阅读说明：本技术 用于低密度材料的芯片级感测装置 (Chip-scale sensing device for low-density materials ) 是由 J·C·巴特 J·C·程 R·I·奥尔森 于 2019-01-22 设计创作，主要内容包括：一种针对各种应用的在芯片级上高效地且经济地生产的电化学传感器装置被公开。在一些方面,所述装置是在晶圆技术上或者使用晶圆技术制作的,由此传感器室是通过所述晶圆创建的,并且气体端口允许传感器的工作电极检测某些气体。通过使用晶圆技术,大规模生产是可能的,其中单个传感器是从一个或更多个共用晶圆生产的。集成电路在晶圆中或晶圆上被以集成的方式制作以使得晶圆为集成电路系统和互连部分提供基板、而且还提供其中设置气体传感器的室的限定。(An electrochemical sensor device efficiently and economically produced on a chip scale for various applications is disclosed. In some aspects, the device is fabricated on or using wafer technology, whereby a sensor chamber is created through the wafer, and the gas port allows the working electrode of the sensor to detect certain gases. By using wafer technology, mass production is possible, where individual sensors are produced from one or more common wafers. Integrated circuits are fabricated in or on a wafer in an integrated manner such that the wafer provides a substrate for integrated circuit systems and interconnects, but also provides a definition of a chamber in which the gas sensor is disposed.)