阅读说明：本技术 光学相位阵列，形成和操作光学相位阵列的方法 (Optical phased array, method of forming and operating an optical phased array ) 是由 竺士炀 许先知 卢国强 于 2017-09-18 设计创作，主要内容包括：各个实施方式可提供光学相位阵列。光学相位阵列可包括配置成发射激光的激光源。光学相位阵列还可包括具有n级分光器的集成光子网络,该分光器是1×2分光器,集成光子网络的每个分光器具有输入、第一输出和第二输出。集成光子网络可以配置成将激光分为N个输出。N个输出中的每个输出可以与N个输出中的相邻输出相差恒定的相位差(Δφ)。N可以等于2的n次幂。(Various embodiments may provide an optical phased array. The optical phased array may include a laser source configured to emit laser light. The optical phased array may also include an integrated photonic network having n-order optical splitters, the optical splitters being 1 x 2 optical splitters, each optical splitter of the integrated photonic network having an input, a first output, and a second output. The integrated photonic network may be configured to split the laser light into N outputs. Each of the N outputs may differ from adjacent ones of the N outputs by a constant phase difference (Δ Φ). N may be equal to 2 raised to the nth power.)

1. An optical phased array, comprising:

a laser source configured to emit laser light;

an integrated photonic network having n-order optical splitters, the optical splitters being 1 x 2 optical splitters, each optical splitter of the integrated photonic network having an input, a first output and a second output;

wherein the integrated photonic network is configured to split the laser light into N outputs;

wherein each of the N outputs differs from an adjacent one of the N outputs by a constant phase difference;

wherein N and N are defined by the formula 2ⁿAssociating;

wherein an i-th stage of the n stagesHas 2^i-1A beam splitter, 2^i-1The first output light of each of the optical splitters is coupled to a first waveguide, the 2^i-1The second output light of each of the optical splitters is coupled to a second waveguide;

wherein the first waveguide of the i-th stage is configured such that a first optical beam traveling through the first waveguide experiences no phase shift;

wherein the second waveguide of the i-th stage is configured such that a second light beam traveling through the waveguide experiences a beam profile equal to N divided by 2ⁱMultiplying by the phase shift of the constant phase difference; and is

Wherein n is any integer greater than 1.

2. The optical phased array of claim 1,

wherein the second waveguide of the i-th stage comprises N/2ⁱA phase shifter, said N/2ⁱEach of the phase shifters is configured to provide a phase shift to the second light beam equal to the constant phase difference such that the second light beam traveling through the waveguide experiences a phase shift equal to N divided by 2ⁱAnd multiplied by the phase shift of the constant phase difference.

3. The optical phased array of claim 2,

wherein the N/2 included in the second waveguide of the i-th stageⁱThe phase shifters are identical to each other.

4. The optical phased array of claim 3,

wherein, the N/2ⁱEach of the phase shifters is configured to pass to N/2ⁱEach of the phase shifters provides a constant voltage to provide a phase shift equal to the constant phase difference.

5. Optical phased array according to claim 2

Wherein included in the second waveguide of the i-th stageThe number N/2ⁱThe phase shifters are thermo-optic or electro-optic phase shifters.

6. The optical phased array of claim 1,

wherein the second waveguide of the i-th stage includes a phase shifter configured to provide N divided by 2 to the second optical beamⁱMultiplying by the phase shift of the constant phase difference such that the second light beam traveling through the waveguide experiences a phase shift equal to N divided by 2ⁱAnd multiplied by the phase shift of the constant phase difference.

7. The optical phased array of claim 6,

wherein the phase shifter included in the second waveguide of the i-th stage is configured to provide N divided by 2 at a predetermined voltageⁱAnd multiplied by the phase shift of the constant phase difference.

8. The optical phased array of claim 5,

wherein the phase shifter included in the second waveguide is a thermo-optic phase shifter or an electro-optic phase shifter.

9. The optical phased array of claim 1,

wherein n is any integer greater than 2.

