阅读说明：本技术 一种用于立式炉的炉门控制装置和立式炉 (Furnace door control device for vertical furnace and vertical furnace ) 是由 光耀华 于 2020-06-05 设计创作，主要内容包括：本发明提供一种用于立式炉的炉门控制装置,包括升降组件和旋转组件,升降组件用于驱动炉门沿第一方向运动；旋转组件包括气缸、驱动配合机构和限位机构,旋转组件用于通过气缸驱动炉门沿第二方向旋转,且旋转组件在驱动炉门沿第二方向旋转的过程中,将气缸的伸缩运动转换为驱动配合机构的机械运动,以使驱动配合机构带动炉门沿第二方向旋转,限位机构用于在炉门处在炉门关闭位置时,保持驱动配合机构的位置不变,其中,第一方向与第二方向垂直用于立式炉的炉门控制装置。在本发明提供的用于立式炉的炉门控制装置能够消除炉门意外打开的隐患,提高立式炉的安全性。本发明还提供一种立式炉。(The invention provides a furnace door control device for a vertical furnace, which comprises a lifting assembly and a rotating assembly, wherein the lifting assembly is used for driving a furnace door to move along a first direction; the rotating assembly comprises an air cylinder, a driving matching mechanism and a limiting mechanism, the rotating assembly is used for driving the furnace door to rotate along the second direction through the air cylinder, in the process of driving the furnace door to rotate along the second direction, the telescopic motion of the air cylinder is converted into the mechanical motion of the driving matching mechanism, so that the driving matching mechanism drives the furnace door to rotate along the second direction, the limiting mechanism is used for keeping the position of the driving matching mechanism unchanged when the furnace door is located at the position where the furnace door is closed, and the first direction and the second direction are perpendicular to be used for the furnace door control device of the vertical furnace. The furnace door control device for the vertical furnace can eliminate the hidden trouble of accidental opening of the furnace door and improve the safety of the vertical furnace. The invention also provides a vertical furnace.)

1. The furnace door control device for the vertical furnace is characterized by comprising a lifting assembly and a rotating assembly, wherein the lifting assembly is used for driving a furnace door to move along a first direction; the rotating assembly comprises an air cylinder, a driving matching mechanism and a limiting mechanism connected with the driving matching mechanism, the rotating assembly is used for driving the furnace door to rotate along a second direction through the air cylinder, in the process of driving the furnace door to rotate along the second direction, the rotating assembly converts telescopic motion of the air cylinder into mechanical motion of the driving matching mechanism so as to enable the driving matching mechanism to drive the furnace door to rotate along the second direction, and the limiting mechanism is used for keeping the position of the driving matching mechanism unchanged when the furnace door is located at the position where the furnace door is closed, wherein the first direction is perpendicular to the second direction.

2. The oven door control device according to claim 1, wherein the rotating assembly further comprises a rotating shaft extending along the first direction, one end of the rotating shaft is used for being fixedly connected with the oven door, the other end of the rotating shaft is connected with the lifting assembly, the lifting assembly drives the oven door to move along the first direction through the rotating shaft, the drive matching mechanism comprises a transverse moving element and a rotating element, the rotating element is fixedly arranged on the rotating shaft, and the transverse moving element can be driven by the air cylinder of the rotating assembly to move and drive the rotating element and the rotating shaft to rotate around the axis of the rotating shaft.

3. The oven door control device according to claim 2, wherein the lateral moving member is a rack, the rotating member is a gear, the gear is disposed around the rotating shaft, the rack is engaged with the gear, and when the rack moves, the rack drives the gear and the rotating shaft to rotate.

4. The oven door control device of claim 2, wherein the limit mechanism comprises at least one resilient limit mechanism connected to the lateral moving member for maintaining the position of the lateral moving member when the oven door is in the oven door closed position.

5. The oven door control device according to claim 4, wherein when the number of the elastic force limiting mechanisms is two, the two elastic force limiting mechanisms are respectively disposed at both ends of the lateral moving member, and when the lateral moving member is at the oven door closing position, the forces applied to the lateral moving member by the two elastic force limiting mechanisms are equal in magnitude and opposite in direction.

