阅读说明：本技术 电子管的制造方法 (Method for manufacturing electron tube ) 是由 小玉刚史 河野泰行 原真一 大桥一登 于 2019-03-25 设计创作，主要内容包括：准备由绝缘性材料形成的第一部件、和排列设置有随着向前端去而变窄并可拆装地保持着导电性部件的凸部的夹具,将第一部件和夹具的至少任一者加热到第一部件可熔融变形的温度。在使第一部件与多个凸部相对的状态下,以将多个凸部嵌入第一部件的方式使夹具与第一部件接触后,取下夹具,形成包括第一部件和多个导电性部件的中间体,其中第一部件与多个凸部对应地形成有随着向开口侧去而变宽的多个凹部,多个导电性部件贯通该第一部件而突出到凹部内。准备第二部件,封闭多个凹部的开口,以形成进行电子放出的多个内部空间的方式将第二部件气密接合到中间体,而形成接合体。(A first member made of an insulating material and a jig having projections arranged in line, the projections being narrowed toward the tip and detachably holding a conductive member are prepared, and at least either the first member or the jig is heated to a temperature at which the first member is melt-deformable. The jig is brought into contact with the first member so that the plurality of protrusions are fitted into the first member in a state where the first member is opposed to the plurality of protrusions, and then the jig is removed to form an intermediate body including the first member in which a plurality of recesses are formed so as to widen toward the opening side in correspondence with the plurality of protrusions and a plurality of conductive members which penetrate the first member and protrude into the recesses. The second member is prepared, and the second member is hermetically bonded to the intermediate body so as to form a plurality of internal spaces for electron emission, thereby forming a bonded body.)

1. A method of manufacturing an electron tube, comprising:

a first step of preparing: a first member formed of an insulating material; and a jig having a plurality of protrusions arranged in a row, the protrusions being narrowed toward a tip end thereof and detachably holding the conductive member, and heating at least one of the first member and the jig to a temperature at which the first member is melt-deformable;

a second step of, after the first step, bringing the jig into contact with the first member so that the plurality of convex portions are fitted into the first member in a state where the first member is opposed to the plurality of convex portions, and then removing the jig to form an intermediate body including the first member in which a plurality of concave portions which widen toward an opening side are formed in correspondence with the plurality of convex portions, and a plurality of conductive members which penetrate the first member and protrude into the concave portions; and

and a third step of preparing a second member after the second step, sealing the openings of the plurality of concave portions, and airtightly bonding the second member to the intermediate body so as to form a plurality of internal spaces for electron emission, thereby forming a bonded body.

2. The method of manufacturing an electron tube as claimed in claim 1, characterized in that:

the method further includes a fourth step of cutting the joined body into a plurality of electron tubes so as to have at least one of the internal spaces after the third step.

3. A method of manufacturing an electron tube as claimed in claim 1 or 2, characterized in that:

the side surface of the convex portion of the jig is continuously inclined so that the convex portion becomes narrower as going to the front end side.

4. A method of manufacturing an electron tube as claimed in any one of claims 1 to 3, characterized in that:

the convex portion of the jig has a holding concave portion that holds the other end side of the conductive member in a state where one end side of the conductive member is projected from the convex portion,

a gap is formed at least in a part between the other end side of the conductive member held by the holding recess and the side surface of the holding recess.

5. The method of manufacturing an electron tube as claimed in claim 4, wherein:

the other end side of the conductive member held by the holding recess portion has an enlarged portion that widens toward the other end side,

a gap is formed at least partially between the enlarged portion and a side surface of the holding recess.

6. The method of manufacturing an electron tube as claimed in claim 5, wherein:

the side surface of the enlarged portion is continuously inclined so that the conductive member becomes wider toward the other end side of the conductive member.

7. The method of manufacturing an electron tube as claimed in any one of claims 1 to 6, characterized in that:

the clamp detachably holds the power feeding member around the convex portion,

in the second step, the intermediate body further including the power feeding member is formed by bringing the jig into contact with the first member so that the power feeding member is further embedded in the first member,

in the third step, a counter electrode member is provided on the second member so as to face the conductive member protruding into the recess, and the counter electrode member is electrically connected to the power feeding member.

8. The method of manufacturing an electron tube as claimed in any one of claims 1 to 7, characterized in that:

the second member is formed of an insulating material.

9. The method of manufacturing an electron tube as claimed in any one of claims 1 to 8, characterized in that:

at least one of a concave portion, a convex portion, and a rough surface portion is formed on at least a part of a surface of the convex portion constituting the jig.

10. The method of manufacturing an electron tube as claimed in any one of claims 1 to 9, characterized in that:

further comprising a step of pressing the opposite side of the first member in contact with the jig by a pressing member after the first step,

at least one of a concave portion, a convex portion, and a rough portion is formed in a contact region of the pressing member, the contact region being in contact with the first member.

11. The method of manufacturing an electron tube as claimed in any one of claims 1 to 10, characterized in that:

in the second step, one end of the conductive member is exposed from the first member and the conductive member is fitted into the first member, or the first member is polished until one end of the conductive member is exposed from the first member, so that the conductive member penetrates the first member in the intermediate body.

Technical Field

One aspect of the present invention relates to a method of manufacturing an ELECTRON TUBE (ELECTRON TUBE).

Background

As a conventional technique related to a method for manufacturing an electron tube, for example, techniques described in patent documents 1 to 3 are known. Jp 2013-19719 a describes a flame sensor including a lower cover provided with a chamber by etching, an upper cover joined to the lower cover so as to close the chamber, and an electrode disposed in the chamber. U.S. Pat. No. 5500531 describes a discharge-type ultraviolet detector including a silicon substrate having a cavity formed by etching, a glass substrate provided on the silicon substrate, and electrodes provided in the cavity.

In japanese patent No. 3470077, there is described a discharge light emitting device including: a substrate and a transparent substrate which are overlapped with each other; and internal electrodes and external electrodes formed on the substrate and the transparent substrate. In the discharge light emitting device described in japanese patent No. 3470077, a discharge space is formed between a substrate and a transparent substrate.

Disclosure of Invention

In recent years, as a method for manufacturing an electron tube as described above, for example, a method capable of easily manufacturing an internal structure of the electron tube has been demanded in the expansion of applications in various fields of the electron tube.

An object of one aspect of the present invention is to provide a method of manufacturing an electron tube capable of easily manufacturing an internal structure of the electron tube.

The method for manufacturing an electron tube of the present invention includes: a first step of preparing: a first member made of an insulating material, and a jig (jig) having a plurality of protrusions arranged in a row, the protrusions being narrowed toward the tip and detachably holding the conductive member, and at least either the first member or the jig being heated to a temperature at which the first member is melt-deformable; a second step of bringing a jig into contact with a first member in a state where the first member is opposed to a plurality of projections, so that the plurality of projections are fitted into the first member, and then removing the jig to form an intermediate body including the first member and a plurality of conductive members, wherein the first member has a plurality of recesses formed therein corresponding to the plurality of projections, the recesses being widened toward an opening side, and the plurality of conductive members penetrate the first member and protrude into the recesses; and a third step of preparing a second member after the second step, sealing the openings of the plurality of concave portions, and hermetically bonding the second member to the intermediate body so as to form a plurality of internal spaces for electron emission, thereby forming a bonded body.

