Charged particle processing device for charged particle accelerator and accelerator

文档序号:1144748 发布日期:2020-09-11 浏览:27次 中文

阅读说明:本技术 用于带电粒子加速器的带电粒子处理装置及加速器 (Charged particle processing device for charged particle accelerator and accelerator ) 是由 朱志斌 崔爱军 于 2020-07-21 设计创作,主要内容包括:一种用于带电粒子加速器的带电粒子处理装置及具有其的带电粒子加速器,所述带电粒子加速器限定有对带电粒子加速的加速腔,所述带电粒子处理装置包括:本体,其内限定有用于接收来自所述加速腔的带电粒子的本体腔;电磁铁,配置成通电时在所述本体腔内产生磁场,以使所述本体腔内的带电粒子在所述磁场的作用下进入所述加速腔;且所述本体腔还包括第一出口,所述第一出口用于在所述电磁铁断电时将所述本体腔内的带电粒子引出至所述带电粒子加速器外。本发明通过对电磁铁的通断电实现带电粒子的分流,将偏转和束流引出装置集成化,使得对引出的带电粒子能量选择更加灵活。(A charged particle processing apparatus for a charged particle accelerator and a charged particle accelerator having the same, the charged particle accelerator defining an acceleration chamber for accelerating charged particles, the charged particle processing apparatus comprising: a body defining a body cavity therein for receiving charged particles from the acceleration cavity; an electromagnet configured to generate a magnetic field in the body cavity when energized so that charged particles in the body cavity enter the acceleration cavity under the action of the magnetic field; and the body cavity further comprises a first outlet, and the first outlet is used for leading out the charged particles in the body cavity to the outside of the charged particle accelerator when the electromagnet is powered off. The invention realizes the shunting of charged particles by switching on and off the electromagnet, integrates the deflection and beam extraction device, and leads the energy selection of the extracted charged particles to be more flexible.)

1. A charged particle processing apparatus (100) for a charged particle accelerator defining an acceleration chamber for accelerating charged particles, the charged particle processing apparatus (100) comprising:

a body (10) defining a body cavity (11) therein for receiving charged particles from the acceleration cavity;

an electromagnet (20) configured to generate a magnetic field in the body cavity (11) when energized, so that charged particles in the body cavity (11) enter the acceleration cavity under the action of the magnetic field; and is

The body cavity (11) further comprises a first outlet (111), and the first outlet (111) is used for leading out the charged particles in the body cavity (11) to the outside of the charged particle accelerator when the electromagnet (20) is powered off.

2. Charged particle processing apparatus (100) according to claim 1, wherein the body chamber (11) comprises a charged particle inlet (110) and a second outlet (112) communicating with the acceleration chamber;

-said body cavity (11) receives charged particles from said acceleration cavity through said charged particle inlet (110);

when the electromagnet (20) is electrified, the charged particles in the body cavity (11) are led out of the body cavity (11) from the second outlet (112) and enter the accelerating cavity under the action of the magnetic field.

3. The charged particle processing apparatus (100) according to claim 2, wherein the charged particle inlet (110) and the first outlet (111) are arranged along the charged particle incidence direction.

4. The charged particle processing apparatus (100) of claim 2, wherein the charged particle inlet (110) and the second outlet (112) are arranged in parallel on the same side of the body cavity (11).

5. Charged particle processing apparatus (100) according to claim 2, wherein a connecting duct (115, 116) is provided at each of the charged particle inlet (110) and the second outlet (112), the connecting duct (115, 116) being adapted to communicate the acceleration chamber and the body chamber (11).

6. Charged particle processing apparatus (100) according to claim 5, wherein at least one of the connecting ducts (115, 116) is a bellows.

7. Charged particle processing apparatus (100) according to claim 2, wherein the body (10) further comprises a face plate (12), the face plate (12) opening the charged particle inlet (110) and the second outlet (112).

8. Charged particle processing apparatus (100) according to claim 7, wherein the body cavity (11) is externally profiled with a cooling cavity (13), the cooling cavity (13) being used for a circulating flow of a coolant, the cooling cavity (13) having a cooling inlet (131) for an inflow of the coolant and a cooling outlet (132) for an outflow of the coolant.

