阅读说明：本技术 一种基于荷电水雾相变强化so3团聚脱除的装置 (SO strengthening method based on charged water mist phase change3Device for removing agglomeration ) 是由 陈招妹 刘含笑 王剑波 舒英钢 崔盈 孙善 王淦 李春 刘美玲 郭高飞 于 2020-05-19 设计创作，主要内容包括：本发明提出了一种基于荷电水雾相变强化SO<Sub>3</Sub>团聚脱除的装置,包括沿烟气处理方向依次设置的进口端、导流区、荷电水雾区、湿式电除尘器、除雾区和出口端,所述荷电水雾区上配设有第一供电电源,所述第一供电电源为荷电水雾区提供高压负电,所述荷电水雾区内均布有若干组荷电环和若干组第一喷嘴,所述荷电环设置于第一喷嘴喷射方向的一侧,所述湿式电除尘器内具有多个阳极板和阴极线,所述阳极板和阴极线相互平行设置,所述阳极板与相邻的阴极线之间形成电场通道,所述湿式电除尘器的上方设置有多个第二喷嘴,所述除雾区内设有除雾器。该装置提高了湿式电除尘器对SO<Sub>3</Sub>的适用范围,在SO<Sub>3</Sub>的浓度达50～100mg/m<Sup>3</Sup>时,电除尘性能不会降低。(The invention provides a phase change reinforced SO based on charged water mist 3 The device of reunion desorption, including entrance point, water conservancy diversion district, charged fog district, wet-type electrostatic precipitator, defogging district and the exit end that sets gradually along the flue gas treatment direction, it has first power supply to set on the charged fog district, first power supply provides the high-voltage negative electricity for charged fog district, the equipartition has a plurality of groups of charge ring and a plurality of first nozzles of group in the charged fog district, the charge ring sets up in one side of first nozzle injection direction, have a plurality of anode plates and negative electrode in the wet-type electrostatic precipitatorPolar line, anode plate and the mutual parallel arrangement of negative pole line, form the electric field passageway between anode plate and the adjacent negative pole line, wet-type electrostatic precipitator's top is provided with a plurality of second nozzles, be equipped with the defroster in the defogging district. The device improves the SO ratio of the wet-type electric dust collector 3 Application scope of (1) in SO 3 The concentration of the water-soluble organic solvent is 50-100 mg/m 3 In time, the electric dust removal performance is not reduced.)

1. SO strengthening method based on charged water mist phase change₃The device of reunion desorption, its characterized in that: comprises an inlet end (1), a flow guide area (2), a charged water mist area (3), a wet electric dust collector (4), a demisting area (5) and an outlet end (6) which are sequentially arranged along the smoke treatment direction, wherein a first power supply (31) is arranged on the charged water mist area (3), the first power supply (31) provides high-voltage negative electricity for the charged water mist area (3), a plurality of groups of charged rings (32) and a plurality of groups of first nozzles (33) are uniformly distributed in the charged water mist area (3), the charged rings (32) are arranged on one side of the spraying direction of the first nozzles (33), a plurality of anode plates (41) and cathode wires (42) are arranged in the wet electric dust collector (4) in parallel, an electric field channel is formed between each anode plate (41) and the adjacent anode plate wire (42), a plurality of second nozzles (43) are arranged above the wet electric dust collector (4), a demister is arranged in the demisting zone (5).

2. The phase change enhanced SO based on charged water mist according to claim 1₃The device of reunion desorption, its characterized in that: the charged water mist area (3) is further provided with an ultrasonic atomizer, the ultrasonic atomizer is connected with the first nozzles (33) through a plurality of water mist spray pipes, the charging ring (32) is arranged at the front end of the spraying direction of the first nozzles (33), so that mist drops sprayed by the first nozzles (33) are charged with negative electricity instantly, and the temperature of the mist drops sprayed by the first nozzles (33) is lower than that of smoke.