In the method of manufacturing the electron tube, the plurality of concave portions can be collectively formed by using the jig, and the conductive member penetrating the first member among the plurality of concave portions protrudes into the inside thereof, and the internal structure having the internal space constituted by the concave portions can be collectively manufactured. That is, the internal structure of the electron tube can be easily manufactured.

The method of manufacturing an electron tube according to one aspect of the present invention may further include a fourth step of cutting the joined body into a plurality of electron tubes so as to have at least one internal space after the third step. In this case, a plurality of electron tubes having a predetermined internal structure can be stably manufactured.

In the method of manufacturing an electron tube according to the aspect of the present invention, the side surface of the convex portion of the jig may be continuously inclined so that the convex portion becomes narrower toward the front end side. In this case, the first member and the jig can be released from the mold while suppressing damage to the jig, and the internal structure of the electron tube can be stably manufactured.

In the method of manufacturing an electron tube according to the aspect of the present invention, the convex portion of the jig may have a holding concave portion that holds the other end side of the conductive member in a state where the one end side of the conductive member is projected from the convex portion, and a gap may be formed at least in part between the other end side of the conductive member held by the holding concave portion and a side surface of the holding concave portion. In this case, the first member can be fitted into the gap to cover the conductive member, and therefore, even when the conductive member is protruded, the conductive member can be stably fixed.

In the method of manufacturing an electron tube according to the aspect of the present invention, the other end side of the conductive member held by the holding recess portion may have an enlarged portion that widens toward the other end side, and a gap may be formed at least in part between the enlarged portion and the side surface of the holding recess portion. In this case, the first member can be fitted into the gap to cover the enlarged portion, so that the contact area between the conductive member and the first member can be enlarged. This makes it possible to stably fix the conductive member even when the conductive member is protruded.

In the method of manufacturing an electron tube according to the aspect of the present invention, the side surface of the enlarged portion may be continuously inclined so that the conductive member becomes wider toward the other end side of the conductive member. In this case, it is easy to cover the side surface of the enlarged portion with the first member without a gap.

In the method of manufacturing an electron tube according to the aspect of the present invention, the power feeding member may be detachably held by a jig around the convex portion, the jig may be brought into contact with the first member so that the power feeding member is further fitted into the first member in the second step to form an intermediate body including the power feeding member, and the counter electrode member may be provided on the second member so as to face the conductive member protruding into the concave portion in the third step, and the counter electrode member may be electrically connected to the power feeding member. In this case, the path for feeding to the counter electrode member on the second member side can be formed without requiring a separate process.

In the method of manufacturing an electron tube according to the aspect of the present invention, the second member may be formed of an insulating material. In this case, the withstand voltage performance in the internal space of the electron tube to be manufactured can be improved.

In the method of manufacturing an electron tube according to the aspect of the present invention, at least one of the concave portion, the convex portion, and the rough portion may be formed on at least a part of a surface of the convex portion constituting the jig. In this case, at least one of the concave portion, the convex portion, and the rough portion can be formed on the surface constituting the internal space, and the creepage distance in the internal space can be increased.

In the method of manufacturing an electron tube according to the aspect of the present invention, the method may further include a step of pressing the first member on the side opposite to the side in contact with the jig by a pressing member after the first step, and at least one of a concave portion, a convex portion, and a rough surface portion may be formed in a contact region of the pressing member in contact with the first member. In this case, at least one of the concave portion, the convex portion, and the rough surface portion can be formed on the outer surface of the first member, and the creeping distance of the outer surface of the electron tube can be increased.

In the method of manufacturing an electron tube according to the aspect of the present invention, in the second step, the one end of the conductive member may be exposed from the first member and the conductive member may be fitted into the first member, or the first member may be polished until the one end of the conductive member is exposed from the first member, so that the conductive member penetrates the first member in the intermediate body. In this case, a structure in which the conductive member penetrates the first member can be specifically realized.

Drawings

Fig. 1 is a sectional view of an electron tube of a first embodiment.

Fig. 2 is an exploded perspective view of the electron tube of fig. 1.

Fig. 3 is a plan view of a jig used in the method of manufacturing the electron tube of fig. 1.

Fig. 4A is a partial sectional view illustrating a method of manufacturing the electron tube of fig. 1.

Fig. 4B is a partial sectional view showing the next step of fig. 4A.

Fig. 5A is a partial sectional view showing the next step of fig. 4B.

Fig. 5B is a partial sectional view showing the next step of fig. 5A.

Fig. 6A is a partial sectional view showing the next step of fig. 5B.

Fig. 6B is a partial sectional view showing the next step of fig. 6A.

Fig. 6C is a partial sectional view showing the next step of fig. 6B.

Fig. 7A is a partial sectional view showing the next step of fig. 6C.

Fig. 7B is a partial sectional view showing the next step of fig. 7A.

Fig. 7C is a partial sectional view showing the next step of fig. 7B.

Fig. 8A is a partial sectional view showing the next step of fig. 7C.

Fig. 8B is a partial sectional view showing the next step of fig. 8A.

Fig. 9 is a partial sectional view illustrating a method of manufacturing an electron tube of the second embodiment.

Fig. 10A is a partial cross-sectional view illustrating a method of manufacturing an electron tube of the third embodiment.

Fig. 10B is another partial cross-sectional view illustrating a method of manufacturing the electron tube of the third embodiment.

Fig. 11A is a partial cross-sectional view illustrating a method of manufacturing an electron tube of the fourth embodiment.

Fig. 11B is another partial cross-sectional view illustrating a method of manufacturing the electron tube of the fourth embodiment.

Fig. 12A is a partial cross-sectional view illustrating a method of manufacturing an electron tube of the fifth embodiment.

Fig. 12B is another partial cross-sectional view illustrating a method of manufacturing the electron tube of the fifth embodiment.

Fig. 13A is a partial cross-sectional view illustrating a method of manufacturing an electron tube according to a modification of the fifth embodiment.

Fig. 13B is another partial cross-sectional view for explaining a method of manufacturing the electron tube according to the modification of the fifth embodiment.

Fig. 14A is a cross-sectional view of an electron tube of a first modification.

Fig. 14B is a cross-sectional view of an electron tube of a second modification.

Fig. 15A is a cross-sectional view of an electron tube of a third modification.

Fig. 15B is a cross-sectional view of an electron tube of a fourth modification.

Fig. 15C is a cross-sectional view of an electron tube of a fifth modification.

Detailed Description

One embodiment is described in detail below with reference to the drawings. In the following description, the same or corresponding elements are denoted by the same reference numerals, and redundant description thereof is omitted. In addition, the dimensions in the following description do not necessarily correspond to those in the drawings.

[ first embodiment ]

As shown in fig. 1 and 2, the electron tube 1 is a discharge tube in which a discharge gas such as neon or hydrogen is sealed and which functions as a light receiving element (energy detecting element). The electron tube 1 is used as an ultraviolet detector (flame sensor) for detecting ultraviolet rays using a photoelectric effect and a discharge phenomenon. The electron tube 1 includes: a housing 2 having an inner space R hermetically sealed; and a cathode K and an anode a as electrodes for receiving light in the internal space R. The electron tube 1 has a rectangular parallelepiped outer shape and has dimensions of, for example, 10mm × 10mm × 5 mm.

