阅读说明：本技术 一种射频电极馈入装置 (Radio frequency electrode feed-in device ) 是由 朱双双 刘强 于 2021-04-16 设计创作，主要内容包括：本发明涉及一种射频电极馈入装置,其包括：支撑组件,具有散热间隙；多个放置组件,沿第一方向布置于支撑组件上；每一放置组件包括设置于支撑组件的第一放置件和第二放置件,第一放置件和第二放置件分别位于散热间隙在第一方向上的两侧；及多个电极组件,电极组件与放置组件一一对应,每一电极组件均包括第一电极单元和第二电极单元,每一电极组件的第一电极单元和第二电极单元分别与对应放置组件的第一放置件和第二放置件相连。本发明的射频电极馈入装置,可以容纳多个石墨舟在支撑组件上,并通过多个电极组件配合多个放置组件,实现多个石墨舟的射频电极馈入,使一个镀膜设备的腔体能够容纳多个石墨舟,提高产能,降低单片电池片成本。(The invention relates to a radio frequency electrode feed-in device, which comprises: a support assembly having a heat dissipation gap; a plurality of placement members arranged on the support member in a first direction; each placing assembly comprises a first placing piece and a second placing piece which are arranged on the supporting assembly, and the first placing piece and the second placing piece are respectively positioned on two sides of the heat dissipation gap in the first direction; and the electrode assemblies correspond to the placing assemblies one by one, each electrode assembly comprises a first electrode unit and a second electrode unit, and the first electrode unit and the second electrode unit of each electrode assembly are respectively connected with the first placing piece and the second placing piece of the corresponding placing assemblies. The radio-frequency electrode feed-in device can accommodate a plurality of graphite boats on the supporting assembly, and the radio-frequency electrode feed-in of the graphite boats is realized by matching a plurality of electrode assemblies with a plurality of placing assemblies, so that a cavity of one coating device can accommodate a plurality of graphite boats, the productivity is improved, and the cost of single battery pieces is reduced.)

1. A radio frequency electrode feedthrough, comprising:

a support assembly (10) having a heat dissipation gap (11);

a plurality of resting assemblies arranged on said support assembly (10) along said first direction; each placing assembly comprises a first placing piece (21) and a second placing piece (22) which are arranged on the supporting assembly (10), and the first placing piece (21) and the second placing piece (22) are respectively positioned on two sides of the heat dissipation gap (11) in the first direction; and

a plurality of electrode assemblies (30) corresponding to the placement assemblies one by one, each of the electrode assemblies (30) including a first electrode unit (31) and a second electrode unit (32), the first electrode unit (31) and the second electrode unit (32) of each of the electrode assemblies (30) being connected to the first placement member (21) and the second placement member (22) corresponding to the placement assemblies, respectively.

2. The radio frequency electrode feedthrough according to claim 1, wherein the support assembly (10) comprises a first support bar (12) and a second support bar (13) oppositely arranged in the first direction, the first support bar (12) and the second support bar (13) forming the heat dissipation gap (11) therebetween and each extending lengthwise in a second direction perpendicular to the first direction;

the first placing pieces (21) of the plurality of placing assemblies are arranged on the first supporting rod (12) at intervals along the second direction; the second placing pieces (22) of the plurality of placing components are arranged on the second supporting rod (13) at intervals along the second direction.

3. A radio frequency electrode feedthrough according to claim 2, characterized in that the first (12) and second (13) support rods are ceramic rods.

4. The radio frequency electrode feedthrough according to claim 2, wherein each of the first placement pieces (21) comprises a first placement block (211) and a second placement block (212), the first placement block (211) and the second placement block (212) being disposed on the first support bar (12) at intervals along the first direction;

each second placing piece (22) comprises a third placing block (221) and a fourth placing block (222), and the third placing block (221) and the fourth placing block (222) are sleeved on the second supporting rod (13) at intervals along the first direction;

each first electrode unit (31) is connected with the corresponding first placing block (211) and/or the third placing block, and each second electrode unit (32) is connected with the corresponding second placing block and/or the fourth placing block (222).

