阅读说明：本技术 一种mpcvd金刚石合成设备供水保护系统及方法 (Water supply protection system and method for MPCVD diamond synthesis equipment ) 是由 黄翀 唐跃强 于 2020-06-30 设计创作，主要内容包括：本发明的一种MPCVD金刚石合成设备供水保护系统及方法,包括冷水机、管道、MPCVD金刚石合成设备,所述冷水机通过管道与MPCVD金刚石合成设备组成冷水循环回路,还包括控制系统,所述控制系统包括水温测量装置、水压测量装置、水流量测量装置、报警装置和控制中心,所述水温测量装置、水压测量装置、水流量测量装置设于冷水循环回路上,所述控制中心设有输入端和输出端,所述输入端与水温测量装置、水压测量装置、水流量测量装置电连接,所述输出端与报警装置电连接。在MPCVD金刚石合成设备工作过程中,可通过对MPCVD合成设备冷却水各主要技术参数的实时监控,及时发现冷却水的各类异常状况,并根据异常状态进行调节以保障设备在最佳状态工作。(The invention discloses a water supply protection system and method for MPCVD diamond synthesis equipment, which comprises a water cooler, a pipeline and MPCVD diamond synthesis equipment, wherein the water cooler and the MPCVD diamond synthesis equipment form a cold water circulation loop through the pipeline, the water supply protection system also comprises a control system, the control system comprises a water temperature measuring device, a water pressure measuring device, a water flow measuring device, an alarm device and a control center, the water temperature measuring device, the water pressure measuring device and the water flow measuring device are arranged on the cold water circulation loop, the control center is provided with an input end and an output end, the input end is electrically connected with the water temperature measuring device, the water pressure measuring device and the water flow measuring device, and the output end is electrically connected with the alarm device. In the working process of the MPCVD diamond synthesis equipment, various abnormal conditions of the cooling water can be found in time by monitoring various main technical parameters of the cooling water of the MPCVD synthesis equipment in real time, and the cooling water is adjusted according to the abnormal conditions so as to ensure that the equipment works in the best state.)

1. A water supply protection system for MPCVD diamond synthesis equipment comprises a water cooler, a pipeline and MPCVD diamond synthesis equipment, wherein the water cooler and the MPCVD diamond synthesis equipment form a cold water circulation loop through the pipeline, and the water supply protection system is characterized by also comprising a control system,

the control system comprises a water temperature measuring device, a water pressure measuring device, a water flow measuring device, an alarm device and a control center, wherein the water temperature measuring device, the water pressure measuring device and the water flow measuring device are arranged on the cold water circulation loop, the control center is provided with an input end and an output end, the input end is electrically connected with the water temperature measuring device, the water pressure measuring device and the water flow measuring device, and the output end is electrically connected with the alarm device.

2. The MPCVD diamond synthesis apparatus water supply protection system of claim 1, wherein: the water chiller is provided with a first water inlet and a first water outlet, the MPCVD diamond synthesis equipment is provided with a second water inlet and a second water outlet, the first water inlet and the first water outlet are respectively communicated with the second water outlet and the second water inlet through pipelines, and the water temperature measuring device, the water pressure measuring device and the water flow measuring device are arranged between the second water inlet and the pipelines.

3. The MPCVD diamond synthesis apparatus water supply protection system of claim 1 or 2, wherein: the water chiller is in communication connection with the control center.

4. The MPCVD diamond synthesis apparatus water supply protection system of claim 3, wherein: also comprises a power supply management system, the power supply management system is provided with an equipment main power supply management module, a microwave power supply management module and a water chiller power supply management module,

the equipment main power management module is electrically connected with the control center, the microwave power management module is also electrically connected with a microwave head of the MPCVD diamond synthesis equipment, and the water chiller power management module is electrically connected with a water chiller and the control center.

5. The MPCVD diamond synthesis apparatus water supply protection system of claim 4, wherein: and the cold water circulation loop is also provided with an adjusting valve, and the adjusting valve is electrically connected with the control center.

6. The MPCVD diamond synthesis apparatus water supply protection system of claim 5, wherein: the alarm device is any one of a buzzer, a three-color lamp and a light-emitting diode.