10. The optical phased array of claim 1,

wherein the optical phased array is configured such that each of the N outputs has a power equal to 1/N of the power of the laser light emitted by the laser source.

11. A method of operating an optical phased array, the method comprising:

providing the optical phased array, the phased array comprising:

a laser source configured to emit laser light;

an integrated photonic network having n-order optical splitters, the optical splitters being 1 x 2 optical splitters, each optical splitter of the integrated photonic network having an input, a first output and a second output;

wherein the integrated photonic network is configured to split the laser light into N outputs;

wherein each of the N outputs differs from an adjacent one of the N outputs by a constant phase difference;

wherein N and N are defined by the formula 2ⁿAssociating;

wherein an i-th stage of the n stages has 2^i-1A beam splitter, 2^i-1The first output light of each of the optical splitters is coupled to a first waveguide, the 2^i-1The second output light of each of the optical splitters is coupled to a second waveguide;

wherein the first waveguide of the i-th stage is configured such that a first optical beam traveling through the first waveguide experiences no phase shift;

wherein the second waveguide of the i-th stage is configured such that a second light beam traveling through the waveguide experiences a beam profile equal to N divided by 2ⁱMultiplying by the phase shift of the constant phase difference; and is

Wherein n is any integer greater than 1; and

activating the laser source.

12. The method of claim 11, wherein the first and second light sources are selected from the group consisting of,

wherein the second waveguide of the i-th stage comprises N/2ⁱA phase shifter, said N/2ⁱEach of the phase shifters is configured to provide a phase shift to the second light beam equal to the constant phase difference such that the second light beam traveling through the waveguide experiences a phase shift equal to N divided by 2ⁱMultiplying by the phase shift of the constant phase difference; and is

Wherein the method further comprises converting the N/2ⁱEach of the phase shifters applies a constant voltage.

13. The method of claim 12, wherein the first and second light sources are selected from the group consisting of,

wherein regulation is applied to said N/2ⁱA constant voltage for each of the phase shifters to change the direction of the N outputs.

14. The method of claim 12, wherein the first and second light sources are selected from the group consisting of,

wherein the N/2 included in the second waveguide of the i-th stageⁱThe phase shifters are thermo-optic or electro-optic phase shifters.

15. The method of claim 11, wherein the first and second light sources are selected from the group consisting of,

wherein the second waveguide of the i-th stage includes a phase shifter configured to provide N divided by 2 to the second optical beamⁱMultiplying by the phase shift of the constant phase difference such that the second light beam traveling through the waveguide experiences a phase shift equal to N divided by 2ⁱAnd multiplied by the phase shift of the constant phase difference.

16. The method of claim 15, wherein the first and second light sources are selected from the group consisting of,

wherein the phase shifter included in the second waveguide of the i-th stage is configured to provide N divided by 2 at a predetermined voltageⁱAnd multiplied by the phase shift of the constant phase difference.

17. The method of claim 16, wherein the first and second light sources are selected from the group consisting of,

wherein the predetermined voltage applied to the phase shifter is adjusted to change the direction of the N outputs.

18. The optical phased array of claim 15,

wherein the phase shifter included in the second waveguide is a thermo-optic phase shifter or an electro-optic phase shifter.

19. A method of forming an optical phased array, the method comprising:

providing a laser source configured to emit laser light;

coupling an integrated photonic network having an n-order splitter to the laser source;

wherein the integrated photonic network is configured to split the laser light into N outputs;

wherein the optical splitter is a 1 x 2 optical splitter, each optical splitter of the integrated photonic network having an input, a first output, and a second output;

wherein each of the N outputs differs from an adjacent one of the N outputs by a constant phase difference;

wherein N and N are defined by the formula 2ⁿAssociating;

wherein an i-th stage of the n stages has 2^i-1A beam splitter, 2^i-1The first output light of each of the optical splitters is coupled to a first waveguide, the 2^i-1The second output light of each of the optical splitters is coupled to a second waveguide;

wherein the first waveguide of the i-th stage is configured such that a first optical beam traveling through the first waveguide experiences no phase shift;

wherein the second waveguide of the i-th stage is configured such that a second light beam traveling through the waveguide experiences a beam profile equal to N divided by 2ⁱMultiplying by the phase shift of the constant phase difference; and is

Wherein n is any integer greater than 1.

