阅读说明：本技术 切削装置、切削刀具的更换方法以及板的更换方法 (Cutting device, method for replacing cutting tool, and method for replacing plate ) 是由 寺田一贵 山口佳隆 于 2021-04-09 设计创作，主要内容包括：提供切削装置、切削刀具的更换方法以及板的更换方法,该切削装置具有小型化的更换装置。切削装置具有供切削刀具安装的安装凸缘和将安装于安装凸缘的切削刀具更换为更换用的切削刀具的更换装置,更换装置具有：旋转部；第1保持部,其利用正面侧对安装于安装凸缘的切削刀具进行保持；第2保持部,其利用正面侧对更换用的切削刀具进行保持；螺母旋转部,其具有对用于将切削刀具固定于安装凸缘的螺母进行保持的螺母保持部,使螺母保持部所保持的螺母进行旋转,旋转部与第1保持部、第2保持部以及螺母旋转部连结,第1保持部的正面、第2保持部的正面以及螺母保持部以绕旋转部的旋转轴线相互分离的状态配置为朝向与旋转部的旋转轴线相反的一侧。(Provided are a cutting device, a method for replacing a cutting tool, and a method for replacing a plate, wherein the cutting device has a miniaturized replacing device. The cutting device is provided with a mounting flange for mounting a cutting tool and a replacing device for replacing the cutting tool mounted on the mounting flange with a replacing cutting tool, and the replacing device is provided with: a rotating part; a 1 st holding part for holding the cutting tool attached to the mounting flange by the front surface side; a 2 nd holding part for holding the cutting tool for replacement by the front surface side; and a nut rotating portion having a nut holding portion for holding a nut for fixing the cutting tool to the mounting flange, wherein the nut held by the nut holding portion is rotated, the rotating portion is coupled to the 1 st holding portion, the 2 nd holding portion, and the nut rotating portion, and a front surface of the 1 st holding portion, a front surface of the 2 nd holding portion, and the nut holding portion are disposed so as to face a side opposite to a rotation axis of the rotating portion while being spaced apart from each other around the rotation axis of the rotating portion.)

1. A cutting device for cutting a workpiece with a cutting tool, characterized in that,

the cutting device comprises:

a cutting unit having a spindle and a mounting flange fixed to a front end portion of the spindle and to which the cutting tool is mounted;

a storage unit for storing the cutting tool for replacement;

a replacing device for replacing the cutting tool attached to the mounting flange with a replacement cutting tool; and

a moving unit that moves the replacing device,

the replacement device has:

a rotating part;

a 1 st holding portion for holding the cutting tool attached to the mounting flange by a front surface side;

a 2 nd holding part for holding the cutting tool for replacement by a front surface side; and

a nut rotating portion that has a nut holding portion that holds a nut for fixing the cutting tool to the mounting flange, and that rotates the nut held by the nut holding portion,

the rotating part is connected with the 1 st holding part, the 2 nd holding part and the nut rotating part and rotates by taking a straight line passing through the inside of the rotating part as a rotating axis,

the front surface of the 1 st holding portion, the front surface of the 2 nd holding portion, and the nut holding portion are disposed to face the opposite side of the rotation axis of the rotation portion in a state of being separated from each other around the rotation axis of the rotation portion.

2. The cutting device of claim 1,

the 1 st holding portion and the 2 nd holding portion are coupled to the rotating portion via an elastic body so that the front surface of the 1 st holding portion and the front surface of the 2 nd holding portion can tilt.

3. The cutting device according to claim 1 or 2,

the nut rotating portion is provided such that a rotation axis of the nut holding portion is along a direction perpendicular to the rotation axis of the rotating portion.

4. The cutting device according to any one of claims 1 to 3,

the cutting device also has a processing chamber which forms a space for cutting the processed object by the cutting unit,

the replacing device is arranged outside the processing chamber,

the processing chamber has an access opening through which the exchange device can pass.

5. The cutting device according to any one of claims 1 to 4,

the storage unit has:

a mounting part having a mounting surface on which the plurality of cutting tools are mounted; and

a reading unit that reads an identification mark that is attached to the cutting tool mounted on the mounting surface and that contains information relating to the cutting tool.

6. The cutting device according to any one of claims 1 to 5,

the cutting device further has:

a chuck table for holding the workpiece; and

a sub-table that holds a board used in dressing or inspection of the cutting tool,

the storage unit has a plate storage part for storing the plate,

the 1 st holding portion and the 2 nd holding portion can hold the plate.

7. The cutting device according to any one of claims 1 to 6,

the 1 st holding portion and the 2 nd holding portion attract the cutting tool and hold the cutting tool.

8. The cutting device of claim 7,

the mounting flange has:

a fixed mount fixed to a distal end portion of the spindle, the fixed mount having a flange portion that supports the cutting tool and a boss portion that protrudes from the flange portion and is inserted into the cutting tool; and

a pressing flange having an opening into which the boss portion is inserted, and fixed to the fixed mount by the nut,

the pressing flange has:

the 1 st surface;

a 2 nd surface located on the opposite side of the 1 st surface and contacting the cutting insert; and

a through hole passing from the 1 st surface to the 2 nd surface,

the 1 st holding portion and the 2 nd holding portion attract the 1 st surface side of the pressing flange to hold the pressing flange, and attract the cutting tool through the through hole to hold the cutting tool.

9. The cutting device of claim 8,

the storage unit has a pressing flange storage portion for storing the pressing flange.

10. A method of replacing a cutting tool mounted on the cutting apparatus according to claim 1,

the method for replacing a cutting tool comprises the following steps:

a preparation step of placing the cutting tool for replacement on a placement surface of the stock unit having a placement surface on which the cutting tool can be placed;

a replacement cutting tool holding step of holding the replacement cutting tool placed on the placement surface by the 2 nd holding portion;

a nut removal step of causing the nut holding portion of the nut rotating portion to face the attachment flange, holding the nut attached to the attachment flange by the nut holding portion, and rotating the nut to remove the nut from the attachment flange;

a 1 st retreat step of separating the nut rotating portion from the mounting flange;

a used cutting tool holding step of rotating the rotating portion to cause the 1 st holding portion to face the mounting flange, and holding the cutting tool mounted to the mounting flange by the 1 st holding portion;

a 2 nd retreat step of separating the 1 st holding part from the mounting flange;

a cutting tool mounting step of mounting the cutting tool for replacement held by the 2 nd holding portion to the mounting flange by rotating the rotating portion so that the 2 nd holding portion faces the mounting flange;

a 3 rd retreat step of separating the 2 nd holding part from the mounting flange; and

and a nut mounting step of mounting the nut to the mounting flange by rotating the rotating portion so that the nut holding portion of the nut rotating portion faces the mounting flange and rotating the nut held by the nut holding portion.

11. A method of replacing a plate disposed in the cutting apparatus according to claim 6,

the plate replacement method comprises the following steps:

a preparation step of placing the board for replacement on a placement surface of the storage unit having a placement surface on which the board can be placed;

a replacement plate holding step of holding the replacement plate placed on the placement surface by the 2 nd holding portion;

a used plate holding step of holding the used plate held by the sub-table by the 1 st holding part while the 1 st holding part is opposed to the sub-table;

a retreat step of separating the 1 st holding part from the sub-table; and

a mounting step of rotating the rotating portion to make the 2 nd holding portion face the sub-table, and mounting the replacement plate held by the 2 nd holding portion on the sub-table.

Technical Field

The present invention relates to a cutting apparatus for cutting a workpiece with a cutting tool, a method of replacing the cutting tool attached to the cutting apparatus, and a method of replacing a plate used for trimming or inspecting the cutting tool attached to the cutting apparatus.

Background

A wafer on which a plurality of devices such as ICs (Integrated circuits) and LSIs (Large Scale Integrated circuits) are formed is divided, thereby manufacturing a plurality of device chips each having a device. After a plurality of device chips are mounted on a predetermined substrate, the mounted device chips are covered with a sealing material (mold resin) made of a resin, thereby obtaining a package substrate. By dividing the package substrate, a packaged device having a plurality of packaged device chips is manufactured. A device chip or a packaged device is mounted on various electronic apparatuses such as a mobile phone and a personal computer.

A cutting device is used to divide the workpiece such as the wafer or the package substrate. The cutting device comprises: a chuck table for holding a workpiece; and a cutting unit that performs cutting processing on the workpiece. The cutting unit includes a spindle and a mounting flange fixed to a tip end portion of the spindle, and an annular cutting tool for cutting a workpiece is mounted on the mounting flange.

The cutting tool is secured to the mounting flange by a nut. When the spindle is rotated with the cutting tool attached to the attachment flange, the cutting tool is rotated. The workpiece held by the chuck table is cut and divided by cutting the rotating cutting tool into the workpiece.

Since the cutting tool is worn by machining the workpiece, the cutting tool needs to be replaced periodically. When the cutting tool is replaced, first, the nut for fixing the cutting tool is loosened and removed, and the used cutting tool is removed from the mounting flange. Then, a replacement cutting tool (unused cutting tool) is attached to the mounting flange, and the replacement cutting tool is fixed by a nut.

When the cutting tool is replaced by manual work, not only is it time consuming, but also the cutting tool and the nut may be dropped by mistake during the work. Therefore, attempts have been made to automatically replace the cutting tool. Patent document 1 discloses a cutting apparatus equipped with an exchange device for automatically exchanging a cutting tool attached to a cutting unit (spindle unit).

The replacement device includes: a cutting tool mounting and dismounting mechanism for mounting and dismounting the cutting tool; and a nut attaching and detaching mechanism for attaching and detaching a nut for fixing the cutting tool to the cutting unit. Further, the cutting tool attachment/detachment mechanism includes: a 1 st holding portion (1 st cutting tool holding member) for holding a used cutting tool; and a 2 nd holding portion (a 2 nd cutting tool holding member) for holding a cutting tool for replacement.

Patent document 1: japanese patent laid-open publication No. 2007-98536

In the above-described replacement device, the cutting tool attachment/detachment mechanism and the nut attachment/detachment mechanism are provided in a mutually independent state. The 1 st holding part and the 2 nd holding part of the cutting tool attachment/detachment mechanism and the nut attachment/detachment mechanism are arranged in a straight line so as to face the tool holder of the cutting unit. Therefore, the replacement device is likely to become large in size, and it is necessary to secure a wide space for mounting the replacement device in the cutting device. As a result, the size of the cutting apparatus increases, or the layout of the components of the cutting apparatus is limited.

The replacement device may be mounted on a so-called face-to-face biaxial type cutting device which includes a pair of cutting units and in which a pair of cutting blades are disposed so as to face each other. In this case, the replacing device is provided with a pair of cutting tool attachment/detachment mechanisms and a pair of nut attachment/detachment mechanisms so that the cutting tools can be replaced for the pair of cutting units, respectively. As a result, the replacement device becomes larger, and the size of the cutting device and the layout are more restricted.

Disclosure of Invention

The present invention has been made in view of the above problems, and an object thereof is to provide a cutting apparatus having a miniaturized exchanging apparatus and an exchanging method for exchanging a cutting tool or the like using the exchanging apparatus.

According to one aspect of the present invention, there is provided a cutting apparatus for cutting a workpiece with a cutting tool, the cutting apparatus including: a cutting unit having a spindle and a mounting flange fixed to a front end portion of the spindle and to which the cutting tool is mounted; a storage unit for storing the cutting tool for replacement; a replacing device for replacing the cutting tool attached to the mounting flange with a replacement cutting tool; and a moving unit that moves the replacing device, the replacing device including: a rotating part; a 1 st holding portion for holding the cutting tool attached to the mounting flange by a front surface side; a 2 nd holding part for holding the cutting tool for replacement by a front surface side; and a nut rotating portion that has a nut holding portion that holds a nut for fixing the cutting tool to the mounting flange, and that rotates the nut held by the nut holding portion, the rotating portion being coupled to the 1 st holding portion, the 2 nd holding portion, and the nut rotating portion and rotating with a straight line passing through an inside of the rotating portion as a rotation axis, a front surface of the 1 st holding portion, a front surface of the 2 nd holding portion, and the nut holding portion being arranged apart from each other around the rotation axis of the rotating portion so as to face a side opposite to the rotation axis of the rotating portion.

Preferably, the 1 st holding portion and the 2 nd holding portion are coupled to the rotating portion via an elastic body so that the front surface of the 1 st holding portion and the front surface of the 2 nd holding portion can tilt.

Further, it is preferable that the nut rotating portion is provided such that the rotation axis of the nut holding portion is along a direction perpendicular to the rotation axis of the rotating portion.

Preferably, the cutting device further includes a processing chamber forming a space for cutting the workpiece by the cutting unit, the replacing device is provided outside the processing chamber, and the processing chamber has an entrance through which the replacing device can pass.

Further, it is preferable that the storage unit has: a mounting part having a mounting surface on which the plurality of cutting tools are mounted; and a reading unit that reads an identification mark that is attached to the cutting tool mounted on the mounting surface and that contains information relating to the cutting tool.

Preferably, the cutting device further includes: a chuck table for holding the workpiece; and a sub-table for holding a plate used for dressing or inspection of the cutting tool, wherein the stock unit has a plate storage portion for storing the plate, and the 1 st holding portion and the 2 nd holding portion can hold the plate.

In addition, it is preferable that the 1 st holding portion and the 2 nd holding portion attract the cutting tool and hold the cutting tool.

