (22) is made of beryllium copper cyanide, and the connecting piece (22) is an elastic element.

5. A three coordinate measuring machine contact probe according to claim 1, wherein: the bottom of the measuring ball (3) is provided with a measuring rod, and the measuring rod is made of stainless steel.

6. A three coordinate measuring machine contact probe according to claim 1, wherein: eight groups of capacitance sensors (4) are arranged corresponding to the sensor target (23), and the precision of the capacitance sensors (4) is 3 nm.

Technical Field

The invention relates to the field of three-coordinate measuring machines, in particular to a contact type probe of a three-coordinate measuring machine.

Background

In recent years, micro-electro-mechanical systems (MEMS) technology has been rapidly developed, and various types of micro devices have come into the market, such as: micro-turbine, micro-needle array, piezoelectric motor, micro-lens, LIGA product and fuel oil nozzle, etc. the geometric feature size of these components is between several micrometers and several millimeters.

Corresponding high-precision detection modes and technologies are needed to ensure the processing quality of the MEMS device, and the existing non-contact probe cannot measure or cannot measure workpieces with characteristics of slopes, steps, deep holes, chamfers, arcs, transparent bodies and the like, so that a nano three-coordinate measuring machine and a measuring probe which can be used for measuring the three-dimensional characteristic dimension of the MEMS device are needed.

The above information disclosed in this background section is only for enhancement of understanding of the background of the disclosure and therefore it may contain information that does not constitute prior art that is already known to a person of ordinary skill in the art.

Disclosure of Invention

In order to overcome the above defects in the prior art, an embodiment of the present invention provides a contact probe for a three-coordinate measuring machine, and the technical problem to be solved by the present invention is: how to measure a workpiece which has the characteristics of an inclined plane, a step, a deep hole, a chamfer, an arc, a transparent body and the like and cannot be measured or cannot be measured accurately by the existing non-contact probe.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a three-coordinate measuring machine contact probe, includes the probe shell, probe shell bottom is equipped with measuring mechanism and surveys the ball, and surveys the ball and be located the measuring mechanism bottom, measuring mechanism includes connecting rod, connection piece and sensor target, sensor target swing joint is between connecting rod and connection piece, connecting rod and survey fixed connection between the ball, the one end that the sensor target was kept away from to the connection piece is fixed and is equipped with the stationary blade, and stationary blade and probe shell bottom fixed connection, the fixed capacitive sensor that is equipped with in sensor target top.

When the suspension mechanism is used, the suspension mechanism is composed of eight groups of connecting sheets, when acting force in the vertical direction is applied to the tail end of the connecting sheet in a cantilever state, the connecting sheet can be bent to a certain extent, the elastic range of the suspension mechanism is fundamentally expanded, the eight groups of connecting sheets mainly work in the bending state, and the torsion factor is few, so that the force measurement is small, the beryllium bronze has high strength, elasticity, hardness, wear resistance and fatigue resistance, when the connecting sheet is used as an elastic element, the deformation working range of the connecting sheet is far smaller than the maximum allowable deformation range of the connecting sheet, so that the elastic mechanism formed by the connecting sheet shows good repeatability and stability, the triggering measurement principle of an eight-point capacitance sensing structure is integrally adopted, when a measuring rod is contacted with a workpiece, deflection occurs, so that the original vertical distance between the connecting sheet and a capacitance sensor is changed, and the output of the capacitance, thereby judging whether the measuring end contacts with the workpiece.

In a preferred embodiment, the measuring mechanism is arranged in eight groups around the measuring ball, and the measuring ball is suspended by the measuring mechanism.

In a preferred embodiment, the material of the connecting rods is tungsten carbide, and eight groups of connecting rods are arranged in a shape of a Chinese character 'mi'.

In a preferred embodiment, the connecting piece is made of beryllium copper cyanide, and the connecting piece is an elastic element.

In a preferred embodiment, the bottom of the measuring ball is provided with a measuring rod, and the material of the measuring rod is stainless steel.

In a preferred embodiment, the capacitance sensors are arranged in eight groups corresponding to the sensor target, and the accuracy of the capacitance sensors is 3 nm.

The invention has the technical effects and advantages that:

by arranging the measuring mechanism and adopting the suspension mechanism consisting of eight groups of connecting sheets, when acting force in the vertical direction is applied to the tail end of the connecting sheet in a cantilever state, the connecting sheet can be bent to a certain degree, the elastic range of the suspension mechanism is fundamentally expanded, the eight groups of connecting sheets mainly work in the bending state, and the torsion factor is few, so that the force measurement is small, the beryllium bronze has high strength, elasticity, hardness, wear resistance and fatigue resistance, when the connecting sheet is used as an elastic element, the deformation working range of the connecting sheet is far smaller than the maximum allowable deformation range of the connecting sheet, so that the elastic mechanism formed by the connecting sheets has good repeatability and stability, the measuring resolution of the three-coordinate measuring machine can reach 3nm, the measuring range reaches 20 mu m, the precision of the three-coordinate measuring machine is improved, and the measuring device can be used for measuring inclined planes, which cannot be measured or cannot, The workpiece has the characteristics of steps, deep holes, chamfers, arcs, transparencies and the like.

Drawings

Fig. 1 is a bottom view of the overall structure of the present invention.

Fig. 2 is a schematic structural diagram of the measuring mechanism of the present invention.