3. The charged water mist-based phase change enhanced SO according to claim 1 or 2₃The device of reunion desorption, its characterized in that: the first power supply (31) provides 75kV high-voltage negative electricity for the charged water mist area (3), and the charged ring (32) is connected with the first power supply (31) so that small-particle-size filterable particles and sulfuric acid aerosol particles in the smoke passing through the charged water mist area (3) are charged and agglomerated.

4. A process as claimed in claim 1SO strengthening based on charged water mist phase change₃The device of reunion desorption, its characterized in that: two groups of charge rings (32) which are distributed in a staggered manner are arranged in the charge fog area (3) along the smoke treatment direction, and each group of charge rings (32) consists of a plurality of charge rings (32) which are uniformly distributed in the area where the cross section of the internal channel of the charge fog area (3) is located.

5. The phase change enhanced SO based on charged water mist according to claim 1₃The device of reunion desorption, its characterized in that: the flow guide area (2) is in a horn mouth shape, the cross section area of the flow guide area (2) is gradually increased along the flue gas treatment direction, a plurality of first flow guide plates (21) which are obliquely arranged are arranged in the flow guide area (2), a flow guide channel is formed between every two adjacent first flow guide plates (21), and the cross section area of the flow guide channel is gradually increased along the flue gas conveying direction.

6. The phase change enhanced SO based on charged water mist according to claim 1₃The device of reunion desorption, its characterized in that: the demisting area (5) is in a horn mouth shape, and the cross-sectional area of the demisting area (5) is gradually reduced along the flue gas treatment direction.

7. The phase change enhanced SO based on charged water mist according to claim 1₃The device of reunion desorption, its characterized in that: wet-type electrostatic precipitator (4) link to each other with power (40), the below of wet-type electrostatic precipitator (4) is equipped with a plurality of water catch bowl (44), second nozzle (43) set up in the top of anode plate (41) and negative pole line (42), second nozzle (43) link to each other with spraying system, and spraying system provides alkali lye for second nozzle (43) through the shower.

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of electric power environmental protection, in particular to a phase change strengthening SO based on charged water mist₃A device for removing the agglomeration.

[ background of the invention ]

During the combustion of coal, a portion of the elemental sulfur is converted directly to sulfur trioxide (SO)₃) A portion of sulfur dioxide (SO)₂) Is oxidized by catalytic reduction at high temperature to be converted into sulfur trioxide (SO)₃). The sulfur trioxide reaches a certain concentration, and is easily discharged into the atmosphere to cause environmental pollution, so that the haze is aggravated. After sulfur trioxide enters the wet desulphurization tower, aerosol is formed and is discharged through a chimney to form blue smoke plume, which is a main reason for causing acid rain. Currently for SO₃The efficiency of the removal equipment is low, and is generally only about 20%.

Conventional wet electric dust collector as inlet SO₃At too high a level, e.g. above 50mg/m³Not only can make SO₃The removal efficiency is reduced, and the space charge effect of aerosol particles can also influence discharge electrode dischargeSO that the particle removal performance is greatly reduced and the particle emission is difficult to reach the standard, and the charged water mist phase change based reinforced SO₃A device for removing the agglomeration.

[ summary of the invention ]

The invention aims to solve the problems in the prior art and provides a phase change strengthening SO based on charged water mist₃The device for removing the agglomeration can improve the SO of the wet-type electric precipitator₃Application scope of (1) in SO₃The concentration of the water-soluble organic solvent is 50-100 mg/m³In time, the electric dust removal performance is not reduced.

In order to achieve the purpose, the invention provides a phase change strengthening SO based on charged water mist₃The device of reunion desorption, including entrance point, water conservancy diversion district, the electric charge fog district that sets gradually along the flue gas treatment direction, wet-type electrostatic precipitator, defogging district and exit end, set first power supply on the electric charge fog district, first power supply provides high-voltage negative electricity for the electric charge fog district, the equipartition has a plurality of groups charge ring and a plurality of groups of first nozzle in the electric charge fog district, the charge ring sets up in one side of first nozzle injection direction, a plurality of anode plates and negative pole line have in the wet-type electrostatic precipitator, anode plate and negative pole line parallel arrangement each other, form electric field channel between anode plate and the adjacent negative pole line, the top of wet-type electrostatic precipitator is provided with a plurality of second nozzles, be equipped with the defroster in the defogging district.