20. The method of claim 19, further comprising:

forming the integrated photonic network.

Technical Field

Various aspects of the present invention relate to optical phased arrays. Various aspects of the present invention relate to methods of forming optical phased arrays. Various aspects of the present invention relate to methods of operating optical phased arrays.

Background

Devices for fast scanning based on narrow free space laser beams have found major applications in three-dimensional imaging and mapping, such as light detection and ranging (LiDAR) for remote sensing and navigation and secure free space optical communication. Optical Phased Arrays (OPAs) can achieve this non-mechanical beam steering and can be fabricated on silicon platforms using standard silicon photonics techniques.

The OPA may comprise a series of emitters (antennas) fed from a common coherent source, where the optical phase from each emitter may be controlled to form a desired wavefront at the near field. Thus, OPA comprises three main components: a coupler or splitter to split the input light to a set of emitters; a phase shifter for controlling a relative phase of each antenna; an optical antenna to emit (or couple) light into or from free space.

Fig. 1A shows the operating principle of an Optical Phased Array (OPA) with N channels. The phase difference between the visible light along adjacent channels is delta phi. The steering angle θ may be provided by:

and the beam width can be given by approximately:

where d is the distance between the emitters and λ is the wavelength of visible light. N should be large enough to obtain a beam with a sufficiently narrow width.

Fig. 1B is a schematic diagram showing a phase shifting architecture with separate phase shifters in different channels to independently control the phase of visible light traveling along the channels. As can be seen from fig. 1B, the phase difference between the visible light along the adjacent channels and emitted by the emitters is Δ φ. There are N channels and N-1 phase shifters.

For each channel, the voltage (power) applied to the phase shifter can be reset once the phase shift reaches 2 π. The maximum required total phase shift is about pi x (N-1). However, the array shown in FIG. 1B would require (N-1) voltages (or voltage signals) to steer the beam in each direction. Thus, a look-up table (LUT) may be required. The electrical control would be rather complex and the steering speed would be slow, since the (N-1) voltage would need to be arranged and stabilized for each direction.

FIG. 1C is a schematic diagram showing another phase shifting architecture in which a voltage (or voltage signal) is applied to the same phase shifter. As shown in fig. 1C, the phase shifters are arranged in a triangular arrangement and with more and more phase shifters along respective subsequent paths, a voltage (or voltage signal) is applied to each identical phase shifter, thereby obtaining a constant phase difference between adjacent antennas. The total desired phase shift is [ N × (N-1)/2] Δ φ. When N becomes large, the power consumption of the architecture can be very large.

FIG. 1D is a schematic diagram showing another phase shifting architecture in which a voltage (or voltage signal) is applied to the same phase shifter. This architecture may address some of the shortcomings of the architectures shown in fig. 1B and 1C. The phase shifting architecture is a cascaded phase shifting architecture that may enable continuous steering using one input signal, i.e., similar to the architecture shown in fig. 1C. The total phase shift is (N-1). times.DELTA.phi. However, only evanescent splitters may be used.

As the number of channels increases, the design of such splitters becomes more challenging and sensitive to manufacturing errors.

Disclosure of Invention

The integrated photonic network may be configured to split the laser light into N outputs each of the N outputs may differ from an adjacent one of the N outputs by a constant phase difference (Δ φ) N may equal an nth power of 2^i-1A beam splitter, wherein 2^i-1The first output light of each of the optical splitters is coupled to a first waveguide, 2^i-1The second output light of each of the optical splitters is coupled to a second waveguide. The first waveguide of the ith stage may be configured such that the first optical beam traveling through the first waveguide experiences no phase shift. The second waveguide of the ith stage may be configured such that the second light beam traveling through the waveguide experiences a beam angle equal to N divided by 2ⁱMultiplied by the phase shift of the constant phase difference, n can be any integer greater than 1.