The housing 2 has a main body portion 5 and a lid portion 6. The case 2 has a structure in which the main body portion 5 and the lid portion 6 are hermetically joined by the sealing portion S and the discharge gas is sealed in the internal space R. The main body 5 is made of an insulating material, for example, quartz, glass, or ceramic. The main body portion 5 includes a first plate-like portion 7 and a side wall portion 8 provided on the first plate-like portion 7. The first plate-like portion 7 has a rectangular flat plate shape. The thickness of the first plate-like portion 7 is, for example, 1 mm. The side wall portion 8 is erected on the edge of the first plate-like portion 7 and has a rectangular frame shape. In the main body 5, a recess 9 constituting an internal space R is formed by an area surrounded by the side wall portion 8. In the internal space R, electrons are emitted.

The recess 9 expands from the bottom surface 9a (inner surface of the first plate-like portion 7) toward the opening 9 b. The recess 9 is a square frustum-shaped space. The depth of the recess 9 is, for example, 2.5 mm. The opening 9b of the recess 9 has a rectangular shape of, for example, 7mm × 7 mm. The 4 side surfaces 9c of the recess 9 are continuously inclined (to be smooth surfaces) so that the recess 9 expands toward the opening 9 b. The inclination angle θ 1 of the side surface 9c with respect to the direction perpendicular to the bottom surface 9a as a reference (0 °) may be 3 ° to 10 °, or may be 5 °. In other words, when the electron tube 1 is viewed in a cross section along the standing direction of the side wall portion 8 (when the electron tube 1 is viewed from the direction perpendicular to the paper surface), the angle θ 2 formed by the bottom surface 9a and the side surface 9c may be 93 ° to 100 °, or may be 95 °.

The lid 6 is hermetically joined to the body 5 by the seal S so as to close the opening 9b of the recess 9. An inner space R is defined by the inner surface of the lid 6, the sealing portion S, and the bottom surface 9a and the side surface 9c of the recess 9. The lid 6 is made of an insulating material having light transmittance (ultraviolet light transmittance, energy transmittance), and is made of, for example, quartz, ultraviolet light-transmitting glass, or the like. The cover 6 includes a second plate-like portion 10 (here, the cover 6 is the second plate-like portion 10). The second plate-like portion 10 has a rectangular flat plate shape. The thickness of the second plate-like portion 10 is, for example, 1 mm. The second plate-like portion 10 is fixed to the side wall portion 8 so as to face the first plate-like portion 7. The first base film 15, the sealing material 16, and the second base film 17 constituting the sealing portion S are positioned between the second plate-like portion 10 and the side wall portion 8 in this order from the side wall portion 8 toward the second plate-like portion 10. In fig. 2, the first base film 15 and the second base film 17 are not shown.

The first base film 15 is a film that improves the adhesion between the sealing material 16 and the side wall portion 8. The second base film 17 is a film that improves the adhesion between the sealing material 16 and the second plate-like portion 10. As the first base film 15 and the second base film 17, Cr (chromium)/Ni (nickel), Ti (titanium)/Pt (platinum)/Au (gold), or the like can be used. The sealing member 16 is a member for hermetically sealing the space between the side wall portion 8 and the second plate-like portion 10. As the sealing material 16, solder such as In (indium) or AuSn (gold tin), glass frit, or the like can be used. The first base film 15, the sealing material 16, and the second base film 17 are rectangular frames provided on the peripheral edge of the recess 9 as viewed from the opening 9b side of the recess 9.

The cathode (electrode) K is composed of a photoelectron emitting portion 14 described later. The photoelectron emitting portion 14 is held by the distal end portion of the penetrating member 3, and can be arranged at a desired position in the internal space R and electrically connected to the penetrating member 3. The photoelectron emitting portion 14 functions as a photoelectron emitting electrode by applying a desired potential to the penetrating member 3.

The penetrating member 3 is a conductive member penetrating the first plate-like portion 7 of the body 5. The penetration member 3 is formed of, for example, Kovar alloy (Kovar alloy). The penetrating member 3 has a columnar portion 3a at its base end side, and the columnar portion 3a has a substantially constant diameter and extends in a substantially columnar shape. The penetrating member 3 has a large diameter portion 3b on the distal end side thereof, and the large diameter portion 3b has a larger diameter than the columnar portion 3 a. The root end side of the large diameter portion 3b has a diameter expanding toward the tip end sideLarge (widened) enlarged portion 3b₁. Ratio-enlarged portion 3b₁ A holding part 3b having a cylindrical shape near the front end₂ A holding portion 3b₂The photoelectron emitting portion 14 is held at the distal end surface thereof. The length of the columnar portion 3a is larger than the thickness of the first plate-like portion 7.

The penetrating member 3 is exposed to an external space (space outside the electron tube 1) on the root end side (root end surface) of the columnar portion 3a in the same plane as the outer side surface of the first plate-like portion 7, and the large diameter portion 3b and a part of the tip end side of the columnar portion 3a are fixed to the first plate-like portion 7 so as to protrude from the bottom surface 9a of the recess 9 toward the cap 6 side in the internal space R. That is, the penetrating member 3 has an internal space protruding portion 11 protruding from the central portion of the bottom surface 9a of the recess 9 into the internal space R, and the internal space protruding portion 11 is constituted by the large diameter portion 3b and a part of the front end side of the columnar portion 3 a. The inner space protrusion 11 has an enlarged portion 3b that enlarges (widens) in diameter toward the distal end side₁Expanded part 3b₁Is formed by a part of the root end side of the large diameter portion 3 b.

Enlarged part 3b₁The side surfaces of (2) are continuously inclined (to be smooth surfaces) so that the penetrating member 3 becomes wider as going to the front end side. Enlarged part 3b₁Is in the shape of a truncated cone. Making the expanded part 3b in the protrusion 11 more than the inner space₁A part closer to the front end side is a holding part 3b₂. Holding part 3b₂Is constituted by a part of the tip end side of the large diameter portion 3 b. Holding part 3b₂Having an enlarged portion 3b or more₁Diameter of (3), enlarged part 3b₁Has a specific enlargement portion 3b₁The diameter of the portion closer to the root end side (the diameter of the columnar portion 3 a) is larger. That is, the inner space protrusion 11 is larger than the enlarged portion 3b₁Holding part 3b near the front end₂Is larger than the enlarged portion 3b₁The diameter of the portion closer to the root end side (the diameter of the columnar portion 3 a). For example, the holding portion 3b of the penetrating member 3₂Has a diameter ofRatio-enlarged portion 3b₁The diameter of the portion closer to the root end (the straight portion of the columnar portion 3 a)Diameter) ofThe entire length of the penetrating member 3 was 3 mm. The through member 3 may be said to have a mushroom shape, mainly as an enlarged portion 3b of the umbrella-shaped portion thereof₁And a holding part 3b₂Projecting into the inner space R.

At the holding part 3b₂The disk-shaped photoelectron emitting portion 14 functioning as a photoelectron emitting electrode is coaxially joined to the penetrating member 3. Unlike the penetrating member 3, the photoelectron emitting portion 14 does not need to consider adhesion to the main body portion 5. Therefore, as the material of the photoelectron emitting portion 14, a material focusing on the photoelectric conversion efficiency can be selected. The photoelectron emitting portion 14 is formed of Ni (nickel), for example. The photoelectron emitting portion 14 has, for example

Thickness 0.3 mm.