9. The charged particle processing apparatus (100) of claim 8, further comprising:

a coolant inlet conduit (1310) in communication with the cooling inlet (131) for providing coolant to the cooling inlet (131);

a coolant outlet conduit (1320) communicating with the cooling outlet (132) for discharging the coolant in the cooling chamber (13) through the cooling outlet (132) and the coolant outlet conduit (1320); and is

The panel (12) is provided with the cooling outlet (132) and the cooling inlet (131), and the coolant inlet pipeline (1310) and the coolant outlet pipeline (1320) are fixedly connected with the panel (12).

10. The charged particle processing apparatus (100) according to claim 8, wherein one of the cooling inlet (131) and the cooling outlet (132) is provided at a side of the charged particle inlet (110) remote from the second outlet (112), and the other of the cooling inlet (131) and the cooling outlet (132) is provided at a side of the second outlet (112) remote from the charged particle inlet (110).

11. Charged particle processing apparatus (100) according to claim 1, wherein the charged particle processing apparatus (100) further comprises an exit tube (30) detachably connected to the body (10), the exit tube (30) being arranged at the first outlet (111).

12. Charged particle processing apparatus according to claim 11, wherein a vacuum flange (31) is provided at the junction of the body (10) and the exit tube (30), the vacuum flange (31) connecting the body (10) and the exit tube (30).

13. Charged particle processing apparatus (100) according to claim 11, wherein a first flange (32), a titanium membrane (33) and a second flange (34) are arranged in sequence at an end of the extraction tube (30) remote from the body (10), the first flange (32), the titanium membrane (33) and the second flange (343) being fixedly connected by means of fasteners.

14. A charged particle accelerator (1), comprising:

-an acceleration arrangement (300) defining at least one acceleration chamber, each for accelerating the charged particles passing within the acceleration chamber;

a particle source (200) for providing charged particles to the at least one acceleration chamber; and

charged particle processing apparatus (100), said charged particle processing apparatus (100) employing any one of claims 1-13.

Technical Field

Embodiments of the present invention relate to the field of cyclotron technology, and in particular, to a charged particle processing apparatus for a charged particle accelerator and an accelerator.

Background

The charged particle accelerator generally includes an acceleration cavity, a beam deflection system, and the like, and charged particles are accelerated by an electric field in the acceleration cavity and circularly accelerated by passing through the acceleration cavity for multiple times under the action of the beam deflection system.

However, the existing beam deflection system can only deflect the charged particles back to the acceleration cavity, the charged particles cannot be led out, the charged particles can only be led out from the leading-out port of the acceleration cavity, and only the number of deflection magnets can be adjusted to obtain the beam with target energy. The limitation of the accelerator in the beam leading-out mode in the prior art increases the design cost of the accelerator, reduces the flexibility of the accelerator for meeting the requirements of electron beams with different energies, and has a complex operation process.

Disclosure of Invention

According to an embodiment of the present invention, a charged particle processing apparatus for a charged particle accelerator and a charged particle accelerator are provided to solve at least one aspect of the problems in the prior art described above.

According to an aspect of the present invention there is provided a charged particle processing apparatus for a charged particle accelerator, the charged particle accelerator defining an acceleration chamber for accelerating charged particles, the charged particle processing apparatus comprising: a body defining a body cavity therein for receiving charged particles from the acceleration cavity; an electromagnet configured to generate a magnetic field in the body cavity when energized so that charged particles in the body cavity enter the acceleration cavity under the action of the magnetic field; and the body cavity further comprises a first outlet, and the first outlet is used for leading out the charged particles in the body cavity to the outside of the charged particle accelerator when the electromagnet is powered off.

Optionally, the body cavity comprises a charged particle inlet and a second outlet in communication with the acceleration cavity; the body cavity receives charged particles from the acceleration cavity through the charged particle inlet; and when the electromagnet is electrified, the charged particles in the body cavity are led out of the body cavity from the second outlet and enter the accelerating cavity under the action of the magnetic field.

Optionally, the charged particle inlet and the first outlet are arranged along the charged particle incidence direction.

Optionally, the charged particle inlet and the second outlet are arranged in parallel on the same side of the body cavity.

Optionally, the charged particle inlet and the second outlet are both provided with a connecting pipe, and the connecting pipe is used for communicating the acceleration cavity and the body cavity.

Optionally, at least one of the connecting conduits is a bellows.

