阅读说明：本技术 一体式碳纳米管薄膜电磁场传感器及三维电磁场传感器 (Integrated carbon nanotube film electromagnetic field sensor and three-dimensional electromagnetic field sensor ) 是由 景龑 韩文 吕平海 申晨 吴健 白晓春 耿明昕 杨彬 王育佳 徐伟锋 李明 潘 于 2020-06-23 设计创作，主要内容包括：本发明公开了一种一体式碳纳米管薄膜电磁场传感器及三维电磁场传感器,一维电磁场传感器包括感应电极、电离电极和接收电极,感应电极由两块不锈钢薄板组成,电离电极上电极由表面附着有分布着碳纳米管薄膜的金属膜基底,下电极极板中心开孔,收集电极由栅格极板构成。感应电极与电离电极之间通过金属线对应连接,电离电极之间、收集电极通过绝缘支架相互隔离,收集电极栅格之间相互绝缘。该传感器电磁测量一体式、结构简单、尺寸小、成本低、线性度好、准确度高,适合于推广应用。(The invention discloses an integrated carbon nanotube film electromagnetic field sensor and a three-dimensional electromagnetic field sensor. The induction electrodes are correspondingly connected with the ionization electrodes through metal wires, the ionization electrodes and the collection electrodes are mutually isolated through insulating supports, and the collection electrode grids are mutually insulated. The sensor has the advantages of integrated electromagnetic measurement, simple structure, small size, low cost, good linearity and high accuracy, and is suitable for popularization and application.)

1. An integrated carbon nanotube film electromagnetic field sensor, comprising:

the induction electrode (10) comprises a first induction polar plate (1) and a second induction polar plate (2) which are oppositely arranged and separated;

the ionization electrode (11) comprises a first ionization polar plate (3) and a second ionization polar plate (6) which are oppositely arranged and isolated, a metal film substrate (4) is arranged on the inner surface of the first ionization polar plate (3), a carbon nano tube film (5) is attached to the inner surface of the metal film substrate (4), and an electron current leading-out hole (7) is formed in the second ionization polar plate (6); the induction electrode (10) and the ionization electrode (11) are correspondingly and electrically connected through a metal wire;

and the collecting electrode (8), the collecting electrode (8) is formed by a grid polar plate, the collecting electrode (8) is arranged on the bottom surface side of the second ionization polar plate (6) and is isolated, and the collecting electrode (8) is used for collecting the electron current passing through the electron current lead-out hole (7).

2. The integrated carbon nanotube film electromagnetic field sensor of claim 1, wherein the isolation is supported insulation by insulating pillars (9); the grids of collecting electrodes (8) are mutually insulated by insulating pillars (12).

3. The integrated carbon nanotube film electromagnetic field sensor according to claim 2, wherein the insulating supports (9) are distributed on two sides of the inner end faces of the induction electrode (10), the ionization electrode (11) and the collection electrode (8).

4. The integrated carbon nanotube film electromagnetic field sensor according to claim 1, wherein the electrode plates of the sensing electrode (10), the ionizing electrode (11) and the collecting electrode (8) are all made of stainless steel.

5. The integrated carbon nanotube film electromagnetic field sensor according to claim 1, wherein the distance between the sensing electrodes (10) is 0.5-1 cm, the distance between the ionizing electrodes (11) is 100-300 μm, and the distance between the collecting electrode (8) and the second ionizing plate is 200-500 μm.

6. The integrated carbon nanotube film electromagnetic field sensor according to claim 1, wherein the collecting electrode (8) has a grid width of 50-100 μm, and the number of the collecting electrode (8) grids is 50-100.

7. The integrated carbon nanotube film electromagnetic field sensor of claim 1, wherein the first sensing plate (1) has a facing area of 1cm²The positive area of the ionization electrode (11) is 50-100 mm²The area of the collecting electrode (8) opposite to the ionizing electrode 11 is 70-150 mm²。

8. The integrated carbon nanotube film electromagnetic field sensor according to claim 1, wherein the second ionization plate (6) electron current extraction hole (7) is circular; the grid of the collecting electrode (8) is rectangular.

9. A three-dimensional electromagnetic field sensor comprising the integrated carbon nanotube thin film electromagnetic field sensor of any one of claims 1 to 8 in each dimension.

Technical Field

The invention relates to the technical field of miniature sensor manufacturing, in particular to an integrated carbon nanotube film electromagnetic field sensor and a three-dimensional electromagnetic field sensor which adopt an ionization electrode, have single-value input and output characteristics and simultaneously measure the electromagnetic field intensity.