Various embodiments may provide a method of operating an optical phased array. The method may include providing an optical phased array. The method may further comprise activating or switching on the laser source.

Various embodiments may provide a method of forming an optical phased array. The method may include providing a laser source configured to emit laser light. The method may include coupling an integrated photonic network having an n-order splitter to a laser source.

Drawings

The invention will be better understood with reference to the detailed description when considered in conjunction with the non-limiting examples and the accompanying drawings, in which:

fig. 1A shows the operating principle of an Optical Phased Array (OPA) with N channels.

Fig. 1B is a schematic diagram showing a phase shifting architecture with separate phase shifters in different channels to independently control the phase of visible light traveling along the channels.

FIG. 1C is a schematic diagram showing another phase shifting architecture in which a voltage (or voltage signal) is applied to the same phase shifter.

FIG. 1D is a schematic diagram showing another phase shifting architecture in which a voltage (or voltage signal) is applied to the same phase shifter.

Fig. 2 is a schematic diagram illustrating an optical phased array in accordance with various embodiments.

Fig. 3 illustrates a schematic diagram of a network, in accordance with various embodiments.

Fig. 4A shows a schematic diagram of a network according to various other embodiments.

Fig. 4B illustrates voltages that may be applied to different stages of a network, in accordance with various embodiments.

Fig. 5 shows (left) a 64-channel optical phased array according to various embodiments, (middle) an output spot far field when a voltage of about 0V is applied to the optical phased array shown on the left side, and (right) an output spot far field when the voltage becomes about 5V.

Fig. 6 is a schematic diagram illustrating a method of operating an optical phased array, in accordance with various embodiments.

Fig. 7 is a schematic diagram illustrating a method of forming an optical phased array according to various embodiments.

Detailed Description

The following detailed description refers to the accompanying drawings that show, by way of illustration, specific details and embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural and logical changes may be made without departing from the scope of the present invention. The various embodiments are not necessarily mutually exclusive, as some embodiments may be combined with one or more other embodiments to form new embodiments.

Embodiments described in the context of one of the methods or optical phased arrays are similarly valid for the other methods or optical phased arrays. Similarly, embodiments described in the context of the method are similarly valid for optical phased arrays, and vice versa.

Features described in the context of one embodiment may apply correspondingly to the same or similar features in other embodiments. Features described in the context of an embodiment may be applied to other embodiments accordingly, even if not explicitly described in these embodiments. Furthermore, additions and/or combinations and/or substitutions described for features in the context of the embodiments may be correspondingly applied to the same or similar features in other embodiments.

The term "over" as used with respect to a deposition material formed "over" a side or surface may be used herein to indicate that the deposition material may be in direct contact with the implied side or surface, e.g., in direct contact on a surface or side. The term "over" as used with respect to a deposited material formed "over" a side or surface may also be used herein to indicate that the deposited material may be formed indirectly on an implied side or surface of one or more additional layers disposed between the implied side or surface and the deposited material. In other words, a first layer "over" a second layer may refer to the first layer being directly on the second layer, or the first and second layers being separated by one or more intervening layers.

The optical phased arrays described herein may operate in various directions, and thus it should be understood that the terms "top," "bottom," and the like, when used in the following description, are used to facilitate and aid in understanding relative position or direction, and are not intended to limit the orientation of the optical phased array.

In the context of various embodiments, the articles "a," "an," "the," and "said" used in reference to a feature or element include reference to one or more features or elements.

In the context of various embodiments, the term "about" or "approximately" as applied to a numerical value encompasses both a precise value and a reasonable variance.