Further, it is preferable that the mounting flange has: a fixed mount fixed to a distal end portion of the spindle, the fixed mount having a flange portion that supports the cutting tool and a boss portion that protrudes from the flange portion and is inserted into the cutting tool; and a pressing flange having an opening into which the boss portion is inserted, and fixed to the fixed mount by the nut, the pressing flange having: the 1 st surface; a 2 nd surface located on the opposite side of the 1 st surface and contacting the cutting insert; and a through hole that penetrates from the 1 st surface to the 2 nd surface, the 1 st holding portion and the 2 nd holding portion sucking the 1 st surface side of the pressing flange to hold the pressing flange, and sucking the cutting tool through the through hole to hold the cutting tool.

Preferably, the storage unit includes a pressing flange storage portion for storing the pressing flange.

Further, according to another aspect of the present invention, there is provided a method of replacing a cutting tool attached to the cutting apparatus, the method comprising: a preparation step of placing the cutting tool for replacement on a placement surface of the stock unit having a placement surface on which the cutting tool can be placed; a replacement cutting tool holding step of holding the replacement cutting tool placed on the placement surface by the 2 nd holding portion; a nut removal step of causing the nut holding portion of the nut rotating portion to face the attachment flange, holding the nut attached to the attachment flange by the nut holding portion, and rotating the nut to remove the nut from the attachment flange; a 1 st retreat step of separating the nut rotating portion from the mounting flange; a used cutting tool holding step of rotating the rotating portion to cause the 1 st holding portion to face the mounting flange, and holding the cutting tool mounted to the mounting flange by the 1 st holding portion; a 2 nd retreat step of separating the 1 st holding part from the mounting flange; a cutting tool mounting step of mounting the cutting tool for replacement held by the 2 nd holding portion to the mounting flange by rotating the rotating portion so that the 2 nd holding portion faces the mounting flange; a 3 rd retreat step of separating the 2 nd holding part from the mounting flange; and a nut mounting step of mounting the nut to the mounting flange by rotating the rotating portion so that the nut holding portion of the nut rotating portion faces the mounting flange and rotating the nut held by the nut holding portion.

Further, according to another aspect of the present invention, there is provided a plate replacement method for replacing a plate disposed in the cutting apparatus, the plate replacement method including the steps of: a preparation step of placing the board for replacement on a placement surface of the storage unit having a placement surface on which the board can be placed; a replacement plate holding step of holding the replacement plate placed on the placement surface by the 2 nd holding portion; a used plate holding step of holding the used plate held by the sub-table by the 1 st holding part while the 1 st holding part is opposed to the sub-table; a retreat step of separating the 1 st holding part from the sub-table; and a mounting step of rotating the rotating part to make the 2 nd holding part face the sub-table, and mounting the plate for replacement held by the 2 nd holding part on the sub-table.

A cutting apparatus according to one aspect of the present invention includes a replacing device that replaces a cutting tool attached to the cutting apparatus and a plate used for dressing or inspection of the cutting tool. The replacement device has the following structure: a1 st holding portion and a 2 nd holding portion for holding a cutting tool or the like and a nut rotating portion are coupled to a common rotating portion, and a front surface of the 1 st holding portion, a front surface of the 2 nd holding portion, and the nut holding portion are disposed so as to face a side opposite to a rotation axis of the rotating portion in a state of being separated from each other around the rotation axis of the rotating portion.

When the replacing device is used, the replacing device can be greatly miniaturized compared with the conventional case that the 1 st holding part, the 2 nd holding part and the nut rotating part are respectively and independently arranged, and the front surface of the 1 st holding part, the front surface of the 2 nd holding part and the nut holding part are arranged and arranged in a way of facing the mounting flange. As a result, the increase in size of the cutting apparatus is suppressed, and the degree of freedom in layout of the components of the cutting apparatus is improved.

Drawings

Fig. 1 is a perspective view showing a cutting device.

Fig. 2 is an exploded perspective view showing a cutting unit to which a hub-type cutting tool is attached.

Fig. 3 is an exploded perspective view showing a cutting unit to which a washer-type cutting tool is attached.

Fig. 4 is a perspective view showing the replacement unit.

Fig. 5 is a perspective view showing the replacement unit in which the replacement device is disposed at the replacement position.

Fig. 6 is a perspective view showing the exchanging device.

Fig. 7 (a) is a side view showing the exchanging device, and fig. 7 (B) is a front view showing the exchanging device.

Fig. 8 (a) is a front view showing the holding portion, and fig. 8 (B) is a cross-sectional view showing the holding portion.

Fig. 9 (a) is a cross-sectional view showing a holding portion that holds a hub-type cutting tool, and fig. 9 (B) is a cross-sectional view showing a holding portion that holds a washer-type cutting tool.

Fig. 10 (a) is a perspective view showing the storage unit, and fig. 10 (B) is a perspective view showing the tool storage portion.

Fig. 11 (a) is a schematic diagram showing the replacing device in the replacing cutting tool holding step, fig. 11 (B) is a schematic diagram showing the replacing device in the nut removing step, fig. 11 (C) is a schematic diagram showing the replacing device in the 1 st retracting step, and fig. 11 (D) is a schematic diagram showing the replacing device in the used cutting tool holding step.

Fig. 12 (a) is a schematic diagram showing the replacing device in the 2 nd evacuation step, fig. 12 (B) is a schematic diagram showing the replacing device in the cutting tool mounting step, fig. 12 (C) is a schematic diagram showing the replacing device in the 3 rd evacuation step, and fig. 12 (D) is a schematic diagram showing the replacing device in the nut mounting step.

Fig. 13 (a) is a perspective view showing a holding portion that holds a rectangular plate, and fig. 13 (B) is a perspective view showing a holding portion that holds a rectangular plate.

Fig. 14 (a) is a schematic view showing the replacing device in the replacing plate holding step, fig. 14 (B) is a schematic view showing the replacing device in the used plate holding step, fig. 14 (C) is a schematic view showing the replacing device in the retracting step, and fig. 14 (D) is a schematic view showing the replacing device in the placing step.

Fig. 15 is a perspective view showing a cutting device provided with a reservoir unit.

Fig. 16 is a perspective view showing a magazine unit having a rotary placement unit.

Description of the reference symbols

11: a workpiece; 13: a belt (dicing belt); 15: a frame; 17: a frame unit (workpiece unit); 19. 19A, 19B: a plate (finishing plate); 21: a plate (inspection plate); 2: a cutting device; 4: a base station; 4a, 4 b: an opening; 6: an elevator; 6 a: a lifting platform; 8: a container; 10: a cartridge; 10 a: a guide rail; 12: a cleaning unit; 14: rotating the working table; 16: a guide rail; 18: a table cover; 20: a dustproof drip-proof cover; 22: a chuck table (holding table); 24: a clamp; 26: a sub-table (holding table); 28: a processing chamber (cover); 28 a: an entrance (opening); 30: a cutting unit; 32: a housing; 34: a main shaft; 34 a: a threaded hole; 36: a cutting tool; 36 a: an opening; 38: a base station; 38 a: front side (1 st side); 38 b: a back surface (2 nd surface); 40: a cutting edge; 42: a mounting flange; 42 a: a through hole; 44: a flange portion; 44 a: a front side; 44 b: a convex portion; 44 c: a bearing surface; 46: a boss portion (support shaft); 46 a: a threaded portion; 48: a nut; 48 a: an opening; 48 b: a through hole; 50: a screw; 52: a cutting tool; 52 a: an opening; 54: a mounting flange; 56: fixing the mounting seat; 56 a: a through hole; 56 b: a receiving part; 58: a flange portion; 58 a: a front side; 58 b: a convex portion; 58 c: a bearing surface; 60: a boss portion (support shaft); 60 a: a 1 st boss portion (1 st support shaft); 60 b: a 2 nd boss portion (a 2 nd support shaft); 60 c: a 3 rd boss portion (3 rd support shaft); 60 d: a threaded portion; 62: pressing the flange; 62 a: front side (1 st side); 62 b: a back surface (2 nd surface); 62c, the ratio of: an opening; 62 d: a through hole; 64: a nut; 64 a: an opening; 64 b: a through hole; 66: a gasket; 68: a screw; 70: a shooting unit; 72: a 1 st conveying unit; 72 a: a holding unit; 72 b: a holding mechanism; 74: a 2 nd conveying unit; 74 a: a holding unit; 76: a replacement unit; 78: a cover; 80: a hinge; 82: a control unit (control unit); 82 a: a processing unit; 82 b: a storage unit; 84: a moving unit (moving mechanism); 86: a lifting mechanism; 88: a substrate; 90: a multi-jointed arm; 92A: a 1 st support member; 92B: a 2 nd support; 94A: a 1 st rotating mechanism; 94B: a 2 nd rotating mechanism; 94C: a 3 rd rotating mechanism; 96A: a 1 st arm; 96B: a 2 nd arm; 100: a replacement device (replacement mechanism); 102: a loading and unloading unit; 104: a rotation mechanism; 106: a rotating portion (shaft); 106 a: a rotation axis; 110: a frame body; 112a, 112 b: a support member; 114a, 114 b: a connecting member; 120: a nut rotating part (nut attaching and detaching unit); 122: a nut holding portion; 124: a rotating portion (shaft); 124 a: a rotation axis; 126: a housing; 128: a rotary drive source; 130: a rotating member; 130 a: a front side; 132: a retaining pin; 134: a holding member; 134 a: a claw portion; 136: a cover; 136 a: an opening; 136 b: the 1 st pin receiving part; 136 c: a 2 nd pin receiving part; 138: a pin; 140: an annular member; 142a, 142 b: an elastic body (elastic member); 150A: a holding portion (1 st holding portion); 150B: a holding portion (2 nd holding portion); 150 a: a front side; 152: a frame body; 152 a: front side (1 st side); 152 b: a back surface (2 nd surface); 152 c: the 1 st groove (1 st recess); 152 d: 2 nd groove (2 nd recess); 152 e: the 3 rd groove (3 rd recess); 152 f: the 4 th groove (4 th recess); 152 g: the 5 th groove (5 th recess); 154: an elastic member; 154 a: a base; 154 b: a lip portion; 154 c: a through hole; 156: a flow path; 158: a valve; 160: an attraction source; 162: a pressure gauge (pressure sensor); 200: a storage unit; 202: a mounting section (mounting table); 202 a: a carrying surface; 204. 204A, 204B: a cutter storage part; 206: pressing the flange storage: 208: a plate storage part (a trimming plate storage part); 210: a plate storage part (an inspection plate storage part); 212: identifying the mark; 250: a storage unit; 252: a placement part; 252 a: a carrying surface; 254: a cutter storage part; 256: pressing the flange pipe retaining part; 258: a rotating portion (shaft); 260: and reading the unit.

Detailed Description

Hereinafter, an embodiment of one embodiment of the present invention will be described with reference to the drawings. First, a configuration example of the cutting apparatus of the present embodiment will be described. Fig. 1 is a perspective view showing a cutting device 2. In fig. 1, the X-axis direction (the machining feed direction, the 1 st horizontal direction, the front-rear direction) and the Y-axis direction (the indexing feed direction, the 2 nd horizontal direction, the left-right direction) are perpendicular to each other. The Z-axis direction (vertical direction, and height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

The cutting device 2 includes a base 4, and the base 4 supports or houses each component constituting the cutting device 2. An elevator 6 having an elevator base 6a is provided at a front corner of the base 4. The lifter 6 has a lifting mechanism (not shown) and lifts the lifting table 6a in the Z-axis direction.

A container 8 and a cassette 10 are placed on a lifting table 6a of the lifter 6, the container 8 accommodating various tools (components, consumables, etc.) used in the cutting device 2, and the cassette 10 accommodating a plurality of workpieces 11 to be cut by the cutting device 2. Fig. 1 shows an example in which a container 8 is placed on an elevating table 6a and a cassette 10 is placed on the container 8. The details of the tool stored in the container 8 will be described later.

The cartridge 10 has a pair of side surfaces opposed to each other. A plurality of guide rails 10a arranged at predetermined intervals along the height direction of the cassette 10 are fixed to each side surface of the cassette 10. A frame unit (workpiece unit) 17 including the workpiece 11 is supported by a pair of rails 10a fixed to both side surfaces of the cassette 10 and located at the same height position.

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The object 11 is divided into a plurality of regions by a plurality of lines to divide (streets) arranged in a grid pattern, and devices such as ICs and LSIs are formed on the front surface (upper surface) side of the regions. The workpiece 11 is cut along the lines to be divided, and divided, thereby manufacturing a plurality of device chips each having a device.

However, the material, shape, structure, size, and the like of the workpiece 11 are not limited. For example, the workpiece 11 may be a wafer made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, or the like), glass, ceramic, resin, metal, or the like. The type, number, shape, structure, size, arrangement, and the like of the devices formed on the workpiece 11 are not limited, and no device may be formed on the workpiece 11. The workpiece 11 may be a Package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate.

A circular tape (dicing tape) 13 having a larger diameter than the workpiece 11 is attached to the back surface (lower surface) side of the workpiece 11. As the belt 13, a sheet or the like having a film-shaped substrate formed in a circular shape and an adhesive layer (paste layer) provided on the substrate can be used. For example, the base material is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer is made of an epoxy-based, acrylic, or rubber-based adhesive. In addition, an ultraviolet-curable resin that is cured by irradiation of ultraviolet rays may be used as the adhesive layer.

The outer peripheral portion of the belt 13 is bonded to an annular frame 15 made of metal or the like and having a circular opening at the central portion. The opening of the frame 15 has a larger diameter than the workpiece 11, and the workpiece 11 is disposed inside the opening of the frame 15.

When the tape 13 is attached to the workpiece 11 and the frame 15, the workpiece 11 is supported by the frame 15 via the tape 13. This forms a frame unit 17 including the workpiece 11, the belt 13, and the frame 15. Also, one or more frame units 17 are housed in the cassette 10.