Background

With the increasing tension of line corridors, the environmental impact of power transmission and transformation engineering also becomes an important factor which must be considered in the engineering planning, the research, the design, the construction and the operation process, and the environmental protection problem in some engineering becomes a key restriction factor for smooth construction and operation. With the rapid development of urban and rural construction and the continuous expansion of urban scale, the influence of power transmission and transformation projects on nearby residences and various environment sensitive areas is increasingly prominent, complaints about power grid environment influence are increasingly increased, and the expenditure of national grid companies for solving the environmental influence complaints is increased year by year, so that the economic benefit of the companies is influenced.

One of the main problems of complaints of residents near the power transmission line is the influence of a power frequency electric field on life, such as transient electric shock, and the like, and the feeling of a human body in the electric field is closely related to the strength of the electric field, wherein an electromagnetic environment control limit (GB8702-2014) specifies power frequency and direct current electric field exposure limits, which are main bases for judging whether the electromagnetic environment influence of the power transmission line exceeds the standard or not. In an alternating current power transmission and transformation project electromagnetic environment monitoring method (trial) (HJ 681-2013), electromagnetic field monitoring is performed on a balcony or a platform of a building (structure), points are distributed in an area 1.5m away from a wall or other fixed objects (such as guardrails), and if the distance requirement cannot be met, the center position of the vertical foot plane of the balcony or the platform is taken as a monitoring point. The balcony size of a building can not meet the requirements, the measurement needs to be carried out in a narrow environment, and the measured electric field is usually a non-uniform electric field with large gradient. The probe applied in the current electric field monitoring is of a suspension type electrode structure, and due to the distortion influence of the probe on a detected field, the problem of coupling influence of the probe on different components of an electric field is solved, so that the probe of the current electric field sensor is large in size and complex in system, and the problem of coupling of the components is solved. According to the suspension probe measurement principle, the probe measurement result is the average value of the electric field between two polar plates of the probe, when the measurement is carried out in a region with larger electric field gradient such as a balcony, the measurement result of the large-size probe is the average value of the electric field in the larger region, the measurement result deviates from the true value greatly, whether the electromagnetic environment exceeds the standard or not cannot be accurately judged, adverse effects can be brought to national network companies, and an integrated micro-sensor for measuring the electromagnetic field is not available at present.

Therefore, the integrated micro sensor for measuring electromagnetic field is developed to solve the technical problem to be solved.

Disclosure of Invention

In order to solve the problem of inaccurate measurement of the probe in the prior art, the invention aims to provide an integrated carbon nanotube film electromagnetic field sensor, which takes the electron current generated by ionizing gas by an ionizing electrode as output current, establishes the corresponding relation between the size of the electron current collected by a collecting electrode of the sensor and the strength of a measured electric field, and establishes the corresponding relation between the size of the offset of the electron current collected by a collector of the sensor and the measured magnetic field. The sensor has the advantages of integrated electromagnetic measurement, simple structure, small size, low cost, good linearity and high accuracy, and is suitable for popularization and application.

The invention also provides a three-dimensional electromagnetic field sensor.

In order to achieve the purpose, the invention adopts the following technical means:

an integrated carbon nanotube thin film electromagnetic field sensor, comprising:

the induction electrode comprises a first induction polar plate and a second induction polar plate which are oppositely arranged and isolated;

the ionization electrode comprises a first ionization polar plate and a second ionization polar plate which are oppositely arranged and isolated, wherein a metal film substrate is arranged on the inner surface of the first ionization polar plate, a carbon nano tube film is attached to the inner surface of the metal film substrate, and an electron current lead-out hole is formed in the second ionization polar plate; the induction electrode and the ionization electrode are correspondingly and electrically connected through a metal wire;

and the collecting electrode is formed by a grid polar plate, is arranged on the bottom surface side of the second ionization polar plate and is isolated, so that the collecting electrode collects the electron current passing through the electron current lead-out hole.

The isolation is carried out by supporting and insulating through an insulating support column; the collecting electrode grids are mutually insulated through insulating pillars.

The insulating supports are distributed on two sides of the inner end faces of the induction electrode, the ionization electrode and the collecting electrode.

The electrode plates of the induction electrode, the ionization electrode and the collecting electrode are all made of stainless steel.