6. The oven door control device of claim 4, wherein each of the elastic force limiting mechanisms comprises a spring guide post having one end connected to the lateral moving member, a spring disposed around the spring guide post, a position adjusting member disposed on the spring guide post, and a limiting block disposed at the other end of the spring guide post, wherein the spring is disposed between the position adjusting member and the limiting block, and the position of the position adjusting member on the spring guide post is adjustable.

7. The oven door control device according to claim 6, wherein the rotary assembly further comprises a rotary shaft seat having a rotary shaft hole penetrating therethrough in the first direction, the rotary shaft being disposed in the rotary shaft hole and rotatable therein, the stopper being fixedly disposed on the rotary shaft seat.

8. The oven door control device according to claim 6, wherein a guide hole is formed on the stopper, the stopper passes through the guide hole and the spring guide post, and the spring guide post passes through the guide hole all the time when the lateral moving member moves.

9. The oven door control device of claim 6, wherein one of the stoppers is provided with a door closing stopper, and when one end of the lateral moving member contacts the door closing stopper, the oven door is in the oven door closing position.

10. The oven door control device according to any one of claims 2 to 9, wherein the lifting assembly comprises a lifting mechanism and a traction mechanism, the lifting mechanism is connected with the rotating shaft through the traction mechanism and drives the rotating shaft to move along the first direction.

11. A vertical furnace, comprising a furnace door control device, a furnace body and a furnace door, wherein the furnace door control device is used for driving the furnace door to move relative to the furnace body, and the vertical furnace is characterized in that the furnace door control device is the furnace door control device according to any one of claims 1 to 10, and the first direction is consistent with the height direction of the furnace body.

Technical Field

The invention relates to the field of semiconductor equipment, in particular to a furnace door control device for a vertical furnace and the vertical furnace.

Background

The vertical diffusion furnace (commonly called vertical furnace) is one of important process equipment in a semiconductor production line and comprises a control system, a boat inlet and outlet system, a furnace body, a gas control system and the like, wherein the furnace body is the core of the whole equipment, a furnace door is used as an auxiliary mechanism of the furnace body, and the furnace door has the main functions of isolating high-temperature radiation of a reaction chamber to a microenvironment and protecting devices in the microenvironment from high-temperature damage.

However, the existing movement mechanism for driving the vertical furnace door has poor reliability and short service life, and the problem of accidental opening of the furnace door easily occurs after long-time use in a high-temperature environment, thereby causing serious production accidents. Therefore, how to provide a safe and reliable furnace door movement mechanism becomes a technical problem to be solved urgently in the field.

Disclosure of Invention

The invention aims to provide a furnace door control device for a vertical furnace and the vertical furnace.

To achieve the above objects, as one aspect of the present invention, there is provided an oven door control device for a vertical oven, the oven door control device including a lifting assembly for driving an oven door to move in a first direction and a rotating assembly; the rotating assembly comprises an air cylinder, a driving matching mechanism and a limiting mechanism connected with the driving matching mechanism, the rotating assembly is used for driving the furnace door to rotate along a second direction through the air cylinder, in the process of driving the furnace door to rotate along the second direction, the rotating assembly converts telescopic motion of the air cylinder into mechanical motion of the driving matching mechanism so as to enable the driving matching mechanism to drive the furnace door to rotate along the second direction, and the limiting mechanism is used for keeping the position of the driving matching mechanism unchanged when the furnace door is located at the position where the furnace door is closed, wherein the first direction is perpendicular to the second direction.

Preferably, the rotating assembly further includes a rotating shaft, the rotating shaft extends along the first direction, one end of the rotating shaft is used for being fixedly connected with the oven door, the other end of the rotating shaft is connected with the lifting assembly, the lifting assembly drives the oven door to move along the first direction through the rotating shaft, the driving matching mechanism includes a transverse moving piece and a rotating piece, the rotating piece is fixedly arranged on the rotating shaft, and the transverse moving piece can be driven by the cylinder of the rotating assembly to move and drive the rotating piece and the rotating shaft to rotate around the axis of the rotating shaft.

Preferably, the transverse moving member is a rack, the rotating member is a gear, the gear is arranged on the rotating shaft in a surrounding manner, the rack is meshed with the gear, and when the rack moves, the rack drives the gear and the rotating shaft to rotate.