An opening 4a is provided in a region adjacent to the lifter 6 in the X-axis direction on the upper surface side of the base 4. A cleaning unit 12 for cleaning the workpiece 11 is disposed inside the opening 4 a. The cleaning unit 12 has: a rotary table 14 for holding the workpiece 11; and a nozzle (not shown) which is provided above the rotary table 14 and supplies a cleaning liquid such as pure water.

The rotary table 14 is connected to a rotary drive source (not shown) such as a motor, and the rotary drive source rotates the rotary table 14 about a rotation axis substantially parallel to the Z-axis direction. While the workpiece 11 is held by the rotary table 14, the workpiece 11 is cleaned by supplying a cleaning liquid from a nozzle to the workpiece 11 while rotating the rotary table 14. Further, as the cleaning liquid, a gas-liquid mixed fluid in which a liquid (pure water or the like) and air are mixed, or the like may be used.

A pair of guide rails 16 that hold a frame unit 17 is provided above the cleaning unit 12 along the X-axis direction. A moving mechanism (not shown) for moving the pair of guide rails 16 toward and away from each other in the Y-axis direction is connected to the pair of guide rails 16. By sandwiching the frame unit 17 with the pair of guide rails 16, the position of the frame unit 17 in the Y-axis direction is adjusted.

A rectangular opening 4b is provided on the upper surface side of the base 4 at a position adjacent to the guide rail 16 in the Y-axis direction. The opening 4b is formed with a longitudinal direction along the X-axis direction. A flat plate-shaped table cover 18 is provided inside the opening 4 b. Further, corrugated dust-proof drip-proof covers 20 that can expand and contract in the X-axis direction are provided on both sides of the table cover 18 in the X-axis direction.

The table cover 18 is provided with a chuck table (holding table) 22 for holding the workpiece 11 and the like. The upper surface of the chuck table 22 constitutes a flat holding surface for holding the workpiece 11 and the like. Further, a plurality of jigs 24 for holding and fixing the frame 15 and the like are provided around the chuck table 22.

The chuck table 22 has a cylindrical housing (not shown) made of metal such as stainless steel, for example. A circular recess is formed on the upper surface side of the central portion of the frame, and a disk-shaped porous member made of a porous material such as porous ceramic is fitted into the recess. The holding surface of the chuck table 22 is connected to a suction source (not shown) such as an injector via a porous member, a flow path (not shown) provided inside the chuck table 22, a valve (not shown), and the like.

For example, the frame unit 17 is disposed on the chuck table 22 so that the front side of the workpiece 11 is exposed upward and the back side (belt 13 side) of the workpiece 11 faces the holding surface of the chuck table 22. Further, the frame 15 is fixed by a plurality of clamps 24. In this state, when the negative pressure of the suction source is applied to the holding surface of the chuck table 22, the workpiece 11 is sucked and held by the chuck table 22 via the belt 13.

Further, a pair of sub tables (holding tables) 26 are provided on the table cover 18 adjacent to the chuck table 22. The pair of sub-tables 26 are disposed on the rear side of the chuck table 22 in a state of being separated from each other in the Y-axis direction.

The upper surface of the sub table 26 constitutes a flat holding surface for holding a plate-like member for installation, inspection, evaluation, and the like of cutting. For example, the holding surface of the sub-table 26 is formed in a rectangular shape, and is connected to a suction source (not shown) such as an injector via a flow path (not shown), a valve (not shown), and the like provided inside the sub-table 26. The sub-table 26 holds plates 19 and 21 (see fig. 10 a) and the like, which will be described later.

A moving means (not shown) and a rotation drive source (not shown) are provided below the table cover 18. The moving means is constituted by a ball screw type moving mechanism or the like, and moves the chuck table 22 and the sub-table 26 in the X-axis direction together with the table cover 18. The rotation drive source is constituted by a motor or the like, and rotates the chuck table 22 about a rotation axis substantially parallel to the Z-axis direction.

The front side of the opening 4b (the region adjacent to the opening 4a) corresponds to a conveyance region in which the workpiece 11 is carried in and out. The rear side of the opening 4b corresponds to a machining area in which the workpiece 11 is machined. The chuck table 22 and the sub-table 26 can be positioned in the transport area or the processing area by moving the chuck table 22 and the sub-table 26 in the X-axis direction by the moving means.

A processing chamber (cover) 28 forming a space for cutting the workpiece 11 is provided above the processing region. In fig. 1, the outline of the processing chamber 28 is indicated by a two-dot chain line. The processing chamber 28 is formed in a rectangular parallelepiped shape, for example, from metal, and is disposed so as to cover a processing area. Further, an entrance (opening) 28a through which an exchange device 100 (see fig. 6 and the like) described later can pass is provided on a side surface of the processing chamber 28 on the conveyance area side.

A pair of cutting units 30 for cutting the workpiece 11 is provided inside the processing chamber 28. The cutting unit 30 cuts the workpiece 11 by cutting the workpiece 11 with an annular cutting tool being rotated. For example, a hub-type cutting tool 36 (see fig. 2) is attached to the cutting unit 30.

Fig. 2 is an exploded perspective view showing the cutting unit 30 to which the hub-type cutting tool 36 is attached. The cutting unit 30 has a cylindrical housing 32, and a cylindrical main shaft 34 arranged along the Y-axis direction is housed in the housing 32.

A tip end portion (one end side) of the main shaft 34 is exposed to the outside of the housing 32, and a screw hole 34a is formed in the tip end portion of the main shaft 34. A rotation drive source such as a motor is connected to a base end portion (the other end side) of the spindle 34. An annular cutting tool 36 is attached to the tip of the spindle 34. The cutting tool 36 attached to the tip of the spindle 34 is rotated by power transmitted from the rotary drive source through the spindle 34.

The cutting insert 36 is formed by integrating an annular base 38 made of metal or the like and an annular cutting edge 40 formed along the outer peripheral edge of the base 38. A circular opening 36a that penetrates the cutting insert 36 (base 38) in the thickness direction is provided in the center of the cutting insert 36.

The base 38 has a front surface (first surface) 38a and a back surface (second surface) 38b that are substantially parallel to each other. The front surface 38a of the base 38 constitutes an annular holding surface that is held when the cutting tool 36 is attached and detached. The cutting edge 40 is formed on the outer peripheral portion of the base 38 on the rear surface 38b side. For example, the cutting edge 40 is formed of an electroformed grindstone in which abrasive grains made of diamond or the like are fixed by a bonding material such as a nickel plating layer.

A mounting flange 42 is fixed to a front end portion of the spindle 34, and the cutting tool 36 is mounted on the mounting flange 42. The mounting flange 42 has: a disk-shaped flange 44 for supporting the cutting tool 36; and a cylindrical boss portion (support shaft) 46 that protrudes from a central portion of the front surface 44a of the flange portion 44. The mounting flange 42 is provided with a through hole 42a penetrating through the center of the flange 44 and the center of the boss 46.

An annular projection 44b projecting from the front surface 44a is provided on the outer peripheral portion of the flange 44. The distal end surface of the projection 44b is formed substantially parallel to the front surface 44a, and forms an annular support surface 44c that supports the cutting insert 36.

A screw portion 46a is formed on the outer peripheral surface of the front end portion of the boss portion 46, and a ring-shaped nut 48 is fastened to the screw portion 46 a. A circular opening 48a penetrating the nut 48 in the thickness direction is formed in the center of the nut 48. The opening 48a is formed to have substantially the same diameter as the boss portion 46, and a screw groove corresponding to the screw portion 46a of the boss portion 46 is provided in the opening 48 a. Further, the nut 48 is formed with a plurality of through holes 48b that penetrate the nut 48 in the thickness direction at substantially equal intervals along the circumferential direction of the nut 48.

The mounting flange 42 is fixed to the distal end portion of the main shaft 34 by inserting the screws 50 into the screw holes 34a of the main shaft 34 through the through holes 42a of the mounting flange 42, and screwing and fastening the screws 50 into the screw holes 34 a. Then, when the boss portion 46 is inserted into the opening 36a of the cutting tool 36, the cutting tool 36 is mounted to the mounting flange 42. In this state, when the nut 48 is fastened to the threaded portion 46a of the boss portion 46, the cutting tool 36 is clamped and fixed to the mounting flange 42 by the support surface 44c of the flange portion 44 and the nut 48.

On the other hand, a ring-shaped cutting tool 52 (see fig. 3) may be attached to the cutting unit 30. Fig. 3 is an exploded perspective view showing the cutting unit 30 to which a washer-type cutting tool 52 is attached.

The cutting insert 52 is formed of an annular cutting edge in which abrasive grains are fixed by a bonding material such as a metal bond, a resin bond, or a ceramic bond. In addition, a circular opening 52a penetrating the cutting insert 52 in the thickness direction is provided in the center portion of the cutting insert 52.

A mounting flange 54 is attached to the front end of the spindle 34, and the cutting tool 52 is attached to the mounting flange 54. The mounting flange 54 has: a fixed mount 56 fixed to a front end portion of the main shaft 34; and a pressing flange 62 that presses the cutting tool 52 attached to the fixed mount 56.

The fixed mount 56 has: a disk-shaped flange portion 58 that supports the cutting tool 52; and a cylindrical boss portion (support shaft) 60 protruding from a central portion of the front surface 58a of the flange portion 58. The fixed mount 56 is provided with a through hole 56a penetrating through the center of the flange portion 58 and the center of the boss portion 60, and an annular receiving portion 56b supporting a washer 66 described later is provided inside the through hole 56 a.

An annular projection 58b projecting from the front surface 58a is provided on the outer peripheral portion of the flange portion 58. The distal end surface of the projection 58b is formed substantially parallel to the front surface 58a, and constitutes an annular support surface 58c that supports the cutting insert 52.

The boss portion 60 has: an annular 1 st boss portion (1 st support shaft) 60a protruding from the front face 58a of the flange portion 58; an annular 2 nd boss portion (2 nd support shaft) 60b projecting from a front end of the 1 st boss portion 60 a; and an annular 3 rd boss portion (3 rd support shaft) 60c protruding from the front end of the 2 nd boss portion 60 b. The diameter of the 2 nd boss portion 60b is smaller than that of the 1 st boss portion 60a, and the diameter of the 3 rd boss portion 60c is smaller than that of the 2 nd boss portion 60 b. Further, the 1 st boss portion 60a, the 2 nd boss portion 60b, and the 3 rd boss portion 60c are provided concentrically.

A pressing flange 62 is mounted on the fixed mount 56. The pressing flange 62 is an annular member made of metal or the like, and has a front surface (1 st surface) 62a and a back surface (2 nd surface) 62b that are substantially parallel to each other. The front surface 62a of the pressing flange 62 corresponds to an annular holding surface that is held when the pressing flange 62 is attached and detached. The back surface 62b of the pressing flange 62 corresponds to an annular support surface for supporting the cutting insert 36.

A circular opening 62c is provided in the center of the pressing flange 62 from the front surface 62a to the back surface 62b of the pressing flange 62. In addition, a plurality of through holes 62d penetrating the pressing flange 62 from the front surface 62a to the back surface 62b are formed at substantially equal intervals in the circumferential direction of the pressing flange 62 in a region between the outer peripheral edge of the pressing flange 62 and the opening 62 c.

A screw portion 60d is formed on the outer peripheral surface of the front end portion of the boss portion 60 of the fixed mount 56, and the screw portion 60d is fastened by a ring-shaped nut 64. A circular opening 64a penetrating the nut 64 in the thickness direction is formed in the center of the nut 64. The opening 64a is formed to have substantially the same diameter as the 3 rd boss portion 60c, and a screw groove corresponding to the screw portion 60d of the boss portion 60 is provided in the opening 64 a. Further, nut 64 is formed with a plurality of through holes 64b that penetrate nut 64 in the thickness direction at substantially equal intervals along the circumferential direction of nut 64.

The fixed mount 56 is mounted to the main shaft 34 by screws 68. Specifically, first, the washer 66 is disposed on the receiving portion 56b of the fixed mount 56. In this state, the screw 68 is inserted into the screw hole 34a of the spindle 34 through the washer 66 and the through hole 56a of the fixed mount 56, and the screw 68 is screwed into the screw hole 34a to be fastened. Thereby, the fixed mount 56 is fixed to the front end portion of the spindle 34.

When the boss portion 60 is inserted into the opening 52a of the cutting tool 52 and the opening 62c of the pressing flange 62 in this order, the cutting tool 52 and the pressing flange 62 are attached to the fixed mount 56. An annular projection (not shown) projecting from the back surface 62b is provided on the back surface 62b side of the pressing flange 62. The convex portion is formed such that the outer peripheral surface follows the contour of the opening 52a of the cutting tool 52, and the inner wall (inner peripheral surface) follows the contour of the outer peripheral surface of the 1 st boss portion 60 a.

The convex portion of the pressing flange 62 is fitted inside the opening 52a of the cutting insert 52. This aligns the pressing flange 62 with the cutting insert 52. The 1 st boss portion 60a is fitted into the inner side of the inner wall of the convex portion of the pressing flange 62, and the 2 nd boss portion 60b is fitted into the opening 62c of the pressing flange 62.

In this state, when the nut 64 is tightened on the threaded portion 60d formed on the 3 rd boss portion 60c, the cutting tool 36 and the pressing flange 62 are fixed to the fixed mount 56. Thus, the cutting tool 36 is clamped and fixed to the mounting flange 54 by the support surface 58c of the flange portion 58 and the back surface 62b of the pressing flange 62.

As described above, the cutting tool 36 or the cutting tool 52 is attached to the pair of cutting units 30 shown in fig. 1, respectively. In addition, the cutting tool 36 or the cutting tool 52 attached to the pair of cutting units 30 are disposed so as to face each other.