An inner space projection 11, an enlarged portion 3b₁And a specific expansion part 3b₁The periphery of the portion closer to the root end (a portion closer to the distal end of the columnar portion 3 a) is covered with the insulating portion 12. In other words, the holding part 3b of the inner space protrusion 11₂The other side portions are surrounded by the insulating portion 12. The insulating portion 12 is made of an insulating material, for example, quartz, glass, or ceramic. The insulating portion 12 of the present embodiment is formed integrally with the first plate-like portion 7 of the main body portion 5. The outer peripheral surface of the insulating portion 12 constitutes a side surface of a truncated cone, and is continuously inclined (so as to be a smooth surface) so as to decrease in diameter from the bottom surface 9a of the recess 9 toward the opening 9 b.

The anode (the other electrode) a is constituted by a counter electrode (counter electrode member) 4. The counter electrode 4 is provided on the lid 6 so as to face the penetrating member 3 and the photoelectron emitting portion 14. The counter electrode 4 is, for example, a mesh electrode having an opening through which light transmitted through the cover 6 can pass. The counter electrode 4 is opposed to the photoelectron emitting portion 14 on the penetrating member 3 with a predetermined distance. The predetermined length is, for example, a length obtained by adding the thicknesses of the first base film 15, the sealing material 16, and the second base film 17 to 0.2 mm. The counter electrode 4 is formed on the inner surface of the lid 6 by vapor deposition. The counter electrode 4 is a metal film of Al (aluminum) or Cr or the like. The counter electrode 4 is electrically connected to the power feeding unit 13.

The power feeding unit 13 is a means for feeding power to the counter electrode 4. The power feeding unit 13 is formed of a conductive material. The power supply unit 13 penetrates the body 5 so as not to be exposed to the internal space R. Specifically, the power feeding unit 13 is formed into a substantially cylindrical shape extending with a substantially constant diameter with the depth direction of the concave portion 9 as the axial direction, is buried in the first plate-like portion 7 and the side wall portion 8, and penetrates so as not to be exposed to the inside of the internal space R. The power feeding unit 13 is provided around the recess 9 in the main body 5. The feeding portion 13 is formed of, for example, kovar. The end surface of the power supply unit 13 on the side of the opening 9b (the end surface) is exposed on the end surface of the side wall portion 8 on the side of the cover 6 in the same plane as the end surface, and is electrically connected to the counter electrode 4 via the first base film 15, the sealing material 16, and the second base film 17. On the other hand, the power feeding portion 13 has a base end portion (base end surface) on the first plate-like portion 7 side exposed to the outside space (space outside the electron tube 1) in a state of being flush with the outer side surface of the first plate-like portion 7.

The operation principle of the electron tube 1 configured as described above will be described. Here, a description will be given of a mode in which, in a use state of the electron tube 1, a negative voltage is applied to the cathode K (photoelectron emitting portion 14) by supplying a negative voltage to the penetrating member 3, and the power feeding portion 13 is connected to the ground potential to take out a signal from the anode a (counter electrode 4) at the ground potential. In this way, when ultraviolet light enters the cathode K (photoelectron emitting portion 14) through the openings of the lid 6 and the counter electrode 4 in a state where a voltage is applied between the cathode K (photoelectron emitting portion 14) and the anode a (counter electrode 4), photoelectrons can be emitted from the cathode K (photoelectron emitting portion 14) (photoelectric effect). When the photoelectrons are attracted to the anode a (the counter electrode 4) by an electric field formed by a voltage applied between the cathode K (the photoelectron emitting portion 14) and the anode a (the counter electrode 4), they collide with the discharge gas molecules in the internal space R to ionize the discharge gas molecules. Of the electrons and positive ions generated by ionization, the electrons collide with other discharge gas molecules and are repeatedly ionized to generate secondary electrons, and the secondary electrons reach the anode a (the counter electrode 4). On the other hand, when the positive ions are accelerated toward the cathode K (photoelectron emitting portion 14) and incident on the cathode K (photoelectron emitting portion 14), electrons are emitted from the cathode K (photoelectron emitting portion 14). Then, when the electrons are attracted to the anode a (the opposite electrode 4), they collide with discharge gas molecules in the internal space R to ionize the discharge gas molecules. By repeating such electron multiplication, space discharge occurs, and a large current rapidly flows between the cathode K (photoelectron emitting unit 14) and the anode a (counter electrode 4). By detecting this current at the anode a (the counter electrode 4), ultraviolet rays can be detected. In this way, the electron tube 1 detects ultraviolet rays by utilizing the photoelectric effect and the discharge phenomenon.

Next, a method for manufacturing the electron tube 1 will be described with reference to fig. 3 to 8B. Fig. 4 to 8B show only a part of a cross section corresponding to the cross section along the line a-a of fig. 3 (corresponding to only one area of the electron tube 1), and actually, as shown in fig. 3, a total of 25 electron tubes 1 are manufactured in five rows and five columns, for example. In the description of the manufacturing method, the root end of the penetrating member (conductive member) 3 and the power feeding unit 13 is referred to as one end, and the tip end is referred to as the other end.

First, as shown in fig. 3 and 4A, the jig 20 is prepared. The jig 20 is a mold for molding the body 5. The jig 20 includes: a flat plate portion 21; convex portions 22 arranged in a matrix on surface 21a of flat plate portion 21; and a hole 23 formed around each convex portion 22 in the flat plate portion 21.

The convex portion 22 has a shape corresponding to the concave portion 9. The convex portion 22 has a square frustum shape that narrows toward the top surface 22t of the front end. The side surface 22s of the convex portion 22 is continuously inclined (so as to become a smooth surface) so that the convex portion 22 becomes narrower toward the distal end side. The top surface 22t corresponds to the bottom surface 9a of the recess 9, and the side surface 22s corresponds to the side surface 9c of the recess 9. The inclination angle θ 1m of the side surface 22s of the convex portion 22 with respect to the direction perpendicular to the surface 21a as a reference (0 °) may be 3 ° to 10 °, or 5 °. In other words, when the jig 20 is viewed in cross section along the standing direction of the convex portion 22 (when fig. 4A is viewed in a direction perpendicular to the paper surface), the angle θ 2m formed by the front surface 21a and the side surface 22s may be 93 ° to 100 °, or may be 95 °. The convex portion 22 has a holding concave portion 22a that holds the penetrating member 3 in a substantially central region of the upper surface thereof.

The holding recess 22a holds the other end side of the columnar portion 3a and the large diameter portion 3b of the penetrating member 3 by insertion in a state where one end side of the columnar portion 3a of the penetrating member 3 is projected from the projection 22. The depth of the retaining concave portion 22a is smaller than the protruding height of the convex portion 22. Bottom surface 22a of holding recess 22a₁ A holding part 3b which is the other end side of the side forming part 3b₂Corresponding bottom surface 22a₁And side 22a₂Formed in a cylindrical shape. The opening side of the retaining recess 22a is in the shape of a truncated cone with a diameter increasing toward the opening side, and is defined by a side surface 22a₃And (4) forming. That is, the side surface 22a on the opening side of the holding recess 22a₃The holding recess 22a is continuously inclined (so as to be a smooth surface) so as to become wider toward the opening side. The hole 23 is formed on the front surface 21a of the flat plate portion 21 at a position close to each convex portion 22. The holes 23 are formed in the same number as the projections 22 so as to form a pair with the projections 22. The hole 23 holds an end of the power feeding unit (power feeding member) 13. The hole 23 has a cylindrical shape corresponding to the power supply unit 13.