5. A radio frequency electrode feedthrough according to claim 4, characterized in that each first electrode unit (31) comprises a first electrode rod (311) and a first electrode link (312) connected thereto, each first electrode link (312) connecting the first placement block (211) and the third placement block (221) of the corresponding placement assembly.

6. A radio frequency electrode feedthrough according to claim 5, characterized in that each second electrode unit (32) comprises a second electrode rod (321) and a second electrode link (322) connected thereto, each second electrode link (322) connecting the second placement block (212) and the fourth placement block (222) of the corresponding placement assembly.

7. A radio frequency electrode feedthrough according to claim 6, characterized in that each of the first electrode rods (311) and each of the second electrode rods (321) lead out to the same end of the first support rod (12) and the second support rod (13) in the second direction.

8. The radio frequency electrode feedthrough according to claim 6, wherein an insulating tube (35) is sleeved on both the first electrode rod (311) and the second electrode rod (321).

9. A radio frequency electrode feedthrough according to claim 2, characterized in that fixing mounts (14) are mounted at both ends of the first support rod (12) and the second support rod (13) along the first direction.

10. A radio frequency electrode feedthrough according to any of claims 1 to 8, wherein the electrode assembly (30) further comprises a plurality of connecting tabs (15) respectively disposed on the first resting member (21) and the second resting member (22), each first electrode unit (31) being connected to the corresponding first resting member (21) by the connecting tab (15), each second electrode unit (32) being connected to the corresponding second resting member (22) by the connecting tab (15).

Technical Field

The invention relates to the technical field of photovoltaic equipment, in particular to a radio-frequency electrode feed-in device.

Background

With the popularization of solar power generation, the demand of related photovoltaic products is increasing, and thus the demand on the capacity of photovoltaic equipment is also increasing, and enterprises demand increasing capacity on this background. However, the conventional rf electrode feeding device adopts a mode of feeding rf electrodes into the graphite boat one by one, which has low production efficiency and cannot meet the demand of capacity.

Disclosure of Invention

Therefore, it is necessary to provide a feeding device for rf electrodes, which can overcome the above-mentioned drawbacks, in order to solve the problems of the prior art that the rf electrodes are required to be fed into the graphite boat one by one, the production efficiency is low, and the demand for productivity cannot be met.

A radio frequency electrode feedthrough comprising:

a support assembly having a heat dissipation gap;

a plurality of placement members arranged on the support member in the first direction; each placing assembly comprises a first placing piece and a second placing piece which are arranged on the supporting assembly, and the first placing piece and the second placing piece are respectively positioned on two sides of the heat dissipation gap in the first direction; and

the electrode assemblies are in one-to-one correspondence with the placement assemblies, each electrode assembly comprises a first electrode unit and a second electrode unit, and the first electrode unit and the second electrode unit of each electrode assembly are respectively connected with the first placement piece and the second placement piece corresponding to the placement assemblies.

In one embodiment, the support assembly comprises a first support rod and a second support rod which are oppositely arranged in the first direction, the first support rod and the second support rod form the heat dissipation gap therebetween, and both of the first support rod and the second support rod extend lengthwise along a second direction perpendicular to the first direction;

the first placing pieces of the plurality of placing assemblies are arranged on the first supporting rod at intervals along the second direction; the second placing pieces of the plurality of placing components are arranged on the second supporting rod at intervals along the second direction.

In one embodiment, the first support bar and the second support bar are ceramic bars.

In one embodiment, the first placing member comprises a first placing block and a second placing block, and the first placing block and the second placing block are arranged on the first supporting rod at intervals along the first direction;

the second placing piece comprises a third placing block and a fourth placing block, and the third placing block and the fourth placing block are sleeved on the second support at intervals along the first direction;

each first electrode unit is connected with the corresponding first placing block and/or the third placing block, and each second electrode unit is connected with the corresponding second placing block and/or the fourth placing block.