Preferably, the limit mechanism comprises at least one elastic limit mechanism connected with the transverse moving piece, and the elastic limit mechanism is used for keeping the position of the transverse moving piece unchanged when the oven door is in the oven door closing position.

Preferably, when the number of the elastic limiting mechanisms is two, the two elastic limiting mechanisms are respectively arranged at two ends of the transverse moving piece, and when the transverse moving piece is located at the furnace door closing position, the force applied by the two elastic limiting mechanisms to the transverse moving piece is equal in magnitude and opposite in direction.

Preferably, each elasticity stop gear all includes one end with the spring guide post that the lateral movement piece is connected, encircle the spring that the spring guide post set up, set up in position control spare on the spring guide post and be located the stopper of spring guide post other end, wherein, the spring is located between position control spare and the stopper, position control spare is in the position of spring guide post is adjustable.

Preferably, the rotating assembly further comprises a rotating shaft seat, the rotating shaft seat is provided with a rotating shaft hole, the rotating shaft hole penetrates through the rotating shaft seat along the first direction, the rotating shaft is arranged in the rotating shaft hole and can rotate in the rotating shaft hole, and the limiting block is fixedly arranged on the rotating shaft seat.

Preferably, a guide hole is formed in the limiting block, the limiting block penetrates through the spring guide post through the guide hole, and when the transverse moving part moves, the spring guide post always penetrates through the guide hole.

Preferably, one of the limit blocks is provided with a door closing limit block, and when one end of the transverse moving member contacts with the door closing limit block, the oven door is located at the oven door closing position.

Preferably, the lifting assembly comprises a lifting mechanism and a traction mechanism, and the lifting mechanism is connected with the rotating shaft through the traction mechanism and drives the rotating shaft to move along the first direction.

As a second aspect of the present invention, there is provided a vertical furnace, including a furnace door control device, a furnace body, and a furnace door, wherein the furnace door control device is configured to drive the furnace door to move relative to the furnace body, and the furnace door control device is the furnace door control device, and the first direction is consistent with a height direction of the furnace body.

In the furnace door control device for the vertical furnace and the vertical furnace provided by the invention, the lifting assembly and the rotating assembly respectively and independently operate, the lifting assembly is used for driving the lifting motion of the furnace door along a first direction (vertical direction), the rotating assembly is used for driving the furnace door to rotate along a second direction (horizontal direction), and in the embodiment of the invention, the limiting mechanism is matched with the driving matching mechanism, so that the position of the driving matching mechanism is kept unchanged when the furnace door is at the furnace door closing position, the furnace door is prevented from being accidentally opened, and the safety of the vertical furnace is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural view of a furnace door control device for a vertical furnace and the vertical furnace according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of the oven door control for a vertical oven shown in FIG. 1 from another perspective;

fig. 3 is a schematic structural view of a first guide mechanism in an oven door control device for a vertical oven according to an embodiment of the present invention;

fig. 4 is a schematic view of a position limiting mechanism in an oven door control device for a vertical oven according to an embodiment of the present invention;

FIG. 5(a) is a cross-sectional view of the spacing mechanism shown in FIG. 4;

FIG. 5(b) is a top view of the spacing mechanism shown in FIG. 5 (a);

fig. 6 to 8 are schematic diagrams illustrating a rotary assembly driving an oven door to swing in an oven door control device for a vertical oven according to an embodiment of the present invention;

fig. 9 to 10 are schematic views illustrating a lifting assembly driving a door to lift and lower in a door control apparatus for a vertical furnace according to an embodiment of the present invention;

fig. 11 is a schematic structural diagram of a traction mechanism in an oven door control device for a vertical oven according to an embodiment of the present invention.

Description of the reference numerals

100: the lifting component 110: lifting mechanism

120: the pulling mechanism 121: first connector

122: second connector 123: sliding connector

123 a: sliding connection portion 130: lifting seat

140: first guide mechanism 141: guide rod

142: the guide seat 200: rotating assembly

210: drive engagement mechanism 211: rack bar

212: gear 220: rotating shaft

230: the connecting member 231: rotating part

232: swing arm 240: rotating shaft seat

250: elastic force limiting mechanism 251: limiting block

252: spring guide column 253: position adjusting member

254: spring 261: door opening limiting part

262: door closing limit 270: axial positioning mechanism

281: air cylinder 282: pull rod

290: second guide mechanism 291: sliding block

292: guide rail 300: furnace body

400: furnace door

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.