As shown in fig. 4B, the jig 20 is placed on a not-shown placing table so as to penetrate through the holding portion 3B, which is the other end side of the member 3₂The penetrating member 3 is coaxially inserted into the holding recess 22a of the jig 20 in a bottom side manner. That is, the bottom surface 22a of the holding recess 22a₁Holding part 3b for supporting penetrating member 3₂The other end surface of the through member 3 is disposed so that the other end side is erected in the holding recess 22 a. In addition, the holding portion 3b₂Is also held by the side surface 22a of the concave portion 22a₂The penetration member 3 can be held more stably in the holding recess 22 a. Thereby, the penetration member 3 is detachably held in the holding recess 22 a. The other end of the power supply unit 13 is coaxially inserted into the hole 23 of the jig 20, and the power supply unit 13 is disposed so that the other end is erected in the hole 23. Thereby, the power supply unit 13 is detachably held in the hole 23. At this time, the penetrating member 3 and one end surface of the power feeding unit 13, i.e., the power feeding unitThe end faces of the side from which the clip 20 protrudes are located at substantially the same position in their axial direction. A gap G is formed between the penetrating member 3 and the side surface of the holding recess 22 a. The gap G is a space existing around the penetrating member 3 in the holding recess 22 a. The gap G includes an enlarged portion 3b₁And a gap G1 with the inner side surface of the holding recess 22 a. In practice, in order to detachably hold the penetration member 3 in the holding recess 22a, the holding recess 22a and the holding portion 3b are provided₂There is also a little gap therebetween, and the gap portion is not included in the gap G.

Such a jig 20 is prepared, and a first member 30 made of an insulating material such as glass is prepared as shown in fig. 5A. The first member 30 has a flat plate shape, and has dimensions of, for example, 80mm × 80mm × 4 mm. The size of the first member 30 includes a cutting margin in a cutting step described later.

In a state where the first member 30 is held by a holding member, not shown, the first member 30 is disposed at a position facing the jig 20 holding the penetration member 3 and the power feeding unit 13, and the first member 30 is made to face the plurality of convex portions 22. At least either (here, both) of the fixture 20 and the first member 30 are then heated to a temperature at which the first member 30 is melt-deformable. For example, the jig 20, the first member 30, and the mounting table and the holding member are arranged in a temperature atmosphere in which the first member 30 can be melted and deformed. Therefore, the jig 20, the mounting table, and the holding member are made of materials that are not melted or deformed at a temperature at which the first member 30 is melted and deformed, and that have excellent stability at high temperatures. The temperature at which the first member 30 can be melt-deformed is, for example, a temperature above the glass transition temperature in the case where the first member 30 is formed of glass.

Next, as shown in fig. 5B, in a state where the first member 30 is opposed to the plurality of convex portions 22, the jig 20 is brought into close contact with the first member 30, and one of the jig 20 and the first member 30 is pressed against the other (or pressed against each other), whereby the plurality of convex portions 22, the penetration member 3, and the power supply unit 13 are fitted into the first member 30. At this time, the first member 30 also flows into and fills the enlarged portion 3b₁The surrounding gap G1. In addition, the first member 30 is substantially not held in the inflow statePart 3b₂Side surface and side surface 22a of₂So that the first member 30 does not flow into at least the holding portion 3b₂Another end face and the bottom face 22a of₁In the meantime. That is, at least the holding portion 3b of the penetrating member 3₂Is not covered with an insulating material. Therefore, when the photoelectron emitting portion 14 is bonded, which will be described later, the electrical connection with the photoelectron emitting portion 14 can be reliably ensured. Here, the penetrating member 3 and the power feeding unit 13 are embedded in the first member 30 so that one end surface thereof is embedded (so that one end surface is not exposed from the first member 30). Thereafter, as shown in fig. 6A, the jig 20 is removed (demolding). In other words, the first member 30, the penetrating member 3, and the power feeding unit 13 are taken out from the jig 20.

Next, as shown in fig. 6B, the first member 30, the through member 3, and the power supply unit 13 are arranged upside down so that the direction of the opening 9B of the recess 9 is changed by 180 °. The step arranged upside down is a step for convenience of explanation, and may not be present in an actual manufacturing step.

Next, as shown in fig. 6C, a surface 30a of the first member 30 on the opposite side to the opening 9b side of the recess 9 is polished until one ends of the penetrating member 3 and the power feeding unit 13 are exposed from the surface 30 a. Similarly, the other end of the power feeding portion 13 is polished to be flush with the surface 30b of the first member 30 on the opening 9b side of the recess 9. Thus, intermediate N1 was formed.

Intermediate N1 includes: a first member 30 having a plurality of concave portions 9 formed corresponding to the plurality of convex portions 22, wherein the plurality of concave portions 9 are widened toward the opening 9b side; a plurality of through members 3 penetrating the first member 30 and protruding into the recess 9; and a plurality of power feeding portions 13 penetrating the periphery of the recess 9 in the first member 30. In addition, a plurality of the present embodiment corresponds to, for example, 25 pieces of five rows and five columns as described above. The large diameter portion 3b (enlarged portion 3 b) which is the portion of the penetrating member 3 inserted into the holding recess 22a₁And a holding part 3b₂) And a part of the other end side of the columnar portion 3a, an inner space protruding portion 11 is formed. The expanded part 3b is formed by embedding₁The first member 30 of the gap G (see fig. 5A) of the surrounding gap G1 forms the insulating portion 12.

Then, as shown in fig. 7A, the holding portion 3b of the member 3 penetrates the recess 9₂The photoelectron emitting portion 14 serving as the cathode K is disposed coaxially with the penetrating member 3 and joined to the distal end surface on the side. The method of joining the photoelectron emitting portion 14 and the penetrating member 3 is not particularly limited, and for example, joining by laser welding, resistance welding, or soldering may be employed. Next, as shown in fig. 7B, a first base film 15 is formed on the surface 30B of the first member 30 at the peripheral edge of each recess 9. Then, as shown in fig. 7C, a sealing material 16 is stacked on each first base film 15.

Next, as shown in fig. 8A, the second member 40 is prepared. The second member 40 has a flat plate shape having dimensions of, for example, 80mm × 80mm × 1 mm. The second component 40 has a surface 40a of a size corresponding to the first component 30 in the intermediate body N1. On the surface 40a of the second member 40, counter electrodes (counter electrode members) 4 are vapor-deposited at a plurality of positions corresponding to the respective penetration members 3 (photoelectron emitting portions 14) and the respective power feeding portions 13 of the intermediate N1. That is, the counter electrode 4 is provided on the second member 40 so that the through members 3 (photoelectron emitters 14) and the power feeding portions 13 face each other when the second member 40 is airtightly bonded to the intermediate body N1 in the subsequent stage. Then, the second base film 17 is formed at a position opposing the sealing material 16.

Next, as shown in fig. 8B, in a gas atmosphere, the second member 40 is overlapped and hermetically joined with the intermediate N1 so that the plurality of concave portions 9 are hermetically sealed to form a plurality of internal spaces R in which the gas of the surrounding atmosphere is enclosed. At this time, the respective counter electrodes 4 are opposed to the respective penetrating members 3 (photoelectron emitting portions 14), and the respective counter electrodes are electrically connected to the respective power feeding portions 13. This gave a joined product N2.

Finally, the junction body N2 is cut for each of the plurality of internal spaces R. The joining body N2 is cut along the lines to be cut, for example, by setting the lines to be cut in a lattice shape so as to pass between the adjacent internal spaces R. The cutting method in the cutting step is not particularly limited, and various known cutting methods can be used. Thus, the joint body N2 is divided into a plurality of valves 1 in which the main body 5 is formed of the first member 30 and the lid 6 is formed of the second member 40. As described above, the manufacture of the electron tube 1 is completed.