Imaging units 70 for imaging the workpiece 11 and the like held by the chuck table 22 are attached to the pair of cutting units 30, respectively. For example, the imaging unit 70 is configured by a visible light camera having an imaging element that receives visible light and converts the visible light into an electric signal, an infrared camera having an imaging element that receives infrared light and converts the infrared light into an electric signal, or the like. The workpiece 11 and the cutting unit 30 are aligned and the like based on the image obtained by the imaging unit 70.

Further, a 1 st conveyance unit 72 that conveys the workpiece 11 is provided above the base 4. The 1 st conveyance unit 72 is connected to a movement mechanism (not shown) that moves the 1 st conveyance unit 72 in the X-axis direction and the Y-axis direction. The 1 st conveyance unit 72 has an air cylinder, and the air cylinder has a rod that moves up and down in the Z-axis direction.

A holding unit 72a for holding the frame 15 of the frame unit 17 and the like is fixed to the lower end portion of the rod of the cylinder. For example, the holding unit 72a has a plurality of suction pads for sucking and holding the upper surface side of the frame 15 of the frame unit 17. A gripping mechanism 72b that grips an end of the frame unit 17 such as the frame 15 is provided at an end of the holding unit 72a on the lifter 6 side.

A 2 nd conveying unit 74 for conveying the workpiece 11 is provided above the holding unit 72a of the 1 st conveying unit 72. The 2 nd conveyance unit 74 is connected to a movement mechanism (not shown) that moves the 2 nd conveyance unit 74 in the Y-axis direction. The 2 nd conveyance unit 74 has a cylinder, and the cylinder has a rod that moves up and down in the Z-axis direction.

A holding unit 74a for holding the frame 15 of the frame unit 17 and the like is fixed to the lower end portion of the rod of the air cylinder. The holding unit 74a has the same configuration as the holding unit 72a of the 1 st conveyance unit 72.

Further, a replacement unit 76 is provided on a side of the chuck table 22, and the replacement unit 76 replaces the cutting tools 36, 52, etc. attached to the cutting unit 30. The configuration of the replacement unit 76 will be described in detail later.

A plate-like cover 78 is provided on the edge of the base 4 on the replacement unit 76 side. One end of the lid 78 is connected to the base 4 via a hinge 80, and the lid 78 is rotatable about the hinge 80.

When the workpiece 11 is machined by the cutting unit 30, the lid 78 is in a state of standing up in the Z-axis direction (open state) as shown by a solid line in fig. 1. On the other hand, when the cutting tools 36, 52, etc. are replaced by the replacement unit 76, the cover 78 is in a state of lying along the X-axis direction and the Y-axis direction (closed state) as shown by the two-dot chain line in fig. 1.

The respective components (the lifter 6, the cleaning unit 12, the guide rail 16, the chuck table 22, the jig 24, the sub-table 26, the cutting unit 30, the imaging unit 70, the 1 st conveyance unit 72, the 2 nd conveyance unit 74, the replacement unit 76, and the like) constituting the cutting apparatus 2 are connected to a control unit (control section) 82, respectively. The control unit 82 generates a control signal for controlling the operation of each component of the cutting apparatus 2, and controls the operation of the cutting apparatus 2.

For example, the control unit 82 is constituted by a computer including: a processing unit 82a that performs various processes (calculations and the like) necessary for the operation of the cutting apparatus 2; and a storage unit 82b that stores various information (data, programs, etc.) used for the processing of the processing unit 82 a. The Processing Unit 82a includes a processor such as a CPU (Central Processing Unit). The storage unit 82b is configured to include various memories constituting a main storage device, an auxiliary storage device, and the like.

The cutting of the workpiece 11 is performed by the cutting device 2. When processing the workpiece 11, first, the frame unit 17 including the workpiece 11 to be processed is stored in the cassette 10. Then, the cartridge 10 is placed on the elevating table 6a of the elevator 6.

The frame unit 17 stored in the cassette 10 is carried out of the cassette 10 by the 1 st conveyance unit 72. Specifically, the 1 st conveyance unit 72 moves in the X-axis direction so as to be separated from the cassette 10 in a state where the end of the frame 15 is gripped by the gripping mechanism 72 b. Thereby, the frame unit 17 is pulled out from the cassette 10 and is disposed on the pair of guide rails 16. Then, the frame unit 17 is sandwiched by the pair of guide rails 16, and the frame unit 17 is aligned.

Next, the 1 st conveying unit 72 holds the upper surface side of the frame 15 by the holding unit 72a, and conveys the frame unit 17 onto the chuck table 22 disposed in the conveying area. The chuck table 22 moves from the conveyance area to the processing area while sucking and holding the back surface side (belt 13 side) of the workpiece 11. Thereby, the workpiece 11 is disposed inside the processing chamber 28.

Then, after the workpiece 11 and the cutting means 30 are aligned with each other based on the image obtained by imaging the workpiece 11 by the imaging means 70, the workpiece 11 is cut by the cutting means 30. For example, the object 11 is cut along the lines to be divided, and is divided into a plurality of device chips.

When the cutting process is completed, the chuck table 22 moves to the conveyance area. Then, the 2 nd transfer unit 74 holds the upper surface side of the frame 15 by the holding unit 74a, and transfers the frame unit 17 from the chuck table 22 to the cleaning unit 12. Then, the workpiece 11 is cleaned by the cleaning unit 12.

When the cleaning of the workpiece 11 is completed, the 1 st conveyance unit 72 holds the frame 15 by the holding unit 72a, and conveys the frame unit 17 onto the pair of guide rails 16. Then, the frame unit 17 is sandwiched by the pair of guide rails 16, and the frame unit 17 is aligned. Then, the 1 st conveyance unit 72 moves toward the cassette 10 with the frame 15 held by the holding mechanism 72b, and stores the frame unit 17 in the cassette 10.

A program describing a series of operations of the cutting apparatus 2 is stored in the storage section 82b of the control unit 82. When the operator instructs the cutting apparatus 2 to machine the workpiece 11, the processing unit 82a reads out the program from the storage unit 82b and executes the program, thereby sequentially generating control signals for controlling the operations of the components of the cutting apparatus 2.

Here, the cutting tools 36 and 52 attached to the cutting unit 30 are periodically replaced because they gradually wear out due to cutting of the workpiece 11. In the cutting apparatus 2, the replacement of the cutting tools 36 and 52 is automatically performed by the replacement unit 76.

Fig. 4 is a perspective view showing the replacement unit 76. The replacement unit 76 includes: a replacing device (replacing mechanism) 100 for replacing the cutting tools 36 and 52; and a moving unit (moving mechanism) 84 that moves the exchange device 100. The moving unit 84 has: an elevating mechanism 86 that moves the exchange device 100 in the Z-axis direction; and a multi-joint arm 90 that is connected to the lifting mechanism 86 and moves the exchange device 100 in a direction (horizontal direction) parallel to the X-axis direction and the Y-axis direction.

The lifting mechanism 86 has a columnar base plate 88 disposed along the Z-axis direction, and moves the multi-joint arm 90 along the base plate 88 in the Z-axis direction. For example, the lifting mechanism 86 includes: a motor (not shown) which is provided at a lower portion of the base plate 88 and to which a drive pulley is fixed on a shaft; and a driven pulley (not shown) provided on the upper portion of the base plate 88. A single toothed endless belt (not shown) is mounted over the drive pulley and the driven pulley, and a metal 1 st support 92A is fixed to the toothed endless belt.

When the motor of the elevating mechanism 86 is rotated in the 1 st direction in the axial direction, the 1 st support 92A is raised, and when the motor of the elevating mechanism 86 is rotated in the 2 nd direction opposite to the 1 st direction in the axial direction, the 1 st support 92A is lowered. Thereby, the 1 st support 92A is lifted and lowered in the Z-axis direction.

However, the structure of the lifting mechanism 86 is not limited as long as the 1 st support 92A can be lifted and lowered. For example, the elevating mechanism 86 may be a ball screw type elevating mechanism. The ball screw type elevating mechanism has a pair of guide rails (not shown) arranged along the Z-axis direction. A flat plate-shaped moving plate (not shown) is attached to the pair of guide rails so as to be slidable along the guide rails.

A 1 st support 92A is fixed to the front surface (1 st surface) side of the moving plate. Further, a nut portion (not shown) is provided on the rear surface (2 nd surface) side of the moving plate. The nut portion is screwed to a ball screw disposed substantially parallel to the pair of guide rails. A pulse motor (not shown) is connected to one end of the ball screw, and when the pulse motor is rotated, the 1 st support 92A is raised and lowered in the Z-axis direction.

A 1 st rotation mechanism 94A having a rotation drive source such as a motor is fixed to the 1 st support 92A. The rotation drive source is provided such that the rotation axis is substantially parallel to the Z-axis direction. The 1 st rotation mechanism 94A is attached with one end portion of a 1 st arm 96A arranged in a direction parallel to the X-axis direction and the Y-axis direction.

A 2 nd rotation mechanism 94B is attached to the other end of the 1 st arm 96A. The 2 nd rotation mechanism 94B has a rotation drive source such as a motor having a rotation axis arranged substantially parallel to the Z-axis direction. The 2 nd rotation mechanism 94B is attached with one end portion of a 2 nd arm 96B arranged in a direction parallel to the X-axis direction and the Y-axis direction.

A 3 rd rotation mechanism 94C is attached to the other end of the 2 nd arm 96B. The 3 rd rotation mechanism 94C has a rotation drive source such as a motor having a rotation axis arranged substantially parallel to the Z-axis direction. A metal second support 92B is attached to the 3 rd rotation mechanism 94C. Further, a replacement device 100 for replacing the cutting tools 36, 52 and the like is attached to the 2 nd support 92B.

The exchange device 100 is disposed at a position (retracted position) adjacent to the substrate 88. When the cutting tools 36 and 52 and the like are replaced, the moving unit 84 is driven, and the replacing device 100 is disposed above the base 4 (replacement position). Fig. 5 is a perspective view showing the replacement unit 76 in which the replacement device 100 is disposed at the replacement position.

The exchanging device 100 is lifted and lowered in the Z-axis direction by the lifting mechanism 86, and is moved along a plane (horizontal plane) parallel to the X-axis and the Y-axis by the multi-joint arm 90. That is, the replacement device 100 is positioned at an arbitrary position by the lifting mechanism 86 and the multi-joint arm 90.

Next, a configuration example of the exchange device 100 will be described. Fig. 6 is a perspective view showing the exchanging apparatus 100. Fig. 7 (a) is a side view showing the exchanging apparatus 100, and fig. 7 (B) is a front view showing the exchanging apparatus 100. In fig. 7 (B), the coupling members 114a and 114B, which will be described later, are not shown. Hereinafter, the configuration of the exchange device 100 will be described mainly with reference to fig. 6.

The exchange device 100 includes a mounting and demounting unit 102 that mounts and demounts the cutting tools 36 and 52 and the nuts 48 and 64 (see fig. 2 and 3). Further, a rotation mechanism 104 for rotating the removable unit 102 is coupled to the removable unit 102.

The rotation mechanism 104 includes: a rotating part (shaft) 106 connected to the detachable unit 102; and a rotation driving source (not shown) such as a motor that rotates (spins) the rotating portion 106 about a straight line passing through the inside of the rotating portion 106 as a rotation axis 106 a. The rotation drive source rotates the rotation portion 106 in two directions (the 1 st direction and the 2 nd direction opposite to the 1 st direction) about the rotation axis 106 a. When the rotating portion 106 rotates, the attachment/detachment unit 102 coupled to the rotating portion 106 rotates around the rotation axis 106a in conjunction with the rotating portion 106.

The removable unit 102 includes a housing 110 coupled to the rotating portion 106 of the rotating mechanism 104. The housing 110 includes a pair of plate-like support members 112a and 112b made of metal or the like and arranged substantially parallel to each other.

Rectangular parallelepiped coupling members 114a and 114b are provided between the support members 112a and 112 b. The connecting member 114a is fixed to one end portion (the rotation portion 106 side) of the support members 112a and 112b, and the connecting member 114b is fixed to the other end portion (the opposite side to the rotation portion 106) of the support members 112a and 112 b. That is, the support members 112a and 112b are coupled to each other via the coupling members 114a and 114 b.

A nut rotating portion (nut attaching and detaching unit) 120 is attached to the housing 110, and the nut rotating portion 120 holds and rotates the nuts 48 and 64 (see fig. 2 and 3) for attaching the cutting tools 36 and 52 to the cutting unit 30. The nut rotating portion 120 includes a nut holding portion 122 that holds the nuts 48 and 64, and a columnar rotating portion (shaft) 124 that is coupled to the nut holding portion 122 (see fig. 7B).

The rotating portion 124 is accommodated in a cylindrical housing 126. One end side (distal end portion) of the rotating portion 124 is exposed from the housing 126, and the nut holding portion 122 is connected to one end side of the rotating portion 124. The other end side (base end portion) of the rotating portion 124 is connected to a rotation drive source 128 such as a motor, and the rotation drive source 128 rotates (spins) the rotating portion 124 about a straight line passing through the inside of the rotating portion 124 as a rotation axis 124 a.

The rotation drive source 128 rotates the rotation portion 124 in two directions (the 1 st direction and the 2 nd direction opposite to the 1 st direction) about the rotation axis 124 a. When the rotating portion 124 rotates, the nut holding portion 122 coupled to the rotating portion 124 rotates around the rotation axis 124a in conjunction with the rotating portion 124.