The distance between the induction electrodes is 0.5-1 cm, the distance between the ionization electrodes is 100-300 mu m, and the distance between the collection electrodes and the second ionization plate is 200-500 mu m.

The width of the collecting electrode grids is 50-100 mu m, and the number of the collecting electrode grids is 50-100.

The area of the first induction polar plate facing to the first induction polar plate is 1cm²The positive area of the ionization electrode plate is 50-100 mm²The area of the collecting electrode opposite to the ionizing electrode 11 is 70-150 mm²。

The electron current leading-out hole of the second ionization polar plate is circular; the collecting electrode grids are rectangular.

A three-dimensional electromagnetic field sensor comprises the integrated carbon nanotube film electromagnetic field sensor in each dimension direction.

Compared with the prior art, the invention has the following advantages:

the invention comprises an induction electrode, an ionization electrode and a receiving electrode in each dimension direction, wherein the three electrodes are mutually connected and superposed to form a sensor capable of measuring an electromagnetic field, the induction electrode induces a measured electric field, the ionization electrode is in corresponding metal connection with the induction electrode and has an equipotential, and the carbon nano tube film tip ionizes gas to generate electron current and ion current. The induction electrodes are correspondingly connected with the ionization electrodes through metal wires, the ionization electrodes and the collection electrodes are mutually isolated through insulating supports, and the collection electrode grids are mutually insulated. The electron current is captured by the collecting electrode through the electron current leading-out hole, the intensity of the measured electric field is obtained through the size of the electron current collected by the collecting electrode, and the size of the measured magnetic field is obtained through the offset of the electron current on the collecting electrode. The novel sensor is realized by adopting a micro-machining process, and has the advantages of small size, simple structure, integrated electromagnetic measurement, simple structure, small size, low cost and high accuracy.

Drawings

The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.

FIG. 1 is a schematic view of a one-dimensional structure of an integrated carbon nanotube film electromagnetic field sensor according to the present invention.

FIG. 2 is a side view of a one-dimensional direction three-dimensional structure of the integrated carbon nanotube film electromagnetic field sensor of the present invention.

FIG. 3 is an exploded side view of the three-dimensional structure of the integrated carbon nanotube thin-film electromagnetic field sensor according to the present invention.

In the figure: 1. a first induction pole plate; 2. a second induction pole plate; 3. a first ionization plate; 4. a metal film substrate; 5. a carbon nanotube film; 6. a second ionization plate; 7. an electron flow exit aperture; 8. a collecting electrode; 9. an insulating support; 10. an induction electrode; 11. an ionizing electrode; 12. and an insulating support.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.

As shown in fig. 1 to 3, the integrated carbon nanotube film electromagnetic field sensor of the present invention includes an induction electrode 10, an ionization electrode 11 and a collection electrode 8 in each dimension, wherein the induction electrode 10 is composed of a first induction plate 1 and a second induction plate 2 made of two stainless steel thin plates, a metal film substrate 4 distributed with a carbon nanotube film 5 is attached to an inner surface of the ionization electrode 11, an electron flow lead-out hole 7 is formed in the second ionization plate 6, and the collection electrode 8 is composed of a grid plate. The induction electrodes 10 and the ionization electrodes 11 are correspondingly connected through metal wires, the ionization electrodes 11 and the collection electrodes 8 are mutually isolated through insulating support columns 9, and grids of the collection electrodes 8 are mutually insulated through insulating support columns 12.

The insulating supports 9 are distributed on two sides of the inner end faces of the ionization electrode 11 and the collecting electrode 8.

Preferably, all three electrodes are made of stainless steel. The distance between the induction electrodes 10 is 0.5-1 cm, the distance between the ionization electrodes 11 is 100-300 mu m, and the distance between the collection electrode 8 and the second ionization plate is 200-500 mu m.

The grid width of the collecting electrode 8 is 50-100 μm. The number of the grids of the collecting electrodes 8 is 50-100.

The area of the first induction polar plate 1 (left polar plate) facing to the first induction polar plate is 1cm²The positive area of the ionization electrode 11 is 50-100 mm²The area of the collecting electrode 8 opposite to the ionizing electrode 11 is 70-150 mm²。

The electron current leading-out hole 7 of the second ionization polar plate 6 is circular. The grid of collecting electrodes 8 is rectangular.

The invention also provides a three-dimensional electromagnetic field sensor, which comprises the integrated carbon nano tube film electromagnetic field sensor in each dimension direction.

The invention is further described with reference to the following drawings and specific embodiments.