As described above, in the method of manufacturing the electron tube 1, the jig 20 is used to collectively form the plurality of concave portions 9 in which the penetrating member (conductive member) 3 penetrating the first member 30 protrudes, and the internal structure having the internal space R formed by the concave portions 9 can be collectively manufactured. That is, the internal structure of the electron tube 1 can be easily manufactured.

The method for manufacturing the electron tube 1 includes a step of cutting the joined body N2 into a plurality of electron tubes 1 so as to have at least one internal space R after the step of forming the joined body N. This enables stable production of a plurality of electron tubes 1 having a predetermined internal structure.

In the method of manufacturing the electron tube 1, the side surface 22s of the projection 22 of the jig 20 is continuously inclined (to be a smooth surface) so that the projection 22 becomes narrower as the top surface 22t on the front end side goes. In this case, the jig 20 can be released while suppressing damage to the first member 30 and the jig 20. The internal structure of the electron tube 1 can be stably manufactured.

In the method of manufacturing the electron tube 1, the convex portion 22 of the jig 20 has the holding concave portion 22a, and the holding concave portion 22a inserts and holds the other end side of the penetrating member 3 in a state where one end side of the penetrating member 3 protrudes from the convex portion 22. A gap G is formed between the other end side of the penetrating member 3 inserted into the holding recess 22a and the side surface of the holding recess 22 a. In this case, the first member 30 is fitted into the gap G to cover the penetrating member 3, and therefore, even when the penetrating member 3 is protruded, the penetrating member 3 can be stably fixed. The gap G may be formed at least in a part between the penetrating member 3 and the side surface of the holding recess 22 a.

In the method of manufacturing the electron tube 1, the enlarged portion 3b of the penetrating member 3 inserted and held in the holding recess 22a₁And the side surface of the holding recess 22a, a gap G1 is formed. In this case, the expanded portion 3b can be covered by burying the first member 30 in the gap G1₁Therefore, the contact area between the penetrating member 3 and the first member 30 can be increased. Even when the penetrating member 3 is protruded, the stability can be improvedThe penetrating member 3 is fixed. Further, a gap G1 is formed in the enlarged portion 3b₁And at least a part of the side surface of the holding recess 22 a. In addition, the expansion part 3b can be used₁Suppressing the insulation part 12 from reaching the holding part 3b₂The other end face of (a) can ensure electrical connection with the photoelectron emitting portion 14.

In the method of manufacturing the electron tube 1, the enlarged portion 3b₁The side surfaces of (3) may be continuously inclined so that the penetrating member 3 becomes wider toward the other end side of the penetrating member 3. In this case, the first member 30 covers the enlarged portion 3b without a gap₁Becomes easy. Even when the penetrating member 3 is protruded, the penetrating member 3 can be fixed more stably.

In the method of manufacturing the electron tube 1, the jig 20 detachably holds the power feeding portion 13 around the convex portion 22. The clip 20 is brought into contact with the first member 30 so that the power feeding unit 13 is fitted into the first member 30, thereby forming an intermediate N1 including the power feeding unit 13. Then, the counter electrode 4 (counter electrode member) is provided on the second member 40 so as to face the penetrating member 3, and the counter electrode 4 is electrically connected to the power feeding unit 13. In this case, a power supply path to the counter electrode 4 on the second member 40 side can be formed without requiring a separate process.

In the method of manufacturing the electron tube 1, the second member 40 is formed of an insulating material. In this case, the withstand voltage performance in the internal space R of the electron tube 1 to be manufactured can be improved.

In the method of manufacturing the electron tube 1, the first member 30 is polished until one ends of the penetrating member 3 and the power feeding portion 13 are exposed from the first member 30. In this case, the structure in which the penetrating member 3 and the power supply unit 13 penetrate the first member 30 can be specifically realized.

In the electron tube 1, the through member 3 having the internal space protruding portion 11 is used to electrically connect the cathode K, so that the contact area with the case 2 in the internal space R can be reduced as compared with a case where, for example, a conductive film or the like provided along the inner wall surface of the case is used, and therefore, the withstand voltage performance in the internal space R can be improved. Further, since the recess 9 becomes wider toward the opening 9b, the body 5 can be easily released when molded by using the jig 20 (mold). Therefore, with the electron tube 1, the withstand voltage performance can be improved and the manufacturing can be easily performed.

In the electron tube 1, the main body portion 5 includes a first plate-like portion 7 and a frame-like side wall portion 8 provided on the first plate-like portion 7. The lid portion 6 includes a second plate-like portion 10 fixed to the side wall portion 8 and opposed to the first plate-like portion 7. The penetrating member 3 penetrates the first plate-like portion 7. According to this configuration, in the electron tube 1 having the case 2 in which the first plate-like portion 7 and the second plate-like portion 10 face each other, the penetrating member 3 can be stably fixed, and the electron tube 1 can be specifically and easily realized in a small size.

In the electron tube 1, the side surface 9c of the recess 9 is continuously inclined so that the recess 9 becomes wider as it goes to the opening 9b side. With this configuration, the main body 5 having the concave portion 9 of a predetermined shape can be stably formed.

In the electron tube 1, a part of the side surface of the inner space protruding portion 11 of the penetrating member 3 is covered with an insulating portion 12 formed of an insulating material. With this configuration, the exposure of the penetrating member 3 in the internal space R can be reduced, and the pressure resistance in the internal space R can be improved.

In the electron tube 1, the cathode K (photoelectron emitting portion 14) is held on the front end side of the internal space projection portion 11 of the penetration member 3, and the internal space projection portion 11 has an enlarged portion 3b which becomes wider as going to the front end side₁. With this configuration, the cross-sectional area of the cathode K (photoelectron emitting portion 14) held by the internal space protruding portion 11 on the distal end side can be increased (the holding portion 3b is provided)₂)。

In the electron tube 1, the enlarged portion 3b₁Is covered by an insulating part 12. With this configuration, the enlarged portion 3b in the internal space R can be reduced₁The pressure resistance in the internal space R is improved. On the other hand, the enlarged portion 3b can be used₁To prevent the insulation part 12 from reaching the holding part 3b₂The other end surface of (a) can reliably ensure electrical connection with the photoelectron emitting portion 14.

In the electron tube 1, the enlarged portion 3b₁To follow the front endThe side of the through member 3 is continuously inclined so as to widen. According to this structure, the enlarged part 3b is covered by the insulating part 12 without a gap₁The side surface of (3) is facilitated, and the pressure resistance in the internal space R can be easily improved.

The electron tube 1 further includes a counter electrode 4 provided on the cover 6 so as to face the through member 3, and the counter electrode 4 is electrically connected to a power feeding portion 13 penetrating the body 5 without being exposed to the internal space R. With this configuration, the power supply unit 13 electrically connected to the counter electrode 4 is less exposed to the inside space R, and the withstand voltage performance in the inside space R can be improved.

In the electron tube 1, the cover portion 6 is formed of an insulating material having translucency. With this configuration, the lid 6 can be configured as a light-receiving window in the internal space R, and the pressure resistance in the internal space R can be further improved.

In the present embodiment, the steps shown in fig. 4A to 5A constitute a first step. The steps shown in fig. 5B to 7C constitute a second step. The steps shown in fig. 8A to 8B constitute a third step. The step of cutting the joined body N2 for each of the plurality of internal spaces R constitutes a fourth step.