An opening (not shown) penetrating the support member 112a in the thickness direction is provided in the center of the support member 112a, and an opening (not shown) penetrating the support member 112b in the thickness direction is provided in the center of the support member 112 b. One end of the rotating portion 124 exposed from the housing 126 is inserted into the opening of the support member 112a, and protrudes from the support member 112a toward the outside of the housing 110. The other end of the rotating portion 124 is inserted into the opening of the support member 112b together with the end of the housing 126, and protrudes from the support member 112b toward the outside of the housing 110.

One end side of the rotating portion 124 is coupled to the nut holding portion 122 outside the housing 110. The other end of the rotating portion 124 is connected to a rotation drive source 128 outside the housing 110. Thereby, the housing 110 is sandwiched between the nut holding portion 122 and the rotation driving source 128, and the nut rotating portion 120 is attached to the housing 110. The nut rotating portion 120 is disposed such that the rotation axis (corresponding to the rotation axis 124a) of the nut holding portion 122 is along a direction perpendicular to the rotation axis 106a of the rotating portion 106.

The nut holding portion 122 includes a columnar rotating member 130 fixed to one end side of the rotating portion 124. The rotating member 130 is biased by a spring or the like to the side opposite to the support member 112a, and when an external force is applied, the rotating member 130 moves toward the support member 112 a.

The rotating member 130 has a front surface 130a located on the opposite side of the support member 112 a. A plurality of (4 in fig. 6) holding pins 132 protruding from the front surface 130a are provided on the rotating member 130 at substantially equal intervals in the circumferential direction of the front surface 130 a.

The holding pin 132 is formed corresponding to the through hole 48b (see fig. 2) of the nut 48 or the through hole 64b (see fig. 3) of the nut 64, and can be inserted into the through holes 48b and 64 b. The number, size, arrangement, and the like of the holding pins 132 are appropriately set according to the through holes 48b and 64 b.

A plurality of (4 in fig. 6) gripping members 134 that grip the nuts 48, 64 are arranged around the rotating member 130 at substantially equal intervals in the circumferential direction of the rotating member 130. The grip members 134 are each formed in a columnar shape, and a base end portion (one end side) of the grip member 134 is fixed to the outer peripheral surface of the rotating member 130.

A tip end portion (the other end side) of the gripping member 134 protrudes from the front surface 130a of the rotating member 130, and a claw portion 134a bent toward the center side of the rotating member 130 is formed at the tip end portion. The holding member 134 is biased outward in the radial direction of the rotating member 130 by a spring or the like, and when an external force is applied, the claw portion 134a moves inward in the radial direction of the rotating member 130.

A hollow cylindrical cover 136 is provided around the rotating member 130. The cover 136 is configured to be rotatable around the rotation axis 124a independently of the rotation member 130, and is disposed so as to surround the rotation member 130 and the proximal end sides of the plurality of gripping members 134. When the front surface 130a of the rotating member 130 is pressed toward the inside (the side of the support member 112 a) of the cover 136, a spring or the like that biases the rotating member 130 contracts, and the rotating member 130 is pressed into the inside of the cover 136 together with the plurality of gripping members 134.

When the rotating member 130 is pressed and pushed into the cover 136, the tip ends (claw portions 134 a) of the plurality of gripping members 134 contact the inner wall of the cover 136 and are pressed, and the springs or the like that urge the gripping members 134 contract. Thereby, the distal ends of the plurality of gripping members 134 move radially inward of the rotating member 130. Then, the plurality of gripping members 134 are disposed so that the longitudinal direction thereof is along the inner wall of the cover 136 (closed state). At this time, the claw portion 134a of the gripping member 134 is disposed, for example, radially inward of the outer peripheral edge of the rotating member 130 with respect to the rotating member 130.

On the other hand, when the pressing of the rotating member 130 is released, the rotating member 130 moves outward of the cover 136, and the state in which the distal end side of the gripping member 134 is pressed by the inner wall of the cover 136 is released. Thereby, the distal ends of the plurality of gripping members 134 move radially outward of the rotating member 130. Then, the distal ends of the gripping members 134 are disposed radially outward of the rotating member 130 in the closed state (in the open state). At this time, the claw portion 134a of the gripping member 134 is disposed, for example, radially outward of the outer peripheral edge of the rotating member 130 with respect to the rotating member 130.

Further, a plurality of (e.g., 4) pins 138 protruding from the outer peripheral surface of the rotating member 130 are provided on the outer peripheral surface of the rotating member 130. The cover 136 is provided with a plurality of (e.g., 4) openings 136a penetrating the cover 136 from the outer peripheral surface to the inner peripheral surface (inner wall). The tip ends of the pins 138 are inserted into the openings 136 a.

An end portion of the opening 136a on the side opposite to the support member 112a is formed in a step shape including a 1 st pin receiving portion 136b and a 2 nd pin receiving portion 136 c. The 2 nd pin receiving portion 136c is disposed at a position (support member 112a side) farther from the front surface 130a of the rotating member 130 than the 1 st pin receiving portion 136 b.

The nut holding portion 122 is in a state where the pin 138 contacts the 1 st pin receiving portion 136b in the initial state. When the rotating member 130 is pressed and pushed into the cover 136, the pin 138 is separated from the 1 st pin receiving portion 136 b. When the rotating portion 124 is rotated in the 1 st direction in this state, the pin 138 moves from the 1 st pin receiving portion 136b side to the 2 nd pin receiving portion 136c side.

When the pressing of the rotating member 130 is released, the pin 138 comes into contact with the 2 nd pin receiving portion 136c, and is supported by the 2 nd pin receiving portion 136 c. Thereby, the state in which the rotating member 130 is pushed into the cover 136 is maintained, and the plurality of gripping members 134 are maintained in the closed state.

On the other hand, when the rotating member 130 pressed into the cover 136 is further pressed and pressed into the cover 136, the pin 138 is separated from the 2 nd pin receiving portion 136 c. When the rotating portion 124 is rotated in the 2 nd direction opposite to the 1 st direction in this state, the pin 138 moves from the 2 nd pin receiving portion 136c side to the 1 st pin receiving portion 136b side.

When the pressing of the rotating member 130 is released, the pin 138 comes into contact with the 1 st pin receiving portion 136b, and is supported by the 1 st pin receiving portion 136 b. Thereby, the rotating member 130 is pushed out from the inside of the cover 136, and the plurality of gripping members 134 are opened.

The nut rotating portion 120 holds and rotates the nuts 48 and 64. Specifically, first, the front surface 130a of the rotating member 130 is brought into contact with the nuts 48 and 64 so that the holding pin 132 is inserted into the through hole 48b (see fig. 2) of the nut 48 or the through hole 64b (see fig. 3) of the nut 64. When the rotary member 130 is pushed into the cover 136 in this state, the plurality of gripping members 134 are in the closed state, and the claw portions 134a come into contact with the outer peripheral surfaces of the nuts 48, 64 to grip the nuts 48, 64.

When the rotating portion 124 (see fig. 7B) is rotated by the rotation driving source 128 in a state where the nuts 48 and 64 are held by the plurality of holding members 134, the rotating member 130 coupled to the rotating portion 124 is rotated, and the nuts 48 and 64 held by the holding members 134 are also rotated.

By holding and rotating the nuts 48 and 64 by the nut rotating portion 120, the nuts 48 and 64 can be automatically removed and fastened when the cutting tools 36 and 52 attached to the cutting unit 30 are replaced.

For example, when the nut 48 (see fig. 2) attached to the attachment flange 42 of the cutting unit 30 is removed, first, the exchanging device 100 is moved by the elevating mechanism 86 and the articulated arm 90 (see fig. 4 and 5), and the exchanging device 100 is disposed inside the processing chamber 28 through the access opening 28a (see fig. 1) of the processing chamber 28. Then, the detachable unit 102 is rotated by the rotation mechanism 104, and the nut holding portion 112 is opposed to the mounting flange 42.

Then, the nut holding portion 112 is moved toward the mounting flange 42. Thereby, the front surface 130a side of the rotating member 130 is pressed against the nut 48 attached to the attachment flange 42. At this time, the plurality of holding pins 132 of the rotating member 130 are inserted into the through holes 48b of the nut 48.

Then, the rotating member 130 is pressed by the nut 48, the rotating member 130 is pressed into the cover 136, and the plurality of gripping members 134 are closed. Thereby, the nut 48 is gripped by the claw portions 134a of the plurality of gripping members 134.

Next, the rotation drive source 128 rotates the rotation portion 124 (see fig. 7B), and the rotation member 130 rotates in the 1 st direction (the direction in which the nut 48 is loosened) around the rotation axis 124 a. Thereby, the nuts 48 gripped by the plurality of gripping members 134 are rotated and loosened, and are detached from the boss portions 46 of the mounting flange 42. When the rotating member 130 is rotated in the 1 st direction while being press-fitted into the cover 136, the pin 138 moves from the 1 st pin receiving portion 136b side to the 2 nd pin receiving portion 136c side.

Then, the nut holding portion 112 is moved in a direction away from the mounting flange 42. At this time, the pin 138 is supported by the 2 nd pin receiving portion 136c, and the rotating member 130 is thereby maintained in a state of being press-fitted into the cover 136. Thereby, the state (closed state) in which the plurality of gripping members 134 grip the nut 48 is maintained.

On the other hand, when the nut 48 is attached to the attachment flange 42 of the cutting unit 30, first, the nut holding portion 112 holding the nut 48 is opposed to the attachment flange 42, and the nut holding portion 112 is moved toward the attachment flange 42. Thereby, the nut 48 held by the nut holding portion 112 is positioned at the front end portion of the boss portion 46 of the mounting flange 42, and the rotating member 130 is pressed into the inside of the cover 136.

Next, the rotation drive source 128 rotates the rotation portion 124 (see fig. 7B), and the rotation member 130 rotates in the 2 nd direction (the direction in which the nut 48 is fastened) opposite to the 1 st direction about the rotation axis 124 a. Thereby, the nut 48 is rotated and tightened to the threaded portion 46a formed in the boss portion 46 of the mounting flange 42, and is mounted to the mounting flange 42. When the rotating member 130 is rotated in the 2 nd direction while being press-fitted into the cover 136, the pin 138 moves from the 2 nd pin receiving portion 136c side to the 1 st pin receiving portion 136b side.

Then, the nut holding portion 112 is moved in a direction away from the mounting flange 42. At this time, the pin 138 is supported by the 1 st pin receiving portion 136 b. Then, the rotating member 130 is pushed out from the inside of the cover 136, and the plurality of gripping members 134 release the gripping of the nut 48.

The method of maintaining the plurality of gripping members 134 in the closed state or the open state is not limited to the above method. For example, instead of providing the pin 138 on the rotating member 130, an actuator for moving the cover 136 in the height direction of the cover 136 may be provided on the detachable unit 102. For example, the actuator is constituted by an air cylinder or the like, and is fixed to the support member 112 a. The actuator moves the cover 136, thereby freely switching between the closed state and the open state of the plurality of gripping members 134.

An annular member 140 made of metal or the like is provided between the support members 112a, 112 b. The annular member 140 is disposed substantially parallel to the support members 112a and 112b so as to surround the housing 126 (the rotating portion 124) and not to contact the housing 126.

The annular member 140 is coupled to the support member 112a via a plurality of elastic bodies (elastic members) 142a, and is coupled to the support member 112b via a plurality of elastic bodies (elastic members) 142 b. That is, the annular member 140 is suspended by the elastic bodies 142a and 142B and is held in a state of not contacting the support members 112a and 112B (see fig. 7B).

For example, the elastic bodies 142a and 142b are made of a member that can expand and contract, such as a spring or rubber. When an external force is applied to the annular member 140, the elastic bodies 142a and 142b expand and contract, whereby the annular member 140 moves or rotates in any direction.

A holding portion 150A (1 st holding portion) and a holding portion 150B (2 nd holding portion) that hold the cutting tools 36 and 52 are coupled to the outer peripheral surface of the annular member 140. The holding portions 150A and 150B are disk-shaped members made of resin, metal, or the like, and hold the cutting tools 36 and 52 on the circular front surface 150A facing the opposite side of the ring member 140. The holding portions 150A, 150B are arranged such that the front surface 150A of the holding portion 150A and the front surface 150A of the holding portion 150B face each other through the frame 110, facing outward of the frame 110.

The holding portions 150A, 150B are arranged at 90 ° apart from the nut holding portion 122 in the circumferential direction (rotational direction) of the rotating portion 106 of the rotating mechanism 104, respectively. The nut holding portion 122, the front surface 150A of the holding portion 150A, and the front surface 150A of the holding portion 150B are arranged to face the opposite side of the rotation axis 106a of the rotation portion 106 in a state separated from each other around the rotation axis 106 a.

Next, a configuration example of the holding portions 150A and 150B will be described. Fig. 8 (a) is a front view showing the holding portion 150A, and fig. 8 (B) is a sectional view showing the holding portion 150A. The structure and function of the holding portion 150A will be described below, but the structure and function of the holding portion 150B are also the same as those of the holding portion 150A.

The holding portion 150A has a disk-shaped frame 152 made of resin, metal, or the like. The frame 152 has a front surface (1 st surface) 152a and a back surface (2 nd surface) 152b substantially parallel to each other. The front surface 152a side of the frame 152 corresponds to the front surface 150A side of the holding portion 150A. A circular 1 st groove (1 st recess) 152c is provided in the center of the front surface 152a side of the frame 152. The diameter of the 1 st groove 152c is larger than the diameter of the front surface 38a (see fig. 9a) of the base 38 of the cutting tool 36 and the diameter of the front surface 62a (see fig. 9B) of the pressing flange 62.

Further, a circular 2 nd groove (2 nd recessed portion) 152d is provided in the center of the bottom of the 1 st groove 152 c. An annular 3 rd groove (3 rd recessed portion) 152e is formed at the bottom of the 2 nd groove 152d along the outer periphery of the 2 nd groove 152d with a predetermined width.