In one embodiment, each first electrode unit comprises a first electrode rod and a first electrode connecting rod connected with the first electrode rod, and each first electrode connecting rod is connected with the first placing block and the third placing block of the corresponding placing assembly.

In one embodiment, each second electrode unit includes a second electrode rod and a second electrode connecting rod connected thereto, and each second electrode connecting rod connects the second placing block and the fourth placing block of the corresponding placing assembly.

In one embodiment, each of the first electrode rods and each of the second electrode rods are led out to the same end of the first support rod and the second support rod in the second direction.

In one embodiment, the first electrode rod and the second electrode rod are both sleeved with insulating tubes.

In one embodiment, fixing seats are installed at two ends of the first supporting rod and the second supporting rod along the first direction.

In one embodiment, the electrode assembly further comprises a connecting piece, the electrode assembly further comprises a plurality of connecting pieces respectively arranged on the first placing piece and the second placing piece, each first electrode unit is connected with the corresponding first placing piece through the connecting piece, and each second electrode unit is connected with the corresponding second placing piece through the connecting piece

Therefore, the radio-frequency electrode feed-in device can accommodate a plurality of graphite boats on the supporting assembly, and the radio-frequency electrode feed-in of the graphite boats is realized by matching the electrode assemblies with the placing assemblies, so that a cavity of one coating device can accommodate the graphite boats, the productivity is improved, and the cost of single battery pieces is reduced.

Drawings

FIG. 1 is a schematic diagram of an RF electrode feedthrough in one embodiment of the present invention;

figure 2 is a top view of the rf electrode feedthrough shown in figure 1.

A support assembly 10; a heat dissipation gap 11; first support bar 12, second support bar 13: a fixed seat 14; a connecting sheet 15;

a first placing member 21; a first placing block 211; a second placement block 212; a second placement member 22; a third placement block 221; a fourth placement block 222;

an electrode assembly 30; a first electrode unit 31; a first electrode rod 311; a first electrode link 312; a second electrode unit 32; a second electrode rod 321, a second electrode link 322; an extension 33; a curved section 34; and an insulating tube 35.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Referring to fig. 1 and 2, fig. 1 is a schematic structural diagram of an rf electrode feedthrough in an embodiment of the invention, and fig. 2 is a top view of the rf electrode feedthrough shown in fig. 1.

An embodiment of the present invention provides an rf electrode feedthrough comprising a support assembly 10, a placement assembly, and an electrode assembly 30.

The support assembly 10 is used for carrying graphite boats, the support assembly 10 has heat dissipation gaps 11, and a plurality of graphite boats supported by the support assembly 10 can be arranged at intervals along a first direction and all correspond to the heat dissipation gaps 11, so as to ensure the heat dissipation efficiency of each graphite boat.

The number of placing assemblies is plural, the plural placing assemblies are arranged on the support assembly 10 along the first direction, each placing assembly is used for placing one graphite boat, so that each graphite boat is carried on the support assembly 10 by the corresponding placing assembly.

The number of the electrode assemblies 30 is plural, the plural electrode assemblies 30 correspond to the plural placing assemblies one by one, and each electrode assembly 30 is used for connecting with the graphite boat on the corresponding placing assembly to apply voltage to each graphite boat. Each of the electrode assemblies 30 includes a first electrode unit 31 and a second electrode unit 32, and the first electrode unit 31 and the second electrode unit 32 of each of the electrode assemblies 30 are connected to the first and second placement members 21 and 22, respectively, on which the assemblies are placed. It can be understood that one end of each first electrode unit 31 is connected to an external rf power supply, and the other end is connected to the first placing member 21 corresponding to the bottom of the graphite boat, and the rf power voltage is conducted to the graphite boat through the first placing member 21, so as to form the anode or cathode of the graphite boat. One end of each second electrode unit 32 is connected with an external radio frequency power supply, the other end is connected with a second placing piece 22 corresponding to the bottom of the graphite boat, and radio frequency power supply voltage is conducted to the graphite boat through the second placing piece 22 to form a negative electrode or a positive electrode of the graphite boat, so that discharge of the graphite boat is realized through the radio frequency power supply voltage received by two sides of the graphite boat. Moreover, the plurality of electrode assemblies 30 are matched with the plurality of placing assemblies, so that the plurality of graphite boats placed on the placing assemblies can be discharged simultaneously.