As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The term "comprising" may be used in a non-limiting sense. A method or structure that "comprises" a feature may mean that the method or structure includes the feature, but may also include one or more other features. In various embodiments, a method or structure that "comprises" a feature may mean that the method or structure consists of the feature, while in various other embodiments, a method or structure that "comprises" a feature may mean that the method or structure includes one or more features in addition to the feature.

The tree of cascaded 1 x 2 splitters (based on Y-junctions or multi-mode interference (MMI)) can be simply designed and can be robust without being limited by the number of channels. Various embodiments may have advantages over conventional architectures and/or solve or mitigate problems faced by conventional architectures.

Fig. 2 is a schematic diagram illustrating an optical phased array 200 according to various embodiments. The optical phased array 200 may include a laser source 202 configured to emit laser light. The optical phased array 200 may also include an integrated photonic network 204 having n-order optical splitters, which are 1 x 2 optical splitters, each optical splitter of the integrated photonic network having an input, a first output, and a second output. Integrated photonic network 204 may be configured to split the laser light into N outputs. N may be an integer representing the number of outputs of array 200. Each of the N outputs may differ from adjacent ones of the N outputs by a constant phase difference (Δ Φ). N and N are related by:

N＝2ⁿ(3)。

the output used in the present context may refer to the output laser beam produced by the optical phased array, and the N outputs may refer to the N output beams produced by the optical phased array.

The ith stage of the n stages may have 2^i-1A beam splitter, 2^i-1A first output light of each of the optical splitters is coupled to a first waveguide, and 2^i-1The second output of each of the optical splitters is optically coupled to a second waveguide. The first waveguide of the ith stage may be configured such that traveling through the second of the first waveguidesA light beam does not experience a phase shift. The second waveguide of the ith stage may be configured such that the second light beam traveling through the waveguide experiences a beam angle equal to N divided by 2ⁱAnd multiplied by the phase shift of the constant phase difference. n can be any integer greater than 1, i.e.,

i may be a positive integer between 1 and n, i.e.,

l≤i≤n (4)。

the 1 x 2 splitter may be referred to as a Y splitter.

Various embodiments may be directed to a network or array comprising a cascaded phase-shifting architecture having a plurality of 1 x 2 optical splitters arranged in a tree structure.

Fig. 3 illustrates a schematic diagram of a network 304, in accordance with various embodiments. Network 304 may correspond to network 204 shown in fig. 2. As shown in fig. 3, network 304 may be configured to provide N outputs (0 °, Δ Φ, 2 Δ Φ. (N-1) Δ Φ). In various embodiments, the second waveguide of the ith stage may include or may be coupled to N/2ⁱPhase shifters, N/2ⁱEach of the phase shifters is configured to provide a constant phase difference (Δ φ) to the second light beam such that the second light beam traveling through the waveguide experiences a phase difference equal to N divided by 2ⁱAnd multiplied by the phase shift of the constant phase difference, i.e.,

for example, for a circuit having a configuration to generate 8 outputs (N-2)³8), the second waveguide of the second stage may include or may be physically and optically coupled to 8/2²Each phase shifter provides a phase shift of delta phi 2, and the second waveguide of stage 3 may include or be physically and optically coupled to 8/2³1 phase shifter, which provides a phase shift of delta phi. Thus, in this example, the second stage of network 304 provides a phase shift of 2 Δ φ, while the third stage provides a phase shift of Δ φ.

Second waveguide package of ith stageN/2 including or coupled theretoⁱThe phase shifters may be identical to each other. N/2ⁱEach of the phase shifters may be configured to pass through to N/2ⁱEach of the phase shifters provides a constant voltage (or voltage signal) to provide a phase shift equal to a constant phase difference (delta phi). The same voltage (or voltage signal) may be applied to the same phase shifters included in network 304, and the total phase shift may be provided by:

the array including network 304 may have a total phase shifter that is smaller than the array shown in fig. 1C.