An annular elastic member 154 is fitted into the 3 rd groove 152 e. The elastic member 154 is made of an elastic material that can elastically deform, such as rubber or resin. The elastic member 154 includes a base portion 154a buried inside the 3 rd groove 152e and a pair of lips 154b protruding from the base portion 154 a. One lip portion 154b is disposed along the side wall of the 3 rd groove 152e located radially outward of the frame body 152. The other lip 154b is disposed along the side wall of the 3 rd groove 152e located radially inward of the frame 152.

The pair of lips 154b are inclined with respect to the front surface 152a of the frame 152 so as to be spaced apart from each other as they become farther from the base 154 a. That is, the pair of lips 154b are disposed from the inside of the 3 rd groove 152e toward the outside in the width direction of the 3 rd groove 152e, respectively. The tips of the pair of lips 154b protrude from the front surface 152a of the frame 152 in the thickness direction of the frame 152.

A plurality of through holes 154c penetrating the base portion 154a are provided in a region of the base portion 154a that overlaps with a space between the pair of lips 154 b. For example, as shown in fig. 8 (a), 6 through holes 154c are formed in the base portion 154a at substantially equal intervals in the circumferential direction of the elastic member 154. One end side of the through hole 154c is open on the front surface 152a of the frame 152, and the other end side of the through hole 154c is connected to an annular 4 th groove (4 th recessed portion) 152f provided at the bottom of the 3 rd groove 152 e.

The 4 th groove 152f is connected to one end side of a flow path 156 formed of a pipe, a duct, or the like. The other end side of the flow channel 156 is connected to a suction source 160 via a valve 158. For example, the valve 158 is an electromagnetic valve whose opening and closing are electrically controlled, and the suction source 160 is an injector. When the valve 158 is opened, the negative pressure of the suction source 160 acts on the space between the pair of lips 154b via the 4 th groove 152f of the frame 152 and the through hole 154c of the elastic member 154.

A pressure measuring device (pressure sensor) 162 that measures the pressure in the flow passage 156 is connected to the area between the 4 th groove 152f and the valve 158 in the flow passage 156. For example, the pressure measuring device 162 measures the negative pressure inside the flow path 156 based on the gauge pressure (the difference between the absolute pressure and the atmospheric pressure). The pressure value of the flow path 156 measured by the pressure measuring device 162 is output to the control unit 82 (see fig. 1) and stored in the storage unit 82 b.

The cutting tool is held by the holding portion 150A. When the cutting tool is replaced, the cutting tool attached to the cutting unit 30 (used cutting tool) and the unused cutting tool (replacement cutting tool) are held by the holding portion 150A. The holding portion 150A can hold any one of a hub-type cutting tool and a washer-type cutting tool.

Fig. 9 (a) is a cross-sectional view showing the holder 150A holding the hub-type cutting insert 36. When the cutting tool 36 is held by the holding portion 150A, first, the valve 158 is opened, and the negative pressure of the suction source 160 is applied to the space between the pair of lips 154 b. Then, the holding portion 150A is brought close to the base 38 of the cutting tool 36 in a state where the front surface 150A side of the holding portion 150A is opposed to the cutting tool 36.

When the front surface 38a of the base 38 comes into contact with the front ends of the pair of lips 154b, the space between the pair of lips 154b is sealed, and is depressurized by the negative pressure of the suction source 160. Thereby, the cutting insert 36 is sucked and held by the holding portion 150A.

Fig. 9 (B) is a cross-sectional view showing the holding portion 150A that holds the washer-type cutting insert 52. When the cutting tool 52 is held by the holding portion 150A, the holding portion 150A sucks the front surface 62a side of the pressing flange 62 and sucks the cutting tool 52 through the through hole 62d provided in the pressing flange 62.

Specifically, first, the valve 158 is opened, and the negative pressure of the suction source 160 is applied to the space between the pair of lips 154 b. Then, the holding portion 150A is brought close to the pressing flange 62 in a state where the front surface 150A side of the holding portion 150A is opposed to the pressing flange 62 and the cutting insert 52.

When the front surface 62a of the pressing flange 62 comes into contact with the front ends of the pair of lips 154b, the space between the pair of lips 154b is sealed, and is depressurized by the negative pressure of the suction source 160. Thereby, the pressing flange 62 is sucked and held by the holding portion 150A.

The negative pressure of the suction source 160 also acts on the cutting tool 52 through the plurality of through holes 62d provided in the pressing flange 62. Thereby, the cutting insert 52 is sucked and held by the holding portion 150A via the pressing flange 62.

The through hole 62d is formed to open in a region corresponding to the elastic member 154 in the front surface 62a of the pressing flange 62 and in a region in contact with the cutting tool 52 in the rear surface 62b of the pressing flange 62. The diameter of the through hole 62d is set to about 1mm, for example.

However, the holding portion 150A may hold only the pressing flange 62. Specifically, as described above, the holding portion 150A sucks the pressing flange 62 in a state of not contacting the cutting insert 52. At this time, although the negative pressure of the suction source 160 slightly leaks through the through hole 62d of the pressing flange 62, the pressing flange 62 can be held by appropriately controlling the suction force of the suction source 160.

As described above, the cutting inserts 36 and 52 are held by the holding portion 150A. Further, by measuring the pressure in the flow path 156 by the pressure measuring device 162, it is possible to determine whether or not a desired object is appropriately held by the holding unit 150A.

For example, when the cutting insert 36 is held by the holding portion 150A (see fig. 9a), the space between the pair of lips 154b is sealed. Therefore, the pressure P of the flow path 156 in the state where the holding portion 150A holds the cutting tool 36_a1Pressure P of the flow path 156 in a state where the holding portion 150A is not in contact with the cutting insert 36_a2(＞P_a1) Different. Therefore, the pressure measured by the pressure measuring device 162 is compared with the predetermined threshold value P_tha(P_a1＜P_tha＜P_a2) It is possible to determine whether or not the cutting tool 36 is held by the holding portion 150A.

When the cutting insert 52 is held by the holding portion 150A (see fig. 9B), the pressure P of the flow path 156 is maintained by the holding portion 150A by suction of the cutting insert 52 and the pressing flange 62_b1The holding portion 150A only holds the pressing flange 62 by suctionPressure P of flow passage 156 in this state_b2(> pressure P)_b1) And the pressure P of the flow path 156 of the holding portion 150A in a state where neither the cutting tool 52 nor the pressing flange 62 is held_b3(＞P_b2) Different.

Therefore, the pressure measured by the pressure measuring device 162 is compared with the predetermined threshold value P_thb1(P_b1＜P_thb1＜P_b2) And a threshold value P_thb2(P_b2＜P_thb2＜P_b3) It is possible to determine whether or not the cutting insert 52 and the pressing flange 62 are held by the holding portion 150A.

The storage unit 82b of the control unit 82 (see fig. 1) stores a threshold value (P) in advance_tha、P_thb1、P_thb2) The determination can be performed by causing the processing unit 82a to execute a process of comparing the pressure measured by the pressure measuring device 162 with a threshold value, for example. In this case, a program describing a process of comparing the measured pressure with the threshold value is stored in the storage unit 82 b. Then, the processing unit 82a accesses the storage unit 82b, reads out and executes the program, and thereby compares the measured pressure with the threshold value.

As described above, the cutting inserts 36 and 52 are held by the holding portion 150A. The procedure for holding the cutting inserts 36 and 52 by the holding portion 150B is also the same as that of the holding portion 150A.

Further, a columnar 5 th groove (5 th recessed portion) 152g is provided in a region on the front surface 152a side of the housing 152 and inside the 4 th groove 152 f. The diameter of the 5 th groove 152g is set to be larger than the diameter of the boss portion 46 (see fig. 2) of the mounting flange 42 and the diameter of the 3 rd boss portion 60c (see fig. 3) of the mounting flange 54. Thus, when the holding portions 150A, 150B are brought close to the cutting unit 30, the tip portions of the boss portions 46, 60 are inserted into the 5 th groove 152g, and contact between the holding portions 150A, 150B and the cutting unit 30 is avoided.

Further, the elastic member 154 need not be provided in the holding portions 150A and 150B. For example, two O-rings having different diameters may be concentrically arranged instead of the elastic member 154. In this case, one O-ring is provided along the sidewall of the 3 rd groove 152e located on the outer side in the radial direction of the frame body 152, and the other O-ring is provided along the sidewall of the 3 rd groove 152e located on the inner side in the radial direction of the frame body 152.

Here, as shown in fig. 6 and 7 (B), the holding portions 150A and 150B are coupled to the rotating portion 106 of the rotating mechanism 104 via elastic bodies 142a and 142B. Thus, the holding portions 150A and 150B are maintained in a state in which the front surface 150A is tiltable. That is, when an external force is applied to the holding portions 150A and 150B, the front surface 150A can be freely inclined in any direction.

Therefore, when the cutting tool 36 and the pressing flange 62 are in contact with the front surfaces 150A of the holding portions 150A and 150B, the holding portions 150A and 150B are inclined such that the front surfaces 150A are arranged in parallel with the front surface 38a of the cutting tool 36 and the front surface 62a of the pressing flange 62. Thus, the front surface 150A side of the holding portions 150A, 150B appropriately contacts the cutting tool 36 and the pressing flange 62, and the cutting tool 36 and the pressing flange 62 are reliably sucked and held.

The cutting tools 36 and 52 are replaced by the replacement device 100. The cutting tools 36 and 52 are replaced by removing the used cutting tools 36 and 52 attached to the cutting unit 30 and then attaching the replacement cutting tools 36 and 52 to the cutting unit 30. The replacement cutting tools 36, 52 are stored in the cutting apparatus 2 in advance.

Fig. 10 (a) is a perspective view showing a storage unit 200 for storing the cutting tools 36, 52 for replacement, and the like. The stock unit 200 has a mounting portion (mounting table) 202 on which the cutting tools 36, 52, and the like are mounted. For example, the mounting portion 202 is a plate-like member formed in the same shape as the frame 15 (see fig. 1) that supports the workpiece 11, and the upper surface of the mounting portion 202 constitutes a flat mounting surface 202a on which the cutting tools 36, 52 and the like are mounted.

A plurality of tool storage portions 204 for storing cutting tools are provided on the mounting surface 202a of the mounting portion 202. For example, the plurality of tool storage portions 204 (tool storage portions 204A) for storing the hub-type cutting tools 36 and the plurality of tool storage portions 204 (tool storage portions 204B) for storing the packing-type cutting tools 52 are disposed on the mounting surface 202a, respectively.

Fig. 10 (B) is a perspective view showing the tool storage 204. For example, the tool storage portion 204 is formed of a plastic housing (tool case) that stores the cutting tools 36 and 52, and is fixed to the mounting surface 202a of the mounting portion 202. Fig. 10B shows, as an example, a tool storage portion 204A (tool case) having a circular bottom surface and an annular side wall protruding from an outer peripheral portion of the bottom surface in a direction perpendicular to the bottom surface.

A columnar projection 204A projecting from the bottom surface is provided at the center of the tool storage 204A. When the cutting tool 36 is stored in the tool storage 204A, the cutting tool 36 is disposed in the tool storage 204A such that the protrusion 204A is inserted into the opening 36a of the cutting tool 36. Similarly, when the cutting tool 52 is stored in the tool storage 204B, the cutting tool 52 is disposed in the tool storage 204B such that the projection 204a is inserted into the opening 52a of the cutting tool 52.

A pressing flange storage portion 206 for storing the pressing flange 62 is provided on the mounting surface 202a of the mounting portion 202. The pressing flange storage portion 206 is configured similarly to the cutter storage portion 204, and the pressing flange 62 is housed in the pressing flange storage portion 206.

In addition, tools other than the parts for replacing the cutting tools 36 and 52 may be stored in the mounting portion 202. For example, a plate storage portion (a trimming plate storage portion) 208 and a plate storage portion (an inspection plate storage portion) 210 are provided on the mounting surface 202a of the mounting portion 202, the plate storage portion 208 stores a plate-shaped plate (a trimming plate) 19 for trimming the cutting tools 36 and 52, and the plate storage portion 210 stores a plate-shaped plate (an inspection plate) 21 for inspecting the cutting tools 36 and 52.

When the workpiece 11 is machined by the cutting tools 36 and 52, the dressing is performed to intentionally wear the tip portions of the cutting tools 36 and 52 for the purpose of correcting the shapes of the cutting tools 36 and 52, ensuring the sharpness of the cutting tools 36 and 52, and the like. The dressing is performed by cutting the cutting tools 36, 52 into the plate 19. For example, the plate 19 is formed by fixing abrasive grains made of green diamond Grains (GC), white corundum (WA), or the like with a bonding material such as a resin bond or a ceramic bond.

When dressing is performed, the bonding material of the cutting tools 36, 52 is worn in contact with the plate 19, the shape of the cutting tools 36, 52 is dressed to a shape concentric with the spindle 34 (rounded), and the abrasive grains are moderately exposed from the bonding material (sharpened). By using the cutting tools 36 and 52 thus dressed, the machining accuracy of the workpiece 11 is improved.

When the workpiece 11 is machined by the cutting tools 36 and 52, the cutting tools 36 and 52 may be cut into the plate 21 to inspect the shapes of the cutting tools 36 and 52 and correct the positions of the cutting tools. For example, it is checked whether or not the tip portions of the cutting blades 36 and 52 have a desired shape by cutting the cutting blades 36 and 52 into the plate 21 and observing the grooves (cutting grooves) formed in the plate 21. Further, the position (cutting depth) of the lower end of the cutting tool 36, 52 is calculated from the length of the cutting groove formed in the plate 21, and the height position of the cutting tool 36, 52 is adjusted.