Optionally, the body further comprises a panel, and the panel opens the charged particle inlet and the second outlet.

Optionally, a cooling cavity is formed outside the side wall of the body cavity, the cooling cavity is used for circulating and flowing of the coolant, and the cooling cavity is provided with a cooling inlet used for inflow of the coolant and a cooling outlet used for outflow of the coolant.

Optionally, the charged particle processing apparatus further comprises: a coolant inlet conduit in communication with the cooling inlet for providing coolant to the cooling inlet; a coolant outlet conduit in communication with the cooling outlet for discharging coolant within the cooling cavity through the cooling outlet and the coolant outlet conduit; the panel is provided with the cooling outlet and the cooling inlet, and the coolant inlet pipeline and the coolant outlet pipeline are fixedly connected with the panel.

Optionally, one of the cooling inlet and the cooling outlet is disposed on a side of the charged particle inlet remote from the second outlet, and the other of the cooling inlet and the cooling outlet is disposed on a side of the second outlet remote from the charged particle inlet.

Optionally, the charged particle processing apparatus further comprises an extraction pipe detachably connected to the body, and the extraction pipe is disposed at the first outlet.

Optionally, a vacuum flange is provided at the junction of the body and the exit tube, the vacuum flange connecting the body and the exit tube.

Optionally, one end of the extraction pipe, which is far away from the body, is sequentially provided with a first flange, a titanium film and a second flange, and the first flange, the titanium film and the second flange are fixedly connected through a fastener.

According to another aspect of the present invention, there is provided a charged particle accelerator comprising: an accelerating device defining at least one accelerating cavity, each accelerating cavity for accelerating the charged particles passing within the accelerating cavity; a particle source for providing charged particles to the at least one acceleration chamber; and any one of the charged particle processing apparatuses described above.

The embodiment according to the invention has the following beneficial effects: the charged particle processing device generates a deflection magnetic field when the electromagnet of the body is powered on, so that the passing charged particles are deflected to enter the accelerating cavity, when the electromagnet is powered off, the magnetic field in the body cavity disappears, the charged particles are directly drifted out of the body cavity, and the selection of the target energy charged particles can be realized by powering on and powering off the electromagnet, namely, the number and arrangement of magnets of the particle accelerator are prevented from being changed to adapt to different requirements through the integrated design of the charged particle deflection and leading-out device, the design cost is reduced, and the application efficiency is improved; the corrugated pipe is arranged, so that the processing precision requirement is reduced, the reliability in the installation process is improved, the flexible connection realized by the corrugated pipe reduces the installation space requirement, and the use is more convenient; the leading-out device of the charged particles can be suitable for different application scenes in a detachable connection mode, and the deflection function of the device is not influenced when the leading-out pipeline is maintained.

Drawings

Embodiments of the invention will now be described in more detail, by way of non-limiting examples only, with reference to the accompanying drawings, in which like reference numerals refer to like parts throughout, and in which:

FIG. 1 is a schematic diagram of a charged particle processing apparatus according to one embodiment of the present invention;

FIG. 2 is a cross-sectional view of the body of the charged particle processing apparatus shown in FIG. 1;

FIG. 3 is a schematic structural diagram of a body of the charged particle processing apparatus shown in FIG. 1;

FIG. 4 is a cross-sectional view of an exit tube of a charged particle processing apparatus according to one embodiment of the present invention;

fig. 5 is a block diagram of a charged particle accelerator according to an embodiment of the invention.

Description of reference numerals:

1. a charged particle accelerator; 100. a charged particle processing device; 200. a particle source; 300. an acceleration device; 10. a body; 20. an electromagnet; 30. a lead-out pipe; 11. a body cavity; 12. a panel; 13. a cooling chamber; 31. a vacuum flange; 32. a first flange; 33. a titanium film; 34. a second flange; 35. a seal ring; 110. a charged particle inlet; 111. a first outlet; 112. a second outlet; 113. a vacuum chamber; 121. a first wall panel; 122. a top plate; 123. a second wall panel; 124. cooling the partition plate; 131. a cooling inlet; 132. a cooling outlet; 1310. a coolant inlet conduit; 1320. a coolant outlet conduit; 114. leading out an interface; 115. the charged particle inlet is connected with a pipeline; 116. the second outlet is connected with the pipeline; 320. and (4) mounting the groove.