According to the radio frequency electrode feed-in device, during actual operation, graphite boats are placed on each placing assembly, and each graphite boat is electrically conducted with the first electrode unit 31 and the second electrode unit 32 through the corresponding first placing piece 21 and the corresponding second placing piece 22, so that the positive electrode and the negative electrode of an external radio frequency power supply are electrically conducted, and then the external radio frequency power supply is used for completing discharging of each graphite boat.

Therefore, the radio frequency electrode feed-in device can accommodate a plurality of graphite boats on the supporting component 10, and realizes the feed-in of the radio frequency electrode of each graphite boat by matching the plurality of electrode components 30 with the plurality of placing components, thereby effectively improving the production efficiency, being beneficial to improving the productivity and reducing the cost of single battery plates.

Specifically, in the embodiment shown in fig. 2, the first direction is a left-right direction, and the second direction described below is an up-down direction.

In the embodiment of the present invention, the support assembly 10 includes a first support bar 12 and a second support bar 13 oppositely arranged in a first direction, the first support bar 12 and the second support bar 13 form the heat dissipation gap 11 therebetween, and the first support bar 12 and the second support bar 13 both extend lengthwise in a second direction. A plurality of second support rods 13 for placing the components are arranged on the second support rods 13, and two support rods (i.e. the first support rods 12 and the second support rods 13) are used for fixing and supporting the whole radio frequency electrode feed-in device and a plurality of graphite boats. Preferably, the first support rod 12 and the second support rod 13 are ceramic rods, which may function as an insulator.

Specifically, fixing seats 14 are arranged at two ends of the first supporting rod 12 and the second supporting rod 13, the fixing seats 14 are sleeved on the first supporting rod 12 and the second supporting rod 13, and a connecting hole for connecting and fixing is formed in the fixing seats 14. Preferably, the fixing base 14 is fixed on a connecting member of an external device, and can play a role of fixing and supporting the first support bar 12 and the second support bar 13.

In an embodiment of the present invention, the first placing member 21 includes a first placing block 211 and a second placing block 212, and the first placing block 211 and the second placing block 212 are both spaced and sleeved on the first supporting rod 12 in a clasping manner. The second placing member 22 includes a third placing block 221 and a fourth placing block 222, and the third placing block 221 and the fourth placing block 222 are also separately sleeved on the first supporting rod 12 in a clasping manner. One end of the first electrode unit 31 is connected to one or both of the first placing block 211 and the third placing block 221, and a radio frequency voltage is introduced into the first placing block 211 or the third placing block 221, and one end of the second electrode unit 32 is connected to one or both of the second placing block 212 and the fourth placing block 222, and a radio frequency voltage is introduced into the second placing block 212 or the fourth placing block 222. Preferably, one end of the first electrode unit 31 is connected to the first placing block 211, and one end of the second electrode unit 21 is connected to the fourth placing block 222. The first placing block 211 and the fourth placing block 222 are respectively located at opposite corners of the corresponding graphite boat, so that the discharging effect of the graphite boat can be better in tandem.

It should be noted that the first placing block 211, the second placing block 212, the third placing block 221, and the fourth placing block 222 are not limited to be fixedly mounted with the first support rod 12 and the second support rod 13 in a clasping manner, and in other embodiments, other fastening manners, such as screw fastening, snap fastening, etc., may also be used, and are not limited herein. Further, the connection manner of the first electrode unit 31 and the first placing block 211 and the third placing block 221 can be arbitrarily selected, and the connection manner of the second electrode unit 32 and the second placing block 212 and the fourth placing block 222 can also be arbitrarily selected, which is not limited herein.