As the plate 21, for example, a plate-like member (silicon plate) made of silicon is used. However, the material of the plate 21 is not limited as long as the plate 21 can be cut by the cutting tools 36 and 52. The material of the plate 21 is the same as that of the workpiece 11.

The cutting of the plates 19 and 21 by the cutting tools 36 and 52 is performed in a state where the plates 19 and 21 are held by a pair of sub tables 26 (see fig. 1). At this time, the plate 19 or 21 to be cut by the cutting tools 36 and 52 attached to the one cutting unit 30 is held on the one sub-table 26, and the plate 19 or 21 to be cut by the cutting tools 36 and 52 attached to the other cutting unit 30 is held on the other sub-table 26. That is, the pair of sub tables 26 is provided corresponding to the pair of cutting units 30.

Further, an identification mark containing information on various instruments stored in the placement unit 202 may be added to the instruments. For example, the cutting tool 36 shown in fig. 10 (B) is attached with an identification mark 212 of the cutting tool 36. Examples of the identification mark 212 include a barcode and a two-dimensional code. The identification mark 212 may be directly printed on the cutting tool 36, or a sticker printed with the identification mark 212 may be attached to the cutting tool 36.

For example, the identification marks attached to the cutting tools 36 and 52 include information such as the type (hub type or washer type) of the cutting tools 36 and 52, the outer diameter, inner diameter, thickness, the material and particle size of abrasive grains, the material of the bonding material, and the serial number. The identification mark attached to the plate 19 includes information such as the size and shape of the plate 19, the material and particle size of abrasive grains, the material of a bonding material, and a serial number. The identification mark attached to the plate 21 includes information such as the size, shape, material, and serial number of the plate 19.

The identification mark attached to the cutting tool 36, 52, etc. is read by a reading unit provided in the cutting apparatus 2. The reading unit is appropriately selected according to the kind of the identification mark, and for example, a camera, a barcode reader, or the like can be used.

For example, the imaging unit 70 (see fig. 1) provided adjacent to the cutting unit 30 also functions as a reading unit, and the identification mark is read by the imaging unit 70. However, the reading unit may be provided in the cutting apparatus 2 separately from the photographing unit 70.

The information read by the reading means is input to the control means 82 (see fig. 1), and is stored in the storage section 82 b. Then, when the cutting tools 36 and 52 are replaced, the control unit 82 refers to the information stored in the storage unit 82b and specifies the object held by the replacement unit 76.

The stock unit 200 is housed in a container 8 (see fig. 1) provided in the cutting device 2. Then, the storage unit 200 is pulled out from the container 8 by the 1 st conveyance unit 72, and conveyed to the lid 78 in the closed state.

A door (not shown) that can be opened and closed is provided on the cleaning unit 12 side of the container 8. When the storage unit 200 is taken out of the container 8, the lifter 6 is lifted and lowered so that the height position of the container 8 matches the height position of the pair of guide rails 16.

The shape of the placement portion 202 of the stock unit 200 corresponds to the shape of the frame 15 that supports the workpiece 11. Therefore, the storage unit 200 can be carried to the lid 78 in the closed state by the same operation as that when the frame unit 17 is carried to the chuck table 22.

The location of the storage unit 200 is not limited to the lid 78. For example, the storage unit 200 may be disposed on the pair of guide rails 16. Note that the storage unit 200 may be disposed on the chuck table 22 without providing the cover 78.

Next, a specific example of a tool replacement method for replacing the cutting tools 36 and 52 attached to the cutting unit 30 of the cutting apparatus 2 will be described. In the following, a method of replacing the cutting insert 36 (see fig. 2) attached to the mounting flange 42 will be described as an example.

First, the cutting tool 36 for replacement is placed on the placement surface 202a of the placement portion 202 of the stock unit 200 (preparation step). Specifically, the plurality of tool storage portions 204A fixed to the mounting surface 202a of the mounting portion 202 respectively store the cutting tools 36 for replacement (unused cutting tools 36). The stock unit 200 supplemented with the replacement cutting tool 36 is stored in the container 8 (see fig. 1).

Then, the storage unit 200 is pulled out from the container 8 by the 1 st conveyance unit 72, and conveyed to the lid 78 in the closed state. Thereby, the replacement cutting insert 36 is held by the cap 78. As described above, the storage unit 200 may be disposed on the pair of rails 16 or the chuck table 22.

Next, the replacement cutting tool 36 placed on the placement surface 202a of the placement unit 202 is held by the holding unit 150B of the replacement device 100 (replacement cutting tool holding step). Fig. 11 (a) is a schematic diagram showing the replacement device 100 in the replacement cutting tool holding step.

In the replacement cutting tool holding step, first, the replacement device 100 is moved by the elevation mechanism 86 and the articulated arm 90 (see fig. 4 and 5) and is placed on the placement portion 202 held by the cover 78 or the like. Further, the frame 110 is rotated by the rotation mechanism 104 (see fig. 6 and the like), and the holding portion 150B is opposed to the placement surface 202a of the placement portion 202.

Next, the exchanging apparatus 100 is lowered, and the holding portion 150B is brought into contact with the cutting tool 36 for exchanging disposed on the mounting surface 202a of the mounting portion 202. Then, the replacement cutting insert 36 is sucked and held by the holding portion 150B.

Then, the exchange device 100 is raised, and the holding portion 150B is moved in a direction away from the mounting surface 202a of the mounting portion 202. Thereby, the replacement cutting insert 36 is lifted up by the holding portion 150B.

Next, the nut 48 attached to the attachment flange 42 of the cutting unit 30 is detached from the attachment flange 42 (nut detaching step). Fig. 11 (B) is a schematic diagram showing the replacing apparatus 100 in the nut removing step.

In the nut removal step, first, the exchanging device 100 is moved by the elevating mechanism 86 and the articulated arm 90 (see fig. 4 and 5), and the exchanging device 100 is disposed in the processing chamber 28 (see fig. 1). The nut holding portion 122 of the exchanging apparatus 100 is opposed to the mounting flange 42 in a state where the cutting tool 36 and the nut 48 are mounted.

Then, the nut 48 attached to the attachment flange 42 is held and rotated by the nut holding portion 122. Specifically, in a state where the nut 48 is gripped by the plurality of gripping members 134 (see fig. 6 and the like), the rotating member 130 (see fig. 6 and the like) is rotated by the rotation driving source 128, and the nut 48 is rotated in the 1 st direction (the direction in which the nut 48 is loosened). As a result, the nut 48 is loosened and detached from the mounting flange 42.

Next, the nut holding portion 122 is separated from the mounting flange 42 (1 st retreat step). Fig. 11 (C) is a schematic diagram showing the replacement device 100 in the 1 st retraction step.

In the 1 st retraction step, the multi-joint arm 90 (see fig. 4 and 5) moves the exchange device 100 to the side opposite to the mounting flange 42. Thereby, the nut holding portion 122 moves in a direction away from the mounting flange 42 while holding the nut 48.

Next, the cutting insert 36 attached to the attachment flange 42 of the cutting unit 30 is held by the holding portion 150A of the exchanging apparatus 100 (used cutting insert holding step). Fig. 11 (D) is a schematic diagram showing the replacement device 100 in the used cutting tool holding step.

In the used cutting tool holding step, first, the rotary portion 106 (see fig. 6 and the like) of the rotary mechanism 104 is rotated, so that the front surface 150A side (see fig. 8a and the like) of the holding portion 150A faces the mounting flange 42. Then, the exchange device 100 is moved toward the mounting flange 42, and the holding portion 150A is brought into contact with the used cutting tool 36 attached to the mounting flange 42. Then, the used cutting insert 36 is sucked and held by the holding portion 150A.

Next, the holding portion 150A is separated from the mounting flange 42 (the 2 nd retracting step). Fig. 12 (a) is a schematic diagram showing the replacement device 100 in the 2 nd evacuation step.

In the 2 nd evacuation step, the multi-joint arm 90 (see fig. 4 and 5) moves the exchange device 100 to the side opposite to the mounting flange 42. Thus, the holding portion 150A moves in a direction away from the mounting flange 42 while holding the used cutting tool 36, and the used cutting tool 36 is detached from the mounting flange 42.

Next, the replacement cutting insert 36 held by the holding portion 150B of the replacement device 100 is attached to the attachment flange 42 (cutting insert attaching step). Fig. 12 (B) is a schematic diagram showing the exchanging apparatus 100 in the cutting tool mounting step.

In the cutting tool mounting step, first, the rotating portion 106 (see fig. 6 and the like) of the rotating mechanism 104 is rotated, so that the front surface 150a (see fig. 8a and the like) side of the holding portion 150B holding the cutting tool 36 for replacement faces the mounting flange 42.

Then, the replacement device 100 is moved toward the mounting flange 42, and the cutting insert 36 for replacement is disposed so that the boss portion 46 (see fig. 2) of the mounting flange 42 is inserted into the opening 36a (see fig. 2) of the cutting insert 36 for replacement. In this state, when the suction holding of the replacement cutting insert 36 by the holding portion 150B is released, the replacement cutting insert 36 is attached to the attachment flange 42.

Next, the holding portion 150B is separated from the mounting flange 42 (3 rd retracting step). Fig. 12 (C) is a schematic diagram showing the replacement device 100 in the 3 rd retraction step.

In the 3 rd retraction step, the multi-joint arm 90 (see fig. 4 and 5) moves the exchange device 100 to the side opposite to the mounting flange 42. Thereby, the holding portion 150B moves in a direction away from the mounting flange 42, and is separated from the replacement cutting insert 36 attached to the mounting flange 42.

Next, the nut 48 held by the nut holding portion 122 is attached to the attachment flange 42 (nut attaching step). Fig. 12 (D) is a schematic diagram showing the replacement device 100 in the nut mounting step.

In the nut attaching step, first, the rotating portion 106 (see fig. 6 and the like) of the rotating mechanism 104 is rotated, so that the nut holding portion 122 holding the nut 48 is opposed to the attachment flange 42. Further, the exchanging device 100 is moved toward the mounting flange 42, and the nut 48 is positioned at the tip end portion of the boss portion 46 (see fig. 2) of the mounting flange 42.

Then, the rotating member 130 (see fig. 6 and the like) is rotated by the rotation driving source 128, and the nuts 48 gripped by the plurality of gripping members 134 (see fig. 6 and the like) are rotated in the 2 nd direction (the direction in which the nuts 48 are tightened). As a result, the nut 48 is fastened to the boss portion 46 of the mounting flange 42 (see fig. 2) and mounted to the mounting flange 42. Thereby, the cutting tool 36 is clamped and fixed to the distal end portion of the spindle 34 by the mounting flange 42 and the nut 48.

Through the above process, replacement of the cutting tool 36 mounted on the mounting flange 42 is performed. The used cutting tool 36 held by the holding unit 150A is placed on the tool storage unit 204A of the stock unit 200.

In the above-described process, the attachment flange 42 and the exchanging apparatus 100 may be moved to and from each other by moving the cutting unit 30 (attachment flange 42). For example, in the 1 st evacuation step, the 2 nd evacuation step, and the 3 rd evacuation step, the replacement device 100 and the mounting flange 42 may be separated from each other by moving the cutting unit 30 in the Y-axis direction so as to be apart from the replacement device 100.

In addition, although the replacement of the cutting insert 36 attached to the attachment flange 42 has been described above, the replacement of the cutting insert 52 (see fig. 3) attached to the attachment flange 54 is also performed by the same procedure. However, when the cutting insert 52 is replaced, the pressing flange 62 is held by the holding portions 150A and 150B together with the cutting insert 52 as described above (see fig. 9B). That is, the cutting tool 52 and the pressing flange 62 are replaced instead of the replacement of the cutting tool 36.

In the case of replacing the cutting insert 52, the pressing flange 62 is held by the holding portion 150B and then the cutting insert 36 is held by the holding portion 150B in the replacement cutting insert holding step. Specifically, first, the holding portion 150B is opposed to the pressing flange 62 stored in the pressing flange storage portion 206 (see fig. 10 a), and the pressing flange 62 is held by the holding portion 150B.

Next, the holding portion 150B holding the pressing flange 62 is opposed to the replacement cutting tool 52 stored in the tool storage portion 204B (see fig. 10 a), and the pressing flange 62 is held by the holding portion 150B. At this time, the cutting insert 52 is held by the negative pressure of the suction source 160 acting on the cutting insert 52 through the through hole 62d (see fig. 9B) formed in the pressing flange 62.

As described above, the cutting apparatus 2 of the present embodiment includes the exchange apparatus 100 for exchanging the cutting tools 36 and 52 and the nuts 48 and 64. The replacement device 100 has the following configuration: the holding portions 150A, 150B that hold the cutting tools 36, 52 and the nut rotating portion 120 are coupled to the common rotating portion 106, and the front surface 150A of the holding portion 150A, the front surface 150A of the holding portion 150B, and the nut holding portion 122 are arranged to face the opposite side of the rotation axis 106a of the rotating portion 106 in a state separated from each other around the rotation axis 106a of the rotating portion 106.

When the exchanging apparatus 100 is used, the exchanging apparatus 100 can be significantly downsized compared to a case where the holding portions 150A, 150B and the nut rotating portion 120 are separately provided and the front surface 150A of the holding portion 150A, the front surface 150A of the holding portion 150B and the nut holding portion 122 are arranged so as to face the mounting flanges 42, 54 as in the related art. As a result, the increase in size of the cutting apparatus 2 is suppressed, and the degree of freedom in layout of the components of the cutting apparatus 2 is improved.