7. The water supply protection method for MPCVD diamond synthesis equipment of the system according to any of claims 1-6, characterized by comprising the steps of:

s1, starting a water chiller, MPCVD diamond synthesis equipment and a control system, wherein the water chiller and the MPCVD diamond synthesis equipment form a cold water circulation loop, the control system monitors whether the state of cooling water in the cold water circulation loop is normal, and if not, the step S2 is executed;

and S2, protecting the MPCVD diamond synthesis equipment through a control system.

8. The water supply protection method for MPCVD diamond synthesis equipment of claim 7, wherein said cooling water conditions include the water temperature, water pressure, and water flow rate of the cooling water.

9. The water supply protection method for MPCVD diamond synthesis apparatus according to claim 8, wherein in step S2,

if the control system monitors that the water temperature of the cooling water is abnormal, the control system sends a corresponding instruction to the water chiller through the control center to adjust the temperature, and if the water temperature cannot be adjusted to a normal working range through the water chiller, the control center correspondingly adjusts the power of the microwave head power supply and sends an alarm signal through the alarm device to remind;

if the control system monitors that the water pressure of the cooling water is abnormal, the control system sends a corresponding instruction to the water chiller through the control center to adjust the water pressure, and if the water pressure cannot be adjusted to a normal working range through the water chiller, the control center turns off the power supply of the microwave head, keeps the water chiller working and reminds through the alarm device;

if the control system monitors that the water flow of the cooling water is abnormal, the control system sends a corresponding instruction to the water chiller or the regulating valve through the control center to adjust the water flow, if the water flow cannot be adjusted to a normal working range, the control center closes the power supply of the microwave head, keeps the water chiller working, and simultaneously reminds through the alarm device.

10. The method for protecting water supply for MPCVD diamond synthesis equipment of claim 9, wherein said control system immediately shuts down the main power supply and the water chiller power supply for MPCVD diamond synthesis equipment if the monitored cooling water pressure drops above 70 Kpa.

Technical Field

The invention relates to the field of intelligent manufacturing, in particular to a water supply protection system for MPCVD diamond synthesis equipment.

Background

In the process of synthesizing the MPCVD diamond, cooling water is needed to cool or absorb reflected microwave power for a plurality of modules and components such as a microwave power supply, a microwave head, a reaction cavity, a water load, a substrate table and the like, so that the guarantee of safe supply of the cooling water is an important prerequisite for normal work of the MPCVD diamond synthesis equipment.

Because the intelligent degree of MPCVD diamond synthesis equipment is lower at present, can't implement monitoring and processing to the supply condition of cooling water, therefore there is great hidden danger in the safe handling of equipment, especially the safe handling of equipment under the unmanned on duty condition.

Disclosure of Invention

The invention provides a water supply protection system and a water supply protection method for MPCVD diamond synthesis equipment, aiming at overcoming the defects of the prior art, and realizing the monitoring of key technical parameters of a cold water circulation loop through a control system, carrying out grading treatment when the cold water circulation loop fails, and cutting off the power supply of a microwave power supply or even the power supply of the equipment in time when major failure occurs, thereby ensuring the safety of the equipment.

The invention relates to a water supply protection system for MPCVD diamond synthesis equipment, which comprises a water cooler, a pipeline, MPCVD diamond synthesis equipment, a control system and a cold water circulation loop, wherein the water cooler and the MPCVD diamond synthesis equipment form a cold water circulation loop through the pipeline,

the control system comprises a water temperature measuring device, a water pressure measuring device, a water flow measuring device, an alarm device and a control center, wherein the water temperature measuring device, the water pressure measuring device and the water flow measuring device are arranged on the cold water circulation loop, the control center is provided with an input end and an output end, the input end is electrically connected with the water temperature measuring device, the water pressure measuring device and the water flow measuring device, and the output end is electrically connected with the alarm device.

Further specifically, a first water inlet and a first water outlet are arranged on the water chiller, a second water inlet and a second water outlet are arranged on the MPCVD diamond synthesis device, the first water inlet and the first water outlet are respectively communicated with the second water outlet and the second water inlet through pipelines, and the water temperature measuring device, the water pressure measuring device and the water flow measuring device are arranged between the second water inlet and the pipelines.

Further, the water chiller is in communication connection with a control center.

Specifically, the communication mode of the water chiller and the control center is serial communication or USB communication.