The closing movement of the furnace door is mainly divided into two actions, namely firstly swinging the furnace door to the position of the furnace opening and making the furnace door concentric with the furnace opening, then lifting the furnace door to seal the furnace opening, and ensuring the locking state. In the prior art, a movement mechanism of the oven door drives an oven door swing arm to open and close along a spirally rising movement track through a rotary cylinder. Specifically, the rotary air cylinder is connected with the furnace door through a spline shaft, the furnace door rotates or goes up and down along with the spline shaft, when the rotary air cylinder drives the spline shaft to rotate along the axis of the spline shaft, the spline shaft on the spline shaft moves in a spiral guide groove in the inner wall of the bearing seat, the integral spline shaft is driven to reciprocate in the vertical direction, and the spline shaft drives the furnace door to simultaneously complete the lifting and rotating motion through the superposition of horizontal motion and vertical motion. The furnace door movement mechanism occupies small space and consumes low energy, so the furnace door movement mechanism is widely applied to the existing vertical furnace equipment.

However, after experimental research, the inventor of the present invention found that, because the lifting and the rotation of the furnace door are both driven by the same rotary cylinder, the door closing position of the furnace door is only realized by closing the air passage of the rotary cylinder, and once the air pipe is aged or the joint is loosened, which causes the air tightness of the rotary cylinder to be reduced, the pressure inside the rotary cylinder is released, which is not enough to bear the weight of the furnace door, so that the furnace door is automatically opened, and serious production accidents are caused.

In order to solve the above technical problems, as one aspect of the present invention, there is provided an oven door control device for a vertical oven, as shown in fig. 1, 2 and 9, the oven door control device for a vertical oven includes a lifting assembly 100 and a rotating assembly 200, the lifting assembly 100 is used for driving an oven door 400 to move in a first direction (i.e., a direction indicated by a double-headed arrow in fig. 1), and the rotating assembly 200 includes an air cylinder 281, a driving engagement mechanism 210 and a limiting mechanism connected to the driving engagement mechanism 210. The rotating assembly 200 is configured to drive the oven door 400 to rotate along the second direction through the air cylinder 281, and in the process of driving the oven door 400 to rotate along the second direction, the rotating assembly 200 converts the telescopic motion of the air cylinder 281 into a mechanical motion of the driving matching mechanism 210, so that the driving matching mechanism 210 drives the oven door 400 to rotate along the second direction. The position limiting mechanism is used for keeping the position of the driving matching mechanism 210 unchanged when the oven door 400 is at the oven door closing position, wherein the first direction is vertical to the second direction (ideally, the lifting assembly 100 drives the oven door 400 to move along the vertical direction, and the rotating assembly 200 drives the oven door 400 to rotate along the arc-shaped path extending horizontally).

In the oven door control device for the vertical oven provided by the embodiment of the invention, the lifting assembly 100 and the rotating assembly 200 are respectively operated independently, the lifting assembly 100 is responsible for driving the lifting movement of the oven door 400 along the vertical direction (the first direction), the rotating assembly 200 is responsible for driving the oven door 400 to rotate along the horizontal plane, and in the embodiment of the invention, the limiting mechanism is adopted to be matched with the driving matching mechanism, so that the position of the driving matching mechanism is kept unchanged when the oven door is at the oven door closing position, the oven door is prevented from being opened accidentally, and the safety of the vertical oven is improved.

The embodiment of the present invention is not particularly limited how the rotating assembly 200 and the lifting assembly 100 are respectively connected to the oven door 400, for example, as shown in fig. 2 and 6, the rotating assembly 200 further includes a rotating shaft 220, the rotating shaft 220 extends along a first direction, one end of the rotating shaft 220 is used for being fixedly connected to the oven door 400, the other end of the rotating shaft 220 is connected to the lifting assembly 100, and the lifting assembly 100 drives the oven door to move along the first direction through the rotating shaft 220.

In order to increase the swing amplitude of the oven door 400, preferably, as shown in fig. 2 and 6, the rotating assembly 200 further comprises a connecting member 230, one end of the connecting member 230 is fixedly connected with the rotating shaft 220, and the other end of the connecting member 230 is used for being fixedly connected with the oven door 400 of the vertical oven.