Detailed Description

The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings.

In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details.

The present embodiment firstly provides a charged particle processing apparatus 100 for a charged particle accelerator, wherein the charged particle accelerator may be an electron accelerator or an ion accelerator, and the charged particle accelerator includes at least one acceleration cavity for accelerating charged particles passing through the acceleration cavity. Fig. 1 is a schematic structural diagram of a charged particle processing apparatus 100 according to an embodiment of the present invention.

The charged particle processing apparatus 100 includes a body 10 and an electromagnet 20.

The body 10 defines internally a body cavity 11 for receiving charged particles for accelerating the cavity. In some embodiments, the body 10 may be a housing structure, the interior of which provides the body cavity 11.

The electromagnet 20 is configured to generate a magnetic field in the body chamber 11 when energized, so that charged particles passing through the body chamber 11 enter the acceleration chamber under the action of the magnetic field.

As shown in fig. 2, the main body chamber 11 includes a first outlet 111, and the first outlet 111 is used to lead out the charged particles in the main body chamber 11 to the outside of the charged particle accelerator when the electromagnet 20 is powered off.

The body cavity 11 may further include a charged particle inlet 110 and a second outlet 112, the body cavity 11 receives the charged particles from the acceleration cavity through the charged particle inlet 110, and the charged particles in the body cavity 11 are led out of the body cavity 11 from the second outlet 112 and enter the acceleration cavity under the action of a magnetic field generated when the electromagnet 20 is energized.

The charged particles emitted from the acceleration chamber enter the body chamber 11 through the charged particle inlet 110, and when the electromagnet 20 is powered on, a magnetic field passing through the body chamber 11 is generated, so that the velocity vector of the charged particles is deflected under the action of the magnetic field, and the charged particles leave the body chamber 11 from the second outlet 112 and enter the acceleration chamber to be continuously accelerated; when the electromagnet 20 is powered off, the magnetic field no longer passes through the body cavity 11, and the charged particles exit the charged particle accelerator from the second outlet 112 through the body cavity 11 and are directly extracted for beam diagnosis or treatment. The charged particle processing apparatus 100 of the present embodiment integrates the deflecting and extracting functions of the charged particles by controlling the on/off state of the electromagnet 20, so that the structure is simplified and the space is saved.

The charged particle inlet 110 and the first outlet 111 may be arranged along an incident direction of the charged particles.

The charged particle inlet 110 and the first outlet 111 are provided at both ends of the body cavity 11, and when the power supply of the electromagnet 20 is turned off, the charged particles entering the body cavity 11 from the charged particle inlet 110 are directly emitted from the first outlet 111 and leave the body cavity 11 while maintaining the incident speed and direction. As many charged particles as possible are caused to leave the body cavity 11 from said first outlet 111. In other embodiments, the main body chamber 11 may further include a vacuum chamber 113 extending from the first outlet 111 in the exit direction of the charged particles, the vacuum chamber 113 is communicated with the main body chamber 11, the side away from the main body chamber 11 has an exit interface 114, and the charged particles are ejected to the diagnostic apparatus through the exit interface 114 of the vacuum chamber 113 after drifting out of the main body chamber 11.

The charged particle inlet 110 and the second outlet 112 are arranged in parallel on the same side of the body cavity 11.

As shown in fig. 2, the charged particle inlet 110 and the second outlet 112 are formed in the side wall of the body chamber 11, and when the charged particle velocity vector is deflected by 180 ° in the body chamber 11, the velocity direction of the charged particle is perpendicular to the side wall where the charged particle inlet 110 and the second outlet 112 are located.

As shown in fig. 2 and 3, the body 10 may further include a panel 12, and the panel 12 defines an inlet 110 and a second outlet 112 for charged particles.

It will be understood by those skilled in the art that the panel 12 forms a sidewall of the body cavity 11, the charged particle inlet 110 and the second outlet 112 are disposed in parallel on the panel 12, and the panel 12 is made of a material with a certain strength for fixing the body 10 to the pipeline, so as to increase the strength and stability of the connection. In other embodiments, the panel 12 may be formed by a plurality of flat plates fixedly connected to the body 10, the plurality of flat plates form a sidewall of the body cavity 11, and the charged particle inlet 110 and the second outlet 112 are respectively opened on the flat plates arranged in parallel.