Second embodiment next, a second embodiment will be described. In the description of the second embodiment, differences from the first embodiment are described, and the same description is omitted.

As shown in fig. 9, the second embodiment differs from the first embodiment in that a first member 30X is used instead of the first member 30 (see fig. 5A) in the method for manufacturing the electron tube. The first member 30X is the same as the first member 30 except that it has a through hole 32 and a through hole 33 at positions facing the penetration member 3 and the power feeding unit 13. The inner diameter of the through hole 32 corresponds to the outer diameter of the columnar portion 3a of the penetrating member 3, and the inner diameter of the through hole 33 corresponds to the outer diameter of the power feeding portion 13, but the inner diameters of the through holes 32 and 33 may be slightly larger than the outer diameters thereof.

In the manufacturing method using the first member 30X, when the first member 30X and the jig 20 are disposed at opposing positions, the through-hole 32 is opposed to the penetrating member 3, and the through-hole 33 is opposed to the power feeding unit 13. Then, the jig 20 is brought into close contact with the first member 30X, and one of the jig 20 and the first member 30X is pressed against the other (or pressed against each other), thereby fitting the plurality of convex portions 22, the penetration member 3, and the power feeding unit 13 into the first member 30X. At this time, the penetrating member 3 is inserted into the through hole 32, and the power feeding unit 13 is inserted into the through hole 33.

As described above, the same effects as those of the above embodiment can be obtained also in the method for manufacturing an electron tube of the second embodiment. Further, by using the first member 30X having the through hole 32 and the through hole 33, the first member 30X can be prevented from adhering to one end surface of the through member 3 and the power supply unit 13 exposed from the first member 30X, that is, the surface of the electrical connection unit when power is supplied to the through member 3 and the power supply unit 13. Further, since the one end sides of the through-member 3 and the power supply unit 13 are smoothly introduced into the first member 30X, it is possible to suppress the change in the arrangement of the through-member 3 and the power supply unit 13 when the first member 30X is fitted.

Third embodiment next, a third embodiment will be described. In the description of the second embodiment, differences from the first embodiment are described, and the same description is omitted.

As shown in fig. 10A, the third embodiment differs from the first embodiment in that, in the method for manufacturing the electron tube, when the through-member 3 and the power feeding unit 13 are fitted into the first member 30, one ends of the through-member 3 and the power feeding unit 13 are exposed from the first member 30 so that the through-member 3 and the power feeding unit 13 penetrate the first member 30. Thus, as shown in fig. 10B, in the intermediate body N1 of the third embodiment, the penetrating member 3 and one end of the power feeding unit 13 protrude from the surface 30a of the first member 30. As a result, in the electron tube of the third embodiment, the one ends of the penetration member 3 and the power feeding portion 13 protrude outward (toward the atmosphere) from the main body portion 5.

As described above, the same effects as those of the above embodiment can be obtained in the electron tube of the manufacturing method of the third embodiment. Further, since the one ends of the through-member 3 and the power supply unit 13 are exposed from the first member 30 so that the through-member 3 and the power supply unit 13 penetrate the first member 30, it is not necessary to grind the surface 30a of the first member 30 after fitting the first member 30, and the manufacturing process can be simplified. Further, since the penetrating member 3 and one end of the power supply unit 13 protrude, it is possible to electrically connect the penetrating member 3 and the power supply unit 13 and to easily supply power. In addition, when the first member 30X used in the second embodiment is used as the first member 30, the first member 30X can be prevented from adhering to the surface of the electrical connection portion when power is supplied to the penetration member 3 and the power supply portion 13.

In addition, the present embodiment may have at least some of the features of other embodiments or modifications in place of or in addition to the features of the first embodiment.

Fourth embodiment next, a fourth embodiment will be described. In the description of the fourth embodiment, differences from the first embodiment are described, and the same description is omitted.

As shown in fig. 11A, the fourth embodiment is different from the first embodiment in that a jig 20A is used instead of the jig 20 (see fig. 4B) in the method for manufacturing an electron tube. The jig 20A is the same as the jig 20 except that the convex portion 25 and the concave portion 26 are formed on the front end surface of the convex portion 22.

As shown in fig. 11B, in the intermediate N1 obtained by the manufacturing method using the jig 20A, the convex portion 34 corresponding to the concave portion 26 and the concave portion 35 corresponding to the convex portion 25 are formed on the bottom surface 9a of the concave portion 9. As a result, in the electron tube of the fourth embodiment, the convex portion 34 and the concave portion 35 are formed on the bottom surface 9a of the concave portion 9 constituting the internal space R.

As described above, the same effects as those of the above embodiment can be obtained also in the method for manufacturing an electron tube of the fourth embodiment. Further, by forming the convex portions 34 and the concave portions 35 on the bottom surface 9a of the concave portion 9, the creepage distance in the internal space R, specifically, the creepage distance between the cathode K (photoelectron emitting portion 14) and the penetration member 3 and the anode a (counter electrode 4) can be increased, and the withstand voltage performance in the internal space R can be further improved. In particular, the recess 35 can increase the gas-sealed volume and improve the life of the electron tube 1.

In the jig 20A, the convex portion 25 and the concave portion 26 are formed on the distal end surface of the convex portion 22, but at least one of the concave portion, the convex portion, and the rough surface portion may be formed on at least a part of the surface constituting the convex portion 22. Similarly, in the electron tube of the fourth embodiment, the convex portion 34 and the concave portion 35 are formed on the bottom surface 9a of the concave portion 9, but at least any one of the concave portion, the convex portion, and the rough surface portion may be formed on at least a part of the surface constituting the internal space R. The rough surface portion is a surface that is rougher than a certain roughness, and is a surface having minute irregularities formed, for example, like a pear grain. The present embodiment may have at least a part of the features of other embodiments or modifications in place of or in addition to the features of the first embodiment.

Fifth embodiment next, a fifth embodiment will be described. In the description of the fifth embodiment, differences from the fourth embodiment are described, and the same description is omitted.

As shown in fig. 12A, the fifth embodiment is different from the fourth embodiment in that, in the case where the jig 20 is brought into close contact with the first member 30 and either one of the jig 20 and the first member 30 is pressed against the other (or pressed against each other) in the method for manufacturing an electron tube, the pressing member 60 that presses the first member 30 is provided with a plurality of convex portions 61 and convex portions 62.

A plurality of convex portions 61 and 62 are formed in a contact area of the pressing member 60 that contacts the first member 30. The convex portion 61 is provided at a position facing the convex portion 25 of the jig 20A via the first member 30. The convex portion 62 is provided at a position facing the concave portion 26 of the jig 20A via the first member 30.

As shown in fig. 12B, in the intermediate N1 obtained by the manufacturing method using the pressing member 60, the concave portions 36 and 37 are formed on the surface 30a of the first member 30 on the side opposite to the opening 9B side of the concave portion 9. The recess 36 is formed by a protrusion 62. The concave portion 37 is formed by the convex portion 61. As a result, in the electron tube of the fifth embodiment, the concave portion 36 and the concave portion 37 are formed on the outer surface of the main body portion 5 on the side (atmosphere side) opposite to the opening 9b side of the concave portion 9.