The structure of the connection member 230 is not particularly limited in the embodiments of the present invention, for example, in order to reduce the moment of inertia of the connection member 230 and ensure the accuracy of the axial position of the rotating shaft 220, as shown in fig. 1 and 9, the connection member 230 includes a rotating portion 231 and a swing arm 232 connected to each other, wherein the rotating portion 231 is fixedly connected to the rotating shaft 220, and the swing arm 232 is fixedly connected to the oven door 400.

The embodiment of the present invention does not specifically limit how to maintain the axial position of the rotating shaft 220, for example, as shown in fig. 1, 2, and 9, the rotating assembly 200 further includes a rotating shaft base 240, the rotating shaft base 240 has a rotating shaft hole, the rotating shaft hole penetrates through the rotating shaft base 240 along the first direction, and the rotating shaft 220 is disposed in the rotating shaft hole and can rotate in the rotating shaft hole.

The structure of the driving engagement mechanism 210 is not particularly limited in the embodiment of the present invention, as long as it can convert the motion of the air cylinder 281 into a rotational motion, for example, the driving engagement mechanism 210 may include a transverse motion member and a rotation member, the rotation member is fixedly disposed on the rotation shaft 220, the transverse motion member can move in the second direction under the driving of the air cylinder of the rotation assembly 200 and drives the rotation member and the rotation shaft 220 to rotate around the axis of the rotation shaft 220. In some embodiments of the present invention, the transverse moving member may be a belt extending in the second direction or another elongated object with a certain roughness, and the transverse moving member can rub against the rotating member during the movement in the horizontal direction, so that the rotating member drives the rotating shaft 220 to rotate.

In order to improve the accuracy of controlling the rotation angle of the oven door 400, it is preferable that, as shown in fig. 1, 2 and 9, the lateral moving member is a rack 211, the rotating member is a gear 212, the gear 212 is disposed around the rotating shaft 220, and the rack 211 is engaged with the gear 212, so that when the rack 211 moves, the gear 212 and the rotating shaft 220 can be driven to rotate.

In the embodiment of the present invention, the driving engagement mechanism 210 includes the rack 211 and the gear 212, and the engagement between the rack 211 and the gear 212 converts the movement of the rack 211 in the horizontal plane (i.e., the direction of the double arrow in fig. 2) into the rotational movement of the gear 212 and the rotating shaft 220, so that the rotation angle of the rotating shaft 220 can be precisely controlled by controlling the distance that the rack 211 moves in the linear direction (i.e., the telescopic distance of the air cylinder 281), thereby improving the accuracy of controlling the movement position of the oven door.

For example, as shown in fig. 2, 6 to 8, the driving and matching mechanism 210 may further include a pull rod 282, and an output rod of the air cylinder 281 is connected to the rack 211 through the pull rod 282 to drive the rack 211 to reciprocate along the horizontal direction, so as to drive the gear 212 and the rotating shaft 220 to rotate and drive the oven door 400 to rotate and swing in the horizontal plane.

To further improve the safety of the vertical furnace, as shown in fig. 2, 4, 5(a) and 5(b), the limiting mechanism includes at least one elastic limiting mechanism 250 connected to the lateral moving member, and the elastic limiting mechanism 250 is used for keeping the position of the lateral moving member unchanged when the furnace door is in the furnace door closing position.

The present invention does not specifically limit how the elastic force limiting mechanism 250 maintains the door 400 at the door closed position, for example, as an alternative embodiment of the present invention, as shown in fig. 2, 4, 5(a) and 5(b), the rotation assembly 200 includes two elastic force limiting mechanisms 250, the two elastic force limiting mechanisms 250 are respectively disposed at both ends of the lateral moving member, and when the lateral moving member is at the door closed position, the forces applied by the two elastic force limiting mechanisms 250 to the lateral moving member are equal in magnitude and opposite in direction.