Preferably, the charged water mist area is further provided with an ultrasonic atomizer, the ultrasonic atomizer is connected with the first nozzles through a plurality of water mist spray pipes, the charging ring is arranged at the front end of the spraying direction of the first nozzles, so that mist droplets sprayed by the first nozzles are charged with negative electricity instantly, and the temperature of the mist droplets sprayed by the first nozzles is lower than that of flue gas.

Preferably, the first power supply provides 75kV high-voltage negative electricity for the charged water mist area, and the charging ring is connected with the first power supply, so that small-particle-size filterable particles and sulfuric acid aerosol particles in the flue gas passing through the charged water mist area are subjected to charge agglomeration.

Preferably, two groups of charge rings which are distributed in a staggered manner are arranged in the charged fog region along the flue gas treatment direction, and each group of charge rings consists of a plurality of charge rings which are uniformly distributed in the region of the cross section of the internal channel of the charged fog region.

Preferably, the flow guide area is in a bell mouth shape, the cross-sectional area of the flow guide area is gradually increased along the flue gas treatment direction, a plurality of first flow guide plates which are obliquely arranged are arranged in the flow guide area, a flow guide channel is formed between every two adjacent first flow guide plates, and the cross-sectional area of the flow guide channel is gradually increased along the flue gas conveying direction.

Preferably, the demisting area is in a bell mouth shape, and the cross-sectional area of the demisting area is gradually reduced along the flue gas treatment direction.

Preferably, wet-type electrostatic precipitator links to each other with the power, wet-type electrostatic precipitator's below is equipped with a plurality of catch basins, the second nozzle sets up in the top of anode plate and negative pole line, the second nozzle links to each other with spraying system, and spraying system provides alkali lye for the second nozzle through the shower.

The invention has the beneficial effects that: according to the invention, the charged water mist region is arranged, so that the charged water mist can effectively promote the charging agglomeration of small-particle-size filterable particles and sulfuric acid aerosol particles, and the small-temperature-difference cooling process can promote the agglomeration of condensable particles; finally, fine particles, sulfuric acid aerosol particles and condensable particles are efficiently removed through a wet-type electric dust collector, and the particles reaching a certain cutting particle size are efficiently removed together with liquid drops by the efficient demister, so that the particles are effectively prevented from escaping. The PM2.5 removal efficiency of the device can reach more than 80 percent, and the device can condense particulate matters (containing SO)₃) The removal rate can reach more than 70 percent, and the SO content of the wet-type electric precipitator is effectively improved₃Application scope of (1) in SO₃The concentration of the water-soluble organic solvent is 50-100 mg/m³In time, the electric dust removal performance is not reduced. The device is suitable for waste gas treatment in various industries such as coal-fired power plants, chemical industry, metallurgy, cement and the like, and can obviously reduce the emission of blue smoke plume.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a schematic representation of a base of the present inventionStrengthening SO in charged water mist phase change₃The internal structure of the device for removing the agglomeration is shown schematically.

[ detailed description ] embodiments

Referring to FIG. 1, the invention relates to a phase change strengthening SO based on charged water mist₃The device of reunion desorption, include entrance point 1, water conservancy diversion district 2, lotus electric fog district 3, wet-type electrostatic precipitator 4, defogging district 5 and the exit end 6 that sets gradually along the flue gas treatment direction, the last first power supply 31 that has set of lotus electric fog district 3, first power supply 31 provides the high-voltage negative electricity for lotus electric fog district 3, the equipartition has a plurality of groups charge ring 32 and a plurality of groups first nozzle 33 in the lotus electric fog district 3, charge ring 32 sets up in one side of first nozzle 33 injection direction, a plurality of anode plates 41 and negative pole line 42 have in the wet-type electrostatic precipitator 4, anode plate 41 and negative pole line 42 are parallel to each other and set up, form the electric field passageway between anode plate 41 and the adjacent negative pole line 42, the top of wet-type electrostatic precipitator 4 is provided with a plurality of second nozzles 43, be equipped with the defroster in the defogger 5.