N/2 included in or coupled to the second waveguide of the ith stageⁱThe phase shifters may be thermo-optic phase shifters or electro-optic phase shifters.

In a portion of the network 304 (e.g., the portion indicated by the dashed box in fig. 3), the network 304 may include a first Y splitter configured to receive the laser beam from the laser source and further configured to split the laser beam into a first beam along a first path configured to produce no phase shift on the first beam and a second beam along a second path configured to produce a phase shift, e.g., 2 Δ φ, on the second beam. Network 304 may also include a second Y splitter coupled to the first path and configured to receive the first beam and further configured to split the first beam into a third beam along a third path configured to produce no phase shift in the third beam and a fourth beam along a fourth path configured to produce a phase shift in the fourth beam that is substantially half the phase shift produced in the second beam, e.g., delta phi. Network 304 may additionally include a third Y splitter coupled to the second path and configured to receive the second beam and further configured to split the second beam into a fifth beam along a fifth path configured to produce no phase shift in the fifth beam and a sixth beam along a sixth path configured to produce a phase shift in the sixth beam that is substantially half the phase shift produced in the second beam, e.g., delta phi.

The phase shift on the fourth light beam may be applied by a phase shifter configured to receive a predetermined voltage. The phase shift on the sixth beam may be applied by another phase shifter configured to receive a predetermined voltage substantially equal to the predetermined voltage received by the phase shifter such that the phase shift on the sixth beam is substantially equal to the phase shift (e.g., delta phi) on the fourth beam. The phase shift on the second beam may be applied by two additional phase shifters, each of which is configured to receive a predetermined voltage substantially equal to the predetermined voltage received by that phase shifter, such that the phase shift on the second beam (e.g., 2 Δ φ) is substantially twice the phase shift on the fourth beam (e.g., Δ φ).

Additionally, as shown in FIG. 3, network 304 may also include one or more other phase shifters and Y splitters. Network 304 may include a plurality of phase shifters and Y optical splitters arranged in a tree structure.

Fig. 4A shows a schematic diagram of a network 404 according to various other embodiments. The network 404 may correspond to the network 204 shown in fig. 2. The second waveguide of the ith stage may include or may be coupled to a phase shifter configured to provide the second beam with N divided by 2ⁱMultiplied by the phase shift of the constant phase difference (i.e.,

) Such that a second light beam traveling through the waveguide experiences a beam profile equal to N divided by 2ⁱMultiplied by the phase shift of the constant phase difference (i.e.,). In other words, the second waveguide of the optical splitter in the ith stage may include or may be coupled to a single phase shifter configured to produce the entire phase shift of the optical beam required in the ith stage.

The phase shifter included in the second waveguide may be a thermo-optic phase shifter or an electro-optic phase shifter.

Included in or coupled to the second waveguide of the ith stageThe phase shifter of the waveguide may be configured to provide N divided by 2 at a predetermined voltage or voltage signalⁱMultiplied by the phase shift of the constant phase difference (i.e.,)。

network 404 may include a plurality of phase shifters included in or coupled to the plurality of second waveguides, each second waveguide of each optical splitter having or coupled to one of the plurality of phase shifters. The plurality of phase shifters may be the same or similar to each other, but apply different voltages or voltage signals such that optical beams traveling along the second waveguide at different stages of the network 404 experience different phase shifts.

For example, for a circuit having a configuration to generate 8 outputs (N-2)³8), the second waveguide of stage 2 may include or may be physically and optically coupled to a phase shifter providing 8/2²× Δ φ -2 φ, and the second waveguide of stage 3 may include or be physically and optically coupled to another phase shifter configured to provide 8/2³× delta phi, and the second waveguide of stage 1 may include or be physically and optically coupled to yet another phase shifter configured to provide 8/2¹× delta phi is a phase shift of 4 phi the one phase shifter, the other phase shifter and the further phase shifter may be the same or similar but different voltages or voltage signals may be applied to provide the different phase shifts required.