The structure of the elastic force limiting mechanisms 250 is not particularly limited, for example, as an alternative embodiment of the present invention, as shown in fig. 2, 4, 5(a) and 5(b), each elastic force limiting mechanism 250 includes a spring guide post 252 having one end connected to the lateral moving member, a spring 254 disposed around the spring guide post 252, a position adjusting member 253 disposed on the spring guide post 252, and a position limiting block 251 disposed at the other end of the spring guide post 252, wherein the spring 254 is disposed between the position adjusting member 253 and the position limiting block 251, and the position of the position adjusting member 253 on the spring guide post 252 is adjustable.

It should be noted that the position between the limiting block 251 and the cylinder body of the air cylinder 281 is fixed, for example, in the case that the rotation assembly 200 further includes the rotation shaft seat 240, the limiting block 251 is fixedly disposed on the rotation shaft seat 240.

In the embodiment of the present invention, the lateral moving member is provided with springs 254 at both ends thereof, and the lateral moving member is provided with stoppers 251 at both sides thereof, and when the lateral moving member is at the door closing position, the springs 254 of the two elastic force stoppers 250 are engaged with the stoppers 251 to apply forces having the same magnitude and opposite directions to both sides of the lateral moving member.

The position adjuster 253 is used to adjust the telescopic length of the spring to achieve the effect of the present embodiment, for example, after the oven door control device is installed, an operator can rotate the oven door 400 to the oven door closing position and adjust the position of the position adjuster 253 on the guide post 252 of the spring 254, so that the telescopic degree of the springs on both sides meets the requirement that the elastic forces are equal and opposite.

The embodiment of the present invention does not specifically limit how the spring guiding post 252 is connected to the lateral moving member (the rack 211), for example, one end of the spring guiding post 252 may have an external thread, and the spring guiding post is fixedly connected to the lateral moving member (the rack 211) by screwing into a threaded hole on the lateral moving member. In the embodiment of the present invention, when the laterally moving member moves toward the stopper 251, the distance between the position-adjusting member 253 and the stopper 251 is reduced and the spring 254 is compressed, so that the spring 254 generates an opposite elastic force to drive the laterally moving member back to the original position.

In order to improve the reliability of the structure, as shown in fig. 4, 5(a) and 5(b), a guide hole is formed on the stopper 251, the stopper 251 is inserted through the guide hole on the guide post 252 of the spring 254, and when the lateral moving member moves, the guide post 252 of the spring always passes through the guide hole to prevent the spring 254 from being separated from the guide post 252 of the spring.

In order to improve the control force of the elastic force limiting mechanism 250 on the oven door, preferably, one end of the spring 254 is fixed on the corresponding limiting block 251, so that when the distance between the end of the rack 211 and the limiting block 251 exceeds the natural length of the spring 254, the spring 254 can generate a reverse pulling force to urge the rack 211 to perform a return movement.

To further improve the accuracy of controlling the position of the door, as shown in fig. 2, it is preferable that a door closing stopper 262 is provided on one stopper 251, and when one end of the lateral moving member is in contact with the door closing stopper 262, the door 400 is at the door closing position.

In another embodiment of the present invention, when the elastic force limiting mechanism 250 is disposed on only one side of the rack 211, the elastic force limiting mechanism 250 on the side can be engaged with the door closing limiting member 262, such as by using the spring 254 on one side of the rack 211 to press the rack 211 against the door closing limiting member 262 on the other side.

In order to further improve the safety of the vertical furnace, preferably, as shown in fig. 2, another limiting block 251 may further be provided with a door opening limiting member 261, and when one end of the lateral moving member contacts the door opening limiting member 261, the furnace door 400 is in a door opening position, so as to prevent the furnace door 400 from rotating excessively and colliding with the equipment rack or the housing to cause a safety accident when being opened.

The structure of the lifting assembly 100 is not particularly limited in the embodiments of the present invention, for example, as shown in fig. 1, 3, 4, and 9 to 10, the lifting assembly 100 includes a lifting mechanism 110 and a traction mechanism 120, and the lifting mechanism 110 is connected to the rotating shaft 220 through the traction mechanism 120 and drives the rotating shaft 220 to move along the first direction.

It should be noted that the lifting mechanism 110 is fixedly connected with the furnace body 300, for example, as shown in fig. 1, fig. 3, fig. 4, and fig. 9, the lifting assembly 100 may further include a lifting base 130 for fixedly connecting the lifting mechanism 110 with the furnace body 300, and when the lifting mechanism 110 works, the traction mechanism 120 drives the rotating shaft 220 and the furnace door 400 to approach or depart from the lifting base 130 along the first direction.