Further comprises a power supply management system, wherein the power supply management system is provided with an equipment main power supply management module, a microwave power supply management module and a water chiller power supply management module,

the equipment main power management module is electrically connected with the control center, the microwave power management module is also electrically connected with a microwave head of the MPCVD diamond synthesis equipment, and the water chiller power management module is electrically connected with a water chiller and the control center.

Furthermore, the equipment main power management module, the microwave power management module and the water chiller power management module are relays or silicon-controlled relays.

Furthermore, the cold water circulation loop is also provided with an adjusting valve, and the adjusting valve is electrically connected with the control center.

Further preferably, the regulating valve is arranged between the first water outlet and the pipeline.

Further, the alarm device is any one of a buzzer, a three-color lamp and a light emitting diode.

Further preferably, the alarm device is a three-color lamp.

Further, the control center comprises a control computer and a signal receiving and processing module.

According to the protection method adopted by the control system, the method comprises the following steps:

s1, starting a water chiller, MPCVD diamond synthesis equipment and a control system, wherein the water chiller and the MPCVD diamond synthesis equipment form a cold water circulation loop, the control system monitors whether the state of cooling water in the cold water circulation loop is normal, and if not, the step S2 is executed;

and S2, protecting the MPCVD diamond synthesis equipment through a control system.

Further, the cooling water state includes a water temperature, a water pressure, and a water flow rate of the cooling water.

Still more specifically, in step S2,

if the control system monitors that the water temperature of the cooling water is abnormal, the control system sends a corresponding instruction to the water chiller through the control center to adjust the temperature, and if the water temperature cannot be adjusted to a normal working range through the water chiller, the control center correspondingly adjusts the power of the microwave head power supply and sends an alarm signal through the alarm device to remind;

if the control system monitors that the water pressure of the cooling water is abnormal, the control system sends a corresponding instruction to the water chiller through the control center to adjust the water pressure, and if the water pressure cannot be adjusted to a normal working range through the water chiller, the control center turns off the power supply of the microwave head, keeps the water chiller working and reminds through the alarm device;

if the control system monitors that the water flow of the cooling water is abnormal, the control system sends a corresponding instruction to the water chiller or the regulating valve through the control center to adjust the water flow, if the water flow cannot be adjusted to a normal working range, the control center closes the power supply of the microwave head, keeps the water chiller working, and simultaneously reminds through the alarm device.

Furthermore, if the control system monitors that the pressure of the cooling water drops to more than 70Kpa, the control system immediately turns off the main power supply of the MPCVD diamond synthesis equipment and the power supply of the water chiller.

Specifically, the control center monitors the outlet water temperature of the water chiller to be 20-28 ℃.

Specifically, the control center monitors the outlet water pressure of the water chiller to be 252.5-383.8 KPa.

Specifically, the control center monitors the water outlet flow of the water chiller to be 40-60L/min.

The water supply protection system and the method for the MPCVD diamond synthesis equipment have the following characteristics:

1. in the working process of the MPCVD diamond synthesis equipment, various abnormal conditions of the cooling water can be found in time by monitoring various main technical parameters of the cooling water of the MPCVD synthesis equipment in real time, and the cooling water is adjusted according to the abnormal conditions to ensure that the equipment works in the best state;

2. when the control center can not correct the abnormal state of the cooling water through the water cooler and the regulating valve, the microwave power supply management module is used for closing the microwave head power supply, so that the safety of a magnetron of a core device of the MPCVD diamond synthesis equipment is protected, and the situation that the microwave power supply alarms to directly close the power output of the microwave head, damage is caused to the magnetron and the service life of the magnetron is influenced is prevented;

3. in an emergency state, the control center can directly cut off the main power supply of the MPCVD diamond synthesis equipment and the water chiller through the equipment main power supply management module, so that cooling water is prevented from entering the equipment to cause short circuit when equipment components are electrified, and the safety of the equipment and operators is ensured.

Drawings

Fig. 1 is a schematic view of a connection relationship of a control system in embodiment 2;

fig. 2 is a schematic view showing the connection relationship between the control system and the water chiller and the MPCVD diamond synthesis apparatus in example 2.

Wherein, 1-control system; 2-water temperature measuring device; 3-a water pressure measuring device; 4-water flow measuring means; 5-an alarm device; 6-a water chiller; 7-a pipeline; 8-MPCVD diamond synthesis equipment; 9-a first water inlet; 10-a first water outlet; 11-a second water inlet; 12-a second water outlet; 13-a regulating valve; 14-control center.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.