Further, the first electrode unit 31 includes a first electrode rod 311 and a first electrode link 312 connected to the first electrode rod 311, one end of the first electrode rod 311 is connected to an external radio frequency power source, and the other end is connected to the middle of the first electrode link 312. The both ends of first electrode connecting rod 312 are connected with first piece 211 and the third piece 221 of placing respectively and are placed, will be first through first electrode connecting rod 312 place the piece 211 and the third piece 221 is placed and is linked together, realize that the electrode of the same way is placed piece 221 and third through first piece 211 of placing and is placed the piece 221 and graphite boat contact electrically conductive simultaneously, increase the conducting area of graphite boat front end for the electric conductive property of graphite boat front end greatly promotes. Meanwhile, the middle electrode connecting rod can connect the two first placing blocks 211 and the third placing block 221 into a whole, and when the fastening screws on the first placing block 211 and the third placing block 221 are expanded by the heat generated by the discharge of the graphite boat at high temperature, the single placing block and the fastening bolt are easy to deform, so that the matching between the placing block and the first supporting rod 12 is loosened to generate rotation, and the contact between the front end of the graphite boat and the placing block is unstable. Moreover, the two placing blocks (i.e. the first placing block 211 and the third placing block 221) which are connected into a whole can interfere with each other, so that the conductivity of the front end of the graphite boat is more excellent and reliable.

The second electrode unit 32 includes a second electrode rod 321 and a second electrode connecting rod 322 connected to the second electrode rod 321, wherein two ends of the second electrode rod 321 are connected to an external rf power source, and the other end is connected to the middle of the second electrode connecting rod 322. The both ends of second electrode connecting rod 322 are placed the piece 212 with the second respectively and are placed the piece 222 with the fourth and link to each other, place the piece 212 with the fourth through second electrode connecting rod 321 and place the piece 222 with the second and be linked together, realize that the electrode of the same way is placed piece 212 and fourth through the second simultaneously and is placed piece 222 and graphite boat contact electrically conductive, increase the conducting area of graphite boat rear end for the electric conductive property of graphite boat rear end greatly promotes. Meanwhile, the middle electrode connecting rod can connect the second placing block 212 and the fourth placing block 222 into a whole, when the placing blocks and the fastening screws on the placing blocks are expanded by heat generated by graphite boat discharge at high temperature, the single placing blocks and the fastening bolts are easy to deform so that the placing blocks are loosened and rotated with the cooperation of the second supporting rod 13, and the rear end of the graphite boat is unstable in contact with the placing blocks. Moreover, the two placing blocks (i.e. the second placing block 212 and the fourth placing block 222) which are connected into a whole can interfere with each other, so that the electrical conductivity of the rear end of the graphite boat is more excellent and reliable.

More specifically, each of the first electrode rods 311 and each of the second electrode rods 321 are led out to the same end of the first support rod 12 and the second support rod 13 in the second direction. Preferably, the first electrode rod 311 and the second electrode rod 321 each include an extension section 33 and a bent section 34, and the extension sections 33 of the first electrode rod 311 and the second electrode rod 321 are parallel to the second direction, i.e., extend along the extension direction of the first support rod 12 or the second support rod 13. The bending section 34 can be bent in any direction. Preferably, the first electrode rod 311 and the second electrode rod 321 are provided with a bending section 34 at one end close to the external radio frequency power source, the bending direction of the bending section 34 can be designed to avoid other components according to the position of the external radio frequency power source, so that the extending section 33 can be attached to the first support rod 12 or the second support rod 13 as much as possible and extend to the end of the first support rod 12 and the second support rod 13 in the second direction, and the overall arrangement mode of the first electrode rod 311 and the second electrode rod 321 is more compact, safe and reliable.

It should be noted that the first electrode rod 311 and the second electrode rod 321 are not limited to be drawn out to the same end of the first support rod 12 and the second support rod 13 in the second direction by the bending section 34, and in other embodiments, the composition of the first electrode rod 311 or the second electrode rod 321 may be selected according to actual circumstances, for example, the first electrode rod 311 or the second electrode rod 321 may only have the extending section 33, and the whole position of the first electrode rod 311 or the second electrode rod 321 is changed to avoid other components, which is not limited herein.