The charged particle inlet 110 and the second outlet 112 are provided with connecting pipes for communicating the accelerating cavity with the body cavity 11.

The charged particle inlet 110 and the second outlet 112 provided on the panel 12 are respectively provided with a connecting pipe, one end of the connecting pipe is fixedly connected to the panel 12, for example, by welding, and the other end of the connecting pipe is provided with a flange, and is connected to the accelerator or a pipe connected to the accelerator through the flange. The charged particles are transmitted between the accelerating cavity and the body cavity 11 through the connecting pipeline, so that the installation and the maintenance of the equipment are more convenient.

At least one of the connecting pipes is a bellows.

The charged particle inlet connection 115 and the second outlet connection 116 corresponding to the charged particle inlet 110 and the second outlet 112 may alternatively be bellows. In this embodiment, the second outlet 112 is a bellows corresponding to the second outlet connecting pipe 116, one end of the bellows is fixedly connected to the panel 12, and the other end of the bellows is provided with a flange for connecting the accelerator or the accelerator pipe. In other embodiments, a bellows may be disposed at the charged particle inlet 110, and a flange may be disposed at the other end of the bellows to connect to the accelerator. The corrugated pipe replaces a rigid pipeline to be connected with the accelerator, so that the fixed connection of the charged particle transmission pipeline is realized, the requirement on the processing precision of the charged particle processing device 100 is lowered, the processing cost is lowered, and the overall structure of the accelerator tends to be miniaturized through flexible connection.

As shown in fig. 2, the cooling chamber 13 is formed outside the side wall of the body chamber 11, the cooling chamber 13 is used for the circulation flow of the coolant, and the cooling chamber 13 has a cooling inlet 131 for the inflow of the coolant and a cooling outlet 132 for the outflow of the coolant.

As shown in fig. 2 and 3, in the present embodiment, the body 10 includes a face plate 12, a first wall plate 121, a top plate 122 and a bottom plate (not shown), both ends of the first wall plate 121 are fixedly connected to the face plate 12 to form a peripheral wall of the body cavity 11, and the top plate 122 and the bottom plate are respectively disposed at upper and lower ends of the face plate 12 and the first wall plate 121 and are tightly connected to the face plate 12 and the first wall plate 121 to form the vacuum body cavity 11. The body 10 further includes a second wall plate 123, the second wall plate 123 is disposed outside the first wall plate 121, two ends of the second wall plate 123 are tightly connected to the face plate 12, and the top and bottom of the second wall plate are tightly connected to the top plate 122 and the bottom plate, respectively, a cooling cavity 13 is formed between the first wall plate 121, the second wall plate 123 and the face plate 12, the cooling cavity 13 has a cooling inlet 131 and a cooling outlet 132, and during operation, a coolant flows through the cooling cavity 13 from the cooling inlet 131 and flows out from the cooling outlet 132 to cool the interior of the body cavity 11. In another embodiment, the cooling partition plate 124 is disposed above and below the second wall plate 123 forming the cooling cavity 13, the side of the cooling partition plate 124 close to the first wall plate 121 is fixedly connected to the top plate 122 and the bottom plate, respectively, and the cooling partition plate 124, the first wall plate 121, the second wall plate 123 and the face plate 12 form the cooling cavity 13. Of course, it will be understood by those skilled in the art that in other embodiments, the cooling cavity 13 may be an integrally formed cooling pipe, the cooling pipe is fixed outside the first wall plate 121, and both ends of the cooling pipe are fixedly connected to the panels 12 respectively.

One of the cooling inlet 131 and the cooling outlet 132 is arranged on a side of the charged particle inlet 110 remote from the second outlet 112, and the other of the cooling inlet 131 and the cooling outlet 132 is arranged on a side of the second outlet 112 remote from said charged particle inlet 110.

In this embodiment, the cooling inlet 131 is arranged at a side of the charged particle inlet 110 remote from the second outlet 112, and the cooling outlet 132 is arranged at a side of the second outlet 112 remote from said charged particle inlet 110. In further embodiments, the locations of the cooling inlets 131 and the cooling outlets 132 may be interchanged. The installation space of the accelerator is reserved while the cooling circulation device is connected through a pipeline.