In a portion of the network 404 (e.g., the portion indicated by the dashed box in fig. 4), the network 404 may include a first Y splitter configured to receive the laser beam from the laser and further configured to split the laser beam into a first beam along a first path configured to produce no phase shift on the first beam and a second beam along a second path configured to produce a phase shift, e.g., 2 Φ, on the second beam. Network 404 may also include a second Y splitter coupled to the first path and configured to receive the first beam and further configured to split the first beam into a third beam along a third path configured to produce no phase shift in the third beam and a fourth beam along a fourth path configured to produce a phase shift in the fourth beam that is substantially half the phase shift produced in the second beam, e.g., #. Network 404 may additionally include a third Y splitter coupled to the second path and configured to receive the second beam and further configured to split the second beam into a fifth beam along a fifth path configured to produce no phase shift in the fifth beam and a sixth beam along a sixth path configured to produce a phase shift in the sixth beam that is substantially half the phase shift produced in the second beam, e.g., #. The phase shift (e.g.,) of the fourth beam may be applied by a phase shifter. The phase shift on the sixth beam may be applied by another phase shifter such that the phase shift on the sixth beam is substantially equal to the phase shift (e.g., #) on the fourth beam. The phase shift on the second beam may be applied by a further phase shifter such that the phase shift on the second beam is substantially twice the phase shift on the fourth beam, e.g. 2.

Additionally, as shown in fig. 4A, network 404 may also include one or more other phase shifters and Y splitters. Network 404 may include a plurality of phase shifters and Y optical splitters arranged in a tree structure.

The network 404 shown in FIG. 4A may require log₂ ^NA voltage or voltage signal that may be less than that required by the configuration shown in fig. 1B.

In the case of the same thermo-optic (TO) phase shifter for each stage,

where V is the voltage applied TO the TO heater and R is the resistance of the heater. Once the TO heater reaches a 2 pi phase shift, the voltage can be reset.

Fig. 4B illustrates voltages that may be applied to different stages of network 204, in accordance with various embodiments. The voltages or voltage signals applied to each phase shifter within each stage may be substantially equal to each other. The voltages or voltage signals applied to the phase shifter at different stages may be illustrated in fig. 4B.

In general, the phase shifters included in the network 204, 304, or 404 may be thermo-optic or electro-optic phase shifters. The phase shifter may provide the required refractive index change to produce a phase difference of N outputs. The optical phased array 200 or network 204, 304, 404 may be configured such that each of the N outputs has a power equal to 1/N of the power of the laser light emitted by the laser source 202. Substantially equal N outputs may be generated simultaneously.

In various embodiments, one output of the N outputs may be preceded by Δ Φ before a first adjacent output of the N outputs, but may be followed by Δ Φ after a second adjacent output of the N outputs.

In various embodiments, the number of stages may be greater than 2, greater than 3, greater than 4, greater than 5. In other words, n may be any integer greater than 2, greater than 3, greater than 4, greater than 5.

Various embodiments may be developed on a silicon nitride (SiN) platform for operation at a wavelength of approximately 1064nm, or on a silicon (Si) platform for operation at a wavelength of approximately 1550 nm.

Fig. 5 shows (left) a 64-channel optical phased array according to various embodiments, (middle) an output spot far field when a voltage of about 0V is applied to the optical phased array shown on the left side, and (right) an output spot far field when the voltage becomes about 5V.

Fig. 6 is a schematic diagram illustrating a method of operating an optical phased array, in accordance with various embodiments.

The method may include providing an optical phased array at 602. The optical phased array may be any of the arrays described herein. The array may include laser sources configured to emit laser light. The optical phased array may also include an integrated photonic network having n-order optical splitters, the optical splitters being 1 x 2 optical splitters, each optical splitter of the integrated photonic network having an input, a first output, and a second output. The integrated photonic network may be configured to split the laser light into N outputs. Each of the N outputs may differ from adjacent ones of the N outputs by a constant phase difference (Δ Φ). N and N may be related by equation (3).