As described above, the method for manufacturing an electron tube according to the fifth embodiment can also provide the same effects as those of the above-described embodiments. Further, by forming the concave portions 36 and 37 on the surface of the main body portion 5, the creepage distance between the exposed portion (root end surface) of the penetration member 3 and the exposed portion (root end surface) of the power feeding portion 13 in the outer surface of the electron tube 1 can be increased, and the withstand voltage performance thereof can be improved.

In the pressing member 60, the convex portion 61 and the convex portion 62 are formed in the contact region with the first member 30, but at least any one of a concave portion, a convex portion, and a rough portion may be formed. Similarly, in the electron tube of the fifth embodiment, the concave portion 36 and the concave portion 37 are formed on the surface of the main body portion 5, but at least one of the concave portion, the convex portion, and the rough surface portion may be formed on at least a part of the outer surface of the main body portion 5. The jig 20 may be used instead of the jig 20A (see fig. 4B), or the convex portions 34 and the concave portions 35 in the bottom surface 9a of the concave portion 9 may be absent.

This embodiment may have at least a part of the features of other embodiments or modifications in place of or in addition to the features of the fourth embodiment. As shown in fig. 13A, for example, in the manufacturing method of the present embodiment, the first member 30X of the second embodiment may be used instead of the first member 30 (see fig. 12A).

For example, instead of the pressing member 60 (see fig. 12A) having the convex portions 61 and 62 formed thereon, a pressing member 60A having the convex portions 62 and the concave portions 63 formed thereon may be used. In this case, as shown in fig. 13B, in the electron tube of the present embodiment, the concave portion 36 is formed by the convex portion 62 and the convex portion 38 is formed by the concave portion 63 on the surface (atmosphere side) of the main body portion 5 opposite to the opening 9B side of the concave portion 9.

For example, in the manufacturing method of the present embodiment, in the same manner as in the third embodiment, when the penetration member 3 and the power supply unit 13 are fitted into the first member 30, one ends of the penetration member 3 and the power supply unit 13 may be exposed from the first member 30 and fitted into the penetration member 3 and the power supply unit 13 so that the penetration member 3 and the power supply unit 13 penetrate the first member 30. In the electron tube of the present embodiment, the penetrating member 3 and one end of the power feeding portion 13 may protrude from the surface 30a of the first member 30.

Although the embodiments have been described above, one embodiment of the present invention is not limited to the above embodiments.

The electron tube manufactured may also have the following structure. For example, as the electron tube 1B shown in fig. 14A, a penetration member 3B may be provided instead of the penetration member 3 (see fig. 1). The penetrating member 3B does not have the enlarged portion 3B₁And a holding part 3b₂(see fig. 1), and continuously inclines so that the diameter of the penetrating member 3B decreases toward the front end side over the entire extension direction, penetrates the body portion 5 of the housing 2, and protrudes from the bottom surface 9a of the recess 9 into the internal space R. The distal end surface of the penetrating member 3B functions as the cathode K without providing a separate photoelectron emitting portion 14. That is, since the cathode K (electrode) is formed integrally with the penetrating member 3B, the number of manufacturing steps is reduced, and the electron tube 1 can be manufactured more easily. Further, since no joint portion is provided, an electrode excellent in shock resistance can be obtained.

The electron tube can be used as a light emitting element (energy generating element), a light source, or the like, in addition to the ultraviolet detector as in the above embodiment. The electron tube 1C shown in fig. 14B, for example, has a structure as a discharge lamp. In the electron tube 1C, a pair of through members 3 are disposed in one internal space R, metal portions 53 serving as a cathode K and an anode a are attached to the tip sides of the through members 3, and discharge is performed between the electrodes, thereby operating as a lamp. The electron tube 1C has a probe (probe pin)51 and a spark pin (spark pin)52 penetrating the main body 5 and protruding into the internal space R for discharge. The metal part 53, the probe 51, and the spark pin 52 function as electrodes for emitting light.

The electron tube 1E shown in fig. 15A has a discharge lamp structure. In the electron tube 1E, a pair of through members 3 are disposed in one internal space R, metal portions 53 serving as a cathode K and an anode a are attached to the tip sides of the through members 3, and discharge is performed between the electrodes, whereby the electron tube can be operated as a lamp. For discharge, the electron tube 1E has: a probe 51 penetrating the body 5 and projecting into the internal space R; and a spark electrode (not shown) electrically connected to the power feeding unit 13 and provided on the inner surface of the cover 6. The metal part 53, the probe 51, and the spark electrode function as electrodes for emitting light.

In addition, the electron tube 1F shown in fig. 15B has a structure as a discharge lamp, for example. In the electron tube 1F, a pair of the penetration members 3 and the metal portion 54 serving as the cathode K and the anode a are arranged in one internal space R, and discharge is performed between both electrodes, whereby the electron tube can be operated as a lamp. In the present embodiment, only the metal portion 54 functions as an electrode for emitting light.

In addition, the electron tube 1G shown in fig. 15C has an electron source structure, for example. In the electron tube 1G, in a state where the target 56 is disposed to face the emitter 14e fixed to the tip end side of the penetration member 3, a predetermined voltage is applied between the two, thereby forming an electric field capable of guiding electrons emitted from the emitter 14e to the target 56. For example, when the target 56 is a phosphor, fluorescent light emission occurs by impinging electrons. In addition, by changing the target 56 to various materials, X-rays can be generated or electron beams can be transmitted. In operation, the interior space R is evacuated. The emitter 14e functions as an electrode for generating energy.

In the above embodiment, the sealing material 16 is provided on the first base film 15 of the first member 30 (see fig. 7C), but instead of this, the sealing material 16 may be provided on the second base film 17 of the second member 40. In addition, in the case of using frit as the sealing material 16, the first base film 15 and the second base film 17 may be omitted.

In the above embodiment, the power supply unit 13 is provided around the recess 9 in the main body 5, but the position of the power supply unit 13 is not limited to this. The power feeding unit 13 may be provided in the main body 5 so as to penetrate from the surface 30a of the first member 30 to the surface 30b (to the inside of the first plate-like portion 7 and the side wall portion 8). For example, a raised portion may be provided at one of the four corners of the concave portion 9 so that the side surface of the concave portion 9 bulges inward, and the power supply portion 13 may be provided so as to penetrate the raised portion. In the above embodiment, the insulating portion 12 is formed integrally with the main body portion 5, but the insulating portion 12 may be formed separately from the main body portion 5.

In the above embodiment, a part of the side surface in the internal space protrusion 11 is coveredThe insulating portion 12 covers at least a part of the side surface of the internal space protruding portion 11, but the insulating portion 12 may cover at least a part of the side surface. In the above embodiment, the enlarged portion 3b₁All covered by insulating part 12, but enlarged part 3b₁May be covered at least partially with the insulating portion 12. The penetrating member 3 is provided with a cylindrical holding portion 3b at the tip end thereof₂However, the cylindrical portion may not be provided, and the secondary enlarged portion 3b may be provided₁An inclined surface continuous to the front end. The electron tube 1 is configured to have only one concave portion 9, but a device having a plurality of concave portions 9 may be used as one electron tube. In this case, the device in an undivided state can be used as one electron tube. At this time, the internal spaces R in the plurality of concave portions 9 may be independent of each other or may communicate with each other. In this case, an electron tube having a desired area can be easily obtained. In the above-described embodiment, the material, shape, and size of each component are not limited to those described above, and various materials, shapes, and sizes can be used.

According to an aspect of the present invention, it is possible to provide a method of manufacturing an electron tube in which an internal structure of the electron tube can be easily manufactured.