Further, the first electrode rod 311 and the second electrode rod 321 are both sleeved with the insulating tube 35, and the insulating sleeve 35 can be utilized to respectively protect and insulate the first electrode rod 311 and the second electrode rod 321.

In the embodiment of the present invention, the electrode assembly 30 further includes a connection piece 15, the first electrode unit 31 is connected to the first placing member 21 through the connection piece 15, and the second electrode unit 32 is connected to the second placing member 22 through the connection piece 15. Preferably, the connection pieces 15 are provided on the first and second placement members 21 and 22, and the first and second electrode units 31 and 32 pass through the connection pieces 15. The connecting sheet 15 is used for connecting the placing piece and the electrode unit, when the number of the graphite boats is large, the arrangement of the electrode unit is more complicated, and the connecting sheet 15 can enable the placing piece to be more flexibly connected with the electrode unit.

In the embodiment of the invention, the first support rod 12 and the second support rod 13 form the support assembly 10, and the heat dissipation gap 11 is formed between the first support rod 12 and the second support rod 13. On the first support bar 12, a plurality of first placing members 21 are sleeved, and each first placing member 21 includes a first placing block 211 and a second placing block 212. On the second support rod 13, the plurality of second placing members 22 are sleeved, and each second placing member 22 comprises a third placing block 221 and a fourth placing block 222.

Thus, a plurality of graphite boats are disposed between each of the first and second supports 12 and 13 in a one-to-one correspondence, each of which is connected to an external rf power source through the electrode assembly 30. Each of the electrode assemblies 30 includes a first electrode unit 31 and a second electrode unit 32, the first electrode unit 31 including a first electrode rod 311 and a first electrode link 312, and the second electrode unit 32 including a second electrode rod 321 and a second electrode link 322. The first placing block 211 and the third placing block 221 are connected through the first electrode connecting rod 312, and then the positive electrode of the external radio frequency power supply is conducted to the first placing block 211 and the third placing block 221 through the first electrode rod 311 connected with the first electrode connecting rod 312, so that discharge to the positive electrode at the front end of the graphite boat is formed. The second placing block 212 and the fourth placing block 222 are connected through the second electrode connecting rod 322, and then the negative electrode of the external radio frequency power supply is conducted to the second placing block 212 and the fourth placing block 222 through the second electrode rod 321 connected with the second electrode connecting rod 322, so that discharge to the negative electrode at the rear end of the graphite is formed, and the discharge of the whole graphite is completed by matching with the first electrode unit 31. The plurality of electrode units are matched with the plurality of placing assemblies, so that the plurality of graphite boats placed on the supporting assembly 10 can be discharged.

The radio frequency electrode feed-in device has the following advantages:

the radio frequency electrode feed-in device can accommodate a plurality of graphite boats on the supporting component 10, and the radio frequency electrodes of the graphite boats can be fed in by matching the electrode components 30 with the placing components, so that a cavity of a coating device can accommodate the graphite boats, the productivity is improved, and the cost of single battery pieces is reduced.

The middle electrode connecting rod can be connected two placing blocks into a whole, when the placing blocks and the fastening screws on the placing blocks are subjected to high-temperature expansion of heat generated by discharge of the graphite boat, the placing blocks and the fastening bolts are single, so that deformation is easily generated to enable the placing blocks to be loosened and rotated with the supporting rod, and the graphite boat is unstable in contact with the placing blocks. And the two placing blocks which are connected into a whole can interfere with each other, so that the conductivity of the graphite boat is more excellent and reliable.

The electrode rod can design the bending direction of the bending section 34 to avoid other components according to the position of the external radio frequency power supply, so that the extending section 33 can be attached to the first support rod 12 or the second support rod 13 as much as possible and extend to the end parts of the first support rod 12 and the second support rod 13 in the second direction, and the overall arrangement mode of the first electrode rod 311 and the second electrode rod 321 is more compact, safe and reliable.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.