The ith stage of the n stages may have 2^i-1A beam splitter, 2^i-1The first output light of each of the splitters is coupled to a first waveguide, and 2^i-1The second output light of each of the optical splitters is coupled to a second waveguide. The first waveguide of the ith stage may be configured such that the first optical beam traveling through the first waveguide experiences no phase shift. The second waveguide of the ith stage may be configured such that the second light beam traveling through the waveguide experiences a wavelength equal to N divided by 2ⁱMultiplied by the phase shift of the constant phase difference (i.e.,

). n may be any integer greater than 1.

The method may also include, at 604, activating or turning on the laser source.

In various embodiments, the network may be the network shown in fig. 3. The second waveguide of the ith stage may include N/2ⁱPhase shifters, N/2ⁱEach of the phase shifters is configured to provide a phase shift to the second light beam equal to the constant phase difference such that the second light beam traveling through the waveguide experiences a phase shift equal to N divided by 2ⁱMultiplied by the phase shift of the constant phase difference (i.e.,

). No phase shifter may be included in the first waveguide of the ith stage. The method may further include converting to N/2ⁱEach of the phase shifters applies a constant voltage or a voltage signal. N/2 included in the second waveguide of the i-th stageⁱThe phase shifters may be thermo-optic phase shifters or electro-optic phase shifters. Can be adjusted to be applied to N/2ⁱA constant voltage or voltage signal for each of the phase shifters to change the direction of the N outputs. The voltage or voltage signal applied to each phase shifter of the network may be adjusted equally to divert the output from a first direction to a second directionA second direction different from the first direction.

In various other embodiments, the network may be the network shown in fig. 4A. The phase shifter included in the second waveguide of the ith stage may be configured to provide N divided by 2 at a predetermined voltageⁱMultiplied by the phase shift of the constant phase difference (i.e.,). No phase shifter may be included in the first waveguide of the ith stage. The phase shifter included in the second waveguide may be a thermo-optic phase shifter or an electro-optic phase shifter. The predetermined voltage or voltage signal applied to the phase shifter may be adjusted at a fixed rate (e.g., by changing the voltage values in the equation shown in fig. 4B) to obtain different voltage values to be applied to the phase shifter at different stages to change the direction of the N outputs.

In various embodiments, adjusting the voltage or voltages applied to the phase shifters included in the network may change or steer the direction of the N outputs.

Fig. 7 is a schematic diagram illustrating a method of forming an optical phased array according to various embodiments. The method may include, at 702, providing a laser source configured to emit laser light. The method may include, at 704, coupling an integrated photonic network having an n-order splitter to a laser source.

The integrated photonic network may be configured to split the laser light into N outputs. The optical splitters may be 1 x 2 optical splitters, each optical splitter of the integrated photonic network having an input, a first output and a second output.

Each of the N outputs may differ from adjacent ones of the N outputs by a constant phase difference (Δ Φ). N and N may be related by equation (3).

The ith stage of the n stages has 2^i-1A beam splitter, 2^i-1A first output light of each of the optical splitters is coupled to a first waveguide, and 2^i-1The second output of each of the optical splitters is optically coupled to a second waveguide. The first waveguide of the ith stage may be configured such that the first optical beam traveling through the first waveguide experiences no phase shift. Ith stageMay be configured such that a second light beam traveling through the waveguide experiences a beam profile equal to N divided by 2ⁱAnd multiplied by the phase shift of the constant phase difference, i.e.,

n may be any integer greater than 1.

The method may further comprise forming an integrated photonic network. The method may include arranging the plurality of beam splitters and the plurality of phase shifters in n stages. The method may also include coupling the optical splitter and the phase shifter to the waveguide.

Various embodiments may be directed to an optical phased array formed by the methods described herein.

While the invention has been particularly shown and described with reference to specific embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is, therefore, indicated by the appended claims, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.