A coolant inlet conduit 1310 in communication with the cooling inlet 131 for providing coolant to the cooling inlet 131; the coolant outlet duct 1320 communicates with the cooling outlet 132 for discharging the coolant in the cooling chamber 13 through the cooling outlet 132 and the coolant outlet duct 1320; the panel 12 is provided with a cooling outlet 132 and a cooling inlet 131, and a coolant inlet pipe 1310 and a coolant outlet pipe 1320 are fixedly connected to the panel 12.

In this embodiment, the panel 12 is provided with the cooling inlet 131 and the cooling outlet 132, and the coolant inlet pipe 1310 and the coolant outlet pipe 1320 are respectively and fixedly connected with the panel 12, so that the stability is increased, and the arrangement of rigid components is reduced by sharing the panel 12 with the connecting pipes, thereby simplifying the device. The coolant can adopt water, and the cooling of the body cavity 11 is realized through cooling water circulation. In other embodiments, an air cooling device may be used to cool the acceleration chamber, that is, an air cooling device is disposed at the cooling inlet 131 to discharge cool air from the cooling outlet 132 via the cooling chamber 13.

As shown in fig. 1, the charged particle processing apparatus 100 further includes an extraction pipe 30 detachably coupled to the body 10, the extraction pipe 30 being provided at the first outlet 111.

By means of the detachable connection, when the extraction tube 30 is damaged and needs to be repaired, the extraction tube 30 can be detached and replaced with a standard vacuum flange to maintain the vacuum environment in the main body cavity 11, so that the deflecting function of the charged particle processing apparatus 100 can be continued to act on the charged particles.

As shown in fig. 4, a vacuum flange 31 is provided at the junction of the body 10 and the outlet pipe 30, and the vacuum flange 31 connects the body 10 and the outlet pipe 30.

The body 10 and the catheter 30 are tightly coupled and a vacuum flange 31 is provided at the coupling portion to maintain a vacuum environment inside the body lumen 11 and the catheter 30.

One end of the eduction tube 30, which is far away from the body 10, is sequentially provided with a first flange 32, a titanium film 33 and a second flange 34, and the first flange 32, the titanium film 33 and the second flange 34 are fixedly connected through fasteners.

It can be understood that, a mounting groove 320 for a sealing ring 35 is opened on one side of the first flange 32 facing the second flange 34, the titanium film 33 is fixed between the first flange 32 and the second flange 34 by bolts, and further, the sealing ring 35 is disposed in the mounting groove 320 to maintain the interior of the outlet pipe 30 in a vacuum state.

The present embodiment also provides a charged particle accelerator 1, and fig. 5 is a block diagram of a charged particle accelerator according to an embodiment of the present invention.

The charged particle accelerator 1 comprises a particle source 200, an accelerating device 300 and the charged particle processing device 100, wherein the accelerating device 300 defines at least one accelerating cavity, each accelerating cavity is used for accelerating charged particles passing through the accelerating cavity, and the particle source 200 is used for providing the charged particles to the at least one accelerating cavity; the charged particle processing apparatus 100 is configured to receive the charged particles emitted from the acceleration device 300.

The charged particle accelerator 1 may be a single-cavity circulation accelerator, the acceleration device 300 is connected to the plurality of charged particle processing devices 100, the acceleration cavity of the acceleration device 300 is one, the corresponding acceleration cavity has a plurality of sets of openings corresponding to the charged particle inlet 110 and the second outlet 112, and is communicated with the body cavities 11 of the plurality of charged particle processing devices 100 through the openings, and the extraction of charged particles with different energies can be realized by controlling the on-off state of the electromagnets 20 of different charged particle processing devices 100.

The charged particle processing device is arranged, so that the entered charged particles can be deflected and accelerated or directly led out to the diagnostic device from the body cavity, the technical problem that the deflection device is only used for singularization of the charged particle deflection function in the prior art is solved, different requirements for charged particle energy in the prior art are met, the number and arrangement modes of deflection magnets of different charged particle accelerators are required to be designed, the processing capacity of the charged particle accelerators for meeting diversified charged particle energy requirements is limited, and the charged particle acceleration device of the embodiment overcomes the problems existing in the prior art through the charged particle processing device.

The foregoing is a more detailed description of the present invention that is presented in conjunction with specific embodiments, and the practice of the invention is not to be considered limited to those descriptions. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.

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