Further, the charged mist region 3 is further provided with an ultrasonic atomizer, the ultrasonic atomizer is connected with the first nozzles 33 through a plurality of mist nozzles, the charging ring 32 is arranged at the front end of the spraying direction of the first nozzles 33, so that the mist droplets sprayed by the first nozzles 33 are charged with negative electricity instantly, and the temperature of the mist droplets sprayed by the first nozzles 33 is lower than that of the flue gas. The first power supply 31 provides 75kV high-voltage negative electricity for the charged water mist area 3, and the charging ring 32 is connected with the first power supply 31, so that small-particle-size filterable particles and sulfuric acid aerosol particles in the smoke passing through the charged water mist area 3 are subjected to charged agglomeration.

Furthermore, two groups of charge rings 32 which are distributed in a staggered manner are arranged in the charged fog region 3 along the flue gas treatment direction, and each group of charge rings 32 is composed of a plurality of charge rings 32 which are uniformly distributed in the region of the cross section of the channel in the charged fog region 3.

Further, the flow guide area 2 is in a horn mouth shape, the cross-sectional area of the flow guide area 2 is gradually increased along the flue gas treatment direction, a plurality of first flow guide plates 21 which are obliquely arranged are arranged in the flow guide area 2, a flow guide channel is formed between every two adjacent first flow guide plates 21, and the cross-sectional area of the flow guide channel is gradually increased along the flue gas conveying direction.

Further, the demisting area 5 is in a horn mouth shape, and the cross-sectional area of the demisting area 5 is gradually reduced along the flue gas treatment direction.

Further, wet-type electrostatic precipitator 4 links to each other with power 40, wet-type electrostatic precipitator 4's below is equipped with a plurality of water catch bowl 44, second nozzle 43 sets up in the top of anode plate 41 and negative pole line 42, second nozzle 43 links to each other with spraying system, and spraying system provides alkali lye for second nozzle 43 through the shower.

The working process of the invention is as follows:

the invention relates to a phase change strengthening SO based on charged water mist₃The working process of the device for removing the agglomeration is as follows: the flue gas enters from an inlet end 1, is guided by a guide area 2 and enters a charged water mist area 3; the charged water mist area 3 supplies power to the charge ring 32 through 75kV high-voltage negative electricity, and the charge ring 32 is arranged at the front end of the spraying direction of the first nozzle 33, so that mist drops sprayed by the first nozzle 33 are instantaneously charged with negative electricity; the charged water mist can effectively promote the charging agglomeration of small-particle-size filterable particles and sulfuric acid aerosol particles, and the condensation of condensable particles can be promoted in the small-temperature-difference cooling process; the final fine particles, sulfuric acid aerosol particles and condensable particles are efficiently removed through the wet electric dust collector 4, the particles reaching a certain cutting particle size are efficiently removed together with liquid drops through the efficient demister in the demisting area 5, the particles can be effectively prevented from escaping, and the treated flue gas is discharged through the outlet end 6.

The device is suitable for waste gas treatment in various industries such as coal-fired power plants, chemical industry, metallurgy, cement and the like, and can obviously reduce the emission of blue smoke plume. The PM2.5 removal efficiency can reach more than 80 percent, and particles (containing SO) can be condensed₃) The removal rate can reach more than 70 percent, and the SO content of the wet-type electric dust collector can be effectively improved₃Application scope of (1) in SO₃The concentration of the water-soluble organic solvent is 50-100 mg/m³In time, the electric dust removal performance of the wet electric dust remover cannot be reduced.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.