FIG. 3 is a schematic side sectional view of the probe housing of the present invention.

The reference signs are: 1 probe shell, 2 measuring mechanisms, 21 connecting rods, 22 connecting pieces, 23 sensor target pieces, 24 fixing pieces, 3 measuring balls and 4 capacitance sensors.

Detailed Description

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these example embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus their repetitive description will be omitted.

Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more example embodiments. In the following description, numerous specific details are provided to give a thorough understanding of example embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the subject matter of the present disclosure can be practiced without one or more of the specific details, or with other methods, components, steps, and so forth. In other instances, well-known structures, methods, implementations, or operations are not shown or described in detail to avoid obscuring aspects of the disclosure.

The invention provides a contact type probe of a three-coordinate measuring machine, which comprises a probe shell 1, wherein the bottom of the probe shell 1 is provided with a measuring mechanism 2 and a measuring ball 3, the measuring ball 3 is positioned at the bottom of the measuring mechanism 2, the measuring mechanism 2 comprises a connecting rod 21, a connecting sheet 22 and a sensor target sheet 23, the sensor target sheet 23 is movably connected between the connecting rod 21 and the connecting sheet 22, the connecting rod 21 and the measuring ball 3 are fixedly connected, one end of the connecting sheet 22, far away from the sensor target sheet 23, is fixedly provided with a fixing sheet 24, the fixing sheet 24 is fixedly connected with the bottom of the probe shell 1, and the top of the sensor target sheet 23 is fixedly provided with a capacitance sensor 4.

The measuring mechanism 2 is surrounded by eight groups by taking the measuring ball 3 as a center, and the measuring ball 3 is suspended by the measuring mechanism 2.

The material of connecting rod 21 is tungsten carbide, and eight groups of connecting rod 21 are the setting of rice font.

The connecting piece 22 is made of beryllium bronze, and the connecting piece 22 is an elastic element.

The bottom of the measuring ball 3 is provided with a measuring rod, and the measuring rod is made of stainless steel.

Eight groups of capacitance sensors 4 are arranged corresponding to the sensor target pieces 23, and the precision of the capacitance sensors 4 is 3 nm.

As shown in fig. 1 to 3, the embodiment specifically is: the measuring ball 3 with measuring rod is connected with the connecting piece 22 through eight groups of connecting rods 21, the connecting piece 22 is connected with the probe shell 1 through the fixing piece 24, the high-precision capacitance sensor 4 is arranged above the sensor target piece 23 at the connecting part of the connecting rods 21 and the connecting piece 22, eight groups of capacitance sensors 4 are arranged corresponding to the sensor target piece 23, a suspension mechanism consisting of eight groups of connecting pieces 22 is adopted, when acting force in the vertical direction is applied to the tail end of the connecting piece 22 in a cantilever state, the connecting piece 22 can be bent to a certain extent, the elastic range of the suspension mechanism is fundamentally expanded, the eight groups of connecting pieces 22 mainly work in the bending state, the torsion factor is few, therefore, the force measurement is small, the beryllium bronze has high strength, elasticity, hardness, wear resistance and fatigue resistance, and when the connecting piece 22 is used as an elastic element, the deformation working range is far smaller than the maximum, therefore, the elastic mechanism formed by the connecting sheet 22 shows good repeatability and stability, the triggering measurement principle of an eight-point capacitance sensing structure is adopted integrally, when the measuring rod is in contact with a workpiece, deflection occurs, the original vertical distance between the connecting sheet 22 and the capacitance sensor 4 is changed, and the output of the capacitance sensor 4 is changed, so that whether the measuring end is in contact with the workpiece or not is judged, the precision of the three-coordinate measuring machine is improved, and the three-coordinate measuring machine can be used for measuring the workpiece which cannot be measured or is not accurately measured by a non-contact probe and has the characteristics of inclined planes, steps, deep holes, chamfers, arcs, transparent bodies and the like.

The working principle of the invention is as follows:

referring to the attached drawings 1-3 of the specification, a suspension mechanism composed of eight groups of connecting sheets 22 is adopted, when acting force in the vertical direction is applied to the tail end of the connecting sheet 22 in a cantilever state, the connecting sheet 22 can be bent to a certain extent, the elastic range of the suspension mechanism is fundamentally expanded, the eight groups of connecting sheets 22 mainly work in the bending state, and the torsion factor is few, so that the force measurement is small, the beryllium bronze has high strength, elasticity, hardness, wear resistance and fatigue resistance, when the connecting sheet 22 is used as an elastic element, the deformation working range is far smaller than the maximum allowable deformation range of the connecting sheet 22, so that the elastic mechanism formed by the connecting sheet 22 shows good repeatability and stability, the triggering measurement principle of an eight-point capacitance sensing structure is adopted integrally, deflection occurs after a measuring rod and a workpiece are contacted, and the original vertical distance between the connecting sheet 22 and a capacitance sensor 4 is changed, the output of the capacitance sensor 4 is changed, so that whether the measuring end is contacted with the workpiece or not is judged.

The points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be a direct connection, and "upper," "lower," "left," and "right" are only used to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed;

secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the invention, only the structures related to the disclosed embodiments are referred to, other structures can refer to common designs, and the same embodiment and different embodiments of the invention can be combined with each other without conflict;

and finally: the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.