The structure of the pulling mechanism 120 is not particularly limited in the embodiment of the present invention, for example, as shown in fig. 1, 3, 4, 9, and 11, the pulling mechanism 120 includes a first connector 121, a second connector 122, and a plurality of sliding connectors 123, the first connector 121 is connected to the lifting mechanism 110, and the second connector 122 is connected to the rotating shaft 220.

One end of the second connector 122 departing from the rotating shaft 220 is provided with a connector, one side of the connector facing the rotating shaft 220 is provided with a first sliding surface A, the plurality of sliding connectors 123 surround the connectors of the first connector 121 and the second connector 122, one ends of the plurality of sliding connectors 123 are fixedly connected with the first connector 121, the other ends of the plurality of sliding connectors 123 are bent towards the surrounding center to form a sliding connection part 123a, one side of the sliding connection part 123a departing from the rotating shaft 220 is provided with a second sliding surface B, and the first sliding surface A is in contact with the second sliding surface B.

The embodiment of the present invention specifically defines the structure of the lifting mechanism 110, for example, the lifting mechanism 110 may be an air cylinder. In the embodiment of the present invention, the sliding connector 123 is formed as an L-shaped block, and catches the coupling head of the second connector 122 through the sliding coupling portion 123a, thereby movably coupling the output shaft of the elevating mechanism 110 with the rotating shaft 220.

In order to improve the stability of the rotation assembly 200 driving the rotation shaft 220 to rotate, preferably, as shown in fig. 1, 3 and 9, the rotation assembly 200 may further include an axial positioning mechanism 270, and the axial positioning mechanism 270 is disposed to match with the rotation shaft hole on the rotation shaft seat 240, and is used for movably connecting the rotation shaft 220 to the rotation shaft seat 240. Specifically, as shown in fig. 1, two sets of bearings are disposed in the axial positioning mechanism 270, the rotating shaft 220 sequentially passes through the two sets of bearings, and a positioning sleeve is further disposed on the rotating shaft 220 and located between the two sets of bearings, so as to maintain the relative position of the rotating shaft 220 and the rotating shaft base 240 in the first direction.

In order to improve the direction accuracy of the movement of the rotating shaft 220 in the first direction, preferably, as shown in fig. 3 and 9, the lifting assembly 100 further includes at least one first guide mechanism 140, the first guide mechanism 140 includes a guide rod 141 and a guide base 142, the guide base 142 is fixedly connected to the rotating shaft base 240, the guide rod 141 is fixedly connected to the lifting base 130, a guide hole extending in the first direction is formed in the guide base 142, and the guide rod 141 is fittingly inserted into the guide hole and can move in the guide hole.

The number of the first guide mechanisms 140 is not particularly limited in the embodiment of the present invention, for example, in order to simplify the structure of the apparatus while ensuring the accuracy of the moving direction of the rotating shaft 220, it is preferable that the lifting assembly 100 includes two first guide mechanisms 140, and the two first guide mechanisms 140 are respectively disposed at opposite sides of the rotating shaft 220, as shown in fig. 3 and 9.

In order to improve the accuracy of the moving direction of the rack 211, preferably, as shown in fig. 4, the rotating assembly 200 further includes a second guiding mechanism 290, the second guiding mechanism 290 includes a sliding block 291 and a guide rail 292, the guide rail 292 is fixedly connected with the rotating shaft base 240 and extends along the horizontal direction, and the sliding block 291 is fixedly connected with the rack 211 and can move on the guide rail 292 along the horizontal direction. The number of the sliding blocks 291 is not particularly limited in the embodiment of the present invention, for example, as shown in fig. 4, the second guiding mechanism 290 includes two sliding blocks 291.

As a second aspect of the present invention, there is provided a vertical furnace, as shown in fig. 1 and 9, including a furnace door control device for a vertical furnace, a furnace body 300, and a furnace door 400, wherein the furnace door control device for a vertical furnace is used for driving the furnace door 400 to move relative to the furnace body 300, and the furnace door control device for a vertical furnace is the furnace door control device for a vertical furnace provided in the previous embodiment, and the first direction is consistent with the height direction of the furnace body 300.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.