In addition, although the above description has been given of the case where the exchange device 100 exchanges the cutting tools 36 and 52 attached to the cutting unit 30, the exchange object of the exchange device 100 is not limited to the cutting tools 36 and 52. For example, the replacement device 100 may replace the used plates 19 and 21 (see fig. 10 a) disposed on the sub-table 26 (see fig. 1).

When trimming of the cutting tools 36, 52 is performed using the plate 19, cutting grooves are formed on the plate 19. When the cut grooves are formed in the entire plate 19, the used plate 19 is replaced with a replacement plate 19 (unused plate 19). Similarly, the plate 21 used for inspection of the cutting tools 36 and 52 is replaced with a replacement plate 21 (unused plate 21) at a predetermined timing.

Here, the holding portions 150A and 150B of the exchanging apparatus 100 can hold not only the cutting tools 36 and 52 but also plate-like members such as the plates 19 and 21. Therefore, the replacement of the plates 19 and 21 arranged on the sub-table 26 can be performed by the replacement device 100.

Fig. 13 (a) is a perspective view showing a holding portion 150A that holds the rectangular plate 19 (plate 19A).

Fig. 13 (a) shows a plate 19A having a size capable of covering the entire front surface 152a side of the frame 152. In fig. 13 (a), the outline of the plate 19A is indicated by a two-dot chain line.

When the plate 19A is held by the holding portion 150A, the pair of lips 154b of the elastic member 154 is brought into contact with the plate 19A. At this time, the holding portion 150A is disposed such that the entire elastic member 154 is covered with the plate 19A. Thereby, the space between the pair of lips 154b is sealed. Then, the plate 19A is suction-held by negative pressure of a suction source 160 (see fig. 8B) acting on the space between the pair of lips 154B.

The size and shape of the plate 19 held by the holding portion 150A are not limited to the above size and shape. Fig. 13 (B) is a perspective view showing the holding portion 150A that holds the rectangular plate 19 (plate 19B). Fig. 13 (B) shows a plate 19B having a longer side longer than the diameter of the frame 152 and a shorter side shorter than the diameter of the frame 152. However, the short side of the plate 19B is longer than the diameter of the elastic member 154.

When the plate 19B is held by the holding portion 150A, the pair of lips 154B of the elastic member 154 is brought into contact with the plate 19B. At this time, the holding portion 150A is disposed such that the entire elastic member 154 is covered with the plate 19B. Thereby, the space between the pair of lips 154b is sealed. Then, the plate 19B is suction-held by negative pressure of a suction source 160 (see fig. 8B) acting on the space between the pair of lips 154B.

However, the manner in which the holding portion 150A holds the plate 19 is not limited to the above. For example, the plate 19 may be held by the holding portion 150A without contacting the lip portion 154 b. In this case, the consumption of the lip 154b due to the contact of the plate 19 with the lip 154b can be prevented.

For example, the holding portion 150A may be configured such that the tips of the pair of lips 154b are not projected from the front surface 152a of the frame 152 but are disposed inside the 1 st groove 152c from the front surface 152 a. In this case, the holding portion 150A can hold the plate 19A so that the lip portion 154b does not contact the plate 19A ((a) of fig. 13).

Specifically, the holding portion 150A is disposed such that the entire 1 st groove 152c is covered with the plate 19A. At this time, the plate 19A is supported by the front surface 152a of the frame 152 and does not contact the lip 154 b. In this state, when a negative pressure from the suction source 160 (see fig. 8B) is applied to the 1 st groove 152c, the plate 19A is sucked and held.

The holding portion 150A may have a mechanism for ejecting a gas such as air and holding the plate 19 in a non-contact manner by the bernoulli effect. In this case, as shown in fig. 13 (B), even when the plate 19B having a size and a shape that cannot cover the entire 1 st groove 152c is used, the plate 19B can be held by the holding portion 150A without bringing the plate 19B into contact with the lip portion 154B.

In addition, fig. 13 (a) and 13 (B) show a case where the plate 19 is held by the holding portion 150A, but the holding portion 150B can similarly hold the plate 19. The holding portions 150A and 150B can hold the plate 21, as with the plate 19.

Next, a specific example of a plate replacement method for replacing a plate disposed on the sub-table 26 of the cutting apparatus 2 will be described. In the following, a method of replacing the plate 19 used for dressing the cutting tools 36 and 52 will be described as an example.

First, the replacement plate 19 is placed on the placement surface 202a of the placement portion 202 of the stock unit 200 (see fig. 10 a) (preparation step). Specifically, the plate storage portion 208 fixed to the mounting surface 202a of the mounting portion 202 stores the replacement plate 19 (unused plate 19). The reservoir unit 200 supplemented with the replacement plate 19 is stored in the container 8 (see fig. 1).

Then, the storage unit 200 is pulled out from the container 8 by the 1 st conveyance unit 72, and conveyed to the lid 78 in the closed state. Thus, the plate 19 for replacement is prepared on the cover 78. The storage unit 200 may be disposed on the pair of rails 16 or the chuck table 22.

Next, the replacement plate 19 placed on the placement surface 202a of the placement unit 202 is held by the holding unit 150B of the replacement device 100 (replacement plate holding step). Fig. 14 (a) is a schematic diagram showing the replacing apparatus 100 in the replacing plate holding step.

In the plate replacement holding step, first, the replacement device 100 is moved by the lifting mechanism 86 and the articulated arm 90 (see fig. 4 and 5) and placed on the placement portion 202 held by the lid 78 or the like. Further, the frame 110 is rotated by the rotation mechanism 104 (see fig. 6 and the like), and the holding portion 150B is opposed to the placement surface 202a of the placement portion 202.

Next, the replacing device 100 is lowered, and the holding portion 150B is brought into contact with the replacing plate 19 disposed on the mounting surface 202a of the mounting portion 202. Then, the replacement plate 19 is sucked and held by the holding portion 150B.

Then, the exchange device 100 is raised, and the holding portion 150B is moved in a direction away from the mounting surface 202a of the mounting portion 202. Thereby, the replacement plate 19 is lifted up by the holding portion 150B.

Next, the used plate 19 held by the sub table 26 is held by the holding part 150A of the exchanging apparatus 100 (used plate holding step). Fig. 14 (B) is a schematic diagram showing the replacement device 100 in the used-up board holding step.

In the used plate holding step, first, the replacement device 100 is moved by the lifting mechanism 86 and the articulated arm 90 (see fig. 4 and 5), and the replacement device 100 is disposed on the sub table 26 on which the used plate 19 is disposed. Further, by rotating the rotating portion 106 (see fig. 6 and the like) of the rotating mechanism 104, the holding portion 150A is opposed to the sub-table 26.

Then, the exchange device 100 is moved toward the sub-table 26, and the holding portion 150A is brought into contact with the used plate 19 held by the sub-table 26. Then, the used plate 19 is sucked and held by the holding portion 150A.

Next, the holding unit 150A is separated from the sub-table 26 (retreat step). Fig. 14 (C) is a schematic diagram showing the replacement device 100 in the retraction step.

In the retreat step, the replacement device 100 is raised by the lift mechanism 86 (see fig. 4 and 5), and the replacement device 100 is moved to the side opposite to the sub-table 26. Thus, the holding portion 150A moves in a direction away from the sub-table 26 while holding the used plate 19, and the used plate 19 is lifted.

Next, the replacement plate 19 held by the holding portion 150B of the replacement device 100 is placed on the sub-table 26 (placing step). Fig. 14 (D) is a schematic diagram showing the replacement device 100 in the mounting step.

In the mounting step, first, the rotating portion 106 (see fig. 6 and the like) of the rotating mechanism 104 is rotated, so that the holding portion 150B holding the replacement plate 19 faces the sub table 26. Then, the replacing device 100 is moved to the sub table 26 side, and the plate 19 for replacement is positioned on the sub table 26. Thereafter, when the suction holding of the replacement plate 19 by the holding portion 150B is released, the replacement plate 19 is placed on the plate 19.

Through the above steps, the plate 19 disposed on the sub table 26 is replaced. The used plate 19 held by the holding portion 150A is placed on the plate storage portion 208 of the stock unit 200. In addition, although the replacement of the plate 19 is described above, the replacement of the plate 21 can be performed in the same manner even when the plate 21 is placed on the sub-table 26.

In the above description, an example is described in which the stock unit 200 (see fig. 10 a) having the placement portion 202 on which the various tools (the cutting tools 36 and 52, the pressing flange 62, the plates 19 and 21, and the like) used in the cutting apparatus 2 are placed is stored in the container 8 (see fig. 1) and is conveyed to the lid 78 (see fig. 1) and the like. However, the storage method of the cutting tools 36 and 52 is not limited to this.

Fig. 15 is a perspective view showing the cutting apparatus 2 provided with the stock unit 250. The cutting apparatus 2 shown in fig. 15 includes a stock unit 250 instead of the container 8 (see fig. 1), and the stock unit 250 is provided in the vicinity of the replacement unit 76 and stores various tools used in the cutting apparatus 2. For example, the reservoir unit 250 is disposed in a region adjacent to the opening 4b of the base 4.

The stock unit 250 stores tools such as the cutting tools 36 and 52, the pressing flange 62, and the plates 19 and 21 (see fig. 10 a) used in the cutting apparatus 2. Specifically, the stock unit 250 includes a rotary mounting unit (mounting table) 252 on which various kinds of tools are mounted.

Fig. 16 is a perspective view showing a magazine unit 250 having a rotary type placing portion 252. For example, the mounting portion 252 is a plate-shaped member formed in a disc shape, and the upper surface of the mounting portion 252 constitutes a flat mounting surface 252a on which various kinds of tools are mounted.

A cutting tool or the like is mounted on the mounting surface 252a of the mounting portion 252. Fig. 16 shows, as an example, a case where the cutting tool 52 and the pressing flange 62 are placed on the placement surface 252a of the placement portion 252.

A plurality of tool storage portions 254 for storing the cutting tools 52 and a pressing flange storage portion 256 for storing the pressing flange 62 are fixed to the mounting surface 252a of the mounting portion 252. The cutter storage portion 254 and the pressing flange storage portion 256 are configured similarly to the cutter storage portion 204 and the pressing flange storage portion 206 shown in fig. 10 (a), respectively. The cutter storage portion 254 and the pressing flange storage portion 256 are arranged at substantially equal intervals along the circumferential direction of the placement portion 252.

A rotating portion (shaft) 258 that rotates by power transmitted from a rotation driving source (not shown) such as a motor is connected to the lower surface side of the center portion of the mounting portion 252. When the rotation portion 258 is rotated by the rotation driving source, the mounting portion 252 rotates about a rotation axis substantially parallel to the Z axis.

A reading unit 260 is provided below the mounting portion 252, and the reading unit 260 reads an identification mark attached to the cutting tool 52 or the like. For example, an identification mark (see the identification mark 212 in fig. 10 (B)) including information on the cutting insert 52 is attached to the cutting insert 52. The cutting insert 52 is accommodated in the insert storage portion 254 such that the surface to which the identification mark is added faces the placement surface 252 a.

The reading unit 260 is configured by, for example, a visible light camera, an infrared camera, or the like, and reads the identification mark attached to the cutting tool 52 through the placing unit 252 and the tool storage unit 254. Therefore, the material of the placing unit 252 and the tool storage 254 is selected according to the type of the reading unit 260.

For example, when the reading unit 260 is a visible light camera, the entire or a part of the placing unit 252 and the tool storage 254 is configured by a member that transmits visible light. Specifically, as the mounting portion 252, a substrate made of a transparent material such as plastic or glass (e.g., quartz glass or borosilicate glass) can be used. As the tool storage section 254, a transparent casing made of plastic or the like can be used.

However, the material of the mounting portion 252 and the tool storage portion 254 can be changed as appropriate depending on the type of the reading unit 260. For example, when the reading unit 260 is an infrared camera, the placing unit 252 and the tool storage 254 are configured by members that transmit infrared rays.

The reading unit 260 is disposed directly below one of the tool storage sections 254. Then, the reading unit 260 reads the identification mark attached to the cutting tool 52 stored in the tool storage 254 disposed directly above the reading unit 260.

Further, by rotating the placing unit 252, the tool storage 254 disposed directly above the reading unit 260 can be changed. This makes it possible to read the identification mark attached to any of the cutting tools 52 placed on the placement unit 252. The information of the identification mark read by the reading unit 260 is output to the control unit 82 (see fig. 15).

The reading unit 260 may be disposed above the mounting portion 252. In this case, the cutting insert 52 is housed in the insert storage portion 254 so that the face to which the identification mark is added is exposed upward.

For example, when the cutting tool 52 is replaced, the replacement cutting tool 52 and the pressing flange 62 are prepared in the stock unit 250. Then, the replacing unit 76 holds the cutting tool 52 for replacement and the pressing flange 62 stored in the stock unit 250 by the replacing device 100 (see fig. 9B).

At this time, the control unit 82 controls the replacement unit 76 based on information included in the identification mark attached to the cutting tool 52, and holds the predetermined cutting tool 52 in the replacement device 100. This enables selection of a desired cutting insert 52 as a replacement cutting insert 52. Then, the used cutting tool 52 and the pressing flange 62 attached to the cutting unit 30 are replaced with a replacement cutting tool 52 and a replacement pressing flange 62 (see fig. 11 a to 12D).

The plate storage portions 208 and 210 shown in fig. 10 (a) may be fixed to the mounting surface 252a of the mounting portion 252. In this case, the plates 19 and 21 for replacement are also stored in the stock unit 250. The replacement unit 76 can hold the replacement plates 19 and 21 stored in the stock unit 250 and replace the used plates 19 and 21 placed on the sub-table 26 (see fig. 14a to 14D).

The structure, method, and the like of the above embodiments can be modified and implemented as appropriate within a scope not departing from the object of the present invention.